KR20170076282A - Flexible transparent electrode based interface energy difference assisted lift-off and manufacturing method thereof - Google Patents

Abstract

According to one embodiment, a method for fabricating a transparent transparent electrode based on an interface energy difference assisted lift-off includes depositing a metal on a second concave-convex pattern of a duplicated crosslinked polymer mold; Transferring the duplicated crosslinked polymer mold on which the metal is deposited to the substrate so that the metal deposited on the protruding portion of the protruding portion and the depressed portion of the second relief pattern abuts the substrate; And separating the cloned crosslinked polymer mold from the substrate to remove the metal deposited on the protrusion from the cloned crosslinked polymer mold on which the metal is deposited.

Description

TECHNICAL FIELD [0001] The present invention relates to a flexible transparent electrode based on a lift-off process using interfacial energy difference, and a fabrication method thereof. [0002]

The following embodiments are directed to a flexible transparent electrode based on interface energy difference assisted lift-off and a method of manufacturing the same. More specifically, the present invention relates to a method of manufacturing a flexible transparent electrode using a difference between interfacial energies of two interfaces To a technique for producing a flexible transparent electrode made of metal embedded in a specific pattern.

As science and technology become more sophisticated, communications and electronic devices are rapidly becoming smaller and lighter in weight as well as in performance in accordance with market demands. Particularly, in recent years, communication and electronic devices are required not only to be flexible but also to be transparent.

Accordingly, flexible and transparent electrodes are being developed in order to manufacture devices requiring transparent and flexible characteristics such as flexible displays, solar cells, and touch panels.

Indium tin oxide (ITO) thin film, which is the most widely used transparent electrode, is not fundamentally suitable for devices requiring high flexibility due to its high hardness due to the characteristics of oxides, and the price of rare earth indium is unstable There is a disadvantage that the manufacturing cost can be increased.

Many researches have been made as an alternative to compensate for the disadvantages of electrodes using ITO thin films, and studies using metal nanowires have been actively conducted. In the case of electrodes using metal nanowires, due to the inherent characteristics of the metal, they have not only a very low sheet resistance but also a good flexibility, a low manufacturing cost, a roll-to-roll process, , It has an advantage that it can be applied as a transparent electrode by having excellent optical characteristics.

However, electrodes using metal nanowires have a fatal disadvantage in that they are not uniformly distributed over the electrodes because the wires are randomly distributed due to the nature of the manufacturing process. This is directly related to the reliability of the electrode performance and can be a serious problem. In addition, the electrode using the metal nanowire has drawbacks of low parallel resistance due to the rough surface of the wires, low efficiency of the optoelectronic device due to high dark current, disadvantage of poor adhesion to the substrate, A large resistance is generated in the semiconductor device. Accordingly, in order to overcome the disadvantage that the electrode having the metal nanowire maintains a low sheet resistance while having poor adhesion with the substrate, it is troublesome to perform a heat treatment at a high pressure and to perform a surface treatment such as an oxygen plasma on the substrate have.

Therefore, the following embodiments propose a flexible transparent electrode overcoming the disadvantages and problems of the electrode using the conventional ITO thin film and the electrode using the metal nanowire, and a manufacturing method thereof.

One embodiment of the present invention provides a flexible transparent electrode overcoming disadvantages and disadvantages of an electrode using a conventional ITO thin film and electrodes using metal nanowires and a method of manufacturing the same.

In particular, one embodiment provides a flexible transparent electrode in which a mesh pattern metal is embedded on the surface of a duplicated crosslinked polymer mold and a method of manufacturing the same, thereby minimizing the vacuum process, lowering the process cost by eliminating the lithography process, And a process method with excellent stability.

In particular, one embodiment provides a flexible transparent electrode based on a superinterval process that utilizes the interfacial energy difference between two interfaces and a method of manufacturing the same.

According to one embodiment, a method of fabricating a transparent transparent electrode based on an interface energy difference assisted lift-off includes depositing a metal on a second concavo-convex pattern of a duplicated crosslinked polymer mold; Transferring the duplicated crosslinked polymer mold on which the metal is deposited to the substrate so that the metal deposited on the protruding portion of the protruding portion and the depressed portion of the second relief pattern abuts the substrate; And separating the cloned crosslinked polymer mold from the substrate to remove the metal deposited on the protrusion from the cloned crosslinked polymer mold on which the metal is deposited.

The step of separating the duplicated crosslinked polymer mold having the metal deposited thereon from the substrate uses the interfacial energy between the metal deposited on the protrusion and the substrate and the interfacial energy difference between the metal deposited on the protrusion and the replicated crosslinked polymer mold And removing the metal deposited on the projection from the duplicated crosslinked polymer mold on which the metal is deposited.

The replicated crosslinked polymer mold and each of the substrates may be formed of materials having different surface energies so as to have different interfacial energies with respect to the metal deposited on the protrusions.

The replicated crosslinked polymer mold may be produced from a crosslinked polymer having a surface energy lower than a predetermined reference value.

The substrate may be formed of at least one of a metal, an oxide, a semiconductor, or a polymer having a surface energy equal to or greater than the predetermined reference value.

 The method of manufacturing a flexible transparent electrode includes: fabricating a master mold having a first concavo-convex pattern formed on a surface thereof; And generating the duplicate crosslinked polymer mold in which the second concavo-convex pattern, which is a reverse phase of the first concavo-convex pattern, is formed on the surface using the master mold.

The second concavo-convex pattern may be formed to have at least one of a dot pattern, a line pattern, a net pattern, or a polygonal pattern including an indentation portion and a projection portion having a preset width and depth.

The step of depositing the metal on the second concavo-convex pattern of the duplicated crosslinked polymer mold may be performed by using at least one of a thermal evaporation technique, an e-beam evaporation technique or a sputtering technique And depositing the metal on the second concave-convex pattern.

The step of transferring the duplicated crosslinked polymer mold on which the metal is deposited to the substrate may include transferring the duplicated crosslinked polymer mold on which the metal is deposited to the substrate under a predetermined temperature environment.

According to one embodiment, a flexible transparent electrode fabricated on the basis of an interface energy difference assisted lift-off is formed by a replication crosslinked polymer mold produced so that a second concavo-convex pattern is formed on the surface; And a metal deposited on the indentation portion of the protruding portion and the indentation portion of the second concavo-convex pattern of the duplicated crosslinked polymeric mold, wherein the metal deposited on the indented portion is a metal having a metal on the second concavo- A replicated crosslinked polymer mold having the metal deposited thereon is transferred to the substrate so that the metal deposited on the protrusion abuts the substrate and the metal is deposited as the replicated crosslinked polymer mold on which the metal is deposited is separated from the substrate, And the metal deposited on the protrusion is removed from the copied crosslinked polymer mold.

Wherein the metal deposited on the protrusions is formed by using an interfacial energy between the metal deposited on the substrate and the protrusions and a difference in interfacial energy between the metal on the protrusions and the replica cross-linked polymer mold, Can be removed from the mold.

The replicated crosslinked polymer mold and each of the substrates may be formed of materials having different surface energies so as to have different interfacial energies with respect to the metal deposited on the protrusions.

The replicated crosslinked polymer mold may be produced from a crosslinked polymer having a surface energy lower than a predetermined reference value.

The substrate may be formed of at least one of a metal, an oxide, a semiconductor, or a polymer having a surface energy equal to or greater than the predetermined reference value.

One embodiment of the present invention can provide a flexible transparent electrode overcoming disadvantages and disadvantages of the electrode using the conventional ITO thin film and the electrode using the metal nanowire and a manufacturing method thereof.

In particular, one embodiment provides a flexible transparent electrode in which a mesh pattern metal is embedded on the surface of a duplicated crosslinked polymer mold and a method of manufacturing the same, thereby minimizing the vacuum process, lowering the process cost by eliminating the lithography process, And a process method with excellent stability can be proposed.

In addition, one embodiment of the present invention is a flexible transparent electrode having excellent reliability because a metal of a net pattern is integrated with no interface contact, and thus there is no interface resistance and an additional process such as heat treatment is omitted and a uniform distribution is obtained in the whole area. Method can be provided.

Particularly, one embodiment can provide a flexible transparent electrode based on a super-short process using the difference in interfacial energy between two interfaces and a method of manufacturing the same.

In addition, one embodiment of the present invention can be applied to fabrication of a low-cost, high-performance device by providing a flexible transparent electrode based on a super-short process and a manufacturing method thereof.

In addition, one embodiment of the present invention provides a flexible transparent electrode based on a super-finishing process in which an etching process is omitted, and a method of manufacturing the same, thereby solving the drawback that residues remain in the process of forming a structure, .

In addition, one embodiment of the present invention provides a flexible transparent electrode in which a mesh pattern metal is embedded on the surface of a duplicated cross-linked polymer mold and a method of manufacturing the same, so that irregularities protruding out of the surface in the final form are not formed, , Chemical and thermal stability, and can be applied to various fields.

In addition, one embodiment of the present invention provides a flexible transparent electrode in which a metal of a net pattern is embedded on the surface of a duplicated crosslinked polymer mold and a method of manufacturing the same, thereby making it possible to easily form a composite with other materials such as polymers and two- Method can be proposed.

In addition, one embodiment of the present invention can realize a low-cost electronic equipment manufacturing process by providing a flexible transparent electrode applicable to various devices such as electronic equipment manufacturing through a printing process such as a roll-to-roll process and a manufacturing method thereof.

In addition, one embodiment can propose a process method applicable to various devices such as a polarizing plate by applying various patterns such as a dot pattern, a line pattern, and a polygonal pattern, as well as a net pattern on the surface of a duplicated crosslinked polymer mold.

FIGS. 1 through 7 illustrate a method of fabricating a flexible transparent electrode based on a lift-off process using an interfacial energy difference according to an embodiment.
8 is a plan view of a flexible transparent electrode according to an embodiment.
9 is a Scanning Electron Microscopy (SEM) photograph showing an end face portion of a master mold according to an embodiment.
10 is a scanning electron microscope (SEM) image of a duplicated crosslinked polymer mold in which a metal is deposited on a second relief pattern according to an embodiment.
11 is a scanning electron microscope (SEM) image of a flexible transparent electrode formed of a metal deposited on an indented portion of a second concavo-convex pattern according to an embodiment and a substrate transferred with a metal deposited on a protrusion of a second concavo-convex pattern.
12 is a flowchart illustrating a method of manufacturing a flexible transparent electrode based on a lift-off process using an interfacial energy difference according to an embodiment.
13 is a block diagram of a flexible transparent electrode fabricated on a lift-off process using an interfacial energy difference according to one embodiment.

Hereinafter, embodiments according to the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to or limited by the embodiments. In addition, the same reference numerals shown in the drawings denote the same members.

Also, terminologies used herein are terms used to properly represent preferred embodiments of the present invention, which may vary depending on the user, intent of the operator, or custom in the field to which the present invention belongs. Therefore, the definitions of these terms should be based on the contents throughout this specification.

FIGS. 1 through 7 illustrate a method of fabricating a flexible transparent electrode based on a lift-off process using an interfacial energy difference according to an embodiment.

Hereinafter, it is described that a flexible transparent electrode manufacturing method based on a lift-off process using an interfacial energy difference is performed by a flexible transparent electrode manufacturing system.

First, in the flexible transparent electrode manufacturing system, as shown in Fig. 1 which is a cross-sectional view showing a master mold, a master mold 110 having a first concave-convex pattern 111 formed on its surface is manufactured. For example, the flexible transparent electrode manufacturing system can produce the master mold 110 such that the first irregular pattern 111 is formed on the surface, based on a material such as silicon (Si), silica (SiOx), metal, have.

At this time, the first concavo-convex pattern 111 of the master mold 110 may be formed in consideration of the second concavo-convex pattern to be formed on the surface of the duplicated crosslinked polymer mold described later. A detailed description thereof will be given below.

Since the master mold 110 manufactured in this way can be used repeatedly semi-permanently to manufacture a plurality of transparent transparent electrodes as in the manufacturing process of the transparent transparent electrode described later, the production cost of the transparent transparent electrode can be reduced.

A scanning electron microscope (SEM) photograph showing the cross section of the master mold 110 described above is shown in FIG.

Next, in the flexible transparent electrode manufacturing system, as shown in FIG. 2, which is a cross-sectional view showing a duplicated crosslinked polymer mold, a second uneven pattern 221, which is a reverse phase of the first uneven pattern 211, To form a duplicated crosslinked polymer mold 220 formed.

For example, in the flexible transparent electrode manufacturing system, a cross-linked polymer is applied on the first concave-convex pattern 211 of the master mold 210, ultraviolet curing is performed, and then the master mold 210 is removed , A duplicated crosslinked polymer mold 220 can be produced.

이하의 표면 에너지를 갖는 PDMS(polydimethylsiloxane)이나 PUA(polyurethane acrylate) 등과 같은 탄성 가교 고분자가 이용될 수 있다.At this time, the crosslinked polymer may have a surface energy lower than a predetermined reference value. For example, as a crosslinking polymer,

Elastic cross-linked polymers such as PDMS (polydimethylsiloxane) and PUA (polyurethane acrylate) having a surface energy of not more than 50% can be used.

내지

의 폭과

내지

의 깊이를 갖도록 점 패턴, 라인 패턴, 그물 패턴 또는 다각 패턴 중 적어도 어느 하나의 형태를 갖도록 복제 가교 고분자 몰드(220)의 표면에 형성될 수 있다. 다른 예를 들면, 제2 요철 패턴(221)은 만입부(222)가

내지

의 폭과

내지

의 깊이를 갖도록 형성될 수도 있다.The second concave-convex pattern 221 may be a duplicate or a duplicate pattern having at least one of a dot pattern, a line pattern, a net pattern, or a multiple pattern including the indentation 222 and the protrusion 223 having a preset width and depth. (Hereinafter, the second concave-convex pattern 221 is described as being formed to have a net pattern). For example, the second concavo-convex pattern 221 is formed by the indentation 222

To

And

To

May be formed on the surface of the replication crosslinked polymer mold 220 so as to have a depth of at least one of a dot pattern, a line pattern, a net pattern, or a polygonal pattern. In another example, the second concave-convex pattern 221 is formed by the indentation 222

To

And

To

As shown in FIG.

1, the first concave-convex pattern 211 of the master mold 210 is formed into a reverse-phase pattern of the above-described shape, so that the second concave-convex pattern 221 Can have a pattern of the above-described type.

The replicated cross-linking polymer mold 220 is not limited to being produced using the master mold 210 as described with reference to FIGS. 1 to 2, but may be produced through various existing mold generation methods.

Then, the flexible transparent electrode manufacturing system deposits the metal 320 on the second concave-convex pattern 311 of the replica-crosslinked polymer mold 310 as shown in FIG. 3, which is a cross-sectional view of the replica-crosslinked polymer mold on which the metal is deposited . At this time, the metal 320 may be separately deposited on the indentation 312 and the protrusion 313 of the second concavo-convex pattern 311.

For example, the flexible transparent electrode manufacturing system may be fabricated by using at least one of a thermal evaporation technique, an e-beam evaporation technique, or a sputtering technique to form a second concave-convex pattern 311 A metal such as silver (Ag) or copper (Cu) may be deposited. However, the metal is not limited thereto, and various materials that can be utilized as electrodes can be used.

A scanning electron microscope photograph showing the replication crosslinked polymer mold 310 in which the metal 320 is deposited on the second concavo-convex pattern 311 is shown in FIG.

4, which is a cross-sectional view showing a process of transferring the copied crosslinked polymer mold on which the metal is deposited, to the substrate, the protruding portion 412 and the indent portion 413 of the second concavo- The copied crosslinked polymer mold 410 on which the metals 414 and 415 are deposited is transferred onto the substrate 420 so that the metal 414 deposited on the protruding portion 412 abuts on the substrate 420. [

The metal layer 415 deposited on the indentation 413 contacts the substrate 420 because the reprographically crosslinked polymer mold 410 on which the metals 414 and 415 are deposited uniformly contacts the substrate 420. [ .

이상의 표면 에너지를 갖는 금속, 산화물, 반도체 또는 PVA(polyvinyl alcohol)와 같은 고분자 중 적어도 어느 하나의 물질로 생성될 수 있다.Here, the substrate 420 may be formed of at least one of a metal, an oxide, a semiconductor, and a polymer having a surface energy equal to or greater than a predetermined reference value. For example, the substrate 420 may be

Or a polymer such as a metal, an oxide, a semiconductor, or a polyvinyl alcohol (PVA) having a surface energy equal to or greater than the surface energy.

The flexible transparent electrode manufacturing system may also transfer the copied crosslinked polymer mold 410 on which the metals 414 and 415 are deposited to the substrate 420 under a preset temperature environment (for example, under a temperature environment of 70 degrees Celsius) .

When the copied crosslinked polymer mold 410 on which the metals 414 and 415 are deposited is transferred to the substrate 420 as described above, the interfacial energy between the substrate 420 and the metal 414 deposited on the protrusion 412 The interfacial energies between the duplicated crosslinked polymer mold 410 and the metal 414 deposited on the protrusion 412 have different values.

5, when the surface energy of the substrate 510 is equal to or greater than a predetermined reference value and the replica crosslinked polymer mold 520 is a surface having a predetermined reference value or less, The interfacial energy between the metal 522 deposited on the protrusions 521 and the replica bridging polymer mold 520 is lower than the interface energy between the metal 522 deposited on the protrusions 521 and the substrate 510, Lt; / RTI > The metal 522 deposited on the protrusion 521 remains on the substrate 510 when the duplicate crosslinked polymer mold 520 on which the metal 522 is deposited is separated from the substrate 510. [

6, which is a cross-sectional view showing a process of separating a duplicated crosslinked polymer mold on which a metal is deposited, from a substrate, a flexible transparent electrode manufacturing system includes a duplicated crosslinked polymer mold (611, 612) 612 is removed from the substrate 620 to remove the metal 611 deposited on the protrusion 613 from the substrate 620. The metal 612 is then removed from the substrate 620. [

For example, the flexible transparent electrode manufacturing system may include an interfacial energy between the metal 611 deposited on the protrusion 613 and the substrate 620, and a metal 611 deposited on the protrusion 613 and a replication crosslinked polymer mold 610, The metal 611 deposited on the indentation 614 is removed by removing the metal 611 deposited on the protrusion 613 from the replicated crosslinked polymer mold 610 on which the metals 611 and 612 are deposited, (612).

The flexible transparent electrode formed of the metal 612 deposited on the indented portion 614 of the second concave-convex pattern and the substrate 620 transferred with the metal 611 deposited on the protruded portion 613 of the second concave- The scanning electron micrograph shown is shown in Fig.

Since each of the duplicated crosslinked polymer mold 610 and the substrate 620 is formed of a material having different surface energies so as to have different interfacial energies with respect to the metal 611 deposited on the protruding portion 613, The electrode manufacturing system can fabricate a transparent transparent electrode based on a super short process using the difference in interfacial energy between two interfaces.

7, which is a cross-sectional view of the transparent transparent electrode, and FIG. 8, which is a plan view, the protruded portion 711 of the second concave-convex pattern of the duplicated crosslinked polymer mold 710 and the duplicated crosslinked polymer mold 710, And a metal 720 deposited on the indentation 712 in the indent 712. [0064]

As described above, in the flexible transparent electrode manufacturing system, the second concave-convex pattern (the protruding portion 711 and the depressed portion 712) of the replica cross-linked polymer mold 710 is patterned into at least one of a dot pattern, a line pattern, The metal 720 deposited on the indentation 712 is embedded in the surface of the replica crosslinked polymer mold 710 in the form of a dot pattern, a line pattern, a net pattern, or a polygonal pattern, A transparent transparent electrode can be produced.

Therefore, the flexible transparent electrode manufacturing system has advantages of excellent mechanical, chemical, and thermal stability because it does not have irregularities protruding out of the surface in the final form, and can propose a process method applicable to various fields. In addition, the flexible transparent electrode manufacturing system can minimize the vacuum process, eliminate the lithography process, lower the process cost, and propose a process method that is excellent in reliability and stability. In addition, the flexible transparent electrode manufacturing system eliminates the disadvantage that residues remain in the structure forming process by omitting the etching process, and can prevent damage to the mold.

In addition, the above-described flexible transparent electrode manufacturing method can be applied to production of a low-cost high-performance device in various device fields such as a polarizing plate, can be compounded with other materials such as polymers and two-dimensional materials, Can be realized.

12 is a flowchart illustrating a method of manufacturing a flexible transparent electrode based on a lift-off process using an interfacial energy difference according to an embodiment.

Referring to FIG. 12, a flexible transparent electrode manufacturing system according to an exemplary embodiment may fabricate a master mold 1210 having a first concave-convex pattern formed on its surface.

At this time, the first concavo-convex pattern is a pattern having a second concavo-convex pattern formed on the surface of the replica cross-linked polymer mold described later, at least a point pattern, a line pattern, a net pattern, It can be formed in a reversed phase of the second concavo-convex pattern so as to have any one of the shapes.

Next, in the flexible transparent electrode manufacturing system, a duplicate crosslinked polymer mold having a second concave-convex pattern, which is a reverse phase of the first concave-convex pattern, is formed on the surface using the master mold (1220).

Specifically, in step 1220, the flexible transparent electrode manufacturing system includes a step of applying a crosslinking polymer on the first concavo-convex pattern of the master mold to produce a replicated crosslinked polymer mold, and forming a crosslinked polymer applied on the first concave- (UV curing) can be performed on the substrate.

However, the present invention is not limited to this, and the flexible transparent electrode manufacturing system can be used not only to produce a duplicated crosslinked polymer mold using the master mold as described with reference to steps 1210 to 1220, A polymer mold may be produced.

The flexible transparent electrode manufacturing system then deposits 1230 the metal on the second concave-convex pattern of the replicated cross-linked polymer mold. For example, the flexible transparent electrode manufacturing system may be fabricated by using at least one of a thermal evaporation technique, an e-beam evaporation technique, or a sputtering technique, Metal can be deposited.

Next, in the flexible transparent electrode manufacturing system, a duplicated crosslinked polymer mold having metal deposited thereon is transferred to the substrate (1240) so that the metal deposited on the protrusions of the second concave-convex pattern and the protrusions of the indentation abuts the substrate.

At this time, in step 1240, the flexible transparent electrode manufacturing system may transfer the copied crosslinked polymer mold on which the metal is deposited, to the substrate under a preset temperature environment.

The flexible transparent electrode manufacturing system then separates (1250) the replicated cross-linked polymer mold from which the metal has been deposited, from the substrate, to remove the metal deposited on the protrusions from the replicated cross-linked polymer mold on which the metal has been deposited.

At this time, each of the duplicated crosslinked polymer mold and the substrate may be formed of a material having different surface energies so as to have different interfacial energies with respect to the metal deposited on the protrusions. For example, the replica crosslinked polymer mold may be formed of a crosslinked polymer having a surface energy of less than a preset reference value, and the substrate may be a material of at least one of metal, oxide, semiconductor, or polymer having a surface energy of a predetermined reference value or more Lt; / RTI >

Therefore, in step 1250, the flexible transparent electrode manufacturing system uses the interfacial energy between the metal deposited on the protrusions and the substrate, and the interfacial energy difference between the metal deposited on the protrusions and the replicated crosslinked polymer mold, It is possible to remove the metal deposited on the projection from the mold.

13 is a block diagram of a flexible transparent electrode fabricated on a lift-off process using an interfacial energy difference according to one embodiment.

Referring to FIG. 13, a flexible transparent electrode fabricated on the basis of a lift-off process using an interfacial energy difference according to an embodiment includes a duplicated crosslinked polymer mold 1310 and a metal 1320 deposited on the indentation.

The duplicated crosslinked polymer mold 1310 is formed so that a second concave-convex pattern is formed on the surface. For example, the duplicated crosslinked polymer mold 1310 can be formed on the surface with a second concavo-convex pattern, which is a reverse phase of the first concavo-convex pattern, using the master mold having the first concavo-convex pattern formed on the surface thereof.

The metal 1320 deposited at the indentation means a metal deposited on the protruding portion of the second concave-convex pattern of the duplicated crosslinked polymer mold 1310 and the indentation portion of the indentation portion.

The metal 1320 deposited at the indentation can be formed based on a lift-off process using the interfacial energy difference described with reference to Figs. 1 to 7 and Fig.

For example, the metal 1320 deposited at the indented portion may be a replicated cross-linked polymer having a metal deposited on the second concave-convex pattern of the replica cross-linked polymer mold 1310 and a metal deposited on the protruded portion, The mold 1310 is transferred to the substrate and the metal deposited on the protrusions is removed from the cloned crosslinked polymer mold 1310 on which the metal is deposited as the cloned crosslinked polymer mold 1310 on which the metal is deposited is separated from the substrate have.

At this time, each of the replication crosslinked polymer mold 1310 and the substrate may be formed of a material having different surface energies so as to have different interfacial energies with respect to the metal deposited on the protrusions. For example, the replica crosslinked polymer mold 1310 is formed of a crosslinked polymer having a surface energy lower than a preset reference value, and the substrate is formed of at least one of a metal, an oxide, a semiconductor, or a polymer having a surface energy of a predetermined reference value or more .

Thus, the metal deposited on the protrusions may be formed by using the interfacial energy between the substrate and the metal deposited on the protrusions, and the interfacial energy difference between the replicated crosslinked polymer mold 1310 and the metal deposited on the protrusions, Gt; 1310 < / RTI >

As described above, the second concavo-convex pattern (protruding portion and indented portion) of the duplicated crosslinked polymer mold 1310 is formed to have at least one of a dot pattern, a line pattern, a net pattern, or a polygonal pattern, The metal 1320 may also be embedded in the surface of the replication crosslinked polymer mold 1310 in the form of a dot pattern, a line pattern, a net pattern, or a polygonal pattern to form a flexible transparent electrode.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. For example, it is to be understood that the techniques described may be performed in a different order than the described methods, and / or that components of the described systems, structures, devices, circuits, Lt; / RTI > or equivalents, even if it is replaced or replaced.

Therefore, other implementations, other embodiments, and equivalents to the claims are also within the scope of the following claims.

Claims (14)

A method of manufacturing a transparent transparent electrode based on interface energy difference assisted lift-off using interfacial energy difference,
Depositing a metal on the second concave-convex pattern of the replica cross-linked polymer mold;
Transferring the duplicated crosslinked polymer mold on which the metal is deposited to the substrate so that the metal deposited on the protruding portion of the protruding portion and the depressed portion of the second relief pattern abuts the substrate; And
Separating the cloned crosslinked polymer mold from which the metal is deposited to remove the metal deposited on the protrusion from the cloned crosslinked polymer mold on which the metal is deposited
Wherein the transparent conductive film is a transparent conductive film. The method according to claim 1,
The step of separating the replica cross-linked polymer mold from which the metal is deposited from the substrate
The interfacial energy between the metal deposited on the protrusions and the substrate, and the interfacial energy difference between the metal deposited on the protrusions and the replica crosslinked polymer mold, the metal oxide deposited on the protrusion from the replica crosslinked polymer mold on which the metal is deposited Steps to remove metal
Wherein the transparent conductive film is a transparent conductive film. 3. The method of claim 2,
The replicated crosslinked polymer mold and each of the substrates
Wherein the protruding portion is formed of a material having different surface energies so as to have different interfacial energies with respect to the metal deposited on the protrusions. The method of claim 3,
The cloned crosslinked polymer mold
Wherein the crosslinked polymer is produced from a crosslinked polymer having a surface energy lower than a preset reference value. 5. The method of claim 4,
The substrate
Wherein the transparent conductive film is produced from at least one of a metal, an oxide, a semiconductor, and a polymer having a surface energy equal to or greater than the predetermined reference value. The method according to claim 1,
Fabricating a master mold having a first concavo-convex pattern formed on the surface thereof; And
Generating the duplicated crosslinked polymer mold in which the second concavo-convex pattern, which is a reverse phase of the first concavo-convex pattern, is formed on the surface using the master mold,
Further comprising the step of: The method according to claim 1,
The second concavo-
A line pattern, a net pattern, or a polygonal pattern including a depressed portion and a protruding portion having predetermined widths and depths. The method according to claim 1,
The step of depositing a metal on the second concavo-convex pattern of the replica cross-linked polymer mold
Depositing the metal on the second concave-convex pattern using at least one of a vacuum thermal evaporation technique, an e-beam evaporation technique, or a sputtering technique
Wherein the transparent conductive film is a transparent conductive film. The method according to claim 1,
The step of transferring the duplicated crosslinked polymer mold on which the metal is deposited to the substrate
Transferring the copied crosslinked polymer mold on which the metal is deposited to the substrate under a preset temperature environment,
Wherein the transparent conductive film is a transparent conductive film. A flexible transparent electrode fabricated on the basis of an interface energy difference assisted lift-off process using interfacial energy differences,
A duplicated crosslinked polymer mold produced so that a second concavo-convex pattern is formed on the surface; And
A protruding portion of the second concave-convex pattern of the replica bridging polymer mold and a metal deposited on the indentation portion
/ RTI >
The metal deposited on the indentation
A metal is deposited on the second concavo-convex pattern of the duplicated crosslinked polymer mold, a duplicated crosslinked polymer mold on which the metal is deposited is transferred onto the substrate so that the metal deposited on the protrusion contacts the substrate, Wherein the metal deposited on the protrusion is removed from a replica crosslinked polymer mold in which the metal is deposited as the crosslinked polymer mold is separated from the substrate. 11. The method of claim 10,
The metal deposited on the protrusions
Wherein the metal is removed from the duplicated crosslinked polymer mold by using the interfacial energy between the substrate and the metal deposited on the projection and the difference in interfacial energy between the metal of the replicated crosslinked polymer and the metal deposited on the projection, electrode. 12. The method of claim 11,
The replicated crosslinked polymer mold and each of the substrates
Wherein the transparent electrode is made of a material having different surface energies so as to have different interfacial energies with respect to the metal deposited on the protrusions. 13. The method of claim 12,
The cloned crosslinked polymer mold
A flexible transparent electrode, which is produced from a crosslinked polymer having a surface energy lower than a predetermined reference value. 14. The method of claim 13,
The substrate
Wherein the transparent transparent electrode is formed of at least one of a metal, an oxide, a semiconductor, and a polymer having surface energy equal to or greater than the predetermined reference value.

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