KR20150146383A - Electrical Contactor and Electrical Connecting Apparatus - Google Patents

Abstract

The present invention provides an electrical contactor capable of realizing sufficient electrical contacting properties with the small number of factors. The electrical contactor according to the present invention comprises: (1) a combined plunger and coil spring, in which a plunger unit coming in contact with a first contact object and a coil spring unit for gathering power during compression and applying power in an extension direction are integrally formed by a same wire; and (2) a plunger having a plate shape coming in contact with a second contact object, having a wire part in an end side of the plunger unit to electrically come in contact with a plane of the plunger, and supported to be flexible in an extension direction by the coil spring unit. The electrical contactor according to the present invention may be applied as at least a part of an electric contactor in an electrical connection device having a plurality of electrical contactors electrically coming in contact between the first contact object and the second contact object.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an electrical contactor,

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrical contact and an electrical connecting apparatus, and can be applied to, for example, an electrical contactor contacting an electrode provided on a wiring board or a semiconductor integrated circuit, or an electrical connecting apparatus having a plurality of electrical contacts.

Electrical contacts for electrically connecting electrical circuits on opposite wiring boards to each other are well known. Such electrical contactors include those described in, for example, Patent Document 1 and Patent Document 2.

The electrical contactor 1 described in Patent Document 1 has two contact pins 2 and a coil spring 3 of the same shape as shown in Figs. 22 and 23. Fig. The contact pin 2 mainly has a latching protrusion 4, a latching hole 5, a flange portion 6, and a pin distal end portion 2A. Two locking protrusions 4 are provided facing each other and are supported by a flexible supporting bar 4A. Thereby, the two locking projections 4 are arranged close to each other. The engaging hole 5 is a hole into which the engaging projection 4 of the other contact pin 2 is fitted and is formed into a rectangular shape in conformity with the width of the engaging projection 4. [ As a result, the two contact pins 2 are brought into contact with each other by the relative approach in the up-and-down direction, The two engagement projections 4 of the one contact pin 2 are engaged with the two contact pins 2 to be connected to the opening of the contact pin 2. The flange portion 6 is a portion where the coil spring 3 contacts. Both ends of the coil spring 3 come into contact with the respective flange portions 6 and the electrical contactor 1 is assembled by engaging the two contact pins 2 inserted into the coil springs 3 respectively. Both ends of the electrical contactor 1 assembled in this manner are each a pin tip portion 2A electrically connected to an external electrode or the like.

The electrical contactor 7 described in Patent Document 2 has a plunger 8 and a coil spring 9 as shown in Fig. The plunger 8 is formed in an elongated plate shape and is provided with an extension portion 8A for receiving the coil spring 9 thereon and a terminal portion 8B which is in contact with the electrode is formed on the extension portion 8A . In the lower portion of the extension portion 8A, a core portion 8C is formed in the coil spring 9 to be vertically movable. The coil spring 9 is formed to have an inner diameter capable of vertically movably inserting the core portion 8C. The diameter of the coil spring 9 at the lower end portion is gradually reduced, and the lower end portion having the smallest diameter is brought into contact with the external electrode or the like.

Patent Document 1: JP-A-2008-516398 Patent Document 2: JP-A-2004-152495

The electrical contactor 1 described in Patent Document 1 has a structure in which the engagement protrusion 4 of one contact pin 2 contacts the edge of the engagement hole 5 of the other contact pin 2 in accordance with the expansion and contraction of the electrical contactor 1 The stopper 4 and the support bar 4A may be damaged due to abrasion or the like, resulting in poor durability.

Since each of the contact pins 2 is merely engaged in the engagement hole 5 of the engagement protrusion 4 and the contact area of the contact pins 2 is small, the coil spring 3 mainly takes charge of electrical connection . It is necessary that the engaging protrusion 4 and the support bar 4A part are inserted into the coil spring 3 and are widened to be engaged with the opposing retaining hole 5. Therefore, It is difficult to make the inner diameter to the degree of tightening. In addition, since the coil spring 3 is a compression spring and a contact point with the contact pin 2 is small, the adhesion between each contact pin 2 and the coil spring 3 is weakened. Therefore, the contact portion between the flange portion 6 of each contact pin 2 and the coil spring 3 serves as a central electric flow passage, but the contact area is small, which tends to cause abrasion, corrosion and the like, This is bad. Further, when the contact end of the contact pin 2 is a V-shaped groove, and the hemispherical bump electrode is to be contacted, the electrical contact property deteriorates momentarily due to a slight displacement of the V-shape inward.

Moreover, in order to realize the electrical contact 1 of different length, the contact pin 2 and the coil spring 3 must be applied to the same length. When the number of types of the electrical contacts 1 is large, the cost for each element part also increases.

The electric contactor 7 described in Patent Document 2 is advantageous in that it is formed of two parts, that is, the plunger 8 and the coil spring 9. [ The inner diameter of the coil spring 9 is set to such a dimension that the core portion 8C of the plunger 8 can be vertically moved so that the plunger 8 and the coil spring 9 are in contact with each other The electrical contactability is poor. Electrical connection between the plunger 8 and the coil spring 9 is a contact between the extension portion 8A of the plunger 8 and the upper end portion of the coil spring 9. [ Therefore, there is a problem that the contact area tends to be small due to abrasion, corrosion and the like, resulting in poor electrical contactability and inferior durability.

Since the end portion of the coil spring 9 touches one electrode but the coil spring 9 is wound spirally, the vicinity of the cut end of the end portion is not horizontal, and the electrical contact property is also bad at this point.

In addition, if the plunger 8 and the coil spring 9 are also used for the purpose of realizing the electric contact 7 having different lengths, the cost for each element part also increases. On the other hand, when only the coil spring 9 is prepared by using a different path, in the long electrical contact 7, the portion of the coil spring 9 where the plunger 8 is not located is elongated and any external force is applied in the radial direction There is a possibility that it can not function sufficiently as the electrical contact 7 because it easily deforms on the ground.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and it is an object of the present invention to provide an electrical contactor capable of realizing sufficient electrical contact with a small number of elements or an electrical connecting apparatus using such an electrical contactor.

(1) A plunger portion which is in contact with a first contact object, and a coil spring portion for collecting a force during compression and exerting a force in the elongation direction are integrally formed by the same wire material (2) a plate-like plunger contacting the second object to be contacted, the proximal-end wire portion of the plunger portion being in electrical contact with the plane of the plunger, and the coil spring portion And a plunger that is supported so as to be stretchable and contractible.

Here, it is preferable that the plunger is provided so as to support the proximal-end wire member of the plunger portion.

It is preferable that the plunger portion has a wire member portion that is directed toward the first contact object, a wire member portion that contacts the first contact object, and a wire member portion that is away from the first contact object, Is in contact with the first contact object with a plurality of protrusions protruding toward the first contact object.

The second aspect of the present invention is characterized in that the electrical contactor of the first aspect of the present invention is applied as at least a part of the electrical contactor having a plurality of electrical contacts for electrically contacting between the first contact object and the second contact object do.

Here, a second electrical contact using a plunger other than the electrical contact (first electrical contact) of the first invention is also applied, and the plunger of the first electrical contact and the plunger of the second electrical contact are of the same shape .

According to the first aspect of the present invention, it is possible to realize an electrical contact that can realize sufficient electrical contact with a small number of elements. According to the second aspect of the present invention, it is possible to realize an electrical connecting apparatus to which the electrical contact according to the first aspect of the present invention is applied.

1 is a perspective view showing an electrical contact of the first embodiment.
2 is a plan view showing the electrical connecting apparatus of the first embodiment.
3 is a cross-sectional view (sectional view taken along the line III-III in Fig. 2) of the electrical connecting device of the first embodiment.
4 is a cross-sectional view (sectional view taken along the line IV-IV in Fig. 2) of the electrical connecting apparatus of the first embodiment.
5 is an enlarged cross-sectional view showing a mounting portion of an electrical contact in the electrical connecting apparatus according to the first embodiment, and is a cross-sectional view showing a front surface or a side surface of the electrical contactor in a state in which it is not in contact with an electrode of the test object.
6 is an enlarged cross-sectional view showing a mounting portion of the electrical contact in the electrical connecting apparatus according to the first embodiment, and is a cross-sectional view showing a front surface or a side surface of the electrical contactor in a state of being in contact with electrodes of the test object.
7 is a front view showing an electrical contact in signal waveform emphasis.
8 is a side view showing an electrical contact in signal waveform emphasis.
9 is a sectional view taken along line IX-IX of Fig.
10 is a sectional view taken along the line X-X in Fig.
11 is a front view showing a first plunger of an electrical contact in signal waveform emphasis.
12 is a front view showing the second plunger of the electrical contact in the signal waveform-wise direction.
13 is a front view showing a coil spring of an electrical contact in a signal waveform emphasis.
14 is a front view showing the electrical contact according to the first embodiment.
15 is a side view showing the electrical contact of the first embodiment.
16 is a plan view showing an electrical contact according to the first embodiment.
17 is a bottom view showing the electrical contact according to the first embodiment.
18 is a front view showing a plunger-used coil spring in the electrical contact according to the first embodiment.
Fig. 19 is a side view showing a plunger coil spring in the electrical contact according to the first embodiment. Fig.
20 is an explanatory diagram showing an example of the shape of a contact portion of a plunger portion of a coil spring serving as a plunger in the electrical contact according to the first embodiment.
Fig. 21 is an explanatory view showing an example of a locus drawn by a connecting portion wire material of a plunger portion of a coil spring serving as a plunger in the electrical contact according to the first embodiment. Fig.
22 is a perspective view showing a conventional first electrical contact.
23 is an exploded perspective view of the electrical contact shown in Fig.
24 is a perspective view showing a conventional second electrical contact.

(A) First Embodiment

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, a first embodiment of an electrical contact and an electrical connecting apparatus according to the present invention will be described with reference to the drawings.

First, the electrical connecting device 11 of the first embodiment to which the electrical contact according to the first embodiment is applied will be described with reference to Figs. 2 to 6. Fig. In the electrical connecting device 11 of the first embodiment, the subject is rectangular, but the present invention can be applied even if the subject has a different shape.

Fig. 2 is a plan view showing the electrical connecting apparatus of the first embodiment, Fig. 3 is a sectional view taken along the line III-III in Fig. 2, and Fig. 4 is a sectional view taken along the line IV-IV in Fig. 5 and 6 are enlarged cross-sectional views showing a mounting portion of the electrical contact in the electrical connecting apparatus according to the first embodiment, FIG. 5 shows a state in which the electrical contact is not in contact with the electrode of the test subject And Fig. 6 shows a state in which the electrical contactor is in contact with the electrode of the object to be inspected. 5 (A) and 6 (A) are sectional views drawn on the front side of the electrical contact so that they can be viewed visually, and FIGS. 5 (B) and 6 And is a green cross-section view that can be seen by the eye. In the following description, it is referred to as " up & down " along the vertical direction in Figs. 2 to 6.

The electrical connecting device 11 is a device used for energizing test of the test object 12. [ The object 12 is a semiconductor device such as, for example, an integrated circuit. A plurality of bump electrodes 13 (see Figs. 5 and 6) are provided on the lower surface of the object 12 to be inspected. The bump electrode 13 is an electrode provided on the lower surface of the object 12. The plurality of bump electrodes 13 are arranged in a row, a plurality of rows, a matrix, or another arrangement on the lower surface of the test object 12. [

The electrical connecting device 11 mainly has a wiring board 15, a lower housing 16, an upper housing 17, a frame 18, a guide plate 19, and an electrical contact.

In the electrical connecting device 11 of the first embodiment, two types of electrical contacts are used. 5 and 6 show a state in which one electrical contact 20 is mounted. The other electrical contact 200 is the electrical contact of the first embodiment and is mounted on the mounting portion of the electrical contact in the electrical connecting device 11 in substantially the same manner as the electrical contact 20. The electrical contact 20 is used for measurement in a portion where the electrical conductivity is better than that of the electrical contact 200 of the first embodiment and the signal waveform is mainly important (hereinafter, the electrical contact 20 is referred to as a signal waveform) Also called critical electrical contact).

The wiring board 15 is a plate-like wiring board for supporting the lower housing 16, the upper housing 17, and the like. The wiring of the wiring board 15 is connected to the wiring of a tester body (not shown) for testing the test object 12. The wiring board 15 is a member constituting an electrode on the tester main body side and the lower ends of the electrical contacts 20 and 200 come into contact with the contact pads 22 provided on the upper surface of the wiring board 15 to be electrically connected.

The lower housing 16 is a member for supporting the electrical contactors 20 and 200 in a superposed state with the upper housing 17. [ The lower housing 16 is provided with a first support hole 16A into which a lower end of the electrical contactors 20 and 200 is inserted with a diameter slightly larger than the outer diameter of the electrical contactors 20 and 200. The plurality of first support holes 16A are provided at positions corresponding to the respective bump electrodes 13 on the lower surface of the test object 12, respectively. In the first support hole 16A, a lower receiving portion 16B for receiving and supporting the electrical contactors 20, 200 is formed. The lower receiving portion 16B is formed by reducing the inner diameter of the lower end of the first support hole 16A. The lower support portion 16B is engaged with the lower support shoulder portion 73 of the electrical contactor 20 or the lower support shoulder portion 273 of the electrical contactor 200 of the first embodiment, 20, 200) through the lower receiving portion 16B. The electrical contactors 20 and 200 are supported by the lower receiving portions 16B by engaging the lower supporting shoulders 73 and 273 of the electrical contacts 20 and 200 with the lower receiving portions 16B.

The lower housing 16 is overlapped on the upper side of the wiring board 15. A contact pad 22 connected to the tester body by wiring is provided at a position corresponding to each of the first support holes 16A on the upper surface of the wiring board 15. [ The lower ends of the electrical contacts 20, 200 inserted into the first support holes 16A are pressed against the respective contact pads 22 to realize electrical contact.

The lower housing 16 is provided with a pin head coupling hole 23 (see FIG. 3). The pin head fitting hole 23 is a hole for the head portion 39 of the guide pin 37 to engage with. The inner diameter of the pin head fitting hole 23 is set to substantially the same dimension as the outer diameter of the head portion 39 of the guide pin 37 so that the head portion 39 of the guide pin 37 is engaged without moving.

The upper housing 17 is a member for supporting the entire electrical contact 20, 200 in cooperation with the lower housing 16. The upper housing 17 overlaps the lower housing 16 so that the electrical contacts 20 and 200 are brought into contact with the lower housing 16 and the upper housing 17 in a state in which the electrical contacts 20 and 200 can expand and contract As shown in Fig. The upper housing 17 is provided with a second support hole 17A at a position corresponding to the first support hole 16A of the lower housing 16. [ The second support hole 17A is formed to have the same inner diameter as the upper opening of the first support hole 16A (a diameter slightly larger than the outer diameter of the electrical contacts 20 and 200) So as to be vertically movable. The plurality of second support holes 17A are provided at positions corresponding to the respective bump electrodes 13 provided on the lower surface of the test object 12 and are provided at the upper ends of the accommodated electrical contacts 20, So as to be in electrical contact with the electrode 13.

In the second support hole 17A, an upper receiving portion 17B for supporting the electrical contactors 20, 200 from above is formed. The upper receiving portion 17B is formed by reducing the inner diameter of the upper end of the second supporting hole 17A. The upper support portion 17B is engaged with the upper support shoulder portion 79 of the electrical contactor 20 or the upper support shoulder portion 279 of the electrical contactor 200 of the first embodiment in the case of a signal waveform to be described later, The inner diameter of the upper receiving portion 17B is set so that the upper ends of the upper and lower receiving portions 20 and 200 pass through so that the electrical contactors 20 and 200 are supported by the upper receiving portions 17B.

The first support hole 16A and the second support hole 17A constitute an electrical contact support hole 27 in which the entire electrical contactors 20 and 200 are received. The electrical contactors 20 and 200 are in a state of being in a rest state (an external force is extinguished) in a state where the electrical contactors 20 and 200 are received in the electrical contactor support holes 27, And the lower end portion is in a state in which the contact pad 22 provided on the upper surface of the wiring board 15 is pressed.

The upper housing 17 is provided with a pin shaft engagement hole 28 (see FIG. 3). The pin shaft portion engaging hole 28 is a hole to which a shaft portion 40 of a guide pin 37 described later is engaged. The inner diameter of the pin shaft portion engaging hole 28 is set to substantially the same dimension as the outer diameter of the shaft portion 40 of the guide pin 37 so as to engage the shaft portion 40 of the guide pin 37 without moving.

The frame 18 is a member for supporting the wiring board 15, the lower housing 16 and the upper housing 17 integrally and supporting the guide plate 19 in a vertically movable manner. The frame 18 mainly has a frame portion 31, a fixing flange portion 32, and a flange portion 33 for supporting the vertical movement (see Fig. 4).

The shell portion 31 is formed in a rectangular frame shape so as to surround the edges of the lower housing 16, the upper housing 17, and the guide plate 19. A positioning pin (or positioning hole) (not shown) is provided on the lower surface of the mantle 31 and a positioning pin Positioning holes (or positioning pins (not shown) are provided corresponding to the positioning holes). Thus, the positioning pins (or positioning holes) of the lower surface of the box portion 31 and the positioning holes (or positioning pins) of the upper surface of the wiring board 15 are engaged with each other, 31 and the wiring board 15 are precisely positioned and supported. A fixing screw 35 (see Fig. 2) is provided at four corners of the mantle portion 31. As shown in Fig. The fixing screws 35 are inserted into screw holes (not shown) of the wiring board 15 via through holes (not shown) at the four corners of the box frame 31, 15 are fixed.

Two fixing flange portions 32 are provided on the facing inner surface of the rectangular tube-shaped opening portion of the mantle portion 31 so as to face each other. Each of the fixing flange portions 32 is formed in a substantially semicircular shape extending horizontally inwardly from each other. The height of the lower surface of each fixing flange portion 32 (the height from the wiring board 15) is set to a value substantially equal to the overlapping height of the lower housing 16 and the upper housing 17. Thereby, the lower housing 16 and the upper housing 17 overlapping on the wiring board 15 are held between the fixing flange portions 32 and the wiring board 15. Here, when the upper housing 17 and the lower housing 16 are inserted under the fixing flange portion 32, the lower surface of the lower housing is made to be the same as the lower surface of the mantle 31.

A pin hole 38 to which the guide pin 37 is engaged is formed in the center of each fixing flange portion 32. The inner diameter of the pin hole 38 is set to substantially the same dimension as the outer diameter of the shaft portion 40 of the guide pin 37. [

The guide pin 37 has a head portion 39 and a shaft portion 40. The head portion 39 is formed in a disc shape having an outer diameter substantially equal to the inner diameter of the pin head fitting hole 23 of the lower housing 16. The shaft portion 40 is formed in a circular rod shape having an outer diameter substantially equal to the inner diameter of the pin shaft portion engaging hole 28 of the upper housing 17 and the pin hole 38 of the fixing flange portion 32.

The pin head engaging hole 23 of the lower housing 16 and the pin shaft engaging hole 28 of the upper housing 17 and the pin hole 38 of each fixing flange portion 32 are engaged with the guide pin 37 ), So that the shaft is positioned on the same axis.

The head portion 39 of the guide pin 37 is engaged with the pin head portion engaging hole 23 of the lower housing 16 and the shaft portion 40 is engaged with the pin shaft portion engaging hole 28 of the upper housing 17, The lower housing 16, the upper housing 17, and the frame 18 are positioned by being engaged with the pin holes 38 of the base portion 32. [ The lower housing 16 and the upper housing 17 are supported by the lower surface of the fixing flange portion 32 of the frame 18 and the wiring board 15 so as to be vertically inserted into the opening of the frame 18, The substrate 15, the lower housing 16, the upper housing 17, and the frame 18 are accurately positioned and fixed integrally with each other.

The flange portion 33 for supporting the vertical movement is a portion for supporting the guide plate 19 in the opening of the frame 18 so as to be vertically movable. The vertically movable support flange portions 33 are formed at four corners of the opening portion of the rectangular frame-shaped frame 18. As shown in Fig. 4, each of the vertically movable support flanges 33 has a plate portion 42, a guide screw hole 43, and a spring hole 44. [

The plate portion 42 is a plate member integrated with the frame 18 provided at each of the four corners of the frame portion 31 of the frame 18 and extends so as to connect the two frame portions forming the corners. The height of the lower surface of the plate portion 42 is set to be the same height as the lower surface of the fixing flange portion 32. [ The height of the upper surface of the plate portion 42 is set such that the upper surface of the plate portion 42 and the lower surface of the flange portion 54 of the guide plate 19 are brought into contact with each other so that the bump electrode 13 of the test object 12 and the electric contactor 20 And 200 are set so as to make optimum contact with each other. More specifically, the bump electrodes 13 of the test object 12 are brought into contact with the upper ends of the electrical contacts 20 and 200 so that the electrical contacts 20 and 200 are pressed down (see FIG. 6) 42 are set.

The plate portion (42) is provided with a guide screw hole (43) and a spring hole (44). The guide screw hole 43 is a screw hole for engaging the guide screw 46. Only one guide screw hole 43 is provided at the central portion of each plate portion 42 (see FIG. 2). The spring hole 44 is a hole for supporting the spring 47. Two spring holes 44 are provided on both sides of each guide screw hole 43.

The guide screw 46 defines a position of the guide plate 19 in the opening of the frame 18 and allows the guide plate 19 to move up and down. The guide screw 46 is composed of a head portion 48, a guide portion 49, and a screw thread portion 50.

The head portion (48) is a portion for preventing the guide plate (19) from coming off. On the upper surface of the head portion 48, a minus groove 51 for engaging with a minus driver is formed.

The guide portion 49 guides the upward and downward movement of the guide plate 19. The guide portion 49 is provided between the head portion 48 and the screw bar portion 50 and engages with the guide hole 59 of the guide plate 19 to guide the guide plate 19 to move up and down. The length of the guide portion 49 is set such that the lower surface of the head portion 48 is in contact with and supported by the guide plate 19 (the guide plate 19 is pushed up by the spring 47) And 200 are received by the shrinking portion 57 of the guide plate 19. As shown in FIG. 5 shows a state in which the upper ends of the electrical contacts 20 and 200 are received in the shrinking portion 57 of the guide plate 19. As shown in Fig.

The screw thread portion 50 is a portion for fixing the guide screw 46 to the plate portion 42. The screw thread portion 50 is engaged with the guide screw hole 43 of the plate portion 42 and fixes the guide screw 46 to the plate portion 42. [

The spring 47 is a member for resiliently supporting the guide plate 19. The upper end of the spring 47 is attached to the spring hole 44 of the plate portion 42 and is in contact with the rear surface of the flange portion 54 of the guide plate 19. A total of eight springs 47 are urged from below by the guide plate 19 supported by the guide portions 49 of the four guide screws 46 so as to be movable up and down. Thereby, the flange portion 54 of the guide plate 19 is pushed upward until it comes into contact with the underside of the head portion 48 of the guide screw 46, so that it is in a standby state before the contact.

The guide plate 19 supports the subject 12 by positioning and supporting the subject 12 when the subject 12 is mounted on the electrical connection device 11 and the bump electrodes 13 of the subject 12, And the corresponding electrical contactors 20 and 200 are matched with each other. The guide plate 19 mainly consists of a receiving recess 53 and a flange 54.

The import concave portion 53 is a portion that receives the subject 12. The import concave portion 53 is formed in a substantially rectangular saucer shape. The inside of the bottom portion of the import concave portion 53 is formed in a square shape and its dimension is set slightly larger than the external shape of the subject 12. [ Here, the bottom of the import concave portion 53 is also formed in a quadrangular shape because the subject 12 is rectangular. However, when the subject 12 has a different shape, the inside of the bottom portion of the import concave portion 53 Is also shaped to match the subject 12.

The subject 12 is positioned in a state in which the subject 12 is mounted inside the bottom portion of the import concave portion 53. [ A plurality of guide holes 56 are provided in the bottom plate portion 55 of the import concave portion 53. The guide hole 56 is an opening for guiding and receiving the bump electrodes 13 of the test object 12. Each guide hole 56 is formed slightly larger than the bump electrode 13 so as to easily receive the bump electrode 13. [ The bump electrodes 13 of the test object 12 can be positioned above the respective guide holes 56 by receiving the test object 12 into the import concave portion 53. [

A shrinkage portion 57 is formed at the lower end portion of the guide hole 56 so as to receive the upper end portion of the electrical contactors 20 and 200 without passing the bump electrode 13. [ The shrinking portion 57 allows the upper contacts of the electrical contacts 20 and 200 to be received through and enables the electrical contacts 20 and 200 to contact the bump electrodes 13. [

An inclined surface 53B is formed below the upper opening 53A of the import concave portion 53. [ The inclined surface 53B guides the subject 12 to the bottom of the import concave portion 53. [

The flange portion 54 is formed at the four corners of the import concave portion 53 corresponding to the flange portion 33 for supporting the frame 18 in the vertical direction. Each flange portion 54 is provided with a screw head groove portion 58 to which the head portion 48 of the guide screw 46 abuts. The screw head groove portion 58 is provided with a guide hole 59 which is vertically movably engaged with the guide portion 49 of the guide screw 46. The flange portion 54 is engaged with the guide portion 49 of the guide screw 46 to be movable up and down and supported by the flange portion 54 by the spring 47, (19) is exerted upward and downward. The guide plate 19 is pushed down by rotating the guide screw 46 and pushing the import concave portion 53 with the test object 12 mounted thereon downward so that the bump electrode 13 of the test object 12 The upper ends of the electrical contacts 20 and 200 are brought into contact with each other to be inspected.

As described above, in the electrical connecting device 11 of the first embodiment, two kinds of electrical contacts 20 and 200 are applied. The electrical contact which is in contact with the bump electrode 13 at that position in the vicinity of the upper surface of the guide hole 56 of the guide plate 19 and the upper surface of the upper receiving portion 17B of the upper housing 17, It is also possible to provide a mark indicating whether the electric contactor 20 or the electrical contactor 200 is installed. For example, the mark may be distinguished by a different coloring or symbol ("?", "?", Etc.), a protruding shape, or the like, and marking only one side and not marking the other side .

Hereinafter, the configuration of the electrical contact 20 will be described with emphasis on the signal waveform, and the electrical contact 200 according to the first embodiment will be described focusing on the difference from the electrical contact 20 with respect to the signal waveform.

Figs. 7-13 are projections, respectively, showing all or components of the electrical contact 20 in signal waveform emphasis. The electrical contact 20 in signal waveform focus has one first plunger 62, two second plungers 63, and one coil spring 64.

The first plunger 62 serves as a first contact target among the two members to which the electrical contact 20 contacts when the signal waveform is focused on the wiring substrate 15 when applied to the electrical connection device 11 of the first embodiment (The contact pad 22 of the contact pad 22).

The first plunger 62 is formed to have conductivity, and the forming method thereof is not limited. For example, the first plunger 62 may be formed by a cutting process or a Thompson process for the plate material, or the first plunger 62 may be formed by photolithography. If the original material to be formed is not a conductive material, the first plunger 62 may be completed by attaching a conductive material by plating or coating to the state before the first plunger 62 formed outwardly. The method of forming the second plunger 63 described later is also the same as the method of forming the first plunger 62. [

As shown in Fig. 11, the first plunger 62 is generally divided into a coupling portion 66, a spring receiving portion 67, and a contact piece 68. The length of the first plunger 62 is substantially equal to the height of the upper surface of the upper housing 17 from the contact pad 22 of the wiring board 15 when attached to the electrical connection device 11 5 (A)).

The engaging portion 66 directly overlaps with the first plunger 62 and the two second plungers 63 when they are engaged with each other so that the first plunger 62 and the second plunger 63 are in electrical contact with each other Section. The engaging portion 66 is formed in a long plate-like shape and can stably contact the second plunger 63 over a wide area. The engaging portion 66 can be divided into an engaging rod portion 69, a tip end inserting portion 70, and a drop preventing portion 71.

The engaging bar portion 69 is a portion to be supported by the coil spring 64 and is set to a dimension slightly longer than the coil spring 64. [ The width of the engaging rod portion 69 is set to be substantially the same as the inner diameter of the cooperating small diameter portion 84 of the coil spring 64. The four corners of the cross-sectional shape of the engaging rod portion 69 abut on the inner diameter portion of the cooperating small diameter portion 84 of the coil spring 64. [ The circular shape of the inner diameter portion of the contact small diameter portion 84 of the coil spring 64 coincides with or slightly smaller than the circumscribed circle of the engaging rod portion 69 and the engaging rod portion 69 is fixed to the contact small diameter portion 84 are assembled in a slightly tightened state (see Figs. 9 and 10).

The leading end inserting portion 70 is a portion for guiding the insertion of the engaging rod portion 69 into the coil spring 64 at the time of assembling. The tip end inserting portion 70 is formed at the distal end portion (the upper end in Fig. 11) of the engaging rod portion 69. The tip end inserting portion 70 has an inclined surface that is gently curved so as not to interfere with the piercing direction so that it can be easily inserted into the coil spring 64. The tip end inserting portion 70 is positioned between the contact pieces 77 of the two second plungers 63 when assembled and functions to stabilize the distance between the projections 77A of the contact pieces 77. [ The distance between the protrusions 77A of the contact piece 77 is defined by the thickness of the tip inserting portion 70 and therefore the thickness of the engaging portion 66. The thickness dimension of the engaging portion 66 is determined by the protrusion 77A are taken into account.

The dropout preventing portion 71 is a portion for preventing the tip end inserting portion 70 from coming off the coil spring 64 when the tip inserting portion 70 is inserted into the coil spring 64. The dropout preventing portion 71 is formed at the opposite end to the spring receiving portion 67. The dropout preventing portion 71 is formed by protruding the base end portion of the tip end inserting portion 70 to both sides. The width of the fall-off preventing portion 71 protruding to both sides is set so as to come out slightly larger than the inner diameter of the close small diameter portion 84 of the end portion of the coil spring 64 (see FIG. 9).

The spring receiving portion 67 is a portion for receiving the coil spring 64. The spring receiving portion 67 is an end portion provided at a boundary portion between the engaging portion 66 and the contact piece 68. The contact pieces 68 are formed to be wider than the width of the engaging portions 66, and the ends of these contacts serve as the spring receiving portions 67. The contact small-diameter portion 84 of the end portion of the coil spring 64 abuts against the spring receiving portion 67. The first plunger 62 is supported by the elastic force of the coil spring 64 to allow a slight upward and downward movement as an element of the electrical contact 22.

The contact piece 68 is a portion for contacting and electrically connecting to the first contact object (the contact pad 22 of the wiring substrate 15) of the electrical contact 20. The contact piece 68 is provided integrally with the proximal end of the engaging portion 66 (downward in Fig. 11). The contact piece 68 is formed in a rectangular plate shape having a substantially rectangular shape with a width dimension slightly smaller than the inner diameter of the first support hole 16A of the lower housing 16 and the inner diameter of the second support hole 17A of the upper housing 17 And a lower end portion 16B of the lower housing 16, which is smaller in width than the upper portion of the rectangular plate continuous with the upper portion of the rectangular plate. The tip of the contact piece 68 is formed in a curved shape so as to stably contact the contact pad 22 of the wiring board 15 on the flat surface. In the contact piece 68, a lower support shoulder portion 73 is formed at the boundary between the upper portion and the upper portion of the rectangular plate. The lower support shoulder portion 73 is engaged with the lower receiving portion 16B of the lower housing 16 so that the contact piece 68 does not fall off from the first support hole 16A. 5 and 9) of the contact piece 68 come into contact with the first support hole 16A from the first support hole 16A with the lower support shoulder portion 73 engaged with the lower receiving portion 16B of the lower housing 16. [ And is projected downward.

The second plunger 63 cooperates with the first plunger 62 so as to move between the two contact objects, that is, the first contact object (the contact pad 22 of the wiring substrate 15) (The electrode 13) of the plate-like plunger. The second plunger 63 directly touches the second object to be contacted (the bump electrode 13).

The second plunger 63 can be generally divided into an engaging portion 75, a spring receiving portion 76, and a contact piece 77 as shown in Fig. 12 (A). Here, Fig. 12A shows the second plunger 63 itself, and Figs. 12B and 12C show a modified example of the second plunger 63. Fig.

The two second plungers 63 sandwich the first plunger 62 and are assembled by the coil spring 64 in this state to constitute the electrical contactor 20 with regard to the signal waveform. The engagement portion 66 of the first plunger 62 is fitted with the engagement portion 75 of the two second plungers 63 facing each other. The plungers 62 and 63 are brought into contact with the contact pad 22 and the bump electrode 13 in a state in which one of the first plunger 62 and the two second plungers 63 are electrically connected to each other, The pad 22 and the bump electrode 13 are electrically conducted.

The two second plungers 63 have the same shape. It is possible to make good contact with the second contact object (bump electrode 13) by constructing the electrical contact 20 with the same shape of the second plunger 63 facing the signal waveform. The two second plungers 63 can slide independently of each other even when the first plunger 62 is clamped. Even if the shape of the second object to be contacted (bump electrode 13) is a shape in which the contact height or the like changes due to deviation from a position such as a ball or the like, independent slides can be made, The positions of the second plungers 63 in the up and down directions follow, and the reliability of the electrical contact can be enhanced.

The engaging portion 75 is a portion for overlapping and electrically contacting the engaging portion 66 of the first plunger 62 when the first plunger 62 and the second plunger 63 are engaged with each other. The engaging portions 75 of the two second plungers 63 sandwich the engaging portions 66 of the first plunger 62 from both sides to electrically contact the first plunger 62 and the second plunger 63 . The engaging portion 75 is formed in a long plate-like shape so that the contact with the engaging portion 66 of the first plunger 62 can be realized as wide as possible. The engaging portion 75 is composed of the engaging bar portion 80, the tip end inserting portion 81, and the fall-off preventing portion 82.

The engaging rod portion 80 is a portion to be supported by the coil spring 64 while sandwiching the engaging portion 66 of the first plunger 62 and is set to a dimension slightly longer than the coil spring 64. [ The cross-sectional dimension (width, thickness) of the engaging rod portion 80 is a total of eight corner portions (width and thickness) formed by the engaging rod portion 69 of the first plunger 62 and two engaging rods 80 9) is selected so as to be in contact with the inner diameter portion of the cooperating small diameter portion 84 of the coil spring 64. As shown in Fig. In other words, the inner diameter of the cooperating small diameter portion 84 of the coil spring 64 is set to be a circumscribed circle having a cross-sectional shape in which the coupling bars 80, 69, 80 are engaged, ) Is slightly tightened (see Figs. 9 and 10). The width dimension of the engaging rod portion 80 is smaller than the width dimension of the engaging rod portion 69 of the first plunger 62 so as to be in the tightening state.

The tip end insertion portion 81 is a portion for guiding the insertion of the coupling rod portion 80 into the coil spring 64. The tip end insertion portion 81 is formed at the distal end side (lower side in FIG. 12) than the engagement rod portion 80. The tip end insertion portion 81 has an outer shape that does not interfere with the piercing direction and can be smoothly inserted into the coil spring 64. For example, in a state where the engaging rod portion 69 of the first plunger 62 and the engaging rod portion 80 of the one second plunger 63 are inserted in the coil spring 64 in advance, The engaging rod portion 80 of the engaging rod portion 63 is inserted into the coil spring 64 so that the leading end insertion portion 81 of the other engaging rod portion 80 can be smoothly inserted into the coil spring 64.

The dropout prevention portion 82 is a portion for preventing the tip end insertion portion 81 from coming off the coil spring 64 when the tip end insertion portion 81 is inserted into the coil spring 64. The dropout prevention portion 82 is provided at the proximal end portion of the distal end insertion portion 81 (the boundary portion between the coupling rod portion 80 and the distal end insertion portion 81). The dropout prevention portion 82 is formed by projecting the base end portion of the tip end insertion portion 81 to both sides. The width dimension of the fall-off preventing portion 82 protruding to both sides is set so as to protrude slightly more than the inner diameter of the small-diameter portion 84 of the end portion of the coil spring 64 when assembled. That is, in the state where the two engaging rods 80 are overlapped on both sides of the engaging rod 69 of the first plunger 62, the outer side of two engaging rods 69 overlapping each other on both sides of the engaging rod 69 10) is slightly larger than the inner diameter of the small-diameter small-diameter portion 84 of the end portion of the coil spring 64 (as shown in Fig. 10), the four corners (two corners outside the fall- It is set to come out.

The spring receiving portion 76 is a portion for contacting one end of the coil spring 64 to receive the force. The spring receiving portion 76 is an end portion provided at a boundary portion between the engaging portion 75 and the contact piece 77. The contact piece 77 has a larger width than the width of the engaging portion 75 and the portion (end portion) having a width difference at the boundary is the spring receiving portion 76. The second plunger 63 is slidably supported by the coil spring 64 in the electrical contact 22 by abutting the contact small diameter portion 84 of the end of the coil spring 64 against the spring receiving portion 76, .

The contact piece 77 is a member for contacting and electrically connecting to the second contact object (bump electrode 13). The contact piece 77 extends integrally to the proximal end side (upper side in Fig. 12) of the engaging portion 75. The contact piece 77 has an approximately rectangular plate portion whose width dimension is slightly smaller than the inner diameter of the second support hole 17A of the upper housing 17 and an upper portion receiving portion 17B of the upper housing 17 And is formed with a tip portion having a width dimension smaller than the width dimension of the upper portion of the rectangular plate that enters the reduced portion 57 of the guide plate 19. [ On the contact piece 77, an upper support shoulder portion 79 is formed at the boundary between the upper portion and the upper portion of the rectangular plate. The upper support shoulder portion 79 is engaged with the upper receiving portion 17B of the upper housing 17 so that the contact piece 77 does not escape from the second support hole 17A. 12) of the contact piece 77 protrudes upward from the second support hole 17A in a state in which the upper support shoulder portion 79 is engaged with the upper receiving portion 17B of the upper housing 17 .

The tips of the upper ends of the respective contact pieces 77 are formed in two projections. That is, the tip of the tip of the contact piece 77 is folded in a U-shape to form a concave portion, and two projections 77A are formed on both sides of the concave portion. In addition, a tapered surface 77B (see Fig. 8) is formed on the projection 77A. Thus, each of the two projections 77A is formed into two sharp end shapes. The space formed by the two opposing tapered surfaces 77B with the concave portion interposed therebetween serves as a space for receiving the convex portion of the top portion of the bump electrode 13. [ Thus, when the bump electrode 13 and the second plunger 63 are brought into contact with each other, the bump electrode 13 is received in the space formed by the two tapered surfaces 77B, It is possible to prevent the bump electrode 13 from being excessively pressed and broken. When the two second plungers 63 sandwich the first plunger 62, a tapered surface 77B is provided on the outer side seen from the periphery (see Fig. 8). A total of four protrusions 77A are surely brought into contact with the bump electrodes 13 and slightly stuck to the bump electrodes 13 at the contact points so that the bump electrodes 13 are electrically contacted securely.

The second plunger 63 is configured such that the two protrusions 77A introduce a design slit that is easy to be widened in the width direction of the second plunger 63 as shown in Figs. 12B and 12C Maybe.

13, the coil spring 64 covers the outer circumferences of the engaging rods 69, 80 of the first plunger 62 and the second plunger 63, and the coil spring 64 is fixed to the spring receiving portions 67, 76 And the first plunger 62 and the second plunger 63 are electrically connected to each other by supporting the plungers 62 and 63 at their respective ends so as to allow the plungers 62 and 63 to move up and down. The engaging portions 66 and 75 of the first plunger 62 and the second plunger 63 are supported so as to overlap each other between both ends of the coil spring 64. [

The coil spring 64 is formed such that the intermediate portion has a larger diameter and both ends have a smaller diameter. The diameter of the intermediate portion is set to a size (see Fig. 9) in which the cross-sectional shape formed by the engaging rod portion 69 of the first plunger 62 and the engaging rod portion 80 of the two second plungers 63 And functions as a coil spring in which the intermediate portion stretches and shrinks. The outer diameter of the intermediate portion is set slightly larger than the maximum width dimension of the first plunger 62 and the second plunger 63. Both ends of the small diameter of the coil spring 64 constitute the contact small diameter portion 84. The inner diameter of the contact small diameter portion 84 is a diameter of a circumscribed circle circumscribing the cross-sectional shape formed by the engaging rod portion 69 of the first plunger 62 and the engaging rod portion 80 of the two second plungers 63 As shown in FIG.

The electrical contact 20 in the emphasis of the signal waveform has one of the first plunger 62 and the two second plungers 63 connected to the engaging portions 66 and 75 with the respective contact pieces 68 and 77 in opposite directions, The coil spring 64 is closed at the positions of the spring receiving portions 67 and 76 so that the first plunger 62 and the second plunger 63 It is an impossible but slidable assembly.

Next, the configuration of the electrical contact 200 of the first embodiment will be described. Figs. 1, 14 to 19 are perspective or projection views showing all or components of the electrical contact 200 of the first embodiment, respectively.

The electrical contactor 200 of the first embodiment has two plungers 263 and one plunger coil spring 201.

The two plungers 263 in the electrical contactor 200 of the first embodiment are the same as or very similar to the two second plungers 63 in the signal waveform emphasizing electrical contact 20. Therefore, the detailed description of the plunger 263 is omitted (see Fig. 12). When the plunger 263 in the electrical contact 200 of the first embodiment and the second plunger 63 in the signal waveform emphasizing electrical contact 20 are the same, It is possible to make the parts common in the electrical contact 20 in the emphasis of the signal waveform, thereby contributing to cost reduction.

In the following description, the sign of each part of the plunger 263 is denoted by a sign that is larger than the sign of the corresponding part in the second plunger 63 by "200" It is assumed that the sub-element is specified.

The plunger-cum-coil spring 201 is a member that exhibits the function of the first plunger 62 and the coil spring 64 in the electrical contact 20 when the signal waveform is emphasized.

The plunger-combined coil spring 201 has a plunger portion 262 and a coil spring portion 264.

The plunger portion 262 is a portion exhibiting the same function as that of the first plunger 62 in the electrical contact 20 when the signal waveform is emphasized. The plunger portion 262 is a first contact object of the two contacts to which the electrical contactor 200 of the first embodiment contacts (the wiring substrate 15 when applied to the electrical connection device 11 of the first embodiment) And the wire member constituting the plunger portion 262 is provided on the same plane. This plane can be made to correspond to the plane on which the plate material of the first plunger 62 in the electrical contact 20 is installed in the case of the signal waveform. The plunger portion 262 has a coupling portion 266 and a contact portion 268.

The contact portion 268 is a portion which is in contact with the first contact object (the contact pad 22 of the wiring substrate 15) of the electrical contactor 200 and electrically connected thereto. The contact portion 268 has the same shape in which the wire material continuous in the coil spring portion 264 is extended along the contour of the contact piece 68 in the first plunger 62, ) Of the outer circumferential surface. The lower support shoulder portion 273 is engaged with the lower receiving portion 16B of the lower housing 16 so that the contact portion 268 is unnecessarily engaged with the first support hole 16A As shown in Fig. The shape of the tip of the contact portion 268 is not limited to that shown in Fig. 18, and may have another shape as illustrated in Fig. Fig. 20 (A) shows an example of a tip shape tangent at two points, Fig. 20 (B) shows an example of a tip shape tangent to a straight line, Fig. 20 (C1) An example of a tip shape in which a part comes out from a plane and a contact length is made longer is shown.

The engaging portion 266 is engaged with the two plungers 263 in the inner space of the coil spring portion 264 so that the plunger portion 262 and the two plungers 263 are electrically connected to each other. to be. The wire members constituting the engaging portion 266 are continuous from the wire members constituting the contact portion 268. [ It is only necessary to form the engaging portion 266 by extending the wire in a straight line or a curved line on the above-described plane so as to fit the two plungers 263, and the locus drawn by the wire rod is not limited. Fig. 21 shows various examples of the locus drawn by the wire rod of the coupling portion 266. Fig. Fig. 21 (A) shows an example in which the wire rod is slightly pulled out from the contact portion 268 to form the engaging portion 266. Fig. Fig. 21 (B) shows an example in which the wire rod is pulled upward in a wave form from the contact portion 268 to be the engaging portion 266. Fig. Fig. 21 (C) shows an example in which the wire rod is pulled out straight from the contact portion 268 upwardly into the engaging portion 266. Fig. The length of the engaging portion 266 that has a certain length to the upper side of the abutment portion 268 as shown in Figs. 21 (B) to 21 (C) Or less than the length of the coupling bar 280 of the coupling portion 280. [

The coil spring portion 264 supports the two plungers 263 and forces the plunger 263 upward and the contact portion 268 of the plunger portion 262 continuing from the magnet downward . The coil spring portion 264 has an upper end portion and an intermediate portion with a larger diameter and a lower end portion with a smaller diameter. The diameter of the upper end portion and the middle portion is selected to be a size such that the engaging portion 266 of the plunger portion 262 and the connecting rod portion 280 of the two plungers 263 that sandwich the plunger portion 263 do not contact each other . The wire rod at the upper end of the coil spring portion 264 extends over a line (diameter) bisecting the circular shape when the upper end portion and the middle portion are viewed from above, so as to be sandwiched between the two plungers 263 ). And the intermediate portion functions as a coil spring that expands and contracts. The lower end of the small diameter portion of the coil spring portion 264 is a contact small diameter portion 284. The plunger portion 262 and the plunger 263 can be slid with respect to each other by tightening the small diameter portion of the small diameter portion 284 to be the plunger portion 262 and the two plungers 263 sandwiching the plunger portion 262 .

The contact small diameter portion 284 is provided only at the lower end portion of the coil spring portion 264 in the electrical contactor 200 of the first embodiment, The plunger portion 262 and the plunger 263 can be slidably supported by each other so as to provide a more stable support.

The electrical contact 20 and the electrical contact according to the first embodiment, which are configured as described above, are used as follows.

First, the test object 12 is mounted on the electrical connecting device 11. [ At this time, the subject 12 is mounted on the import concave portion 53 of the guide plate 19. That is, the test object 12 is mounted on the bottom plate portion 55 while being positioned along the inclined surface 53B of the upper opening 53A. Thereby, the bump electrode 13 of the test object 12 is received in the guide hole 56 of the bottom plate portion 55. The upper end of the contact piece 77 of the electrical contact 20 and the upper end of the contact piece 277 of the electrical contact 200 of the first embodiment are received in the reduced portion 57 in the course of signal waveforms.

When the subject 12 is depressed in this state, the bump electrodes 13 protrude from the protrusions 77A of the two second plungers 63 in the electrical contact 20 in the signal waveform-wise direction, Contact with the protrusions 277A of the two plungers 263 in the electrical contactor 200 of the electrical contacts 200 and 200 and the electrical contacts 20 and 200 are depressed (for example, from the state of FIG. 5 to the state of FIG. 6 ).

The protrusions 77A and 277A try to slip in the circumferential direction on the spherical surface of the bump electrode 13 when the protrusions 77A and 277A at the tip of the contact pieces 77 and 277 are about to contact the bump electrode 13 A force of moving in a direction away from each other acts to reliably contact the bump electrode 13. [

The electrical contact between the slidably fitted first plunger 62 and the second plunger 63 is assured in a state in which the electrical contact 20 is pressed down in the middle of the signal waveform. The plunger portion 262 of the coil spring 201 serving as a plunger slidably fitted in contact with the plunger 263 is in electrical contact with the electrical contact 200 of the first embodiment.

Since the two second plungers 63 and the two plungers 263 slide independently of each other, when the bump electrodes 13 are deformed, the two second plungers 63 The two second plungers 63 and the two plungers 263 slide and contact with each other even when the height of the projection 77A or the contact portion of the two plungers 263 to the projection 277A is different .

Thereby, the two contact objects (the contact pad of the wiring board 15 and the bump electrode 13) are electrically connected to the electrical signal contact 20 and the electrical contactor 200 of the first embodiment. In this state, an electrical signal is transmitted between the two contact objects via the electrical contactor 20 or the electrical contactor 200 of the first embodiment in the signal waveform emphasis.

In the electrical contact 20 with emphasis on the signal waveform, the first plunger 62 and the second plunger 63 are formed in a flat plate shape, and an electrical signal is sent and received by surface contact. In the electrical contactor 200 of the first embodiment, the plunger portion 262 of the plunger coil spring 201 is formed of a wire material, and the plunger 263 is formed in a flat plate shape, . Therefore, it can be said that the performance of the electrical contact 20 in terms of the signal waveform is higher than that of the electrical contact 200 of the first embodiment, from the viewpoint of the transmission and reception of the electrical signal.

In the inspection apparatus to which the electrical connection device 11 of the first embodiment is applied, if there is a signal with a large weight of the shape of the signal waveform to be received from the subject 12, ("1" or "0") or a signal having a large weight (such as a digital signal) at a constant voltage value or a constant current value. That is, if there is a signal having a strict precision required for transmission between two contact objects, there is also a signal whose accuracy is not strictly demanded. In the electrical connecting device 11 of the first embodiment, an electrical contact 20 for signal waveform is applied where an electronic signal is transmitted, and an electrical contact 200 ) Is applied.

According to the electrical contact 200 of the first embodiment, the following effects can be obtained.

According to the electrical contact 200 of the first embodiment, since the plunger and coil spring exerts the function of the plunger and the function of the coil spring with one member, the number of parts can be reduced. As a result, an easy assembly process and a reduction in cost can be expected.

Further, since the portion of the plunger-cum-coil spring that contacts the first contact object has an outer shape similar to that of the plunger, the contact with the contact object can be made good. As described above, in the technique of contacting the object to be contacted by the coil spring disclosed in Patent Document 2, since the end of the spiral wire is in contact with the object to be contacted, the contact is bad.

In addition, according to the electrical contactor 200 of the first embodiment, as the plunger 263 in the electrical contactor 200, a member similar to the second plunger 63 in the electrical contact 20 in the signal waveform is applied It is also possible to make it cheaper in this respect as well.

According to the electrical contactor 200 of the first embodiment, when the electrical contactor 200 of the first embodiment having different lengths is realized, the length of the plunger coil spring 201 (for example, And the plunger 263 can be shared by electrical contacts of different lengths. In addition, the distance between the two plungers 263 can be easily selected by selecting the diameter of the wire rod of the coil spring 201 serving as the plunger.

According to the electrical contact 200 of the first embodiment, since the contact portion formed by bending the coil wire material is used as the contact portion with the first contact object, the degree of freedom of the tip shape is high and the shape of the contact object Or the like can be applied.

According to the electrical connecting device 11 of the first embodiment, since the electrical contactors 20 of the signal waveforms and the electrical contactors 200 of the first embodiment are used separately in accordance with the properties of signals flowing at the time of measurement, It is possible to apply the electrical contactor 200 between the contact objects of two members where the waveform is not so much emphasized, and an electric contactor of a quality suitable for the portion can be applied according to each position. As a result, the electrical connecting device 11 of the first embodiment can be made inexpensive.

(B) Another embodiment

In the description of the first embodiment, various modified embodiments have been described, but there are further modified embodiments exemplified below.

Although the electrical connecting device 11 of the first embodiment is a combination of the electrical contactors 20 of the signal waveform and the electrical contactors 200 of the first embodiment, It goes without saying that the electrical connecting device may be constructed so as to be the electrical contactor 200. [

In the above example, two signal plethysensitive electrical contacts 20, two plungers 263, two plungers 63, one plunger 62, and one plunger coil spring 201 The electrical contactor 200 of the first embodiment in which the plunger portion 262 is one may be provided, but one plunger or plunger portion connected to the first contact object or the second contact object may be provided one by one. In this case, the diameters of the coil spring 64 and the plunger coil spring 201 at both ends or one end of the small-diameter portion may be selected and supported in consideration of the plunger or the plunger portion. Conversely, there may be one plunger connected to the first contact object, and two plungers or plunger portions connected to the second contact object. In the case of constructing two plunger portions by the coil wire material, the portion corresponding to the contact portion may be constituted by doubling up and down in the vertical direction.

INDUSTRIAL APPLICABILITY The electrical contactor of the present invention can be used throughout an apparatus which is brought into contact with an electrode or the like equipped on a wiring board or a semiconductor integrated circuit. The electrical connecting apparatus of the present invention is an apparatus using at least a part of the electrical contact of the present invention, and the use of the apparatus is not limited to the testing apparatus.

11: electrical connecting device 12: subject to be inspected
13: bump electrode (second contact object) 15: wiring board
16: Lower housing 17: Upper housing
18: Frame 19: Guide plate
20: Electrical contact with emphasis on signal waveform
22: contact pad of the wiring board (first contact target)
62: first plunger 63: second plunger
64: coil spring 200: electrical contact of the first embodiment
201: Plunger combined coil spring 262: Plunger part
263: plunger 264: coil spring part
266: engaging portion 268:

Claims (6)

A plunger coil spring integrally formed by the same wire member for applying a force in the direction of extension to collect the force at the time of compression; And
A plunger in contact with a second contact object, wherein a proximal end wire portion of the plunger portion is in electrical contact with a plane of the plunger, and the plunger is retractably supported by the coil spring portion in the elongation direction, ;
And an electrical contact.
2. The electrical contact according to claim 1, wherein two of the plungers are provided so as to sandwich the proximal end side wire portion of the plunger portion.
The plunger according to claim 1 or 2, wherein the plunger portion has a wire member portion that is directed toward the first contact object, a wire member portion that contacts the first contact object, and a wire member portion that is away from the first contact object Electrical contact.
4. The electrical contact according to claim 3, wherein a wire member portion that contacts the first contact object extends in a waveform and contacts the first contact object with a plurality of protrusions protruding toward the first contact object.
An electrical connecting apparatus having a plurality of electrical contacts electrically contacting a first contact object and a second contact object,
The electrical connecting device according to any one of claims 1 to 4, wherein at least a part of the electrical contact is applied.
6. The electric connector according to claim 5, further comprising a second electrical contact using a plunger other than the first electrical contact according to any one of claims 1 to 4, wherein the plunger of the first electrical contact and the plunger of the second electrical contact Are in the same shape.

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