KR20160115805A - Drying apparatus, coating film forming system, drying method and coating film forming method - Google Patents

Abstract

The present invention provides a technique of desirably controlling dry strength to dry a coating solution of a slurry state coated on a base material. A drying device (3A) dries the coating solution (41) of the slurry state coated on one main side (51) of the base material (5) continuously transferred. The drying device (3A) includes: heating units (a coating side heating unit (35) and a rear side heating unit (37)) heating the coating solution (41); an emission pyrometer (39) measuring the temperature of an unchangeable emission rate part (531) on the other main side (53) in which an emission rate is not changed due to heating in the base material (5), at a position of the lower side of a transfer direction than the heating unit; and a heating control unit (711) controlling the strength of the heating by the heating unit based on temperature measured by the emission pyrometer (39).

Description

TECHNICAL FIELD [0001] The present invention relates to a drying apparatus, a coating film forming system, a drying method, and a coating film forming method,

The present invention relates to a technique for drying a coating liquid on a slurry.

Patent Document 1 discloses that, at a plurality of points, the temperature of a coating film on a substrate is measured by a temperature measuring section composed of a radiation thermometer or thermography. It is also disclosed that the drying strength by the drying nozzle on the downstream side is made larger than the drying strength of the drying nozzle on the upstream side based on the measurement results of the respective temperature measuring portions.

In addition, in Patent Document 2, in order to increase the adhesion of a coating film to a substrate, the base material is heated from the base material side of the side not coated with the coating film by heating means, and the surface of the coating film is cooled And cooling it by means of means. The correlation between the pressing force at the time of peeling the coating film from the substrate and the temperature difference between the substrate surface temperature and the surface temperature is described.

Japanese Laid-Open Patent Publication No. 2013-108648 Japanese Laid-Open Patent Publication No. 2014-173803

In the case of the radiation thermometer or thermography used in Patent Document 1, the surface temperature of the coating film in the drying process is measured by setting the emissivity of the coating film to a predetermined value. However, since the emissivity of the coating film during the drying treatment is fluctuated by the evaporation of the solvent or the like, the set value of the emissivity in the thermometer may be significantly different from the actual emissivity. For this reason, the surface temperature of the coating film can not be accurately measured, and there is a fear that the temperature control is erroneously performed. In the drying apparatus described in Patent Document 1, the measurement result is used to control the drying nozzle on the downstream side. For this reason, there is a possibility that the drying nozzle on the upstream side continues to perform an improper drying process.

In Patent Document 2, it is not clear how to measure the temperature of each portion of the substrate. Patent Document 2 does not disclose the technical idea of controlling the heating means (or the cooling means) based on the measurement results of the temperatures of the respective portions as in Patent Document 1.

It is an object of the present invention to provide a technique for preferably controlling a drying strength for drying a coating liquid on a slurry coated on a substrate.

In order to solve the above-described problems, the first aspect is characterized in that at least one of the two main surfaces of the main surface of the substrate which is fed from the first roll and continuously transported by the transporting mechanism wound by the second roll, A drying unit for drying the coating liquid on the slurry coated on the substrate, the drying unit comprising: a heating unit for heating the coating liquid coated on the base material; And a control unit for controlling the intensity of the heating process based on the temperature measured by the radiation thermometer.

The second aspect is the drying apparatus according to the first aspect, wherein the radiation temperature gauge is a nonporous region in which the coating liquid is not coated, or a coating film on which a coating film of the dried coating liquid is formed The temperature is measured at the formation site.

A third aspect of the present invention is the drying apparatus according to the first or second aspect further comprising a casing portion having an inlet for the substrate to enter therein and a discharge port for the substrate to be withdrawn from the inside thereof, And the heating section and the radiation thermometer are housed in the casing section.

The fourth aspect is the drying apparatus according to any one of the first to third aspects, wherein when the temperature of the emissivity constant area measured by the radiation thermometer is lower than the target temperature, The intensity of the heat treatment by the heating unit is made weak and the intensity of the heat treatment by the heating unit is weakened when the temperature of the emissivity constant area is higher than the target temperature.

The fifth aspect is the drying apparatus according to the fourth aspect, wherein the heating section has a hot air supply section for heating the coating liquid by spraying hot air having a temperature higher than the target temperature on the substrate.

The sixth aspect is the drying apparatus according to any one of the first to fifth aspects, wherein at least one set of the heating section and the radiation thermometer are arranged along the conveyance path of the substrate.

A seventh aspect is the drying apparatus according to any one of the first to sixth aspects, further comprising a support roller disposed downstream of the heating section and supporting the other main surface of the base material , And the radiation thermometer measures the temperature of the emissivity constant at a position between the heating part and the supporting roller.

According to an eighth aspect of the present invention, there is provided a drying apparatus according to any one of the first to seventh aspects, further comprising: a plurality of support rollers arranged at different heights; And the substrate is supported so as to be convex on one main surface side.

The ninth aspect is the drying apparatus according to any one of the first to eighth aspects, wherein when the temperature of the emissivity constant area measured by the radiation thermometer exceeds a prescribed reference temperature, And a notification unit.

The tenth aspect is a coating film forming system for forming a coating film on a substrate, comprising: a transport mechanism for continuously transporting the substrate by winding a substrate fed from the first roller with a second roller; And a drying device according to any one of the first to ninth aspects. The drying device according to any one of the first to ninth aspects of the present invention comprises:

The 11th aspect is a drying method for drying a slurry-like coating liquid coated on at least one main surface of two main surfaces of a base material continuously fed by being wound in a second roll while being fed from a first roll, ) A heating step of heating the coating liquid coated on the base material; (b) a temperature of the emissivity constant area where the emissivity is not changed by the heat treatment among the substrates heated in the heating step, by a radiation thermometer (C) a control step of controlling the intensity of the heat treatment based on the temperature measured by the radiation thermometer.

A twelfth aspect is a coating film forming method for forming a coating film on a substrate, comprising the steps of: (A) a transporting step of continuously transporting a substrate by winding a substrate fed from a first roller with a second roller; (B) (C) a heating step of applying heat treatment to the coating liquid coated on the base material; (D) a heating step of heating the coating liquid applied on the base material A temperature measuring step of measuring the temperature of the emissivity constant area where the emissivity is not changed by the heating process with the radiation thermometer among the substrates heated in the process; and (E) And a control step of controlling the intensity of the light.

According to the drying apparatuses related to the first to tenth aspects, the temperature of the portion of the substrate where the emissivity is unchanged is measured with a radiation thermometer, whereby the temperature of the coating solution in the drying treatment can be specified with high accuracy in a noncontact manner. Further, by controlling the intensity of the heat treatment performed on the upstream side of the temperature measurement site based on the measured temperature, the drying treatment can be performed more favorably.

According to the second aspect, the non-porous region or the coating film formation site is a point where the emissivity is not changed by the heat treatment. Therefore, by measuring the temperature of these portions with a radiation thermometer, the temperature of the coating liquid to be dried can be specified with high accuracy in a noncontact manner.

According to the third aspect, heating can be performed in a state in which the outside air is blocked by the casing portion. Therefore, the drying treatment can be performed efficiently.

According to the fourth aspect, the strength of the heat treatment for heating the coating liquid on the slurry can be appropriately controlled.

According to the fifth aspect, the temperature of the coating liquid can be quickly brought close to the target temperature by jetting hot air at a temperature higher than the target temperature.

According to the sixth aspect, the control unit controls one or more heating units located on the upstream side of one or more radiation thermometers based on the measurement result of one or more radiation thermometers, thereby achieving a preferable heating process at one or a plurality of points .

According to the seventh aspect, the temperature can be measured by the radiation thermometer before the temperature of the emissivity constant area is changed by the support roller. Therefore, the heating unit can be more appropriately controlled.

According to the eighth aspect, the substrate can be bent and conveyed in a convex shape, so that the conveying distance can be made longer without changing the straight line distance. Thus, a longer drying time can be secured.

According to the ninth aspect, by informing the outside that the coating liquid has reached the abnormal temperature, it is possible to quickly cope with the abnormal situation.

According to the coating film forming system related to the tenth aspect, the temperature of the coating solution in the drying treatment can be specified with high accuracy by measuring the temperature of the site where the emissivity is unchanged in the substrate with a radiation thermometer. Further, by controlling the intensity of the heat treatment performed on the upstream side of the temperature measurement site based on the measured temperature, the drying treatment can be performed more favorably.

According to the drying method according to the eleventh aspect, the temperature of the portion of the substrate where the emissivity is unchanged is measured with a radiation thermometer, whereby the temperature of the coating solution in the drying treatment can be specified with high accuracy in a noncontact manner. Further, by controlling the intensity of the heat treatment performed on the upstream side of the temperature measurement site based on the measured temperature, the drying treatment can be performed more favorably.

According to the coating film forming method related to the twelfth aspect, the temperature of the coating liquid in the drying treatment can be specified with high accuracy by measuring the temperature of the site where the emissivity is unchanged in the base material with a radiation thermometer. Further, by controlling the intensity of the heat treatment performed on the upstream side of the temperature measurement site based on the measured temperature, the drying treatment can be performed more favorably.

BRIEF DESCRIPTION OF DRAWINGS FIG. 1 is a schematic structural view showing a coating film forming system provided with a drying apparatus according to an embodiment; FIG.
2 is a schematic side view of a drying apparatus according to the embodiment.
Fig. 3 is a block diagram showing the connection relationship between the control section related to the embodiment and the other constitution of the coating film forming system. Fig.
Fig. 4 is a schematic plan view showing the other main surface of the substrate conveyed in the drying apparatus according to the embodiment. Fig.
5 is a schematic plan view showing a main surface on one side of a substrate conveyed in the drying apparatus according to the embodiment.

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In addition, the constituent elements described in this embodiment are merely examples, and the scope of the present invention is not limited to them. In the drawings, for the sake of easy understanding, the dimensions and the numbers of the respective parts may be exaggerated or simplified as necessary.

<1. Embodiment>

1 is a schematic structural view showing a coating film forming system 1 including drying apparatuses 3A and 3B according to the embodiment.

This coating film forming system 1 is a system in which a base material 5, which is a long metal foil, is continuously transported in a roll-to-roll manner, and on both sides of the base material 5, . Then, by performing the drying treatment of the coating liquid, the electrode of the lithium ion secondary battery is manufactured.

The coating film forming system 1 includes coating units 10A and 10B, drying apparatuses 3A and 3B, a transport mechanism 60 and a control unit 7. The control unit 7 is configured to control the entire system.

The transport mechanism 60 includes a delivery roller 61 (first roller), a winding roller 62 (second roller), and a plurality of auxiliary rollers 63. The elongated base material 5 is wound by a winding roller 62 while being guided by a plurality of sub-rollers 63 out of the delivery roller 61. A plurality of auxiliary rollers (63) are disposed at appropriate positions on the conveying path of the substrate (5) continuously conveyed. The elongated base material 5 is continuously conveyed in a roll-to-roll manner in the order of the coated portion 10A, the drying device 3A, the coated portion 10B and the drying device 3B. In the following description, the direction in which the substrate 5 is transported by the transport mechanism 60 (the direction indicated by the arrow DR1) is referred to as &quot; transport direction &quot;. Further, the carrying direction is not limited to one fixed direction. In the example shown in Fig. 1, the conveying direction of the base material 5 is suitably changed by a plurality of auxiliary rollers 63. Fig. The number and position of the auxiliary rollers 63 are not limited to those shown in Fig. 1, but can be suitably increased or decreased as necessary. The step of continuously transporting the base material 5 in the carrying direction is an example of a conveying step in the method of forming a coating film 43 on the base material 5.

The coated portions 10A and 10B are configured to coat a coating liquid in a slurry form on the front and back surfaces of the substrate 5 conveyed by the conveying mechanism 60. [ The coated portion 10A is provided with a nozzle 11A for discharging the coating liquid toward one main surface 51 of the two main surfaces of the front and back surfaces of the base material 5. The coated portion 10B has a non- And a nozzle 11B for discharging the coating liquid toward the nozzle 53. Each of the nozzles 11A and 11B is a slit nozzle having a slit-shaped ejection opening extending in the width direction of the substrate 5 (direction parallel to the surface of the substrate 5 and perpendicular to the conveying direction) Consists of.

A predetermined coating liquid is fed to the nozzles 11A and 11B by a liquid delivery mechanism (not shown). The coating liquids ejected by the nozzles 11A and 11B are the same, but they may be of different kinds.

The nozzles 11A and 11B are provided with a shim and a manifold for defining a flow path connected to a discharge port on the slit. The nozzles 11A and 11B are provided with a mechanism (not shown) for adjusting the positions and postures thereof. The coating liquid fed to the nozzles 11A and 11B from the liquid supply mechanism is discharged onto the surface of the substrate 5 from the discharge port of the slit.

The step of coating the coating liquid on the main surface of the substrate 5 by the coating portions 10A and 10B is an example of the coating process in the coating film forming method.

The drying apparatuses 3A and 3B subject the substrate 5, which is continuously conveyed by the conveying mechanism 60 in the predetermined conveying direction, to a drying process.

The drying apparatus 3A is formed on the downstream side of the coated portion 10A. The drying device 3A dries the coating liquid 41 on the slurry on the one main surface 51 of the base material 5 by the coating portion 10A. Thereby, the coating film 43 is formed on the one-sided main surface 51. The drying apparatus 3B is formed on the downstream side of the coated portion 10B. The drying device 3B dries the slurry-like coating liquid 41 coated on the other main surface 53 of the substrate 5 by the coating portion 10B. Thereby, the coating film 43 is formed on the other main surface 53. The construction of the drying apparatuses 3A and 3B is almost the same, and hence the construction of the drying apparatus 3A will be mainly described below.

Fig. 2 is a schematic side view of the drying apparatus 3A according to the embodiment. Fig. The drying apparatus 3A is provided with a plurality of drying processing sections 31. [ In this example, the drying apparatus 3A is composed of three drying processing units 31, but may be composed of a single drying processing unit or two or four or more drying processing units. In the following description, when three drying processing sections 31 are to be distinguished, the drying processing sections 31a, 31b and 31c are arranged in order from the upstream side in the carrying direction.

2, each drying processing section 31 is provided with a casing section 32, a supporting roller 33, a coating surface side heating section 35, a back side heating section 37 and a radiation thermometer 39 . In Fig. 2, each casing portion 32 is shown in a sectional view.

The casing portion 32 is a member for forming a space for accommodating the base material 5 therein and has an entry port 321 for entering the base material 5 and an exit port 321 for withdrawing the base material 5 from the inside, (323). A supporting roller 33, a coating surface side heating portion 35, a back side heating portion 37 and a radiation thermometer 39 are provided inside each casing portion 32. [ Each of the drying processing sections 31 heats the coating liquid 41 on the slurry by the heating section 35 on the coating surface side and the heating section 37 on the back surface side while the outside air is blocked by the casing section 32. Therefore, the drying treatment can be performed efficiently.

The exit port 323 and the entry port 321 of the two adjacent casing sections 32 and 32 are connected by a connection section 325. [ In this example, the three casing portions 32 are connected to each other, thereby forming one accommodating space for accommodating the base material 5. [ However, the connecting portion 325 may be omitted, and each of the casing portions 32 may be separate from each other.

The support roller 33 extends in the width direction of the base material 5 and supports the base material 5 by contacting the outer peripheral surface of the base material 5 with the base material 5. Each of the support rollers 33 of the drying apparatus 3A is arranged so as to be in contact with the main surface on the side where the coating liquid on the slurry is not coated (the main surface 53 on the other side in the drying apparatus 3A).

One support roller 33 is disposed in each of the casing portions 32. The supporting rollers 33 are arranged at different heights. More specifically, the support roller 33 of the central drying processing section 31b is disposed at a higher position than the other two support rollers 33. [ 2, in the drying apparatus 3A, the base material 5 is formed into a convex shape (in the case of the drying apparatus 3A, the one-sided main surface 51) Phase) and transported.

As described above, by conveying the base material 5 in a convex shape, the conveying distance of the base material 5 can be increased without changing the straight line distance. Therefore, a longer drying time can be secured in the drying apparatus 3A.

1, the supporting roller 33 of the drying processing section 31a is disposed at a position higher than the auxiliary roller 63 immediately before the entry opening 321. In this case, The support roller 33 of the drying processing section 31c is disposed at a higher position than the auxiliary roller 63 immediately behind the ejection port 323. [ For this reason, the support rollers 33 are brought into contact with the base material 5 at a holding angle (?). On the other hand, as shown in Fig. 2, the angle of attack (theta) is the angle of the support rollers 33 around the rotation axis of the contact surface contacting with the substrate 5. [

<Heating section>

The coating surface side heating section 35 is provided with a plurality of heating elements 35 for heating the coating liquid 41 by supplying hot air to the main surface of the coating liquid 41 coated side (the one main surface 51 in the drying device 3A) And a hot air supply unit. The back side heating section 37 supplies hot air to the main surface (on the other main surface 53 in the drying apparatus 3A) opposite to the main surface on the side coated with the coating liquid 41, ) To heat the coating liquid 41 indirectly by heating the coating liquid 41. As shown in FIG.

The coating surface side heating portion 35 and the back side heating portion 37 may be configured to perform infrared heating, induction heating, and steam heating instead of supplying hot air.

In the following description, when the coating surface side heating portion 35 and the back side heating portion 37 are not distinguished from each other, they are simply referred to as &quot; heating portion &quot;. The step of heat-treating the coating liquid 41 by the heating unit is an example of a heating step in the coating film forming method.

Here, it is assumed that the coating liquid 41 is PVDF (polyvinylidene fluoride) as the binder resin of the lithium ion battery negative electrode material. In this case, it is not preferable that the temperature of the coating liquid 41 on the base material 5 does not exceed the refreezing temperature of 135 deg., Which is the PVDF temperature, because it causes segregation and the like. Therefore, it is preferable to heat the coating liquid 41 by controlling each heating unit so that the coating liquid 41 on the slurry becomes a predetermined temperature not exceeding the limit temperature. Hereinafter, a predetermined temperature not exceeding the limit temperature is referred to as a target temperature.

The drying treatment section 31a is an area for raising the temperature of the coating liquid 41 on the slurry on the substrate 5. [ Therefore, the heating section of the drying processing section 31a may be configured to supply hot air at a temperature exceeding the target temperature. For example, when the coating liquid 41 containing PVDF is coated on the base material 5, the coating surface side heating portion 35 applies hot air of 135 degrees or more (for example, 200 degrees) The coating liquid 41 may be supplied to the coating liquid 41 on the substrate. This makes it possible to rapidly bring the coating liquid 41 on the base material 5 to the target temperature. The back side heating section 37 may also be supplied with hot air at a temperature exceeding the limit temperature.

The heating section of each of the drying processing sections 31b and 31c supplies hot air at a temperature lower than the temperature of hot air supplied from the heating section in the drying processing section 31a to the coating liquid 41 of the base material 5. [ For example, the coating surface side heating section 35 of each of the drying processing sections 31b and 31c may be configured to supply hot air at the same temperature as the target temperature. When the temperature of the coating liquid 41 can not be sufficiently raised to the target temperature in the drying processing section 31a, for example, even in the drying processing section 31b, hot air exceeding the target temperature is supplied . The same applies to the back surface side heating portion 37 of each of the drying processing portions 31b and 31c.

The radiation thermometer 39 is constituted by an infrared radiation thermometer for detecting infrared rays. The radiation thermometer 39 measures the temperature of the specific portion of the substrate 5 in a non-contact manner at a position on the downstream side of the heating portion in the transport direction. More specifically, the radiation thermometer 39 measures the temperature at the portion where the emissivity does not vary (emissivity constant portion) by the heat treatment of the heating portion. Details of this emissivity constant area will be described later. The step of measuring the temperature of the emissivity constant area by the radiation thermometer 39 is an example of the temperature measuring step in the film forming method.

The radiation thermometer 39 has a function of controlling the position of the heating part (more specifically, the area where hot air is supplied from the coating-surface-side heating part 35 and the back-side heating part 37 in the base material 5) The temperature of the emissivity constant portion of the base material 5 is measured at a position between positions where the base material 5 and the base material 5 support the base material 5. Therefore, the radiation temperature gauge 39 can measure the temperature before the temperature of the coating liquid 41 is changed by the supporting roller 33. Therefore, the temperature of the coating liquid 41 heated by the heating unit can be more accurately specified.

Fig. 3 is a block diagram showing the connection relationship between the control section 7 related to the embodiment and the other constitution of the film forming system 1. Fig. The control unit 7 is configured as a general computer in which the CPU 71, the ROM 72, the RAM 73 and the storage device 74 are interconnected via a bus line 75, for example. The ROM 72 stores basic programs and the like. The RAM 73 provides a work area used by the CPU 71 to perform predetermined processing.

The storage device 74 is constituted by a nonvolatile memory such as a flash memory or a hard disk. The program PG1 is installed in the storage device 74. [ The CPU 71 operates in accordance with the order described in the program PG1 so that the CPU 71 functions as the heating control unit 711, for example.

The program PG1 is typically stored in advance in a memory such as the storage device 74 and may be stored in a form (program product) recorded on a recording medium such as a CD-ROM, a DVD-ROM, or an external flash memory (Or provided by downloading from an external server via a network, or the like), and may be additionally or interchangeably stored in a memory such as the storage device 74. The function module realized by the control unit 7 may be realized by hardware using a dedicated logic circuit or the like.

An operation input section 76 and a display section 77 are connected to the control section 7 via a bus line 75. [ The operation input unit 76 is an input device composed of, for example, a keyboard and a mouse, and accepts various operations from the operator (operations such as input of commands and various data). The operation input section 76 may be constituted by various switches, a touch panel, and the like. The display unit 77 is a display device composed of a display or a lamp and displays various information under the control of the CPU 71. [

The coating unit side heating unit 35, the back surface side heating unit 37 and the respective radiation thermometer 39 formed in the drying apparatuses 3A and 3B are connected to the control unit 7 via the bus line 75 Respectively.

Each radiation thermometer 39 transmits temperature information indicating the measured temperature to the control unit 7. [ The heating control unit 711 of the control unit 7 then controls the heating unit (the heating unit 35 on the coated surface side and the heating unit on the back surface side 37 ) Controls the intensity of the heat treatment to be performed. For example, the heating control unit 711 controls the intensity of the heating process by the heating unit of the drying process unit 31a based on the temperature measured by the radiation thermometer 39 of the drying process unit 31a. Similarly, the heating control section 711 controls the intensity of the heating process performed by the heating section of the drying processing sections 31b and 31c, respectively, based on the temperatures measured by the radiation thermometer 39 of the drying processing sections 31b and 31c . The heating control section 711 not only controls the heating section of the drying section 31b but also the drying section 31a of the upstream side on the basis of the temperature measured by the radiation thermometer 39 of the drying section 31b The heating unit may also be controlled.

Thus, in each of the drying apparatuses 3A and 3B, three sets of the heating unit and the radiation thermometer 39 are formed. A plurality of sets of the heating section and the radiation thermometer 39 are formed and the respective heating sections are controlled on the basis of the measurement results of the respective radiation thermometers 39 so that the respective heating processing sections 31 can perform the desired heat treatment.

The control of the intensity of the heat treatment means to increase or decrease the amount of heat given by the heating section to the object to be heated based on the measurement result of the radiation thermometer 39. [ For example, in the case of the coating surface side heating section 35, the temperature of the hot air to be supplied to the coating liquid 41 is raised or lowered, or the amount of hot air to be supplied is increased or decreased.

If the temperature measured by the specific radiation thermometer 39 is lower than the specified target temperature, the heating control unit 711 increases the intensity of the heat treatment by the heating unit on the upstream side in the carrying direction of the specific radiation thermometer 39 do. When the temperature measured by the specific radiation thermometer 39 is higher than the specified target temperature, the heating control unit 711 weakens the intensity of the heat treatment by the heating unit on the upstream side in the carrying direction of the specific radiation thermometer 39 do. By such control, the strength of the heat treatment in each part can be preferably controlled. The target temperature serving as a reference for this control may be different for each radiation thermometer 39, or may be the same.

The heating control unit 711 may be configured to control only the coated surface side heating unit 35 or only the back side heating unit 37 among the heating units. The heating control unit 711 may be configured to control only a part of the plurality of hot air supply units constituting the heating unit 35 or the backside heating unit 37. [

As described above, the heating control section 711 of the control section 7 controls the intensity of the heating process by the heating section based on the temperature measured by the radiation thermometer 39, Is an example of a process.

The control unit 7 is connected to a notifying unit 78 via a bus line 75. When the temperature of the base material 5 measured by each radiation thermometer 39 exceeds a prescribed reference temperature, the warning portion 78 displays a warning To the outside. The specified reference temperature is, for example, a temperature exceeding the target temperature or a temperature exceeding the limit temperature. By forming the notch portion 78 in this way, when the coating liquid 41 becomes an abnormal temperature, it is notified to the operator that it is possible to quickly cope with the abnormal situation. Further, the display section 77 may function as a notifying section.

&Lt; About temperature measurement part &gt;

Next, the temperature measurement part of the substrate 5 in which the radiation thermometer 39 measures the temperature will be described.

First, the temperature measuring part in the drying apparatus 3A will be described. 1 and 2, each radiation thermometer 39 attached to the drying device 3A is configured to measure the surface temperature of the other main surface 53 of the base material 5 .

4 is a schematic plan view showing the other main surface 53 of the base material 5 carried by the drying apparatus 3A according to the embodiment. A slurry-like coating liquid 41 is coated on one main surface 51 of the base material 5 passing through the drying apparatus 3A on the opposite side of the other main surface 53. In the illustrated example, the coating liquid 41 is applied to the inner region of the one main surface 51 except for both ends in the width direction. On the other hand, the main surface 53 on the other side of the substrate 5 is a non-porous portion on which the coating liquid 41 is not applied unlike the one main surface 51 on the opposite side.

The solvent in the coating liquid 41 on the slurry is evaporated by the heat treatment of the coating surface side heating portion 35 or the back surface side heating portion 37. Therefore, the emissivity of the surface of the coating liquid 41 can be greatly changed. On the other hand, since the other main surface 53 is a non-porous region, fluctuations of the emissivity due to heat treatment do not occur well. The fluctuation of the emissivity of the non-porous region by the heat treatment is smaller than the fluctuation of the emissivity of the surface of the coating liquid 41 at least by heat treatment. Since the substrate 5 is a relatively thin member such as a metal foil, the surface temperature of the other main surface 53 can be regarded as the temperature of the coating liquid 41 in the drying process.

From the above viewpoint, the specific portion of the other main surface 53 is the emissivity constant area 531, and the temperature of the emissivity constant area 531 is measured by the radiation thermometer 39. [ Thereby, the temperature of the coating liquid 41 on the one main surface 51 of the base material 5 can be specified with high accuracy in a noncontact manner. The emissivity of the emissivity constant area 531 (that is, the emissivity of the substrate 5 itself) can be measured by, for example, measuring the temperature at the site by a thermocouple or estimating from the material of the substrate 5 It is possible to specify by one.

Next, the temperature measuring part in the drying device 3B will be described. As shown in Fig. 1, each radiation thermometer 39 attached to the drying apparatus 3B is configured to measure the surface temperature of the main surface 51 on one side of the base material 5. Fig.

Fig. 5 is a schematic plan view showing one main surface 51 of the base material 5 conveyed by the drying apparatus 3B according to the embodiment. Fig. The drying device 3B dries the coating liquid 41 coated on the other main surface 53 of the base material 5. The one surface side main surface 51 of the base material 5 passing through the drying device 3B , And a thin film (coating film 43) of the coating liquid 41 after drying treatment with the drying apparatus 3A is formed.

In the one main surface 51 of the substrate 5, both end portions on which the coating film 43 is not formed are nonporous portions in which the coating liquid 41 is not coated, and the emissivity is hardly changed Region. Thus, one portion of both ends of the base material 5 becomes the emissivity constant portion 511, and the temperature of the emissivity constant portion 511 is measured by each radiation thermometer 39. [ Thereby, the temperature of the coating liquid 41 coated on the other main surface 53 can be specified with high accuracy in a noncontact manner.

The coating film forming portion on which the coating film 43 is formed is a solid portion in which the solvent of the coating liquid 41 has already evaporated. Therefore, the coating film forming portion is a portion where the emissivity does not fluctuate easily. Therefore, the portion where the coating film 43 is formed may be the emissivity constant portion 513, and the temperature of the emissivity constant portion 513 may be measured by each radiation thermometer 39. The emissivity of the emissivity constant area 513 of the coating film 43 can be specified by, for example, observing the site with a thermocouple, or estimating from the components of the coating liquid 41 or the like. By measuring the temperature of the emissivity constant portion 513, the temperature of the coating liquid 41 coated on the other main surface 53 can be specified with high accuracy in a noncontact manner.

<2. Modifications>

Although the embodiment has been described above, the present invention is not limited to the above-described embodiment, and various modifications are possible.

For example, in the above embodiment, each of the drying processing sections 31 is provided with a heating section 35 as a heating surface and a heating section 37 as a back surface heating section. However, only one side may be formed.

In the drying apparatuses 3A and 3B according to the above-described embodiment, the substrate 5 is convexly bent and conveyed by changing the height at which the support rollers 33 are disposed. However, by arranging the support rollers 33 at the same height, the substrate 5 may be transported in a flat state.

The heating control unit 711 may control not only the heating unit on the upstream side in the conveying direction but also the heating unit on the downstream side in the conveying direction based on the temperature measured by each radiation thermometer 39.

In the coating film forming system 1 according to the above embodiment, a coating film 43 is formed on both principal surfaces of the base material 5. However, the present invention is also effective in a coating film forming system in which the coating film 43 is formed only on one principal surface.

The scope of application of the present invention is not limited to the manufacture of electrodes for lithium ion batteries, but can also be applied to the manufacture of other electrodes for batteries.

The configurations described in each of the above-described embodiments and modified examples can be appropriately combined or omitted as long as they do not contradict each other.

While the invention has been described in detail, the foregoing description is exemplary in all respects, and the invention is not limited thereto. It is understood that numerous modifications that are not illustrated can be made without departing from the scope of the present invention.

1: Coating system
10A and 10B:
3A, 3B: Drying device
31:
32:
321: Entry
323: Exit Area
325:
33: Support roller
35: Porous surface side heating part
37: back side heating part
39: Radiation thermometer
41: coating liquid
43:
5: substrate
51: One side surface
53: the other side surface
511, 513, 531: Emissivity constant area
60:
61: Feed roller (first roller)
62: take-up roller (second roller)
7:
71: CPU
711: Heating control unit
78: Notification section

Claims (12)

A drying apparatus for drying a slurry-like coating liquid coated on at least one major surface of two main surfaces of a substrate fed from a first roll and continuously transported by a transport mechanism wound with a second roll,
A heating unit for applying heat treatment to the coating liquid coated on the substrate;
A radiation thermometer for measuring the temperature of the emissivity constant area where the emissivity is not changed by the heat treatment in the base material at a location on the downstream side of the heating part in the transport direction,
And a control unit for controlling the intensity of the heating process based on the temperature measured by the radiation thermometer. The method according to claim 1,
Wherein the radiation thermometer measures a temperature at a non-porous region in the substrate where the coating liquid is not coated, or at a coating film formation region where a coating film of the dried coating liquid is formed. 3. The method according to claim 1 or 2,
Further comprising a casing portion having an entry port for the substrate to enter therein and an exit port for the substrate to exit from the inside,
Wherein the heating section and the radiation thermometer are housed in the casing section. 3. The method according to claim 1 or 2,
Wherein the control unit increases the intensity of the heat treatment by the heating unit when the temperature of the emissivity constant area measured by the radiation thermometer is lower than the target temperature and the temperature of the emissivity constant area is higher than the target temperature And the strength of the heat treatment by the heating unit is weakened when the temperature is high. 5. The method of claim 4,
The heating unit,
And a hot air supply unit for heating the coating liquid by spraying hot air having a temperature higher than the target temperature on the substrate. 3. The method according to claim 1 or 2,
Wherein at least one set of the heating section and the radiation thermometer are arranged along the conveyance path of the substrate. 3. The method according to claim 1 or 2,
Further comprising a support roller disposed on the downstream side of the heating section and supporting the other main surface of the substrate,
Wherein the radiation thermometer measures the temperature of the emissivity constant at a position between the heating part and the supporting roller. 3. The method according to claim 1 or 2,
Further comprising a plurality of support rollers arranged at different heights,
Wherein the plurality of support rollers support the substrate so that the substrate is convex on the one main surface side. 3. The method according to claim 1 or 2,
Further comprising a notifying unit for notifying the outside when the temperature of the emissivity constant area measured by the radiation thermometer exceeds a prescribed reference temperature. A coating film forming system for forming a coating film on a substrate,
A transport mechanism for continuously transporting the substrate by winding a substrate fed from the first roller with a second roller,
A coating portion for applying a slurry-like coating liquid to at least one main surface of the two main surfaces of the substrate conveyed by the conveying mechanism;
A coating film forming system comprising the drying device according to claim 1 or 2. A drying method for drying a slurry-like coating liquid coated on at least one main surface of two main surfaces of a base material continuously fed by being wound in a second roll while being discharged from a first roll,
(a) a heating step of heat-treating the coating liquid coated on the substrate;
(b) a temperature measuring step of measuring the temperature of the emissivity constant area where the emissivity is not changed by the heat treatment among the substrates heated in the heating step;
(c) a control step of controlling the intensity of the heat treatment based on the temperature measured by the radiation thermometer. A coating film forming method for forming a coating film on a substrate,
(A) a conveying step of continuously conveying a substrate by winding a substrate fed from a first roller with a second roller; and
(B) a coating step of coating a slurry-like coating liquid on at least one of the two main surfaces of the base material continuously conveyed in the conveying step,
(C) a heating step of heat-treating the coating liquid coated on the substrate,
(D) a temperature measuring step of measuring the temperature of the emissivity constant area where the emissivity does not fluctuate by the heat treatment among the substrates heated in the heating step;
(E) a control step of controlling the intensity of the heat treatment based on the temperature measured by the radiation thermometer.

Images