JP2009186414A - Inspection microscope, microscope observation method, and microscopic observation program - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an inspection microscope or the like that does not make an objective lens collide with a glass substrate, even in focusing by a manual operation when inspection is performed using a sample or the like for evaluation thicker than a substrate to be usually inspected. <P>SOLUTION: This inspection microscope includes a means for focusing on the surface of the glass substrate by using a focusing mechanism for moving a stage for mounting the glass substrate or the objective lens relatively in the observation optical axis direction, a means for detecting the positional information of the objective lens to the glass substrate when the surface of glass substrate is focused on, a means for setting a moving range where the stage and the objective lens are relatively movable based on the detected positional information, and a means for setting a moving range where the stage and the objective lens are relatively movable when an operator manually operates the focusing mechanism based on the detected positional information. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention inspects a glass substrate such as a flat panel display (FPD) such as a liquid crystal display (LCD) and a plasma display panel (PDP), a semiconductor wafer, and a multilayer printed board. The present invention relates to an inspection microscope for use in an inspection apparatus and a semiconductor inspection apparatus, a microscope observation method and a microscope observation program executed in the inspection microscope.

  Conventionally, microscopes are used not only in the medical and biological fields, but also in various fields and applications such as inspection of semiconductor wafers and magnetic heads, quality control of metal structures, and research and development of new materials. ing.

  By the way, normally, focusing with such a microscope is performed by adjusting the relative positional relationship between the objective lens and the specimen to be observed. Specifically, the objective lens or the stage on which the sample is placed is moved relatively in the optical axis direction. In addition, an autofocus (hereinafter referred to as AF) sensor is mounted, and the objective lens or the stage is driven by a motor based on information detected by the AF sensor, thereby enabling automatic focusing. Some microscopes have a function.

  A microscope having such an AF function, for example, moves the electric stage to the in-focus position based on image information obtained from the AF sensor while moving the electric stage over almost the entire movable range. Yes. In addition, a microscope having an AF function with high responsiveness, high accuracy, and high reliability is desired because it is necessary to inspect a large number of precision processed products quickly and accurately. In order to deal with the problem of being incapable of focusing, an upper limit position and a lower limit position are set for each objective lens, and a focus calculation is performed with the stage moving range above and below the set lower limit position. A microscope that performs focus detection based on the calculation result is also considered (see, for example, Patent Document 1).

  In an inspection apparatus for inspecting a substrate such as an FPD such as an LCD or PDP, a semiconductor wafer, or a multilayer printed board, or an inspection microscope used in a semiconductor inspection apparatus, focusing is performed while moving an objective lens downward from above. It is common. This is because the object to be inspected is a glass substrate, and the circuit pattern is printed on the surface of the glass substrate, so when focusing is performed while moving the objective lens from below to above, the back surface of the glass substrate This is because the focus is on.

  In such an inspection microscope, in order to prevent the objective lens from hitting the glass substrate, there has been considered one provided with a lower limit for the movement of the objective lens (for example, see Patent Document 2).

FIG. 9 is a diagram for explaining the limit of the focus axis of a conventional inspection microscope.
Conventional inspection microscopes used for inspection apparatuses and semiconductor inspection apparatuses for inspecting glass substrates such as FPDs such as LCD and PDP, semiconductor wafers, and multilayer printed boards have a stage or objective lens for mounting the glass substrates. By using a focusing mechanism that relatively moves in the observation optical axis direction, a focusing unit that focuses on the surface of the glass substrate is provided. As shown in FIG. 9, the focusing mechanism is provided with a hard up limit 91 and a hard down limit 92 by sensors or mechanical stoppers at both ends of the focus stroke 95, and between the hard up limit 91 and the hard down limit 92. Thus, the focusing mechanism physically operates.

  Further, in addition to the hard up limit 91 and the hard down limit 92, the focus axis of the conventional inspection microscope includes the objective lens with respect to the glass substrate when focused on the surface of the glass substrate by the focusing unit. Position information (in-focus position) 97 is detected, and based on the detected position information 97, a focus movement range 96 in which the stage and the objective lens are relatively movable is set. The focus movement range 96 includes, for example, a soft down limit 94 as a first position having a smaller value than the position information, and a soft up limit 93 as a second position having a larger value than the position information. Between. These soft up limit 93 and soft down limit 94 are limits managed by software by the focusing unit.

  The focusing unit automatically stops the movement of the stage or the objective lens at the soft-up limit 93 or the soft-down limit 94 even when a command exceeding the soft-up limit 93 or the soft-down limit 94 is issued. That is, the focus movement range 96 from the soft up limit 93 to the soft down limit 94 is a range in which the normal stage or the objective lens can be relatively moved.

The soft up limit 93 or the soft down limit 94 is manually set by the operator. In particular, the soft down limit 94 is set at a position where the objective lens does not collide with a glass substrate that is an object to be inspected. Since the thickness of the glass substrate to be inspected by an FPD inspection apparatus or the like is basically not changed, once the soft down limit 94 is set, the thickness is not changed unless the thickness of the glass substrate to be inspected is changed.
JP 2001-201694 A Japanese Patent Laid-Open No. 11-264939

  However, an FPD inspection apparatus or the like may inspect with an evaluation sample in order to evaluate the performance of the inspection microscope itself in addition to the glass substrate that is normally inspected. Normally, when an inspection is performed using this evaluation sample, focusing is performed manually by an operator without using the autofocus function.

  Since the evaluation sample is thicker than the glass substrate, the objective lens may collide with the evaluation sample when the objective lens or the stage is moved to the soft-down limit 4 set for the glass substrate. However, the evaluation with the evaluation sample often takes a short time, and when the soft-up limit 3 and the soft-down limit 4 are changed only for the inspection with the evaluation sample, the soft-up for the glass substrate is performed after the evaluation is completed. It is necessary to set limit 3 and soft down limit 4 again, and the operation becomes complicated. In addition, while setting soft up limit 3 and soft down limit 4 for the sample for evaluation, resetting for the glass substrate is required. Otherwise, the glass substrate may not be focused. Therefore, the operator rarely changes the soft up limit 3 and the soft down limit 4 set for the glass substrate in order to inspect the evaluation sample.

  In order to keep the FPD inspection device clean, the periphery of the FPD inspection device is surrounded by sheet metal, etc. Also, because the FPD inspection device is enlarged, the place where the operator is located is separated from the place where the operator is actually inspected. The stage of the inspection microscope used in the FPD inspection apparatus being inspected may not be visible to the operator. If you leave the sample for evaluation without setting the soft down limit 4 for the sample for evaluation, other operators will not notice that the sample for evaluation is placed on the stage and manually adjust the focus. The objective lens is made to collide with the sample for evaluation, or the operator forgets that the sample for evaluation is placed on the stage and is focused as if the glass substrate is inspected. Sometimes it collided with.

  That is, in manual focusing when performing inspection using the evaluation sample, the objective lens collides with the glass substrate by the manual operation, and both the highly processed objective lens and the evaluation sample are There was a problem that it could not be used due to scratches.

  The present invention has been made in view of the above-described problems, and it is thicker than a substrate to be normally inspected. For example, even in focusing by a manual operation when inspecting using an evaluation sample or the like, an objective is also provided. An object is to provide an inspection microscope, a microscope observation method, and a microscope observation program in which a lens does not collide with a glass substrate.

The present invention employs the following configuration in order to solve the above problems.
That is, according to one aspect of the present invention, the inspection microscope of the present invention is an inspection microscope used in an inspection apparatus for inspecting a glass substrate, and observes a stage or an objective lens for mounting the glass substrate. By using a focusing mechanism that moves relative to the optical axis direction, focusing means for focusing on the surface of the glass substrate, and when the focusing means focuses on the surface of the glass substrate, In-focus position detecting means for detecting position information of the objective lens with respect to the glass substrate, and movement in which the stage and the objective lens are relatively movable based on the position information detected by the in-focus position detecting means Based on the focus movement range setting means for setting the range and the position information detected by the focus position detection means, the operator manually operates the focus mechanism. The case, characterized in that it comprises a manual focus movement range setting means for the stage and said objective lens to set the range of movement relatively movable.

  In the inspection microscope of the present invention, the movement range set by the focusing movement range setting means is a first position having a value smaller than the position information and a second position having a value larger than the position information. The movement range set by the manual focusing movement range setting means is between the second position and a third position that is smaller than the position information and larger than the first position. It is desirable to be between.

Moreover, it is desirable that the inspection microscope of the present invention further includes release means for releasing the movement range set by the manual focusing movement range setting means.
In the inspection microscope of the present invention, the stage and the objective lens can be relatively moved when the focusing movement range setting means is focused on the surface of the glass substrate by the focusing means. It is desirable to set an appropriate movement range.

  Moreover, according to one aspect of the present invention, in the microscope observation method of the present invention, a computer of an inspection microscope used in an inspection apparatus for inspecting a glass substrate includes a stage or an objective lens on which the glass substrate is placed. By using a focusing mechanism that moves relatively in the observation optical axis direction, the surface of the glass substrate is focused, and the position of the objective lens with respect to the glass substrate when focused on the surface of the glass substrate Information is detected, a movement range in which the stage and the objective lens are relatively movable is set based on the detected position information, and an operator selects the information based on the detected position information. When the focusing mechanism is manually operated, a moving range in which the stage and the objective lens are relatively movable is set.

  Moreover, according to one aspect of the present invention, the microscope observation program of the present invention includes a computer for an inspection microscope used in an inspection apparatus for inspecting a glass substrate, a stage or an objective lens for mounting the glass substrate. By using a focusing mechanism that moves relatively in the direction of the observation optical axis, focusing means for focusing on the surface of the glass substrate, and when the surface of the glass substrate is focused by the focusing means, A focus position detecting means for detecting position information of the objective lens with respect to the glass substrate, and the stage and the objective lens are relatively movable based on the position information detected by the focus position detecting means. Based on the in-focus movement range setting means for setting the movement range and the position information detected by the in-focus position detection means, the operator moves the in-focus mechanism. When operating in the dynamic, a microscopic observation program for causing to function as a manual focusing shift range setting means for the stage and said objective lens to set the range of movement relatively movable.

  According to the present invention, the objective lens does not collide with the glass substrate even in manual focusing when the inspection is performed using an evaluation sample or the like that is thicker than the glass substrate that is normally inspected.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a diagram for explaining a limit of a focus axis of an inspection microscope to which the present invention is applied.

  An inspection microscope to which the present invention is applied is also used in an inspection apparatus or a semiconductor inspection apparatus for inspecting a glass substrate such as an FPD such as an LCD or PDP, a semiconductor wafer, or a multilayer printed board, as in the conventional inspection microscope. By using a focusing mechanism that relatively moves a stage or an objective lens for placing the glass substrate in the observation optical axis direction, a focusing unit that focuses on the surface of the glass substrate is provided. As shown in FIG. 1, the focusing mechanism is provided with a hard up limit 91 and a hard down limit 92 by sensors or mechanical stoppers at both ends of the focus stroke 95, and between the hard up limit 91 and the hard down limit 92. Thus, the focusing mechanism physically operates. Generally, the distance between the hard up limit 91 and the hard down limit 92 is about 9 mm.

  In addition to the hard up limit 91 and the hard down limit 92, the glass substrate when the focus of the inspection microscope to which the present invention is applied is focused on the surface of the glass substrate by the focusing unit. The position information (focus position) 97 of the objective lens with respect to is detected, and based on the detected position information 97, a focus movement range 96 in which the stage and the objective lens are relatively movable is set. . The focus movement range 96 includes, for example, a soft down limit 94 as a first position having a smaller value than the position information, and a soft up limit 93 as a second position having a larger value than the position information. Between. These soft up limit 93 and soft down limit 94 are limits managed by software by the focusing unit. Generally, the soft up limit 93 is about 2 mm above the position information (focus position) 97, and the soft down limit 94 is about 0.5 mm below the position information (focus position) 97.

  The focusing unit automatically stops the movement of the stage or the objective lens at the soft-up limit 93 or the soft-down limit 94 even when a command exceeding the soft-up limit 93 or the soft-down limit 94 is issued. That is, the focus movement range 96 from the soft-up limit 93 to the soft-down limit 94 is usually a range in which the stage or the objective lens can be relatively moved. The soft up limit 93 or the soft down limit 94 is manually set by the operator. In particular, the soft down limit 94 is set at a position where the objective lens does not collide with a glass substrate that is an object to be inspected.

  Furthermore, the inspection microscope to which the present invention is applied has a position at a predetermined distance of 8 from the detected position information 97 so that the objective lens does not collide with the sample for evaluation when the operator manually operates the focusing mechanism. In addition, the manual down limit 7 is automatically set as one end of a moving range in which the stage and the objective lens are relatively movable. This manual down limit 7 is a third position which is smaller than the position information 97 and larger than the soft down limit 94, and the focus manual movement range 9 from the soft up limit 93 to the manual down limit 7 is This is a range in which the stage or the objective lens can be relatively moved by manual operation. That is, if the operator attempts to move the stage or objective lens manually using a focus jog or the like, it can move up to the manual down limit 7, but if the operator tries to move it below the manual down limit, the in-focus section will give an error. The focus movement is stopped so that the manual down limit is not exceeded. The manual down limit 7 is preferably about 0.3 mm below the position information (focus position) 97.

FIG. 2 is a diagram showing an outline of an inspection microscope to which the present invention is applied.
In FIG. 2, the inspection apparatus is an inspection apparatus or semiconductor inspection apparatus for inspecting a glass substrate such as an FPD such as an LCD or PDP, a semiconductor wafer, or a multilayer printed board, and includes a microscope barrel 10 having an AF function. The gantry 11 in which the microscope barrel 10 moves, the linita motor 12 that drives the microscope barrel 10 in the horizontal direction 22, the stage 16 on which an inspection object such as a glass substrate 15 is placed, and the focus control unit 17 that controls the focus drive. And an operation unit 18 for controlling the focus.

  The operation unit 18 includes a manual down limit release button 19 for releasing the manual down limit 7 and a focus jog 20 for manually moving the focusing mechanism up and down in the vertical direction 21. Whether or not to perform focusing by relative movement of the focus manual movement range 9, which is a movement range in which the stage 16 and the objective lens 14 attached to the revolver 13 are relatively movable when operated manually. Control on / off. Execution of focusing is performed by driving the objective lens 14 or the stage 16 using a pulse motor that generates a pulse of 50 nm, for example. The focus control unit 17 automatically moves the focusing mechanism up and down when autofocus is on based on the AF signal of the AF mounted on the microscope barrel 10. At this time, the vertical movement amount of the focus axis is determined by the number of pulses transmitted from the focus control unit 17. When the auto focus is off, the operator manually operates with the focus jog 20 of the operation unit 18.

Next, the procedure for setting the manual down limit 7 will be described.
FIG. 3 is a diagram showing a focus state when a glass substrate is inspected, and FIG. 4 is a diagram showing a focus axis limit when a manual down limit is set.

  First, the operator manually adjusts the manual down limit 7 based on the position information (focus position) 97 of the objective lens 14 with respect to the glass substrate 15 when the focus control unit 17 is focused on the surface of the glass substrate 15. Is stored as the set distance 8. The setting distance 8 is set so that the objective lens 14 does not collide with the inspection object even if the objective lens 14 is moved relatively downward from the position information (focus position) 97. Since the set distance 8 changes depending on the glass thickness 33 of the glass substrate 15 to be inspected, it can be changed by a command from a personal computer or the like. Since the distance between the objective lens 14 and the glass substrate 15 varies depending on the type and magnification of the objective lens 14, the set distance 8 can be set for each type and magnification of the objective lens 14.

  Next, the operator manually sets the soft up limit 93 and the soft down limit 94. At this time, the soft down limit 94 is set at a position where the objective lens 14 does not collide with the glass substrate 15. Further, since the soft-up limit 93 is the retracted position of the objective lens 14 after the inspection and the initial position when the autofocus is turned on, it does not affect the inspection time of the glass substrate 15, and the glass substrate 15, the sample for evaluation, etc. Set the position so that it does not collide even when different thicknesses are inspected.

  If the soft up limit 93 and the soft down limit 94 are known, the operator then turns on and focuses the autofocus for inspection. When autofocus is in focus, the focus control unit 17 automatically sets the manual down limit 7. Note that when the inspection is performed with the normal glass substrate 15, the glass thickness 33 does not change, so the positions of the manual down limit 7 and the soft down limit 94 may be the same.

  FIG. 5 is a diagram showing an outline of an inspection microscope when inspecting with an evaluation sample, FIG. 6 is a diagram showing a focus state when inspecting with an evaluation sample, and FIG. 7 is an evaluation sample. It is a figure which shows the limit of the focus axis | shaft at the time of test | inspecting by.

An evaluation sample 23 is placed on the stage 16, and the evaluation sample 23 is thicker than the glass substrate 15.
In order to inspect with the sample 23 for evaluation, the operator turns on autofocus and focuses the sample 23 for evaluation. The focus control unit 17 sets the manual down limit 7 as shown in FIG. 7 in the same manner as when the glass substrate is inspected when the autofocus is focused on the evaluation sample 23, and sets the predetermined distance 8 in the memory. Remember. When the operator wants to move the focus position downward from the position information (focus position) 97, the autofocus is turned off and the focus jog 20 of the operation unit 18 is turned to manually move the objective lens 14 relatively downward. Moving. When the focus position reaches the manual down limit 7, the focus control unit 17 stops the focus position at the manual down limit 7 and sets a limit error. When the operator knows that it is dangerous to move further downward, if he wants to move the focus further downward, the manual down limit release button 19 provided on the operation unit 18 is pressed, By releasing the manual down limit 7, the manual down limit 7 becomes invalid, and by turning the focus jog 20, it is possible to move further down than the soft down limit 7.

  Accordingly, the operator does not notice that the thickness of the object to be inspected has changed in the evaluation sample 23 and causes the objective lens 14 to collide with the evaluation sample 23 even if the operator tries to move the objective lens 14 relatively downward. There is no. Further, the manual down limit 7 can be released even if the autofocus is not focused at the normal position, so that the operator rotates the focus jog while paying attention so that the evaluation sample 23 does not collide with the objective lens 14. Can be matched.

FIG. 8 is a diagram illustrating the limit of the focus axis in the modified example.
As shown in FIG. 8, the manual down limit 7 may be set below the soft down limit 94. In this case, the soft down limit 94 has priority over the manual down limit 7.

  As described above, by using the inspection microscope to which the present invention is applied, the inspection object is changed from the glass substrate 15 to the evaluation sample 23, and even if the focus adjustment is manually operated without the operator being aware, The objective lens 14 does not collide with the sample 23 for evaluation.

In the above-described embodiment described above, it is shown that the operation is performed by the operation unit 18, but the operation may be performed by transmitting a command from the personal computer to the focus control unit 17.
In the above-described embodiment, only one set distance 8 is provided. However, a plurality of set distances 8 may be set for each objective lens 14 and a plurality of manual down limits 7 may be provided.

  The embodiments of the present invention have been described above with reference to the drawings. However, the inspection microscope to which the present invention is applied is limited to the above-described embodiments and the like as long as the function is performed. Needless to say, a single device, a system composed of a plurality of devices, an integrated device, or a system that performs processing via a network such as a LAN or WAN may be used. .

  It can also be realized by a system comprising a CPU, ROM or RAM memory connected to a bus, an input device, an output device, an external recording device, a medium drive device, a portable storage medium, and a network connection device. That is, a ROM or RAM memory, an external recording device, and a portable storage medium that record software program codes for realizing the systems of the above-described embodiments are supplied to an inspection microscope, and a computer of the inspection microscope is programmed. Needless to say, this can also be achieved by reading and executing the code.

  In this case, the program code itself read from the portable storage medium or the like realizes the novel function of the present invention, and the portable storage medium or the like on which the program code is recorded constitutes the present invention. .

  Examples of portable storage media for supplying the program code include flexible disks, hard disks, optical disks, magneto-optical disks, CD-ROMs, CD-Rs, DVD-ROMs, DVD-RAMs, magnetic tapes, and nonvolatile memories. Various storage media recorded via a network connection device (in other words, a communication line) such as a card, a ROM card, electronic mail or personal computer communication can be used.

  In addition, the functions of the above-described embodiments are realized by executing the program code read out on the memory by the computer, and the OS running on the computer is actually executed based on the instruction of the program code. The functions of the above-described embodiments are also realized by performing part or all of the process.

  Furthermore, a program code read from a portable storage medium or a program (data) provided by a program provider is provided in a function expansion board inserted into a computer or a function expansion unit connected to a computer. The CPU of the function expansion board or function expansion unit performs part or all of the actual processing based on the instruction of the program code, and the functions of the above-described embodiments are also performed by the processing. Can be realized.

  That is, the present invention is not limited to the above-described embodiments and the like, and can take various configurations or shapes without departing from the gist of the present invention.

It is a figure for demonstrating the limit of the focus axis | shaft of the inspection microscope to which this invention is applied. It is a figure which shows the outline of the inspection microscope to which this invention is applied. It is a figure which shows the state of the focus at the time of test | inspecting a glass substrate. It is a figure which shows the limit of a focus axis | shaft when a manual down limit is set. It is a figure which shows the outline of the test | inspection microscope at the time of test | inspecting with the sample 23 for evaluation. It is a figure which shows the state of the focus at the time of test | inspecting with the sample 23 for evaluation. It is a figure which shows the limit of the focus axis at the time of test | inspecting with the sample 23 for evaluation. It is a figure which shows the limit of the focus axis | shaft in a modification. It is a figure for demonstrating the limit of the focus axis | shaft of the conventional inspection microscope.

Explanation of symbols

7 Manual down limit 8 Predetermined distance 9 Focus manual movement range 10 Microscope barrel 11 Gantry 12 Linita motor 13 Revolver 14 Objective lens 15 Glass substrate 16 Stage 17 Focus control unit 18 Operation unit 19 Manual down limit release button 20 Focus jog 21 Vertical direction 22 Horizontal direction 23 Evaluation sample 23
33 Glass thickness (glass substrate 15)
34 Glass thickness (Evaluation sample 23)
91 Hard-up limit 92 Hard-down limit 93 Soft-up limit 94 Soft-down limit 95 Focus stroke 96 Focus movement range 97 Position information (focus position)

Claims (6)

An inspection microscope used in an inspection apparatus for inspecting a glass substrate,
Focusing means for focusing on the surface of the glass substrate by using a focusing mechanism for moving the stage or the objective lens for placing the glass substrate relatively in the observation optical axis direction;
In-focus position detecting means for detecting position information of the objective lens with respect to the glass substrate when the surface of the glass substrate is focused by the focusing means;
A focus movement range setting means for setting a movement range in which the stage and the objective lens are relatively movable based on the position information detected by the focus position detection means;
Based on the position information detected by the focus position detection means, a range of movement in which the stage and the objective lens can be moved relatively when an operator manually operates the focus mechanism is set. Manual focusing movement range setting means;
An inspection microscope characterized by comprising: The movement range set by the in-focus movement range setting means is between a first position that is smaller than the position information and a second position that is larger than the position information.
The movement range set by the manual focusing movement range setting means is between the second position and a third position that is smaller than the position information and larger than the first position.
The inspection microscope according to claim 1. further,
Release means for releasing the movement range set by the manual focusing movement range setting means;
The inspection microscope according to claim 1, further comprising:   The in-focus movement range setting means sets a movement range in which the stage and the objective lens can move relative to each other when the focusing means focuses on the surface of the glass substrate. The inspection microscope according to claim 1 or 2. A computer of an inspection microscope used for an inspection apparatus for inspecting a glass substrate,
By focusing on the surface of the glass substrate by using a focusing mechanism for moving the stage or the objective lens for placing the glass substrate relatively in the observation optical axis direction,
Detecting position information of the objective lens with respect to the glass substrate when the surface of the glass substrate is in focus;
Based on the detected position information, set a moving range in which the stage and the objective lens can move relatively,
Based on the detected position information, when an operator manually operates the focusing mechanism, a moving range in which the stage and the objective lens can move relatively is set.
A microscope observation method characterized by the above. A computer of an inspection microscope used in an inspection apparatus for inspecting a glass substrate,
Focusing means for focusing on the surface of the glass substrate by using a focusing mechanism for moving the stage or the objective lens for placing the glass substrate relatively in the observation optical axis direction;
In-focus position detecting means for detecting position information of the objective lens with respect to the glass substrate when the surface of the glass substrate is focused by the focusing means;
A focus movement range setting means for setting a movement range in which the stage and the objective lens are relatively movable based on the position information detected by the focus position detection means;
Based on the position information detected by the focus position detection means, a range of movement in which the stage and the objective lens can be moved relatively when an operator manually operates the focus mechanism is set. Manual focusing movement range setting means;
Microscope observation program characterized by making it function.

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