KR20170113021A - Resin molding device and resin molding method and discharge device of flowable material - Google Patents

Abstract

The variation of the discharge amount of the fluid resin from the plurality of discharge ports is easily reduced.
The resin molding apparatus comprises a molding die in which a cavity is provided on at least one of upper and lower molds arranged opposite to each other and a resin discharge mechanism 18 for discharging the fluid resin 25 to supply the fluid resin 25 to the cavity, And a mold clamping mechanism for clamping the mold. The resin discharging mechanism 18 includes an oil passage member 38 having a branched oil passage 41 branched between the inlet port 40 and the discharge port 37 of the fluid resin 25, And an interlocking mechanism 43 for rotating the rotary body 45 which is rotatable with the passage of the fluid resin 25 and the rotary body 45 disposed in the branching flow path 41 in cooperation with each other do. As a result, the variation of the discharge amount of the fluid resin 25 from the plurality of discharge ports 37 is easily reduced.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a resin molding apparatus, a resin molding method, and a discharge apparatus for discharging a fluid material,

The present invention relates to a method of sealing a chip-shaped electronic component (hereinafter referred to as " chip ", appropriately) such as a transistor, an integrated circuit (IC) or a light emitting diode The present invention relates to a resin molding apparatus, a resin molding method, and a fluid material dispensing apparatus. In the present application, the term " liquid phase " means liquid at room temperature and has fluidity, and does not require high or low fluidity, in other words, viscosity.

Conventionally, a semiconductor chip mounted on a substrate is resin-sealed using a liquid resin made of a thermosetting resin such as silicone resin or epoxy resin. As the resin sealing technique, resin molding techniques such as compression molding and transfer molding are used. In resin molding using a liquid resin, resin molding is performed by mixing a liquid resin serving as an auxiliary such as a hardening agent and the like into a liquid resin serving as a main agent and heating the mixed liquid resin.

In the resin sealing using the liquid resin, the liquid resin is supplied to the cavity provided in the lower mold from the nozzle provided at the tip of the dispenser serving as the resin discharging mechanism. Corresponding to a product to be sealed with a resin, the size and shape of the cavity vary widely. Accordingly, one cavity having a large area or a plurality of cavities having a small area are provided in the lower mold corresponding to the product. In the case where one cavity is provided in the lower mold, the liquid resin is supplied by one dispenser. Even when a plurality of cavities are provided in the lower mold, the liquid resin can be sequentially supplied to the plurality of cavities by one dispenser. However, since the liquid resin is sequentially supplied to the plurality of cavities by using one dispenser, the time required for supplying the liquid resin is prolonged, and the productivity is lowered. A plurality of dispensers may be provided so as to correspond to the plurality of cavities to supply the liquid resin, but the configuration of the entire apparatus becomes complicated, and the cost also increases.

In order to supply the liquid resin to the plurality of cavities, a plurality of nozzles may be provided at the tip of the dispenser. In this case, a predetermined amount of liquid resin is simultaneously supplied from the plurality of nozzles to the respective cavities. Therefore, it is important to uniformly and stably supply the liquid resin from a plurality of nozzles.

The present invention relates to a molding apparatus capable of performing compression molding by acquiring a plurality of molds. The molding apparatus includes a plurality of branching rods (not shown) for feeding a plasticizing molding material 6 to the tip of an extruder 1 for plasticizing and extruding the resin molding material 6 A multi-nozzle extruder 4 provided with an extruding nozzle 2 provided with an extruding nozzle 3 having a metering mechanism and an extruding mechanism in each of the branch passages 2, And a compression molding die 5 to which the resin molding compound 6 is supplied "(see, for example, paragraph [0005] of Patent Document 1, Figs. 1 to 2).

Japanese Patent Application Laid-Open No. 6-114867

However, the conventional molding apparatus disclosed in Patent Document 1 has the following problems. As shown in Fig. 1 of Patent Document 1, a branch path 2 branched into a plurality of branches is connected to the tip of a delivery path 14 through which the plasticized resin molding material 6 is delivered. A metering / injection unit 17 provided at the base of the extrusion nozzle 3 is connected to the distal end of each branch line 2. The plasticized resin molding material 6 supplied to the metering and injection unit 17 of each extrusion nozzle 3 is metered and injected individually in each metering and injection unit 17, To the respective cavities of the lower mold 5a of the compression-molding metal mold 5 from the nozzle orifices 18 of the respective molds.

In such an apparatus configuration, in each metering / injection unit 17, each unit weighs the plasticized resin molding material 6 supplied to each cavity and injects it into each extrusion nozzle. Therefore, a metering / injection unit 17 corresponding to the number of cavities is provided, and each unit 17 controls the injection amount. Therefore, in order to acquire a large number of devices, the configuration of the apparatus becomes complicated, and the cost of the apparatus becomes high.

It is an object of the present invention to provide a resin molding apparatus, a resin molding method, and a fluid material dispensing apparatus which can easily reduce variations in the discharge amount of the fluid resin from a plurality of discharge ports.

In order to solve the above problems, a resin molding apparatus according to the present invention is characterized by comprising: a molding die provided with a cavity on at least one of an upper mold and a lower mold disposed opposite to each other; The resin discharging mechanism includes a flow path member having a branched flow path branched between an inlet port and a discharge port of the fluid resin, and a flow path member disposed in each branch flow path And an interlock mechanism that rotates the rotator in conjunction with the passage of the fluid resin and rotates the rotors disposed in the branch passage.

In order to solve the above problems, a resin molding method according to the present invention is characterized in that, in order to supply a fluid resin to a cavity by using a mold having a cavity provided on at least one of an upper mold and a lower mold disposed opposite to each other, And a mold clamping step of clamping a mold to which the resin material is supplied, wherein the resin discharging step is a step of discharging the resin material to the mold And the whole is interlocked and rotated, whereby the fluid resin is passed through each of the rotating bodies.

According to an aspect of the present invention, there is provided a fluid material discharging apparatus comprising: a flow path member having a branching flow path branched from an inlet port and a discharge port of a fluid material; And an interlocking mechanism that rotates and rotates each of the rotating bodies disposed in the branching flow passage.

According to the present invention, it is possible to easily reduce variations in the discharge amount of the fluid resin from the plurality of discharge ports.

BRIEF DESCRIPTION OF DRAWINGS FIG. 1 is a plan view showing an outline of an apparatus in a resin molding apparatus according to Embodiment 1. FIG.
2 (a) to 2 (c) are schematic cross-sectional views showing a process of resin-sealing a chip mounted on a substrate in the resin molding apparatus according to the first embodiment.
Fig. 3 (a) is a schematic view showing a dispenser used in the resin molding apparatus according to Embodiment 1, Fig. 3 (b) is a schematic view showing a resin discharging portion used in Embodiment 1, Fig.
Fig. 4 (a) is a schematic view showing a modified example of the resin discharging portion used in the first embodiment, and Fig. 4 (b) is a sectional view taken along the line BB of Fig.
FIG. 5A is a plan view showing a resin discharge portion used in Embodiment 2, and FIG. 5B is a cross-sectional view taken along the line CC of FIG.
Fig. 6A is a plan view showing a resin discharge portion used in Embodiment 3, and Fig. 6B is a cross-sectional view taken along the line DD of Fig.
7 is a schematic sectional view showing a modified example of each resin discharge portion shown in the first to third embodiments.

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments according to the present invention will be described with reference to the drawings. Any drawings in the present application are drawn schematically by omission or exaggeration in order to facilitate understanding. The same components are denoted by the same reference numerals and the description thereof will be appropriately omitted.

[Embodiment 1]

(Configuration of resin molding apparatus)

The configuration of a resin molding apparatus according to the present invention will be described with reference to Fig.

The resin molding apparatus 1 shown in Fig. 1 is a resin molding apparatus using, for example, a compression molding method. The resin molding apparatus 1 includes a substrate supply and storage module 2, four molding modules 3A, 3B, 3C and 3D and a resin supply module 4 as constituent elements. The substrate supply and storage module 2 as a component, the molding modules 3A, 3B, 3C and 3D and the resin supply module 4 can be detached from each other with respect to the respective components, .

The substrate supply and storage module 2 is provided with a pre-sealing substrate supply portion 6 for supplying the unsealed substrate 5 and a sealed substrate storage portion 8 for housing the sealed substrate 7. For example, a semiconductor chip or the like is mounted on the unsealed substrate 5. The loader 9 and the unloader 10 are provided in the substrate supply and storage module 2 and the rail 11 supporting the loader 9 and the unloader 10 is installed along the X direction. The loader 9 and the unloader 10 move along the rail 11 in the X direction.

The loader 9 and the unloader 10 held by the rail 11 are held between the substrate supply and storage module 2 and each of the molding modules 3A, 3B, 3C and 3D and the resin supply module 4 , And moves in the X direction. The loader 9 is provided with a moving mechanism 12 for supplying the unsealed substrate 5 to the upper molds in the respective molding modules 3A, 3B, 3C and 3D. In each molding module, the moving mechanism 12 moves in the Y direction. The unloader 10 is provided with a moving mechanism 13 for receiving the sealed substrate 7 from the upper mold in each of the molding modules 3A, 3B, 3C and 3D. In each molding module, the moving mechanism 13 moves in the Y direction.

The lower mold 14 capable of ascending and descending and the upper mold (not shown, see Fig. 2) arranged opposite to each other are provided in the respective molding modules 3A, 3B, 3C and 3D. The upper mold and the lower mold 14 together form a mold. Each of the molding modules 3A, 3B, 3C and 3D has a mold clamping mechanism 15 for clamping and releasing the upper mold and the lower mold 14 (a portion indicated by chain double-dashed lines in the figure). A cavity (16) is provided in the lower mold (14), which is a space in which the liquid resin as the fluid resin or the liquid resin is accommodated and hardened. In other words, the cavity 16 is a receiving portion in which the liquid resin is accommodated. Fig. 1 shows a case where two cavities 16 are provided in the lower mold 14. Fig. The mold surface of the cavity 16 can be coated with a release film. Here, the configuration in which the cavity is provided in the lower mold will be described, but the cavity may be provided in the upper mold or both the upper mold and the lower mold.

The resin supply module 4 is provided with a resin transport mechanism 17 for supplying a liquid resin to the cavity 16. The resin conveying mechanism 17 is supported by the rails 11 and moves along the rails 11 in the X direction. The resin transport mechanism 17 is provided with a liquid resin discharge mechanism or a dispenser 18 which is a discharge device. The dispenser 18 is provided with a resin discharge portion 19 for discharging the liquid resin to the tip portion. A plurality of nozzles are provided in the resin discharge portion 19 corresponding to the number of the cavities 16 (see Figs. 3 to 7). In the respective molding modules 3A, 3B, 3C and 3D, the dispenser 18 moves in the Y direction by the moving mechanism 20, and supplies the liquid resin to the cavity 16. [

The dispenser 18 shown in Fig. 1 is a one-liquid type dispenser which uses a liquid resin in which a subject and a curing agent are mixed in advance. As the subject, for example, a silicone resin or an epoxy resin having a thermosetting property is used. A two-liquid mixing type dispenser may be used in which the liquid resin is mixed with a base and a curing agent.

The resin supply module 4 is provided with a vacuum exhaust mechanism 21. The vacuum exhaust mechanism 21 forcibly sucks and discharges air from the cavity 16 immediately before the upper and lower molds 14 are clamped in the respective molding modules 3A, 3B, 3C and 3D. The resin supply module 4 is provided with a control section 22 for controlling the operation of the entire resin molding apparatus 1. 1 shows a case in which the vacuum exhaust mechanism 21 and the control unit 22 are provided in the resin supply module 4. As shown in Fig. The vacuum exhaust mechanism 21 and the control unit 22 may be provided in different modules.

The control unit 22 controls the discharge of the liquid resin, transportation of the substrate 5 before the sealing and the sealing substrate 7, heating of the molding die, opening and closing of the molding die, and the like. In other words, the control unit 22 controls each operation in the substrate supply / storage module 2, the molding modules 3A, 3B, 3C, and 3D, and the material supply module 4. [

The control unit 22 may be disposed at any position or may be disposed in at least one of the substrate supply and storage module 2, the molding modules 3A, 3B, 3C, 3D, and the resin supply module 4, It can also be placed outside the module. Further, the control unit 22 may be configured as a plurality of control units that at least partly separate from each other in accordance with the operation to be controlled.

(Operation of resin molding apparatus)

With reference to Figs. 1 to 2, an operation of resin-sealing a chip mounted on a substrate in the resin molding apparatus 1 will be described. The case of using the molding module 3C as the operation of the resin molding apparatus 1 will be described.

The substrate before the sealing 5 with the chip 23 (see FIG. 2A) is mounted on the substrate holding portion 6 before the sealing with the side on which the chip 23 is mounted facing down, To the loader (9). Next, the loader 9 is moved in the + X direction from the substrate supply / storage module 2 along the rail 11 to the forming module 3C.

Next, in the forming module 3C, the pre-sealing substrate 5 is moved to a predetermined position (see Fig. 2A) between the lower mold 14 and the upper mold 24 To-Y direction. The substrate 5 on which the chip 23 is mounted is placed on the underside of the upper die 24 by suction, clamping, or the like. After the substrate 5 is placed on the lower surface of the upper mold 24, the moving mechanism 12 is moved back to the loader 9. The loader 9 is moved to the original stand-by position in the substrate supply / storage module 2.

Next, the dispenser 18 is moved from the stand-by position in the resin supply module 4 to the forming module 3C in the -X direction along the rail 11 by using the resin transport mechanism 17. Next, Thus, the resin conveying mechanism 17 is moved to a predetermined position in the vicinity of the lower die 14 of the module 3C. The moving mechanism 20 is used to move the dispenser 18 to a predetermined position above the lower die 14 (see Fig. 2 (a)).

2 (a), the liquid resin 25 is discharged from the resin discharging portion 19 of the dispenser 18 toward the cavity 16 provided in the lower die 14, as shown in Fig. 2 (a). As a result, the liquid resin 25 is supplied to the cavity 16.

Next, after the liquid resin 25 is supplied to the cavity 16, the dispenser 18 is retracted to the resin conveying mechanism 17 by using the moving mechanism 20. The resin transport mechanism 17 is moved to the original standby position in the resin supply module 4. [

Next, in the forming module 3C, the lower mold 14 is lifted by using the mold clamping mechanism 15 so that the upper mold 24 and the lower mold 14 are clamped together (see FIG. 2B) . The chips 23 mounted on the unsealed substrate 5 are immersed in the liquid resin 25 supplied to the cavities 16. At this time, a predetermined resin pressure can be applied to the liquid resin 25 in the cavity 16 by using the cavity bottom surface member (not shown) provided in the lower mold 14. [

Further, in the mold clamping process, the inside of the cavity 16 may be sucked by using the vacuum evacuation mechanism 21. As a result, air remaining in the cavity 16, bubbles contained in the liquid resin 25, and the like are discharged to the outside of the mold. Further, the cavity 16 is set to a predetermined degree of vacuum.

Next, the liquid resin 25 is heated for a time required for curing the liquid resin 25 by using a heater (not shown) provided in the lower die 14. Thereby, the liquid resin 25 is cured to form the cured resin 26 (see Fig. 2 (c)). Thus, the chip 23 mounted on the unsealed substrate 5 is resin-sealed with the cured resin 26 formed in correspondence with the shape of the cavity 16. After the liquid resin 25 is cured, the upper mold 24 and the lower mold 14 are opened using the mold clamping mechanism 15. A resin-sealed molded article 27 (a sealed substrate 7) is fixed to the lower surface of the upper die 24 (see Fig. 2 (c)).

Next, the loader 9 is retracted to a proper position that does not prevent the unloader 10 from moving to the forming module 3C. The loader 9 is retracted from the substrate supply and storage module 2 to the appropriate position in the molding module 3D or the resin supply module 4, for example. Thereafter, the unloader 10 is moved from the substrate supply / storage module 2 to the forming module 3C along the rail 11 in the + X direction.

Next, in the forming module 3C, after the moving mechanism 13 is moved in the -Y direction to a predetermined position between the lower mold 14 and the upper mold 24, the moving mechanism 13 is moved to the upper mold 24, (7) is received. After receiving the sealed substrate 7, the moving mechanism 13 is returned to the unloader 10. The unloader 10 is returned to the substrate supply and storage module 2 and the sealed substrate 7 is housed in the sealed substrate storage portion 8. At this time, the resin sealing of the first unsealed substrate 5 is completed, and the first sealed completed substrate 7 is completed.

Next, the loader 9, which has been retracted to a proper position in the molding module 3D or the resin supply module 4, is moved to the substrate supply / storage module 2. [ Sealing substrate 5 to the loader 9 from the pre-sealing substrate supply unit 6. [ The resin sealing is repeated as described above.

The controller 22 controls the supply of the substrate 5 before the sealing, the movement of the resin transporting mechanism 17 and the dispenser 18, the discharge of the liquid resin 25, Closing of mold and die opening of lower mold 14, storage of the sealed substrate 7, and the like.

(Configuration of dispenser)

The dispenser 18 used in the resin molding apparatus 1 will be described with reference to Fig. 3, the dispenser 18 includes a resin delivery mechanism 28 for delivering the liquid resin 25, a syringe 29 as a reservoir for storing the liquid resin 25, a liquid resin 25 And a resin discharging portion 19 for discharging the liquid resin 25. The resin discharging portion 19 discharges the liquid resin 25, In the dispenser 18, the dispenser 18 is integrally formed by connecting the resin delivering mechanism 28, the syringe 29, the resin transferring section 30, and the resin discharging section 19. Therefore, the syringe 29 or the resin discharging portion 19 can be replaced with another syringe 29 or the resin discharging portion 19, respectively, depending on the use.

The resin feeding mechanism 28 includes a servo motor 31, a ball screw 32 rotated by the servomotor 31, a slider 32 mounted on a ball screw nut (not shown) A rod 34 fixed to the distal end of the slider 33 and a plunger 35 provided at the distal end of the rod 34. [ The plunger 35 moves in the Y direction via the ball screw 32, the slider 33, and the rod 34, respectively, as the servo motor 31 rotates.

The servo motor 31 is a motor that can control the rotation of the motor. The servo motor 31 has a rotation detector (encoder) 36 for monitoring the rotation of the motor. The encoder 36 detects and feeds back the rotation angle and the rotation speed of the servo motor 31. [ By controlling the rotation of the servo motor 31, position control, speed control, torque control, etc. of the plunger 35 can be performed with high accuracy. Further, by monitoring the load torque of the servo motor 31, it is possible to detect whether or not an abnormality (clogging of liquid resin, etc.) has occurred in the dispenser 18. [

The dispenser 18 shown in Fig. 3 (a) is a single-liquid type dispenser using a liquid resin 25 in which a mixture of a subject and a curing agent is mixed in advance. 3 shows a case in which a resin discharge portion having two resin discharge ports 37 is used as the resin discharge portion 19. As shown in Fig. By replacing the resin discharging portion 19, it is possible to use a resin discharging portion having more resin discharging openings (see Figs. 4 to 7).

(Configuration of Resin Discharge Portion)

3 to 4, a description will be given of Embodiment 1 of the resin discharging portion used in the resin molding apparatus 1. Fig. 3C, the resin discharge portion 19 is provided between the resin inlet port 40 through which the liquid resin 25 flows and the resin discharge port 37 through which the liquid resin 25 is discharged A flow path member 38 having a branched flow path 41 and two nozzles 39 provided at both ends of the flow path member 38. At the center of the flow passage member 38, a resin inlet port 40 through which the liquid resin 25 is supplied is provided. Branching flow paths 41 extending from the resin inlet 40 to both sides along the horizontal direction are provided. Therefore, the branching flow paths 41 are branched into two so as to extend on opposite sides in one axis. The nozzle 39 is provided with a resin flow path 42 connected to the branch flow path 41 and extending along the vertical direction. A resin discharge port (37) is provided at the tip of the resin flow path (42). The nozzle 39 is detachable to the flow path member 38 and can be replaced. A nozzle having a different diameter or shape may be selected and used corresponding to the product or application. 3 (b), 3 (c), 4 (a) and 4 (b), and 5 (b), 6 (b), 7 The shape (direction) and the rotational direction of the groove of the rotating body are schematically shown, and it is not always intended to coincide with the direction in which the liquid resin flows.

The flow path member (38) is provided with a rotary shaft (43) which is a linkage mechanism rotatable in the branch flow path (41). The rotary shaft 43 is supported at both ends of the passage member 38. On both sides of the resin inlet 40, a rotating body 45 having a spiral groove 44 is fitted in the rotating shaft 43, respectively. For example, the rotating body 45 is constituted by a screw, a rotor or the like. Therefore, the rotating body 45 is a rotating body rotating together with the rotating shaft 43, and the rotating shaft 43 is a rotating shaft common to the two rotating bodies 45. The rotating body 45 disposed on both sides of the resin inlet 40 is fitted in the rotating shaft 43 such that the directions of the spiral grooves 44 are opposite to each other. Therefore, the two rotating bodies 45 have the spiral grooves 44 whose directions are opposite to each other. The rotary body 45 and the rotary shaft 43 are integrally rotated in the same direction by the resin pressure of the liquid resin 25 supplied to the resin inlet 40. [ As the rotor constituting the rotating body 45, an eccentrically rotatable rotor used for a mono pump can be used. In the case of using the rotor of the mono pump, for example, a female screw-like elastic body is arranged around the rotor in the branch passage 41, and two universal joints and a coupling By using the rod, the rotor can be eccentrically rotated.

The rotating body 45 can be exchanged corresponding to the type, viscosity, specific gravity, etc. of the liquid resin to be used. Therefore, it is possible to optimize the pitch, height, taper angle, etc. of the material, length, diameter and spiral groove 44 of the rotating body 45 corresponding to the liquid resin.

As shown in Fig. 4, the grooves provided in the rotating body 45 are such that the two rotating bodies 45 are opposite in direction to each other, and when seen in a direction orthogonal to the rotating shaft 43, It is also possible to form a plurality of linear grooves 44a which are inclined with respect to the base plate 43. [ 4A and 4B correspond to FIG. 3B and FIG. 3C, respectively. 4 shows a straight groove 44a when viewed in a direction orthogonal to the rotary shaft 43 but includes at least a portion inclined relative to the rotary shaft 43 in a direction perpendicular to the rotary shaft 43 Shaped groove may be formed.

A hole may be formed in the rotating body 45 instead of the groove. Concretely, the outer circumference of the rotating body 45 as shown in Figs. 3 and 4 may be covered, and the grooves 44 and 44a may be formed as holes.

(Operation of the dispenser)

3, the operation of the dispenser 18 for discharging the liquid resin 25 will be described. As shown in Fig. 3 (a), the ball screw 32 is rotated by rotating the servo motor 31. As shown in Fig. As the ball screw 32 rotates, the slider 33 provided on the ball screw nut advances in the -Y direction. As the slider 33 advances, the rod 34 fixed to the slider 33 advances in the -Y direction. In the syringe 29, the rod 34 advances in the -Y direction so that the plunger 35 provided at the tip of the rod 34 advances in the -Y direction. The plunger 35 advances in the -Y direction so that the liquid resin 25 stored in the syringe 29 is pressed and extruded in the -Y direction. The liquid resin 25 extruded by the plunger 35 is supplied to the flow path member 38 of the resin discharge portion 19 via the resin transferring portion 30.

3B, the liquid resin 25 supplied to the flow path member 38 branches from the resin inflow opening 40 to the branch flow paths 41 on both sides and flows. 3 to 7, directions in which the liquid resin 25 flows are indicated by thick arrows. The branched liquid resin 25 flows to both sides along the spiral grooves 44 formed in the respective rotating bodies 45. Since the rotational body 45 is arranged such that the directions of the spiral grooves 44 are opposite to each other, a force for rotating each of the rotational bodies 45 in the same direction by the resin pressure of the liquid resin 25 . The liquid resin 25 flows from the resin inlet port 40 to both sides and passes through the rotating body 45 in the branching flow path 41 so that the rotating body 45 and the rotating shaft 43 are unified and move in the same direction Rotate. In other words, each of the rotating bodies 45 rotates at the same speed in synchronization with the rotation of the rotating shaft 43.

The liquid resin 25 at the same flow rate can be fed from each rotating body 45 because each rotating body 45 rotates at the same speed. The liquid resin 25 can be uniformly fed by rotating the rotating body 45 and the rotating shaft 43 integrally and rotating at the same speed. Therefore, the rotating body 45 having the spiral grooves 44 has a function as a resin metering section for uniformly delivering the liquid resin 25.

The liquid resin 25 uniformly sent out by the rotating body 45 is supplied to the cavity 16 sequentially through the branch passage 41, the resin passage 42 and the resin discharge port 37 ). Therefore, the liquid resin 25 at the same flow rate can be uniformly supplied to the respective cavities 16 from the two nozzles 39.

(Action effect)

In this embodiment, in order to supply the liquid resin 25, which is a fluid resin or a fluid material, to the cavity 16, the resin dispensing mechanism for discharging the liquid resin 25 or the dispenser 18 serving as the dispensing apparatus may be replaced with a liquid resin 25 A flow path member 38 disposed in each of the branch flow paths 41 and capable of rotating with passage of the liquid resin 25, And a rotating shaft 43 as an interlocking mechanism for rotating the rotating body 45 and the rotating body 45 disposed in the branching flow path 41 in association with each other.

With this configuration, it is possible to easily reduce variations in the discharge amount of the liquid resin 25 from the plurality of discharge ports. Further, by monitoring the load torque at the time of discharging, it is possible to suppress the problem that the liquid resin 25 is discharged only from a part of the discharge ports, for example, when one of the plurality of discharge ports is clogged.

In the present embodiment, the branching flow path 41 is branched into two so as to extend on opposite sides in one axis, and the two rotating bodies 45 are connected to each other by a common rotary shaft 43 The rotating bodies 45 have a spiral groove which is opposite in direction to each other.

With this configuration, it is possible to reliably reduce variations in the discharge amount of the liquid resin 25 from the two discharge ports.

More specifically, according to the present embodiment, in the dispenser 18, two nozzles 39 are provided at both ends of the resin discharge portion 19. In the resin discharge portion 19, a rotary shaft 43 rotatable on the branch passage 41 is provided. The rotary body 45 having the spiral grooves 44 is fitted in the rotary shaft 43 at both sides of the resin inlet 40 provided at the center of the resin discharge portion 19. [ The rotating body 45 and the rotating shaft 43 are integrally rotated in the same direction because the rotating body 45 is fitted in the rotating shaft 43 so that the directions of the spiral grooves 44 are opposite to each other. Each of the rotating bodies 45 rotates at the same speed in synchronization with the rotation of the rotating shaft 43. As a result, the liquid resin 25 having the same flow rate is uniformly fed through the spiral groove 44 of each rotating body 45. The rotating body 45 having the spiral grooves 44 rotates in synchronism with each other so that the respective rotating bodies 45 function as a resin metering section for uniformly delivering the liquid resin 25. [ The liquid resin 25 at the same flow rate can be uniformly supplied to the respective cavities 16 from the two nozzles 39 provided at both ends of the resin discharge portion 19 via the respective rotating bodies 45 .

According to this embodiment, a plurality of rotating bodies 45 having spiral grooves 44 are rotated together with the rotating shaft 43 at the same speed. Each of the rotating bodies 45 functions as a resin metering section for uniformly delivering the liquid resin 25 since the plurality of rotating bodies 45 rotate synchronously. Therefore, the resin metering section having a very simple structure and suppressing the cost can be constructed. Further, the rotating body 45 can be replaced in response to the liquid resin. The most suitable rotating body 45 can be used corresponding to the kind, viscosity, specific gravity, etc. of the liquid resin. Accordingly, it is possible to cope with various liquid resins in a very simple configuration.

In the present embodiment, four molding modules 3A, 3B, 3C, and 3D are arranged and arranged in the X direction between the substrate supply / storage module 2 and the resin supply module 4. [ The substrate supply / storage module 2 and the resin supply module 4 may be provided as one module, and one molding module 3A may be arranged in the X direction. Further, another molding module 3B may be mounted on the molding module 3A. Thus, the molding modules 3A, 3B, ... can be increased or decreased in accordance with the production mode and the production amount. Therefore, the configuration of the resin molding apparatus 1 can be optimized, and productivity can be improved.

In this embodiment, as the resin molding apparatus 1, a configuration including a substrate supply / storage module 2, four molding modules 3A, 3B, 3C, and 3D, and a resin supply module 4 Respectively. The resin molding apparatus is not limited to this structure but may be an apparatus having a function of resin molding including at least a mold, a resin discharging mechanism for discharging the fluid resin, and a mold clamping mechanism for clamping the mold .

[Embodiment 2]

(Configuration of Resin Discharge Portion)

Referring to Fig. 5, the second embodiment of the resin discharging portion used in the resin molding apparatus 1 will be described. The difference from Embodiment 1 is that more nozzles and chambers are provided in the resin discharging portion.

5 (b), the resin discharging portion 46 includes a flow path member 47, and the flow path member 47 includes a plurality of nozzles 48 arranged in parallel. 5 shows a case in which four nozzles 48 are provided on the flow path member 47. In Fig. The number of the nozzles 48 may be five or more, or two or three nozzles may be provided.

The flow path member 47 is provided with a resin inflow port 40 to which the liquid resin 25 is supplied and a branch flow path 41 extending from the resin inflow port 40 to both sides along the horizontal direction. A plurality of parallel flow paths 42a branched from the branch flow path 41 and extending in the vertical direction are juxtaposed to the respective nozzles 48. [ A resin discharge port 37 is provided at the tip of each of the parallel flow paths 42a. The nozzle 48 may be detachably attached to the flow path member 47 so as to be replaceable. Depending on the product or application, different nozzles with different diameters or lengths can be selected and used. Further, if a detachable nozzle is separately provided at the tip of each of the juxtaposed flow paths 42a, the rotating body 45 can be used in common for a plurality of kinds of nozzles.

Each of the nozzles 48 is provided with a rotary shaft 49 which is a rotatable interlocking member in the juxtaposed passage 42a. A rotary body 45 having a spiral groove 44 is fitted in each rotary shaft 49. The rotating body 45 is constituted by a screw or a rotor. The rotating body (45) is a rotating body rotating together with the rotating shaft (49). Each rotary body 45 is fitted in the rotary shaft 49 so that the directions of the spiral grooves 44 are the same. As a result, the rotating body 45 and the rotary shaft 49 rotate integrally and rotate in the same direction. The respective rotary shafts 49 are vertically supported by the upper surface of the passage member 47 and the support member 50.

The shape of the groove may be a plurality of straight grooves (see FIG. 4) as described in the first embodiment, or a plurality of curved grooves. Further, as described in Embodiment 1, a hole may be used instead of the groove.

5A, a pulley 51 is connected to one end of each rotary shaft 49 (the upper end in FIG. 5B) as a rotary plate as a linkage mechanism, as shown in FIG. 5A. And a belt 52, which is an interlocking mechanism capable of rotating in contact with the outer periphery of each pulley 51, is provided so as to surround the respective pulleys 51. Each of the pulleys 51 rotates in the same direction as that of the rotating body 45 via the rotating shaft 49 as each of the rotating bodies 45 rotates in the same direction. The pulleys 51 rotate in the same direction so that the belt 52 rotates. The outer diameters of the respective pulleys 51 can be arbitrarily set.

(Operation of the resin discharge portion)

The operation of discharging the liquid resin 25 from the resin discharge portion 46 will be described with reference to Fig. 5B, the liquid resin 25 supplied to the resin discharging portion 46 branches from the resin inflow opening 40 to the branch flow paths 41 on both sides and flows. The branch flow path 41 is filled with the liquid resin 25 that has branched and flows. The liquid resin 25 flows from the branch flow path 41 to the side flow paths 42a formed in the respective nozzles 48, respectively. In each of the parallel flow paths 42a, the rotary body 45 sandwiched between the rotary shafts 49 is arranged such that the directions of the helical grooves 44 are the same direction. As a result, a force acts to rotate the rotating bodies 45 in the same direction by the resin pressure of the liquid resin 25. Therefore, the liquid resin 25 flows through the respective lined flow paths 42a and passes through the respective rotating bodies 45, so that the rotating body 45 and the rotating shaft 49 rotate integrally and rotate in the same direction.

Each of the pulleys 51 is also rotated by the rotating shaft 49 and the rotating body 45 as shown in Figure 5A so that the rotating body 45 and the rotating shaft 49 are integrated and rotated in the same direction, As shown in Fig. The belts 52 rotate along the outer periphery of the respective pulleys 51 by the frictional force between the pulleys 51 and the belts 52 because the pulleys 51 rotate in the same direction. Thus, the belt 52 is rotated along the outer periphery of the pulley 51 at a constant speed.

By rotating the belt 52 at a constant speed, the belt 52 rotates the respective pulleys 51 in the same direction at the same speed. Each of the pulleys 51 rotates in the same direction at the same speed so that the rotating bodies 45 rotate in the same direction at the same speed via the rotating shaft 49. [ Therefore, each of the rotating bodies 45 rotates in the same direction at the same speed in synchronization with the rotating speed of the belt 52. [ As a result, the liquid resin 25 at the same flow rate can be fed from each of the rotating bodies 45. The rotating body 45 functions as a resin metering section for uniformly delivering the liquid resin 25, since each rotating body 45 rotates synchronously with the rotating speed of the belt 52. [

The liquid resin 25 uniformly discharged by the respective rotating bodies 45 is discharged from the respective resin discharge ports 37 into the cavities. Therefore, the liquid resin 25 at the same flow rate can be uniformly supplied from the four nozzles 48 to the respective cavities.

(Action effect)

The present embodiment includes a plurality of parallel flow paths 42a in which the branch flow paths 41 are arranged and a rotating body 45 is disposed in each of the parallel flow paths 42a. And a pulley 51, which is a rotary plate connected to the rotary shaft 49, and a pulley 51, which is a rotary plate, connected to the rotary shaft 49 and the pulley 51, respectively.

With such a configuration, it is possible to easily reduce variations in the discharge amount of the liquid resin 25 from the plurality of discharge ports regardless of the number of the discharge ports.

The present embodiment further includes a belt 52 that connects pulleys 51 corresponding to the plurality of rotating bodies 45 as the interlocking mechanism and each of the rotating bodies 45 has a helical shape And the grooves 44 of the guide grooves 44 are formed.

With such a configuration, it is possible to reliably reduce variations in the discharge amount of the liquid resin 25 from the plurality of discharge ports, regardless of the number of the discharge ports.

More specifically, according to the present embodiment, in the dispenser 18, a plurality of nozzles 48 for discharging the liquid resin 25 to the resin discharge portion 46 are provided. And a rotatable rotary shaft 49 is provided on the lined path 42a provided in each nozzle 48. [ And each of the rotating shafts 49 is fitted with a rotating body 45 having a spiral groove 44. A pulley 51 is connected to one end of each rotary shaft 49. Each rotary body 45 is fitted in the rotary shaft 49 so that the directions of the helical grooves 44 are the same. Therefore, the rotary body 45, the rotary shaft 49 and the pulley 51 are integrally rotated in the same direction by the resin pressure of the liquid resin 25. The belts 52 rotate at a constant speed along the outer periphery of each of the pulleys 51 because the pulleys 51 rotate in the same direction.

The pulley 51, the rotary shaft 49 and the rotary body 45 integrally rotate in the same direction at the same speed in synchronism with the rotation speed of the belt 52 by rotating the belt 52 at a constant speed . The liquid resin 25 at the same flow rate can be uniformly fed through the helical grooves 44 of the rotating body 45 because each rotating body 45 rotates in the same direction at the same speed . Each rotating body 45 rotates in the same direction at the same speed so that each rotating body 45 functions as a resin metering section for uniformly delivering the liquid resin 25. [ Therefore, the liquid resin 25 at the same flow rate can be uniformly supplied to the respective cavities 16 from the resin discharge port 37 via the respective rotating bodies 45. [

According to the present embodiment, a plurality of nozzles 48 for discharging the liquid resin 25 are provided in the resin discharge portion 46. A plurality of nozzles 48 are provided with rotating bodies 45 each having a spiral groove 44. The rotating body 45 uniformly discharges the liquid resin 25 because each rotating body 45 rotates in the same direction at the same speed in synchronization with the rotating speed of the belt 52. [ Therefore, even when a plurality of cavities are provided, the liquid resin 25 can be uniformly supplied to each cavity.

According to the present embodiment, since the plurality of rotating bodies 45 rotate synchronously, each of the rotating bodies 45 functions as a resin metering section for uniformly delivering the liquid resin 25. Therefore, the resin metering section having a very simple structure and suppressing the cost can be constructed. Further, the rotating body 45 can be replaced in response to the liquid resin. The most suitable rotating body 45 can be used corresponding to the kind, viscosity, specific gravity, etc. of the liquid resin. Accordingly, it is possible to cope with various liquid resins in a very simple configuration.

[Embodiment 3]

(Configuration of Resin Discharge Portion)

Referring to Fig. 6, the third embodiment of the resin discharge portion used in the resin molding apparatus 1 will be described. The difference from the second embodiment is that the respective rotating bodies 45 are rotated in the same direction at the same speed by the combination of gears, not the combination of pulleys and belts.

The structure of the resin discharge portion 46, the flow passage member 47, the nozzle 48, the rotating body 45, the rotary shaft 49, the support member 50, and the like, as shown in Fig. 6 (b) Is exactly the same as Embodiment 2, and a description thereof will be omitted.

As shown in Fig. 6 (a), gears 53, which are interlocking mechanisms, are connected to one end of each rotary shaft 49 (the upper end in Fig. 6 (b)). Between the adjacent gear 53 and the gear 53, another gear 54, which is an interlocking mechanism, is provided so as to be engaged with each gear 53, respectively. Both the gear 53 and the gear 54 are spur gears. The adjacent gear 53 and the gear 54 are engaged with each other to rotate in opposite directions. The gear ratio of the gear 53 and the gear 54 can be set arbitrarily.

(Operation of the resin discharge portion)

The operation of discharging the liquid resin 25 from the resin discharge portion 46 will be described with reference to Fig. The liquid resin 25 flows from the branched flow path 41 to the respective lined flow paths 42a so that the rotating body 45 and the rotary shaft 49 rotate integrally and rotate in the same direction as in the second embodiment.

The rotary body 45 and the rotary shaft 49 integrally rotate in the same direction so that the gear 53 connected to the rotary shaft 49 is rotated by the rotary shaft 49 Respectively. Each of the gears 53 rotates clockwise. As each gear 53 rotates clockwise, each gear 54 rotates counterclockwise. Since the gear ratio of the gear 53 and the gear 54 is set to be constant, the gear 53 and the gear 54 rotate in opposite directions to each other at a constant speed. Thus, each gear 53 rotates in the same direction at a constant speed, and each gear 54 rotates in the opposite direction at a constant speed.

Each of the gears 53 rotates in the same direction at the same speed so that the rotating bodies 45 rotate in the same direction at the same speed via the rotating shaft 49. [ Therefore, the rotating body 45 rotates in the same direction at the same speed synchronously with the rotating speed of each gear 53. [ As a result, the liquid resin 25 at the same flow rate can be fed from each of the rotating bodies 45. Each rotating body 45 rotates synchronously with the rotating speed of the gear 53 so that the rotating body 45 functions as a resin metering portion for uniformly delivering the liquid resin 25. [

The liquid resin 25 uniformly discharged by the respective rotating bodies 45 is discharged from the respective resin discharge ports 37 into the cavities. Therefore, the liquid resin 25 at the same flow rate can be uniformly supplied from the four nozzles 48 to the respective cavities.

(Action effect)

The present embodiment includes a plurality of parallel flow paths 42a in which the branch flow paths 41 are arranged and a rotating body 45 is disposed in each of the parallel flow paths 42a. And a gear 53 which is a rotary plate connected to the rotary shaft 49. The rotary shaft 49 is provided on each of the rotating bodies 45 in the rotary shaft 45,

With such a configuration, it is possible to easily reduce variations in the discharge amount of the liquid resin 25 from the plurality of discharge ports regardless of the number of the discharge ports.

Further, in the present embodiment, as the interlocking mechanism, it further includes a gear 54 which is arranged to be engaged with both sides of the gear 53 corresponding to the adjacent rotating body 45, and each of the rotating bodies 45, And has a groove 44 having a spiral shape.

With such a configuration, it is possible to reliably reduce variations in the discharge amount of the liquid resin 25 from the plurality of discharge ports, regardless of the number of the discharge ports.

More specifically, according to the present embodiment, a plurality of nozzles 48 for discharging the liquid resin 25 are provided in the resin discharge portion 46. A rotatable rotary shaft 49 is provided on each of the parallel flow paths 42a and a rotating body 45 having spiral grooves 44 is fitted to each rotary shaft 49. [ A gear 53 is connected to one end of each rotary shaft 49. Between the adjacent gear 53 and the gear 53, a separate gear 54 is provided so as to be engaged with each gear 53, respectively. Since the gear ratio of the gear 53 and the gear 54 is set to be constant, each gear 53 rotates in the same direction at a constant speed, and each gear 54 rotates in the opposite direction at a constant speed.

The rotating body 45 rotates in the same direction at the same speed in synchronization with the rotating speed of each gear 53. [ The liquid resin 25 at the same flow rate can be uniformly fed through the helical grooves 44 of the rotating body 45 because each rotating body 45 rotates in the same direction at the same speed . Each rotating body 45 rotates in the same direction at the same speed so that each rotating body 45 functions as a resin metering section for uniformly delivering the liquid resin 25. [ Therefore, the liquid resin 25 at the same flow rate can be uniformly supplied to the respective cavities 16 from the resin discharge port 37 via the respective rotating bodies 45. [

(Modification of Embodiment 3)

As a modified example of the third embodiment, the gear 54 may be omitted, and the adjacent gears 53 may be directly engaged with each other. In the configuration of this modified example, the adjacent gear 53 and the gear 53 rotate in opposite directions to each other. Therefore, the helical grooves of the adjacent rotating body 45 may be provided so that their directions are opposite to each other. The adjacent rotating body 45 rotates in the reverse direction at the same speed in synchronization with the rotating speed of each gear 53. [ As a result, the liquid resin 25 can be uniformly fed from each of the rotating bodies 45. Also in this modified example, the same operational effects as in the third embodiment can be obtained.

[Embodiment 4]

(Modification of Resin Discharge Portion)

Modified examples of the first to third embodiments of the resin discharge portion used in the resin molding apparatus 1 will be described with reference to Fig. The difference between Embodiments 1 to 3 is that the motor is installed outside the rotating body 45 as a rotating mechanism for auxiliary rotation of the rotating body 45. 7 (b) and 7 (c), the support member 50 is omitted for the sake of convenience.

As shown in Fig. 7 (a), in the resin discharging portion 19, a motor 55 as a rotating mechanism is connected to the rotating shaft 43. Fig. As the motor 55, for example, a servo motor or a stepping motor is used. When the liquid resin 25 is a liquid resin having a high viscosity, the speed at which the liquid resin 25 flows is low, so that the driving force (resin pressure) for rotating the rotating body 45 may not be sufficient. In such a case, the rotating body 45 is rotated by using the motor 55 as an auxiliary. Thereby, the rotating body 45 rotates at a constant speed, so that the liquid resin 25 can be stably flown.

7A, the rotating shaft 43 provided on the resin discharge portion 19 and the motor 55 are directly connected. A combination of a belt and a pulley, a combination of a pinion and a gear, a combination of a chain and a sprocket, or the like may be used between the rotary shaft 43 and the motor 55. [ Thus, the rotating speed of the rotating shaft 43 and the rotating body 45 can be adjusted in accordance with the rotating speed of the motor 55. [ Therefore, the speed at which the liquid resin 25 flows can be optimized in correspondence with the kind, viscosity, specific gravity, etc. of the liquid resin 25.

As shown in Fig. 7 (b), in the resin discharge portion 46, a pulley 56 is connected to the tip of the motor 55. Fig. The pulley 56 is connected to each of the pulleys 51 provided in the resin discharge portion 46 via the belt 52. [ As the motor 55 rotates, the belt 52 is rotated via the pulley 56. By rotating the belt 52, the rotating shaft 49 and the rotating body 45 are rotated. The diameter of the pulley 56 connected to the motor 55 and the diameter of each pulley 52 connected to the rotating shaft 49 of the resin discharging portion 46 are adjusted so that the rotating shaft 49 and the rotating body 45 Can be adjusted. Therefore, the speed at which the liquid resin 25 flows can be optimized in correspondence with the kind, viscosity, specific gravity, etc. of the liquid resin 25.

As shown in Fig. 7 (c), in the resin discharging portion 46, a gear 57 is connected to the tip of the motor 55. Fig. The gear 57 connected to the motor 55 and the gear 53 connected to the rotary shaft 49 of the resin discharge portion 46 are engaged with each other. By rotating the motor 55 counterclockwise, the gear 57 rotates counterclockwise and the gear 53 rotates clockwise. The rotational speed of the rotating shaft 49 and the rotating body 45 is adjusted by adjusting the gear ratio of the gear 57 connected to the motor 55 and the gear 53 connected to the rotating shaft 49 of the resin discharging portion 46 Can be adjusted. Therefore, the speed at which the liquid resin 25 flows can be optimized in correspondence with the kind, viscosity, specific gravity, etc. of the liquid resin 25.

The rotating speed of the rotating shaft 49 and the rotating body 45 can be adjusted by using a combination of a pinion, a crown gear, a spur gear, or the like, which is connected to the motor 55, for example.

In each of the embodiments, as the rotating body 45, a structure in which a penetrating portion for penetrating the rotating shaft and a groove portion or a hole portion are formed in the cylindrical member has been described. The rotating body is not limited to this structure. The rotating shaft may have a structure in which a penetrating portion, a groove portion, or a hole portion for penetrating the rotating shaft is formed in a member such as a thick drum having a central portion, a slotted portion having a narrow central portion, or a conical portion. Even if the rotary shaft has any shape, the rotary body can be made rotatable by making the shape of the branch passage correspond to the shape of the rotary body.

In each embodiment, a case where a plurality of nozzles are provided in the resin discharge portion and the liquid resin 25 is supplied to a plurality of cavities is shown. When a plurality of nozzles are used, the liquid resin 25 may be clogged with any nozzle. When the liquid resin 25 is clogged, the load for flowing the liquid resin 25 becomes large, so that the load torque applied to the servomotor 31 of the dispenser 18 becomes large. Therefore, clogging of the liquid resin 25 can be detected by monitoring the load torque applied to the servo motor 31. [ Thus, even when a plurality of nozzles are used, it can be easily found whether an abnormality has occurred in the dispenser 18. [

In each of the embodiments, a combination of the servo motor 31 and the ball screw 32 is used as the resin feeding mechanism 28. A combination of a stepping motor and a ball screw, a single-shaft eccentric screw method, and an air cylinder may be used.

In each embodiment, a case where a plurality of cavities 16 are provided in the lower mold 14 is shown. The present invention is not limited to this. As a modified example, even when one cavity having a large area is provided, the dispenser 18 in each embodiment can be applied. In this case, since the liquid resin 25 can be simultaneously discharged from the plurality of nozzles into the large-area cavity, the liquid resin 25 can be uniformly supplied in a short time.

In each embodiment, a one-liquid type dispenser 18 using a liquid resin 25 produced by mixing a subject and a curing agent in advance is shown. The present invention is not limited to this. Even in the case of using a two-liquid mixing type dispenser in which a dispenser is mixed with a curing agent in a practical use, the same effect can be obtained by applying the resin discharging portion in each embodiment.

In each embodiment, an example has been described in which the cavity 16 provided in the lower mold 14 is used as a containing portion and the liquid resin 25 is supplied to the cavity 16. [ In addition to the cavity, the receiving portion may be any of the following.

First, the accommodating portion is a space including a top surface of a substrate, and is a space including a chip mounted on an upper surface of the substrate (a chip of an electronic component such as a semiconductor chip or a non-semiconductor chip in which a semiconductor is not used). The liquid resin 25 is supplied so as to cover a chip mounted on the upper surface of the substrate. In this case, it is preferable that electrical connection between the chip and the substrate is performed by the flip chip.

Second, the accommodating portion is a space including the upper surface of a semiconductor substrate such as a silicon wafer. The liquid resin 25 is supplied so as to cover functional parts such as a semiconductor circuit formed on the semiconductor substrate. In this case, it is preferable that a projecting electrode (bump) is formed on the upper surface of the semiconductor substrate.

Thirdly, the accommodating portion is a space including the upper surface in the film to be finally accommodated in the cavity of the molding-type. The receiving portion in this case is, for example, a concave portion formed by entering a film. The liquid resin 25 is supplied to the concave portion formed by recessing the film. The purpose of this film is to improve the releasability, to transfer the shape of the irregularities on the surface of the film, and to transfer the pattern previously formed on the film. The liquid resin accommodated in the concave portion of the film is transported together with the film using an appropriate transport mechanism and finally housed in the cavity of the mold.

In any one of the first to third cases, the liquid resin 25 accommodated in the accommodating portion is finally supplied and accommodated in the cavity of the molding die, and hardened in the cavity.

In either one of the first to third cases, the liquid resin 25 is supplied to the accommodating portion on the outside of the pair of molds facing each other, and a constituent element including at least the accommodating portion is inserted between the molds Can be returned.

In each of the embodiments, the resin molding apparatus and the resin molding method used for resin sealing the semiconductor chip have been described. The resin-sealed object may be a semiconductor chip such as an IC or a transistor, or may be a non-semiconductor chip. The present invention can be applied when one or a plurality of chips mounted on a substrate such as a lead frame, a printed board, and a ceramics substrate is resin-sealed with a cured resin.

In addition, the present invention is not limited to the case where the electronic parts are sealed by resin, but the present invention can be applied to the case where the optical parts such as a lens, a reflector (reflector), a light guide plate and an optical module, have.

The present invention is not limited to the above-described embodiments, but may be appropriately combined, changed, or selected as necessary within the scope of the present invention.

1: resin molding device
2: Board supply / storage module
3A, 3B, 3C, 3D: Molding module
4: Resin supply module
5: Pre-sealing substrate
6: substrate before sealing
7: Sealed substrate
8: Sealed substrate storage part
9: Loader
10: Unloader
11: Rail
12, 13:
14: Lower mold (molding type)
15: Mold fastening mechanism
16: Cavity
17: resin conveying mechanism
18: Dispenser (resin discharge mechanism, discharge device for fluid material)
19, 46: resin discharge portion
20:
21: Vacuum exhaust mechanism
22:
23: Chip
24: Upper mold (molding type)
25: Liquid resin (fluid resin, fluid material)
26: Curing resin
27: Molded product
28: resin delivery mechanism
29: Syringe
30: resin transfer part
31: Servo motor
32: Ball Screw
33: Slider
34: Load
35: plunger
36: encoder
37: Resin outlet (outlet)
38, 47:
39, 48: Nozzles
40: Resin inlet (inlet)
41:
42: resin flow path
42a: Concurrent flow path (branch flow path)
43, 49: rotating shaft (interlocking mechanism)
44: spiral groove
44a: straight groove
45: rotating body
50: support member
51: Pulley (rotating plate, interlocking mechanism)
52: Belt (interlocking mechanism)
53: Gear (rotating plate, interlocking mechanism)
54: gear (interlocking mechanism)
55: Motor (rotation mechanism)
56: Pulley (interlocking mechanism)
57: Gear (rotating mechanism)

Claims (14)

A molding die provided with a cavity in at least one of an upper mold and a lower mold placed opposite to each other,
A resin discharging mechanism for discharging the fluid resin to supply the fluid resin to the cavity;
And a mold clamping mechanism for clamping the mold,
The resin discharging mechanism includes:
A flow path member having a branching flow path branched between an inlet port and a discharge port of the fluid resin;
A rotating body disposed in each of the branching flow paths and rotatable with passage of the fluid resin;
And an interlocking mechanism for interlocking and rotating each of the rotating bodies disposed in the branching flow path. The method according to claim 1,
The branching flow paths are branched into two branches so as to extend on opposite sides of one axis,
Wherein the interlocking mechanism is a rotary shaft common to the two rotating bodies corresponding to the branching passage,
Wherein the two rotating bodies are tubular members having helical grooves whose directions are opposite to each other. The method according to claim 1,
Wherein the branching flow path includes a plurality of juxtaposed flow paths,
Wherein the rotating body is disposed in each of the parallel flow paths,
Wherein the interlocking mechanism includes a rotary shaft provided in each of the rotating bodies in the parallel passage and a rotary plate connected to the rotary shaft. The method of claim 3,
The rotating plate is a pulley,
Wherein the interlocking mechanism includes a belt connecting the pulleys corresponding to the plurality of rotors,
Wherein each of the rotating bodies is a tubular member having a helical groove whose directions coincide with each other. The method of claim 3,
The rotating plate is a first gear,
The first gears corresponding to the adjacent rotating bodies are arranged to be engaged with each other,
Wherein the adjacent rotating bodies are tubular members having helical grooves whose directions are opposite to each other. The method of claim 3,
The rotating plate is a first gear,
Wherein the interlocking mechanism includes a second gear meshed with both sides of the first gear corresponding to the adjacent rotating body,
Wherein each of the rotating bodies is a tubular member having a helical groove whose directions coincide with each other. 7. The method according to any one of claims 1 to 6,
And a rotating mechanism for applying a rotational force to the rotating body. 7. The method according to any one of claims 1 to 6,
And at least one molding module having the molding die and the die fastening mechanism,
Wherein the one molding module and the other molding module can be detached. A resin discharging step of discharging the fluid resin in order to supply a fluid resin to the cavity using a mold having a cavity provided in at least one of an upper mold and a lower mold disposed opposite to each other,
And a mold clamping step of clamping the mold to which the fluid resin is supplied,
Wherein the resin discharging step is a resin molding method for passing the fluid resin through each of the rotating bodies by rotating the rotating bodies disposed in each of the branching flow paths branched between the inlet of the fluid resin and the discharge port, . 10. The method of claim 9,
The branching flow paths are branched into two branches so as to extend on opposite sides of one axis,
The two rotating bodies are tubular members having a helical groove whose direction is opposite to each other,
And rotating the two rotors together by using a rotating shaft common to the two rotating bodies corresponding to the branching flow paths. 10. The method of claim 9,
Wherein the branching flow path includes a plurality of juxtaposed flow paths,
Wherein the rotating body is disposed in each of the parallel flow paths,
And a rotating plate connected to a rotating shaft provided in each of the rotating bodies in the parallel flow path is rotated in association with rotation. A flow path member having a branching flow path branched between an inlet port and a discharge port of the fluid material,
A rotating body disposed in each of the branching flow paths and rotatable with passage of the fluid material;
And an interlocking mechanism for interlocking and rotating each of the rotating bodies disposed in the branching flow path. 13. The method of claim 12,
The branching flow paths are branched into two branches so as to extend on opposite sides of one axis,
Wherein the interlocking mechanism is a rotary shaft common to the two rotating bodies corresponding to the branching passage,
Wherein the two rotating bodies are tubular members having helical grooves whose directions are opposite to each other. 13. The method of claim 12,
Wherein the branching flow path includes a plurality of juxtaposed flow paths,
Wherein the rotating body is disposed in each of the parallel flow paths,
Wherein the interlocking mechanism includes a rotary shaft provided in each of the rotors in the parallel passage and a rotary plate connected to the rotary shaft.

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