KR20160018783A - Substrate transfer device - Google Patents

Abstract

The substrate transport apparatus 100 includes a conveyor section 1 for transporting the substrate CB in the transport direction, first and second guide rails 2 and 3 spaced apart in the substrate width direction, And a second distance (D2) between the rails, based on the detected value of the motor, so as to calibrate the inclination of the substrate. And a control unit (6) configured to control the relative movement of the rails with respect to the second guide rails.

Description

[0001] SUBSTRATE TRANSFER DEVICE [0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate transport apparatus, and more particularly to a substrate transport apparatus for transporting an electronic circuit substrate along a guide rail.

2. Description of the Related Art [0002] Conventionally, a substrate transfer apparatus for carrying a substrate along a guide rail in an electronic circuit substrate production line is known. Such a substrate transport apparatus is disclosed, for example, in Japanese Patent No. 5084661. [

Japanese Patent No. 5084661 discloses a substrate conveying apparatus having a pair of guide rails opposed to each other in the substrate width direction perpendicular to the conveying direction and a pair of conveyors each provided on the pair of guide rails for conveying the substrate in the conveying direction Lt; / RTI > The pair of guide rails are composed of a fixed rail and a movable rail, and the movable rail is configured to be moved to the fixed rail side by the air cylinder. Accordingly, the substrate transport apparatus disclosed in Japanese Patent No. 5084661 is configured to sandwich the substrate between the movable rail and the fixed rail, thereby correcting the inclination in the horizontal plane of the substrate and the positional deviation in the substrate width direction.

Further, the substrate transfer apparatus is provided with a plurality of air cylinders and a plurality of displacement sensors so that the movable rails can evenly press the side end faces of the substrate (sandwich the substrate in parallel), and the detection And precisely adjusts the air pressure of each of the plurality of air cylinders based on the result.

Japanese Patent No. 5084661

However, in the conventional substrate conveying apparatus, there is a case where a configuration in which the interval between a pair of guide rails (and a pair of conveyors) is varied in accordance with the width of the substrate to be conveyed is employed. In this case, Japanese Patent No. 5084661 It is necessary to further provide a mechanism (an air cylinder, a displacement sensor, and the like) for moving the movable rail in addition to the variable mechanism of the rail interval, so that the number of parts increases and the apparatus configuration becomes complicated. Further, in the case where the movable rail is moved by the air pressure control, as is apparent from the point that it is necessary to provide a plurality of air cylinders and a plurality of displacement sensors in the substrate transport apparatus of Japanese Patent No. 5084661, And there is also a problem that it is difficult to precisely correct the inclination in the horizontal plane of the substrate.

It is an object of the present invention to provide a substrate transport apparatus capable of easily performing tilt correction of a substrate without complicating the structure of the apparatus.

In order to achieve the above object, according to one aspect of the present invention, there is provided a substrate conveying apparatus comprising a conveyor section for conveying a substrate in a conveying direction, a first guide rail provided parallel to the conveying direction, A motor for relatively moving the first guide rail relative to the second guide rail in the widthwise direction of the substrate; a motor for moving the first guide rail and the second guide rail such that a rail interval between the first guide rail and the second guide rail is set to a first The first guide rail is moved to the second guide rail so as to correct the inclination of the substrate at a second interval smaller than the first interval on the basis of the detected value of the motor, And a control unit configured to perform a control to move relative to each other.

In the substrate transfer apparatus according to the aspect of the present invention, the rail spacing between the first guide rail and the second guide rail is set to a first interval larger than the width of the substrate, and the substrate is conveyed by the conveyor section, The first guide rail is moved relative to the second guide rail so as to calibrate the inclination of the substrate at a second interval smaller than the first interval based on the detection value of the first guide rail, The tilt correction of the substrate can be performed by controlling the rail interval to be a first interval for transport corresponding to the width of the transported substrate while adjusting the rail interval to the second interval based on the detected value of the motor. Accordingly, the motor (rail gap adjusting motor) and mechanism for adjusting the rail gap in accordance with the width of the substrate to be conveyed, and the motor and mechanism for performing the inclination correction of the substrate can be commonly used. Further, according to the present invention for controlling the rail interval on the basis of the detected value of the motor, it is possible to easily correct the inclination of the board, unlike a configuration using rail moving means in which precise position control using air pressure is difficult. As described above, according to the present invention, it is possible to easily correct the inclination of the substrate without complicating the structure of the apparatus.

Preferably, the motor is a servo motor including an encoder, and the control unit controls the first guide and the second guide by a difference of a width dimension of the substrate from the first gap, based on the output value of the encoder of the servo motor, And the rails are relatively moved so as to be close to the second guide rails so that the rail intervals become the second intervals. According to this configuration, it is possible to easily correct the inclination of the substrate by adjusting the rail interval to the width dimension (second interval) of the substrate based on the position detection value of the servo motor (output value of the encoder).

In the substrate transfer apparatus according to the aspect, preferably, the control unit relatively moves the first guide rails so as to be closer to the second guide rails, and based on whether the current value of the motor is equal to or greater than the first threshold value, The relative movement of the rails is stopped so that the rail intervals are set to the second intervals. Here, when the substrate is sandwiched between the first guide rail and the second guide rail due to the relative movement, the first guide rail no longer comes close to the second guide rail side. In order to generate a larger torque, The current value rises. Therefore, based on the fact that the motor current value reaches the first threshold value, it is possible to reliably detect that the substrate is sandwiched between the first guide rail and the second guide rail (the inclination of the substrate is corrected). Thus, even when the dimensions of the respective substrates become non-uniform due to manufacturing errors, for example, it becomes possible to reliably perform inclined correction by sandwiching the substrate between the rails.

In the substrate transfer apparatus according to the aspect, preferably, the control unit relatively moves the first guide rail so as to be close to the second guide rail, and controls the current value of the motor by the first guide rail and the second guide rail And is held at a second threshold value for pressing at a predetermined pressure so as to perform control to fix the substrate. In this configuration, not only the substrate is sandwiched between the rails to perform the inclination correction but also the substrate can be easily fixed by using the current value of the motor generated when the substrate is clamped between the rails as the second threshold value have. Accordingly, when various operations (such as component mounting and appearance inspection) in the manufacturing process of the circuit board are performed on the substrate transfer apparatus, the positional deviation of the substrate during the operation can be prevented without providing the fixing mechanism for fixing the substrate.

The substrate transfer apparatus according to one aspect of the present invention may further include a pressure detecting portion formed on at least one of the first guide rail and the second guide rail to detect a contact pressure with the substrate, The control unit controls the first and second guide rails to press and fix the substrate at a predetermined pressure on the basis of the detected value of the motor and the detected value of the pressure detecting unit have. In this configuration, the contact pressure between the substrate and the rail can be detected and monitored in addition to the detection value of the motor. Therefore, even when a thin circuit board is transported, for example, Can be corrected and fixed.

In at least one of the first guide rail and the second guide rail, at least one of the first and second guide rails may be configured such that the rail interval in a predetermined work area in the carrying direction is smaller than the rail interval in the work area other than the work area And has a protruding portion which protrudes inward in the substrate width direction in the working area. With this configuration, the rail interval in the working area can be made larger than the second interval, with the rail interval in the working area being the second interval and the inclination of the board being corrected. As a result, a sufficient clearance can be formed between the substrate and the first guide rail and the second guide rail outside the working area, so that inclination correction of the substrate in the working area can be performed, The substrate can be taken out. As a result, even in the configuration in which the inclination correction of the substrate is performed by changing the rail interval, the time required for carry-in / out of the substrate can be shortened and the so-called tact time can be shortened.

In this case, preferably, the rail gap in the carry-in area from the carry-in position of the substrate to the work area and the carry-out area from the work area to the carry-out position of the substrate is larger than the rail spacing in the work area having the projecting part. With this configuration, a subsequent substrate can be carried in standby until immediately before the work area while correcting the inclination of the substrate in the work area. In addition, the substrate is taken out of the preceding substrate while performing inclined correction of the substrate in the work area .

In the configuration for forming the projecting portion, preferably, the projecting portion is formed so as to smoothly continue the boundary with the portion other than the projecting portion. With this configuration, even when the projections are formed to reduce the rail spacing in the work area, it is possible to prevent the projections from interfering with the substrate transport without the substrate being transported between the rails being caught by the projections.

In the substrate transfer apparatus according to the aspect, preferably, the first guide rail includes a predetermined working area in the carrying direction, and has a working rail part provided separately from a part other than the working area, And is configured to separately move parts other than the work rail part and the work rail part in the substrate width direction. With this configuration, since the rail interval in the area other than the work area can be made larger than the second interval with the rail interval in the work area being the second interval and the inclination of the substrate being corrected, the inclination correction of the substrate It is possible to bring in the subsequent substrate or carry out the preceding substrate outside the working area. Thus, even in the configuration in which the inclination correction of the substrate is performed by changing the rail interval, the time required for carry-in / out of the substrate can be shortened and the so-called tact time can be shortened.

In this case, preferably, the first guide rail further includes a carry-in rail portion including a carry-in region from the carry-in position of the substrate to the work area, and a carry-out rail portion including a carry-out region from the work area to the carry- The motors are respectively disposed on the work rail part, the carry rail part, and the carry-out rail part, and the work rail part, the carry rail part, and the carry-out rail part are individually moved in the substrate width direction. With this configuration, a subsequent substrate can be carried in standby until immediately before the work area while correcting the inclination of the substrate in the work area. In addition, the substrate is taken out of the preceding substrate while performing inclined correction of the substrate in the work area .

(Effects of the Invention)

According to the present invention, the inclination correction of the substrate can be easily performed without complicating the apparatus configuration as described above.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a top view schematically showing the overall configuration of a substrate transfer apparatus according to first and second embodiments of the present invention; Fig.
2 is a schematic side view of the substrate transport apparatus according to the first and second embodiments of the present invention viewed from the upstream side in the transport direction.
3 is a view for explaining an inclination correcting operation of the substrate transport apparatus according to the first and second embodiments of the present invention.
Fig. 4 is a flowchart for explaining the substrate carry-in / out process of the substrate transfer apparatus according to the first embodiment of the present invention.
5 is a diagram for explaining control based on the motor current value in the substrate transport apparatus according to the second embodiment of the present invention.
6 is a flowchart for explaining a substrate carry-in / out process of the substrate transfer apparatus according to the second embodiment of the present invention.
7 is a top view schematically showing the entire configuration of the substrate transport apparatus according to the third embodiment of the present invention.
8 is a diagram for explaining control based on the motor current value in the substrate transport apparatus according to the third embodiment of the present invention.
Fig. 9 is a flowchart for explaining a substrate carrying-in / out process of the substrate carrying apparatus according to the third embodiment of the present invention.
10 is a top view schematically showing the entire configuration of a substrate transfer apparatus according to a fourth embodiment of the present invention.
11 is a top view schematically showing the overall configuration of a substrate transfer apparatus according to a fifth embodiment of the present invention.
12 is a view for explaining an inclination correcting operation of the substrate transport apparatus according to the fifth embodiment of the present invention.
Fig. 13 is a flowchart for explaining a substrate carrying-in / out process of the substrate carrying apparatus according to the fifth embodiment of the present invention.
14 is a top view schematically showing the entire configuration of a substrate transfer apparatus according to a sixth embodiment of the present invention.
Fig. 15 is a top view schematically showing the overall configuration of an appearance inspection apparatus provided with a substrate transport apparatus according to a seventh embodiment of the present invention. Fig.

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(First Embodiment)

First, the structure of the substrate transport apparatus 100 according to the first embodiment of the present invention will be described with reference to Figs. 1 to 3. Fig.

1, the substrate transport apparatus 100 according to the present embodiment is provided as a part of a substrate production line and is provided with a printed circuit board (hereinafter referred to as " substrate ") CB .

As an outline of the substrate manufacturing process, first, solder paste is printed (applied) on a substrate CB on which a wiring pattern is formed by a solder printing apparatus (not shown) in a predetermined pattern (solder printing step). Subsequently, the electronic component is mounted (mounted) on the substrate CB after solder printing by a surface seal member (not shown) (mounting step). Thereafter, the mounted board CB is conveyed to the reflow furnace (not shown) to melt and cure (cool) the solder (reflow step) so that the terminal portions of the electronic components are electrically connected to the wiring of the board CB . Thus, the electronic parts are fixed on the substrate CB in a state of being electrically connected to the wiring, and the substrate manufacturing is completed. In addition, the substrate CB may be inspected by a substrate inspection apparatus (not shown) before and after each of these processes. For example, inspection of the printed state of the solder on the substrate after the solder printing process, inspection of the mounting state of the electronic component after the mounting process, and inspection of the mounting state of the electronic component after the reflow process.

The substrate transfer apparatus 100 is mounted as a substrate transfer section such as a solder printing apparatus, a surface seal organ, and a substrate inspection apparatus which are responsible for the respective steps described above. In addition to carrying in and carrying out of the substrate CB in each apparatus, (Fixes) the substrate CB in a predetermined working area in performing the operation (solder printing, component mounting, inspection) of the substrate (substrate). That is, in these apparatuses, the substrate transfer apparatus 100 has a substrate CB, which is supplied to the substrate manufacturing line in units of a series of operations including substrate loading, substrate holding (operation by each apparatus), and substrate removal And performs the function of sequentially conveying.

1, the substrate transport apparatus 100 includes a conveyor section 1 for transporting the substrate CB in the transport direction X, a pair of guide rails (movable rails 2 and fixed A motor 4 and a drive mechanism 5 for moving the movable rail 2 in the substrate width direction Y perpendicular to the carrying direction X and an angle And a control section 6 for performing negative control. The substrate transfer apparatus 100 further includes a stopper mechanism 7 for stopping the substrate CB in the work area A and a clamp mechanism 8 for fixing the substrate CB disposed in the work area A Respectively. Hereinafter, the specific structure of the substrate transport apparatus 100 will be described. The movable rail 2 and the fixed rail 3 are examples of the "first guide rail" and the "second guide rail" of the present invention, respectively.

The conveyor portion 1 is constituted by a belt conveyor or the like driven by a motor (not shown), for example, and is provided with a pair of mounting portions for transporting the substrate CB in the Y direction by raising (supporting) . The pair of conveyor parts 1 are provided on the movable rail 2 and the fixed rail 3, respectively. The conveyor unit 1 receives the substrate CB from the apparatus on the upstream side of the substrate manufacturing line at the carry-in position of the upstream end (the end in the X1 direction). Then, the conveyor unit 1 carries the substrate CB from the carry-out position at the downstream end (the end in the X2 direction) and carries the substrate CB to the apparatus on the downstream side of the substrate production line.

The movable rails 2 and the fixed rails 3 constituting the pair of guide rails are provided parallel to each other with an interval in the substrate width direction Y orthogonal to the carrying direction X. [ Both the movable rail 2 and the fixed rail 3 are formed to extend linearly along the conveying direction X. As shown in Fig. 2, the movable rail 2 and the fixed rail 3 include not only a guide portion for guiding the board CB but also a leg portion formed so as to stand directly against the installation surface. The movable rails 2 and the fixed rails 3 are provided with the pair of conveyor units 1 described above.

1 and 2, the movable rail 2 is disposed on one side (Y1 direction side) of the substrate transport apparatus 100 and is movable in the substrate width direction Y (Y direction) . More specifically, the movable rail 2 is provided on a linear mechanism (slider 22) composed of a slide rail 21 and a slider 22 extending in the Y direction provided on the mounting surface. The fixed rail 3 is disposed on the other side (Y2 direction side) of the substrate transfer apparatus 100 and is fixedly provided on the mounting surface. A clamp mechanism 8 is provided on each of the movable rail 2 and the fixed rail 3.

The clamping mechanism 8 includes a lifting portion 81 formed to extend along the carrying direction and a locking portion 82 formed to protrude inward in the Y direction on the upper surfaces of the guide rails (the movable rail 2 and the fixed rail 3) ). The elevating portion 81 is configured to be elevated by an air cylinder (not shown) or the like and is configured to perform a clamping operation of pushing up both side edges of the substrate CB on the conveyor portion 1 in the Y direction from below have. The substrate CB pushed up by the elevating portion 81 is brought into contact with the locking portion 82 so that the upper surface thereof is brought into contact with the elevating portion 81 and the locking portion 82 in the vertical direction (Fixed).

Further, the stationary rail 3 is provided with a stopper mechanism 7. The stopper mechanism 7 is configured to be able to move up and down by an air cylinder (not shown) or the like. In the lowered position, the stopper mechanism 7 makes contact with the substrate CB to be conveyed on the conveyor portion 1, And is configured to be in contact with the substrate CB on which the image is transferred. The substrate CB is brought into contact with the stopper mechanism 7 at the position on the fixed rail 3 side (Y2 direction side) of the X2 direction side end face, Is positioned in the work area (A). In the first embodiment, the stopper mechanism 7 is not provided on the movable rail 2 but is provided only on the fixed rail 3. [

The motor 4 has a function of moving the movable rail 2 relatively in parallel with the fixed rail 3 in the substrate width direction Y. [ This motor 4 is a servo motor having an encoder 41 and is configured such that positional control based on the output value of the encoder 41 is performed by the control unit 6. [ The drive mechanism 5 is also made up of a belt-pulley mechanism having a belt 51 and a pulley 52.

More specifically, the output shaft of the motor 4 is connected to a pair of ball screw shafts 53 via a belt 51 extending between the pulleys 52. A pair of ball screw shafts 53 are provided so as to extend parallel to each other along the Y direction and are screwed to ball nuts (not shown) fixed to the movable rails 2. Although not shown, the fixed rail 3 is provided so that the ball screw shaft 53 is omitted. With this configuration, the motor 4 rotationally drives the pair of ball screw shafts 53 through the drive mechanism 5 to move the movable rails 2 screwed to the ball screw shafts 53 in parallel movement in the Y direction Linear movement).

The control unit 6 is a motor control unit that performs drive control of the motor and performs drive control of the drive motor (conveyor shaft) of the conveyor unit 1 and drives the motor 4 for driving the movable rail 2, (Rail interval adjusting shaft). In this embodiment, the control unit 6 moves the movable rail 2 in the Y direction so as to be the rail interval (interval in the Y direction) corresponding to the width dimension W (dimension in the Y direction) of the various substrates CB to be carried (In the XY plane) of the substrate CB conveyed to the work area A by the movement of the movable rail 2 in the Y direction. Therefore, the substrate transfer apparatus 100 is configured such that both the rail gap adjustment according to the width W of the substrate CB and the inclination correction of the substrate CB are performed by the common motor 4.

More specifically, as shown in Fig. 1, the control unit 6 controls the rail spacing between the movable rail 2 and the fixed rail 3 to be the first interval D1 larger than the width of the board CB, So that the movable rail 2 is moved so as to carry the substrate. The first interval D1 is an interval (D1 = W + C) obtained by adding a preset predetermined amount C to the width W of the substrate CB to be transported. This predetermined amount is a gap formed between the substrate CB and the guide rails (the movable rail 2 and the fixed rail 3) so as to smoothly carry the substrate. For example, C = about 0.5 mm Mm). The control unit 6 moves the movable rail 2 so that the first interval D1 is in accordance with the width dimension W at which the rail gap is transported. In the drawing, the size of the predetermined amount C is exaggerated for convenience.

Since the stopper mechanism 7 is provided only on the side of the fixed rail 3 as described above, when the substrate CB comes into contact with the stopper mechanism 7, the substrate CB is moved around the stopper mechanism 7 (See the two-dot chain line in Fig. 1). Since the rail interval is set to the first interval D1 and there is a margin in the Y direction when the substrate is transported, the substrate CB is moved to the movable rail 2 and the fixed rail 3 in the state of the first interval D1 So that they can be inclined with respect to the contact state.

In the first embodiment, as shown in Fig. 3, the control unit 6 controls the rails to be spaced apart from each other on the basis of the detected value of the motor 4 with the second interval D2, The movable rail 2 is moved with respect to the fixed rail 3 so as to correct the inclination of the fixed rail 3. [ More specifically, in the first embodiment, the controller 6 calculates the difference W between the width W of the substrate CB and the first interval D1 (i.e., (Predetermined amount C), the movable rail 2 is moved to be close to the fixed rail 3 so that the rail interval becomes the second interval D2. The distance between the movable rail 2 and the stationary rail 3 is narrowed until the distance between the movable rail 2 and the stationary rail 3 becomes the second distance D2 substantially equal to the width W of the board CB, The inclination of the substrate CB is corrected.

Next, with reference to Fig. 4, a series of carry-in / out processes including the tilt correcting operation of the substrate transfer apparatus 100 according to the first embodiment of the present invention will be described.

As shown in step S1 of Fig. 4, first, the substrate CB is carried into the conveyor portion 1 from the carry-in position at the upstream end in the carrying direction. At this time, the controller 6 preliminarily sets the rail interval to the first distance D1 in accordance with the width W of the substrate CB to be loaded.

Subsequently, in step S2, the control unit 6 returns the substrate CB to the work area A and stops it. That is, the substrate CB is transported until it comes into contact with the stopper mechanism 7 at the raised position. The position of the substrate CB in the carrying direction is positioned at a predetermined position in the work area A. Further, by the contact with the stopper mechanism 7, the substrate CB rotates about the stopper mechanism 7 and becomes inclined (see the two-dot chain line in Fig. 1).

The control unit 6 controls the movable rail 2 in accordance with the positional control based on the output value of the encoder 41 so that the width W of the substrate CB and the difference amount of the first gap D1 In the Y2 direction by a predetermined amount (C), and after moving by the predetermined amount C, the movable rail 2 is stopped in step S4. As a result, as shown in Fig. 3, the rail interval becomes the second interval D2 substantially equal to the width dimension W of the substrate CB, and the inclination of the substrate CB is corrected.

4, the clamping mechanism 8 is operated to fix the substrate CB at a predetermined position in the work area A. Then, In step S6, it is judged by the control section 6 whether or not to carry out the export. For example, when the substrate transport apparatus 100 is mounted on the surface mount apparatus or the substrate inspecting apparatus, a control signal for instructing the start of transport is output to the control unit 6 after a predetermined operation (component mounting or inspection) do. The control unit 6 waits for the input of the control signal in step S6, and upon receipt of the control signal, the control unit 6 determines that the start of the transfer has been started and proceeds to the processing from step S7 onwards.

In step S7, the clamping by the clamp mechanism 8 is released. Then, in step S8, the conveyor unit 1 conveys the substrate CB from the carrying-out position at the downstream end in the carrying direction. As described above, a series of carrying-in / out processes of the substrate carrying apparatus 100 is carried out.

In the first embodiment, the following effects can be obtained.

In the first embodiment, the rail spacing between the movable rail 2 and the fixed rail 3 is set to the first interval D1 larger than the width of the substrate CB, and the substrate CB is conveyed by the conveyor portion The movable rail 2 is fixed to the stationary rail 2 so as to calibrate the inclination of the substrate CB by setting the rail interval to the second interval D2 smaller than the first interval D1 on the basis of the detected value of the motor 4. [ (6) for performing relative movement with respect to the substrate (3) is provided so that the rail interval is made equal to the first gap (D1) for transport corresponding to the width dimension (W) of the substrate , The inclination of the board can be corrected by controlling the rail interval to the second interval D2 on the basis of the detected value of the motor 4. A motor (a rail gap adjusting motor) and a mechanism (driving mechanism 5) for adjusting the rail interval in accordance with the width W of the substrate CB to be conveyed, a motor for performing inclination correction of the substrate, Since the mechanism can be shared, the configuration of the apparatus is not complicated. Further, according to the substrate transfer apparatus 100 of the first embodiment in which the rail interval is controlled on the basis of the detection value of the motor 4, unlike the configuration using the rail transfer means in which precise position control using air pressure is difficult, It is possible to easily perform the inclination correction of the bending portion CB. As described above, in the substrate transfer apparatus 100 of the first embodiment, the inclination correction of the substrate CB can be easily performed without complicating the apparatus configuration.

According to the first embodiment, the motor 4 is constituted by the servomotor including the encoder 41 as described above, and the width of the substrate CB in accordance with the output value of the encoder 41 of the motor 4 The movable rail 2 is moved so as to be closer to the fixed rail 3 by a difference amount (predetermined amount C) between the first interval W and the first interval D1 so that the rail interval is set to the second interval D2 6). The rail spacing can be easily adjusted to the width dimension W (second spacing D2) of the substrate CB based on the position detection value (output value of the encoder 41) of the (servo) (CB) can be performed.

(Second Embodiment)

Next, the substrate transport apparatus 200 according to the second embodiment of the present invention will be described with reference to Figs. 1 to 3, Fig. 5, and Fig. In the second embodiment, unlike the first embodiment in which the rail interval is changed to the second interval D2 by moving the movable rail 2 by the predetermined amount C on the basis of the output value of the encoder 41, An example of a substrate transfer apparatus that performs control to change the rail interval to the second interval D2 based on the current value of the motor will be described. In the second embodiment, the configuration of the apparatus is the same as that of the first embodiment, so that the same reference numerals are used and description thereof is omitted.

In the second embodiment, the control unit 106 (see Fig. 1) of the substrate transport apparatus 200 monitors the current value at the time of driving the motor 4 and controls the current value as the detection value of the motor 4 CB of the tilt correction device. Specifically, the control unit 106 moves the movable rail 2 close to the fixed rail 3 when performing the inclination correction, and determines whether or not the current value of the motor 4 is equal to or greater than the first threshold value Th1 So that the relative movement of the movable rail 2 is stopped to set the rail interval to the second interval D2.

The first threshold value Th1 of the current value further moves the movable rail 2 toward the fixed rail 3 in a state in which the substrate CB is sandwiched (contacted) between the movable rail 2 and the fixed rail 3 Is set as a value immediately after the commencement of the current value rise that occurs when the current value is increased. The first threshold value Th1 will be described with reference to the graph of FIG.

First, when the oblique calibration is performed, the control unit 106 drives the motor 4 so that the movable rail 2 moves in the Y2 direction at a predetermined constant speed, for example. Since the load of the motor 4 at the time of movement in the substrate width direction Y is substantially constant, the current value becomes substantially constant after reaching the predetermined speed. Thereafter the substrate CB is sandwiched between the movable rail 2 and the fixed rail 3 when the rail distance coincides with the substrate width W by the movement of the movable rail 2, Is completely calibrated between the rails and the movement of the movable rail 2 in the Y2 direction is impeded by the board CB (the load of the motor 4 is increased). Thereafter, when the movable rail 2 is further moved toward the Y2 direction, the current value of the motor 4 increases to generate a larger drive torque. 5, the portion of the dotted line after the first threshold value Th1 indicates a change in the motor current value when the motor 4 continues to be driven even after the current value reaches the first threshold value Th1 And is shown as a reference.

Therefore, when the substrate CB is sandwiched between the movable rail 2 and the fixed rail 3 on the basis of the rise of the current value of the motor 4 after the substrate CB is sandwiched between the movable rail 2 and the fixed rail 3, (The inclination of the substrate is corrected) can be detected. The first threshold value Th1 can be determined on the basis of a test result or the like in which this control is actually performed, and is set as a current value capable of reliably correcting the inclination of the substrate. When the current value of the motor 4 becomes equal to or greater than the first threshold value Th1, the control unit 106 determines that the rail interval has become the second interval D2 and moves the movable rail 2 ) Is stopped.

Other configurations of the second embodiment are the same as those of the first embodiment.

Next, with reference to Fig. 6, a series of carry-in / out processes including the tilt correcting operation of the substrate transfer apparatus 200 according to the second embodiment of the present invention will be described. In FIG. 6, description of processes similar to those of the first embodiment shown in FIG. 4 will be omitted.

After the substrate is brought in step S1 in Fig. 6 and the substrate is stopped in step S2, the control unit 106 moves the movable rail 2 on the fixed rail 3 side (Y2 direction) in step S11. In step S12, the control unit 106 monitors the current value of the motor 4 to determine whether or not the current value is equal to or greater than the first threshold value Th1. The control unit 106 continues the movement of the movable rail 2 until the current value reaches the first threshold value Th1. When the board CB is sandwiched between the movable rail 2 and the fixed rail 3 by the movement of the movable rail 2 in the Y2 direction as described above (when the rail interval becomes the second distance D2), the motor 4) rises to reach the first threshold value Th1.

When the current value is equal to or greater than the first threshold value Th1, the control unit 106 determines that the rail interval is the second interval D2, and stops the movable rail 2 in step S13. Thus, the inclination correction of the substrate CB is completed. The subsequent processes in steps S5 to S8 are the same as those in the first embodiment.

In the second embodiment, the following effects can be obtained.

The movable rail 2 is moved close to the fixed rail 3 as described above and the movable rail 2 is moved on the basis of whether or not the current value of the motor 4 is equal to or greater than the first threshold value Th1 To stop the movement of the rail 106 to thereby set the rail interval to the second interval D2. The board CB is sandwiched between the movable rail 2 and the fixed rail 3 based on the fact that the motor current value reaches the first threshold value Th1 (the board CB is tilted) Can be reliably detected. As a result, for example, even when the dimensions of individual substrates CB become uneven due to manufacturing errors, the substrate CB can be surely sandwiched between the rails for inclined correction.

Other effects of the second embodiment are similar to those of the first embodiment.

(Third Embodiment)

Next, the substrate transport apparatus 300 according to the third embodiment of the present invention will be described with reference to Figs. 7 to 9. Fig. In the third embodiment, the movement of the movable rail 2 is stopped based on whether or not the current value of the motor 4 is equal to or larger than the first threshold value Th1 so that the rail interval is set to the second interval D2. (Clamping) of the substrate CB by the movable rail 2 and the fixed rail 3 after the rail interval is set to the second gap D2, unlike the second embodiment, Will be described. In the third embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and a description thereof will be omitted.

7, the substrate transfer apparatus 300 according to the third embodiment differs from the substrate transfer apparatus 100 (200) of the first (second) embodiment in that the clamp mechanism 8 2) is not provided. The substrate transfer apparatus 300 according to the third embodiment is configured to fix (clamp) the substrate CB by the movable rail 2 and the fixed rail 3 in place of the clamp mechanism 8. [

More specifically, the control unit 206 controls the fixing of the board CB by keeping the current value of the motor 4 close to the predetermined second threshold value Th2 while keeping the rail interval at the second interval D2 . That is, the control unit 206 continues to drive the movable rail 2 by the motor 4 even after the board CB is sandwiched between the rails with the rail interval set to the second interval D2, and the movable rail 2 ) To the stationary rail 3 side (Y2 direction). The substrate CB is sandwiched by the movable rail 2 and the fixed rail 3 and is fixed (clamped) in the work area A by being pressed in the horizontal direction (Y direction). Therefore, in the third embodiment, a clamp is formed by a method (edge clamp) in which the end surface of the substrate CB is sandwiched and clamped in the Y direction.

The second threshold value Th2 is set to a predetermined value capable of pressing the substrate CB to a predetermined pressure by the movable rail 2 and the fixed rail 3. [ As shown in Fig. 8, when the movable rail 2 is moved further toward the Y2 direction when the current value reaches the first threshold value Th1 (when the rail interval becomes the second gap D2) The pressure applied to the substrate CB through the movable rail 2 becomes larger in accordance with an increase in the current value (increase in drive torque) Therefore, since the pressure of the substrate 4 can be continuously applied by keeping the current value of the motor 4 close to the second threshold value Th2 (by continuously driving the movable rail 2 in the Y2 direction) It is possible to fix (clamp) the substrate CB.

The second threshold value Th2 can be determined on the basis of a test result or the like in which this control is actually performed, and is set as a current value capable of reliably clamping (clamping) the substrate. When the current value of the motor 4 reaches the second threshold value Th2, the control unit 206 sets the current value (the current value) Is held in the vicinity of the second threshold value Th2 to hold the substrate CB in a fixed state. Although the first threshold value Th1 is shown in FIG. 8 for the sake of explanation, in the third embodiment, when the motor current value reaches the second threshold value Th2, the substrate CB is surely held between the rails It can be seen that the inclination correction of the substrate CB has been completed by inserting it, so it is not necessary to judge whether or not the current value is equal to or more than the first threshold value Th1.

The other configuration of the third embodiment is the same as that of the first embodiment.

Next, with reference to Fig. 9, a series of carry-in / out processes including the clamping operation of the substrate transfer apparatus 300 according to the third embodiment of the present invention will be described. In FIG. 9, description of processes similar to those of the first embodiment shown in FIG. 4 will be omitted.

After the substrate is brought in step S1 in Fig. 9 and the substrate is stopped in step S2, the control unit 206 moves the movable rail 2 on the fixed rail 3 side (Y2 direction) in step S21. In step S22, the control unit 206 monitors the current value of the motor 4 to determine whether or not the current value has reached the second threshold value Th2. The control unit 206 continues the movement of the movable rail 2 until the current value reaches the second threshold value Th2. Therefore, after the inclination of the board CB is corrected by sandwiching the board CB between the movable rail 2 and the fixed rail 3 (the rail interval becomes the second interval D2), the board CB The process proceeds to step S23 when the current value of the motor 4 rises to the second threshold value Th2 at which the fixable pressure is applied to the substrate CB.

In step S23, the control unit 206 holds the current value of the motor 4 close to the second threshold value Th2, and continuously drives the movable rail 2 (motor 4) Clamp). Thereafter, the clamping is continued until it is judged at Step S5 that it is decided to start carrying the substrate CB. The control unit 206 stops driving the movable rail 2 (motor 4) in the vicinity of the second threshold value Th2, The clamp is released by returning to the interval (D1). Thereafter, the substrate CB is carried out at step S8.

In the third embodiment, the following effects can be obtained.

The substrate CB is fixed by moving the movable rail 2 close to the fixed rail 3 and keeping the current value of the motor 4 close to the second threshold value Th2 as described above in the third embodiment The control unit 206 is configured to perform control. Accordingly, not only the inclination correction is performed by sandwiching the board CB between the rails but also the current value of the motor 4 generated when the board CB is clamped (clamped) between the rails Is used as the second threshold value Th2, the substrate CB can be easily fixed. As a result, it is possible to prevent the positional deviation of the substrate CB during the operation without providing the clamp mechanism 8 (see Fig. 1) for fixing the substrate CB in addition to the inclination correction of the substrate CB .

Other effects of the third embodiment are similar to those of the first embodiment.

(Fourth Embodiment)

Next, the substrate transport apparatus 400 according to the fourth embodiment of the present invention will be described with reference to Fig. (Clamping) of the substrate CB by the movable rail 2 and the fixed rail 3 by driving the movable rail 2 on the basis of the current value of the motor in the fourth embodiment, A description will be given of an example of a substrate transport apparatus that performs control to fix (clamp) the substrate CB based on the detection value of the pressure detecting section in addition to the third embodiment. In the fourth embodiment, the same reference numerals are used for the same components as those in the third embodiment, and a description thereof will be omitted.

As shown in Fig. 10, the substrate transport apparatus 400 according to the fourth embodiment is provided with a pressure detection section 310 in the movable rail 2. [ The pressure detecting unit 310 is composed of a load cell or a strain sensor and is provided with a plurality of (two in the fourth embodiment) movable rails 2 so as to be spaced along the conveying direction X. [ The pressure detecting portion 310 is provided on the inner side (Y2 direction side) of the movable rail 2 and contacts the end face of the board CB and the board CB when the rail interval is set to the second distance D2 And the contact pressure of the contact surface is detected. The detection value of the pressure detection unit 310 is output to the control unit 306. [

In the fourth embodiment, in addition to the detection value (the encoder output value or the motor current value) of the motor 4, the control unit 306 corrects the inclination of the board CB and fixes (Clamp) is further performed. That is, the control unit 306 moves the movable rail 2 close to the fixed rail 3, and fixes the fixed rail 3 to the movable rail 2 based on the detection value of the motor 4 and the detection value of the pressure detection unit 310 And is configured to perform control for pressing and fixing the substrate CB at a predetermined pressure by the rail 3. [

The drive control of the movable rail 2 (motor 4) based on the detection value of the pressure detection unit 310 can be performed, for example, in the same manner as in the second embodiment or the third embodiment. That is, when the inclination correction of the substrate CB is performed, the first threshold value of the pressure detection value corresponding to the first threshold value Th1 of the motor current value is set, and whether or not the pressure detection value is equal to or more than the first threshold value And the inclination correction is performed. When the substrate CB is clamped, control is performed to set the second threshold value of the pressure detection value corresponding to the second threshold value Th2 of the motor current value to maintain the pressure detection value close to the second threshold value .

Here, the substrate CB conveyed by the substrate conveyance apparatus 400 is thin and flexible, about 0.5 mm thick, in addition to being relatively hard with a thickness of about 1 mm to 2 mm. Therefore, for example, the thin board CB may be bent by the pressure of the movable rail 2 when the board CB is sandwiched by narrowing the rail interval. Therefore, oblique calibration or fixing (clamping) can be performed based on not only the motor current value but also the pressure detection value, thereby performing oblique calibration or fixing (clamping) without bending the substrate CB.

Other configurations of the fourth embodiment are the same as those of the first embodiment.

In the fourth embodiment, the following effects can be obtained.

In the fourth embodiment, the movable rail 2 and the fixed rail 3 are fixed by the movable rail 2 and the fixed rail 3 on the basis of the detection value (encoder output value or motor current value) of the motor 4 and the detection value of the pressure detection unit 310, CB to be fixed to each other. Accordingly, in addition to the detection value of the motor 4, the contact pressure between the board CB and the rail can be detected and monitored. Therefore, even when a thin circuit board or the like is carried, the board The substrate CB can be tilted and fixed without bending the substrate CB.

Other effects of the fourth embodiment are similar to those of the first embodiment.

(Fifth Embodiment)

Next, the substrate transport apparatus 500 according to the fifth embodiment of the present invention will be described with reference to Figs. 11 to 13. Fig. Unlike the first embodiment in which the linear guide rails (the movable rails 2 and the fixed rails 3) are provided, the protrusions protruding inward in the substrate width direction Y are provided on the guide rails An example of the formation will be described. In the fifth embodiment, the same reference numerals are used for the same components as those in the first embodiment, and a description thereof is omitted.

11, the movable rails 402 and the fixed rails 403 of the substrate transport apparatus 500 according to the fifth embodiment are arranged so that the rail interval in the work area A in the transport direction X becomes equal to the work area A (Y) in the work area (A) so as to be smaller than the rail spacing in the work area (A). In the fifth embodiment, the substrate transfer apparatus 500 includes a work area A, a carry-in area En from the carry-in position (end in the X1 direction) of the substrate CB to the work area A, To the carry-out position (end in the X2 direction) of the substrate CB. The movable rails 402 and the fixed rails 403 are positioned so that the rail spacing in the carry-in area En and the carry-out area Ex is smaller than the rail spacing in the work area A, As shown in FIG. The movable rail 402 and the fixed rail 403 are examples of the "first guide rail" and the "second guide rail" of the present invention, respectively.

The movable rail 402 and the protruding portion 410 of the fixed rail 403 are formed such that the inner surface of the protruding portion 410 protrudes from the inner surface 421 (431) other than the protruding portion 410 by a predetermined amount have. The protruding amount of the projection 410 is the same as the predetermined amount C added to the width W of the substrate CB transported when the rail width is set to the first distance D1. That is, in the case of the fifth embodiment, the protruding amount of the protruding portion 410 is set so that the sum of the protruding amounts of the pair of protruding portions 410 is equal to the predetermined amount C. 12, when the rail interval in the work area A in which the projections 410 are formed is made to coincide with the substrate width W of the substrate CB as the second gap D2, The rail interval becomes a size (W + C) obtained by adding a predetermined amount C to the substrate width W (second interval D2) and the first interval D1 and the second interval D2 The same.

The protruding portion 410 is integrally formed with the movable rail 402 and the fixed rail 403. The protruding portion 410 has a structure in which the width of the portion other than the protruding portion 410 Is smaller than the rail width. The protruding portion 410 is formed so that the boundary with the portion other than the protruding portion 410 (the working area A and the boundary between the carry-in area En and the carry-out area Ex) is smoothly continued. More specifically, the protruding portion 410 includes a sloped surface 411 inclined in a gentle shape, and a boundary portion between the work area A, the carry-in area En and the carry-out area Ex is formed by the sloped surface 411 It is smoothly connected.

With the above arrangement, even if the substrate CB is subjected to the oblique calibration or the substrate fixation on the substrate CB to be the object of the mounting operation or the like in the work area A, the substrate can be brought into the carry- It is possible to carry out the substrate from the region Ex. Therefore, in the fifth embodiment, the length of the carry-in area En in the carrying direction X is made larger than that of the substrate CB. It is possible to convey the next substrate CB to the standby position in the carry-in area En and to wait until the end of the work on the preceding board CB. After completion of the work in the work area A, It is possible to improve the conveyance efficiency (shorten the time required for conveyance) as compared with the case of performing the conveyance. In addition, by setting the waiting position in the carry-in area En, the stopper mechanism 7 is disposed at each of the working position and the waiting position in the fifth embodiment.

Other configurations of the fifth embodiment are the same as those of the first embodiment.

Next, a series of carrying-in and carrying-out processes of the substrate transport apparatus 500 according to the fifth embodiment of the present invention will be described with reference to Fig. In FIG. 13, description of processes similar to those of the first embodiment shown in FIG. 4 will be omitted.

After the substrate is brought in step S1 in Fig. 13 and the substrate is stopped from the step S2 to the work area A, the control unit 406 performs the inclination correction of the substrate CB in step S31. The inclination correction processing may be performed according to any one of the controls shown in the above-described embodiments. Thereafter, the substrate CB is fixed (clamped) in step S5. The substrate fixing process may be performed by the control described in the third or fourth embodiment, or may be performed by the clamp mechanism 8 shown in the first and second embodiments. As a result, the substrate CB is clamped and a predetermined operation (component mounting, etc.) is performed on the substrate CB.

Subsequently, in step S32, the control unit 406 drives the conveyor unit 1 as shown in Fig. 12 to carry out the subsequent substrate CB. The succeeding substrate CB is transported to a predetermined standby position in the carry-in area En by the stopper mechanism 7 of the carry-in area En and is stopped. Since the substrate CB in the work area A is locked by the stopper mechanism 7, the subsequent substrate transfer may be started before the clamping in step S5.

13, the control unit 406 releases the board fixing to the board CB in the work area A at step S7, and at step S33, And the next substrate CB is conveyed to the working area A at the same time. 11, in the carry-in area En and the carry-out area Ex, when the rail interval in the working area A is defined as the first interval D1, (C) is larger than that required for carrying out the substrate transportation smoothly (C = about 0.5 mm), there is no problem in carrying the substrate .

The following effects can be obtained in the fifth embodiment.

In the fifth embodiment, as described above, the movable rail 402 and the fixed rail 403 are provided with the protruding portions 410 protruding inward in the substrate width direction Y in the working region A, respectively. The rail spacing other than the work area A is set to be larger than the second spacing D2 while the inclination correction of the board CB is performed with the rail interval in the work area A as the second spacing D2 can do. As a result, a sufficient clearance can be formed between the board CB and the movable rail 402 and the fixed rail 403 in other than the working area A, so that the inclination correction of the board CB in the working area A can be performed It is possible to bring in the subsequent substrate CB or carry out the preceding substrate CB in addition to the work area A while performing the above process.

In the fifth embodiment, as described above, the rail spacing in the carry-in area En and the carry-out area Ex is made larger than the rail spacing in the work area A having the projection 410 500). The subsequent substrate CB can be carried in the standby position immediately before the work area A while the inclination correction of the substrate CB is performed in the work area A and the work area A The substrate CB can be taken out and carried out while the inclination correction of the substrate CB is performed. As a result, the tact time can be shortened.

Further, in the fifth embodiment, the protruding portion 410 is formed so that the boundary with the portion other than the protruding portion 410 smoothly continues. Accordingly, even when the protruding portion 410 is provided to reduce the rail spacing in the work area A, the protruding portion 410 does not catch the protruding portion 410 of the substrate CB conveyed between the rails, It is possible to prevent interference.

Other effects of the fifth embodiment are similar to those of the first embodiment.

(Sixth Embodiment)

Next, a substrate transport apparatus 600 according to a sixth embodiment of the present invention will be described with reference to Fig. The sixth embodiment is different from the fifth embodiment in that the projections 410 are formed on the guide rails (movable rails 402 and fixed rails 403) so that the inclined correction and the substrate can be carried in and out even during substrate fixing , The movable rail and the fixed rail are divided to allow inclination correction and substrate loading / unloading during substrate fixing will be described. In the sixth embodiment, the same reference numerals are used for the same components as those in the first embodiment, and a description thereof will be omitted.

As shown in Fig. 14, the movable rails 502 and the fixed rails 503 of the substrate conveyance apparatus 600 according to the sixth embodiment are divided along the conveying direction X, respectively. That is, each of the movable rails 502 includes a predetermined work area A in the carrying direction X and a work area 521 provided separately from a part other than the work area A have. More specifically, in the sixth embodiment, the movable rail 502 includes a carry rail part 552 including a carry-in area En, a carry-out rail part 523 including a carry-out area Ex, A, and each of the rails is provided separately. The fixed rail 503 has a work rail portion 531, a carry rail portion 532 and a carry rail portion 533 individually corresponding to the movable rail 502. The work rail part 531 and the carry part part 532 of the fixed rail 503 are provided with stopper mechanisms 7 for stopping the board CB in the working position and the standby position, respectively. Further, a conveyor portion 501 is provided on each rail portion and can be individually driven. The movable rail 502 and the fixed rail 503 are examples of the "first guide rail" and the "second guide rail" of the present invention, respectively.

In addition, the motor is installed in the portions other than the work rail portion 521 and the work rail portion, and is configured such that the portions other than the work rail portion 521 and the work rail portion are individually moved in the substrate width direction Y . That is, in the sixth embodiment, the motor 541, the motor 542, and the motor 543 are connected to the work rail part 521 of the movable rail 502, the carry rail part 552, 523 and is configured to individually move the work rail part 521, the carry part 552 and the carry-out part 523 in the substrate width direction Y, respectively. These motors 541 to 543 are individually controlled by the control unit 506. [

With the above configuration, the substrate transfer apparatus 600 is configured so that the rail interval can be independently changed in each of the work area A, the carry-in area En, and the carry-out area Ex. Accordingly, even when the inclination correction or the substrate fixing is performed on the substrate CB, which is the object of the mounting work or the like, with the rail interval being the second gap D2 in the work area A, En and the carry-out region Ex can be carried out on the board with the rail interval set as the first interval D1. Also in the sixth embodiment, similarly to the fifth embodiment, it is possible to carry the next substrate CB following the substrate CB disposed at the working position to the waiting position in the carrying-in area En and wait .

Other configurations of the sixth embodiment are the same as those of the first embodiment.

In the sixth embodiment, the following effects can be obtained.

In the sixth embodiment, the work rail 521, which includes the predetermined work area A in the carrying direction X and is provided separately from the work area A, is mounted on the movable rail 502). Then, portions other than the work rail portion 521 and the work rail portion 521 are individually moved in the substrate width direction (Y). The rail spacing other than the work area A is set to be larger than the second spacing D2 while the inclination correction of the board CB is performed with the rail interval in the work area A as the second spacing D2 It is possible to carry out the subsequent loading of the substrate CB or the carrying-out of the preceding substrate CB in addition to the working area A, while correcting the inclination of the substrate CB in the working area A.

Further, in the sixth embodiment, as described above, the carry rail portion 502 is further provided with a carry rail portion 552 and a carry rail portion 523. Then, the work rail part 521, the carry part 552, and the carry-out part 523 are individually moved in the substrate width direction Y. [ It is possible to bring the subsequent substrate CB into the standby state until just before the work area A while obliquely correcting the substrate CB in the work area A, It is possible to carry out the preceding board CB while carrying out the oblique correction of the board CB. As a result, even in the configuration in which the inclination correction of the board CB is performed by changing the rail interval, the time required for carry-in / out of the board CB can be shortened, and the so-called tact time can be shortened.

Other effects of the sixth embodiment are similar to those of the first embodiment.

(Seventh Embodiment)

Next, a visual inspection apparatus 700 according to a seventh embodiment of the present invention will be described with reference to Fig. In the seventh embodiment, as the application example of the substrate transfer apparatus, the substrate transfer apparatus 100 according to the first embodiment is used as the substrate transfer section of the visual inspection apparatus 700, which is a type of substrate inspection apparatus for inspecting the substrate CB, Will be described. In the seventh embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and a description thereof will be omitted.

As shown in Fig. 15, the visual inspection apparatus 700 according to the seventh embodiment captures an image of the upper surface of the substrate CB and performs image recognition, thereby detecting the printed state of the solder on the substrate CB, And the like, and to perform a visual inspection such as the detection of foreign matter adhering to the substrate CB.

The visual inspection apparatus 700 includes a substrate transfer section 601 for transferring and holding the substrate CB and a transfer section 601 for transferring the substrate transfer section 601 upward (arrow Z1 direction, see FIG. 2) A head moving mechanism 602 movable in the Z direction (up and down), a photographing head 603 held by the head moving mechanism 602, a controller 604 controlling the appearance inspecting apparatus 700, .

The substrate transfer section 601 is formed of the substrate transfer apparatus 100 according to the first embodiment and is formed on the base 605 of the visual inspection apparatus 700.

The head moving mechanism 602 is provided above the substrate transfer section 601 and is constituted by an orthogonal three-axis (XYZ axis) robot using, for example, a ball screw shaft and a servo motor. The configuration of the orthogonal three-axis robot itself is known, and a detailed description thereof will be omitted. The head moving mechanism 602 is configured to be capable of moving the imaging head portion 603 in the XY direction (horizontal direction) and the Z direction (upper and lower directions) above the substrate transfer portion 601 (substrate CB) have.

The photographing head section 603 includes a photographing section 631 and an illumination section (not shown). And this imaging head 603 is configured to perform imaging for inspection of the appearance of electronic components and the like on the substrate CB and the substrate CB. Therefore, when the substrate transfer section 601 fixes (clamps) the substrate CB at a predetermined working position in the work area A, the substrate CB Is performed.

The control device 604 performs overall control of the visual inspection device 700. Fig. The control device 604 outputs a control signal to the control section 6 of the substrate transfer section 601 (substrate transfer apparatus 100) to transfer the substrate to the substrate transfer section 601, (Clamping) of the workpiece CB and carrying out of the substrate.

The other configuration of the seventh embodiment is the same as that of the first embodiment.

As in the seventh embodiment, the substrate transfer apparatuses 100 to 600 according to the first to sixth embodiments described above are applicable to various substrate working apparatuses (surface inspection apparatuses 700 other than the surface inspection apparatuses 700) constituting the substrate production line And can be suitably used as the substrate transfer section 601 to be mounted. That is, in the visual inspection apparatus 700 according to the seventh embodiment, when the substrate CB is inclined in the picked-up image of the substrate CB picked up by the picking-up head section 603, the data processing for the angle correction is performed It needs to be executed by the control device 604. [ Therefore, when the substrate CB is inclined, the processing time for correcting the inclination angle of the substrate CB is required to be sufficient, and the working efficiency is lowered. On the other hand, according to the substrate transfer apparatuses 100 to 600 according to the first to sixth embodiments, the oblique calibration of the substrate CB can be easily performed without complicating the apparatus configuration. Therefore, in the visual inspection apparatus 700 It is possible to suppress the occurrence of unnecessary processing time and to improve the working efficiency.

It is also to be understood that the presently disclosed embodiments are illustrative and non-restrictive in all respects. The scope of the present invention is defined not by the description of the above-described embodiment but by the claims, and includes all modifications within the meaning and scope equivalent to the claims.

For example, in the above-described first to sixth embodiments, an example of the substrate transport apparatus having the movable rails and the fixed rails is shown, but the present invention is not limited to this. In the present invention, a movable rail may be provided instead of the fixed rail. In this case, when correcting the inclination of the substrate, both of the movable rails may be moved simultaneously, or only one of the movable rails may be moved. In the present invention, at least one guide rail may be a movable rail.

In the fifth embodiment, the projections are formed on both the movable rail and the fixed rail. However, the present invention is not limited to this. In the present invention, protrusions may be formed only on one side of the movable rail and the fixed rail.

In the above-described fifth embodiment, convex projections 410 protruding inward are formed in the linear movable rails and the fixed rails. However, the present invention is not limited to this. In the present invention, the projecting portion may be formed by bending the movable rail and the fixed rail inward.

In the sixth embodiment, the fixed rail is divided into three parts corresponding to the case where the movable rail is divided into three parts. However, the present invention is not limited to this. In the present invention, when the movable rail is divided into three, the fixed rail side may be a single straight guide rail.

In the sixth embodiment, the motors corresponding to the working rail part, the carry-in rail part, and the carry-out rail part of the movable rail are provided and the rail parts can be moved individually. But it is not limited thereto. For example, the carry-in part of the movable rails and the carry-out rail part may be driven by a common motor. In this case, the rail interval between the carry-in area and the carry-out area always becomes the same interval.

In the sixth embodiment, an example is shown in which the movable rail is divided into three and moved individually. However, the present invention is not limited to this. In the present invention, the movable rail may be divided into two regions other than the working region and the working region.

1, 501: Conveyor section
2, 402, 502: movable rails (first guide rails)
3, 403, 503: fixed rail (second guide rail)
4, 541, 542, 543: motor
6, 106, 206, 306, 406, 506: control unit 41: encoder
100, 200, 300, 400, 500, 600: substrate transfer device
310: pressure detecting unit 410:
521: Operation rail part 522:
523: Exit part A: Work area
CB: substrate D1: first spacing
D2: 2nd interval En: Import area
Ex: Export area

Claims (10)

A conveyor portion 1 for conveying the substrate CB in the conveying direction,
A first guide rail (2) and a second guide rail (3) provided parallel to each other with an interval in the substrate width direction perpendicular to the carrying direction,
A motor (4) for relatively moving the first guide rail in parallel with the second guide rail in the substrate width direction,
The substrate conveyance is performed by the conveyor section with the rail interval between the first guide rail and the second guide rail being a first interval D1 larger than the width of the substrate, And a controller (6) configured to perform a control to move the first guide rail relative to the second guide rail so as to correct the inclination of the substrate with a second gap (D2) smaller than the first gap, And a substrate transfer device for transferring the substrate. The method according to claim 1,
The motor is a servo motor including an encoder 41,
Wherein the controller relatively moves the first guide rail so as to be closer to the second guide rail by a difference amount of the width of the substrate from the width dimension of the substrate on the basis of the output value of the encoder of the servo motor, Wherein the first substrate and the second substrate are spaced apart from each other at a second interval. The method according to claim 1,
The controller moves the first guide rail closer to the second guide rail and stops the relative movement of the first guide rail based on whether the current value of the motor is equal to or greater than the first threshold value Th1 And the rail spacing is set to the second spacing. The method according to claim 1,
Wherein the control unit relatively moves the first guide rail so as to be close to the second guide rail and adjusts the current value of the motor to a second value for pressing the substrate to a predetermined pressure by the first guide rail and the second guide rail, And the substrate is held in the vicinity of the threshold value (Th2) to perform the control for fixing the substrate. The method according to claim 1,
Further comprising a pressure detecting portion (310) formed on at least one of the first guide rail and the second guide rail and detecting a contact pressure with the substrate,
Wherein the control unit relatively moves the first guide rail so as to be closer to the second guide rail and controls the first guide rail and the second guide rail to relatively move the first guide rail and the second guide rail on the basis of the detected value of the motor and the detected value of the pressure detecting unit, Is controlled so as to be pressed and fixed at a predetermined pressure. The method according to claim 1,
Wherein at least one of the first guide rail and the second guide rail is arranged such that the rail spacing in a predetermined working area (A) in the carrying direction becomes smaller than the rail spacing other than the working area And a protrusion (410) protruding inward in the substrate width direction. The method according to claim 6,
Wherein a rail gap in a carry-in area (En) from the carry-in position of the substrate to the work area and a carry-out area (Ex) from the work area to the carry-out position of the substrate, Is greater than the rail spacing. The method according to claim 6,
Wherein the projecting portion is formed so as to smoothly continue the boundary with the portion other than the projecting portion. The method according to claim 1,
Wherein the first guide rail includes a predetermined work area in the transport direction and has a work rail part (521) provided separately from a part other than the work area,
And the motor is configured to be installed on each of the work rail part and the part other than the work rail part and to move the part other than the work rail part and the work rail part individually in the widthwise direction of the board . 10. The method of claim 9,
Wherein the first guide rail includes a carry-in part (522) including a carry-in area from the carry-in position of the substrate to the work area, and a carry-out part (522) including a carry-out area from the work area to the carry- 523,
The motors 541, 542 and 543 are respectively installed on the work rail, the carry rail part, and the carry-out rail part, and the work rail part, the carry rail part, And the second substrate is moved individually in the width direction.

Images