KR20180084683A - 편광판 캘리브레이션 장치 및 방법 - Google Patents

편광판 캘리브레이션 장치 및 방법 Download PDF

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KR20180084683A
KR20180084683A KR1020180006296A KR20180006296A KR20180084683A KR 20180084683 A KR20180084683 A KR 20180084683A KR 1020180006296 A KR1020180006296 A KR 1020180006296A KR 20180006296 A KR20180006296 A KR 20180006296A KR 20180084683 A KR20180084683 A KR 20180084683A
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South Korea
Prior art keywords
polarizer
alignment mark
calibrating
unit
holding unit
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KR1020180006296A
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KR102018908B1 (ko
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유롱 리
키신 수
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상하이 마이크로 일렉트로닉스 이큅먼트(그룹) 컴퍼니 리미티드
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Publication of KR20180084683A publication Critical patent/KR20180084683A/ko
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Publication of KR102018908B1 publication Critical patent/KR102018908B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements
    • G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N2021/1765—Method using an image detector and processing of image signal
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9511—Optical elements other than lenses, e.g. mirrors

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Optics & Photonics (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Polarising Elements (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)

Abstract

본 발명은 편광판 캘리브레이션 장치 및 방법을 제공하고, 상기 편광판 캘리브레이션 장치는 비편광 시준 광원을 발생시키기 위한 광원 유닛; 편광판을 고정하기 위한 편광판 고정 유닛; 편광판의 얼라인먼트 마크를 탐측하기 위한 탐측기; 편광판 고정 유닛의 하방에 설치되고, 위치는 상기 편광판과 대응되는 편광 측정 유닛; 및 편광판 고정 유닛과 편광 측정 유닛이 수평 방향 운동을 진행하도록 지지하는 작업대를 포함한다. 본 발명이 제공하는 편광판 캘리브레이션 장치 및 방법은 얼라인먼트 마크 연결선과 편광축 사이의 협각을 정밀하게 캘리브레이션할 수 있고, 편광축과 얼라인먼트 마크 연결선의 협각이 상이한 공정을 거친 후 편차가 발생되는 문제를 해결한다.
KR1020180006296A 2017-01-17 2018-01-17 편광판 캘리브레이션 장치 및 방법 KR102018908B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201710036210.X 2017-01-17
CN201710036210.XA CN108318222B (zh) 2017-01-17 2017-01-17 一种偏振片标定装置及方法

Publications (2)

Publication Number Publication Date
KR20180084683A true KR20180084683A (ko) 2018-07-25
KR102018908B1 KR102018908B1 (ko) 2019-09-05

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KR1020180006296A KR102018908B1 (ko) 2017-01-17 2018-01-17 편광판 캘리브레이션 장치 및 방법

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KR (1) KR102018908B1 (ko)
CN (1) CN108318222B (ko)
TW (1) TWI656595B (ko)

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CN109166474A (zh) * 2018-10-10 2019-01-08 京东方科技集团股份有限公司 一种显示模组以及贴合精度检测方法

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CN109633949B (zh) * 2019-02-15 2021-07-23 深圳市华星光电半导体显示技术有限公司 偏光片贴附机及其对位方法
CN109817092A (zh) * 2019-03-21 2019-05-28 京东方科技集团股份有限公司 一种偏光片对位装置及对位方法
CN111323857A (zh) * 2020-03-01 2020-06-23 华中科技大学 一种偏振相关的超表面结构、元件及热辐射信息加载方法
CN111562091A (zh) * 2020-06-23 2020-08-21 昆山鸿仕达智能科技有限公司 一种偏光轴方位角度测定方法及测定装置
CN115083957A (zh) * 2022-05-24 2022-09-20 睿励科学仪器（上海）有限公司 一种用于旋正晶圆的方法和装置

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Also Published As

Publication number Publication date
KR102018908B1 (ko) 2019-09-05
CN108318222B (zh) 2020-04-10
TW201828395A (zh) 2018-08-01
CN108318222A (zh) 2018-07-24
TWI656595B (zh) 2019-04-11

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