KR20160071326A - Fluid control valve - Google Patents

Abstract

Provided is a fluid control valve capable of preventing the abrasion of a valve structure due to the deformation thereof generated when closing the valve and reducing particles. The fluid control valve includes a driving unit (3); a valve body (21) including a first port (21a), a second port (21b), and a valve sheet (24); and the valve structure (4) formed into a column form and connected to the driving unit (3). The valve structure (4) includes ring-shaped protrusions (414) protruding from an end (411) of the valve sheet and including a ring-shaped seal unit (414a) sealing by being compressed to the valve sheet (24) in a front end. At least, the ring-shaped sealing protrusions are a fluoride resin. The valve structure (4) is characterized by a fact that the displacement of the ring-shaped seal unit (414a) displaced in a diameter direction is 6.175 μm or less when the ring-shaped seal unit (414a) is compressed to the valve sheet (24) by the driving unit (3).

Description

[0001] FLUID CONTROL VALVE [0002]

The present invention relates to a fluid control valve for controlling a fluid.

For example, in a semiconductor manufacturing apparatus, a fluid control valve that controls fluid by contacting or separating a valve body with a valve seat is used. Fluid control valves of this kind are made of a resin, such as valve bodies, valve seats, etc., in order to ensure corrosion resistance. If particles are contained in the chemical liquid, the yield of the product is lowered. Therefore, in the conventional fluid control valve, the heating member is separated from the valve seat surface after pressing the flat contact surface of the heating member against the valve seat surface of the valve seat in contact with the valve body, And the particles are prevented from being generated (see, for example, Patent Document 1).

Japanese Patent Application Laid-Open No. 2011-122718

The countermeasure against particles in the conventional fluid control valve can reduce the influence on the conventional semiconductor manufacturing. However, the semiconductor device is miniaturized every year, and accordingly, the particles affecting semiconductor manufacturing are miniaturized. As semiconductor devices become finer, it is necessary to reduce finer particles. For example, particles of 20 nm that can be measured with commercially available particle counters are a problem.

An object of the present invention is to provide a fluid control valve capable of suppressing abrasion due to deformation of a valve body generated at the time of valve closing and reducing generation of particles.

One aspect of the present invention has the following configuration.

(1) A valve device comprising: a driving part; a valve body having a first port, a second port and a valve seat; a valve body formed in a columnar shape and connected to the driving part; And an annular seal protrusion which is annularly projected on an end face of the seat and which is pressed against the valve seat to seal the annular seal protrusion, the annular seal protrusion being provided at the distal end portion, at least the annular seal protrusion is made of fluororesin, Wherein the annular seal portion is displaced in the radial direction when the annular seal portion is pressed against the valve seat, the amount of displacement being 6.175 占 퐉 or less.

(2) a valve body having a first port, a second port, and a valve seat, and a valve body formed in a columnar shape and connected to the driving portion; and the valve body includes a valve And an annular seal protrusion which is annularly projected on an end face of the seat and which is pressed against the valve seat to seal the annular seal protrusion, the annular seal protrusion being provided on the distal end portion, and at least the annular seal protrusion is made of fluororesin, The amount of displacement in which the annular seal portion is displaced in the radial direction when the annular seal portion is pressed against the valve seat is 12.4 x ^10-4 times or less with respect to the diameter of the annular seal portion when the annular seal portion is not in contact with the valve seat As shown in FIG.

Here, the " diameter of the annular seal portion when not in contact with the valve seat " refers to the diameter of the radial center position of the annular seal portion that is not in contact with the valve seat when the annular seal portion is formed as a flat surface. When the annular seal portion has an R shape, it refers to the diameter of the apex portion of the annular seal portion that is not in contact with the valve seat.

(3) a valve body having a first port, a second port, and a valve seat, and a valve body formed in a columnar shape and connected to the driving portion, wherein the valve body has a valve Wherein the valve seat has an annular seal protrusion which is annularly projected on an end face of the seat and which is pressed against the valve seat to seal the annular seal protrusion, the annular seal protrusion being provided on the distal end portion, wherein at least the annular seal protrusion is made of fluororesin, Is 1.3 times or more of the diameter of the annular seal portion when the valve seat is not in contact with the valve seat.

Here, the " diameter of the annular seal portion when not in contact with the valve seat " refers to the diameter of the radial center position of the annular seal portion that is not in contact with the valve seat when the annular seal portion is formed as a flat surface. When the annular seal portion has an R shape, it refers to the diameter of the apex portion of the annular seal portion that is not in contact with the valve seat.

(4) In the configuration described in (1) or (2), it is preferable that the diameter of the end face on the valve seat side is 1.3 times or more of the diameter of the annular seal portion when the valve seat is not in contact with the valve seat.

Here, the " diameter of the annular seal portion when not in contact with the valve seat " refers to the diameter of the annular seal portion that is not in contact with the valve seat in the radial direction when the annular seal portion is formed as a flat surface . When the annular seal portion has an R shape, it refers to the diameter of the apex portion of the annular seal portion that is not in contact with the valve seat.

(5) In the configuration described in (4), it is preferable that the diameter of the thinnest portion of the valve body is smaller than the diameter of the annular seal portion.

(6) In the configuration described in (5), it is preferable that the thickness of the valve body in the axial direction at the radial center position of the annular seal portion is 0.7 times or more of the diameter of the annular seal portion.

(7) In the configuration described in (5), it is preferable that the valve element has a convex portion protruding from the valve seat-side end face in the direction of the valve seat inside the annular seal projection.

(8) In the configuration described in (6), it is preferable that the valve body has a convex portion protruding in the valve seat direction from the valve seat-side end face on the inside of the annular seal projection.

(9) In the configuration described in (7), it is preferable that the diameter of the proximal end connected to the valve seat-side end face is not less than the diameter of the thinnest portion of the valve body.

(10) In the configuration described in (8), it is preferable that the diameter of the proximal end connected to the valve seat side end face is not less than the diameter of the thinnest portion of the valve body.

(11) In the constitution described in any one of (1) to (3), it is preferable that the annular seal projection is formed of PFA.

(12) In the structure described in (3), it is preferable that the thickness of the valve body in the axial direction at the radial center position of the annular seal portion is 0.7 times or more of the diameter of the annular seal portion.

In the above-described configuration, when the drive portion contacts the valve seat with the annular seal portion of the valve element and further presses the annular seal portion against the valve seat, the amount of displacement in which the annular seal portion is displaced in the radial direction is suppressed. The amount of displacement is, for example 6.175㎛ or less, or is suppressed to less than 12.4 × 10 ^-4 times the diameter of the annular sealing portion when it is not in contact with the valve seat. Further, for example, when the annular seal portion is flat, the amount of displacement thereof is suppressed to 6.18 x 10 < ^-2 > or less of the width dimension of the annular seal portion when the annular seal portion is not in contact with the valve seat. As described above, when the amount of displacement of the annular seal portion is suppressed, the annular seal portion rubs against the valve seat and is less likely to be abraded, so that generation of particles affecting semiconductor manufacturing can be reduced. Further, by suppressing the abrasion due to the deformation of the valve body, the sealing performance is not lowered even if the valve opening / closing operation is repeated. Thereby, the durability of the fluid control valve is improved. Further, the necessary seal force can be reduced, and the drive unit can be made compact.

In the above configuration, since the diameter of the end face on the valve seat side is 1.3 times or more the diameter of the annular seal portion when the valve seat is not in contact with the valve seat, the stiffness near the valve seat side end face is high. Thereby, during the pressing operation of pressing the annular seal portion against the valve seat, the valve body side end face of the valve body is hard to be deformed. Therefore, the annular seal projection is hard to be deformed so as to displace the annular seal portion in the radial direction during the pressing operation, and wear of the annular seal portion can be suppressed. Therefore, according to the above configuration, generation of particles can be reduced by suppressing wear caused by deformation of the valve body that occurs at the time of valve closing.

In the above configuration, since the diameter of the thinnest portion of the valve body is smaller than the diameter of the annular seal portion, the valve seat side end face is pressed against the valve seat side on the inner side than the annular seal protrusion. However, in the fluid control valve, since the displacement amount in the radial direction of the annular seal face is suppressed, the wear of the annular seal face is reduced and the generation of particles can be reduced.

In the above configuration, since the thickness of the valve body in the axial direction at the radial center position of the annular seal portion is 0.7 times or more the diameter of the annular seal portion, deformation caused by the load from the drive portion And begins to disperse at spaced locations. As a result, deformation in the vertical direction is apt to occur near the valve seat-side end face. Therefore, in the above configuration, the annular seal portion is easily pressed perpendicularly to the valve seat, and the amount of displacement in which the annular seal portion is displaced in the radial direction can be suppressed.

In the above arrangement, since the valve body has the convex portion protruding in the valve seat direction from the valve seat side end face on the inside of the annular seal projection, the rigidity of the portion receiving the load from the driving portion is high, It is difficult to deform the inner side of the projection so as to protrude toward the valve seat side. Therefore, according to the above-described configuration, the annular seal projection is hard to warp along with the deformation of the valve seat-side end face, and the amount of displacement of the annular seal face can be suppressed.

In the above configuration, since the diameter of the proximal end connected to the valve seat-side end face of the convex portion is equal to or larger than the diameter of the thinnest portion of the valve element, the convex portion supports the entire load received from the drive portion, it's difficult. Therefore, according to the above configuration, deformation of the end surface on the valve seat side can be suppressed, and the amount of displacement of the annular seal surface can be reduced.

In the above configuration, since the annular seal protrusions are formed of PFA (tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer) having high hardness, deformation of the annular seal protrusions generated at the valve closing time is suppressed, And the occurrence of particles can be reduced.

According to the above configuration, it is possible to provide a fluid control valve capable of suppressing abrasion due to deformation of a valve body which occurs at the time of valve closing and reducing generation of particles.

1 is a sectional view of a fluid control valve according to a first embodiment of the present invention, showing a closed state.
2 is a sectional view of the valve body shown in Fig.
3 is a table showing setting conditions of Comparative Examples 1 to 3 and Examples 1 to 13;
4 is a sectional view showing a valve body of Embodiment 10. Fig.
5 is a sectional view showing a valve body of Embodiment 1. Fig.
6 is a sectional view showing a valve body of the second embodiment;
7 is a view showing a displacement amount analysis result of Comparative Example 1;
8 is a view showing a displacement amount analysis result of Comparative Example 2;
9 is a view showing a displacement amount analysis result of Comparative Example 3;
10 is a view showing a displacement amount analysis result of the first embodiment;
11 is a view showing a displacement amount analysis result of the second embodiment.
12 is a view showing a displacement amount analysis result of the third embodiment;
13 is a view showing a displacement amount analysis result of the fourth embodiment.
14 is a view showing a displacement amount analysis result of the fifth embodiment.
15 is a view showing a displacement amount analysis result of the sixth embodiment.
16 is a view showing a displacement amount analysis result of the seventh embodiment;
17 is a view showing a displacement amount analysis result of the eighth embodiment;
18 is a view showing a displacement amount analysis result of the embodiment 9. Fig.
19 is a view showing a displacement amount analysis result of the tenth embodiment;
20 is a view showing a displacement amount analysis result of the eleventh embodiment.
21 is a view showing a displacement amount analysis result of the twelfth embodiment;
22 is a view showing a displacement amount analysis result of the thirteenth embodiment;
23 is a graph showing the relationship between the amount of displacement of the annular seal surface in Comparative Examples 1 to 3 and Examples 1 to 13 and the amount of displacement of the annular seal surface of Example 10 in Comparative Examples 1 to 3 and Example A table showing the ratio of the amount of displacement of the annular seal face of 1 to 13 and the ratio of the amount of displacement of the annular seal face to the center diameter in the width direction and the ratio of the displacement amount of the annular seal face to the width dimension.
Fig. 24 is a view showing particle actual values, showing the number of particles of 20 nm or more on the vertical axis and the amount of displacement (mu m) on the annular seal surface on the abscissa.
25 is a graph showing the relationship between the ratio (D / A) of the end face diameter to the center diameter in the width direction and the amount of displacement of the annular seal face, in which the ordinate indicates the amount of displacement (占 퐉) of the annular seal face, A (times).
Fig. 26 is a microscope photograph of a valve body of the tenth embodiment shown in Fig. 4, in which the annular seal surface after the particle test is photographed. Fig.
Fig. 27 is an image view of a microscope photograph shown in Fig. 26; Fig.
Fig. 28 relates to the valve body of Example 1 shown in Fig. 5, and is a photograph of a photograph of a circular seal face after the particle test. Fig.
Fig. 29 is an image view of a photomicrograph shown in Fig. 28; Fig.
30 is an image view of elastic deformation of the diaphragm valve body;
31 is a sectional view of a valve body used in a fluid control valve according to a third embodiment of the present invention;
32 is a sectional view showing the valve body of the first modification;
33 is a sectional view showing the valve body of the second modification;
34 is a sectional view showing the valve body of the third modification;
35 is a sectional view showing a valve body of a fourth modification;
36 is a sectional view showing a valve body of a fifth modification;

Hereinafter, an embodiment of the fluid control valve according to the present invention will be described with reference to the drawings.

A. First Embodiment

(For the outline of the present invention)

1 is a cross-sectional view of a fluid control valve 1 according to a first embodiment of the present invention, showing a closed state. The fluid control valve 1 of the first embodiment is characterized in that wear due to deformation of the diaphragm valve body (an example of the valve body) 4 generated at the time of valve closing is reduced.

BACKGROUND ART A diaphragm valve is a conventional diaphragm valve in which an annular seal face of a valve body and a valve seat of a valve seat are formed by vertically contacting the valve body with the valve seat, The particle countermeasures have been carried out by improving the contact state of the surfaces and suppressing the contact force. However, this method alone can not sufficiently reduce the number of particles. For example, semiconductor devices are becoming finer every year, and the particles affecting semiconductor manufacturing are becoming smaller each year. For example, fluid control valves are required to minimize as much as 20 nm particles that can be measured with commercially available particle counters. Therefore, as a countermeasure for reducing the number of conventional particles, if the problematic particle becomes smaller, another countermeasure is required, and the particle becomes finer and progress-free. Therefore, the inventor has recognized the necessity to exclude the cause of particle generation and discovered the fundamental cause of the particle repeatedly through experiments and simulations (see the effect confirmation test results described later).

30 is an image diagram of elastic deformation of the diaphragm valve body 1000. Fig. In the diaphragm valve body 1000, a neck portion 1000b is formed by thinning a portion to which the thin film portion 1000a is connected. Thereby, the fluid control valve can expand the volume of the diaphragm chamber accommodating the diaphragm valve body 1000 to expand the flexible region of the thin film portion 1000a, and adjust the hydraulic pressure area from the fluid even if the valve size is the same . The diaphragm valve body 1000 is provided so that the valve body portion 1000d provided with the valve seat side end face 1000c is larger than the diameter of the neck portion 1000b so as to be coaxial with the neck portion 1000b. The valve seat side end face 1000c has the annular seal protrusion 1000f provided outside the neck portion 1000b and has an inner diameter (orifice diameter) of the valve seat opening portion increased to increase the control flow rate. The fluid control valve including the diaphragm valve body 1000 is configured such that the driving force applied to the neck portion 1000b is transmitted to the annular sealing surface 1000e of the annular sealing projection 1000f through the valve body portion 1000d, The sealing surface 1000e is sealed to the valve seat with a surface pressure of 3 to 50 MPa. In this diaphragm valve body 1000, the action point K2 that the annular seal surface 1000e touches the valve seat and seals from the point where the driving force in the direction of K1 is given is deviated outwardly in diameter. As a result, every time the valve closing operation is performed, as shown by K3 in the figure, a force to expand in the radially outward direction is generated on the annular sealing surface 1000e. In this case, as shown by an imaginary line M in the figure, the diaphragm valve body 1000 is deformed so that the annular seal face 1000e slides sideways relative to the valve seat, and the annular seal face 1000e is deformed to the valve seat Friction and wear. The inventors have thought that this abrasion portion is separated from the annular sealing surface 1000e during the valve opening / closing operation to be a particle. And the inventors supported them by simulation and experiment. The inventors have devised a shape near the annular seal projection to suppress or prevent deformation of the valve body.

(Schematic configuration of fluid control valve)

1, the fluid control valve 1 includes a valve portion 2 for controlling fluid and a driving portion 3 for applying a driving force to the valve portion 2. [ The fluid control valve 1 is provided, for example, in a semiconductor manufacturing apparatus, and controls a flow rate of a chemical liquid supplied to the wafer. In this case, since the fluid control valve 1 may control the highly corrosive chemical liquid, the diaphragm valve body 4 divides the drive portion 3 and the valve portion 2.

The cylinder body 33 is constituted by the cylinder body 31 and the cylinder cover 32 in the drive unit 3. [ The piston 35 is slidably mounted in the piston chamber 34 formed in the cylinder body 33 and the piston chamber 34 is connected to the first chamber 34a and the second chamber 34b ). A shaft 35b is integrally provided in the piston main body 35a. The lower end of the shaft 35b protrudes from the cylinder body 33 toward the valve portion 2 and is connected to the diaphragm valve body 4 of the valve portion 2. [ The compression spring 36 applies a seal load to the diaphragm valve body 4 and is compressed and installed in the first chamber 34a to urge the piston 35 toward the valve seat 24 side of the valve portion 2 It is constantly pressurized. The cylinder body 33 is formed with an intake and exhaust port 33a communicating with the first chamber 34a to perform an intake and exhaust and an operation port 33b communicating with the second chamber 34b to supply operation air.

The drive unit 3 reciprocates and linearly moves the piston 35 along the axial line in accordance with the balance between the spring force of the compression spring 36 and the internal pressure of the second chamber 34b so as to reciprocate the diaphragm valve body 4 Stroke movement. The driving part 3 is made of a fluororesin material except for the compression spring 36 and the annular sealing member, so that the driving part 3 can be used in an atmosphere of high corrosiveness.

The valve portion 2 is built in the valve body 21 and allows the fluid control to be performed by contacting or separating the annular seal protrusion 414 of the diaphragm valve body 4 against the valve seat surface 24a of the valve seat 24 I do. The valve body 21 and the diaphragm valve body 4 are made of a fluororesin in order to ensure corrosion resistance. The diaphragm valve body 4 may have the same hardness as the valve body 21 (the valve seat 24) or the valve body 21 (the valve seat 24)] is preferably set to be lower than the hardness of the fluororesin. In the present embodiment, the valve body 21 (valve seat 24) is made of PFA (tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer) hardness D60 to 64 and the diaphragm valve body 4 The material is PTFE (polytetrafluoroethylene) hardness D53-58.

The valve body 21 has a rectangular parallelepiped shape and is opened to the side where the first port 21a for inputting and outputting fluid and the second port 21b are opposed to each other. On the upper surface of the valve body 21, the opening 21e is opened in a cylindrical shape and the mounting hole 21f is formed in an annular shape on the outer side of the opening 21e. The outer peripheral portion 43 of the diaphragm valve body 4 is fitted into the mounting hole 21f of the valve body 21 and the valve body 21 is fixed to the cylinder body 33 The diaphragm chamber 22 and the non-contacting liquid chamber 23 are formed by supporting the outer rim portion 43 therebetween. The valve body 41 of the diaphragm valve body 4 is connected to the shaft 35b and moves in the diaphragm chamber 22 in the vertical direction in the drawing. The non-contacting liquid chamber 23 communicates with the breathing hole 33c formed in the cylinder body 33 so that the thin film portion 42 can be smoothly deformed as the valve body 41 moves.

The first communication passage 21c is formed in an L shape in the valve body 21 so as to communicate the first port 21a and the diaphragm chamber 22 and is open at the center of the bottom surface of the diaphragm chamber 22. [ The bottom surface of the diaphragm chamber 22 is provided with a valve seat 24 along an outer periphery of an opening portion through which the first communication passage 21c is opened. The valve seat 24 has a valve seat surface 24a formed to be a flat surface orthogonal to the axis of the diaphragm chamber 22. The second communication passage 21d is formed in an L shape so as to communicate the second port 21b with the diaphragm chamber 22 and is opened to the outside of the valve seat 24. [

(Configuration of valve body)

2 is a sectional view of the diaphragm valve body 4 shown in Fig. The diaphragm valve body 4 has a columnar valve body 41 connected to the drive portion 3 (see Fig. 1) and is in contact with or spaced from the valve seat 24. Fig. A thin film portion 42 is connected to the outer circumferential surface of the valve body 41 and an outer frame portion 43 is formed thickly on the outer side edge portion of the thin film portion 42. The valve body 41 is provided with a cylindrical portion 411, a shoulder portion 412, and a neck portion 413 coaxially. In this embodiment, the valve body portion 410 is constituted by the cylindrical portion 411 and the shoulder portion 412.

The cylindrical portion 411 has a cylindrical shape and has a valve seat side end face 411a opposed to the valve seat 24. The neck portion 413 has a thin film portion 42 connected to the outer peripheral surface 413a and has a diameter smaller than the diameter of the cylindrical portion 411 in order to secure the volume of the diaphragm chamber 22 . The neck portion 413 is provided at its upper portion with a male thread portion 413b screwed to the female screw portion 35c (see Fig. 1) provided in the shaft 35b. The shoulder portion 412 is interposed between the cylindrical portion 411 and the neck portion 413 and is provided so as to be reduced in diameter from the cylindrical portion 411 toward the neck portion 413. The diaphragm chamber 22 Is prevented from staying or generating turbulence. In addition, by reducing the diameter of the neck portion 413, the outer diameter dimension of the outer rim portion 43 can be made small, so that the valve body 21 can be made compact.

An annular seal projection 414 projects annularly around the axial center of the valve body 41 on the valve seat side end face 411a of the valve body 41. The annular seal projection 414 is provided outside the connection position T (hereinafter also referred to as " T portion ") where the outer peripheral surface 413a of the neck portion 413 is connected to the outer peripheral surface 412a of the shoulder portion 412. [ Thus, the valve body 41 is sealed to the valve seat 24 at a position outside the position where the seal load is applied, thereby enlarging the area (orifice diameter) of the valve seat opening.

The annular seal protrusion 414 is set to have a height C from the valve seat side end face 411a to the tip end of the annular seal protrusion 414 so as to have rigidity that is hard to collapse even when a seal load is applied. In the present embodiment, the height C of the annular seal protrusion 414 is set so that the diameter of the annular seal surface 414a (an example of the annular seal portion) in the radial direction of the annular seal surface 414 (Hereinafter also referred to as " width-direction center diameter A ").

The annular seal protrusion 414 is formed so as to be reduced in diameter from the valve seat side end face 411a side toward the tip end portion (valve seat side). That is, the inner circumferential surface 414b and the outer circumferential surface 414c of the annular seal projection 414 are formed with a taper for increasing the inclination from the valve seat side end surface 411a toward the tip end portion. The annular seal projection 414 is formed flat so that its tip end portion is orthogonal to the axis of the valve body 41 to form an annular seal surface 414a. As a result, the annular seal protrusion 414 has a high seal load acting on the annular seal surface 414a per unit area, prevents fluid leakage, and prevents the annular seal surface 414a from contacting the valve seat surface 24a It is difficult to slip. Further, the driving unit 3 becomes compact. The radial width dimension B (hereinafter also referred to as " width dimension B ") of the annular seal surface 414a is preferably not less than 1/100 and not more than 10/1 of the widthwise center diameter A of the annular seal surface 414a .

The diaphragm valve body 4 has a displacement amount in which the annular seal surface 414a is displaced in the radial direction to 6.175 mu m or less so that the annular seal surface 414a rubs against the valve seat 24, The diameter D (hereinafter also referred to as " end face diameter D ") of the cylindrical portion 411 (the end surface 411a of the valve seat 411) of the diaphragm valve body 4 is made thick, And a portion 416 is formed on the inner side of the annular seal projection 414.

The end face diameter D is set at 1.3 times or more with respect to the center diameter A in the width direction and the diameter expansion width dimension E from the annular seal projection 414 to the outer peripheral face 411b of the cylindrical portion 411 is increased. The valve body 41 can easily push the annular seal projection 414 vertically against the valve seat surface 24a along the direction in which the drive portion 3 applies the load to the diaphragm valve element 4, The displacement amount of the annular seal surface 414a can be suppressed.

The valve body 41 is set such that the thickness F in the axial direction at the radial center position of the annular seal surface 414a is 0.7 times or more with respect to the center diameter A in the width direction. The valve body 41 is configured so as to have a rigidity for suppressing the deformation that occurs from the annular seal surface 414a to the upper surface thereof when the annular seal protrusion 414 is sealed to the valve seat 24 by the seal load, Respectively. Further, the valve body 41 can spread the load of the driving portion 3 widely on the valve body portion 410. The thickness F of the valve body 41 may be set to 0.7 times or less of the widthwise center diameter A, provided that the amount of displacement of the annular seal surface 414a is 6.175 mu m or less. In this case, the volume of the diaphragm chamber 22 can be expanded to prevent the fluid from staying, or the valve size can be reduced.

The convex portion 416 is formed so as to be coaxial with the neck portion 413 on the inner side of the annular seal projection 414 on the valve seat side end face 411a and the valve seat side end face 411a on the valve seat side . The diameter H (hereinafter also referred to as " base end diameter H ") of the proximal end of the valve body 41 at which the convex portion 416 is connected to the valve body 41 (the cylindrical portion 411) Convex portion 416 is formed so as to be equal to or larger than the diameter J of the thinnest portion (hereinafter referred to as " detailed diameter J ") between the surface and the end surface of the valve seat. That is, the convex portion 416 is formed so that the outer circumferential position U (hereinafter also referred to as "U portion") of the proximal end portion is located directly below the detailed diameter J or radially outward of the detailed diameter J. As a result, the portion of the valve body 41 where the seal load is applied is thickened by the convex portion 416, so that the rigidity is increased. The height I of the proximal end connected to the valve body 41 is larger than the height of the annular seal protrusion 414 from the valve seat side end face 411a to the annular seal protrusion 414 The height to the surface 414a] C is 0.7 times or more. As a result, the thickness of the central portion of the valve body 41 becomes large, and the rigidity becomes high.

The valve body 41 has an annular concave groove 415 formed between the annular seal projection 414 and the convex portion 416 and the elastic deformation in the convex portion 416 is transmitted to the annular seal projection 414 It is difficult.

(Fluid control method by fluid control valve)

Next, a fluid control method using the fluid control valve 1 having the above-described configuration will be described. For example, in the fluid control valve 1, the first port 21a is connected to the chemical liquid supply source, and the second port 21b is connected to the reaction chamber of the semiconductor manufacturing apparatus.

(Rough operation of fluid control valve)

When the fluid control valve 1 is in the standby state in which the chemical liquid is not supplied to the wafer, the operation fluid is not supplied to the operation port 33b. In this case, the urging force of the compression spring 36 acts on the diaphragm valve body 4 through the piston 35 and the annular seal projection 414 of the diaphragm valve body 4 presses against the valve seat surface (24a). At this time, the valve portion 2 cuts off between the first port 21a and the second port 21b, and does not supply the chemical solution from the second port 21b to the reaction chamber.

When the chemical liquid is supplied to the wafer, the fluid control valve 1 is supplied with the operation fluid to the operation port 33b. When the inner pressure of the second chamber 34b becomes larger than the pressing force of the compression spring 36, the piston 35 moves toward the half-valve seat side against the compression spring 36. [ The diaphragm valve element 4 rises in unison with the piston 35 and separates the annular seal protrusion 414 from the valve seat surface 24a. Thereby, the fluid control valve 1 allows the chemical liquid to flow from the first port 21a to the second port 21b in accordance with the stroke of the valve body 41, and supplies the chemical liquid to the reaction chamber.

When the supply of the chemical liquid to the wafer is stopped, the fluid control valve 1 discharges the operating fluid from the operation port 33b. Then, the piston 35 is pressed by the compression spring 36 to move in the valve seat direction, and presses the neck portion 413 of the diaphragm valve body 4 toward the valve seat. The diaphragm valve body 4 is lowered integrally with the piston 35 to bring the annular seal surface 414a of the annular seal protrusion 414 into contact with the valve seat surface 24a, (414) to press the annular seal surface (414a) against the valve seat surface (24a). Thereby, the fluid control valve 1 is brought into the standby state.

(Abrasion due to deformation of the valve body occurring at the time of valve closing and its reduction method)

In the fluid control valve 1, the diaphragm valve body 4 has the sub-diameter J smaller than the central diameter A in the width direction of the annular seal surface 414a. The diaphragm valve body 4 is capable of transmitting the driving force of the driving portion 3 to the valve seat side end surface 411a by pressing the annular sealing surface 414a against the valve seat surface 24a and sealing it And deviates outward in diameter from the center of gravity of the portion. The diaphragm valve body 4 is configured such that after the annular seal surface 414a of the annular seal projection 414 is brought into contact with the valve seat surface 24a and the seal load is further increased by the drive portion 3, And is applied to the seal protrusion 414 so as to press the annular seal surface 414a against the valve seat surface 24a. In this case, in the diaphragm valve body 4, the central portion of the valve body 41, which is not supported by the valve seat 24, tends to be elastically deformed toward the valve seat. As the amount of elastic deformation becomes larger, the diaphragm valve element 4 is elastically deformed so as to displace the annular seal surface 414a toward the outside of the diameter largely. When the elastic deformation of the annular seal protrusion 414 is large, the amount of the annular seal surface 414a rubbed against the valve seat surface 24a increases, and wear is likely to occur. The abrasion of the annular seal surface 414a becomes a particle.

However, in the present embodiment, in order to reduce the wear of the annular seal surface 414a generated at the time of closing the valve, a shape capable of suppressing the amount of displacement in which the annular seal surface 414a is displaced outward in the diameter direction is called a diaphragm valve Since the sieve 4 itself has, the generation of particles is suppressed or prevented. Therefore, even if the particles affecting semiconductor fabrication become small as the semiconductor device is miniaturized, generation of particles can be suppressed or prevented so as to cope with the decrease in particles.

(A detailed description of a method for reducing the wear of the annular seal surface occurring at the time of valve closing)

The fluid control valve 1 is configured such that the annular seal surface 414a is brought into contact with the valve seat surface 24a and then the annular seal surface 414a is pressed against the valve seat surface 24a to seal the seal surface with a predetermined seal load The amount of displacement in which the annular seal surface 414a deviates in the radially outward direction with respect to the valve seat 24 is suppressed. Specifically, the amount of displacement is suppressed to less than 6.175㎛ (widthwise center than 12.4 × 10 ^-4 times the diameter A, or, less than 6.18 × 10 ^-2 times the width dimension B). As described above, when the amount of displacement of the annular seal surface 414a is suppressed, the annular seal surface 414a rubs against the valve seat surface 24a and is less likely to be abraded, thereby reducing the generation of particles affecting semiconductor manufacturing . Further, by suppressing the wear due to the deformation of the valve body 41, the sealability is not lowered even if the valve opening / closing operation is repeated. Thereby, the durability of the fluid control valve 1 is improved. Further, the fluid control valve 1 can reduce the required seal force and make the drive unit 3 compact. And the diaphragm valve body 4 is provided with a shape necessary for realizing these.

Since the end face diameter D of the diaphragm valve body 4 is 1.3 times or more as large as the center diameter A in the width direction, the rigidity near the valve seat side end face 411a is high. The diaphragm valve body 4 is prevented from deformation of the valve seat side end face 411a and the annular seal projection 414 is less likely to be pulled toward the valve seat side end face 411a during the pressing operation. As a result, the diaphragm valve body 4 is prevented from being deformed such that the annular seal projection 414 is displaced relative to the valve seat surface 24a during the pressing operation, and the annular seal surface 414a, The abrasion is reduced. Therefore, the fluid control valve 1 reduces wear of the annular seal surface 414a due to deformation of the diaphragm valve body 4 (valve body 41), which is generated at the valve closing time, and suppresses generation of particles Or can be prevented.

Since the diaphragm valve body 4 has the diameter of the thinnest portion of the valve body 41, that is, the detailed diameter J is smaller than the center diameter A in the width direction, the valve seat side end surface 411a The inner side of the projection 414 is pressed against the valve seat 24 side. However, since the amount of displacement of the annular seal surface 414a in the radial direction of the fluid control valve 1 is suppressed, the wear of the annular seal surface 414a can be reduced and the generation of particles can be reduced.

The thickness F of the diaphragm valve body 4 in the axial direction at the radial center position of the annular seal surface 414a is 0.7 or more times the center diameter A in the widthwise direction, And deformation generated and started to be dispersed at a position apart from the valve seat side end surface 411a. Therefore, in the vicinity of the valve seat-side end surface 411a, deformation in the vertical direction is apt to occur. Therefore, according to the fluid control valve 1 of the present embodiment, the annular seal surface 414a is easily pressed perpendicularly to the valve seat surface 24a, and the amount of displacement in which the annular seal surface 414a is displaced in the radial direction is suppressed can do.

Since the diaphragm valve element 4 has the convex portion 416 protruding from the valve seat side end face 411a toward the valve seat 24 side inside the annular seal projection 414, The rigidity of the portion subjected to the load is high and the valve seat side end face 411a is hard to be deformed so as to project the inner side portion of the annular seal projection 414 toward the valve seat 24 side. Therefore, the fluid control valve 1 is less likely to bend due to the deformation of the annular seal projection 414 on the valve seat side end face 411a, and the displacement amount of the annular seal face 414a can be suppressed.

In particular, since the proximal portion diameter H of the convex portion 416 is not less than the detailed diameter J, it is difficult to support the entire load received from the drive portion 3 and to deform the valve body 41 in the radially outward direction. Therefore, the fluid control valve 1 can suppress the deformation of the valve-seat-side end face 411a and reduce the displacement amount of the annular seal face 414a.

Since the height I from the proximal end portion to the distal end face 416a is 0.7 times or more of the height C from the valve seat side end face 411a to the annular seal face 414a in the convex portion 416, The groove 415 is formed deeply. This makes it difficult for the deformation to be transmitted from the convex portion 416 to the annular seal projection 414. As a result, the annular sealing surface 414a is difficult to be displaced with respect to the valve seat surface 24a during the pressing operation, and is hard to be worn. Therefore, the fluid control valve 1 can reduce the abrasion due to deformation of the diaphragm valve body 4, which occurs at the time of closing the valve.

As described above, the fluid control valve 1 and the fluid control method can reduce wear due to deformation of the diaphragm valve body 4, which occurs at the time of closing the valve. Since the fluid control valve 1 reduces the slight wear caused by the deformation of the diaphragm valve element 4, which is generated when the valve is closed, the occurrence of fine particles can be suppressed or prevented.

(Effect confirmation test)

The inventors have found that the effect of (a) the effect of the end face diameter D, (b) the effect given by the thickness F, (c) the effect of giving the convex portion, (G) an effect imparted by the combination of the end face diameter D and the thickness F, (h) the effect imparted by the convex portion height I, (g) (I) the effect of the combination of the convex portion with the thickness F and the height G was examined.

In the effect confirmation test, Comparative Examples 1 to 3 and Examples 1 to 13 having different shapes as shown in Fig. 3 were used. 3 is a table showing the setting conditions of Comparative Examples 1 to 3 and Examples 1 to 13 used in the effect confirmation test. Figs. 4 to 6 are sectional views showing the valve body 104 of the tenth embodiment, the valve body 204 of the first embodiment, and the valve body 304 of the second embodiment. The fourth embodiment corresponds to the diaphragm valve element 4 (see Fig. 2). In the following description and cited drawings, among the configurations of Comparative Examples 1 to 3 and Examples 1 to 3 and 5 to 13, the configuration common to the diaphragm valve element 4 of Embodiment 4 is the same as that of Fig. 2 And the description thereof is appropriately omitted. In the following description, " diaphragm valve body 4 " is also referred to as " valve body 4 ".

In the effect confirmation test, analysis software made by Dassault Systemes Solid Works Corp. was used. In the test, the annular seal surface 414a was opened with the seal load of 50N from the start of the contact of the annular seal surface 414a with the valve seat 24 for the first to third embodiments and the first to thirteenth embodiments, The valve body 841, 1441, 1541, 241, 341, 441, 41, 541, 641, 1043, 1141, 741, 141, 1242, 1342, 943). The results of this analysis are shown in Figs. 23 shows a comparison in the case where the amount of displacement of the annular seal surface 414a in Comparative Examples 1 to 3 and Examples 1 to 13 and the amount of displacement of the annular seal surface 414a in Example 10 are taken as 100% The ratio of the amount of displacement of the annular seal surface 414a of Examples 1 to 3 and Examples 1 to 13 and the ratio of the amount of displacement of the annular seal surface 414a to the center diameter A of the widthwise direction and the ratio of the annular seal surface 414a to the annular seal surface Is a table showing the ratio of the amount of displacement of the movable member 414a.

<(a) About the effect of the end face diameter D on the amount of displacement of the annular seal face>

As shown in Fig. 3, Comparative Examples 1 and 2, which differ only in the end face diameter D, and Examples 7 and 10 are compared. As shown in Figs. 3 and 4, in the tenth embodiment, the diameter A in the width direction of the annular seal surface 414a is 5.0 mm, the width dimension B of the annular seal surface 414a is 0.1 mm, the annular seal projections 414 ) Was set to 0.5 mm. In Example 10, the end face diameter D was set to 6.5 mm, which was 1.30 times the center diameter A in the width direction. The tenth embodiment is different from the connecting position S (hereinafter also referred to as "S portion") in which the outer peripheral surface 414c of the annular seal projection 414 is connected to the valve seat side end surface 411a to the outer peripheral surface 411b ) Was set to 0.25 mm. In Example 10, the thickness F in the axial direction at the radial center position of the annular seal surface 414a was set to 3.7 mm. In Example 10, the height G from the annular seal surface 414a to the upper end position V of the cylindrical portion 1411 was set to 2.65 mm. In Example 10, the detailed diameter J was set to 4 mm. Further, in Comparative Example 1, neither the convex portion nor the annular concave groove is provided.

On the other hand, as shown in FIG. 3, Comparative Examples 1, 2, and 7 are configured similarly to Embodiment 10 except for the end face diameter D and the diameter expansion width dimension E. The end face diameter D of Comparative Example 1 is 6.0 mm, which is 1.2 times the diameter A in the width direction. The diameter expansion width dimension E of Comparative Example 1 is 0 mm. The end face diameter D of Comparative Example 2 is 6.25 mm, which is 1.25 times the center diameter A in the width direction. The diameter expansion width dimension E of Comparative Example 2 is 0.125 mm. The end face diameter D of Example 7 is 7.5 mm, which is 1.5 times the center diameter A in the width direction. The diameter expansion width dimension E of Example 7 is 0.75 mm.

Fig. 7 shows the displacement amount analysis result of Comparative Example 1. Fig. As indicated by X86 and X88 in the figure, in the valve body 841 of Comparative Example 1, the amount of displacement of the cylindrical portion 843 is large toward the outside of the diameter from the center portion. The cylindrical portion 843 is larger as the rate of change of the amount of displacement is closer to the outer peripheral surface 411b. The cylindrical portion 843 becomes larger as the amount of displacement of the upper portion of the annular seal projection 414 becomes closer to the annular seal projection 414. Therefore, in Comparative Example 1, as indicated by Y11 in the figure, the cylindrical portion 843 is crushed by the load of the driving portion 3 during the pressing operation, and the valve seat side end face 843a side is expanded in the radially outward direction As shown in FIG. In Comparative Example 1, as shown by X85 and X86 in the figure, there is a large difference between the amount of displacement of the center portion of the valve seat-side end face 843a and the amount of displacement of the outer edge portion. Therefore, the valve seat side end face 843a of Comparative Example 1 is curved and deformed so as to protrude the center portion toward the valve seat side in a convex shape and push the outer side edge portion toward the opposite valve seat side, as indicated by Y12 in the drawing , It is understood that the annular seal projection 414 is pushed outward in the diameter direction and pressed against the valve seat surface 24a.

7, in Comparative Example 1, the Q portion, the R portion, and the S portion of the annular seal projection 414 are larger than the P portion of displacement. Therefore, in Comparative Example 1, it can be seen that during the pressing operation, the annular seal projection 414 is bent and deformed so as to expand the distal end portion in the radially outward direction. As shown in Fig. 23, in Comparative Example 1, the displacement amount of the annular seal surface 414a is 9.428 占 퐉. The amount of displacement is 18.90 x 10 &lt; ^-4 &gt; times the widthwise center diameter A or 9.43 x 10 &lt; ^-2 &gt; times the width dimension B of the annular seal surface 414a.

Fig. 8 shows the displacement amount analysis result of Comparative Example 2. Fig. In the valve body 1441 of Comparative Example 2, as shown by X146 and X148 in the figure, the amount of displacement of the cylindrical portion 1442 is larger toward the outside of the diameter than the center portion. The rate of change of the amount of displacement is smaller than that of Comparative Example 1. This is presumably because the diameter E of the comparative example 2 is larger than that of the comparative example 1 and the stiffness is higher than that of the comparative example 1, so that the deformation of the center part is less likely to be transmitted in the radially outward direction. However, in Comparative Example 2, as shown by X146 and X145 in the drawing, the difference in displacement amount between the center portion and the outer edge portion of the valve seat side end face 1442a is large as in Comparative Example 1. [ Therefore, in Comparative Example 2, it can be seen that the valve seat side end face 1442a is largely deformed as in Comparative Example 1. As shown in X141 to X144 in the figure, in Comparative Example 2, the amount of displacement of the Q portion, the R portion, and the S portion is larger than the P portion, and in the same manner as in Comparative Example 1, the annular seal projection 414 As shown in Fig. As shown in Fig. 23, in Comparative Example 2, the amount of displacement of the annular sealing surface 414a is 7.233 占 퐉. The amount of displacement is 14.47 x 10 ^-4 times the widthwise center diameter A and 7.23 x 10 ^-2 times the width dimension B of the annular seal surface 414a.

19 shows the result of displacement amount analysis of the tenth embodiment. The displacement amount of the valve body 141 of the tenth embodiment is increased toward the outside of the diameter from the center of the cylindrical portion 1411 as indicated by X17 and X18 in the figure. The rate of change of the amount of displacement is suppressed in the same manner as in Comparative Example 2. [ In Example 10, as shown by X15 to X18 in the figure, the difference in displacement amount between the central portion of the valve seat side end face 1411a and the outer edge portion is smaller than that of Comparative Example 2. [ Thus, in Example 10, deformation of the valve seat side end face 1411a is suppressed, and it is easy to push the annular seal protrusion 414 against the valve seat face 24a, as compared with Comparative Example 2.

As shown by X11 to X14 in Fig. 19, in Example 10, displacement amounts of the P portion, Q portion and S portion are smaller than those of Comparative Examples 1 and 2. Therefore, in Example 10, it is understood that the annular seal projections 414 are less likely to bend in the radially outward direction, and displacement of the annular seal surface 414a on the inner circumferential side can be suppressed as compared with Comparative Examples 1 and 2. As shown in Fig. 23, in the tenth embodiment, the amount of displacement of the annular seal surface 414a is 6.175 占 퐉. The amount of displacement is 12.40 x 10 ^-4 times with respect to the widthwise center diameter A or 6.18 x 10 ^-2 times with respect to the width dimension B of the annular seal surface 414a.

16 shows the displacement amount analysis result of the seventh embodiment. As shown by X106 and X108 in the figure, the valve body 1043 of the seventh embodiment has a large amount of change from the center of the cylindrical portion 411 toward the outside of the diameter. The rate of change is smaller than that of Example 10. [ Further, in the cylindrical portion 411, the amount of displacement changes approximately in the form of a concentric circle about the axial line. Therefore, in the seventh embodiment, it can be understood that the cylindrical portion 411 is deformed in the vertical direction during the pressing operation, and the annular seal projection 414 is apt to be vertically pressed against the valve seat surface 24a. In Example 7, as shown by X101 to X104 in the figure, the amount of displacement of the P portion, the Q portion, the R portion, and the S portion is smaller than that of Example 10. [ Therefore, in the seventh embodiment, it is understood that the annular seal protrusion 414 is harder to expand the distal end portion in the radially outward direction than in the tenth embodiment, and the amount of displacement of the Q portion and the R portion is reduced. As shown in Fig. 23, in the seventh embodiment, the amount of displacement of the annular sealing surface 414a is 4.887 占 퐉. The amount of displacement is 9.77 x 10 &lt; ^-4 &gt; times as large as the widthwise center diameter A, or 4.89 x 10 &lt; ^-2 &gt; times the width dimension B of the annular seal surface 414a.

25 is a graph showing the relationship between the ratio (D / A) of the end face diameter D to the widthwise center diameter A and the displacement amount of the annular seal surface 414a. In Comparative Example 1 in which D / A is 1.2, the displacement amount of the annular seal surface 414a generated during the pressing operation is 9.428 占 퐉. In Comparative Example 2 in which D / A is 1.25, the amount of displacement of the annular seal surface 414a generated during the pressing operation is 7.233 占 퐉. In the tenth embodiment in which D / A is 1.30, the amount of displacement of the annular seal surface 414a generated during the pressing operation is 6.175 占 퐉. In the seventh embodiment in which D / A is 1.5, the amount of displacement of the annular seal surface 414a generated during the pressing operation is 4.887 mu m. From these, the reduction rate of the displacement amount of the annular seal surface 414a suddenly becomes gentle when the end face diameter D becomes 1.3 times or more with respect to the center diameter A in the width direction. This is because the wall having the thickness required to support the deformation in the radially outward direction generated in the central portion of the cylindrical portion is formed on the outer side of the annular seal projection 414 when the end face diameter D is 1.3 times or more and the diameter expansion width dimension E becomes large And the rigidity of the valve body is increased. Therefore, the end face diameter D is preferably 1.3 times or more with respect to the center diameter A in the width direction.

Here, the inventors fabricated the valve body 104 shown in Fig. 4 on the basis of the tenth embodiment, and tested the particles against the valve body 104. Fig. In this particle test, as the pretreatment, an evaluation valve (valve equipped with valve body 104) was provided on a line through which pure water flows, and while the pure water was flowing at 1,000 mL / Was performed. Thereafter, an evaluation valve was provided on a line through which pure water flows, a particle counter was provided on the downstream side of the evaluation valve, a seal load of the evaluation valve was set to 50 N, and an evaluation valve was opened and closed 15,000 times over 600 minutes Pure water of 1,000 mL / min was allowed to flow, and 75 mL / min of pure water passed through the evaluation valve was passed through the particle counter. The particle counter measures the integrated value of the number of particles of 20 nm or more every 1 minute, and the particle value per mL is measured during the valve opening / closing operation of 15,000 times from the integrated value. Fig. 24 shows the particle test results of the evaluation valve on which the valve element 104 is mounted.

As shown in Fig. 24, the particles measured by the valve element 104 during the particle test were 17.78 particles per 1 mL.

On the other hand, the inventors also conducted particle tests on samples of countermeasures with a displacement amount of the annular seal surface 414a of 6.175 탆 to 9 탆. Since the test method is the same as the above, the description is omitted. As a result, the number of particles measured during the particle test of the sample was 797.8. From these particle tests, it was found that when the amount of displacement of the annular seal surface 414a exceeds 6.175 mu m, the amount of generated particles increases sharply. Therefore, by setting the displacement amount of the annular seal surface 414a to 6.175 mu m or less, the amount of particles generated can be effectively reduced.

The inventors photographed a micrograph of the annular sealing surface 414a with respect to the valve body 104 after the completion of the particle test. When the magnification of the microscope photograph is set at 500 times, the valve body 104 has a burr on the portion Q of the annular seal surface 414a and no burr on the portion R of the annular seal surface 414a. The reason why no burr is generated in the R portion of the annular seal surface 414a is that when the annular seal surface 414a moves in the radially outward direction, the burr generated in the R portion is reduced to the annular seal surface 414a and the valve seat surface 24a, So that it is smoothed.

Further, the inventors increased the magnification of the microscope photograph from 500 times to 2000 times and confirmed the state near the Q portion. As shown by Z1 in Fig. 26 and Fig. 27, the valve element 104 has fine wrinkles, and as shown by Z2 in the figure, a minute scratch or the like is generated. It can also be seen that the valve body 104 is formed so that the burr is drawn up from the Q portion of the ring-shaped seal surface 414a toward the inner circumferential surface 414b, as shown by Z3 in the drawing. From these, when the valve opening / closing operation is started, the valve body 104 rubs the Q portion on the valve seat to form a small scratch, and the scratches thereof are walked up while the valve opening / closing operation is repeated. So that the burrs are separated from the annular sealing surface 414a to be particles. Therefore, by suppressing the annular seal projection 414 from being deformed to displace the annular seal surface 414a in the radial direction, the abrasion of the Q portion is reduced, and particles that can be measured by the particle counter are measured, It is considered that the generation of fine particles which can not be performed can be reduced.

<(b) About the effect of the thickness F on the amount of displacement of the annular seal surface>

As shown in Fig. 3, Comparative Example 3, Example 2 and Example 7 in which only the thickness F is different are compared. In Comparative Example 3, the thickness F in the axial direction at the center position of the annular seal projection 414 is set to 3 mm which is 0.6 times the center diameter A (5 mm) in the width direction of the annular seal surface 414a . The thickness F in the axial direction at the central position of the annular seal projection 414 is set to 3.7 mm which is 0.74 times the central diameter A (5 mm) in the width direction of the annular seal surface 414a . In the second embodiment, the thickness F in the axial direction at the center position of the annular seal protrusion 414 is set to 4.5 mm which is 0.9 times the center diameter A (5 mm) in the width direction of the annular seal surface 414a . The valve bodies 1541, 341, and 1043 of Comparative Example 3, Example 2 and Example 7 have the same height G and the size of the thickness F is adjusted by the shoulders 1542, 3411, and 412.

Fig. 9 shows the displacement amount analysis result of Comparative Example 3. Fig. As shown by X156 and X158 in the figure, in the valve body 1541 of the comparative example 3, the amount of displacement of the valve body part 1540 is large toward the outside of the diameter from the center part. The valve body portion 1540 is larger as the amount of displacement of the upper portion of the annular seal protrusion 414 approaches the annular seal protrusion 414 as indicated by X158 in the figure. The valve body 1541 has a large difference in displacement amount between the central portion of the valve seat side end face 411a and the outer edge portion. Accordingly, in the comparative example 3, the cylindrical part 411 is deformed so as to expand the valve seat side end face 411a side in the radially outward direction during the pressing operation, and the annular seal protrusion 414 is deformed to the valve seat face 24a It is difficult to vertically press. As shown by X151 to X154 in the figure, the annular seal projection 414 has a larger displacement amount on the outer peripheral surface 414c side than on the inner peripheral surface 414b side, and it can be seen that the tip end portion is bent so as to extend outside the diameter . As shown in Fig. 23, in Comparative Example 3, the displacement amount of the annular seal surface 414a is 6.449 占 퐉. The amount of displacement is 12.90 x 10 ^-4 times with respect to the center diameter A in the width direction of the annular seal surface 414a or 6.45 x 10 ^-2 times with respect to the width dimension B.

As shown by X108 in Fig. 16, in the valve body 1043 of the seventh embodiment, the amount of displacement of the upper portion of the annular seal projection 414 is changed concentrically about the axial line. The valve body 1042 is liable to be deformed in the vertical direction and the annular seal projection 414 is likely to be vertically pressed against the valve seat surface 24a. As shown by X101 to X104 in the figure, in Example 7, the amount of displacement of the P portion, Q portion, R portion and S portion is smaller than that of Comparative Example 3. Therefore, Example 7 is less brittle than Comparative Example 3. As shown in Fig. 23, in the seventh embodiment, the amount of displacement of the annular sealing surface 414a is 4.887 占 퐉. The amount of displacement is 9.77 × 10 ^-4 times with respect to the center diameter A in the width direction of the annular seal surface 414a or 4.89 × 10 ^-2 times with respect to the width dimension B.

Fig. 11 shows the displacement amount analysis result of the second embodiment. In the valve body 341 of the second embodiment, as shown by X36 and X38 in the drawing, the amount of deformation of the upper portion of the annular seal projection 414 changes in a concentric manner around the axial line from the seventh embodiment have. Further, as shown by X31 and X32 in the figure, the amount of deformation of the P portion and the Q portion of the annular seal projection 414 is smaller than that of the second and seventh embodiments. Therefore, in the second embodiment, the cylindrical portion 411 and the annular seal projection 414 are more likely to be deformed in the vertical direction than in the seventh embodiment. As shown in Fig. 23, in the second embodiment, the displacement amount of the annular seal surface 414a is 4.037 mu m. The amount of displacement is 8.07 x 10 &lt; ^-4 &gt; times the diameter A in the transverse direction of the annular sealing surface 414a, or 4.04 x 10 &lt;&quot; ² &gt;

Therefore, even if the valve body has only a thickness F, the displacement amount of the annular seal surface 414a can be suppressed. This is presumably because, if the valve body has a large thickness F, the load received from the drive portion 3 is dispersed at a position spaced apart from the valve seat-side end face so as to act in the valve seat direction (vertical direction).

<(c) Regarding the effect given to the amount of displacement of the convex portion on the annular seal surface>

As shown in Fig. 3, the valve body 204 of the first embodiment is compared with the valve body 104 of the tenth embodiment except for the presence or absence of the convex portion 416. [ Embodiment 1 differs from Embodiment 10 only in that a convex portion 416 is formed. Since the tenth embodiment has been described above, the description is omitted. The convex portion 416 of the first embodiment has a base end diameter H of 4 mm. The convex portion 416 has a height I from the distal end face 416a to the valve seat side end face 1411a of 0.5 mm equal to the height C of the annular seal projection 414. [

The amount of displacement in the vicinity of the portions P to S of X1 to X24 in Fig. 10 is smaller than the amount of displacement in the vicinity of P to S in Example 10 shown in X11 to X14 in Fig. 19, It can be seen that the deformation of the annular seal projection 414 is smaller than in Example 10. [ As shown in Fig. 23, in the tenth embodiment, the amount of displacement of the annular seal surface 414a is 6.175 占 퐉. The amount of displacement is, annular sealing surface (414a) 6.18 × 10 ^-2 times the width B of, or, the width direction center of 12.40 × 10 relative to the diameter A ^- is ^four times. On the other hand, in the first embodiment, the amount of displacement of the annular seal surface 414a is 5.064 占 퐉. The amount of displacement is, annular sealing surface (414a) 5.06 × 10 ^-2 times the width B of, or, the width direction center of 10.10 × 10 relative to the diameter A ^- is ^four times. Therefore, in the first embodiment, by providing the convex portion 416, the displacement amount of the annular seal surface 414a is suppressed to 82% of the displacement amount of the annular seal surface 414a of the tenth embodiment.

In the first embodiment, the displacement amount (X26 in Fig. 10) above the P portion of the annular seal projection 414 is smaller than the displacement amount (see X16 in Fig. 19) above the P portion in the tenth embodiment. In the first embodiment, as shown by X26 and X27 in Fig. 10, the displacement amount changes more concentrically about the axis than the tenth embodiment. Therefore, in Example 1, it can be seen that the vicinity of the valve seat side end face 1411a of the valve body 241 is less likely to be deformed in the radially outward direction (the valve body is easily deformed in the vertical direction to which the seal load is applied) .

Therefore, in the first embodiment, since the valve seat side end face 1411a is deformed to be bent toward the valve seat side by providing the convex portion 416, and the annular seal projection 414 is deformed And the amount of displacement of the annular sealing surface 414a can be reduced. This is considered to be because the central portion of the cylindrical portion 1411 is reinforced by the convex portion 416 in the first embodiment, and the rigidity is higher than that of the tenth embodiment.

The inventors fabricated the valve body 204 shown in Fig. 5 based on the first embodiment, and tested the particles against the valve body 204. Fig. The results of this test are shown in Fig. Since the particle test method is the same as the particle test described above, the description is omitted.

As shown in Fig. 24, the particles measured by the valve element 204 during the particle test were 4.44 particles per mL. Therefore, the valve element 204 is less likely to generate particles than the valve element 104. Further, the valve body 204 has a smaller number of particles measured in the particle test than the valve body 104 by a factor of four. Therefore, the valve element 204 is provided with the convex portion 416, so that the amount of particles can be reduced.

The inventors photographed a micrograph of the annular sealing surface 414a with respect to the valve body 204 after the completion of the particle test. When the magnification of the microscope photograph is set to 500 times, the valve body 204 has no burr in the Q portion of the annular seal surface 414a and the R portion. The inventors also confirmed the state of the valve element 204 near the Q portion of the annular seal surface 414a by increasing the magnification of the microscope photograph from 500 to 2000 times. A micrograph and an image of the valve body 204 are shown in Figs. 28 and 29. Fig. As shown by Z4 in Fig. 28 and Fig. 29, the valve body 204 can not confirm the corrugation degree, the scratch degree and the burr at the Q portion of the annular seal surface 414a. In addition, the valve body 204 is in a state in which concave and convex portions of the surface of the Q portion are in a fused state. Therefore, it is considered that the valve element 204 can suppress or prevent the generation of fine particles that can not be measured by the particle counter as well as the particles that can be measured by the particle counter.

<(d) About the effect of the annular groove on the amount of displacement of the annular seal surface>

As shown in Fig. 3, the eighth and ninth embodiments in which only the presence or absence of the annular concave groove 415 is compared are compared. In the eighth embodiment, an annular concave groove 1144 is formed between the convex portion 1143 and the annular seal projection 414. The convex portion 1143 has a base end diameter of 4 mm and a height I of 0.4 mm. In the ninth embodiment, the annular concave groove is not formed between the convex portion 7416 and the annular seal projection 414. [ The height I of the convex portion 7416 is the same as that of the convex portion 1143.

18 shows the displacement amount analysis result of the ninth embodiment. The deformation generated in the radially outward direction of the convex portion 7416 of the valve body 741 is directly transmitted to the annular seal projection 414 as indicated by X76. As a result, as shown by X71 to X74 in the figure, the annular seal projection 414 is extruded by the convex portion 7416 in the radially outward direction. As shown in Fig. 23, in the ninth embodiment, the displacement amount of the annular seal surface 414a is 4.302 占 퐉. The amount of displacement is an annular sealing surface (414a) in the width direction center of 8.60 × 10 ^-4 times the diameter of A, or, 4.30 × 10 ^-2 times the width B.

17 shows the displacement amount analysis result of the eighth embodiment. The deformation generated in the radially outward direction in the convex portion 1143 of the valve body 1141 is hardly transmitted from the annular concave groove 1144 to the annular seal projection 414. [ As a result, as shown by X111 to X115 in the drawing, the annular seal protrusion 414 mainly deforms in the vertical direction, and the annular seal surface 414a is deformed in the direction substantially perpendicular to the valve seat surface 24a It pushes. As shown in Fig. 23, in Example 8, the amount of displacement of the annular seal surface 414a is 3.736 占 퐉. The amount of displacement is 7.47 x 10 &lt; ^-4 &gt; times the diameter A in the width direction of the annular sealing surface 414a, or 3.74 x 10 &lt;&quot; ² &gt;

Thus, by forming the annular recessed groove between the convex portion and the annular seal projection, it is possible to suppress the amount of displacement of the annular seal face in the radially outward direction of the valve body having only the convex portion.

< (e) Effect of the base end diameter H on the amount of displacement of the annular seal surface >

As shown in Fig. 3, the first embodiment and the thirteenth embodiment in which only the base end diameter H is different are compared. In the first embodiment, the proximal end diameter H of the convex portion 416 is set to 4 mm, which is the same as the detailed diameter J. In Example 13, the proximal end diameter H of the convex portion 944 is set to 2 mm, which is smaller than the detailed diameter J (4 mm). The annular concave groove 415 of the first embodiment is formed to have a wider width than the annular concave groove 945 of the thirteenth embodiment.

22 shows the displacement amount analysis result of the thirteenth embodiment. The valve body 943 is deformed in the direction of the valve seat in the range of the convex portion 944 as indicated by X96 in the drawing. However, as indicated by X97 in the drawing, the valve body 943 is deformed outwardly in the radial direction on the outer side of the convex portion 944 and on the inner side of the outer peripheral surface 413a of the neck portion 413 have. The deformation is directly transmitted to the outer peripheral surface 411b of the cylindrical portion 1411 through the upper portion of the annular seal projection 414 as indicated by X98 in the drawing. As shown by X91 to X94 in the drawing, the annular seal protrusion 414 has a larger amount of deformation than the inner circumferential surface 414b on the outer circumferential surface 414c. As shown in Fig. 23, in Example 13, the amount of displacement of the annular seal surface 414a is 6.162 占 퐉. This amount of displacement is 12.30 x 10 &lt; ^-4 &gt; times the diameter A in the width direction of the annular seal surface 414a or 6.16 x 10 &lt; ^-2 &gt;

On the other hand, as shown in Fig. 10, in the first embodiment, as compared with the thirteenth embodiment, the amount of displacement changes in a concentric manner around the axis of the valve body 241 as a whole. As shown by X21 to X26 in the figure, the amount of deformation of the valve element 204 outside the P portion of the annular seal projection 414 is smaller than that of Example 13. As shown by X21 to X24, the amount of deformation of the valve body 204 is smaller than that of Example 13 in the P portion, Q portion, R portion and S portion. As shown in Fig. 23, in the first embodiment, the amount of displacement of the annular sealing surface 414a is 5.064 占 퐉. This amount of displacement is 10.10 x 10 &lt; ^-4 &gt; times the diameter A in the width direction of the annular seal surface 414a and 5.06 x 10 &lt; ^-2 &gt;

Therefore, by setting the base end diameter H to the specific diameter J or more, the amount of displacement of the annular seal surface can be suppressed. This is presumably because the convex portion 416 can support the entire load of the driving portion and disperse it widely.

< (f) The effect of the convex portion height I on the amount of displacement of the annular seal surface >

As shown in Fig. 3, the first, the eleventh and the twelfth embodiments in which only the height I of the convex portion is different are compared. In Embodiment 1, the height I of the convex portion 416 is 0.5 mm, which is equal to the height C of the annular seal projection 414. In the eleventh embodiment, the height I of the convex portion 1243 is 0.35 mm which is 0.7 times the height C of the annular seal projection 414. In the twelfth embodiment, the height I of the convex portion 1343 is 0.3 mm which is 0.6 times the height C of the annular seal projection 414. Figs. 10, 20, and 21 show the displacement amount analysis results of Examples 1, 11, and 12. Fig.

The deformation of the convex portion 416 is blocked by the annular concave groove 415 and is hardly transmitted to the annular seal protrusion 414 as shown by X26 and X27 in Fig. 10, and the annular seal protrusion 414, Are mainly deformed in the vertical direction. On the other hand, as shown by X126 and X128 in FIG. 20 and X138 in FIG. 21, in Examples 11 and 12, the deformation in the radially outward direction of the convex portions 1243 and 1343 crosses the annular concave grooves 1244 and 1344 The annular seal protrusion 414 is easily transferred to the upper portion of the figure. As shown by X123 in Fig. 20, in the eleventh embodiment, the amount of displacement of the R portion is larger than that of the first embodiment. 21, the amount of displacement of the outer circumferential surface 414c of the annular seal projection 414 is larger than those of Examples 1 and 10, as shown by X133 in Fig. As shown in Fig. 23, the amount of displacement of the annular seal surface 414a is 5.064 占 퐉 for Example 1, 5.644 占 퐉 for Example 11, and 5.678 占 퐉 for Example 12. Accordingly, the convex portion 416 has a greater height I, so that the amount of displacement of the annular seal surface 414a is suppressed. This is considered to be because the deformation of the convex portion is widely dispersed and the deformation amount transmitted to the annular seal surface 414a can be suppressed as the height I is higher. Further, it is considered that the annular concave groove is formed deep, and deformation of the convex portion is hardly transmitted to the annular seal projection.

<(g) The effect of the combination of the end face diameter D and the thickness F on the displacement amount of the annular seal face>

As shown in Fig. 3, Examples 2 and 3 having different end face diameter D and thickness F are compared. In Example 2, the end face diameter D is 7.5 mm and the thickness F is 4.5 mm. On the other hand, in Example 3, the end face diameter D is 8.5 mm and the thickness F is 5.4 mm. Figs. 11 and 12 show the displacement amount analysis results of Examples 2 and 3. Fig.

The third embodiment is different from the second embodiment (see X31 to X35 in FIG. 11) in that the amount of displacement of the P, Q, R and S portions indicated by X41 to X44 in FIG. 12 is smaller than that of Example 2 And is deformed in the vertical direction. In addition, the valve body portion 440 of the third embodiment has a displacement amount that is concentric with the axis of the valve body portion 340 of the second embodiment. As shown in Fig. 23, in Example 2, the displacement of the annular seal surface 414a was 4.037 mu m. The amount of displacement is, annular sealing surface (414a) in the width direction center diameter of about 8.07 × 10 ^-4 times A, or, 4.04 × 10 for the width dimension B of ^- a factor ^{of two.} On the other hand, in Example 3, the amount of displacement of the annular seal surface 414a was 3.224 占 퐉. The amount of displacement is 6.45 x 10 ^-4 times with respect to the center diameter A in the width direction of the annular seal surface 414a or 3.22 x 10 ^-2 times with respect to the width dimension B.

Therefore, in the third embodiment, the deformation of the columnar section 4411 and the valve seat side end surface 4411a is smaller than that of the second embodiment, and the annular seal projection 414 can be pressed perpendicularly to the valve seat surface 24a . Further, in the third embodiment, the annular seal projection 414 is harder to be deformed by being vertically pressed against the valve seat surface 24a than in the second embodiment, and the displacement amount of the annular seal surface 414a is suppressed. This is because the end face diameter D and the thickness F of the third embodiment are larger than those of the second embodiment so that the load of the drive portion 3 is widely dispersed at a position apart from the valve seat side end face 4411a, 414 can be pressed vertically against the valve seat 24.

The inventors fabricated the valve bodies 304 and 404 based on Examples 2 and 3, and conducted a particle test. The method of particle test is the same as that of the above-described particle test, and a description thereof will be omitted. The results of this particle test are shown in Fig.

As shown in Fig. 24, the number of particles measured by the valve body 304 during the particle test was 2.22 per 1 mL. The number of these particles is reduced to about one-ninth in the tenth embodiment. On the other hand, as shown in Fig. 24, in the valve element 404, particles were not measured during the particle test. Therefore, as the diameter D of the end face of the cylindrical portion 411 and the thickness F are increased, the effect of suppressing the particles increases. This is because the rigidity increases.

Further, the inventors photographed a microscope photograph of the annular seal surface 414a at a magnification of 2000 times with respect to the valve bodies 304 and 404 which finished the particle test. In all of the valve bodies 304 and 404, no burr was confirmed on the annular seal surface 414a. The valve body 404 has a smooth surface of the Q portion as compared with the valve body 304. This is considered to be because the valve body 404 is processed such that the annular seal projection 414 is pressed in the vertical direction to be smoother than the valve body 304.

Therefore, it is considered that, as the diameter D of the end face and the thickness F are larger, the valve body can suppress or prevent the generation of fine particles that can not be measured by the particle counter as well as the particles that can be measured by the particle counter.

< (h) Effect of the combination of the convex portion and the end face diameter D on the amount of displacement of the annular seal surface >

However, as in Embodiment 3, when the end face diameter D is increased, the diaphragm chamber 22 is widened, so that the valve body 21 becomes larger. Further, since the fluid pressure acting on the end surface 4411a of the valve seat side is increased, the driving portion becomes larger in order to strengthen the seal load. On the other hand, if the thickness F is large, the retention portion tends to be formed in the diaphragm chamber 22. Further, since the diaphragm chamber 22 is widened, the valve body 21 becomes large. Therefore, as shown in Fig. 3, the inventors analyzed the amount of displacement for Example 4 in which the end face diameter D and the thickness F were smaller than those in Example 3 and the convex portion 416 was provided. Fig. 13 shows the displacement amount analysis result of the valve element 4 of the fourth embodiment.

As shown in Fig. 3, in Example 3, the end face diameter D is 8.5 mm, the thickness F is 5.4 mm, and the convex portion is not provided. On the other hand, in Example 4, the end face diameter D is 7.5 mm, the thickness F is 4.5 mm, and the convex portion 416 is provided. Figs. 12 and 13 show the displacement amount analysis results of Examples 3 and 4. Fig.

As shown in Fig. 13, in the valve body 41 of the fourth embodiment, the rigidity of the center portion is increased by the convex portion 416, and compared with Example 3 (see Fig. 12), the central portion is deformed in the radially outward direction it's difficult. 13, the valve body 41 is deformed by the annular concave groove 415 even when the convex portion 416 is deformed in the radially outward direction, and the annular seal projection 414 is deformed by the annular concave groove 415, . 13, the amount of displacement of the P portion, the Q portion, the R portion, and the S portion of the annular seal projection 414 is the same as the displacement amount of the annular seal projection 414 in Example 3 X41 to X44 of Fig. 23, the amount of displacement of the annular sealing surface 414a is 3.687 占 퐉. In the third embodiment, the amount of displacement of the annular sealing surface 414a is 3.224 占 퐉.

As described above, in the fourth embodiment, the convex portion 416 and the annular concave groove 415 are provided even if the end face diameter D is reduced to about 0.88 times as compared with the third embodiment and the thickness F is reduced to about 0.83 times as compared with the third embodiment The amount of displacement of the annular sealing surface 414a is the same as that of the third embodiment. Therefore, in the fourth embodiment, the drive part 3 and the valve body 21 can be made compact as compared with the third embodiment. As a result, in the fourth embodiment, the amount of displacement of the annular seal surface 414a is reduced to reduce wear, particles can be suppressed, and the valve size can be made compact. In the fourth embodiment, the deterioration of the valve body 41 is suppressed, so that the initial sealing force can be maintained for a long time, and the maintenance interval of the valve can be widened.

< (i) With respect to the effect of the combination of the convex portion, the thickness F and the height G on the amount of displacement of the annular seal surface,

As shown in Fig. 3, Examples 4, 5 and 6 having different thicknesses F and G are compared. In Embodiments 4, 5 and 6, the position of the T portion and the convex portion 416 and the annular concave groove 415 are similarly formed. In Examples 4, 5, and 6, the size of the thickness F is adjusted by the height G and the inclination angles of the shoulders 412, 543, and 643. In Example 4, the thickness F is 4.5 mm, which is 0.9 times the center diameter A (5 mm) in the width direction of the annular sealing surface 414a. In Example 4, the height G is 2.65 mm. In the fifth embodiment, the thickness F is 4.0 mm which is 0.8 times the center diameter A (5 mm) in the width direction of the annular seal surface 414a. In Example 5, the height G is 2.15 mm. In Example 6, the thickness F is 3.5 mm, which is 0.7 times the central diameter A (5 mm) in the width direction of the annular sealing surface 414a. In Example 4, the height G is 1.65 mm. Figs. 13 to 15 show the results of displacement amount analysis of the valve bodies 4, 504, and 604 of the fourth to sixth embodiments.

As shown in Figs. 13, 14, and 15, in the fourth, fifth, and sixth embodiments, the central portion of the valve bodies 41, 541, and 641 is increased in rigidity by the convex portion 416, . The deformation in the radially outward direction generated in the convex portion 416 is hardly transmitted to the annular seal projection 414 by the annular concave groove 415. [ As shown in Figs. 13, 14, and 15, the displacement amounts of the valve bodies 41, 541, and 641 are changed concentrically about the axial line, and are easily deformed in the vertical direction. The deformation of the valve seat side end faces 411a, 5411a, and 6411a is suppressed to the same degree as shown by X5 to X7 in Fig. 13, X55 to X57 in Fig. 14, and X65 to X67 in Fig. Is vertically pressed against the valve seat surface 24a. As shown by X1 to X4 in Fig. 13, X51 to X54 in Fig. 14 and X61 to X64 in Fig. 15, in Examples 4, 5 and 6, the amount of displacement of points P, Q, R, And the annular seal projections 414 are deformed in the vertical direction. As shown in Fig. 23, in the fourth embodiment, the amount of displacement of the annular seal surface 414a is 3.687 占 퐉. In the fifth embodiment, the amount of displacement of the annular seal surface 414a is 4.100 mu m. In Example 6, the amount of displacement of the annular seal surface 414a is 4.685 占 퐉.

Therefore, even if the volume of the diaphragm chamber is increased by reducing the height G of the valve body, the amount of displacement of the annular seal surface can be suppressed by securing the thickness F by increasing the inclination of the shoulder portion. Further, since the valve body has a low height G and a large inclination of the shoulder, it is difficult for the fluid to stay in the diaphragm chamber. As a result, it is difficult for the retained fluid to be deteriorated or solidified to become particles.

<Relation between the amount of displacement of the annular seal surface and the number of particles>

From the results of the particle test described above, the relationship between the amount of displacement of the annular seal surface and the number of particles generated is summarized as shown in Fig. As shown in Fig. 24, as the amount of displacement of the annular seal surface 414a is reduced to 6.175 mu m, 5.064 mu m, 4.037 mu m, and 3.224 mu m, the amount of generated particles is reduced to 17.78, 4.44, 2.22, and 0, respectively. In the untreated sample with the displacement amount of the annular seal surface 414a exceeding 6.175 占 퐉 and 9 占 퐉 or less, the number of generated particles suddenly increases to 797.8. Therefore, by setting the displacement amount of the annular seal surface 414a to 6.175 mu m or less, the valve element can effectively reduce the particles.

Particularly, as shown in Figs. 26 to 29, the valve element 104 of the tenth embodiment in which the amount of displacement of the annular seal surface 414a is 6.175 占 퐉 and the valve element 104 of the embodiment 1 in which the displacement amount of the annular seal surface 414a is 5.064 占 퐉 The valve body 204 of the valve body 204 of the valve body 204 is less susceptible to roughing of the annular seal surface 414a and burrs are less likely to occur. Therefore, it is considered that the valve element 204 of the first embodiment can more effectively suppress or prevent the generation of fine particles from the annular seal surface 414a than the valve element 104 of the tenth embodiment. Therefore, the fluid control valve has a shape in which the amount of displacement of the annular seal surface is slightly smaller than that of the valve body, so that the cause of the particle itself can be excluded even if the particle as the semiconductor manufacturing problem is miniaturized. In addition, it is possible to reduce the maintenance burden on the fluid control valve 1 by lengthening the life of the valve body.

<Others>

The inventors have found that the valve seat side end face 411a is flat without forming the annular seal protrusion 414 on the valve seat side end face 411a of the diaphragm valve body 104, The convex portion is formed along the convex portion. However, in this configuration, it is not possible to reduce wear and particles on the annular seal surface that occurs at the valve closing time, as compared with the diaphragm valve body 104 of the present embodiment.

B. Second Embodiment

Next, a fluid control valve according to a second embodiment of the present invention will be described. The fluid control valve of the second embodiment differs from the diaphragm valve body 4 (fourth embodiment) of the fluid control valve 1 of the first embodiment only in the material of the valve body. Here, the valve body of the second embodiment is denoted by &quot; 4A &quot;, and the other elements are the same as those used in the first embodiment.

The valve element 4A of the second embodiment is formed in the same shape as the diaphragm valve element 4 of the first embodiment by cutting a round bar made of PFA. PFA has a higher hardness than PTFE and is hard to be worn. Therefore, the valve element 4A is less likely to deform the cylindrical portion 411 and the annular seal protrusion 414, even when the seal load is applied, as compared with the diaphragm valve element 4 made of PTFE according to the first embodiment. Therefore, the fluid control valve of the second embodiment is less likely to cause the annular seal surface 414a of the valve element 4A to rub against the valve seat surface 24a as compared with the fluid control valve 1 of the first embodiment , The abrasion due to the deformation of the valve element 4A which occurs at the time of closing the valve is suppressed, so that the generation of particles can be reduced.

Here, the inventors photographed a microphotograph on each annular seal surface 414a of the valve element 4A and the diaphragm valve element 4, respectively, at the initial time before use and after opening and closing the valve 5,000 times. The valve element 4A hardly changes the annular sealing surface 414a at the initial time and after the 5000th operation, and wrinkles and scratches were hardly observed on the annular sealing surface 414a. On the other hand, when the diaphragm valve body 4 was operated 5,000 times, fine wrinkles and scratches were confirmed near the inner edge of the annular seal surface 414a. Therefore, when the annular seal protrusion 414 is formed of PFA, abrasion of the annular seal surface 414a generated when the valve is closed can be suppressed or reduced, and it becomes difficult to generate fine particles.

In addition, the inventors performed a wear particle collection test on the valve body 4A and the diaphragm valve body 4. [ The test apparatus includes, in order from the upstream side, a primary filter that removes foreign matter of 5 mu m or more, a fluid control valve equipped with a valve body 4A or a fluid control valve with a diaphragm valve body 4 ], And a secondary filter for removing foreign substances of 50 nm or more. The test was performed by supplying 40 ml of pure water to the primary filter at a rate of 30 ml per minute and then performing the opening and closing operations of 40,000 times to the test object and measuring the number of particles trapped by the secondary filter. Since the primary filter removes the foreign substances contained in the pure water, the particles collected in the secondary filter are considered to be generated by the wear of the valve bodies 4 and 4A.

As a result of the test, in the fluid control valve equipped with the diaphragm valve body 4, the number of worn particles was 41. On the other hand, in the fluid control valve equipped with the valve element 4A, the number of particles of wear particles was 14. Therefore, the valve element 4A formed of PFA was able to reduce the number of particles of wear particles by 65%, as compared with the diaphragm valve element 4 formed of PTFE. From this test result, it was confirmed that the ring-shaped seal protrusion 414 is less likely to generate abrasive particles when formed of PFA than that formed of PTFE.

C. Third Embodiment

Next, a fluid control valve according to a third embodiment of the present invention will be described. 31 is a sectional view of a valve body 9 used in a fluid control valve according to a third embodiment of the present invention. 32 and 33 show the valve bodies 109 and 209 of the first and second modified examples. The valve bodies 9, 109, and 209 are different from the valve body 4A of the second embodiment in that the valve bodies 9, 109, and 209 are formed by combining two parts formed of different materials. ). In the following description, the same components as those of the second embodiment are denoted by the same reference numerals as those of the second embodiment, and description thereof will be omitted, and differences from the second embodiment will be mainly described.

As described in the second embodiment, since the valve element 4A is formed of PFA, the wear of the annular seal surface 414a generated at the time of closing the valve is reduced, and generation of abrasion particles can be suppressed. However, it is difficult to form PFA by cutting due to the difficulty of obtaining the material. 31, the valve body 9 according to the third embodiment is configured such that the gap between the neck portion 413 of the valve body 93 and the shoulder portion 412 (the valve body portion 410) (91) and a second part (92). The first part 91 is formed of PTFE and the second part 92 is formed of PFA and the first part 91 and the second part 92 are integrated by insert molding. The first component 91 includes a thin film portion 42, an outer rim portion 43 and a neck portion 413 of the valve body 93. On the other hand, the second component 92 has the shoulder 412 of the valve body 93, the cylindrical portion 411, the annular seal projection 414, the annular concave groove 415 and the convex portion 416.

PFA is difficult to melt-mold with PTFE. PFA has a lower melting point than PTFE. On the other hand, PTFE is easy to obtain a material, and molding by cutting is easier than PFA. Therefore, the valve element 9 is formed by cutting the round bar made of PTFE. The molten PFA is introduced into the periphery of the connecting convex portion 91a in the state where the connecting convex portion 91a formed to protrude in the axial direction on the first part 91 is inserted into the mold, And then solidifying it. As a result, the cylindrical portion 411, the annular seal projection 414, the annular concave groove 415, and the convex portion 416 of the second component 92 are simply and highly precisely formed by melt molding. The first component 91 having the neck portion 413 is formed of a resin having a hardness lower than that of the PFA (for example, PTFE), and the annular seal protrusion 414 is provided. Since the second component 92 to be coupled is formed of PFA, the annular seal protrusion 414 is easy to form the valve body 9 formed of PFA.

The valve element 9 has almost no clearance between the first part 91 and the second part 92 since the first part 91 is insert-molded into the second part 92. [ The valve body 9 is formed such that concave and convex portions are circumferentially formed on the outer circumferential surface of the connecting convex portion 91a and the second component 92 and the first component 91 are coupled . Thereby, even if the fluid control valve repeats the valve opening / closing operation, a gap is not likely to be generated between the second component 92 and the first component 91. Therefore, in the fluid control valve for mounting the valve element 9, it is difficult for fine particles to enter between the first part 91 and the second part 92, (92) and hard to generate particles. Since the annular seal protrusion 414 and the cylindrical portion 411 are formed of PFA and are hard to be deformed in the valve element 9, wear of the annular seal surface 414a, which is generated when the valve is closed, is suppressed, Can be reduced.

The valve body 109 of the first modification shown in Fig. 32 has a press-fitting groove 191a formed annularly in the valve seat-side end face 411a of the first component 191, The ring-shaped second component 192 is press-fitted. The annular seal protrusion 414 is constituted by the second component 192. The first component 191 is formed of PTFE and the second component 192 is formed of PFA. Since the annular seal protrusion 414 is formed of PFA and is not easily deformed, the valve element 109 reduces the generation of particles by suppressing abrasion of the annular seal surface 414a generated at the valve closing time. Further, in the valve element 109, a clearance is formed between the inner wall of the press-fitting groove 191a and the second component 192, and there is a risk that the valve body 109 may enter the valve. The valve body 109 is configured to press the second part 192 into the press-fitting groove 191a to engage the first part 191 and the second part 192, , The annular seal projections 414, the annular recessed grooves 415, and the projections 416 may be varied in size.

The valve body 209 of the second modification shown in Fig. 33 has a male screw portion 291a projecting from the first component 291 and a female screw portion 292a of the second component 292 ) Is different from the valve element 9 of the third embodiment. Since the cylindrical portion 411 and the annular seal protrusion 414 are formed by the PFA and are not easily deformed, the valve body 209 can suppress the wear of the annular seal surface 414a, The occurrence can be reduced. Also, in the valve element 209, a gap is necessarily generated between the male screw portion 291a and the female screw portion 292a, and there is a possibility that fine dust enters the gap.

Therefore, when the valve body is constituted by two parts, it is the highest particle suppressing effect that the first part 91 and the second part 92 are integrally formed by insert molding, like the valve body 9. The valve bodies 109 and 209 are formed so as to have the same particle suppression as that of the valve body 9 when the gap formed between the first parts 191 and 291 and the second parts 192 and 292 is filled with resin or the like, Effect is obtained. In addition, if the insert is a press-fit or a screw-fastening, a mold for insert is unnecessary, and it can be applied to any shape, so that the versatility is high.

The present invention is not limited to the above-described embodiment, and various applications are possible.

(1) For example, although the fluid control valve 1 is applied to a semiconductor manufacturing apparatus in the above embodiment, it may be applied to other apparatuses.

(2) For example, in the above embodiment, the valve body portion 410 has the cylindrical portion 411 and the shoulder portion 412, but the valve body may be conical.

(3) For example, in the above-described embodiment, the fluid control valve 1 is configured as a diaphragm valve. However, it is also possible to provide a valve body that does not include a thin film portion such as a bellows valve or an electromagnetic valve, The shape near the seal projection 414 may be applied to suppress the amount of displacement of the annular seal surface.

(4) For example, in the above embodiment, the thin film portion 42 is connected to the neck portion 413. 34, the thin film portion 42 may be connected to the connecting portion between the shoulder 412 and the neck portion 413 as shown in the valve body 4B of the third modification shown in Fig. 34, It may be connected to the cylindrical portion 411 as shown in the valve member 4C of the fourth modification shown in Fig.

(5) For example, in the above embodiment, the male screw portion 413b of the diaphragm valve body 4 is screwed to the female screw portion 35c of the drive portion 3, so that the diaphragm valve body 4 and the drive portion 3 Respectively. On the other hand, as in the valve body 4D of the fifth modification shown in Fig. 36, a female screw portion 420 is formed in the neck portion 413, and a male screw portion screwed to the female screw portion 420 is screwed into the driving portion 3 , The valve body 4D may be connected to the driving unit 3. In this case,

(6) The material of the diaphragm valve body 4 is modified PTFE (modified polytetrafluoroethylene) hardness D55 to 60 or PFA (tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer) hardness D60 to 64 do.

(7) The material of the valve body 21 (valve seat 24) may be PTFE (polytetrafluoroethylene) hardness D53 to 58 or modified PTFE (modified polytetrafluoroethylene) hardness D55 to 60.

(8) There may be chamfering of the corner of the annular seal surface 414a or picking of the corner R face. In this case, the diameter of the central position between the inner periphery and the outer periphery of the flat surface corresponds to the &quot; diameter of the annular seal portion &quot;. The annular seal surface 414a may be an annular seal portion in which the distal end portion of the annular seal projection 414 has an R shape in addition to the flattened surface. In this case, the diameter of the apex portion of the annular seal portion facing the valve seat corresponds to the &quot; diameter of the annular seal portion &quot;. Even in these cases, if the shape around the annular seal protrusion 414 is configured so that the compression deformation occurring in the valve body 41 of the diaphragm valve body 4 is generated only in the vertical direction (for example, 411, the convex portion 416, the annular concave groove 415, and the like), the same operational effects as those of the above-described embodiment can be obtained.

(9) The bottom surface of the annular concave groove 415 may be equal to or substantially the same as the valve seat side end surface 411a.

(10) The valve seat side end surface 411a is not limited to a flat shape but may be an inclined surface or a curved surface.

(11) The amount of displacement of the annular seal surface 414a necessary for suppressing the generation of particles is not limited to the radially outward displacement amount, but may be the inner displacement amount.

(12) The annular seal projection may be formed in a cylindrical shape and the thickness in the radial direction from the valve seat side to the half-valve seat side may be constant.

(13) The shape of the projection of the annular seal projection may be a shape different from that of the wall on the side of the radial axis center of the valve body and a shape of the wall on the side of the radial axis center. The shape of the wall and the height of the projection may be set so that the displacement amount of the annular seal face (annular seal portion) is reduced.

(14) D / A is not limited to the above-described embodiment, but may be 1.35, 1.40, 1.45 or the like. As shown in Fig. 25, when D / A is increased, the amount of displacement of the annular seal surface 414a is lowered, and generation of particles can be suppressed.

1: Fluid control valve
3:
4: Diaphragm valve body (example of valve body)
24: Valve seat
414: annular seal projection
414a: annular seal face (an example of the annular seal portion)
415: annular concave groove
416:
A: diameter in the width direction of the annular seal face
B: Diameter width dimension of annular seal face
D: Diameter of the valve seat side end face
F: thickness in the axial direction from the radial center position of the annular seal face
H: diameter of the proximal end of the convex portion
I: height of convex portion
J: Diameter of the thinnest portion between the pressure receiving surface subjected to the load from the driving portion and the end surface on the valve seat side

Claims (12)

A driving unit,
A valve body having a first port, a second port and a valve seat,
A valve body formed in a columnar shape and connected to the driving portion,
Wherein the valve body has an annular seal protrusion which is annularly projected on the valve seat side end face located on the valve seat side and which is pressed against the valve seat to seal the annular seal protrusion, and at least the annular seal protrusion is made of fluororesin that,
Wherein the valve body has a displacement amount in which the annular seal portion is displaced in the radial direction when the annular seal portion is pressed against the valve seat by the drive portion is not more than 6.175 占 퐉. A driving unit,
A valve body having a first port, a second port and a valve seat,
A valve body formed in a columnar shape and connected to the driving portion,
Wherein the valve body has an annular seal protrusion which is annularly projected on the valve seat side end face located on the valve seat side and which is pressed against the valve seat to seal the annular seal protrusion, and at least the annular seal protrusion is made of fluororesin that,
Wherein the valve body has a displacement amount in which the annular seal portion is displaced in the radial direction when the annular seal portion is pressed against the valve seat by the drive portion is larger than a diameter of the annular seal portion when the valve seat is not in contact with the valve seat 12.4 x 10 &lt;&quot; ⁴ &gt; times or less. A driving unit,
A valve body having a first port, a second port and a valve seat,
A valve body formed in a columnar shape and connected to the driving portion,
Wherein the valve body has an annular seal protrusion which is annularly projected on the valve seat side end face located on the valve seat side and which is pressed against the valve seat to seal the annular seal protrusion, and at least the annular seal protrusion is made of fluororesin that,
Is 1.3 times or more the diameter of the annular seal portion when the diameter of the end surface on the valve seat side is not in contact with the valve seat. The fluid control valve according to claim 1 or 2, wherein the diameter of the end face on the valve seat side is 1.3 times or more of the diameter of the annular seal portion when the valve seat is not in contact with the valve seat. The fluid control valve according to claim 4, characterized in that the diameter of the thinnest portion of the valve body is smaller than the diameter of the annular seal portion. The fluid control valve according to claim 5, wherein the thickness of the valve body in the axial direction at the radial center position of the annular seal portion is 0.7 times or more of the diameter of the annular seal portion. The fluid control valve according to claim 5, wherein the valve body has a convex portion protruding in the valve seat direction from the valve seat side end face on the inside of the annular seal projection. The fluid control valve according to claim 6, wherein the valve body has a convex portion protruding from the valve seat-side end face in the direction of the valve seat inside the annular seal projection. The fluid control valve according to claim 7, wherein the convex portion has a proximal end portion connected to the valve seat-side end face at least equal to a diameter of the thinnest portion of the valve element. The fluid control valve according to claim 8, wherein the convex portion has a proximal end portion connected to the valve seat-side end face at least equal to a diameter of the thinnest portion of the valve element. The fluid control valve according to any one of claims 1 to 3, wherein the annular seal protrusion is formed of PFA. The fluid control valve according to claim 3, wherein the thickness of the valve body in the axial direction at the radial center position of the annular seal portion is 0.7 times or more of the diameter of the annular seal portion.

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