KR20170044730A - 삼차원 박막 배터리 - Google Patents

삼차원 박막 배터리 Download PDF

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Publication number
KR20170044730A
KR20170044730A KR1020177008178A KR20177008178A KR20170044730A KR 20170044730 A KR20170044730 A KR 20170044730A KR 1020177008178 A KR1020177008178 A KR 1020177008178A KR 20177008178 A KR20177008178 A KR 20177008178A KR 20170044730 A KR20170044730 A KR 20170044730A
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South Korea
Prior art keywords
layer
substrate
fcc
electrode layer
thin film
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KR1020177008178A
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English (en)
Korean (ko)
Inventor
다오잉 송
병 성 레오 곽
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어플라이드 머티어리얼스, 인코포레이티드
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Publication of KR20170044730A publication Critical patent/KR20170044730A/ko
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/64Carriers or collectors
    • H01M4/70Carriers or collectors characterised by shape or form
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00Secondary cells; Manufacture thereof
    • H01M10/04Construction or manufacture in general
    • H01M10/0436Small-sized flat cells or batteries for portable equipment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00Secondary cells; Manufacture thereof
    • H01M10/05Accumulators with non-aqueous electrolyte
    • H01M10/052Li-accumulators
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00Secondary cells; Manufacture thereof
    • H01M10/05Accumulators with non-aqueous electrolyte
    • H01M10/056Accumulators with non-aqueous electrolyte characterised by the materials used as electrolytes, e.g. mixed inorganic/organic electrolytes
    • H01M10/0561Accumulators with non-aqueous electrolyte characterised by the materials used as electrolytes, e.g. mixed inorganic/organic electrolytes the electrolyte being constituted of inorganic materials only
    • H01M10/0562Solid materials
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00Secondary cells; Manufacture thereof
    • H01M10/05Accumulators with non-aqueous electrolyte
    • H01M10/058Construction or manufacture
    • H01M10/0585Construction or manufacture of accumulators having only flat construction elements, i.e. flat positive electrodes, flat negative electrodes and flat separators
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/04Processes of manufacture in general
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/04Processes of manufacture in general
    • H01M4/0402Methods of deposition of the material
    • H01M4/0404Methods of deposition of the material by coating on electrode collectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/13Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/13Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
    • H01M4/139Processes of manufacture
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M2300/00Electrolytes
    • H01M2300/0017Non-aqueous electrolytes
    • H01M2300/0065Solid electrolytes
    • H01M2300/0068Solid electrolytes inorganic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M2300/00Electrolytes
    • H01M2300/0017Non-aqueous electrolytes
    • H01M2300/0065Solid electrolytes
    • H01M2300/0068Solid electrolytes inorganic
    • H01M2300/0071Oxides
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/04Processes of manufacture in general
    • H01M4/0402Methods of deposition of the material
    • H01M4/0421Methods of deposition of the material involving vapour deposition
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/04Processes of manufacture in general
    • H01M4/0402Methods of deposition of the material
    • H01M4/0421Methods of deposition of the material involving vapour deposition
    • H01M4/0423Physical vapour deposition
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/04Processes of manufacture in general
    • H01M4/0402Methods of deposition of the material
    • H01M4/0421Methods of deposition of the material involving vapour deposition
    • H01M4/0423Physical vapour deposition
    • H01M4/0426Sputtering
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/04Processes of manufacture in general
    • H01M4/0402Methods of deposition of the material
    • H01M4/0421Methods of deposition of the material involving vapour deposition
    • H01M4/0428Chemical vapour deposition
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10Energy storage using batteries
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Secondary Cells (AREA)
  • Cell Electrode Carriers And Collectors (AREA)
KR1020177008178A 2014-08-27 2015-08-27 삼차원 박막 배터리 Withdrawn KR20170044730A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201462042557P 2014-08-27 2014-08-27
US62/042,557 2014-08-27
PCT/US2015/047286 WO2016033379A1 (en) 2014-08-27 2015-08-27 Three-dimensional thin film battery

Publications (1)

Publication Number Publication Date
KR20170044730A true KR20170044730A (ko) 2017-04-25

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KR1020177008178A Withdrawn KR20170044730A (ko) 2014-08-27 2015-08-27 삼차원 박막 배터리

Country Status (6)

Country Link
EP (1) EP3186850A4 (cg-RX-API-DMAC7.html)
JP (1) JP2017530518A (cg-RX-API-DMAC7.html)
KR (1) KR20170044730A (cg-RX-API-DMAC7.html)
CN (1) CN106663841A (cg-RX-API-DMAC7.html)
TW (1) TW201622228A (cg-RX-API-DMAC7.html)
WO (1) WO2016033379A1 (cg-RX-API-DMAC7.html)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170301893A1 (en) * 2016-04-14 2017-10-19 Applied Materials, Inc. Energy storage device with wraparound encapsulation
KR102054326B1 (ko) 2016-08-25 2019-12-11 주식회사 엘지화학 미세 홀들을 포함하고 있는 이차전지용 전극
US10431847B2 (en) 2016-09-19 2019-10-01 International Business Machines Corporation Stacked film battery architecture
US20180287185A1 (en) * 2017-03-30 2018-10-04 International Business Machines Corporation Three-dimensional thin-film battery device
US10622680B2 (en) 2017-04-06 2020-04-14 International Business Machines Corporation High charge rate, large capacity, solid-state battery
KR102682126B1 (ko) * 2017-08-04 2024-07-08 삼성전자주식회사 고체 전해질, 그 제조방법 및 이를 포함한 리튬전지
DE102017218130A1 (de) 2017-10-11 2019-04-11 Robert Bosch Gmbh Verfahren zur Herstellung eines Stromableiters, Elektrode und Batteriezelle
CN109755615B (zh) * 2019-01-24 2021-05-28 深圳市致远动力科技有限公司 具有三维微纳结构的全固态薄膜燃料电池的制备方法
FR3109944B1 (fr) * 2020-05-11 2022-08-12 Accumulateurs Fixes Traitement d’une surface de lithium par procédé laser
CN111682200B (zh) * 2020-07-14 2021-10-22 万华化学集团股份有限公司 用于锂离子电池的正极材料及其制备方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000100443A (ja) * 1998-09-25 2000-04-07 Mitsubishi Chemicals Corp 二次電池用電極基材フィルム及び二次電池
KR100296741B1 (ko) * 1999-05-11 2001-07-12 박호군 트렌치 구조를 갖는 전지 및 그 제조방법
JP2005108521A (ja) * 2003-09-29 2005-04-21 Hitachi Maxell Ltd 薄膜電極とその製造方法およびその薄膜電極を用いたリチウム二次電池
US7901829B2 (en) * 2005-09-13 2011-03-08 3M Innovative Properties Company Enhanced catalyst interface for membrane electrode assembly
US20070172735A1 (en) * 2006-01-26 2007-07-26 David R. Hall Thin-film Battery
KR101379243B1 (ko) * 2006-07-18 2014-03-28 사임베트 코퍼레이션 고체상태 마이크로 배터리의 포토리소그래픽 제조, 싱글레이션 및 패시베이션 방법 및 장치
US7682733B2 (en) * 2006-08-25 2010-03-23 Motorola, Inc. Thin film battery having textured layer
KR100964017B1 (ko) * 2007-12-13 2010-06-15 지에스나노텍 주식회사 전극의 표면적 및 전극과 전해질의 접촉면적을 증가시킨박막형 전지 및 그의 제조방법
JP2009289585A (ja) * 2008-05-29 2009-12-10 Sony Corp 負極および二次電池
US20100035152A1 (en) * 2008-08-05 2010-02-11 Sakti3, Inc. Electrochemical cell including functionally graded and architectured components and methods
DE102010029060A1 (de) * 2010-05-18 2011-11-24 Robert Bosch Gmbh Verfahren zur Herstellung einer Dünnschichtbatterie und entsprechende Dünnschichtbatterie
JP5666839B2 (ja) * 2010-06-30 2015-02-12 古河電気工業株式会社 2次電池用負極、負極集電体、2次電池及びこれらの製造方法
KR101942715B1 (ko) * 2011-06-17 2019-01-28 어플라이드 머티어리얼스, 인코포레이티드 무마스크 전해질 증착을 사용한 박막 배터리 제조
US20130260183A1 (en) * 2012-03-28 2013-10-03 International Business Machines Corporation Three dimensional solid-state battery integrated with cmos devices
JP2014032893A (ja) * 2012-08-06 2014-02-20 Sharp Corp 薄膜電池

Also Published As

Publication number Publication date
JP2017530518A (ja) 2017-10-12
EP3186850A1 (en) 2017-07-05
WO2016033379A1 (en) 2016-03-03
TW201622228A (zh) 2016-06-16
EP3186850A4 (en) 2018-01-24
CN106663841A (zh) 2017-05-10

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PA0105 International application

Patent event date: 20170324

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
PC1203 Withdrawal of no request for examination