KR20170022785A - System for testing panel using focus mapping scheme and method thereof - Google Patents

System for testing panel using focus mapping scheme and method thereof Download PDF

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Publication number
KR20170022785A
KR20170022785A KR1020150118235A KR20150118235A KR20170022785A KR 20170022785 A KR20170022785 A KR 20170022785A KR 1020150118235 A KR1020150118235 A KR 1020150118235A KR 20150118235 A KR20150118235 A KR 20150118235A KR 20170022785 A KR20170022785 A KR 20170022785A
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South Korea
Prior art keywords
focus
panel
trigger
mapping table
axis
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KR1020150118235A
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Korean (ko)
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KR101754598B1 (en
Inventor
서상준
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주식회사 에이치비테크놀러지
주식회사 에이치비테크놀러지
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/28—Systems for automatic generation of focusing signals
    • H04N5/23212—
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/04—Batch operation; multisample devices
    • G01N2201/0484—Computer controlled
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/10—Scanning

Abstract

According to the present invention, a system for inspecting a panel using a focus mapping manner comprises: a trigger board generating a periodic focus trigger signal to move a focus axis to a predetermined coordinate; a controller searching for a focus position through image processing on a focus trigger position, applying the searched focus position and focus information, thus generating a focus mapping table; and a motion controller storing the focus mapping table, moving the focus axis to the focus position stored in the focus mapping table in accordance with a period of the trigger signal. Accordingly, the present invention may solve a focus problem caused by a panel being bent if the panel is transmitted by a stage of an air floating method.

Description

TECHNICAL FIELD [0001] The present invention relates to a system and a method for inspecting a panel using a focus mapping method,

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a panel inspection system and method, and more particularly, to a panel inspection system and method using a focus mapping method capable of solving a focus problem due to warping of a panel when a panel is conveyed by an air floating type stage .

In recent years, panels used for flat panel displays such as TFT-LCDs and AMOLEDs have become larger in size. Accordingly, in order to prevent scratches caused by contact between the panel and the transfer table during transportation, And a non-contact transport system in which the panel is transported by floating.

Scratches and various kinds of irregularities may occur on the surface of the panel during the transfer process or a predetermined operation process. A panel on which a pattern such as scratches or unevenness is detected and on which a pattern is formed by wiring or a hole is detected, Reliability must be ensured.

An automatic optical inspection apparatus (AOI) shown in Fig. 1 is known as an inspection apparatus for detecting such panel defects or pattern defects. The automatic optical inspection apparatus captures an image of an object to be inspected using an optical lens and a CCD camera 10, and then applies a vision image processing algorithm to detect various defects that the user desires to find.

Such an automatic optical inspection apparatus is installed at a position between the loading part and the unloading part of the panel inspection apparatus, and the panel inspection apparatus is provided with a panel transfer apparatus for transferring the panel.

The floating part and the unloading part are each provided with a floating stage 20 for non-contact transport on each frame. The floating stage 20 is provided with a plurality of air outlets 30, So that the panel is floated through the air.

The panel transfer device is provided with a square rectangular frame by a beam or a pipe, and the frame is connected to the actuator so as to be transferred in the frame length direction of the process part. The frame is attracted to the frame, Pad is installed.

In the conventional panel inspection apparatus configured as described above, when a large plate-shaped panel is placed on the floating stage 20 of the loading part in a state in which air is ejected from a plurality of air outlets 30 arranged on the top plate of the floating stage 20, The air blown out from the air blowing port 30 of the stage 20 is floated without coming into contact with the upper plate.

In this floating state, the suction pad of the panel transfer device adsorbs and holds the marginal part of the panel edge, and transfers the marginal part of the panel to the unloading part through the process part from the loading part. In the process part, .

However, when the stage having the air floating type transports the panel as described above, due to unstable air applied to the panel as shown in FIG. 2, the scan plate (camera plate section, camera inspection section) There is a problem that the panel is warped at the input portion and the output portion of the panel corresponding to the panel.

This problem causes the DOF (Depth of field) of the panel inspection optical system to deviate, resulting in the problem that the camera image is not focused, and the optical detection capability is deteriorated.

Also, in the past, the height information of the panel was sensed by a laser sensor, the focus axis was moved with this information, and the focused image was processed on the panel to check the pattern defect of the panel. Since the conventional laser autofocus system is expensive, there is a cost problem in a panel inspection apparatus using a plurality of inspection cameras.

Korean Patent No. 10-1150397 Korean Patent No. 10-0975645

SUMMARY OF THE INVENTION It is therefore an object of the present invention to solve the problems of the prior art as described above, and it is an object of the present invention to provide a panel structure using a focus mapping method capable of solving a focus problem caused by bending of a panel when a panel is transported by an air- An inspection system and a method thereof.

According to an aspect of the present invention, there is provided a panel inspection system using a focus mapping method, including: a trigger board for controlling a conveying and stopping operation of a panel by a control unit and generating a periodic focus trigger signal; A control unit for searching a focus position through image processing while moving a focus axis in a focus position and generating a focus mapping table by applying focus position information and focus information to be searched, and a focus mapping table storing the focus mapping table, And a motion controller for moving the focus axis to a focus position stored in the mapping table.

At this time, the trigger board not only generates a focus trigger signal but also a camera trigger signal.

The method of inspecting a panel using a focus mapping method according to an embodiment of the present invention includes the steps of moving and stopping a panel to each focus trigger position to search for a focus position with respect to an inspection area of the panel by a control unit, Generating a focus mapping table by applying the searched focus position information and storing the focus mapping table; receiving a periodic focus trigger signal at the time of panel inspection; Moving the focus axis to a focus position stored in the focus mapping table according to the trigger signal period; compensating for a focus offset by monitoring an average brightness value and a contrast value at the focus position; And taking a picture.

As described above, according to the panel inspection system and the method using the focus mapping method according to the present invention, the focus axis is moved to the focus position stored in the focus mapping table according to the trigger signal cycle set in the focus trigger generation period, It is possible to maintain the DOF (depth of field) of the panel inspection optical system, focus the camera image normally, and maintain the detection power of the optical inspection.

In addition, focus map data is previously acquired with focus position information mapped to each panel coordinate with respect to a plurality of panels, and by using this during panel inspection, the camera can be focused in real time without using an expensive autofocus device As a result, the cost reduction effect can be obtained.

1 is a perspective view showing a general automatic optical inspection apparatus.
Fig. 2 is a view showing an example of a shape in which the panel is warped.
3 is a block diagram schematically illustrating a configuration of a panel inspection system using a focus mapping method according to an embodiment of the present invention.
4 is a block diagram showing a configuration of a trigger board according to an embodiment of the present invention.
FIG. 5 is a graph showing focus mapping data obtained by performing one scan on one panel using a panel inspection system using a focus mapping method according to an embodiment of the present invention.
6 is a flowchart illustrating a panel inspection method using a focus mapping method according to an embodiment of the present invention.

BRIEF DESCRIPTION OF THE DRAWINGS The advantages and features of the present invention, and how to accomplish it, will be described with reference to the embodiments described in detail below with reference to the accompanying drawings. However, the present invention is not limited to the embodiments described herein but may be embodied in other forms.

The embodiments are provided so that those skilled in the art can easily carry out the technical idea of the present invention to those skilled in the art.

In the drawings, embodiments of the present invention are not limited to the specific forms shown and are exaggerated for clarity. Also, the same reference numerals denote the same components throughout the specification.

The expression "and / or" is used herein to mean including at least one of the elements listed before and after. Also, singular forms include plural forms unless the context clearly dictates otherwise. Also, components, steps, operations and elements referred to in the specification as " comprises "or" comprising " refer to the presence or addition of one or more other components, steps, operations, elements, and / or devices.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings.

FIG. 3 is a block diagram schematically showing the configuration of a panel inspection system using a focus mapping method according to an embodiment of the present invention, and FIG. 4 is a block diagram showing the configuration of a trigger board according to an embodiment of the present invention.

3, a panel inspection system using a focus mapping method according to an exemplary embodiment of the present invention includes a trigger board 100, a controller 200, a motion controller 300, a focus motor 400, a focus axis 500, , A camera (600), and an air plate (700).

When a wide plate-type panel is placed on the air plate 700 of the loading part in a state in which air is ejected from a plurality of air ejecting openings arranged on the upper plate of the air plate 700, the air ejected from the air ejecting opening of the air plate 700 So as to be floated without contacting the upper plate.

In this floating state, the suction pad of the panel transfer device sucks and holds the marginal portion of the substrate, and transfers the marginal portion from the loading part to the unloading part through the process part. In the process part, Inspect panel for defects.

Particularly, in the panel inspection system of the present invention, when a stage having an air floating type transports a panel, it is difficult to control the panel corresponding to a scan plate (camera placement section, camera inspection section) region due to instability of air applied to the panel. (See FIG. 2) occurring at the input portion and the output portion is measured in advance according to the position of the panel, and the movement of the focus axis is preset according to the warp of the panel to generate and store a so-called focus mapping data.

Moves the focus axis to a focus position stored in the focus mapping table according to a trigger signal cycle set in a focus trigger occurrence period, and inspects the panel. Accordingly, it is possible to maintain the depth of field (DOF) of the panel inspection optical system, focus the camera image normally, and maintain the detection power of the optical inspection.

In addition, focus map data is previously acquired with focus position information mapped to each panel coordinate with respect to a plurality of panels, and by using this during panel inspection, the camera can be focused in real time without using an expensive autofocus device As a result, the cost reduction effect can be obtained.

Specifically, the trigger board 100 generates a periodic focus trigger signal for moving the focus axis.

The trigger board not only generates a focus trigger signal but also a camera trigger signal, and the camera trigger signal is transmitted to the camera through the control unit.

Referring to FIG. 4, the main structure of the trigger board 100 includes an encoder input unit 110 that receives a linear encoder signal that provides information for determining the position of the panel, and a controller 110 that reads the linear encoder signal, A trigger generating unit 130 generating a trigger signal every predetermined period, and a trigger output unit 150 transmitting the focus trigger signal to the motion controller 300. An encoder input port 111 for inputting an encoder signal from the stage to the trigger board 100; a microcontroller 113 for controlling the trigger generator 130; a control register 115; And a communication unit 117 for transmitting a focus trigger period and a focus trigger generation period from the trigger board 100 to the trigger board 100.

 The trigger board 100 may generate the trigger signal at a predetermined interval in the focus trigger generation interval with respect to the panel, for example, at intervals of 1 mm or 5 mm of the panel.

The control unit 200 moves the focus axis with respect to the coordinates of the entire area of the panel, searches the focus position through image processing, and applies the detected focus position information to generate a focus mapping table. And transmits the generated focus mapping table to the motion controller 300.

The control unit 200 generates focus mapping data in advance with focus position information mapped to each panel coordinate for a plurality of panels.

As described above, when the image signal is obtained by simply using a camera without using auto focusing in the present invention, the focus may be deviated. For example, if you can not focus more than normal, the image may appear fuzzy, and the contrast between adjacent pixels may collapse.

In order to compensate for such a blemish, the controller 200 monitors the focus information including the average brightness value and the contrast value, which can confirm the focus at each focus position during the vision inspection scan, Monitoring.

If the focus position does not match during the monitoring, the controller 200 generates an alarm. After completion of the vision check scan, the control unit 200 moves the focus axis for a scan period in which the focus position is not matched, The panel is re-scanned.

That is, the focus determination for the coordinates of the entire area of the panel is performed by compensating the focus offset only with the image corresponding to the TFT image of the corresponding pixel, which has the advantage of having the same profile value in the same panel inspection. Here, the focus offset may be the focus position set for the TFT image of the pixel at first, that is, the focus mapping data.

The motion controller 300 stores the focus mapping table transferred from the controller 200 and moves the focus axis 500 to a focus position stored in the focus mapping table according to the trigger signal period.

Specifically, when the first trigger signal is generated, the motion controller 300 moves the focus axis 500 to the first focus position stored in the focus mapping table [1]. When the second trigger signal is generated, the motion controller 300 moves the focus axis 500 to the second focus position stored in the focus mapping table 2, and when the third trigger signal is generated, the motion controller 300 And moves the focus axis 500 to the third focus position stored in the focus mapping table [3].

FIG. 5 is a graph showing focus mapping data obtained by performing one scan on one panel using a panel inspection system using a focus mapping method according to an embodiment of the present invention. That is, it indicates the focus height position information by the coordinates of the panel.

Referring to FIG. 5, it can be seen that the focus position information for the flat central panel is constant, while the focus position information varies depending on the panel bending that occurs at the input and output portions of the panel.

Hereinafter, a method of inspecting a panel using a focus mapping method according to an embodiment of the present invention will be described with reference to FIG.

6 is a flowchart illustrating a panel inspection method using a focus mapping method according to an embodiment of the present invention.

First, in step S600, the controller 200 sets a variable for obtaining mapping data. In step S610, the controller 200 transmits the panel to each focus trigger position to search for a focus position on an inspection area of the panel.

In step S620, the control unit 200 moves the focus axis 500 for each focus trigger position, searches the focus position through image processing, and obtains focus information including the average brightness value and the contrast value at the focus position. The focus position and focus information can be set as a focus offset.

In step S630, the controller 200 generates and stores a focus mapping table by applying the searched focus position and focus information. The controller 200 generates and stores the focus mapping table for each of a plurality of panels.

In step S640, the motion controller 300 receives the periodic focus trigger signal to move the focus axis from the trigger board 100 to predetermined coordinates. The trigger signal may be generated at a predetermined interval in the focus trigger generation interval with respect to the panel, for example, at intervals of 1 mm or 5 mm of the panel, and may be changed according to the designer's intention. And moves the focus axis 500 to a focus position stored in the focus mapping table according to the trigger signal period. For this, the controller 200 stores the generated focus mapping table in the motion controller 300, and the motion controller 300 sets the focus axis 500 to the focus position stored in the focus mapping table according to the trigger signal period .

Specifically, when the first trigger signal is generated, the motion controller 300 moves the focus axis 500 to the first focus position stored in the focus mapping table [1], and when the second trigger signal is generated, 300 moves the focus axis 500 to the second focus position stored in the focus mapping table 2 and the motion controller 300 stores the focus position in the focus mapping table 3 when the third trigger signal is generated And moves the focus axis 500 to the third focus position.

In addition, the focus monitoring unit monitors the focus information including the average brightness value and the contrast value at which the focus can be confirmed at each focus position, and real-time monitors whether the focus position is changed.

If the focus position does not match during the monitoring, the controller 200 generates an alarm, moves the focus axis 500 for a scan period in which the focus position is not matched after completing the vision scan, And rescan the panel. That is, the focus determination for the coordinates of the entire panel area is performed by compensating the focus offset only with the image at the focus trigger position.

In step S650, a panel image is captured through the camera 600 at the focus position, thereby acquiring a video image for panel inspection.

In step S660, the acquired image is inspected and displayed.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. , And are not intended to limit the scope of the present invention. It will be apparent to those skilled in the art that other modifications based on the technical idea of the present invention may be practiced without departing from the invention as set forth herein.

100: Trigger board 200:
300: Motion controller 400: Focus motor
500: focus axis 600: camera
700: air plate 800: stage frame

Claims (10)

A trigger board for generating a periodic focus trigger signal, which is a signal for moving the focus axis with preset coordinates;
A control unit for moving the focus axis at a focus position of the panel, searching for a focus position through image processing, and generating a focus mapping table by applying the focus position and the focus information; And
And a motion controller that stores the focus mapping table and moves the focus axis to a focus position stored in the focus mapping table according to the trigger signal period. The apparatus of claim 1,
Wherein the monitoring unit monitors in real time whether or not the focus position is changed while monitoring the focus information including the average brightness value and the contrast value that can confirm the focus at each focus position during the vision inspection scan. . 3. The apparatus of claim 2,
If the focus position does not match during the monitoring, an alarm is generated. After the completion of the vision inspection scan, the focus axis is moved with respect to a scan period in which the focus position is not matched, and the focus position is re- A panel inspection system using a focus mapping method. The apparatus of claim 1, wherein the trigger board comprises:
An encoder input for receiving a linear encoder output signal for providing position information of the stage for the panel transfer;
A trigger generator for reading the linear encoder signal and generating a trigger signal every predetermined period in a focus trigger generation interval; And
And a trigger output unit for transmitting the trigger signal to the motion controller. The apparatus of claim 1, wherein the trigger board comprises:
Wherein the trigger signal is generated at a predetermined interval in a focus trigger generation interval with respect to the panel. The apparatus of claim 1,
Wherein the focus mapping table is generated for each of a plurality of panels. The apparatus of claim 1,
Wherein the focus detection unit acquires the image signal through the camera while moving the focus axis at the focus trigger position of the panel. A method for inspecting a panel with an inspection system including a trigger board for generating a focus trigger signal, a control unit for inspecting the panel with a camera, and a motion controller for receiving the signal and moving the focus axis,
Moving a focus axis at a focus trigger position of the panel and searching a focus position through image processing;
Generating and storing a focus mapping table by applying the searched focus position;
Moving the focus axis to a focus position stored in the focus mapping table according to the trigger signal period;
Compensating a focus offset by monitoring an average brightness value and a contrast value at the focus position; And
And a step of imaging the panel at the focus position. The panel inspection method according to claim 8, wherein the generating of the trigger signal comprises generating the trigger signal at a predetermined interval in a focus trigger generation interval with respect to the panel. 9. The method of claim 8, wherein generating and storing the focus mapping table comprises:
Wherein the focus mapping table is generated for each of a plurality of panels.
KR1020150118235A 2015-08-21 2015-08-21 System for testing panel using focus mapping scheme and method thereof KR101754598B1 (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102497667B1 (en) * 2022-07-21 2023-02-08 (주)비젼테크 Vision inspection system for display panel and vision inspection method for display panel
WO2023063482A1 (en) * 2021-10-12 2023-04-20 한국광기술원 System for inspecting pixel defects in display panel, and method thereof

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KR100975645B1 (en) 2009-12-18 2010-08-17 주식회사 이테크넷 Appartus for inspecting substrate and method using the same
KR101150397B1 (en) 2009-12-16 2012-06-01 엘아이지에이디피 주식회사 Apparatus for inspecting substrate

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JP2009186414A (en) 2008-02-08 2009-08-20 Olympus Corp Inspection microscope, microscope observation method, and microscopic observation program
KR101490084B1 (en) * 2014-08-21 2015-02-12 주식회사 에이치비테크놀러지 Method and system for resetting the stage moving speed an vision inspection system

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KR101150397B1 (en) 2009-12-16 2012-06-01 엘아이지에이디피 주식회사 Apparatus for inspecting substrate
KR100975645B1 (en) 2009-12-18 2010-08-17 주식회사 이테크넷 Appartus for inspecting substrate and method using the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023063482A1 (en) * 2021-10-12 2023-04-20 한국광기술원 System for inspecting pixel defects in display panel, and method thereof
KR102497667B1 (en) * 2022-07-21 2023-02-08 (주)비젼테크 Vision inspection system for display panel and vision inspection method for display panel

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