KR20170088635A - Deposition unit - Google Patents

Deposition unit Download PDF

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Publication number
KR20170088635A
KR20170088635A KR1020160008761A KR20160008761A KR20170088635A KR 20170088635 A KR20170088635 A KR 20170088635A KR 1020160008761 A KR1020160008761 A KR 1020160008761A KR 20160008761 A KR20160008761 A KR 20160008761A KR 20170088635 A KR20170088635 A KR 20170088635A
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KR
South Korea
Prior art keywords
crucible
power supply
mounting plate
plate
connector
Prior art date
Application number
KR1020160008761A
Other languages
Korean (ko)
Inventor
이해만
Original Assignee
주식회사 선익시스템
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Publication date
Application filed by 주식회사 선익시스템 filed Critical 주식회사 선익시스템
Priority to KR1020160008761A priority Critical patent/KR20170088635A/en
Publication of KR20170088635A publication Critical patent/KR20170088635A/en

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    • H01L51/56—
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
    • H01L51/0008—

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physical Vapour Deposition (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

The present invention relates to an evaporation source unit. The present invention includes: a crucible in which a vaporizing material is contained; a crucible mounting plate on which the crucible is mounted; and a power supply plate which supplies power for cooling and heating the crucible, wherein the crucible mounting plate and the power supply plate are detachably coupled. The evaporation source unit can maintain the crucible easily.

Description

The evaporation source unit {Deposition unit}

The present invention relates to an evaporation source unit, and more particularly, to an evaporation source unit in which only a crucible side can be easily separated from a power source line and a crucible can be easily maintained.

BACKGROUND ART Organic light emitting diodes (OLEDs) are self-light emitting devices that emit light by using an electroluminescent phenomenon that emits light when a current flows through a fluorescent organic compound. A backlight for applying light to a non- Therefore, a lightweight thin flat panel display device can be manufactured.

A flat panel display device using such an organic electroluminescent device has a fast response speed and a wide viewing angle, and is emerging as a next generation display device. Particularly, since the manufacturing process is simple, it is advantageous in that the production cost can be saved more than the conventional liquid crystal display device.

The organic electroluminescent device comprises an organic thin film such as a hole injecting layer, a hole transporting layer, a light emitting layer, an electron transporting layer, and an electron injecting layer which are the remaining constituent layers except for the anode and the cathode. / RTI >

In the vacuum thermal evaporation method, a substrate is placed in a vacuum chamber, a shadow mask having a predetermined pattern is aligned on a substrate, heat is applied to a crucible containing the evaporation material, and evaporation material, which is sublimated in the crucible, Evaporation.

The crucibles may be provided in a single unit in the deposition apparatus, but a plurality of units may be provided in a single unit form. When a plurality of crucibles are installed as one evaporation source unit, the operator must separate the entire evaporation source unit from the deposition chamber in order to perform maintenance. However, the evaporation source unit itself is heavy, and maintenance work is difficult.

Korean Patent Laid-Open Publication No. 10-2014-0086334 (published on July 20, 2014)

The present invention provides a vaporization source unit in which only a crucible side can be easily separated from a power supply line, thereby facilitating the maintenance of the crucible.

According to an embodiment of the present invention, a crucible in which an evaporation material is accommodated; A crucible mounting plate on which the crucible is mounted; And a power supply plate for supplying power for cooling and heating the crucible, wherein the crucible mounting plate and the power supply plate are detachably coupled.

A power connection terminal connected to a power supply line may be provided under the power supply plate.

The crucible mounting plate may include a power supply connector, and the power supply plate may include a power supply connector electrically connected to the power supply connector and coupled to the power supply connector.

At least one guide shaft may protrude from the bottom of the crucible mounting plate.

A tapered portion may be formed at the tip of the guide shaft so that the tapered portion becomes narrower toward the tip.

The power supply plate is provided at an upper portion thereof with an insertion shaft into which the guide shaft is inserted, and the guide shaft is inserted into the insertion shaft to guide the engagement of the crucible mounting plate.

A temperature sensor for measuring the temperature of the crucible may be provided at a lower portion of the crucible mounting plate, and a temperature sensor connector may be provided at an upper portion of the power supply plate to connect the temperature sensor.

According to the embodiment of the present invention, only the crucible side can be easily separated from the power supply line, and maintenance of the crucible is easy.

1 is a perspective view of an evaporation source unit according to an embodiment of the present invention;
2 is a front view showing a state in which an evaporation source unit is separated according to an embodiment of the present invention;
FIG. 3 is a perspective view showing an isolated portion of an evaporation source unit according to an embodiment of the present invention; FIG.

BRIEF DESCRIPTION OF THE DRAWINGS The present invention is capable of various modifications and various embodiments, and specific embodiments are illustrated in the drawings and described in detail in the detailed description. It is to be understood, however, that the invention is not to be limited to the specific embodiments, but includes all modifications, equivalents, and alternatives falling within the spirit and scope of the invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

The terms first, second, etc. may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another.

The terminology used in this application is used only to describe a specific embodiment and is not intended to limit the invention. The singular expressions include plural expressions unless the context clearly dictates otherwise. In the present application, the terms "comprises", "having", and the like are used to specify that a feature, a number, a step, an operation, an element, a component, But do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, or combinations thereof.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an embodiment of an evaporation source unit according to the present invention will be described in detail with reference to the accompanying drawings, wherein like reference numerals refer to the same or corresponding components, A description thereof will be omitted.

FIG. 1 is a perspective view of an evaporation source unit according to an embodiment of the present invention, FIG. 2 is a front view showing a state in which an evaporation source unit is separated according to an embodiment of the present invention, FIG. 6 is a perspective view showing an isolated portion of the evaporation source unit. FIG.

According to the present invention, the evaporation source unit according to the present invention comprises a crucible 1 in which an evaporation material is accommodated; A crucible mounting plate 10 on which the crucible 1 is mounted; And a power supply plate 20 for supplying power for cooling and heating the crucible 1. The crucible mounting plate 10 and the power supply plate 20 may be detachably coupled to each other.

A plurality of crucibles 1 are mounted on a crucible mounting plate 10 in the form of a revolver. The crucible 1 has a cylindrical shape in which an evaporation material such as an organic material is received therein, and four pieces are arranged along the circumferential direction. The crucibles 1 arranged in this manner are arranged in the form of a revolver, and can be sequentially deposited while being rotated in one direction.

In this embodiment, a plurality of crucible-mounting plates 10 are provided in multiple stages, which can be arranged in various forms according to the arrangement of the crucibles 1 and the structure of the deposition apparatus. For example, the crucible-mounting plate 10 may be configured as a single unit and the crucible 1 may be disposed on a single crucible-mounting plate 10. [ 1, a crucible 1 is mounted on a crucible mounting plate 10 disposed at the uppermost stage, and a crucible mounting plate 10 disposed at a lowermost stage is substantially coupled to a power supply plate 20 I have. On the other hand, reference numeral 12 denotes a cover which covers the outer surface of the crucible mounting plate 10.

The crucible mounting plate 10 and the power supply plate 20 are detachably coupled. Conventionally, since the crucible mounting plate 10 and the power supply plate 20 are integrally formed, the operator has to separate the entire evaporation source unit from the deposition chamber in order to perform maintenance work on the crucible 1. However, in this embodiment, since the crucible mounting plate 10 is detachably coupled to the power supply plate 20, the operator separates only the upper crucible mounting plate 10 from the power supply plate 20, (1) can be maintained.

In other words, since only the crucible mounting plate 10 on which the crucible 1 is directly mounted is separated, maintenance work for the crucible 1 can be performed and only the weight of the crucible mounting plate 10 is lifted. 1) can be maintained.

Hereinafter, a coupling structure of the crucible mounting plate 10 and the power supply plate 20 will be described in detail with reference to Figs. 2 and 3. Fig.

The crucible mounting plate 10 is provided with at least one guide shaft 14 protruding from its lower portion for coupling with the power supply plate 20. The guide shaft 14 is provided for facilitating engagement of the crucible mounting plate 10 with the power supply plate 20 when the crucible mounting plate 10 is coupled to the power supply plate 20, So that the engagement of the crucible mounting plate 10 is guided.

A tapered portion 16 is formed at the tip of the guide shaft 14 so as to be narrowed toward the tip so that the guide shaft 14 can be easily inserted into the insertion shaft 22.

A temperature sensor 18 is provided on a lower side surface of the crucible mounting plate 10. The temperature sensor 18 accurately measures the temperature of the crucible 1 and controls the crucible 1 to be heated to a predetermined temperature.

A power supply connector 19 is provided under the crucible mounting plate 10 and a power supply connector 28 is provided at an upper portion of the power supply plate 20 so as to be coupled to the power supply connector 19. The power supply male connector 19 and the power supply female connector 28 are coupled to each other so that power supplied through the power supply connection terminal 22 can be transmitted to the crucible 1 side.

The power supply plate 20 has a power connection end 22 connected to the power supply line. The power connection terminal 22 is connected to the power line to substantially supply power. The power connection terminal 22 is electrically connected to the power supply connector 28 so that the crucible 1 can be cooled and heated.

On the other hand, a temperature sensor connector 26 connected to the temperature sensor 18 is provided on the upper side of the power supply plate 20.

As described above, the evaporation source unit according to the present invention comprises a crucible mounting plate 10 and a power supply plate 20, and they can be separated and combined with each other.

The worker inserts the guide shaft 14 into the insertion shaft 22 after positioning the guide shaft 14 in the insertion shaft 22, 22 to guide the engagement of the crucible mounting plate 10. In this process, since the tapered portion 16 is formed at the tip of the guide shaft 14, the crucible mounting plate 10 can be easily coupled to the correct position.

The power source connector 19 and the power source connector 28 are coupled to each other and are electrically connected to each other so that the power source connector 19 and the power source connector 28 can be supplied to the crucible 1 while both are connected. Also, since the temperature sensor 18 is naturally connected to the temperature sensor connector 26 in this process, the operation of the temperature sensor 18 is immediately possible.

Meanwhile, when the evaporation source unit is installed in the deposition chamber and the deposition process is completed, the evaporation material should be re-received in the crucible 1. Or the case where an abnormality occurs in the crucible 1, or the like. At this time, the operator must separate the evaporation source unit from the deposition chamber, but only the crucible mounting plate 10 can be separated while being held by hand. Then, only the crucible mounting plate 10 can be separated while the power supply plate 20 is maintained in the deposition chamber.

In this case, since the operator can separate only the relatively light crucible mounting plate 10, the separating operation is easy, and the operation of reattaching the crucible 1 to the power supply plate 20 after the completion of the maintenance of the crucible 1 is facilitated Can be performed.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the present invention as set forth in the following claims It will be understood that the invention may be modified and varied without departing from the scope of the invention.

1: Crucible 10: Crucible mounting plate
12: Cover 14: Guide shaft
16: tapered portion 18: temperature sensor
19: Power supply connector 20: Power supply plate
22: Insertion shaft 24: Power connection terminal
26: Temperature sensor connector 28: Power supply connector

Claims (7)

A crucible in which evaporation material is contained;
A crucible mounting plate on which the crucible is mounted; And
And a power supply plate for supplying power for cooling and heating the crucible,
Wherein the crucible mounting plate and the power supply plate are detachably coupled to each other. The method according to claim 1,
And a power connection end connected to a power supply line is provided at a lower portion of the power supply plate. 3. The method of claim 2,
Wherein the crucible mounting plate is provided with a power supply connector and the power supply plate is provided with a power supply connector which is electrically connected to the power supply connector and is coupled to the power supply connector. The method according to claim 1,
And at least one guide shaft protrudes from the bottom of the crucible mounting plate. 5. The method of claim 4,
Wherein a tip portion of the guide shaft is formed with a tapered portion having a smaller width toward the tip. 5. The method of claim 4,
Wherein an insertion shaft into which the guide shaft is inserted is protruded from an upper portion of the power supply plate, and the guide shaft guides insertion of the crucible mounting plate while being inserted into the insertion shaft. 7. The method according to any one of claims 1 to 6,
Wherein a temperature sensor for measuring the temperature of the crucible is provided at a lower portion of the crucible mounting plate and a temperature sensor connector for connecting the temperature sensor is provided at an upper portion of the power supply plate.
KR1020160008761A 2016-01-25 2016-01-25 Deposition unit KR20170088635A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020160008761A KR20170088635A (en) 2016-01-25 2016-01-25 Deposition unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020160008761A KR20170088635A (en) 2016-01-25 2016-01-25 Deposition unit

Publications (1)

Publication Number Publication Date
KR20170088635A true KR20170088635A (en) 2017-08-02

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020160008761A KR20170088635A (en) 2016-01-25 2016-01-25 Deposition unit

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KR (1) KR20170088635A (en)

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