KR20170096490A - Ionizer with the capability of sensing the state of electrostatic stabilization part - Google Patents
Ionizer with the capability of sensing the state of electrostatic stabilization part Download PDFInfo
- Publication number
- KR20170096490A KR20170096490A KR1020160017928A KR20160017928A KR20170096490A KR 20170096490 A KR20170096490 A KR 20170096490A KR 1020160017928 A KR1020160017928 A KR 1020160017928A KR 20160017928 A KR20160017928 A KR 20160017928A KR 20170096490 A KR20170096490 A KR 20170096490A
- Authority
- KR
- South Korea
- Prior art keywords
- light
- unit
- static electricity
- light irradiation
- irradiating
- Prior art date
Links
- 230000006641 stabilisation Effects 0.000 title 1
- 238000011105 stabilization Methods 0.000 title 1
- 230000003068 static effect Effects 0.000 claims abstract description 39
- 230000001678 irradiating effect Effects 0.000 claims abstract description 36
- 230000005611 electricity Effects 0.000 claims abstract description 28
- 238000000034 method Methods 0.000 claims abstract description 11
- 230000008859 change Effects 0.000 claims abstract description 8
- 230000003287 optical effect Effects 0.000 claims description 8
- 230000008030 elimination Effects 0.000 claims description 2
- 238000003379 elimination reaction Methods 0.000 claims description 2
- 238000001514 detection method Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 abstract description 6
- 230000005856 abnormality Effects 0.000 abstract description 5
- 230000008569 process Effects 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 4
- 239000008262 pumice Substances 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000006870 function Effects 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 230000002159 abnormal effect Effects 0.000 description 2
- 230000003472 neutralizing effect Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000012717 electrostatic precipitator Substances 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 208000024891 symptom Diseases 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02H—EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
- H02H7/00—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions
- H02H7/003—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions for electrostatic apparatus
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
-
- G—PHYSICS
- G08—SIGNALLING
- G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
- G08B21/00—Alarms responsive to a single specified undesired or abnormal condition and not otherwise provided for
- G08B21/18—Status alarms
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Business, Economics & Management (AREA)
- Emergency Management (AREA)
- Elimination Of Static Electricity (AREA)
Abstract
The present invention relates to an electrostatic discharge device for sensing the performance of a light irradiating part by detecting the temperature of a light irradiating part constituting the electrostatic charge removing part or the light intensity of a pumice ray or vacuum ultraviolet ray irradiated from the light irradiating part toward the whole large area, ≪ / RTI > capable of sensing the performance status of the device.
The static electricity eliminator of the ionizer having the static electricity eliminator for irradiating the static electricity eliminating light and the power supply controller for supplying the operation power of the static electricity eliminator, which is an embodiment for realizing the technical idea proposed in the present invention, And a light irradiating unit for irradiating the inside of the housing with a soft X-ray or vacuum ultraviolet ray, and a light sensor for sensing the intensity of the X-ray or vacuum ultraviolet ray irradiated from the light irradiating unit, A temperature sensor for detecting a temperature change may be installed and the power control unit may adjust the power supplied to the light irradiation unit based on the light intensity information or the temperature information of the light irradiation unit sensed by the light sensor or the temperature sensor It is possible to provide a replacement time of the light irradiation unit.
In the case where the ionizer capable of detecting the performance state of the static electricity generator according to the present invention is used, it is possible to grasp the performance abnormality in real time, thereby maximizing the effect of removing the static electricity required in the ultra-precision semiconductor process or display process, Can be improved.
Description
The present invention relates to an ionizer capable of detecting the performance state of an electrostatic charge generator, and more particularly, to an ionizer capable of detecting the state of performance of the electrostatic charge generator, To detect the performance of the light irradiating unit in real time, and an " ionizer capable of detecting the performance state of the static electricity removing unit ".
As is known, in a method of removing static electricity under a normal atmospheric pressure, the method of generating ions by a corona discharge and the ionizing action of a soft X-ray (for example, 1.5 Å) Thereby neutralizing or alleviating the static electricity of the object to be eradicated.
On the other hand, during the LCD and semiconductor manufacturing processes, static electricity may be required to be removed even under a special environment in which the vacuum state and the inert gas (N 2, Ar, etc.) are handled.
At this time, the electrostatic removing apparatus using corona discharge causes problems such as contamination due to the diffusion of metal fine particles and readjustment to (+) ion and (-) ion imbalance, and the static eliminator using soft X- , There is a problem that static electricity can not be removed in a special environment in which a vacuum state and an inert gas (N 2, Ar, etc.) are handled.
In order to remove the static electricity in the vacuum state or the inert gas atmosphere, Japanese Hamamatsu Co., Ltd. has proposed a static eliminator using Vacuum Ultra Violet ray having a wavelength band of about 2000 Å.
As is known, semiconductor and electronic device products such as LSIs and liquid crystal displays (LCDs) can not ignore the influence of static electricity even if the manufacturing environment is precisely installed environmentally. Much of this is done in vacuum.
However, as described above, there is a problem that it is difficult to use in a vacuum state in the case of the corona discharge or the pumped X-ray irradiation method.
Therefore, a static eliminator for irradiating a vacuum ultraviolet ray, which can obtain a static electrification effect even in a vacuum state, is used at the time of a process inside a vacuum chamber for semiconductor manufacturing and the like.
However, when the electrostatic removing apparatus using vacuum X-rays used in air or the vacuum ultraviolet used in vacuum is operated normally, the temperature of the static eliminator or the luminance of the irradiated X-ray or vacuum ultraviolet ray irradiated from the static eliminator (Or light amount) is maintained at a certain level. However, when the static eliminator is deteriorated or the performance abnormality occurs due to long-term use, an abnormal symptom occurs in temperature or light intensity. In the conventional static eliminator, There is no way to do so, and when a defect occurs in an electronic product such as a semiconductor or a display, a method of backtracking and replacing the static eliminator is used, and the economic loss due to this is inevitable.
Disclosure of the Invention The present invention has been proposed in order to solve the problems of the related art described above, and it is an object of the present invention to provide an electrostatic removing apparatus (also referred to as "ionizer") used for removing static electricity in the air or in a vacuum state, And to provide an ionizer capable of detecting and controlling the ionizer.
To this end, according to the present invention, there is provided a temperature sensor and an optical sensor for sensing the temperature and luminous intensity of a light irradiation part for irradiating a large X-ray or vacuum infrared ray with respect to the whole of the main body, And to provide an ionizer capable of grasping the replacement time of the light irradiation unit using information and automatically controlling the operating conditions in real time.
The static electricity eliminator of the ionizer having the static electricity eliminator for irradiating the static electricity eliminating light and the power supply controller for supplying the operation power of the static electricity eliminator, which is an embodiment for realizing the technical idea proposed in the present invention, And a light irradiating unit which is placed inside the housing and irradiates an X-ray or a vacuum ultraviolet ray.
In an embodiment according to the present invention, a light sensor for sensing the brightness of the fused x-ray or vacuum ultraviolet ray irradiated by the light irradiation unit or a temperature sensor for sensing the temperature change of the light irradiation unit may be installed on one side of the inside of the housing have.
In an embodiment of the present invention, the power source control unit controls the power source supplied to the light irradiation unit based on the light intensity information or the temperature information of the light irradiation unit sensed by the light sensor or the temperature sensor, Time can be provided.
The ionizer according to an embodiment of the present invention may further include a coil portion surrounding the outer circumferential surface of the light irradiating portion, wherein the power source unit supplies a predetermined current to the coil portion before the light irradiating portion is operated, .
In the case where the ionizer capable of detecting the performance state of the static electricity generator according to the present invention is used, it is possible to grasp the performance abnormality in real time, thereby maximizing the effect of removing the static electricity required in the ultra-precision semiconductor process or display process, Can be improved.
1 and 2 show a first embodiment of an ionizer capable of detecting the performance of the static electricity generator according to the present invention.
Fig. 3 is a second embodiment of the ionizer having a coil part for preheating the light irradiating part constituting the electrostatic discharge part proposed in the present invention.
Hereinafter, the technical idea of the ionizer capable of detecting the performance state of the static electricity generator according to the present invention will be described in detail with reference to the drawings.
1 and 2 show a first embodiment of an ionizer capable of detecting the performance state of the static electricity generator according to the present invention.
As shown in the figure, the ionizer proposed in the present invention comprises an
The
Hereinafter, a description will be made of a
The
Next, in the present invention, a
The
The optical sensor according to the present invention is for sensing a change in brightness of light emitted from the
For reference, the optical sensor or the temperature sensor in the present invention may be selectively installed inside the
In the optical sensor of the present invention, the wavelength range to be sensed may be changed according to the type of light emitted from the
In addition, the temperature sensor of the present invention is for detecting the ambient temperature of the light irradiating
The photometric information or the temperature information sensed by the optical sensor or the temperature sensor constituting the sensor unit according to the present invention is supplied to the power source control unit. The power source control unit receives the photometric information of the
Next, a second embodiment of the present invention will be described.
The main feature of the second embodiment of the present invention is that it further includes a
3 is a view showing a
In the second embodiment of the present invention, the
It is difficult for the light irradiating
In order to shorten the normal operating time of the light irradiating
To this end, in the
Therefore, when the
As described above, when the ionizer capable of detecting the performance state of the electrostatic discharge unit according to the present invention is used, the performance abnormality of the light irradiation unit can be grasped in real time, so that the precise static elimination effect required in the ultra- It is possible to maximize the efficiency and improve the product production yield.
The ionizer capable of detecting the performance state of the electrostatic discharge unit according to the present invention described above can reduce the normal operation time of the light irradiating unit while focusing on the temperature change and the light intensity change among the performance changes of the electrostatic charge removing unit. But these components of the present invention may be integrally attached to the electrostatic charge removing portion, but they may be provided independently of each other, and the design change due to the selective addition or the omission of such a component Should be construed as being all included in the technical scope of the present invention.
100: electrostatic discharge unit
110: Housing
120:
130:
200: Power control unit
Claims (3)
The electrostatic charge removing portion
A housing having an inner space formed therein,
And a light irradiating unit which is seated inside the housing and irradiates a soft X-ray or a vacuum ultraviolet ray,
And a temperature sensor for sensing a temperature change of the light irradiating unit is installed on one side of the housing, an optical sensor for detecting the intensity of the irradiated X-ray or vacuum ultraviolet ray irradiated from the light irradiating unit, Ionizer with performance status detection.
Wherein the power control unit adjusts the power supplied to the light irradiation unit or notifies the replacement time of the light irradiation unit based on the light intensity information or the temperature information of the light irradiation unit sensed by the light sensor or the temperature sensor Ionizer capable of detecting the performance status of the electrostatic discharge unit.
And a coil part surrounding the outer circumferential surface of the light irradiation part,
Wherein the power source unit preheats the light irradiation unit by supplying a predetermined current to the coil unit before the light irradiation unit starts operating.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020160017928A KR20170096490A (en) | 2016-02-16 | 2016-02-16 | Ionizer with the capability of sensing the state of electrostatic stabilization part |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020160017928A KR20170096490A (en) | 2016-02-16 | 2016-02-16 | Ionizer with the capability of sensing the state of electrostatic stabilization part |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20170096490A true KR20170096490A (en) | 2017-08-24 |
Family
ID=59758257
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020160017928A KR20170096490A (en) | 2016-02-16 | 2016-02-16 | Ionizer with the capability of sensing the state of electrostatic stabilization part |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR20170096490A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20190097865A (en) * | 2018-02-13 | 2019-08-21 | (주)선재하이테크 | VUV Ionizer |
| KR20240006998A (en) | 2022-07-07 | 2024-01-16 | (주)선재하이테크 | System for Vacuum UV light source performance detection |
-
2016
- 2016-02-16 KR KR1020160017928A patent/KR20170096490A/en not_active Application Discontinuation
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20190097865A (en) * | 2018-02-13 | 2019-08-21 | (주)선재하이테크 | VUV Ionizer |
| KR20240006998A (en) | 2022-07-07 | 2024-01-16 | (주)선재하이테크 | System for Vacuum UV light source performance detection |
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|---|---|---|---|
| E902 | Notification of reason for refusal | ||
| E601 | Decision to refuse application |