KR20180119004A - Device of controlling a blade - Google Patents

Abstract

A blade control device may include an RPM detection part, a memory, a lift unit driving part, and a control part. The control part may control the lift unit driving part so that a lift distance is further increased as much as an amount of wear obtained from a lookup table of the memory based on RPM detected from the RPM detection part.

Description

[0001] The present invention relates to a device for controlling a blade,

An embodiment relates to a blade control apparatus.

In the semiconductor field and display field, a cutting device called a dicing apparatus is used. After the substrate to be cut is placed on the work, the dicing apparatus cuts the substrate to a desired size using a blade rotated at a high speed.

The blade wears over time. When the blade is worn, the diameter of the blade becomes smaller as the blade wears.

When the worn blade is used in the cutting process as it is, there are the following problems.

First, when the cutting process by the worn blade is performed by using the number of revolutions set for the new blade, the cutting time is reduced, and the substrate may not be cut. This is because the rotational distance to be cut is related to the diameter of the blade. That is, as the blade diameter is reduced due to the generation of the abrasion amount of the blade, the rotation distance per rotation becomes smaller. Therefore, the total rotation distance becomes smaller during the rotation number, and the total rotation distance for cutting is less than the total rotation distance.

Secondly, if the blade diameter is reduced but the blade is lowered to the same distance as when it is not worn, the blade will not come into contact with the substrate properly. In this case, even if the cutting process is performed, the substrate may not be cut.

The embodiments are directed to solving the above problems and other problems.

Another object of the embodiment is to provide a blade control device capable of preventing a cutting failure.

Another object of the embodiment is to provide a blade control device capable of improving cutting quality.

According to an aspect of an embodiment for achieving the above or other objects, a blade control apparatus includes: a rotation number detecting section that detects a rotation number of a blade; A memory including at least one lookup table in which a wear amount according to the number of revolutions is set; An elevating unit driving unit for driving the elevating unit equipped with the blades so that the blades are vertically elevated; And a controller for controlling the lift unit driving unit such that the lift distance is further increased by an amount of wear obtained from the lookup table based on the detected number of rotations.

Effects of the blade control apparatus according to the embodiment will be described as follows.

According to at least one of the embodiments, when the blade is worn, the blade is further lowered by the amount of wear of the blade, so that the blade always contacts the substrate during the substrate process, .

According to at least one of the embodiments, there is an advantage that the cutting quality can be further improved by detecting the substrate type and allowing the blade to move downward to match the detected substrate type.

Additional ranges of applicability of the embodiments will be apparent from the following detailed description. It should be understood, however, that various changes and modifications within the spirit and scope of the embodiments will become apparent to those skilled in the art, and that specific embodiments, such as the detailed description and the preferred embodiments, are given by way of example only.

1 shows a blade control apparatus according to a first embodiment of the present invention.
2 shows a look-up table stored in a memory.
3 shows a change in the lift distance.
4 shows a blade control apparatus according to a second embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings, wherein like reference numerals are used to designate identical or similar elements, and redundant description thereof will be omitted. The suffix "module" and " part "for the components used in the following description are given or mixed in consideration of ease of specification, and do not have their own meaning or role. In the following description of the embodiments of the present invention, a detailed description of related arts will be omitted when it is determined that the gist of the embodiments disclosed herein may be blurred. The accompanying drawings are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, It is to be understood that the invention includes equivalents and alternatives.

1 shows a blade control apparatus according to a first embodiment of the present invention.

Referring to FIG. 1, the blade control apparatus according to the first embodiment of the present invention may include a rotation number detecting unit 120, a controller 130, a memory 140, and a lift unit driving unit 150.

The blade 115 can be mounted to the elevating unit 113. [ By rotating the blade 115 in contact with the substrate 10, the substrate 10 can be cut.

The blade 115 can be fastened to the rotating shaft 117. The rotating shaft 117 can be rotated by driving a blade driving unit (not shown). The blade 115 fastened to the rotating shaft 117 can be rotated in accordance with the rotation of the rotating shaft 117.

The elevating unit 113 is movable up and down. for example. The elevation unit 113 is moved downward in the downward direction to stop at the contact position P2 in contact with the substrate 10 for cutting the substrate 10. [ After the cutting process is performed and the substrate 10 is cut, the lift unit 113 can be moved upward in the upward direction and returned to the original position, that is, the reference position P1.

The lift unit driving unit 150 may include a linear motor, but the present invention is not limited thereto. By driving the linear motor, the elevation unit 113 is movable in the vertical direction, and accordingly, the blade 115 fastened to the elevation unit 113 is also vertically movable.

The horizontal movement unit 111 can move the blade 115 fastened to the lift unit 113 along the horizontal direction. Here, the horizontal direction may be x-axis. The elevating unit 113 can be fastened to the horizontal moving unit 111. The first rail may be provided on one side of the horizontal movement unit 111, for example, on the front side. The elevating unit 113 can be coupled to the rail and can be slid along the x-axis direction.

Although not shown, another horizontal moving unit may be coupled to the horizontal moving unit 111 to move the blade 115 along another horizontal direction. Here, another horizontal direction may be the y-axis. To this end, a second rail may be provided on either side of the substrate support 13. Another horizontal moving unit may be coupled to the second rail and slid along the y-axis direction.

Therefore, the blade 115 can be moved to a specific position of the substrate 10 by driving the horizontal movement unit 111 and another horizontal movement unit.

The substrate 10 may be attached to the adhesive member 15. The adhesive member 15 can be fixed to the substrate support 13. [ The adhesive member 15 allows the substrate 10 to be fixed.

The substrate 10 may be a semiconductor wafer substrate, a substrate for an LED, or a substrate for a flat panel display. The flat panel display may include, for example, a liquid crystal display (LCD), an organic light emitting display (OLED), a quantum dot light emitting display (QLED), and the like.

When the substrate 10 is placed on the substrate support 13 for the cutting process, the lift unit 113 is driven to move the blade 115 downward so as to contact the substrate 10. Thereafter, the blade 115 is rotated in accordance with the predetermined number of revolutions, whereby the substrate 10 can be cut. Here, it may be referred to as a cutting number instead of the rotation number.

If the cutting process is performed for a long time, the diameter of the blades 115 becomes smaller as the blades 115 are worn.

As shown in Fig. 3A, the diameter of the new blade 115 may be D1. When the new blade 115 is used for a long period of time, as shown in Fig. 3B, the new blade 115 may be worn and the new blade 115 may be worn to become a worn blade 115 reduced to the diameter of D2.

At this time, the wear amount? Of the worn blade 115 can be expressed by Equation (1).

[Equation 1]

? = (D1-D2) / 2

As described above, when the abraded blade 115 is worn and a wear amount? Is generated, the diameter D2 of the worn blade 115 becomes small.

Fig. 3A shows the lift distance L1 when the new blade 115 is used, and Fig. 3B shows the lift distance L2 when the worn blade 115 is used.

As shown in FIG. 3A, when the blade 115 is not used, that is, in the new blade 115, the blade 115 can be disposed at the reference position P1. At this time, the reference position P1 may be the position of the lowest point of the blade 115. The lowest point of the blade 115 may be located below the radius of the blade 115 by a distance D1 / 2 with respect to the rotary shaft 117. [

The position of the upper surface of the substrate 10 raised on the substrate support 13 can be the contact position P2. The lowest point of the blade 115 may be brought into contact with the upper surface of the substrate 10 when the blade 115 is moved downward to perform the cutting process and is placed at the contact position P2 .

In this case, the distance between the reference position P1 and the contact position P2 can be defined as the lift distance L1.

When the new blade 115 is used, the new blade 115 is in a state in which it is not worn at all, so the wear amount? Is zero. In this case, the ascending / descending distance may be L1.

3B, when the new blade 115 is used for cutting the substrate 10, the new blade 115 is abraded by the frictional force caused by the contact with the substrate 10.

The diameter of the blade 115 worn out by the wear amount? Caused by the wear of the new blade 115 may be D2. D2 is smaller than D1.

In this case, the reference position of the worn blade 115 may be changed from P2 to P3, even though the worn blade 115 has not been deliberately moved. The change (P2? P3) of the reference position of the worn blade 115 is caused by the wear amount? Caused by the wear of the worn blade 115, as described above.

The lift distance defined between the changed reference position P3 of the worn blade 115 and the contact position P2 positioned on the upper surface of the substrate 10 becomes L2.

In this case, the changed lift distance L2 can be expressed by Equation (2).

&Quot; (2) "

L2 = L1 + alpha

From Equation (2), in order for the blade 115 to contact the substrate 10, the worn blade 115 must be moved downward by the lift distance L2. In other words, the worn blade 115 must be moved downward further downward by the wear amount? Of the worn blade 115 than the lift distance L1 of the new blade 115, (Not shown).

Therefore, if the wear amount? Of the worn blade 115 can be grasped, the wear amount? Of the worn blade 115 at the predetermined lift distance, i.e., the lift distance L1 when the new blade 115 is used, So that the blade 115 can be brought into contact with the substrate 10 to prevent the cutting failure.

According to the present invention, the wear amount [alpha] of the blade 115 can be grasped in relation to the number of rotations R. [

Normally, in order to cut the substrate 10, the blade 115 is rotated at a predetermined rotation speed. When a plurality of substrates 10 are cut at the predetermined number of revolutions, the set number of revolutions and the number of revolutions corresponding to the number of cut substrates 10 are accumulated. The amount of wear according to the cumulative number of revolutions can be grasped through experiments and the amount of wear according to the cumulative number of revolutions thus stored is stored in the memory 140 as a look-up table (LUT) .

On the other hand, the wear amount? Of the blade 115 varies depending on the type of the substrate 10. That is, depending on the material and strength of the substrate 10, different amounts of wear (?) May be generated for the same number of revolutions.

According to the present invention, look-up tables that are different from each other depending on the type of the substrate 10 can be generated and stored in the memory 140.

As shown in Fig. 2, lookup tables 50, 52, 54 for a number of different types of substrates 10 can be created. For example, a lookup table 50 relating to the A material substrate, a lookup table 52 relating to the B material substrate, and a lookup table 54 relating to the C material substrate can be generated.

Each of the look-up tables 50, 52 and 54 is tabulated with the wear amount? According to the number of revolutions and the number of revolutions.

For example, in the lookup table 50 relating to the material A substrate, the amount of wear A1 is set corresponding to the number of rotations a1, the amount of wear A2 is set corresponding to the number of rotations a2, and the amount of wear A3 can be set corresponding to the number of rotations a3 .

Up table 52 relating to the B-material substrate and the look-up table 54 relating to the C-material substrate can be tabulated in terms of the number of revolutions such as the lookup table 50 relating to the A-material substrate.

Referring to FIG. 1, the rotational speed detector 120 may detect the rotational speed of the blade 115. The rotation number detecting unit 120 may be an optical sensor, but the invention is not limited thereto. The optical sensor may include a light emitting portion for emitting light and a light receiving portion for receiving light.

For example, a slit hole may be formed in one region of the blade 115, and a light emitting portion and a light receiving portion may be provided on both sides of the slit corresponding to the slit hole. In this case, when the light is emitted from the light emitting portion and the blade 115 is rotated, the light receiving portion can not receive the light emitted from the light emitting portion except the slit hole of the blade 115.

That is, the light of the light emitting portion is blocked by the blade 115 and does not advance to the light receiving portion except for the slit hole, and when the blade 115 is rotated and the slit hole is positioned between the light emitting portion and the light receiving portion, The light passing through the slit hole of the blade 115 can be received.

Therefore, the light receiving unit can receive one light every time the blade 115 makes one revolution. In this way, the number of times of received light is the number of revolutions, and an electric signal corresponding to the thus confirmed number of revolutions, for example, a 6-bit digital signal, can be provided to the controller 130.

As described above, the light-receiving unit supplies a digital signal of "1" when receiving light and a digital signal of "0" when it can not receive light, to the control unit 130, The number of revolutions may be calculated by cogging the signal.

The control unit 130 may generate a control signal for driving the lift unit driving unit 150 based on the rotation speed detected by the rotation speed detection unit 120. [

Specifically, the control unit 130 may generate a control signal for controlling the blade 115 based on the wear amount [alpha] set according to the rotation number detected from the rotation number detection unit 120. [

As described above, the memory 140 may store a plurality of lookup tables 50, 52, and 54 as shown in FIG. Each look-up table 50, 52, 54 may be a look-up table for a different type of substrate 10.

The wear amount? Depending on the number of revolutions and the number of revolutions can be set in each of the look-up tables 50, 52, The wear amount? Depending on the number of revolutions can be obtained through repeated experiments depending on the material type of the substrate 10 and the number of revolutions.

The control unit 130 may be aware of what kind of substrate the substrate 10 placed on the substrate support 13 for current cutting is. That is, data on the type of the substrate 10 placed on the substrate support 13 for the current cutting is input by the operator, and the control unit 130 determines, based on the input data of the operator, It is possible to recognize what kind of the substrate 10 is.

The control unit 130 may control the lookup tables 50, 52 and 54 related to the type of the substrate 10 recognized based on the recognized type of the substrate 10 to be retrieved.

The control unit 130 determines the lookup tables 50, 52, and 54 related to the type of the substrate 10 based on the type of the substrate 10 previously identified based on the rotation speed detected by the rotation speed detection unit 120 . The control unit 130 can inquire the corresponding lookup tables 50, 52 and 54 and obtain the set wear amount? Corresponding to the detected number of rotations.

The control unit 130 may generate a control signal for driving the lift unit driving unit 150 so that the blade 115 moves downward by referring to the obtained wear amount?.

The lift unit driving unit 150 responds to the control signal to move the lift unit 113 to move the blade 115 further downward by the amount of wear (?) Obtained in the specific lookup tables 50, 52 and 54 of the memory 140 Can be driven.

3A, when the new blade 115 is used, since the abrasion amount? Is absent, the blade 115 is lowered to the first lift distance of L1 by the lift unit driving part 150 Can be moved.

When the new blade 115 is used for cutting a plurality of substrates 10 and is worn, the wear amount? Of the blade 115 according to the number of revolutions can be generated. In this case, under the control of the control unit 130, the lift unit driving unit 150 drives the lift unit 113 to drive the lift unit 113 to lift the second lift distance L2 of L2, which is the sum of the first lift distance L1 and the wear amount? Of the worn blade 115 The blade 115 can be moved downward by the lift distance.

According to the present invention, wear amount data according to the number of revolutions can be obtained through repeated experiments so that the amount of wear caused by the use of the blade 115 can be grasped as the amount of wear due to the number of revolutions. The lookup tables 50, 52, and 54 may be created and stored in the memory 140 using the obtained data. At this time, the lift distance L1 determined by the new blade 115 can be set as the reference distance. In this case, when the new blade 115 is used for a long time, the number of revolutions of the new blade 115 is detected and the wear amount? Corresponding to the detected number of revolutions is stored in the lookup tables 50 and 52 , ≪ / RTI > 54). Therefore, the blade 115 is lowered below the reference distance L1 by the obtained amount of wear?, So that the blade 115 can always be brought into contact with the upper surface of the substrate 10 safely and accurately The cutting failure of the substrate 10 can be prevented and the cutting quality can be improved.

4 shows a blade control apparatus according to a second embodiment of the present invention.

The second embodiment is the same as the constituent elements of the first embodiment except for the substrate type detecting section 125. [ In the second embodiment, the same constituent elements as those of the first embodiment are denoted by the same reference numerals, and a detailed description thereof will be omitted. The explanation omitted in the second embodiment can be easily understood in the first embodiment.

4, the blade control apparatus according to the second embodiment of the present invention includes a substrate type detection unit 125, a rotation speed detection unit 120, a control unit 130, a memory 140, and a lift unit driving unit 150 .

The substrate type detection unit 125 can detect the type of the substrate 10 placed on the substrate support 13 to perform the cutting process.

For example, a barcode may be provided on one side of the substrate 10. In this case, the substrate type detection unit 125 may be a scanner. The bar code may include the type of the substrate, that is, the substrate type information about the A material substrate, the B material substrate, and the C material substrate.

The control unit 130 can control the lookup tables 50, 52 and 54 related to the type of the substrate 10 corresponding to the substrate type information of the barcode scanned from the scanner to be selected. For example, when the substrate type information of the barcode obtained by the scanner is the A material substrate, the lookup table 50 relating to the A material substrate among the plurality of lookup tables 50, 52, and 54 stored in the memory 140 is selected .

For example, a color label may be provided on one side of the substrate 10. The color label may have a different color depending on the type of the substrate 10. For example, as shown in FIG. 2, a red label may be provided on the A material substrate, a yellow label may be provided on the B material substrate, and a blue color label may be provided on the C material substrate.

In this case, the substrate type detecting section 125 may be a color sensor capable of identifying the color, for example, an optical sensor. An image for the color label provided on the substrate 10 by the optical sensor is obtained and the color of the color label can be identified from the obtained image.

The controller 130 controls the lookup tables 50, 52 and 54 related to the type of the substrate 10 corresponding to the identified color among the plurality of lookup tables 50, 52 and 54 stored in the memory 140 to be selected Can be controlled. For example, when the color label provided on the substrate 10 by the color sensor is identified in red, a look-up table 50 relating to the A material substrate among the plurality of lookup tables 50, 52, 54 stored in the memory 140 ) Can be selected.

As another example, different shapes are provided on the substrate 10 depending on the types of the substrates 10, and the type of the substrate 10 can be grasped through detection of such shapes.

In addition, various techniques for detecting the type of the substrate 10 may exist or be known, and these known techniques may also be included in the technical idea of the present invention.

The control unit 130 can inquire the memory 140 and select the lookup tables 50, 52 and 54 corresponding to the type of the substrate 10 detected from the substrate type detecting unit 125. [ For example, when the type of the substrate 10 detected by the substrate type detection unit 125 is the B material substrate, the lookup table 50 relating to the A material substrate stored in the memory 140, the lookup table 52 relating to the B material substrate ), A lookup table 52 relating to the B material substrate among the lookup tables 54 relating to the C material substrate can be selected.

The blade 115 is lowered to contact the upper surface of the substrate 10 positioned on the substrate support 13 to perform the cutting process and then the blade 115 is rotated so that the cutting of the substrate 10 can proceed .

In this case, the rotational speed detecting section 120 can detect the rotational speed of the blade 115. [ The control unit 130 can inquire the lookup tables 50, 52 and 54 previously selected in the memory 140 and obtain the wear amount? Corresponding to the detected number of rotations.

Then, as described in the first embodiment, the controller 130 controls the lift unit drive unit (not shown) to move the blade 115 downward by the obtained wear amount? From the conventional fall distance (L1 in FIG. 3) 150 can be driven.

The foregoing detailed description should not be construed in all aspects as limiting and should be considered illustrative. The scope of the embodiments should be determined by rational interpretation of the appended claims, and all changes within the equivalents of the embodiments are included in the scope of the embodiments.

10: substrate
50, 52, 54: look-up table
113:
115: blade
120:
125: substrate type detecting section
130:
140: Memory
150: Lift unit driving part
L1, L2: Lift distance
P1, P3: Reference position
P2: contact position
α: wear amount

Claims (7)

A rotation number detection section for detecting the rotation number of the blade;
A memory including at least one lookup table in which a wear amount according to the number of revolutions is set;
An elevating unit driving unit for driving the elevating unit equipped with the blades so that the blades are vertically elevated; And
And controls the lift unit driving unit to increase the lift distance by an amount of wear obtained from the lookup table based on the detected number of rotations. The method according to claim 1,
Wherein the lift distance is a distance between a reference position that is the lowest point of the blade and a contact position that is an upper surface of the substrate. 3. The method of claim 2,
Wherein the at least one lookup table is generated corresponding to a substrate type. The method of claim 3,
And a substrate type detecting section for detecting a substrate type from the substrate. 5. The method of claim 4,
A barcode is provided on the substrate,
Wherein the substrate type detecting unit includes a scanner for scanning the bar code. 5. The method of claim 4,
A color label is provided on the substrate,
And the substrate type detecting section includes a color sensor for identifying the color label. The method according to claim 1,
Wherein the control unit drives the elevating unit driving unit such that the blade is moved down by the sum of the reference lift and the worn amount when the lift distance when the new blade is used is a reference lift distance.

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