KR20180043530A - Flexible transparent electrode based on mechanical force wiping lift-off process and manufacturing method thereof - Google Patents

Abstract

According to an embodiment, a method of manufacturing a flexible transparent electrode based on a mechanical force wiping lift-off process includes: a step of depositing metal on a first uneven pattern of a reproductive cross-linking polymer mold; a step of weakening the bonding force between a reproductive cross-linking polymer mold and metal deposited in a protruding part among the protruding part and a dented part of the first uneven pattern by selectively swelling the reproductive cross-linking polymer mold by soaking the reproductive cross-linking polymer mold in a solvent; and a step of wiping off the metal, deposited in the protruding part, from the reproductive cross-linking polymer mold by using mechanical force. As such, the present invention is capable of reducing costs for processes and improving the reliability and stability of the processes.

Description

TECHNICAL FIELD [0001] The present invention relates to a flexible transparent electrode based on a lift-off process for wiping with physical force, and a manufacturing method thereof. [0002]

The following embodiments are directed to a flexible transparent electrode based on a lift-off process using selective solvent and physical force, and a method for manufacturing the same. More specifically, the present invention relates to a selective swelling phenomenon of a duplicated crosslinked polymer mold by a solvent To a technique for manufacturing a flexible transparent electrode made of a metal embedded in a specific pattern by facilitating the lift-off phenomenon of unnecessary portions.

As science and technology become more sophisticated, communications and electronic devices are rapidly becoming smaller and lighter in weight as well as in performance in accordance with market demands. Particularly, in recent years, communication and electronic devices are required not only to be flexible but also to be transparent.

Accordingly, flexible and transparent electrodes are being developed in order to manufacture devices requiring transparent and flexible characteristics such as flexible displays, solar cells, and touch panels.

Indium tin oxide (ITO) thin film, which is the most widely used transparent electrode, is not fundamentally suitable for devices requiring high flexibility due to its high hardness due to the characteristics of oxides, and the price of rare earth indium is unstable There is a disadvantage that the manufacturing cost can be increased.

Many researches have been made as an alternative to compensate for the disadvantages of electrodes using ITO thin films, and studies using metal nanowires have been actively conducted. In the case of electrodes using metal nanowires, due to the inherent characteristics of the metal, they have not only a very low sheet resistance but also a good flexibility, a low manufacturing cost, a roll-to-roll process, , It has an advantage that it can be applied as a transparent electrode by having excellent optical characteristics.

However, electrodes using metal nanowires have a fatal disadvantage in that they are not uniformly distributed over the electrodes because the wires are randomly distributed due to the nature of the manufacturing process. This is directly related to the reliability of the electrode performance and can be a serious problem. In addition, the electrode using the metal nanowire has drawbacks of low parallel resistance due to the rough surface of the wires, low efficiency of the optoelectronic device due to high dark current, disadvantage of poor adhesion to the substrate, A large resistance is generated in the semiconductor device. Accordingly, in order to overcome the disadvantage that the electrode having the metal nanowire maintains a low sheet resistance while having poor adhesion with the substrate, it is troublesome to perform a heat treatment at a high pressure and to perform a surface treatment such as an oxygen plasma on the substrate have.

Therefore, the following embodiments overcome the disadvantages and problems of the electrode using the conventional ITO thin film and the electrode using the metal nanowire, and propose a flexible transparent electrode excellent in mechanical and chemical stability and a manufacturing method thereof.

One embodiment of the present invention provides a flexible transparent electrode overcoming disadvantages and disadvantages of an electrode using a conventional ITO thin film and electrodes using metal nanowires and a method of manufacturing the same.

Specifically, one embodiment provides a flexible transparent electrode in which a built-in metal forms a specific pattern through a simple lift-off process on the surface of a duplicated crosslinked polymer mold and a method of manufacturing the same, thereby minimizing the vacuum process, Low process costs, and high reliability and stability.

In particular, one embodiment provides a flexible transparent electrode based on a microstep lift-off process that wipes with physical force by using a cloned crosslinked polymer mold that is selectively swollen with a solvent, and a method of manufacturing the same.

According to one embodiment, a method of fabricating a flexible transparent electrode based on a mechanical force wiping lift-off process includes: depositing a metal on a first concave-convex pattern of a duplicated crosslinked polymer mold; The replicated crosslinked polymer mold having the metal deposited thereon is immersed in a solvent to swell the replicated crosslinked polymer mold to form a metal layer on the protruded portion and the indented portion of the first concave- Weakening the bonding force between the first electrode and the second electrode; And wiping off the metal deposited on the projection from the duplicated crosslinked polymer mold on which the metal is deposited by using physical force.

The step of wiping off the metal deposited on the projection from the duplicated crosslinked polymer mold on which the metal is deposited by physical force is performed by removing the metal from the duplicated crosslinked polymer mold on which the metal is deposited, And wiping off the deposited metal using the physical force.

The solvent may be a substance that selectively swells the replica crosslinked polymer mold.

The replicated crosslinked polymer mold may be formed of a material that forms crosslinks upon curing, is not dissolved in the solvent, swells without structural modification, and is restored to its original form upon evaporation of the solvent.

The replicated crosslinked polymer mold may be different from each other depending on the different initial thicknesses of the protrusions and the indentations, wherein the protrusions are swollen to increase the thickness and swell the indentation to increase the thickness.

The first concavo-convex pattern may be formed to have at least one of a dot pattern, a line pattern, a net pattern, or a polygonal pattern including the depressed portion and the protruding portion having a preset width and depth.

The method of manufacturing a flexible transparent electrode includes the steps of: fabricating a master mold having a second concavo-convex pattern formed on its surface; And generating the duplicate crosslinked polymer mold in which the first concavo-convex pattern, which is a reverse phase of the second concavo-convex pattern, is formed on the surface using the master mold.

The step of depositing the metal on the first concavo-convex pattern of the duplicated crosslinked polymer mold may be performed by using at least one of a thermal evaporation technique, an e-beam evaporation technique, or a sputtering technique And depositing the metal on the first relief pattern.

According to one embodiment, a flexible transparent electrode fabricated on the basis of a mechanical force wiping lift-off process comprises a duplicated crosslinked polymer mold produced so that a first irregular pattern is formed on the surface; And a metal deposited on the depressed portion of the protruded portion and the depressed portion of the first concave-convex pattern, wherein the metal deposited on the depressed portion is deposited on the first concave-convex pattern of the duplicated crosslinked polymeric mold, The replication crosslinked polymer mold having the metal deposited thereon is selectively swollen by the replication crosslinked polymer mold to weaken the binding force between the metal deposited on the projection and the replication crosslinked polymer mold, The metal deposited on the protrusion from the mold is formed by wiping off using physical force.

The metal deposited on the protrusions may be removed by wiping with the physical force from the cloned crosslinked polymer mold in which the metal is deposited after the bonding strength with the cloned crosslinked polymer mold is weakened.

The solvent may be a substance that selectively swells the replica crosslinked polymer mold.

The replicated crosslinked polymer mold may be formed of a material that forms crosslinks upon curing, is not dissolved in the solvent, swells without structural modification, and is restored to its original form upon evaporation of the solvent.

The replicated crosslinked polymer mold may be different from each other depending on the different initial thicknesses of the protrusions and the indentations, wherein the protrusions are swollen to increase the thickness and swell the indentation to increase the thickness.

The first concavo-convex pattern may be formed to have at least one of a dot pattern, a line pattern, a net pattern, or a polygonal pattern including the depressed portion and the protruding portion having a preset width and depth.

One embodiment of the present invention can provide a flexible transparent electrode overcoming disadvantages and disadvantages of the electrode using the conventional ITO thin film and the electrode using the metal nanowire and a manufacturing method thereof.

Specifically, one embodiment provides a flexible transparent electrode in which a built-in metal forms a specific pattern through a simple lift-off process on the surface of a duplicated crosslinked polymer mold and a method of manufacturing the same, thereby minimizing the vacuum process, Thereby reducing the process cost, and proposing a process method that is excellent in reliability and stability.

In addition, one embodiment of the present invention is a flexible transparent electrode having excellent reliability because a metal of a net pattern is integrated with no interface contact, and thus there is no interface resistance and an additional process such as heat treatment is omitted and a uniform distribution is obtained in the whole area. Method can be provided.

In particular, one embodiment can provide a flexible transparent electrode based on a microstep lift-off process that wipes using a physical force by using a duplicated crosslinked polymer mold that is selectively swollen with a solvent, and a method of manufacturing the same.

In addition, one embodiment of the present invention can be applied to fabrication of a low-cost, high-performance device by providing a flexible transparent electrode based on a super-short process and a manufacturing method thereof.

In addition, one embodiment of the present invention provides a flexible transparent electrode based on a super-finishing process in which an etching process is omitted, and a method of manufacturing the same, thereby solving the drawback that residues remain in the process of forming a structure, .

In addition, one embodiment of the present invention provides a flexible transparent electrode in which a mesh pattern metal is embedded on the surface of a duplicated cross-linked polymer mold and a method of manufacturing the same, so that irregularities protruding out of the surface in the final form are not formed, , Chemical and thermal stability, and can be applied to various fields.

In addition, one embodiment of the present invention provides a flexible transparent electrode in which a metal of a net pattern is embedded on the surface of a duplicated crosslinked polymer mold and a method of manufacturing the same, thereby making it possible to easily form a composite with other materials such as polymers and two- Method can be proposed.

In addition, one embodiment can propose a process method applicable to various devices such as a polarizing plate by applying various patterns such as a dot pattern, a line pattern, and a polygonal pattern, as well as a net pattern on the surface of a duplicated crosslinked polymer mold.

FIGS. 1-7 illustrate a method of fabricating a flexible transparent electrode based on a lift-off process using a physical force according to an embodiment.
8 is a Scanning Electron Microscopy (SEM) photograph showing a planar portion and an end face portion of a master mold according to an embodiment.
FIG. 9 is a scanning electron micrograph showing a planar portion and an end face portion of a duplicated crosslinked polymer mold according to one embodiment.
10 is a scanning electron microscope (SEM) image of a duplicated crosslinked polymer mold in which a metal is deposited on a first relief pattern according to an embodiment.
11 is a scanning electron micrograph showing a flexible transparent electrode manufactured according to an embodiment.
12 is a flow chart illustrating a method of fabricating a flexible transparent electrode based on a lift-off process using a physical force according to an embodiment.
Figure 13 is a block diagram of a flexible transparent electrode fabricated on a lift-off process basis using physical force to wipe according to one embodiment.

Hereinafter, embodiments according to the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to or limited by the embodiments. In addition, the same reference numerals shown in the drawings denote the same members.

Also, terminologies used herein are terms used to properly represent preferred embodiments of the present invention, which may vary depending on the viewer, the intention of the operator, or the custom in the field to which the present invention belongs. Therefore, the definitions of these terms should be based on the contents throughout this specification.

FIGS. 1-7 illustrate a method of fabricating a flexible transparent electrode based on a lift-off process using a physical force according to an embodiment.

Hereinafter, it is described that a flexible transparent electrode manufacturing method based on a lift-off process using a physical force is performed by a flexible transparent electrode manufacturing system.

The flexible transparent electrode manufacturing system may first produce a master mold 110 as shown in Fig. 1, which is a cross-sectional view showing a master mold, in order to produce a duplicated crosslinked polymer mold having a first concavo-convex pattern formed on its surface, which will be described later. At this time, the second concave-convex pattern 111 may be formed on the surface of the master mold 110. For example, the flexible transparent electrode manufacturing system can form the master mold 111 so that the second concavo-convex pattern 111 is formed on the surface, based on a material such as silicon (Si), silica (SiOx) have.

At this time, the second concavo-convex pattern 111 of the master mold 110 may be formed in consideration of the first concavo-convex pattern to be formed on the surface of the duplicated crosslinked polymer mold described later. A detailed description thereof will be given below.

Since the master mold 110 manufactured in this way can be used repeatedly semi-permanently to manufacture a plurality of transparent transparent electrodes as in the manufacturing process of the transparent transparent electrode described later, the production cost of the transparent transparent electrode can be reduced.

A scanning electron microscope (SEM) photograph showing the plane portion and the cross-sectional portion of the master mold 110 is shown in FIG.

Next, in the flexible transparent electrode manufacturing system, as shown in FIG. 2, which is a cross-sectional view showing the duplicated crosslinked polymer mold, the first uneven pattern 221, which is an inverse of the second uneven pattern 211, To form the resulting cloned crosslinked polymer mold 220.

For example, the flexible transparent electrode manufacturing system may be formed by applying a crosslinking polymer on the second concave-convex pattern 211 of the master mold 210, performing heat or ultraviolet curing, To thereby produce a duplicated crosslinked polymer mold 220. [

At this time, the duplicated crosslinked polymer mold 220 may be formed to swell selectively in a solvent described later. For example, the replicated crosslinked polymer mold 220 may form a crosslinked structure upon curing and may be formed of a material that is not soluble in the solvent, swells without structural modification, and is restored to its original form upon evaporation of the solvent. More specifically, the replication crosslinked polymer mold 220 may be formed of an elastic crosslinked polymer such as PDMS (polydimethylsiloxane) or PUA (polyurethane acrylate).

Particularly, the replica crosslinked polymer mold 220 is formed such that the indentation 222 of the first concave-convex pattern 221 is swollen to increase the thickness and the swollen portion of the protrusion 223 to change the increased thickness . Specifically, the initial thickness of each of the indentations 222 and protrusions 223 of the first concave-convex pattern 221 formed on the surface of the replica crosslinked polymer mold 220 (before the replica crosslinked polymer mold 220 is swollen, The thickness from the surface opposite to the surface on which the first concave-convex pattern 221 is formed to the indentation 222 and the thickness from the surface opposite to the surface on which the first concave- convex pattern 221 is formed The thickness of the protrusion 223 is different from the thickness of the protrusion 223 so that the indentation 222 is swollen and the thickness of the protrusion 223 is increased even if the swelling ratio of each of the indentation 222 and the protrusion 223 is the same. The changes in the increased thickness due to the swollen portion 223 may be different from each other. For example, in the duplicated crosslinked polymer mold 220, the indentation 222 of the first concave-convex pattern 221 may be swollen to swell the protruded portion 223 at an increased thickness, resulting in increased thickness.

내지

의 폭과

내지

의 깊이를 갖도록 점 패턴, 라인 패턴, 그물 패턴 또는 다각 패턴 중 적어도 어느 하나의 형태를 갖도록 복제 가교 고분자 몰드(220)의 표면에 형성될 수 있다.The first concavo-convex pattern 221 may be duplicated to have at least one of a dot pattern, a line pattern, a net pattern, or a multiple pattern including the indentation 222 and the protrusion 223 having a preset width and depth. (Hereinafter, the first concave-convex pattern 221 is described as being formed to have a net pattern). For example, the first concave-convex pattern 221 is formed by the indentation 222

To

And

To

May be formed on the surface of the replication crosslinked polymer mold 220 so as to have a depth of at least one of a dot pattern, a line pattern, a net pattern, or a polygonal pattern.

Thus, in the flexible transparent electrode manufacturing system, the second concave-convex pattern 211 of the master mold 210 is formed in a reverse-phase pattern of the first concave-convex pattern 221 in the process of manufacturing the master mold described with reference to FIG. 1, The first irregular pattern 221 may have a pattern of the above-described shape.

The replicated cross-linking polymer mold 220 is not limited to being produced using the master mold 210 as described with reference to FIGS. 1 to 2, but may be produced through various existing mold generation methods.

A scanning electron microscope photograph showing the planar portion and the cross-sectional portion of the duplicated crosslinked polymer mold 220 described above is shown in Fig.

3, which is a cross-sectional view illustrating a state where a metal is deposited on the duplicated crosslinked polymer mold 310, a metal 320 is formed on the first uneven pattern 311 of the duplicated crosslinked polymer mold 310 Lt; / RTI > At this time, the metal 320 may be separately deposited on the indentation 312 and the protrusion 313 of the first concave-convex pattern 311.

For example, the flexible transparent electrode manufacturing system may be manufactured by using at least one of a thermal evaporation technique, an e-beam evaporation technique, or a sputtering technique, A metal such as silver (Ag) or copper (Cu) may be deposited. However, the metal is not limited thereto, and various materials that can be utilized as electrodes can be used.

A scanning electron microscope photograph showing the replication crosslinked polymer mold 310 in which the metal 320 is deposited on the first concave-convex pattern 311 is shown in FIG.

4, which is a cross-sectional view showing the process of immersing the replication-crosslinked polymer mold in which the metal is deposited, into the solvent, the replication-crosslinked polymer mold (421, 422) 420 to selectively swell the duplicate crosslinked polymer mold 420 so that the indentation 423-1 of the first concavo-convex pattern 423 and the metal deposited on the protrusions 423-2 of the protrusions 423-2 (421) and the replication crosslinked polymer mold (430).

In order, the flexible transparent electrode manufacturing system immerses the replication crosslinked polymer mold 420 on which the metals 421 and 422 are deposited in a solvent 410 such as ethanol or methanol. Here, the solvent 410 may be a substance that selectively swells the replica crosslinked polymer mold 420.

When the replication crosslinked polymer mold 420 on which the metals 421 and 422 are deposited is immersed in the solvent 410 and the replication crosslinked polymer mold 420 absorbs the solvent 410 to cause the swelling phenomenon, The metal 421 deposited on the protrusion 423-2 and the metal 422 deposited on the indentation 423-1 are separated from each other and the metal deposited on the protrusion 423-2 The binding force between the replication crosslinked polymer mold 420 and the replication crosslinked polymer mold 420 is also weakened.

At this time, the coupling force between the metal 421 deposited on the protrusion 423-2 and the duplicate crosslinked polymer mold 420 is increased by the selective swelling of the duplicated crosslinked polymer mold 420 by the solvent 410, -2 because the space between the metal 421 and the protrusion 423-2 is deposited and the solvent 410 penetrates.

5, which is a cross-sectional view showing a process of wiping the metal deposited on the protrusions by physical force, the flexible transparent electrode manufacturing system removes the first, second, third, fourth, fifth, The metal 511 deposited on the protrusion 513-1 of the concave-convex pattern 513 is wiped off by physical force.

Here, since the metal 511 deposited on the protrusion 513-1 has a weakened binding force with the replica bridging polymer mold 510 as described above with reference to Fig. 4, it is easily wiped off even if it is not a large physical force Can be removed.

For example, the flexible transparent electrode manufacturing system uses a wiping machine or the like to apply a physical force (impact) such as frictional force to the metal 511 deposited on the protrusion 513-1, The metal 511 deposited on the protruding portion 513-1 from the duplicated crosslinked polymer mold 510 on which the electrodes 512 and 512 are deposited can be removed.

At this time, in the flexible transparent electrode manufacturing system, a wiping machine or the like is provided with a soft cloth or the like so that the metal 512 deposited on the indentation 513-2 of the first irregular pattern 513 is not separated by a physical force It is possible to smoothly wipe only the metal 511 deposited on the protrusion 513-1.

In the figure, it is shown that the process of wiping off the metal 511 deposited on the protrusion 513-1 by physical force is performed on the replication crosslinked polymer mold 510, which is immersed in the solvent 520 , The process may be carried out after the selective swollen replication crosslinked polymer mold 510 is recovered from the solvent 520.

Further, the above process can be performed not only at room temperature but also under various temperature environments (for example, an environment heated to a constant temperature).

After the metal 511 deposited on the protrusion 513-1 is removed, the metal 512 deposited on the indented portion 513-2 of the first protrusion / ) Will remain.

6 and FIG. 7, which is a cross-sectional view showing the transparent transparent electrode, the reproduced transparent electrode manufacturing system according to the present invention includes a replicated crosslinked polymer mold 610 and a first concave and convex pattern of the replica crosslinked polymer mold 610 The flexible transparent electrode including the protrusion 611 of the pattern and the metal 620 deposited on the indent 612 of the indent 612 can be formed.

As described above, the flexible transparent electrode manufacturing system is a system in which the first concave-convex pattern (the protrusions 611 and the depressions 612) of the duplicated crosslinked polymer mold 610 is formed into a dot pattern, a line pattern, a net pattern, The metal 620 deposited on the indentation 612 is embedded in the surface of the replica crosslinked polymer mold 610 in the form of a dot pattern, a line pattern, a net pattern, or a polygonal pattern, A transparent transparent electrode can be produced. A scanning electron microscope photograph showing the flexible transparent electrode is shown in Fig.

The flexible transparent electrode manufacturing system has advantages of excellent mechanical, chemical, and thermal stability because it does not have irregularities protruding out of the surface in the final form, and can propose a process applicable to various fields. In addition, the flexible transparent electrode manufacturing system can minimize the vacuum process, eliminate the lithography process, lower the process cost, and propose a process method that is excellent in reliability and stability. In addition, the flexible transparent electrode manufacturing system eliminates the disadvantage that residues remain in the structure forming process by omitting the etching process, and can prevent damage to the mold.

In addition, the above-described flexible transparent electrode manufacturing method can be applied to production of a low-cost high-performance device in various device fields such as a polarizing plate, can be compounded with other materials such as polymers and two-dimensional materials, Can be realized.

12 is a flow chart illustrating a method of fabricating a flexible transparent electrode based on a lift-off process using a physical force according to an embodiment.

Referring to FIG. 12, a flexible transparent electrode manufacturing system according to an embodiment deposits a metal on a first concave-convex pattern of a duplicated crosslinked polymer mold (1210). For example, the flexible transparent electrode manufacturing system may be fabricated by using at least one of a thermal evaporation technique, an e-beam evaporation technique, or a sputtering technique, Metal can be deposited.

At this time, the first concavo-convex pattern is formed on the surface of the duplicated crosslinked polymer mold so as to have at least any one of a dot pattern, a line pattern, a net pattern, or a polygonal pattern including an indentation portion and a projection portion having predetermined widths and depths .

Although not shown in the figure, the flexible transparent electrode manufacturing system may use the master mold to produce a replicated crosslinked polymer mold prior to step 1210. [ For example, in a flexible transparent electrode manufacturing system, a master mold in which a second concavo-convex pattern is formed on a surface thereof is fabricated, and a duplicated crosslinked polymer mold having a first concavo-convex pattern, which is a reverse phase of the second concavo- Can be generated.

Then, the flexible transparent electrode manufacturing system immerses the replica crosslinked polymer mold in which the metal is deposited on the solvent to selectively swell the replica crosslinked polymer mold to remove the protruded portion of the first concave-convex pattern and the metal deposited on the protrusion of the indented portion Thereby weakening the bond strength between the crosslinked polymer molds (1220).

Here, the solvent may be a substance that selectively swells the replication crosslinked polymer mold.

In addition, the replicated crosslinked polymer mold may be formed of a material which forms crosslinks upon curing and which is not dissolved in the solvent, swells without structural change, and is restored to its original form upon evaporation of the solvent. In particular, in the replicated crosslinked polymer mold, depending on the initial thickness of each of the protrusions and indentations, the protrusions may be swollen to change the increased thickness and the indentations swell, resulting in differences in the increased thickness.

Thereafter, the flexible transparent electrode manufacturing system wipes 1230 the metal deposited on the protrusion from the replicated crosslinked polymer mold on which the metal is deposited by physical force. That is, the flexible transparent electrode manufacturing system can remove the metal deposited on the protruded portion, which has weakened bonding force with the duplicated crosslinked polymer mold, from the duplicated crosslinked polymer mold on which the metal is deposited by physical force.

Figure 13 is a block diagram of a flexible transparent electrode fabricated on a lift-off process basis using physical force to wipe according to one embodiment.

Referring to FIG. 13, a flexible transparent electrode fabricated on a lift-off process basis using a physical force according to one embodiment includes a replicated crosslinked polymer mold 1310 and a metal 1320 deposited on the indentation.

The duplicated crosslinked polymer mold 1310 is formed so that the first concavo-convex pattern is formed on the surface. For example, the duplicated crosslinked polymer mold 1310 can be formed on the surface with a first concavo-convex pattern, which is a reverse phase of the second concavo-convex pattern, using the master mold having the second concavo-convex pattern formed on the surface thereof.

The metal 1320 deposited on the indentation means a metal deposited on the protruding portion of the first concave-convex pattern of the replica-crosslinked polymer mold 1310 and the indentation portion of the indentation portion.

The metal 1320 thus deposited on the indent may be formed based on a lift-off process that wipes off using the physical force described with reference to Figs. 1-7 and 12.

For example, the metal 1320 deposited on the indented portion is coated with a metal on the first irregular pattern of the replica crosslinked polymer mold 1310, and a replica crosslinked polymer mold 1310 on which a metal is deposited on the solvent, The crosslinked polymer mold 1310 is selectively swollen to weaken the bonding force between the metal deposited on the protrusion and the replicated crosslinked polymer mold so that the metal deposited on the protrusion from the replicated crosslinked polymer mold 1310 on which the metal is deposited exhibits physical force And can be formed by being wiped and removed. That is, the metal deposited on the protrusions may be wiped away by physical force from the replica crosslinked polymer mold 1310 on which the metal is deposited after the binding force with the replicated crosslinked polymer mold 1310 is weakened.

Here, the solvent may be a substance that selectively swells the replication crosslinked polymer mold.

In addition, the replicated crosslinked polymer mold may be formed of a material which forms crosslinks upon curing and which is not dissolved in the solvent, swells without structural change, and is restored to its original form upon evaporation of the solvent. In particular, in the replicated crosslinked polymer mold, depending on the initial thickness of each of the protrusions and indentations, the protrusions may be swollen to change the increased thickness and the indentations swell, resulting in differences in the increased thickness.

At this time, the first concavo-convex pattern is formed so as to have at least one of a dot pattern, a line pattern, a net pattern, or a polygonal pattern including an indentation portion and a projection portion having a preset width and depth, Lt; / RTI >

Accordingly, the metal 1320 deposited on the indentation is also embedded in the surface of the replica crosslinked polymer mold 1310 in the form of a dot pattern, a line pattern, a net pattern, or a polygonal pattern, have.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. For example, it is to be understood that the techniques described may be performed in a different order than the described methods, and / or that components of the described systems, structures, devices, circuits, Lt; / RTI > or equivalents, even if it is replaced or replaced.

Therefore, other implementations, other embodiments, and equivalents to the claims are also within the scope of the following claims.

Claims (14)

A flexible transparent electrode manufacturing method based on a mechanical force wiping lift-off process,
Depositing a metal on the first concavo-convex pattern of the replication crosslinked polymer mold;
The replicated crosslinked polymer mold having the metal deposited thereon is immersed in a solvent to swell the replicated crosslinked polymer mold to form a metal layer on the protruded portion and the indented portion of the first concave- Weakening the bonding force between the first electrode and the second electrode; And
A step of wiping off the metal deposited on the projection from the duplicated crosslinked polymer mold on which the metal is deposited by physical force
Wherein the transparent conductive film is a transparent conductive film. The method according to claim 1,
The step of wiping off the metal deposited on the projection from the duplicated crosslinked polymer mold on which the metal is deposited by physical force
And removing the metal deposited on the protruded portion having weakened binding force with the duplicated crosslinked polymer mold from the duplicated crosslinked polymer mold on which the metal is deposited by using the physical force to remove the metal. The method according to claim 1,
The solvent
And a material capable of selectively swelling the replica crosslinked polymer mold. The method according to claim 1,
The replication crosslinked polymer mold
Wherein the solvent is formed from a substance which forms crosslinks upon curing and which is not soluble in the solvent and swells without structural modification and which is restored to its original form upon evaporation of the solvent. 5. The method of claim 4,
The replication crosslinked polymer mold
Wherein the protrusion is swollen to vary the increased thickness and the indentation swell due to different initial thicknesses of the protrusions and the indentations, respectively, so that changes in the increased thickness are different from each other. The method according to claim 1,
The first concavo-convex pattern
A line pattern, a net pattern, or a polygonal pattern including the depressions and protrusions having a preset width and depth. The method according to claim 1,
Fabricating a master mold in which a second concavo-convex pattern is formed on the surface; And
Generating the duplicated crosslinked polymer mold in which the first concavo-convex pattern, which is a reverse phase of the second concavo-convex pattern, is formed on the surface using the master mold,
Further comprising the step of: The method according to claim 1,
The step of depositing a metal on the first concavo-convex pattern of the replica cross-linked polymer mold
Depositing the metal on the first irregular pattern using at least one of a thermal evaporation technique, an e-beam evaporation technique, or a sputtering technique,
Wherein the transparent conductive film is a transparent conductive film. A flexible transparent electrode fabricated on the basis of a mechanical force wiping lift-off process,
A duplicated crosslinked polymer mold produced so that a first concave-convex pattern is formed on the surface; And
And a protruding portion of the first concave-convex pattern and a metal
/ RTI >
The metal deposited on the indentation
A metal is deposited on the first concavo-convex pattern of the duplicated crosslinked polymer mold, and a duplicated crosslinked polymer mold in which the metal is deposited in a solvent is selectively swollen by the duplicated crosslinked polymer mold, Wherein a metal deposited on the protrusion is wiped off by physical force from a replica crosslinked polymer mold in which the metal is deposited by weakening a bonding force between the duplicated crosslinked polymer mold. 10. The method of claim 9,
The metal deposited on the protrusions
Wherein the polymer is wiped away from the duplicated crosslinked polymer mold on which the metal is deposited by using the physical force after the binding force with the duplicated crosslinked polymer mold is weakened. 10. The method of claim 9,
The solvent
And a material capable of selectively swelling the replica crosslinked polymer mold. 10. The method of claim 9,
The replication crosslinked polymer mold
The flexible transparent electrode being formed of a material that forms crosslinks upon curing and that is not soluble in the solvent and swells without structural modification and that is restored to its original form upon evaporation of the solvent. 13. The method of claim 12,
The replication crosslinked polymer mold
Wherein the protrusion is swollen to vary the increased thickness and swell the indentation to vary the increased thickness according to different initial thicknesses of the protrusions and the indentations, respectively. 10. The method of claim 9,
The first concavo-convex pattern
Wherein the flexible transparent electrode is formed to have at least one of a dot pattern, a line pattern, a net pattern, or a polygonal pattern including the indentation portion and the projection portion having a preset width and depth.

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