KR20160049963A - Mask mounting apparatus for deposition - Google Patents

Mask mounting apparatus for deposition Download PDF

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Publication number
KR20160049963A
KR20160049963A KR1020150136062A KR20150136062A KR20160049963A KR 20160049963 A KR20160049963 A KR 20160049963A KR 1020150136062 A KR1020150136062 A KR 1020150136062A KR 20150136062 A KR20150136062 A KR 20150136062A KR 20160049963 A KR20160049963 A KR 20160049963A
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KR
South Korea
Prior art keywords
mask
mounting
pressing
seating
base
Prior art date
Application number
KR1020150136062A
Other languages
Korean (ko)
Inventor
김영호
이재진
Original Assignee
에스엔유 프리시젼 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 에스엔유 프리시젼 주식회사 filed Critical 에스엔유 프리시젼 주식회사
Priority to JP2015209657A priority Critical patent/JP2016084537A/en
Priority to CN201510707277.2A priority patent/CN105543778A/en
Publication of KR20160049963A publication Critical patent/KR20160049963A/en

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    • H01L51/56—
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L51/0011—
    • H01L2251/56—

Abstract

The present invention relates to a mask mounting apparatus for deposition. In an apparatus for mounting a mask to which a substrate is aligned during a deposition process, the mask mounting apparatus for deposition according to the present invention comprises: a base mounting a mask on a mounting position on an upper surface thereof; and a mounting unit installed to the base, and having an accommodation surface accommodating a lower surface of the mask and a pressurizing surface pressurizing a side surface of the mask. The mounting unit allows the pressurizing surface to pressurize the mask by linking with the accommodation surface lowered when the mask is accommodated, so as to mount the mask by moving the mask to the mounting position. Accordingly, configuration of the apparatus is simple and the mask is automatically mounted on the mounting position with requiring additional power if the mask is accommodated on an accommodation member.

Description

[0001] MASK MOUNTING APPARATUS FOR DEPOSITION [0002]

The present invention relates to a deposition mask mounting apparatus, and more particularly, to a deposition mask mounting apparatus in which a mask is automatically mounted on a mounting position when the mask is placed on the mounting member, without requiring additional power, To a mask mounting apparatus.

With the revolution of information technology, which is represented by digital convergence and ubiquitous, the development of electronic devices is progressing remarkably fast. One of the core technologies is display technology. In recent years, there is an increasing demand for displays with better visibility, lower cost, and lower power consumption. Accordingly, an organic light emitting diode (OLED) is spotlighted next to a plasma display panel (PDP), a liquid crystal display (LCD), and the like.

An organic light emitting diode is a self-luminous device that emits light when current is applied. Its response speed is more than one thousand times faster than a liquid crystal display and its viewing angle is wide. In addition, there is no need for a back-ride, a color filter, and the like required for a liquid crystal display device, and a flexible display can be realized.

The organic thin film used in the fabrication of the organic light emitting diode is sequentially formed on the surface of the substrate by using a vacuum deposition method in a high vacuum state. In order to realize a full color display of an organic light emitting diode, a fine pitch deposition pattern is essential. In order to form such a deposition pattern, a mask having a pattern is used. In order to improve the accuracy of the deposition pattern, it is important that not only the pattern of the mask itself be precise, but also the substrate and the mask are mechanically precisely aligned. Accordingly, the mask is first fixed, and then the substrate is precisely aligned on the mask.

FIG. 1 is a schematic perspective view of a conventional vapor deposition mask fixing apparatus, and FIG. 2 is a view showing a state in which a mask of the vapor deposition mask fixing apparatus of FIG. 1 is fixed.

Referring to FIGS. 1 and 2, a conventional vapor deposition mask fixing apparatus 10 includes a mounting portion 11 and a pressing portion 12, which are mounted on a plate-shaped frame. When the mask M is inserted through the mask transfer arm (not shown), the mounting portion 11 moves upward and the mask M is seated on the upper surface. Thereafter, the mask M is moved to the upper surface of the frame . Thereafter, the mask 12 is finally fixed by pressing the mask M toward the fixing pin side.

However, such a conventional vapor deposition mask holding apparatus 10 requires a frame having a larger area to be provided with the configuration of the pressing unit 12 and the like, and also requires a motor for driving the pressing unit 12, And a control means for controlling the mutual operation of the pressing portion 11 and the pressing portion 12 are required. As a result, the structure of the apparatus becomes complicated, additional power is required, the process becomes complicated, and the wiring for driving the apparatus becomes complicated.

SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to solve the above-mentioned problems of the prior art, and it is an object of the present invention to provide an apparatus and a method for automatically mounting a mask on a mounting position, And to provide a wearing mask mounting apparatus.

According to the present invention, there is provided an apparatus for mounting a mask on which a substrate is aligned during a deposition process, the apparatus comprising: a base on which the mask is mounted on an upper surface mounting position; And a mounting member installed on the base, the mounting member including a mounting member for lowering the mask when the mask is seated, and a pressing member for transferring and mounting the mask to the mounting position by pressing the side surface of the mask in cooperation with the mounting member. The mask mounting apparatus according to claim 1,

Here, it is preferable that the seating member is rotated by a predetermined angle due to the load of the mask to be mounted, and the pressing member moves to the side of the mask by rotating in conjunction with the seating member.

The mounting portion may further include a connecting member that connects the seating member and the pressing member to each other and is rotatable.

Here, the base may be formed with a receiving groove, and the mounting portion may further include a fixing member installed in the receiving groove and rotatably coupled to the connecting member.

The mounting portion may further include a roller portion provided at an end of at least one of the seating member and the pressing member and rotatably installed.

Here, the roller portion may include: a first roller that forms a seating surface on which the mask is seated and facilitates movement of the mask onto the mounting position in contact with the outer surface; And a second roller which forms a pressing surface for pressing the mask and guides the mask placed on the outer surface to the seating surface side.

Here, the mounting portion is formed in a ball shape such that the mounting portion is rotatably fixed within the mounting member, a part of the mounting member is exposed to the outside to form a seating surface on which the mask is mounted, and the mounting A rotating ball portion for facilitating movement to a position; And a roller formed at an end of the pressing member, forming a pressing surface for pressing the mask, and guiding the mask to be seated to the seating surface side.

According to the present invention, there is provided an apparatus for mounting an evaporation mask, which is mounted on a mounting position automatically when the mask is mounted on the mounting surface, without requiring a simple configuration of the apparatus and requiring no additional power.

Further, since the mask placed on the mounting portion is lowered to the base side and the side surface is curved, it is possible to mount the mask precisely and simply.

In addition, even when the mask transfer arm does not allow the mask to be seated on the seating surface, the roller guides the mask onto the seating surface, so that the mask can be mounted without any moving means.

Further, since the structure of the apparatus is entirely simplified, wiring for driving the apparatuses is not required, and there is no problem such as restriction due to the relative position with respect to other structures.

1 is a schematic perspective view of a conventional vapor deposition mask mounting apparatus,
Fig. 2 is a view showing the operation of mounting the mask of the vapor deposition mask mounting apparatus of Fig. 1,
3 is a schematic perspective view of an apparatus for depositing an evaporation mask according to an embodiment of the present invention,
Fig. 4 is a front view of the vapor deposition mask mounting apparatus of Fig. 3,
Fig. 5 is a view showing a mounting portion of the vapor deposition mask mounting apparatus of Fig. 3,
FIG. 6 is a view showing a state of a mask mounting position error in the mask mounting apparatus shown in FIG. 3; FIG.
7 is a view showing the operation of the vapor deposition mask mounting apparatus of Fig.
8 is a perspective view of an apparatus for mounting an evaporation mask according to another embodiment of the present invention.

Hereinafter, a vapor deposition mask mounting apparatus according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

The apparatus for mounting an evaporation mask according to an embodiment of the present invention may be mounted on a mounting position automatically when the mask is seated on the mounting member so that the arrangement of the apparatus is simple and an additional power for mounting the mask is not required To a mask mounting apparatus.

FIG. 3 is a schematic perspective view of an apparatus for mounting an evaporation mask according to an embodiment of the present invention, FIG. 4 is a front view of the apparatus for mounting an evaporation mask of FIG. 3, Fig.

3 to 5, an apparatus for mounting a mask for vapor deposition according to an embodiment of the present invention includes a base 110, a mounting portion 120 and a mounting portion 120 mounted on the receiving groove 111 of the base 110 And a roller unit 130 installed in the main body 120.

Prior to explanation, the mask M applied in this embodiment is briefly described. The mask M includes a pattern portion formed with a fine pattern and a frame portion mounted around the pattern portion to fix the pattern portion and having a predetermined thickness. Since the pattern portion is an area through which the deposition source passes, the front and back surfaces must not be shielded. Therefore, the mask M mounting apparatus according to the present embodiment is equipped with the rim of the mask M.

The base 110 has a structure in which a mask M on which a substrate is aligned during a deposition process is mounted. The base 110 is provided in a flat plate shape. In this embodiment, So that it has an area larger than the area.

A plurality of receiving grooves 111 are formed in the base 110. The receiving groove 111 is formed at a predetermined depth inwardly from the upper surface of the base 110 and the mounting portion 120 is installed in the receiving groove 111. In the present embodiment, four receiving grooves 111 are formed so as to mount the mask on the upper surface of the base 110 by pressing both sides of the mask M, but the number is not limited.

Meanwhile, a through hole is formed in the center of the base 110 to allow the deposition source to pass therethrough. In this embodiment, the deposition apparatus is a bottom-up deposition apparatus in which an evaporation source is emitted upward from below the base 110, and a deposition source is moved to the substrate side through the mask M mounted on the top surface of the base 110, And a through hole is formed at the center of the base 110.

Further, a lift unit (not shown) may be installed on the base 110. The elevating portion (not shown) is configured to lower the mask M placed on the base 110 through the mask transfer arm (not shown) to seat the mask on the mounting portion 120. However, since the mask transfer arm (not shown) may be provided to seat the mask M on the mounting portion 120, a lift portion (not shown) may not be required in this case.

Fig. 5 is a view showing a mounting portion of the vapor deposition mask mounting apparatus of Fig. 3; 5, the mounting portion 120 is configured to automatically mount the mask M on the mount position of the upper surface of the base 110 when the mask M is seated on the mount member 121, A pressing member 122, a connecting member 123, and a fixing member 124. As shown in Fig.

The seating member 121 is provided in the receiving groove 111 to form a seating surface S on which the mask M placed above the base 110 through a mask transfer arm (not shown) is seated. A plurality of the seating members 121 are arranged so as to support the bottom edge of the mask M upward to form the seating surface S.

Before the mask is seated, the seating surface S is formed above the upper surface of the base. It is practically impossible to precisely mount the mask M on the mounting position when the mask transfer arm (not shown) inserts the mask M. Therefore, the mask M placed on the upper surface of the base 110 must be pressed and moved toward the mounting position do. Since the seating surface S and the pressing surface P are moved in conjunction with each other as the seating member 121 and the pressing member 122 rotate in conjunction with each other, the pressing surface P moves toward the side of the mask M The seating surface S is formed above the upper surface of the base so that the seating surface S can move to the upper surface side of the base 110. [

The seating member 121 is rotatable by a predetermined angle so that the mask M placed on the seating surface S can contact the upper surface of the base 110. That is, the seating member 121 is connected to the connecting portion 123 which is rotatably coupled to the fixing portion 124 by a hinge or the like, and is rotatable by a predetermined angle. When the mask M is seated on the seating surface S, The seating surface S is positioned in the same area as the upper surface of the base 110 by rotating the mask M by a predetermined angle by the load of the mask M. [

At this time, it is preferable that the seating member 121 is elastically supported upward. When the mask M is seated on the seating surface S, the seating member 121 is completely contained in the receiving groove 111 by turning at a predetermined angle around the connecting portion 123, and the mask M is not seated The seating surface S should be formed above the base 110, so that the seating member 121 is preferably elastically supported upward so as to protrude from the upper surface of the base.

The pressing member 122 forms a pressing surface P as a constitution for pressing and pressing the side surface of the mask M and transferring the mask M to the mounting position side. The pressing member 122 is rotatable by a predetermined angle by being connected to the connecting portion 123 at one end thereof and moves the pressing surface P to the side surface of the mask M by interlocking with the seating member 121. That is, the pressing member 122 rotates in accordance with the rotation of the seating member 121 to press the side surface of the mask M. [

On the other hand, the pressing member 122 is arranged so that the angle between the seating surface S and the pressing surface P has an angle corresponding to the angle between the lower surface and the side surface of the mask when the mask M is in contact with the upper surface of the base 110 . Thereby, the mask M can be mounted on the mounting position more precisely.

The pressing member 122 is provided to rotate in conjunction with the seating member 121 so that the seating member 121 is rotated by the mask M seated on the seating surface S and the seating member 121 The pressing member 122 is pivoted to press the side surface of the mask M so as to be mounted on the mounting position.

The mask M has a predetermined thickness and is in surface contact with the seating member 121 and the pressing member 122 so that the seating surface S, the pressing surface P, However, when the edge of the mask M is very thin, line contact is also possible, and the present invention is not limited to the above-described terms.

The connecting portion 123 is configured to allow the seating member 121 and the pressing member 122 to rotate at a predetermined angle and one end of the seating member 121 and the pressing member 122 are connected to each other. The connection portion 123 is rotatably coupled to the fixed portion 124 accommodated in the receiving groove 111 in a rotatable manner. The connecting portion 123 is not necessarily connected to the fixing portion 124 and may be directly connected to the base 110 in the receiving groove 111. However, since the fixing portion 124 is provided, It is possible to prevent the deflection phenomenon of the rotary shaft and the like.

The fixing portion 124 is fixed to the receiving groove 111 to prevent the seating member 121 and the pressing member 122 from being separated from the base 110 and to be rotatable by a predetermined angle. An insertion hole is formed in the fixing portion 124, and the connection portion 123 is inserted and rotatably provided.

Fig. 6 is a view showing a state of the mask mounting position error of the mask mounting apparatus shown in Fig. 3; Fig. Referring to FIG. 6, the roller unit 130 includes a first roller 131 and a second roller 132 for facilitating the movement of the mask M onto the mounting position.

The first roller 131 is provided at the end of the seating member 121 to facilitate movement of the mask M on the upper surface of the base 110 onto the mounting position. The first roller 131 is rotatably installed, and when the first roller 131 is installed, the first roller 131 forms the seating surface S.

When the mask M is seated on the seating surface S, the mask M is seated in one region of the first roller 131 so that the seating member 121 is rotated by the load, 111, whereby the mask M is brought into contact with the upper surface of the base 110. At the same time, the pressing member 122 moves to the mounting position by pressing the side surface of the mask M. At this time, the movement of the mask M is facilitated by the first roller 131.

The second roller 132 is moved in a direction in which the mask M is automatically positioned on the seating surface S when the mask M inserted through the mask transfer arm (not shown) is not seated on the seating surface S due to an error As shown in Fig. The second roller 132 is rotatably installed at the end of the pressing member 122. [ 6, when the mask M is seated on the upper surface of the pressing member 122 rather than the seating member 121 due to an operation error of the mask transfer arm (not shown), the second The mask M is automatically seated on the seating member 121, that is, the seating surface S by the roller 132. [

Hereinafter, the operation of the vapor deposition mask mounting apparatus according to one embodiment of the present invention will be described in detail.

7 is a view showing the operation of the vapor deposition mask mounting apparatus of Fig.

First, the mask M is positioned above the base 110 through a mask transfer arm (not shown). Thereafter, the elevating portion (not shown) is raised and lowered, the mask M is seated on the elevating portion (not shown), and the mask transfer arm (not shown) goes out of the apparatus.

The elevating portion (not shown) descends and the mask M is seated on the seating surface S formed by the seating member 121 or the first roller 131.

When the mask M is seated on the seating surface S, the seating member 121 rotates about the connecting portion 123 by the load of the mask M and is completely received in the receiving groove 111, (M) is brought into contact with the upper surface of the base 110. At the same time, the pressing member 122, which cooperates with the seating member 121, rotates around the connecting shaft 123 to press the side surface of the mask M. [

The mask M is pressed by the pressing member 122 in the state of being in contact with the base 110 and is transferred to the mounting position side. At this time, the movement of the mask M by the first roller 131 is easier.

Both sides of the mask M on the mounting position are pressed by the pressing member 122 so that the mask M is finally mounted on the base 110. [

Thus, according to the present invention, an apparatus for mounting an evaporation mask is provided, which is automatically mounted on a mounting position when the mask is mounted on the mounting member, without requiring a simple configuration of the apparatus and requiring no additional power.

Hereinafter, a vapor deposition mask mounting apparatus according to another embodiment of the present invention will be described with reference to FIG. In the following description, differences from the embodiments described with reference to Figs. 3 to 7 will be mainly described.

8 is a perspective view of an apparatus for mounting an evaporation mask according to another embodiment of the present invention.

In the embodiment described with reference to FIGS. 3 to 7, the roller 131 is formed at the end of the seating member 121 to form the seating surface S. On the other hand, as shown in the embodiment of FIG. 8, There is a difference in that the rotating ball portion 133 is formed such that a part of the upper surface of the member 121 is exposed.

The rotary ball portion 133 is rotatably fixed to the inside of the seating member 121 in a ball shape. Also, a part of the rotation ball portion 133 is exposed to the outside of the seating member 121, and a part of the exposed surface can form the seating surface S on which the mask M is seated. Similar to the roller 131 in Figs. 3 to 7, the rotation ball portion 133 facilitates the movement of the mask M when the side surface of the mask M is pressed by the pressing member 122. Fig.

3 to 7, when the roller 131 is used, the movement of the mask M is facilitated only in a direction in which the pressing member 122 is pressed. 8, the rotary ball portion 133 is rotatable in all the directions of up, down, left, and right because of ball rotation, so that when the pressing ball 122 is pressed by the pressing member 122, The mask M can be seated in the seating position while allowing the seated mask M to freely move.

The scope of the present invention is not limited to the above-described embodiments, but may be embodied in various forms of embodiments within the scope of the appended claims. It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the present invention as defined by the appended claims.

100: vapor deposition mask mounting apparatus 110: base
111: receiving groove 120: mounting portion
121: seat member 122: pressing member
123: connection part 124:
130: roller portion 131: first roller
132: second roller 133:
M: mask S: seat face
P: pressure face

Claims (7)

An apparatus for mounting a mask on which a substrate is aligned during a deposition process,
A base on which the mask is mounted on an upper surface mounting position; And
A mounting member installed on the base and including a mounting member for lowering the mask when the mask is seated and a pressing member for transferring and mounting the mask to the mounting position by pressing the side surface of the mask in cooperation with the mounting member; Wherein the mask mounting apparatus comprises: The method according to claim 1,
Wherein the seating member is rotated by a predetermined angle by a load of the mask to be mounted, and the pressing member is moved to the side of the mask by rotating in conjunction with the seating member. 3. The method of claim 2,
Wherein,
Further comprising: a connecting member that connects the seating member and the pressing member to each other and is rotatable. The method of claim 3,
A receiving groove is formed in the base,
Wherein the mounting portion further comprises a fixing member which is installed in the receiving groove and in which the connecting member is rotatably coupled. 5. The method according to any one of claims 1 to 4,
Wherein,
Further comprising a roller portion provided at an end of at least one of the seating member and the pressing member and rotatably provided. 6. The method of claim 5,
The roller unit
A first roller forming a seating surface on which the mask is seated and facilitating movement of the mask in contact with the outer surface onto the mounting position; And a second roller which forms a pressing surface for pressing the mask and guides the mask placed on the outer surface to the seating surface side. 5. The method according to any one of claims 1 to 4,
The mounting portion
The mask is rotatably fixed in position in a ball shape, a part of the mask is exposed to the outside of the seating member to form a seating surface on which the mask is seated, and the mask moves on the mounting position A rotating ball portion for facilitating the rotation of the rotor; And a roller formed at an end of the pressing member, forming a pressing surface for pressing the mask, and guiding the mask to be seated to the seating surface side.
KR1020150136062A 2014-10-28 2015-09-25 Mask mounting apparatus for deposition KR20160049963A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2015209657A JP2016084537A (en) 2014-10-28 2015-10-26 Vapor deposition mask mounting device
CN201510707277.2A CN105543778A (en) 2014-10-28 2015-10-27 Mask mounting apparatus for deposition

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR20140147605 2014-10-28
KR1020140147605 2014-10-28

Publications (1)

Publication Number Publication Date
KR20160049963A true KR20160049963A (en) 2016-05-10

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020150136062A KR20160049963A (en) 2014-10-28 2015-09-25 Mask mounting apparatus for deposition

Country Status (1)

Country Link
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200017217A (en) * 2018-08-08 2020-02-18 주식회사 오럼머티리얼 Transfer system of mask and producing method of mask integrated frame

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200017217A (en) * 2018-08-08 2020-02-18 주식회사 오럼머티리얼 Transfer system of mask and producing method of mask integrated frame

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