KR20180080561A - Flexible transparent electrode based on sonication assisted selective lift-off process and manufacturing method thereof - Google Patents

Abstract

The present invention provides a process method with excellent reliability and stability. According to an embodiment of the present invention, a manufacturing method of a flexible transparent electrode based on a sonication-assisted selective lift-off process comprises: a step of depositing metal on a first uneven pattern of a duplicated crosslinked polymer mold; a step of immersing the duplicated crosslinked polymer mold with the metal deposited thereon in a solvent to selectively swell the duplicated crosslinked polymer mold to weaken a binding force between the metal deposited on a protruding unit between a protruding unit and an indented unit of the first uneven pattern and the duplicated crosslinked polymer mold; and a step of using sonication to remove the metal deposited on the protruding unit from the duplicated crosslinked polymer mold with the metal deposited thereon.

Description

TECHNICAL FIELD [0001] The present invention relates to a flexible transparent electrode based on a selective lift-off process using ultrasonic dispersion, and a method of manufacturing the flexible transparent electrode using a selective lift-

The following embodiments are directed to a flexible transparent electrode based on a lift-off process using a selective solvent and an ultrasonic dispersion, and a method of manufacturing the same. More particularly, the present invention relates to a flexible transparent electrode using a selective swelling phenomenon of a crosslinked polymer mold Thereby facilitating the lift-off phenomenon of unnecessary portions, thereby producing a flexible transparent electrode made of metal embedded in a specific pattern.

As science and technology become more sophisticated, communications and electronic devices are rapidly becoming smaller and lighter in weight as well as in performance in accordance with market demands. Particularly, in recent years, communication and electronic devices are required not only to be flexible but also to be transparent.

Accordingly, flexible and transparent electrodes are being developed in order to manufacture devices requiring transparent and flexible characteristics such as flexible displays, solar cells, and touch panels.

Indium tin oxide (ITO) thin film, which is the most widely used transparent electrode, is not fundamentally suitable for devices requiring high flexibility due to its high hardness due to the characteristics of oxides, and the price of rare earth indium is unstable There is a disadvantage that the manufacturing cost can be increased.

Many researches have been made as an alternative to compensate for the disadvantages of electrodes using ITO thin films, and studies using metal nanowires have been actively conducted. In the case of electrodes using metal nanowires, due to the inherent characteristics of the metal, they have not only a very low sheet resistance but also a good flexibility, a low manufacturing cost, a roll-to-roll process, , It has an advantage that it can be applied as a transparent electrode by having excellent optical characteristics.

However, electrodes using metal nanowires have a fatal disadvantage in that they are not uniformly distributed over the electrodes because the wires are randomly distributed due to the nature of the manufacturing process. This is directly related to the reliability of the electrode performance and can be a serious problem. In addition, the electrode using the metal nanowire has drawbacks of low parallel resistance due to the rough surface of the wires, low efficiency of the optoelectronic device due to high dark current, disadvantage of poor adhesion to the substrate, A large resistance is generated in the semiconductor device. Accordingly, in order to overcome the disadvantage that the electrode having the metal nanowire maintains a low sheet resistance while having poor adhesion with the substrate, it is troublesome to perform a heat treatment at a high pressure and to perform a surface treatment such as an oxygen plasma on the substrate have.

Therefore, the following embodiments overcome the disadvantages and problems of the electrode using the conventional ITO thin film and the electrode using the metal nanowire, and propose a flexible transparent electrode excellent in mechanical and chemical stability and a manufacturing method thereof.

One embodiment of the present invention provides a flexible transparent electrode overcoming disadvantages and disadvantages of an electrode using a conventional ITO thin film and electrodes using metal nanowires and a method of manufacturing the same.

Specifically, one embodiment provides a flexible transparent electrode in which a built-in metal forms a specific pattern through a simple lift-off process on the surface of a duplicated crosslinked polymer mold and a method of manufacturing the same, thereby minimizing the vacuum process, Low process costs, and high reliability and stability.

In particular, one embodiment provides a flexible transparent electrode and a method of manufacturing the flexible transparent electrode by using a duplicated crosslinked polymer mold that is selectively swollen in a solvent to realize a microstep lift-off process through ultrasonic dispersion.

According to one embodiment, a method of fabricating a transparent transparent electrode based on a sonication assisted selective lift-off process using ultrasonic dispersion includes depositing a metal on a first concavo-convex pattern of a replication crosslinked polymer mold; The replicated crosslinked polymer mold having the metal deposited thereon is immersed in a solvent to swell the replicated crosslinked polymer mold to form a metal layer on the protruded portion and the indented portion of the first concave- Weakening the bonding force between the first electrode and the second electrode; And removing the metal deposited on the protrusion from the cloned crosslinked polymer mold on which the metal is deposited, using ultrasonic dispersion.

Wherein the step of removing the metal deposited on the protrusions from the duplicated crosslinked polymer mold on which the metal is deposited comprises the steps of applying a physical impact to the metal deposited on the protrusions having weakened bonding strength with the duplicated crosslinked polymer mold through the ultrasonic dispersion, Removing the metal deposited on the protrusion from a replica crosslinked polymer mold having the metal deposited thereon.

The solvent may be a substance that selectively swells the replica crosslinked polymer mold.

The replicated crosslinked polymer mold may be formed of a material that forms crosslinks upon curing, is not dissolved in the solvent, swells without structural modification, and is restored to its original form upon evaporation of the solvent.

The replicated crosslinked polymer mold may have different degrees of swelling in each of the protruding portion and the depressed portion.

The first concavo-convex pattern may be formed to have at least one of a dot pattern, a line pattern, a net pattern, or a polygonal pattern including the depressed portion and the protruding portion having a preset width and depth.

The method of manufacturing a flexible transparent electrode includes the steps of: fabricating a master mold having a second concavo-convex pattern formed on its surface; And generating the duplicate crosslinked polymer mold in which the first concavo-convex pattern, which is a reverse phase of the second concavo-convex pattern, is formed on the surface using the master mold.

The step of depositing the metal on the first concavo-convex pattern of the duplicated crosslinked polymer mold may be performed by using at least one of a thermal evaporation technique, an e-beam evaporation technique, or a sputtering technique And depositing the metal on the first relief pattern.

According to one embodiment, a flexible transparent electrode fabricated on the basis of a sonication-assisted selective lift-off process using ultrasonic dispersion comprises a duplicated crosslinked polymer mold produced so that a first irregular pattern is formed on the surface; And a metal deposited on the depressed portion of the protruded portion and the depressed portion of the first concave-convex pattern, wherein the metal deposited on the depressed portion is deposited on the first concave-convex pattern of the duplicated crosslinked polymeric mold, The cloned crosslinked polymer mold having the metal deposited thereon is selectively swollen by the repetitive crosslinked polymer mold to weaken the bonding force between the metal deposited on the protrusion and the replicated crosslinked polymer mold, And the metal deposited on the projection is removed from the deposited duplicated crosslinked polymer mold.

The metal deposited on the protrusions may be removed from the replica crosslinked polymer mold on which the metal is deposited, after being weakened in bonding force with the replicated crosslinked polymer mold and subjected to a physical impact through the ultrasonic dispersion.

The solvent may be a substance that selectively swells the replica crosslinked polymer mold.

The replicated crosslinked polymer mold may be formed of a material that forms crosslinks upon curing, is not dissolved in the solvent, swells without structural modification, and is restored to its original form upon evaporation of the solvent.

The replicated crosslinked polymer mold may have different degrees of swelling in each of the protruding portion and the depressed portion.

The first concavo-convex pattern may be formed to have at least one of a dot pattern, a line pattern, a net pattern, or a polygonal pattern including the depressed portion and the protruding portion having a preset width and depth.

One embodiment of the present invention can provide a flexible transparent electrode overcoming disadvantages and disadvantages of the electrode using the conventional ITO thin film and the electrode using the metal nanowire and a manufacturing method thereof.

Specifically, one embodiment provides a flexible transparent electrode in which a built-in metal forms a specific pattern through a simple lift-off process on the surface of a duplicated crosslinked polymer mold and a method of manufacturing the same, thereby minimizing the vacuum process, Thereby reducing the process cost, and proposing a process method that is excellent in reliability and stability.

In addition, one embodiment of the present invention is a flexible transparent electrode having excellent reliability because a metal of a net pattern is integrated with no interface contact, and thus there is no interface resistance and an additional process such as heat treatment is omitted and a uniform distribution is obtained in the whole area. Method can be provided.

In particular, one embodiment of the present invention can provide a flexible transparent electrode and a method of manufacturing the flexible transparent electrode by using a duplicated crosslinked polymer mold that is selectively swollen in a solvent to realize a microstep lift-off process through ultrasonic dispersion.

In addition, one embodiment of the present invention can be applied to fabrication of a low-cost, high-performance device by providing a flexible transparent electrode based on a super-short process and a manufacturing method thereof.

In addition, one embodiment of the present invention provides a flexible transparent electrode based on a super-finishing process in which an etching process is omitted, and a method of manufacturing the same, thereby solving the drawback that residues remain in the process of forming a structure, .

In addition, one embodiment of the present invention provides a flexible transparent electrode in which a mesh pattern metal is embedded on the surface of a duplicated cross-linked polymer mold and a method of manufacturing the same, so that irregularities protruding out of the surface in the final form are not formed, , Chemical and thermal stability, and can be applied to various fields.

In addition, one embodiment of the present invention provides a flexible transparent electrode in which a metal of a net pattern is embedded on the surface of a duplicated crosslinked polymer mold and a method of manufacturing the same, thereby making it possible to easily form a composite with other materials such as polymers and two- Method can be proposed.

In addition, one embodiment can propose a process method applicable to various devices such as a polarizing plate by applying various patterns such as a dot pattern, a line pattern, and a polygonal pattern, as well as a net pattern on the surface of a duplicated crosslinked polymer mold.

FIGS. 1 through 7 illustrate a method of fabricating a transparent transparent electrode based on a selective lift-off process using ultrasonic dispersion according to an exemplary embodiment.
8 is a Scanning Electron Microscopy (SEM) photograph showing a planar portion and an end face portion of a master mold according to an embodiment.
FIG. 9 is a scanning electron micrograph showing a planar portion and an end face portion of a duplicated crosslinked polymer mold according to one embodiment.
10 is a scanning electron microscope (SEM) image of a duplicated crosslinked polymer mold in which a metal is deposited on a first relief pattern according to an embodiment.
11 is a scanning electron micrograph showing a flexible transparent electrode manufactured according to an embodiment.
12 is a flowchart illustrating a method of manufacturing a flexible transparent electrode based on a selective lift-off process using ultrasonic dispersion according to an exemplary embodiment.
Figure 13 is a block diagram of a flexible transparent electrode fabricated on a selective lift-off process using ultrasonic dispersion according to one embodiment.

Hereinafter, embodiments according to the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to or limited by the embodiments. In addition, the same reference numerals shown in the drawings denote the same members.

Also, terminologies used herein are terms used to properly represent preferred embodiments of the present invention, which may vary depending on the viewer, the intention of the operator, or the custom in the field to which the present invention belongs. Therefore, the definitions of these terms should be based on the contents throughout this specification.

FIGS. 1 through 7 illustrate a method of fabricating a transparent transparent electrode based on a selective lift-off process using ultrasonic dispersion according to an exemplary embodiment.

Hereinafter, it is described that a method of manufacturing a transparent transparent electrode based on a selective lift-off process using ultrasonic dispersion is performed by a flexible transparent electrode manufacturing system.

1, which is a cross-sectional view showing a master mold, a master mold 110 can be manufactured to produce a duplicated crosslinked polymer mold having a first concave-convex pattern formed on its surface, which will be described later. At this time, the second concave-convex pattern 111 may be formed on the surface of the master mold 110. For example, the flexible transparent electrode manufacturing system can form the master mold 111 so that the second concavo-convex pattern 111 is formed on the surface, based on a material such as silicon (Si), silica (SiOx) have.

At this time, the second concavo-convex pattern 111 of the master mold 110 may be formed in consideration of the first concavo-convex pattern to be formed on the surface of the duplicated crosslinked polymer mold described later. A detailed description thereof will be given below.

Since the master mold 110 manufactured in this way can be used repeatedly semi-permanently to manufacture a plurality of transparent transparent electrodes as in the manufacturing process of the transparent transparent electrode described later, the production cost of the transparent transparent electrode can be reduced.

A scanning electron microscope (SEM) photograph showing the plane portion and the cross-sectional portion of the master mold 110 is shown in FIG.

Next, in the flexible transparent electrode manufacturing system, as shown in FIG. 2, which is a cross-sectional view showing the duplicated crosslinked polymer mold, the first uneven pattern 221, which is an inverse of the second uneven pattern 211, To form the resulting cloned crosslinked polymer mold 220.

For example, the flexible transparent electrode manufacturing system may be formed by applying a crosslinking polymer on the second concave-convex pattern 211 of the master mold 210, performing heat or ultraviolet curing, To thereby produce a duplicated crosslinked polymer mold 220. [

At this time, the duplicated crosslinked polymer mold 220 may be formed to swell selectively in a solvent described later. For example, the replicated crosslinked polymer mold 220 may form a crosslinked structure upon curing and may be formed of a material that is not soluble in the solvent, swells without structural modification, and is restored to its original form upon evaporation of the solvent. More specifically, the replication crosslinked polymer mold 220 may be formed of an elastic crosslinked polymer such as PDMS (polydimethylsiloxane) or PUA (polyurethane acrylate).

In particular, the replica crosslinked polymer mold 220 may be formed such that the degrees of swelling of the indented portion 222 and the protruded portion 223 of the first concave-convex pattern 221 are different from each other. This is because the thickness of each of the indentations 222 and protrusions 223 of the first concave-convex pattern 221 formed on the surface of the replica crosslinked polymer mold 220 (the first concave- convex pattern 221 of the duplicated crosslinked polymer mold 220) The thickness from the opposite surface to the indented portion 222 and the thickness from the surface opposite to the surface on which the first concave-convex pattern 221 of the copied crosslinked polymer mold 220 is formed to the protruding portion 223 are different from each other , And the modified crosslinked polymer mold 220 is formed of a material having a different degree of swelling depending on the thickness. For example, the replica crosslinked polymer mold 220 may be formed such that the protruding portion 223 swells more than the indentation 222 of the first concave-convex pattern 221.

내지

의 폭과

내지

의 깊이를 갖도록 점 패턴, 라인 패턴, 그물 패턴 또는 다각 패턴 중 적어도 어느 하나의 형태를 갖도록 복제 가교 고분자 몰드(220)의 표면에 형성될 수 있다.The first concavo-convex pattern 221 may be duplicated to have at least one of a dot pattern, a line pattern, a net pattern, or a multiple pattern including the indentation 222 and the protrusion 223 having a preset width and depth. (Hereinafter, the first concave-convex pattern 221 is described as being formed to have a net pattern). For example, the first concave-convex pattern 221 is formed by the indentation 222

To

And

To

May be formed on the surface of the replication crosslinked polymer mold 220 so as to have a depth of at least one of a dot pattern, a line pattern, a net pattern, or a polygonal pattern.

Thus, in the flexible transparent electrode manufacturing system, the second concave-convex pattern 211 of the master mold 210 is formed in a reverse-phase pattern of the first concave-convex pattern 221 in the process of manufacturing the master mold described with reference to FIG. 1, The first irregular pattern 221 may have a pattern of the above-described shape.

The replicated cross-linking polymer mold 220 is not limited to being produced using the master mold 210 as described with reference to FIGS. 1 to 2, but may be produced through various existing mold generation methods.

A scanning electron microscope photograph showing the planar portion and the cross-sectional portion of the duplicated crosslinked polymer mold 220 described above is shown in Fig.

3, which is a cross-sectional view illustrating a state where a metal is deposited on the duplicated crosslinked polymer mold 310, a metal 320 is formed on the first uneven pattern 311 of the duplicated crosslinked polymer mold 310 Lt; / RTI > At this time, the metal 320 may be separately deposited on the indentation 312 and the protrusion 313 of the first concave-convex pattern 311.

For example, the flexible transparent electrode manufacturing system may be manufactured by using at least one of a thermal evaporation technique, an e-beam evaporation technique, or a sputtering technique, A metal such as silver (Ag) or copper (Cu) may be deposited. However, the metal is not limited thereto, and various materials that can be utilized as electrodes can be used.

A scanning electron microscope photograph showing the replication crosslinked polymer mold 310 in which the metal 320 is deposited on the first concave-convex pattern 311 is shown in FIG.

4, which is a cross-sectional view showing the process of immersing the replication-crosslinked polymer mold in which the metal is deposited, into the solvent, the replication-crosslinked polymer mold (421, 422) 420 to selectively swell the duplicate crosslinked polymer mold 420 so that the indentation 423-1 of the first concavo-convex pattern 423 and the metal deposited on the protrusions 423-2 of the protrusions 423-2 (421) and the replication crosslinked polymer mold (430).

In order, the flexible transparent electrode manufacturing system immerses the replication crosslinked polymer mold 420 on which the metals 421 and 422 are deposited in a solvent 410 such as ethanol or methanol. Here, the solvent 410 may be a substance that selectively swells the replica crosslinked polymer mold 420. Particularly, the solvent 410 is a material that makes the degrees of swelling in the indented portions 423-1 and the protruded portions 423-2 of the first concave-convex pattern 432 included in the replica cross-linked polymer mold 420 different from each other Lt; / RTI >

When the replication crosslinked polymer mold 420 on which the metals 421 and 422 are deposited is immersed in the solvent 410 and the replication crosslinked polymer mold 420 absorbs the solvent 410 to cause the swelling phenomenon, The metal 421 deposited on the protrusion 423-2 and the metal 422 deposited on the indentation 423-1 are separated from each other and the metal deposited on the protrusion 423-2 The binding force between the replication crosslinked polymer mold 420 and the replication crosslinked polymer mold 420 is also weakened.

At this time, the coupling force between the metal 421 deposited on the protrusion 423-2 and the duplicate crosslinked polymer mold 420 is increased by the selective swelling of the duplicated crosslinked polymer mold 420 by the solvent 410, -2 because the space between the metal 421 and the protrusion 423-2 is deposited and the solvent 410 penetrates.

5, which is a cross-sectional view showing a process of removing the metal deposited on the protrusions using ultrasonic dispersion, supersonic wave dispersion is used to remove the cloned crosslinked polymer (511, 512) The metal 511 deposited on the protruding portion 513-1 of the first concave-convex pattern 513 is removed from the mold 510. Then,

Since the metal 511 deposited on the protruding portion 513-1 has a weakened binding force with the duplicated crosslinked polymer mold 510 as described above with reference to FIG. 4, the metal 511 can be easily removed .

Thus, the flexible transparent electrode manufacturing system applies a physical impact to the metal 511 deposited on the protrusions 513-1 through ultrasonic dispersion to remove the protrusions 513-1 from the replica crosslinked polymer mold 510 on which the metals 511 and 512 are deposited, The metal 511 deposited on the metal layer 513-1 can be removed.

At this time, in the flexible transparent electrode manufacturing system, ultrasound dispersion is performed over the entire copied crosslinked polymer mold 510 on which the metals 511 and 512 are deposited, or ultrasonic dispersion is performed only on the protruded portions 513-1 of the copied crosslinked polymer mold 510 Dispersion may be performed.

Although the process of removing the metal 511 deposited on the protrusion 513-1 by using the ultrasonic dispersion is shown as being performed on the replication crosslinked polymer mold 510 having the solvent 520 immersed therein, The process may be carried out after the selective swollen replication crosslinked polymer mold 510 is recovered from the solvent 520 without limitation or limitation.

Further, the above process can be performed not only at room temperature but also under various temperature environments (for example, an environment heated to a constant temperature).

After the metal 511 deposited on the protrusion 513-1 is removed, the metal 512 deposited on the indented portion 513-2 of the first protrusion / ) Will remain.

6 and FIG. 7, which is a cross-sectional view showing the transparent transparent electrode, the reproduced transparent electrode manufacturing system according to the present invention includes a replicated crosslinked polymer mold 610 and a first concave and convex pattern of the replica crosslinked polymer mold 610 The flexible transparent electrode including the protrusion 611 of the pattern and the metal 620 deposited on the indent 612 of the indent 612 can be formed.

As described above, the flexible transparent electrode manufacturing system is a system in which the first concave-convex pattern (the protrusions 611 and the depressions 612) of the duplicated crosslinked polymer mold 610 is formed into a dot pattern, a line pattern, a net pattern, The metal 620 deposited on the indentation 612 is embedded in the surface of the replica crosslinked polymer mold 610 in the form of a dot pattern, a line pattern, a net pattern, or a polygonal pattern, A transparent transparent electrode can be produced. A scanning electron microscope photograph showing the flexible transparent electrode is shown in Fig.

The flexible transparent electrode manufacturing system has advantages of excellent mechanical, chemical, and thermal stability because it does not have irregularities protruding out of the surface in the final form, and can propose a process applicable to various fields. In addition, the flexible transparent electrode manufacturing system can minimize the vacuum process, eliminate the lithography process, lower the process cost, and propose a process method that is excellent in reliability and stability. In addition, the flexible transparent electrode manufacturing system eliminates the disadvantage that residues remain in the structure forming process by omitting the etching process, and can prevent damage to the mold.

In addition, the above-described flexible transparent electrode manufacturing method can be applied to production of a low-cost high-performance device in various device fields such as a polarizing plate, can be compounded with other materials such as polymers and two-dimensional materials, Can be realized.

12 is a flowchart illustrating a method of manufacturing a flexible transparent electrode based on a selective lift-off process using ultrasonic dispersion according to an exemplary embodiment.

Referring to FIG. 12, a flexible transparent electrode manufacturing system according to an embodiment deposits a metal on a first concave-convex pattern of a duplicated crosslinked polymer mold (1210). For example, the flexible transparent electrode manufacturing system may be fabricated by using at least one of a thermal evaporation technique, an e-beam evaporation technique, or a sputtering technique, Metal can be deposited.

At this time, the first concavo-convex pattern is formed on the surface of the duplicated crosslinked polymer mold so as to have at least any one of a dot pattern, a line pattern, a net pattern, or a polygonal pattern including an indentation portion and a projection portion having predetermined widths and depths .

Although not shown in the figure, the flexible transparent electrode manufacturing system may use the master mold to produce a replicated crosslinked polymer mold prior to step 1210. [ For example, in a flexible transparent electrode manufacturing system, a master mold in which a second concavo-convex pattern is formed on a surface thereof is fabricated, and a duplicated crosslinked polymer mold having a first concavo-convex pattern, which is a reverse phase of the second concavo- Can be generated.

Then, the flexible transparent electrode manufacturing system immerses the replica crosslinked polymer mold in which the metal is deposited on the solvent to selectively swell the replica crosslinked polymer mold to remove the protruded portion of the first concave-convex pattern and the metal deposited on the protrusion of the indented portion Thereby weakening the bond strength between the crosslinked polymer molds (1220).

Here, the solvent may be a substance that selectively swells the replication crosslinked polymer mold.

In addition, the replicated crosslinked polymer mold may be formed of a material which forms crosslinks upon curing and which is not dissolved in the solvent, swells without structural change, and is restored to its original form upon evaporation of the solvent. In particular, the replicated crosslinked polymer mold may have different degrees of swelling in each of the protruding portion and the depressed portion.

The flexible transparent electrode manufacturing system then uses 1240 ultrasonic dispersion to remove the metal deposited on the protrusions from the replicated crosslinked polymer mold where the metal is deposited (1230). That is, the flexible transparent electrode manufacturing system removes the metal deposited on the protrusions from the duplicated crosslinked polymer mold in which the metal is deposited by applying a physical impact to the metal deposited on the protrusions having weakened bonding strength with the duplicated crosslinked polymer mold through ultrasonic dispersion can do.

Figure 13 is a block diagram of a flexible transparent electrode fabricated on a selective lift-off process using ultrasonic dispersion according to one embodiment.

Referring to FIG. 13, a flexible transparent electrode fabricated on the basis of a selective lift-off process using ultrasonic dispersion according to an embodiment includes a duplicated crosslinked polymer mold 1310 and a metal 1320 deposited on the indentation.

The duplicated crosslinked polymer mold 1310 is formed so that the first concavo-convex pattern is formed on the surface. For example, the duplicated crosslinked polymer mold 1310 can be formed on the surface with a first concavo-convex pattern, which is a reverse phase of the second concavo-convex pattern, using the master mold having the second concavo-convex pattern formed on the surface thereof.

The metal 1320 deposited on the indentation means a metal deposited on the protruding portion of the first concave-convex pattern of the replica-crosslinked polymer mold 1310 and the indentation portion of the indentation portion.

The metal 1320 deposited in this manner may be formed on the basis of a selective lift-off process using the ultrasonic dispersion described with reference to FIGS. 1 to 7 and 12.

For example, the metal 1320 deposited on the indented portion is coated with a metal on the first irregular pattern of the replica crosslinked polymer mold 1310, and a replica crosslinked polymer mold 1310 on which a metal is deposited on the solvent, The crosslinked polymer mold 1310 is selectively swollen to weaken the bonding force between the metal deposited on the protrusion and the replica crosslinked polymer mold so that the replica crosslinked polymer mold 1310 on which the metal is deposited is deposited on the protrusion using ultrasonic dispersion The removed metal may be removed. That is, the metal deposited on the protrusions may be removed from the replica crosslinked polymer mold 1310 on which the metal is deposited, after being weakened in binding force with the replica crosslinked polymer mold 1310 and then physically impacted through ultrasonic dispersion.

Here, the solvent may be a substance that selectively swells the replication crosslinked polymer mold.

In addition, the replicated crosslinked polymer mold may be formed of a material which forms crosslinks upon curing and which is not dissolved in the solvent, swells without structural change, and is restored to its original form upon evaporation of the solvent. In particular, the replicated crosslinked polymer mold may have different degrees of swelling in each of the protruding portion and the depressed portion.

At this time, the first concavo-convex pattern is formed so as to have at least one of a dot pattern, a line pattern, a net pattern, or a polygonal pattern including an indentation portion and a projection portion having a preset width and depth, Lt; / RTI >

Accordingly, the metal 1320 deposited on the indentation is also embedded in the surface of the replica crosslinked polymer mold 1310 in the form of a dot pattern, a line pattern, a net pattern, or a polygonal pattern, have.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. For example, it is to be understood that the techniques described may be performed in a different order than the described methods, and / or that components of the described systems, structures, devices, circuits, Lt; / RTI > or equivalents, even if it is replaced or replaced.

Therefore, other implementations, other embodiments, and equivalents to the claims are also within the scope of the following claims.

Claims (14)

A method of manufacturing a transparent transparent electrode based on a sonication assisted selective lift-off process using ultrasonic dispersion,
Depositing a metal on the first concavo-convex pattern of the replication crosslinked polymer mold;
The replicated crosslinked polymer mold having the metal deposited thereon is immersed in a solvent to swell the replicated crosslinked polymer mold to form a metal layer on the protruded portion and the indented portion of the first concave- Weakening the bonding force between the first electrode and the second electrode; And
Removing the metal deposited on the protrusions from the cloned crosslinked polymer mold on which the metal is deposited using ultrasonic dispersion,
Wherein the transparent conductive film is a transparent conductive film. The method according to claim 1,
The step of removing the metal deposited on the protrusions from the cloned crosslinked polymer mold on which the metal is deposited
Applying a physical impact to the metal deposited on the protruded portion having weakened binding force with the duplicated crosslinked polymer mold through the ultrasonic dispersion to remove the metal deposited on the protruded portion from the duplicated crosslinked polymer mold on which the metal is deposited, Method of manufacturing flexible transparent electrodes. The method according to claim 1,
The solvent
And a material capable of selectively swelling the replica crosslinked polymer mold. The method according to claim 1,
The replication crosslinked polymer mold
Wherein the solvent is formed from a substance which forms crosslinks upon curing and which is not soluble in the solvent and swells without structural modification and which is restored to its original form upon evaporation of the solvent. 5. The method of claim 4,
The cloned crosslinked polymer mold
Wherein the degree of swelling in each of the projecting portion and the indentation portion is different from each other. The method according to claim 1,
The first concavo-convex pattern
A line pattern, a net pattern, or a polygonal pattern including the depressions and protrusions having a preset width and depth. The method according to claim 1,
Fabricating a master mold in which a second concavo-convex pattern is formed on the surface; And
Generating the duplicated crosslinked polymer mold in which the first concavo-convex pattern, which is a reverse phase of the second concavo-convex pattern, is formed on the surface using the master mold,
Further comprising the step of: The method according to claim 1,
The step of depositing a metal on the first concavo-convex pattern of the replica cross-linked polymer mold
Depositing the metal on the first irregular pattern using at least one of a thermal evaporation technique, an e-beam evaporation technique, or a sputtering technique,
Wherein the transparent conductive film is a transparent conductive film. A flexible transparent electrode fabricated on the basis of a sonication assisted selective lift-off process using ultrasonic dispersion,
A duplicated crosslinked polymer mold produced so that a first concave-convex pattern is formed on the surface; And
And a protruding portion of the first concave-convex pattern and a metal
/ RTI >
The metal deposited on the indentation
A metal is deposited on the first concavo-convex pattern of the duplicated crosslinked polymer mold, and a duplicated crosslinked polymer mold in which the metal is deposited in a solvent is selectively swollen by the duplicated crosslinked polymer mold, Wherein the bonding force between the duplicated crosslinked polymer mold is weakened so that the metal deposited on the protruded portion is removed from the duplicated crosslinked polymer mold on which the metal is deposited by using ultrasonic dispersion. 10. The method of claim 9,
The metal deposited on the protrusions
Wherein the metal is removed from the duplicated crosslinked polymer mold after the metal is weakly bonded to the duplicated crosslinked polymer mold and then physically impacted through the ultrasonic dispersion. 10. The method of claim 9,
The solvent
And a material capable of selectively swelling the replica crosslinked polymer mold. 10. The method of claim 9,
The cloned crosslinked polymer mold
The flexible transparent electrode being formed of a material that forms crosslinks upon curing and that is not soluble in the solvent and swells without structural modification and that is restored to its original form upon evaporation of the solvent. 13. The method of claim 12,
The cloned crosslinked polymer mold
Wherein the degree of swelling in the projecting portion and the indentation portion are different from each other. 10. The method of claim 9,
The first concavo-convex pattern
Wherein the flexible transparent electrode is formed to have at least one of a dot pattern, a line pattern, a net pattern, or a polygonal pattern including the indentation portion and the projection portion having a preset width and depth.

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