KR20160147489A - Method of manufacturing gas conduit generating plasma and gas pipe manufactured by the same - Google Patents

Method of manufacturing gas conduit generating plasma and gas pipe manufactured by the same Download PDF

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Publication number
KR20160147489A
KR20160147489A KR1020150084300A KR20150084300A KR20160147489A KR 20160147489 A KR20160147489 A KR 20160147489A KR 1020150084300 A KR1020150084300 A KR 1020150084300A KR 20150084300 A KR20150084300 A KR 20150084300A KR 20160147489 A KR20160147489 A KR 20160147489A
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South Korea
Prior art keywords
ring
body member
shaped
partial body
gas conduit
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KR1020150084300A
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Korean (ko)
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KR101703429B1 (en
Inventor
이강수
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이강수
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/452—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by activating reactive gas streams before their introduction into the reaction chamber, e.g. by ionisation or addition of reactive species
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/006—Details of gas supplies, e.g. in an ion source, to a beam line, to a specimen or to a workpiece

Abstract

The present invention relates to a method of manufacturing a plasma generating gas conduit and a gas conduit manufactured thereby, comprising: a raw material preparing step of preparing a ring-shaped raw material; Forming a first partial body member and a second partial body member by machining the raw material so as to include a 'C' shaped end face formed in a ring shape and forming a part of the ring-shaped gas flow path; A ring-shaped body member forming step of joining the first partial body member and the second partial body member in an opposed state to each other to form a ring-shaped body member in which the ring-shaped gas flow path is formed; A connection member manufacturing step of manufacturing a connection member formed in a pipe shape in which a channel is formed; A coupling member coupling step of coupling the coupling member to the ring-shaped body member so that the channel communicates with the ring-shaped gas channel; A gas conduit for plasma generation which can significantly reduce the time required for cutting the partial body member and can reliably improve durability life by fundamentally preventing local stress concentration from occurring, Of the present invention.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a method of manufacturing a plasma generating gas conduit,

The present invention relates to a method of manufacturing a gas conduit for supplying a gas for generating plasma, and more particularly, to a method of manufacturing a gas conduit including a ring-shaped conduit by using a brittle material such as a quartz, And more particularly, to a method of manufacturing a gas conduit for a gas.

Plasma is a state in which ions and electrons are present in the space at the same density as the material is ionized, and it is called the fourth form of a substance from solid, liquid, and gas. This type of plasma is widely used for industrial and chemical applications such as semiconductor wafer etching, hydrocarbon material removal, and silicon oxide removal.

The plasma may be generated by forming an electric field in a gas such as O 2 , NF 3 , Ar, CF 4 , 112 and He or a mixed gas thereof (hereinafter referred to as a plasma gas) , A microwave discharge, a high frequency discharge, etc., and a plasma can be generated by forming an electric field in a chamber or a gas guide where a plasma gas is located.

Such a plasma generating gas conduit is disclosed in Fig. 4 of Japanese Patent Laid-Open Publication No. 2015-500557, and is also disclosed in U.S. Published Patent Application No. 2013/146225.

1, the plasma generating gas conduit 1 includes an inlet port 1i formed in the central portion of the ring-shaped gas flow path Rs in a donut shape and for introducing gas into the ring-shaped gas flow path Rs, And an outlet 1o for discharging the gas from the ring-shaped gas flow passage Rs. The plasma generating gas conduit 1 is made of a quartz material to prevent reactivity with the gas, and may be formed of a glass material according to circumstances.

As shown in Fig. 3A, the plasma generating gas conduit 1 of such a shape is a half-sectioned section of the body member 10 which communicates the ring-shaped gas flow passage Rs with the inlet port 1i and the outlet port 1i The partial body members 10A and 10B are first fabricated and the partial body members 10A and 10B are joined to each other with the partial body members 10A and 10B facing each other to form a gas flow path with each C- And by joining the flange 20, which assists the connection of the gas conduit 1 and other components, to the projections 14, 16. That is, the joints of the partial body members 10A and 10B and the flange 20 are bonded two times.

However, there is a problem that it takes a very long time to process the partial body members 10A, 10B shown in Fig. 3A from the raw material 10y of Fig. 2 by machining. That is, since the longitudinal length 10L of the partial body members 10A and 10B in FIG. 3A is longer than the length 10W in the lateral direction, the lengths of the raw material of the rectangular parallelepiped and the raw material 10y shown in FIG. The partial body members 10A and 10B shown in Fig. 3A are cut.

Since the partial body members 10A and 10B are formed so that the projections 14A and 14B and 16A and 16B protrude radially outward from the central portions 12A and 12B in which the ring-shaped gas flow paths Rs are formed, The diameter 10L 'of the partial body member 10y must be at least the length 10L of the partial body members 10A and 10B and the remaining portions that do not form the partial body members 10A and 10B must be machined Should be.

Furthermore, since the glass or quartz material is poor in impact resistance, there is a machining limitation that the cutting depth of the cutting bite must be kept very small. Therefore, from the raw material 10y of Fig. 2, the partial body members 10A, 10B) takes a very long time. For example, when the length 10L of the partial body members 10A and 10B is approximately 200 mm, it is necessary to process the partial body members 10A and 10B from the raw material 10y of Fig. It is necessary. Thus, as the machining time of one of the partial body members 10A, 10B becomes longer, the productivity is lowered, and there is a serious problem that the manufacturing cost is increased.

3A also includes a central portion 10 in which the ring-shaped gas flow path Rs is formed and protrusions 14A, 14B, 16A, 16B, and 16C that form an inlet port 1i and an outlet port io, 16B are formed by the bent portions of the shape, there is a tendency that the stress is concentrated at the time of machining by the cutting bite. Therefore, fine cracks are generated during the processing of the partial body members 10A and 10B of Fig. 3A, and thus, even if the finished product gas conduit 1 is manufactured, there is a problem that the durability life is deteriorated as a result.

Japanese Patent Laid-Open Publication No. 2015-500557

In order to solve the above problems, the present invention provides a method for manufacturing a plasma generating gas conduit which can reliably and reliably guarantee the durability lifetime by preventing the concentration of stress locally while shortening the manufacturing time of the plasma generating gas conduit The purpose is to provide.

That is, the present invention provides a gas conduit for generating plasma of a predetermined shape by reducing a machining amount for manufacturing a gas conduit from a raw material, thereby shortening a manufacturing time, and at the same time, So as to fundamentally suppress local stress concentration.

Accordingly, it is an object of the present invention to provide a gas conduit for plasma generation which is inexpensive and has improved durability while reducing the defective rate.

In order to accomplish the above object, the present invention provides a method of manufacturing a semiconductor device, comprising: preparing a raw material for preparing a ring-shaped raw material; Forming a first partial body member and a second partial body member by machining the raw material so as to include a 'C' shaped end face formed in a ring shape and forming a part of the ring-shaped gas flow path; A ring-shaped body member forming step of joining the first partial body member and the second partial body member in an opposed state to each other to form a ring-shaped body member in which the ring-shaped gas flow path is formed; A connection member manufacturing step of manufacturing a connection member formed in a pipe shape in which a channel is formed; A coupling member coupling step of coupling the coupling member to the ring-shaped body member so that the channel communicates with the ring-shaped gas channel; The method of manufacturing a plasma generating gas conduit according to the present invention includes the steps of:

This is because, after the ring-shaped body member is formed by forming the ring-shaped part body members forming the ring-shaped gas flow path and then joining them to each other, a connecting member protruding from the partial body member is separately manufactured and joined to the ring- By producing the gas conduit for production, it is possible to drastically shorten the time required for cutting the partial body member and to prevent the local concentration of stress.

In other words, since the ring-shaped body member is formed in a ring shape such as a donut, it is possible to perform the cutting process even by the CNC lathe without depending on the machining center, so that the machining time and the machining process can be simplified.

The partial body member may be formed with a recessed groove into which the connecting member is inserted, and the connecting member may be formed by welding the connecting member in the recessed groove of the ring-shaped body member.

In this way, the joining parts of the partial body member and the connecting member can be joined to each other in a correct posture without being twisted, and at the same time, the connecting member is formed so as to extend linearly in the extending direction of the oil passage, The stress is not concentrated on the joining portion between the connecting member and the body member during the cutting process or the joining process, so that the durability can be further improved.

The connecting member and the ring-shaped body member are both formed of a material of either a quartz or a glass.

The connecting member may communicate with the waveguide and may be provided in a number corresponding to the number of the grooves and may be connected to either the gas inlet or the gas outlet.

And joining and joining the gas inlet and the flange coupled to the gas outlet at the other end of the connecting member. Here, the flange may be coupled to the body member after being integrally formed with the connecting member, or may be coupled to the end of the connecting member after the connecting member and the body member are coupled to each other.

And sanding the welded portion of the coupling member and the concave groove when the coupling member is welded to the concave groove.

According to another aspect of the present invention, there is provided a gas conduit for plasma generation, which is manufactured by the method for manufacturing a plasma generating gas conduit according to an aspect of the present invention.

According to the present invention, a partial body member for forming a ring-shaped gas flow path is formed in a ring shape, and a connecting member protruding from the partial body member is separately manufactured and then joined to produce a raw material It is possible to reduce the time required for machining the partial body member and to reduce the manufacturing cost.

Further, according to the present invention, since the partial body member forming the ring-shaped gas flow channel is formed in a ring shape that does not protrude radially outward or inward in the radial direction, the partial body member can be processed in a simpler process using a CNC lathe .

The present invention is characterized in that a ring-shaped body member is formed into a ring shape, a connecting member is formed in the form of a pipe in the shape of a letter, and then these are joined by welding so that the ring- It is possible to obtain the effect of eliminating the problem of stress concentration at the boundary between them when machined into the body.

Further, according to the present invention, since the ring-shaped body member and the connecting member are formed in advance in the recessed groove into which the connecting member is inserted, the ring-shaped body member and the connecting member are accurately An advantage that can be combined in the posture can be obtained.

It is therefore an object of the present invention to provide a gas conduit in which a ring-shaped gas flow path is formed at a much lower cost and a higher yield than in the prior art, and an advantageous effect of reliably ensuring the durability life of the manufactured gas conduit is obtained have.

1 is a perspective view showing a general plasma generating gas conduit.
FIG. 2 is a view showing a raw material for forming the partial body member of FIG. 1;
FIGS. 3A and 3B sequentially illustrate the steps of manufacturing the gas conduit of FIG. 1;
4 is a perspective view showing a general plasma generating gas conduit.
FIG. 5 is a view showing a raw material for molding the partial body member of FIG. 4;
6A and 6B are views sequentially showing the steps of manufacturing the gas conduit of FIG.

Hereinafter, a gas conduit for plasma generation according to an embodiment of the present invention will be described with reference to the accompanying drawings. The present invention may be embodied in other specific forms without departing from the spirit and scope of the present invention as defined by the appended claims. And is provided to fully disclose the scope of the invention. In addition, it is to be understood that the drawings used in the present embodiment are provided to facilitate understanding of the present invention and can be exaggerated or modified in shape and scale.

The plasma generating gas conduit 100 according to the present invention is formed by forming a plasma gas (a gas such as O 2 , NF 3 , Ar, CF 4 , 112 and He or a mixed gas thereof) and an electric field for generating plasma And is used as a constitution of a plasma generating apparatus that performs gas as much as possible.

The plasma generating gas conduit 100 shown in FIG. 4 is made of quartz or glass and includes a ring-shaped body member 110 in which a ring-shaped waveguide Rs is formed, a ring-shaped body member 110, And a connecting member 120 connected to the outer circumferential surface are coupled to each other. Accordingly, the gas conduit 100 according to the present invention is formed with the joint portion 100x of the ring-shaped body member 110 and the connecting member 120.

A method of manufacturing a plasma generating gas conduit 100 according to the present invention is a method of manufacturing a plasma generating gas conduit 100 in which a ring-shaped body member 110 and a connecting member 120 are separately manufactured, 120 are welded to each other, it is possible to shorten the time required for molding the partial body members 10A, 10B of FIG. 3A, minimize the occurrence of defects, increase the yield and locally concentrate the stress It is possible to obtain an advantage that it can be solved.

Hereinafter, a method for manufacturing a plasma generating gas conduit according to this embodiment will be described in detail with reference to Figs. 5 to 6B.

Step 1 : First, as shown in FIG. 5, two donut-shaped raw materials 110y formed of a quartz material are prepared. The raw material 110y is formed in the shape of a ring having a through hole formed at the center thereof, so that it is possible to shorten the time required for machining the central through hole 100z of the ring-shaped body member 110 described later.

At this time, the outer diameter Do 'of the raw material 110y is formed to be equal to or slightly larger than the outer diameter Do of the ring-shaped body member 110 described later, and the inner diameter Di' Is formed to be equal to or slightly smaller than the inner diameter (Di)

Step 2 : Then, the raw material 110y prepared in step 1 is cut to form the partial body members 110A and 110B shown in Fig. 6A. That is, although the raw material 110y is a rectangular cross-section with a hollow shape, the raw material 110y forms a C-shaped cross-section by forming a semicircular outer circumferential surface and a semicircular inner circumferential surface through cutting. Here, the inner circumference side recessed portion 110P of the C 'shaped section forms a partial cross section of the ring-shaped gas flow path (waveguide Rs) through which the gas flows.

Since the part body members 110A and 110B to be machined in step 2 are in the form of a circular ring as a whole as shown in Fig. 6A, it is possible to form them by a CNC lathe that performs cutting while rotating the raw material 110y. Therefore, compared to machining the partial body members 10A, 10B of the type shown in Fig. 3A by a machining center, the cutting process is much simpler.

Above all, since the partial body members 110A and 110B machined in step 2 are in the form of circular rings having a generally similar shape to the raw material 110y, the partial body members 10A, The amount of the raw material to be cut and removed at the time of molding the partial body members 110A and 110B of Fig. 6A from the raw material 110y of Fig. 4 is much larger than the amount of the raw materials to be cut and removed at the time of molding little. Accordingly, the time required for the step 2 can be shortened to 1/2 to 1/3 or less as compared with the conventional method, and the advantage of being able to manufacture the plasma generating gas conduit 100 more quickly and inexpensively can be obtained have.

Generally, the partial body members 110A and 110B are formed symmetrically with respect to each other, but they may be formed in other shapes depending on the sectional shape of the ring-shaped gas flow path Rs.

Step 3 : Once the recessed portion 110P for forming the ring-shaped gas flow path Rs is extracted from the raw material 110y, the partial body members 110A and 110B are pulled out from the CNC lathe. Then, in the NC machine, the recessed groove 112 into which the connecting member 120 is inserted is formed. The shape of the recessed groove 112 is determined so as to engage with the end shape 122a of the connecting member 120. [

Step 4 : After the step 3 is performed, the two partial body members 110A and 110B are bonded to each other by welding or the like in a state in which the mutually facing faces 110s are in contact with each other. Thereby, the ring-shaped gas passage Rs forms the ring-shaped body member 110 by the recessed portion 110P of each of the partial body members 110A and 110B.

Step 5 : On the other hand, independently of steps 2 to 4, the connecting member 120 is separately manufactured. The connecting member 120 includes a connecting pipe 122 having an end shape 122a engaged with the recessed groove 112 of the ring-shaped body member 110 and forming a channel, As shown in FIG.

That is, the connecting member 120 is manufactured by first fabricating the connecting pipe 122 forming the channel, fabricating the flange 125, and then joining them.

Step 6 : After the steps 4 and 5 are performed, in a state where the connecting member 120 is inserted into the recessed groove 112 of the ring-shaped body member 110, the end 122a of the connecting member 122 and the ring- The boundary of the recessed groove 112 of the member 110 is welded.

As described above, the ring-shaped body member 110 is formed in the shape of a ring, and the connecting member 120 is formed into a pipe shape in the shape of a letter, and then the members 110 and 120 are joined by welding. When the ring-shaped gas flow path Rs and the connecting member 20 are machined into a single body in the conventional ring-shaped body member 10 shown in Fig. 3a, the problem of stress concentration at the boundary 12x therebetween is solved , The possibility of breakage due to local stress concentration is reduced, and a sufficient durability life can be guaranteed. Also, since the end 122a of the connecting member 120 is engaged with the recessed groove 112 formed in the ring-shaped body member 110, the ring-shaped body member 110 and the connecting member 120 The advantage of being able to engage in precise posture that is not interrupted is obtained.

Step 6 : Thereafter, a sanding process is performed in which the abutting welding portions of the partial body members 110A and 110B and the welding portions of the recessed grooves 112 of the ring-shaped body member 110 are finely grained, To remove the adhered fine particles.

The method of manufacturing a gas conduit 100 for plasma generation according to an embodiment of the present invention includes forming the partial body members 110A and 110B forming the ring-shaped gas flow path Rs in a ring shape, The connecting member 120 protruding from the body member is manufactured separately and then joined together to manufacture the raw material 110y for manufacturing the partial body members 110A and 110B into the ring- It is possible to use a CNC lathe for a cutting process in a simple process. Thus, the time and cost required for forming the partial body members 110A and 110B can be greatly reduced, and the production of the gas conduit 100 An advantageous effect of significantly lowering the cost can be obtained.

In addition, in the present invention, the ring-shaped ring-shaped body member 110 and the connecting member 120 extending in the shape of a letter are separately manufactured and then welded together to form a plasma generating gas conduit 100 Shaped body member 110 and the linking member 120, it is possible to solve the conventional problem that the stress is locally concentrated between the ring-shaped body member 110 and the linking member 120, and a longer durability life can be reliably ensured.

While the present invention has been described in connection with what is presently considered to be practical exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, It will be understood that the invention may be practiced. It is therefore to be understood that the embodiments described above are to be considered in all respects only as illustrative and not restrictive. In addition, the scope of the present invention is indicated by the following claims rather than the above detailed description. Also, all changes or modifications derived from the meaning and scope of the claims and their equivalents should be construed as being included within the scope of the present invention.

For example, in the embodiment shown in the drawings, a configuration is shown in which the flange 124 is joined to the linking member 120 in advance (step 5) and then joined to the ring-shaped body member 110, According to another embodiment, the flange 124 may be engaged with the pipe member 122 after the pipe portion 122 of the connecting member 120 is first bonded to the ring-shaped body member 120.

In the embodiment shown in the drawings, after the recessed grooves 112 are formed in the partial body members 110A and 110B in advance, the partial body members 110A and 110B are coupled to each other to manufacture the ring- According to another embodiment of the present invention, the partial body members 110A and 110B are joined to each other while the concave grooves 112 are not formed in the partial body members 110A and 110B, Shaped member 110 and to form the recessed groove 112 from the ring-shaped body member 110. The ring-

100: gas conduit 110: ring-shaped body member
110A, 110B: partial body member 112: recessed groove
120: connecting member 124: flange
Rs: ring-shaped gas flow path P1, P2: waveguide channel
112, 112:

Claims (5)

A raw material preparation step of preparing a ring-shaped raw material;
Forming a first partial body member and a second partial body member by machining the raw material so as to include a 'C' shaped end face formed in a ring shape and forming a part of the ring-shaped gas flow path;
A ring-shaped body member forming step of joining the first partial body member and the second partial body member in an opposed state to each other to form a ring-shaped body member in which the ring-shaped gas flow path is formed;
A connection member manufacturing step of manufacturing a connection member formed in a pipe shape in which a channel is formed;
A coupling member coupling step of coupling the coupling member to the ring-shaped body member so that the channel communicates with the ring-shaped gas channel;
Wherein the gas conduit comprises a plurality of gas conduits.
The method according to claim 1,
Wherein the partial body member is formed with a recessed groove into which the connecting member is inserted in advance and the connecting member engaging step is performed by welding the connecting member in the recessed groove of the ring- Wherein the gas conduit is a gas conduit.
The method according to claim 1,
Wherein the connecting member and the ring-shaped body member are both made of a material selected from the group consisting of quartz and glass.
The method according to claim 1,
Wherein a flange is coupled to an end of the connecting member.
7. A plasma generating gas conduit according to any one of claims 1 to 5, which is manufactured by the method for producing a plasma generating gas conduit.
KR1020150084300A 2015-06-15 2015-06-15 Method of manufacturing gas conduit generating plasma and gas pipe manufactured by the same KR101703429B1 (en)

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KR101703429B1 KR101703429B1 (en) 2017-02-06

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102406350B1 (en) * 2022-03-31 2022-06-08 주식회사 조양 Plazma creation gas sleeve manufacturing method and gas sleeve thereby

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20070104701A (en) * 2006-04-24 2007-10-29 최대규 Inductive coupled plasma source with plasma discharging tube covered with magnetic core block
KR20140068380A (en) * 2012-11-28 2014-06-09 주식회사 월드탑이엔지 Easy to prevent oxidation of toxic gases only exhaust duct structure
JP2015500557A (en) 2011-12-08 2015-01-05 エム ケー エス インストルメンツインコーポレーテッドＭｋｓ Ｉｎｓｔｒｕｍｅｎｔｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ Gas injector for plasma applicator

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20070104701A (en) * 2006-04-24 2007-10-29 최대규 Inductive coupled plasma source with plasma discharging tube covered with magnetic core block
JP2015500557A (en) 2011-12-08 2015-01-05 エム ケー エス インストルメンツインコーポレーテッドＭｋｓ Ｉｎｓｔｒｕｍｅｎｔｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ Gas injector for plasma applicator
KR20140068380A (en) * 2012-11-28 2014-06-09 주식회사 월드탑이엔지 Easy to prevent oxidation of toxic gases only exhaust duct structure

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102406350B1 (en) * 2022-03-31 2022-06-08 주식회사 조양 Plazma creation gas sleeve manufacturing method and gas sleeve thereby

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