CN105322337B - Electrical contact and arrangements of electric connection - Google Patents
Electrical contact and arrangements of electric connection Download PDFInfo
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- CN105322337B CN105322337B CN201510351110.7A CN201510351110A CN105322337B CN 105322337 B CN105322337 B CN 105322337B CN 201510351110 A CN201510351110 A CN 201510351110A CN 105322337 B CN105322337 B CN 105322337B
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- electrical contact
- plunger
- helical spring
- electrical
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Abstract
The present invention is supplied to a kind of electrical contact that sufficient electrical contact performance can be realized with less element.Electrical contact of the invention, which has to save up strength when the rod-insertion section that (1) is contacted with the 1st contact object and compression, is formed the integrated plate plunger contacted as the helical spring of plunger and (2) with the 2nd contact object by same wire rod to the coil spring part that prolonging direction exerts a force, the wire segment of the base end side of above-mentioned rod-insertion section and the plane of the plunger are in electrical contact, while the plunger can telescopically be supported by above-mentioned coil spring part on prolonging direction.Electrical contact of the invention, in the arrangements of electric connection with multiple electrical contacts for being electrically connected the 1st contact object with the 2nd contact object, electrical contact of the invention is can be used at least part electrical contact.
Description
Technical field
The present invention relates to electrical contact and arrangements of electric connections, to be able to use in integrated with such as wiring substrate and semiconductor
The electrical contact that the electrode that circuit etc. has contacts and the arrangements of electric connection with multiple electrical contacts.
Background technique
The electrical contact for being electrically connected to each other the circuit etc. on the wiring substrate of opposed arranging is well-known.As in this way
Electrical contact, it can be cited for example that the electrical contact of the records such as patent document 1 and patent document 2.
The electrical contact 1 recorded on patent document 1, as shown in Figure 22,23, two contact plugs 2 and line with same shape
Coil spring 3.Contact plug 2 mainly has locking pawl 4, locking hole 5, flange part 6 and pin front end 2A.Locking pawl 4 is arranged 2
And keep it opposite, by having flexible support rod portion 4A to support.By means of this, two locking pawls 4 are closely separated.It is locking
Hole 5 is the chimeric hole of the locking pawl 4 of another contact plug 2, forms rectangle according to the width of locking pawl 4.By means of this, two are contacted
Pin 2 around length direction axis be staggered 90 degree it is opposite in the up-down direction, by means of along the vertical direction be relatively close to engaging, with
Two locking pawls 4 of one contact plug 2 are sticked in the opening of the locking hole 5 of another contact plug 2 by this, realize two contact plugs 2
Connection.Flange part 6 is the part abutted with helical spring 3.Two contact plugs 2 are to be respectively inserted the state card of helical spring 3
It closes, by means of this, the both ends of helical spring 3 are abutted with each flange part 6 respectively, are assembled into electrical contact 1.The electrical contact assembled in this way
1 both ends form the pin front end 2A with the electrical contacts such as external electrode respectively.
Also, electrical contact 7 described in Patent Document 2 has plunger 8 and helical spring 9 as shown in figure 24.Plunger 8 is formed carefully
Long plate, the extension 8A of helical spring 9 is born in setting at an upper portion thereof, and in the extension, the top of 8A forms and contacts with electrode
Portion of terminal 8B.The axle portion 8C being inserted into helical spring 9 freely can be moved up and down by being formed in the lower part of extension 8A.Spiral shell
Rotation spring 9, which is formed, can move up and down the internal diameter for being inserted into axle portion 8C freely.The diameter of the lower end side of helical spring 9 is slow
Slow to reduce, the smallest lower end of diameter and external electrode etc. contact.
Existing technical literature
Patent document 1: 2008-No. 516398 bulletins of Japanese Unexamined Patent Application Publication
Patent document 2: Japanese Unexamined Patent Publication 2004-152495 bulletin
Summary of the invention
Problems to be solved by the invention
Electrical contact 1 described in Patent Document 1, with the flexible of the electrical contact 1, the locking pawl 4 of the contact plug 2 of a side and another
When the periphery multiple-contact of the locking hole 5 of the contact plug 2 of one side, locking pawl 4, support rod portion 4A are damaged due to abrasion etc.
Wound, poor durability.
Also, each contact plug 2, engages due to being its locking pawl 4 with the locking hole 5 of opposite side, the area that contacts with each other is small, because
What this mainly undertook electrical connection is helical spring 3.The part of locking pawl 4 and support rod portion 4A must be to be inserted into helical spring 3
Conditional extensions be embedded in the locking hole 5 of other side side, therefore helical spring 3 will form and can bind the internal diameter of contact plug 2 and be
Difficult.And helical spring 3 is compressed spring, it is also few with the contact point of contact plug 2, therefore each contact plug 2 and helical spring 3
Between close degree it is poor.So the contact portion of the flange part 6 of each contact plug 2 and helical spring 3 constitutes central current access, but
It is that contact area is narrow, be easy to happen abrasion, cause corrosion etc., electrical contact performance is poor.And the contact jaw of contact plug 2 forms V
Font incision, in the case that hemispheric bump electrode (bump electrode) is contact object, on the depth direction of V word
More or less position deviation, electrical contact degenerate quickly.
Moreover, the electrical contact 1 in order to realize different length, contact plug 2 and helical spring 3 must all use the length
Contact plug, helical spring.In the case that the type of electrical contact 1 is more, the cost of the components as each element is also high.
Electrical contact 7 described in Patent Document 2 has the advantages that utilize the 9 two part formation of plunger 8 and helical spring.But
It is that the internal diameter of helical spring 9 is set so as to the axle portion 8C of plunger 8 moving up and down the size being inserted into freely, therefore
Plunger 8 and helical spring 9 do not contact with each other or poor electric contact.It is mainly inserted what plunger 8 was electrically connected with helical spring 9
The contact point of the upper end of the extension 8A and helical spring 9 of stick 8.Therefore contact area is small, is easy due to originals such as abrasion, corrosion
The poor contact because caused by, there are poor electric contact, the problem of poor durability.
Although also, being to be contacted using the end of helical spring 9 with the electrode of a side, helical spring 9 is due to being spiral
Shape winding, the cutting end of end is nearby and non-horizontal, and this point also causes electrical contact performance to degenerate.
Moreover, the electrical contact 7 in order to realize different length, plunger 8 and helical spring 9 are also using the component of the length
Words, the cost of the part as each element are also high.Conversely, being adopted in the case where being only made into helical spring 9 and can be used for different length
In the case where long electrical contact 7, the part that plunger 8 is not at internal helical spring 9 is longer, once there is a certain external force to apply
It in radial direction, is easy for deforming, electrical contact 7 is possible to sufficiently to work.
The present invention is made in view of premises problem, and the present invention, which provides, to be realized sufficiently using less element
Electrical contact electrical contact and using such electrical contact arrangements of electric connection.
The means solved the problems, such as
1st electrical contact of the invention, which is characterized in that have the rod-insertion section and compression that (1) is contacted with the 1st contact object
When save up strength the coil spring part that exerts a force to prolonging direction by same wire rod formed the integrated helical spring as plunger and
(2) plunger of the plate contacted with the 2nd contact object, the wire segment of the base end side of above-mentioned rod-insertion section and the plane electricity of the plunger
Contact, while the plunger can telescopically be supported by above-mentioned coil spring part on the prolonging direction.
Herein, two above-mentioned plungers are arranged in the wire segment for preferably clipping the base end side of above-mentioned rod-insertion section.
Also, preferably above-mentioned rod-insertion section has the wire segment towards above-mentioned 1st contact object side, connects with the above-mentioned 1st
It touches the wire segment of object contact and leaves the wire segment of above-mentioned 1st contact object side, and preferably with above-mentioned the
The wire segment of 1 contact object contact is with wavy extension, using to above-mentioned 1st contact object side multiple protruding portion outstanding
It is contacted with above-mentioned 1st contact object.
2nd present invention is that have being electrically connected for multiple electrical contacts for being in electrical contact the 1st contact object and the 2nd contact object
Device, which is characterized in that at least part electrical contact uses the 1st electrical contact of the invention.
Herein, preferably also using the 1st electrical contact of the invention (the 1st electrical contact) outside, use the 2nd electricity of plunger
The plunger of contact, the plunger and above-mentioned 2nd electrical contact of above-mentioned 1st electrical contact is of similar shape.
If available to realize the electrical contact being adequately in electrical contact with a small amount of element using the 1st present invention.Such as
Fruit uses the 2nd present invention, then can be realized the arrangements of electric connection using the 1st electrical contact of the invention.
Detailed description of the invention
Fig. 1 is the perspective view for indicating the electrical contact of the 1st implementation form.
Fig. 2 is the plan view for indicating the arrangements of electric connection of the 1st implementation form.
Fig. 3 is the sectional view (the III-III line of Fig. 2 to pseudosection) for indicating the arrangements of electric connection of the 1st implementation form.
Fig. 4 is the sectional view (the IV-IV line of Fig. 2 to pseudosection) for indicating the arrangements of electric connection of the 1st implementation form.
Fig. 5 is the enlarged view for indicating the installation part of the electrical contact of arrangements of electric connection of the 1st implementation form, is to indicate
With the front of the electrical contact of the discontiguous state of electrode of inspected object or the sectional view of side.
Fig. 6 is the enlarged view for indicating the installation part of the electrical contact of arrangements of electric connection of the 1st implementation form, is to indicate
The front of the electrical contact of the state contacted with the electrode of inspected object or the sectional view of side.
Fig. 7 is the front view for indicating to pay attention to the electrical contact of signal waveform.
Fig. 8 is the side view for indicating to pay attention to the electrical contact of signal waveform.
Fig. 9 is the IX-IX line of Fig. 7 to pseudosection.
Figure 10 is the X-X line of Fig. 7 to pseudosection.
Figure 11 is the front view for indicating to pay attention to the 1st plunger of the electrical contact of signal waveform.
Figure 12 is the front view for indicating to pay attention to the 2nd plunger of the electrical contact of signal waveform.
Figure 13 is the front view for indicating to pay attention to the helical spring of the electrical contact of signal waveform.
Figure 14 is the front view for indicating the electrical contact of the 1st implementation form.
Figure 15 is the side view for indicating the electrical contact of the 1st implementation form.
Figure 16 is the plan view for indicating the electrical contact of the 1st implementation form.
Figure 17 is the ground plan for indicating the electrical contact of the 1st implementation form.
Figure 18 is the front view for indicating the helical spring as plunger of electrical contact of the 1st implementation form.
Figure 19 is the side view for indicating the helical spring as plunger of electrical contact of the 1st implementation form.
Figure 20 is the shape for indicating the contact portion of the rod-insertion section of the helical spring as plunger of electrical contact of the 1st implementation form
The explanatory diagram of the example of shape.
Figure 21 is the engaging portion wire rod for indicating the rod-insertion section of the helical spring as plunger of electrical contact of the 1st implementation form
The trajectory diagram drawn.
Figure 22 is the perspective view for indicating existing electrical contact (one).
Figure 23 is the exploded perspective view of the electrical contact of Figure 22.
Figure 24 be indicate existing electrical contact (secondly) perspective view.
Symbol description
11 arrangements of electric connections
12 inspected objects
13 concave-convex (bump) electrodes (the 2nd contact object)
15 wiring substrates
16 downside shells
17 upper housings
18 frames
19 guide plates
20 pay attention to the electrical contact of signal waveform
The engagement pad (the 1st contact object) of 22 wiring substrates
62 the 1st plungers
63 the 2nd plungers
64 helical springs
The electrical contact of 200 the 1st implementation forms
201 double as the helical spring of plunger
262 rod-insertion sections
263 plungers
264 coil spring parts
266 engaging portions
268 contact portions
Specific embodiment
(A) the 1st implementation form
The 1st implementation form of electrical contact and arrangements of electric connection of the invention is illustrated with reference to the accompanying drawings.
With reference first to Fig. 2~Fig. 6 to the arrangements of electric connection 11 of the 1st implementation form of the electrical contact for using the 1st implementation form
It is illustrated.In addition, the arrangements of electric connection 11 of the 1st implementation form, inspected object is quadrilateral object, but even if tested
Looking into object is other shapes, and the present invention also can be used.
Fig. 2 is the plan view for indicating the arrangements of electric connection of the 1st implementation form, and Fig. 3 is the III-III line of Fig. 2 to view section
Figure.Fig. 4 is the IV-IV line of Fig. 2 to pseudosection.Also, Fig. 5 and Fig. 6 is respectively the arrangements of electric connection for indicating the 1st implementation form
Electrical contact installation part mian part amplification view, Fig. 5 indicate electrical contact and inspected object the discontiguous shape of electrode
State, Fig. 6 indicate the state that electrical contact is contacted with the electrode of inspected object.Herein, Fig. 5 (A) and Fig. 6 (A) is respectively visual
The sectional view that the face side of electrical contact is drawn.Fig. 5 (B) and Fig. 6 (B) is respectively the section that the side surface side of visual electrical contact is drawn
Figure.In addition, being described below with reference to upper and lower description according to the up and down direction in Fig. 2~Fig. 6.
Arrangements of electric connection 11 is the device that the energizing test etc. of inspected object 12 uses.Inspected object 12 is for example to collect
At semiconductor devices such as circuits.Multiple bump electrodes 13 are arranged in inspected object 12 in its lower section (referring to Fig. 5, Fig. 6).Salient point electricity
Pole 13 is the electrode for being set to 12 lower surface of inspected object.Multiple bump electrodes 13 are provided as in 12 lower surface of inspected object
1 column, multiple row, rectangular or other arrangements.
Arrangements of electric connection 11 mainly have wiring substrate 15, downside shell 16, upper housing 17, frame 18, guide plate 19,
And electrical contact.
The arrangements of electric connection 11 of 1st implementation form uses two kinds of electrical contacts.Fig. 5 and Fig. 6 expression is installed with a kind of electrical contact
20 state.Another electrical contact 200 is the electrical contact of the 1st implementation form, roughly the same with electrical contact 20, is installed on the tipping that is electrically connected
Set the installation section of 11 electrical contact.Its electric conductivity as described below of electrical contact 20 is better than the electrical contact 200 of the 1st implementation form, main
The measurement in the part that signal waveform has overlapping is used in (below also to touch the electricity that electrical contact 20 is known as paying attention to signal waveform
Head).
Wiring substrate 15 is the plate wiring substrate of bearing downside shell 16 and upper housing 17 etc..Wiring substrate 15 is matched
Line is connect with the wiring for the detection main body (not shown) tested inspected object.Wiring substrate 15 is to constitute detection main body
The component of the electrode of side, the engagement pad 22 for being set to the upper surface of wiring substrate 15 with the lower end of electrical contact 20,200 contact,
Form electrically conducting.
Downside shell 16 is with the component of the state support electrical contact 20,200 Chong Die with upper housing 17.Downside shell
On 16, the 1st support holes 16A of the lower end of setting insertion electrical contact 20,200, the diameter of hole 16A is than electrical contact 20,200
Outer diameter is slightly larger.Multiple 1st support holes 16A are respectively arranged at the position corresponding with each bump electrode 13 below inspected object 12
It sets.The lower side electrode support 16B for bearing bearing electrical contact 20,200 is formed in the 1st support holes 16A.Lower side electrode support 16B will
The internal diameter of the lower end of 1st support holes 16A is made smaller.The downside bearing shoulder 73 of following electrical contacts 20 for paying attention to signal waveform
Or the 1st the downside bearing shoulder 273 of electrical contact 200 of implementation form be stuck on lower side electrode support 16B, under electrical contact 20,200
End can set the internal diameter of lower side electrode support 16B with penetrating through.By the downside bearing shoulder 73,273 for making electrical contact 20,200
It is stuck on lower side electrode support 16B, electrical contact 20,200 obtains the bearing of lower side electrode support 16B.
Downside shell 16 is Chong Die with the upside of wiring substrate 15.The upper surface of wiring substrate 15 with 16A pairs of each support holes
On the position answered, the engagement pad 22 being connect using wiring with detection main body is set.By be inserted into the 1st support holes 16A electrical contact 20,
200 lower end presses in each engagement pad 22 and is in contact with it, and realizes electrical contact.
In downside, pin head embedded hole 23 is arranged in shell 16 (referring to Fig. 3).The pin head embedded hole 23 is guide pin 37
The chimeric hole in head 39.The internal diameter of pin head embedded hole 23 is set as the outer diameter substantially phase with the head 39 of the guide pin 37
Same size, the head 39 of guide pin 37 can be seamlessly chimeric with its.
Upper housing 17 is and 16 co-operating of downside shell all components of bearing electrical contact 20,200.Outside upside
Shell 17 is Chong Die with downside shell 16, using these downside shells 16 and upper housing 17, can stretch in electrical contact 20,200
State lower support electrical contact 20,200.In upper housing 17, on position corresponding with the 1st support holes 16A of downside shell 16
2nd support holes 17A is set.2nd support holes 17A forms internal diameter identical with the upper side opening of the 1st support holes 16A and (compares electrical contact
20,200 outer diameter is slightly larger), bearing electrical contact 20,200 can be accommodated up or down in inside.Multiple 2nd support holes 17A difference
It is set on the corresponding position of each bump electrode 13 of the lower surface of inspected object 12, makes accommodated electrical contact 20,200
Upper end can be realized with bump electrode 13 and be in electrical contact.
In the 2nd support holes 17A, the upper side electrode support 17B from upper side bearing electrical contact 20,200 is formed.Upper side electrode support
The internal diameter of the upper end of 2nd support holes 17A is made smaller by 17B.The internal diameter of upper side electrode support 17B is sized to, and is made
Obtain the upside of the upside bearing shoulder 79 of the aftermentioned electrical contact 20 for paying attention to signal waveform or the electrical contact 200 of the 1st implementation form
Bearing shoulder 279 can be stuck on side electrode support 17B, be penetrated through by the upper end of electrical contact 20,200, electrical contact 20,200
It is supported in side electrode support 17B.
It is made of the 1st support holes 16A and the 2nd support holes 17A and accommodates the electrical contact that whole electrical contacts 20,200 are supported
Support holes 27.In the state that electrical contact 20,200 is accommodated in electrical contact support holes 27, electrical contact 20,200 is in the shape that saves up strength
State (be applied external force and compress state), the lower end of electrical contact 20,200 is in the setting of pressing 15 upper surface of wiring substrate
The state of engagement pad 22.
Bearing pin portion embedded hole 28 (referring to Fig. 3) is set in upper housing 17.Bearing pin portion embedded hole 28 is to be fitted into following guiding
The hole of the axle portion 40 of pin 37.The internal diameter of bearing pin portion embedded hole 28 is set as the outer diameter substantially phase with the axle portion 40 of guide pin 37
Together, it is fitted into the axle portion 40 of guide pin 37 seamlessly.
Frame 18 is to be supported fixed be integral of wiring substrate 15, downside shell 16 and upper housing 17, simultaneously
Can bearing guide plate 19 up or down component.Frame 18 mainly with outer frame 31, fixed flange part 32 and
Move up and down bearing flange part 33 (referring to Fig. 4).
The peripheral portion that outer frame 31 surrounds downside shell 16, upper housing 17 and guide plate 19 forms quadrangle framework
Shape.Positioning pin (or location hole, not shown) is set on the lower surface of outer frame 31, on the upper surface of wiring substrate 15,
It is corresponding with positioning pin (or the location hole) of 31 side of outer frame, it is arranged location hole (or positioning pin, not shown).By means of this,
Keep the positioning pin (or location hole) of 31 lower surface of outer frame and the location hole (or positioning pin) on the upper surface of wiring substrate 15 embedding
It closes, outer frame 31 is able to be properly positioned and support with wiring substrate 15.Fixed screw is installed on four corners of outer frame 31
35 (referring to Fig. 2).The through hole (not shown) on four corners that fixed screw 35 passes through outer frame 31 is screwed into wiring substrate
15 screw hole (not shown) is fixed these outer frames 31 with wiring substrate 15.
Clamping flange portion 32 is set on the opposed medial surface of the opening portion of the quadrangle tubular of outer frame 31, mutually right
It is arranged 2 with setting.The flange part 32 of each fixation forms mutually horizontal-extending inwardly, the substantially component of semicircle plate.
The height (height away from wiring substrate 15) of the lower surface in each clamping flange portion 32 is set to and downside shell 16 and upside
The roughly the same height of the height that shell 17 is overlapped.By means of this, clipped using each clamping flange portion 32 with wiring substrate 15
The downside shell 16 and upper housing 17 being overlapped on wiring substrate 15 support it.Herein, by upper housing 17 with
When downside shell 16 is put into below clamping flange portion 32, keep the lower surface of downside shell identical as the lower surface of outer frame 31.
The chimeric pin hole 38 of guide pin 37 is formed in the center in each clamping flange portion 32.The internal diameter of pin hole 38 is set to
With the size that roughly same outer diameter of axle portion 40 of guide pin 37.
Guide pin 37 has head 39 and axle portion 40.Head 39 is formed as disk-shaped, the pin of outer diameter and downside shell 16
The internal diameter of subheader portion embedded hole 23 is roughly the same.Axle portion 40 is formed as pole shape, the pin axle portion of outer diameter and upper housing 17
The internal diameter of embedded hole 28 and the pin hole in clamping flange portion 32 38 is roughly the same.
The pin head embedded hole 23 of downside shell 16, the pin axle portion embedded hole 28 of upper housing 17 and each fixation
It is set as with the pin hole 38 of flange part 32, by means of passing through for guide pin 37, axis is on same axle center.
The head 39 of guide pin 37 is embedded in the pin head embedded hole 23 of downside shell 16, and it is outer that axle portion 40 is embedded in upside
The pin axle portion embedded hole 28 of shell 17 and the pin hole 38 in clamping flange portion 32, realize downside shell 16, upper housing 17 and
The positioning of frame 18.The lower surface in each clamping flange portion 32 of downside shell 16 and the frame 18 of upper housing 17 and wiring base
Plate 15 is supported in the opening of frame 18 from clipping up and down, by means of this, by wiring substrate 15, downside shell 16, upper housing
17 and frame 18 mutually correctly position, fixation be integral.
It moves up and down bearing and is used to for guide plate 19 to be supported on up or down in the opening of frame 18 with flange part 33.
Move up and down four corners that bearing flange part 33 is respectively formed in the opening portion of tetragonal framework shaped frame 18.Above and below each
Mobile bearing flange part 33, as shown in figure 4, mainly having plate portion 42, guide screw hole 43 and spring eye 44.
Plate portion 42 is to form integrated plate with the frame 18 in four corners of the outer frame 31 for being respectively arranged at frame 18,
It suspended on and link up 2 frame parts for forming corner.The height of the lower surface in plate portion 42 is set as and clamping flange portion
32 lower surface is identical.The height of the upper surface in plate portion 42 is set to, the upper surface in plate portion 42 and the flange part of guide plate 19
54 lower surface mutually abuts, to realize the best of the bump electrode 13 of inspected object 12 and the upper end of electrical contact 20,200
Contact.Specifically, the height of the upper surface in setting plate portion 42, so that the bump electrode 13 and electrical contact of inspected object 12
20,200 upper end contact forms electrical contact 20,200 and is in the state being pressed (referring to Fig. 6).
Guide screw hole 43 and spring eye 44 are set in plate portion 42.Guide screw hole 43 is for screwing up guide screw 46
Screw hole.One (referring to Fig. 2) is arranged in central portion of the guide screw hole 43 only in each plate portion 42.Spring eye 44 is for supporting bullet
The hole of spring 47.In the two sides in each guide screw hole 43, two spring eyes 44 are respectively set
Guide screw 46 is the position of the guide plate 19 in the opening of regulation frame 18, while enabling about 19 guide plate
Mobile screw.Guide screw 46 is made of head 48, guide part 49 and screw bar portion 50.
Head 48 is the part for inhibiting guide plate 19 to prevent it from falling off.The upper surface on head 48 forms linear type screwdriver
Driver flutes 51.
Guide part 49 is the part for guiding guide plate 19 to move up and down.Guide part 49 is set to head 48 and screw bar portion 50
Between, the pilot hole 59 for being embedded in guide plate 19 guides guide plate 19 to move up and down.The length of guide part 49 is set to head
48 lower surface is contacted with guide plate 19 under the state (state that guide plate 19 is pushed up by spring 47) supported by it, can be incited somebody to action
The upper end of electrical contact 20,200 is put into the diminution portion 57 of guide plate 19.Fig. 5 indicates that the upper end of electrical contact 20,200 is placed into
The state in the diminution portion 57 of guide plate 19.
Screw bar portion 50 is that guide screw 46 is fixed on to the part in plate portion 42.Screw bar portion 50 is screwed into leading for plate portion 42
To screw hole 43, guide screw 46 is fixed on plate portion 42.
Spring 47 is the component for carrying out elastic bearing to guide plate 19.The upper end of spring 47 is installed in plate portion 42
Spring eye 44 is abutted with the back side of the flange part 54 of guide plate 19.Total 8 springs 47 are from downside to can support up or down
It exerts a force in the guide plate 19 of the guide part 49 of 4 guide screws 46.By means of this, the flange part 54 of guide plate 19 is pushed upwardly
With the following table face contact on the head 48 of guide screw 46, the standby mode before contacting is formed.
Guide plate 19 is to be positioned simultaneously when that will be installed on arrangements of electric connection 11 by contact object 12 to by contact object
It is supported, while making the component of each bump electrode 13 of inspected object 12 with corresponding electrical contact 20,200 integration.It leads
It is mainly constituted to plate 19 by receiving recess portion 53 and flange part 54.
Receiving recess portion 53 is the part for receiving inspected object and being supported.Receive recess portion 53 and is generally formed into quadrangle
Disk like.Receive to be formed as quadrangle on the inside of the bottom of recess portion 53, be dimensioned to more slightly larger than the shape of inspected object 12.
Herein, since inspected object 12 is quadrangle, receive to be again formed as quadrangle on the inside of the bottom of recess portion 53, but be examined
In the case that object 12 is other shapes, receive the shape for being again formed as being suitble to inspected object 12 on the inside of the bottom of recess portion 53
Shape.
Inspected object 12 is installed in the state of the inside for receiving the bottom of recess portion 53, and inspected object 12 is determined
Position.In the base plate 55 for receiving recess portion 53, multiple pilot holes 56 are set.Pilot hole 56 is guidance, receives inspected object 12
The opening of each bump electrode 13.Each pilot hole 56 is formed as more slightly larger than bump electrode 13, acceptant bump electrode 13 it is big
It is small.Receive recess portion 53 by the way that inspected object 12 to be put into, each electrode 13 of inspected object 12 can be made to be located at each pilot hole
56 upper insides.
In the lower end of pilot hole 56, formation passes through bump electrode 13, and can accommodate the upper of electrical contact 20,200
The diminution portion 57 of end.Diminution portion 57 allow electrical contact 20,200 upper end penetrate through enter, electrical contact 20,200 can with it is convex
Point electrode 13 contacts.
The downside for receiving the upper side opening 53A of recess portion 53 forms inclined surface 53B.Inclined surface 53B is used to be inspected object
12 guiding, direct it towards the bottom for receiving recess portion 53.
Flange part 54, which is formed in, corresponding with the flange part 33 for moving up and down bearing of frame 18 receives the four of recess portion 53
On the position in a corner.In the exploration portion 58 that the head 48 of each flange part 54 setting guide screw 46 is abutted with it.In exploration portion
58 settings can be fitted into the pilot hole 59 of the guide part 49 of guide screw 46 up or down.The guide part 49 of guide screw 46 is chimeric
It in the pilot hole 59 of flange part 54, can support up or down thereon, by means of the bearing of flange part 54, spring 47 will be oriented to
Plate 19 exerts a force upwards.Rotary steering screw 46 pushes away downwards the recess portion 53 that receives for installing inspected object 12, by guide plate
19 push down on, and the upper end of electrical contact 20,200 is contacted with the bump electrode 13 of inspected object 12 to be checked.
As described above, the arrangements of electric connection 11 of the 1st implementation form uses two kinds of electrical contacts 20,200.It can also be in guide plate
Near the upper surface of 19 pilot hole 56, near the upper surface of the upper side electrode support 17B of upper housing 17 etc., setting indicates and should
The electrical contact that the bump electrode 13 of position contacts is the mark of electrical contact 20 or electrical contact 200.For example, mark can be difference
Color, mark ("○", " △ " etc.) or shape for lugs etc., and only can assign mark to a side, another party is not assigned then
Mark is so as to identify.
The composition for the electrical contact 20 for paying attention to signal waveform is illustrated first below, to the electrical contact of the 1st implementation form
200, it is illustrated centered on its difference with the electrical contact 20 for paying attention to signal waveform.
Fig. 7~Figure 13 is to indicate to pay attention to the totality of the electrical contact 20 of signal waveform or the perspective view of constituent element respectively.Weight
Electrical contact 20 depending on signal waveform has the 1st 62, two the 2nd plungers 63 of plunger and a helical spring 64.
1st plunger 62 is in 2 components contacted with the electrical contact 20 for paying attention to signal waveform as the 1st contact object
Electrode etc. (being the engagement pad 22 of wiring substrate 15 in the case where the arrangements of electric connection 11 for being used in the 1st implementation form) contact
Plate plunger.1st plunger 62 is formed to have the plunger of electric conductivity, and forming method does not limit.Such as can also using pair
Plate carries out the methods of machining or Punching Technology and forms the 1st plunger 62, and can use photoetching technique
(Photolithography) the 1st plunger 62 is formed.It, can also be in shape if the raw material used are not conductive materials
It is upper molding, so that its is adhered to conductive material using plating or coating method in the state of becoming the 1st plunger before, is made into the 1st
Plunger 62.The forming method of following 2nd plungers 63 is also identical as the forming method of the 1st plunger 62.
1st plunger 62 is probably divided into engaging portion 66 and spring receiving portion 67 and contact chip 68 as shown in figure 11.1st inserts
The length of stick 62 when being assembled into arrangements of electric connection 11, substantially with the engagement pad 22 from wiring substrate 15 to the upper of upper housing 17
The height dimension on surface is equal (referring to Fig. 5 (A)).
Engaging portion 66 be it is directly overlapped when the 1st plunger 62 be combined with each other with two the 2nd plungers 63, make the 1st plunger
Part is used in the electrical contact of 62 and the 2nd plunger 63.Engaging portion 66 is formed as long plate shape, can be realized surely with large area and the 2nd plunger 63
Fixed contact.The part of engaging portion 66 can be divided into conjunction with bar portion 69, front end insertion section 70 and anti-delinking part 71.
It is to be supported on the part of helical spring 64 in conjunction with bar portion 69, is set as the size slightly longer than helical spring 64.Knot
The width dimensions for closing bar portion 69 are set to the size roughly the same with the abutting internal diameter of small diameter portion 84 of helical spring 64.In conjunction with
4 corner portions in the section of bar portion 69 are contacted with the inside diameter of the abutting small diameter portion 84 of helical spring 64.Helical spring 64
Circular shape and the combination circumscribed circle of bar portion 69 for being close to the inside diameter of small diameter portion 84 are consistent or slightly smaller, will to be close to small diameter portion 84
Slightly prohibit solid state in conjunction with bar portion 69 to be assembled (referring to Fig. 9, Figure 10).
Guidance combines bar portion 69 to be inserted into the part in helical spring 64 when front end insertion section 70 is assembling.Front end insertion section
70 are formed in the front end (upper end in Figure 11) in conjunction with bar portion 69.Front end insertion section 70 has the inclined surface of broad warp,
It not will form obstruction in an insertion direction, can be readily inserted into helical spring 64.Front end insertion section 70 is located in assembling
Between the contact chip 77 of two the 2nd plungers 63, have the function of that the interval for the protrusion 77A for making contact chip 77 is stable.Contact chip 77
Protrusion 77A interval, by the thickness of front end insertion section 70, to be also by engaging portion 66 thickness provide, engaging portion 66
Thickness is to consider that the interval of the protrusion 77A of contact chip 77 determines.
Anti-delinking part 71 is that front end insertion section 70 prevents front end insertion section 70 from helical spring 64 when being inserted into helical spring 64
The part of middle abjection.Anti-delinking part 71 is formed in the end opposite with spring receiving portion 67.Anti-delinking part 71 is by being inserted into front end
The base end part in portion 70 is formed to two lateral process.It is set as the end than helical spring 64 to the width of the anti-delinking part of two lateral process 71
Abutting small diameter portion 84 internal diameter slightly above (referring to Fig. 9).
Spring receiving portion 67 is the part for bearing helical spring 64.Spring receiving portion 67 be set to engaging portion 66 with
The stepped part of the boundary part of contact chip 68.Compared with the width of engaging portion 66,68 width of contact chip is made larger, boundary
Stepped part is at spring receiving portion 67.The abutting small diameter portion 84 of the end of helical spring 64 is abutted with spring receiving portion 67.By
In the elastic force of helical spring 64, the 1st plunger 62 is supported as the element of electrical contact 22, and allows it more or less up and down
It is mobile.
Contact chip 68 is to contact formation with the 1st contact object (engagement pad 22 of wiring substrate 15) of the electrical contact 20 to be electrically connected
The part connect.Contact chip 68 is connected setting with the base end side (downside of Figure 11) of engaging portion 66.Contact chip 68 is by having
The width dimensions smaller than the internal diameter of the 1st support holes 16A of downside shell 16 and the 2nd support holes 17A of upper housing 17 are substantially
For the downside receiving portion 16B of shell 16 on the downside of the rectangular panel portion of rectangle and perforation, than what is be connected with rectangular panel portion, compare rectangular slab
Width small front end in portion's is formed.The front end of contact chip 68 is formed to the engagement pad with the wiring substrate 15 of flat planar
22 curve-likes being steadily contacted.Contact chip 68 formed on the boundary of rectangular panel portion and front end on the downside of bearing shoulder 73.Downside
Bearing shoulder 73 is stuck on the downside receiving portion 16B of downside shell 16, so that contact chip 68 will not fall off from the 1st support holes 16A.
In the state of on the downside receiving portion 16B that downside bearing shoulder 73 is stuck in downside shell 16, end (Fig. 5, figure of contact chip 68
9 lower end) it is protruded downwards from the 1st support holes 16A.
2nd plunger 63 be with 62 co-operating of the 1st plunger, make between two contact objects, i.e. the 1st contact object (wiring base
The engagement pad 22 of plate 15) and the 2nd contact object (bump electrode 13) between electrically conducting plate plunger.2nd plunger 63 is by the 2nd
Contact object (bump electrode 13) is used as direct contact object.
2nd plunger 63 can probably be divided into engaging portion 75, spring receiving portion 76 and contact chip 77 as shown in Figure 12 (A).
Herein, Figure 12 (A) indicates the 2nd plunger 63 itself, and Figure 12 (B) and (C) indicate the variation of the 2nd plunger 63.
Two the 2nd plungers 63 clip the 1st plunger 62, are assembled in this state by means of helical spring 64, constitute the attention
The electrical contact 20 of signal waveform.With the state that the engaging portion 75 of two the 2nd plungers 63 is opposed, by the engaging portion 63 of the 1st plunger 62
It sandwiches.In the state that the 1st plunger 62 and two the 2nd plungers 63 are electrically connected, each plunger 62,63 and engagement pad 22 and salient point
Electrode 13 contacts respectively, makes electrically conducting between engagement pad 22 and bump electrode 13.
Two the 2nd plungers 63 are of similar shape.Keep the 2nd plunger 63 with same shape opposed, constitutes the attention
The electrical contact 20 of signal waveform can be realized the good contact with the 2nd contact object (bump electrode 13) in this way.It inserts for two the 2nd
Even stick 63 can also slide under state independently of each other respectively in seizing on both sides by the arms for the 1st plunger 62.2nd contact object (bump electrode
13) even the spherical equal more or less positional shift of shape, thus the changed shape of the meeting such as contact height, also can be only
Vertical sliding, therefore the variation etc. of the position tracking of up and down direction of each 2nd plunger 63 its contact height, can be improved electrical contact
Reliability.
Engaging portion 75 is that the 1st plunger 62 is overlapped with the engaging portion 66 of the 1st plunger 62 when be combineding with each other with the 2nd plunger 63
Realize the part of electrical contact.The engaging portion 75 of two the 2nd plungers 63 seizes the engaging portion 66 of the 1st plunger 62 on both sides by the arms from two sides, makes the 1st
Plunger 62 and the 2nd plunger 63, which are realized, to be in electrical contact.Engaging portion 75 is formed as long plate shape, can be realized and the with area roomy as far as possible
The contact of the engaging portion 66 of 1 plunger 62.Engaging portion 75 is by combining bar portion 80, front end insertion section 81 and anti-delinking part 82 to constitute.
It is the part for being supported on helical spring 64 for clipping the engaging portion 66 of the 1st plunger 62 in conjunction with bar portion 80, is set as
The slightly long size than helical spring 64.The knot of the 1st plunger 62 is chosen to be in conjunction with the sectional dimension (width, thickness) of bar portion 80
What conjunction bar portion 69 was made into the two basic change bar portion 80 for clipping it, in total 8 corner portions in cross section (referring to Fig. 9) energy
Enough sizes being inscribed with the inside diameter for being close to small diameter portion 84 of helical spring 64.In other words, the abutting path of helical spring 64
The internal diameter in portion 84 is set as the size of the circumscribed circle diameter for the cross sectional shape for combining bar portion 80,69,80 to combine, and formation can will tie
The combination for closing bar portion 80,69,80 slightly prohibits solid state (referring to Fig. 9, Figure 10).In order to realize such taboo solid fraction state, knot
The width dimensions for closing bar portion 80 are made smaller than the width dimensions of the combination bar portion 69 of the 1st plunger 62.
Front end insertion section 81 is that guidance combines bar portion 80 to be inserted into the part in helical spring 64.Front end insertion section 81 is formed
In in conjunction with 80 front end side of bar portion (downside in Figure 12).Front end insertion section 81, which has, does not form the outer of obstacle to direction of insertion
Shape can be smoothly inserted into helical spring.Such as the 1st plunger 62 combination bar portion 69 and a side the 2nd plunger 63 combination bar
In the state that portion 80 is previously inserted in helical spring 64, the combination bar portion 80 of the 2nd plunger 63 of last another party is inserted into spiral bullet
In spring 64, at this moment the front end insertion section 81 of the combination bar portion 80 of another party can be smoothly inserted into helical spring 64.
Anti-delinking part 82 is that front end insertion section 81 makes the front end insertion section 81 will not be from spiral bullet when being inserted into helical spring 64
The part of abjection in spring 64.Anti-delinking part 82 is set to the base end part of front end insertion section 81 (in conjunction with bar portion 80 and front end insertion section
81 boundary part).Anti-delinking part 82 is to form the base end part of front end insertion section 81 from two lateral process.To two lateral process
(ginseng more slightly larger than the internal diameter of the abutting small diameter portion 84 of the end of helical spring 64 when the width dimensions of anti-delinking part 82 are set as assembling
According to Figure 10).That is, being set as being overlapped the state of two basic change bar portion 80 on the two sides of the combination bar portion 69 of the 1st plunger 62
Under, 4 corners in the outside for two anti-delinking parts 82 being overlapped on the two sides for combining bar portion 69 are (shown in Fig. 10 positioned at anti-
Each two corners in the outside in de- portion 82) slightly above helical spring 64 end abutting small diameter portion 84 internal diameter.
Spring receiving portion 76 is that one end of helical spring 64 abuts, the part acted on by its elastic force.Spring receiving portion 76 is
It is set to the stepped part of the boundary part of engaging portion 75 and contact chip 77.Compared with the width of engaging portion 75, the width of contact chip 77
Degree is made big, and the part (stepped part) with width difference for being formed in boundary constitutes spring receiving portion 76.Due to helical spring 64
The abutting small diameter portion 84 of end abutted with spring receiving portion 76, the 2nd plunger 63 can be by means of spiral bullet in electrical contact 22
Spring 64 is slideably supported.
Contact chip 77 is that the component for realizing electrical connection is contacted with the 2nd contact object (bump electrode 13).Contact chip 77 with
Be linked into a whole the base end side (on the upside of Figure 12) of engaging portion 75 setting.Contact chip 77 is by width dimensions than the of upper housing 17
The slightly smaller substantially rectangular plate portion of the internal diameter of 2 support holes 17A and the upside receiving portion 17B for penetrating through upper housing 17 enter
The diminution portion 57 of guide plate 19, the width dimensions front end smaller than the width dimensions of rectangular panel portion is formed.On contact chip 77,
Upside bearing shoulder 79 is formed on the boundary of rectangular panel portion and front end.Upside bearing shoulder 79 is stuck in the upside of upper housing 17
On receiving portion 17B, prevent contact chip 77 from deviating from from the 2nd support holes 17A.Upside bearing shoulder 79 is stuck in the upper of upper housing 17
In the state of on the receiving portion 17B of side, the upper end (referring to Fig.1 2) of contact chip 77 protrudes upwards from the 2nd support holes 17A.
The upper end front end of each contact chip 77 is formed as two protrusions.I.e. it is recessed to form U-shaped for the front center of contact chip 77
Portion, recess portion two sides form two protrusion 77A.And conical surface 77B is formed on protrusion 77A (referring to Fig. 8).By means of this, two
Protrusion 77A is respectively formed blade shape.It clips the space that two opposite conical surface 77B of above-mentioned recess portion are formed and is used as receiving bump electrode
It works in the space of the dilation at 13 top.By means of this, when bump electrode 13 and the 2nd plunger 63 contact, bump electrode
The space that 13 top side is included into two conical surface 77B formation can also prevent even the preceding end in contact with the 2nd plunger 63
Only bump electrode 13 is collapsed by excessive compression.When two the 2nd plungers 63 clip 1 plunger 62, conical surface 77B be equipped on from
Surrounding appears as the place (referring to Fig. 8) in outside.Total 4 protrusion 77A and 13 reliable contacts of bump electrode, the contact point slightly
It is micro- to prick into bump electrode 13, form reliable electrical contact.
2nd plunger 63 can also introduce slit as shown in Figure 12 (B) and (C) in structure, be easy two protrusion 77A
It is opened in the width direction of the 2nd plunger 63.
Helical spring 64 is as shown in figure 13 covered with outside the combination bar portion 69,80 of the 1st plunger 62 and the 2nd plunger 63
Week, each end are abutted with each spring receiving portion 67,76 respectively, can be supported up or down relative to each plunger 62,63, be made the 1st
The component of electrically conducting between plunger 62 and the 2nd plunger 63.Between the both ends of helical spring 64, carry overlapped
The engaging portion 66,75 of the 1st plunger 62 and the 2nd plunger 63 under state.
Helical spring 64 is formed as middle part major diameter, the shape of both ends minor diameter.The diameter of middle part is chosen to be the 1st
What the section that the combination bar portion 69 of plunger 62 and the combination bar portion 80 of two the 2nd plungers 63 sandwiched are constituted was not abutted with it
Size (referring to Fig. 9), middle part is the part worked as flexible helical spring.The outer diameter of middle part is set as than the 1st
The greatest width dimension of plunger 62 and the 2nd plunger 63 is slightly larger.The both ends of the minor diameter of helical spring 64, which are constituted, is close to small diameter portion
84.Be close to small diameter portion 84 internal diameter be set as than and the 1st plunger 62 combination bar portion 69 and two the 2nd plungers 63 being sandwiched
Combination bar portion 80 formed section it is external external diameter of a circle it is slightly smaller.
The electrical contact 20 for paying attention to signal waveform is to keep engaging portion 66,75 overlapped keeping each contact chip 68,77 reversed
In the state of so that the 1st plunger 62 and two the 2nd plungers 63 is formed one by helical spring 64, in each spring receiving portion
67, helical spring 64 is blocked on 76 position, prevents the 1st plunger 62 and the 2nd plunger 63 from leaving each other and can be slidably
The component assembled.
The composition of the electrical contact 200 of the 1st implementation form is illustrated below.Fig. 1, Figure 14~Figure 19 are respectively to indicate the
200 entirety of electrical contact of 1 implementation form or the perspective view or perspective view of constituent element.
There are two the helical springs 201 that plunger 263 and one double as plunger for the tool of electrical contact 200 of 1st implementation form.
Two plungers 263 of the electrical contact 200 of the 1st implementation form are and two of the electrical contact 20 for paying attention to signal waveform the
2 plungers 63 are same or same component.Therefore plunger 263 illustrate omit (referring to Fig.1 2).The electrical contact of 1st implementation form
In the case that 2nd plunger 63 of 200 plunger 263 and the electrical contact 20 for paying attention to signal waveform is same plunger, the 1st implementation form
Electrical contact 200 and pay attention to the part of electrical contact 20 of signal waveform can be general, can reduce cost.
In the following description, the symbol as each portion to plunger 263, using the corresponding part than the 2nd plunger 63
Symbol big 200 symbol, determine the element of 263 each section of plunger.
As the helical spring 201 of plunger, be with a this component and meanwhile play pay attention to signal waveform electrical contact 20
The 1st plunger 62 and helical spring 64 effect component.
There is rod-insertion section 262 and coil spring part 264 as the helical spring 201 of plunger.
Rod-insertion section 262 is the part for playing effect identical with the 1st plunger 62 of electrical contact 20 of signal waveform is paid attention to.It inserts
Stick portion 262 is that the 1st contact object in two components for contacting with the electrical contact 200 of the 1st implementation form (is used in the 1st
The engagement pad 22 of wiring substrate 15 in the case where the arrangements of electric connection 11 of implementation form) contact part, constitute rod-insertion section 262
Wire segment be arranged on same plane.The plane can pay attention to the 1st plunger 62 of the electrical contact 20 of signal waveform with setting
Plate plane it is corresponding.Rod-insertion section 262 has engaging portion 266 and contact portion 268.
Contact portion 268 is that realization electricity is contacted with the 1st contact object (engagement pad 22 of wiring substrate 15) of the electrical contact 200
The part of connection.Contact portion 268 has the contact chip for making to be carried forward the wire rod that comes from coil spring part 264 along the 1st plunger 62
68 shape climbs such shape, and shape and the shape of contact chip 68 are substantially uniform.Therefore, also has downside bearing shoulder
273, downside bearing shoulder 273 is stuck on the downside receiving portion 16B of downside shell 16, contact portion 268 is not needed, not from the 1st
Bearing bore 16A is prominent.The shape of the front end of contact portion 268 is not limited to shape shown in Figure 18, it is possible to have what Figure 20 was illustrated
Other shapes.Before Figure 20 (A) indicates that the example of the shape of the front end connected with 2 points, Figure 20 (B) expression linearly contact
The example of the shape of end, Figure 20 (C1) and Figure 20 (C2) are indicated to extend a part from the extended plane of wire rod, are made to contact and grow
Spend the example of the shape of the front end increased.
Engaging portion 266 is to be seized on both sides by the arms in the inner space of coil spring part 264 by two plungers 263, by rod-insertion section 262 with
The wire segment of two plungers 263 electrical connection.Constitute engaging portion 266 wire rod be from constitute contact portion 268 wire rod continue and
Come.Seized on both sides by the arms by two plungers 263 makes wire rod is linear or curvilinear to extend to form engaging portion 266 i.e. in above-mentioned plane
Can, the track that wire rod is drawn does not limit.Figure 21 indicates the several examples for the track that the wire rod of engaging portion 266 is drawn.Figure 21 (A)
It indicates to draw example of a little wire rod as engaging portion 266 from contact portion 268.Figure 21 (B) is indicated from contact portion 268 upwards
The wavy example for drawing wire rod as engaging portion 266.Figure 21 (C) indicates linearly to draw wire rod upwards from contact portion 268
Example as engaging portion 266.As shown in Figure 21 (B)~Figure 21 (C), in certain journey of the top belay of contact portion 268
The length of the engaging portion 268 of the length of degree, be chosen to be the length for the combination bar portion 280 of plunger 263 for seizing engaging portion 266 on both sides by the arms with
Under.
Coil spring part 264 is two plungers 263 of bearing, while plunger 263 exerting a force upwards in compression, by conduct
The component that the contact portion 268 of the rod-insertion section 262 of the extension of oneself exerts a force downwards.Coil spring part 264 be formed as upper end and
Middle part diameter is big and shape that lower end diameter is small.The diameter of upper end and middle part is chosen to be the not knot with rod-insertion section 262
The size (referring to Fig.1 6) that the section that the combination bar portion 280 of conjunction portion 266 and two plungers 263 sandwiched is formed abuts.Spiral shell
The wire rod for revolving 264 upper end of spring portion diametrically prolongs as being sandwiched between two plungers 263 what circle was divided into two
It stretches, the circle in the case where upper end viewed from above and middle part is divided into two (referring to Fig.1 6).Middle part is conduct
The part that flexible helical spring works.The lower end of the minor diameter of coil spring part 264, which is constituted, is close to small diameter portion.It is close to small
Solid (referring to Fig.1 7) are prohibited using minor diameter in the part that rod-insertion section 262 is formed with two plungers 263 for clipping it by diameter portion 284, are
The part of rod-insertion section 262 and plunger 263 can be supported slidably engaged with one another.
In the electrical contact 200 of 1st implementation form, only in the lower end of coil spring part 264, small diameter portion 284 is close in setting,
But it can also be also provided with abutting small diameter portion in the upper end of coil spring part 264 or a part of middle part etc., increase can phase
The part for mutually slidably supporting rod-insertion section 262 and plunger 263, so as to realize more stable bearing.
The electrical contact of the electrical contact 20 and the 1st implementation form of paying attention to signal waveform formed as described above makes as described below
With.
Firstly, installing inspected object 12 in arrangements of electric connection 11.At this moment, inspected object 12 is installed in guide plate
19 receive recess portion 53.That is, inspected object 12 is along the inclined surface 53B location and installation of upper side opening 53A in bottom plate
Portion 55.By means of this, the bump electrode 13 of inspected object 12 is put into the pilot hole 56 of base plate 55.It will pay attention to signal wave again
The upper end of the contact chip 77 of the electrical contact 20 of shape, the upper end of the contact chip 277 of the electrical contact 200 of the 1st implementation form are put into
Diminution portion 57.
Under this state, when inspected object 12 is depressed, each bump electrode 13 and the electrical contact for paying attention to signal waveform
The protrusion 277A contact of the protrusion 77A, two plungers 263 of the electrical contact 200 of the 1st implementation form of 20 two the 2nd plungers 63,
Each electrical contact 20,200 is compressed (such as from state of Fig. 5 to the state change of Fig. 6).
When protrusion 77A, 277A of the front end of contact chip 77,277 will be contacted with bump electrode 13, protrusion 77A, 277A will be
It is slided to circumferencial direction on the spherical surface of bump electrode 13, the power mobile to the direction left each other works, and realizes and salient point electricity
The reliable contacts of pole 13.
Under the compressed state of electrical contact 20 for paying attention to signal waveform, the 1st plunger 62 and the 2nd slideably seized on both sides by the arms is inserted
Reliable electrical contact is realized between stick 63.Also, under the compressed state of electrical contact 200 of the 1st implementation form, slideably by
Electrical contact is realized between the rod-insertion section 262 and plunger 263 of the helical spring 201 as plunger seized on both sides by the arms.
Herein, two the 2nd plungers 63 or two plungers 263 can be slided independently, therefore bump electrode 13 occurs
When deformation, even contact portion is to the protrusion 77A's of two the 2nd plungers 63 or protrusion 277A of two plungers 263
In the case that height is different, two the 2nd plungers 63 or two plungers 263 are also respectively as its form glide contacts.
By means of this, by attention signal wave between two contact objects (engagement pad and bump electrode 13 of wiring substrate 15)
The electrical contact 20 of shape or the electrical contact 200 of the 1st implementation form realize electrical connection.In this state, between two contact objects
Electric signal is transmitted by the electrical contact 200 of the electrical contact 20 or the 1st implementation form of paying attention to signal waveform.
In the electrical contact 20 for paying attention to signal waveform, the 1st plunger 62 and the 2nd plunger 63 are all formed as tabular, electric signal
It is given and accepted by face contact.On the other hand, in the electrical contact 200 of the 1st implementation form, it is also used as the helical spring 201 of plunger
Rod-insertion section 262 is formed using wire rod, and plunger 263 is formed as tabular, is contacted by means of line and is realized giving and accepting for electric signal.Therefore,
From the consideration of giving and accepting of electric signal, it may be said that pay attention to electrical contact 200 of the performance than the 1st implementation form of the electrical contact 20 of signal waveform
Performance it is good.
In check device using the arrangements of electric connection 11 of the 1st implementation form, the signal being taken into from inspected object 12 has
The big signal of the importance (Weight) of the shape of signal waveform, also have the logic (" 1 " or " 0 ") of any time, constant voltage value,
The big signal of constant current important ratio signal waveform (digital signal etc.).It is transmitted between two contact objects that is, having
The stringent signal of permissible accuracy also has the lower signal of required precision in contrast.The arrangements of electric connection 11 of 1st implementation form
In the case where, the place of preceding signal is transmitted using the electrical contact 20 for paying attention to signal waveform, and the place of transmission latter signal makes
With the electrical contact 200 of the 1st implementation form.
If following effects can be obtained using the electrical contact 200 of the 1st implementation form.
If inserted using the electrical contact 200 of the 1st implementation form due to being risen using one component of helical spring as plunger
The effect of stick and the effect of helical spring, can reduce component number.As a result, it can be expected that simplifying process and reducing valence
Lattice.
Also, the part of the helical spring as plunger contacted with the 1st contact object, is similar to the outer of plunger due to having
Shape, therefore can be realized and contacted with the good of contact object.It utilizes helical spring as described above, described in Patent Document 2 and connects
The technology for touching object contact, due to being contacted using the end of spiral shape wire rod with contact object, poor contact.
In addition, if using the 1st implementation form electrical contact 200, the plunger 263 in the electrical contact 200 can also use
Component identical with the 2nd plunger 63 in the electrical contact 20 for paying attention to signal waveform, from this starting point, it is also possible for reducing price
's.
Moreover, if using the 1st implementation form electrical contact 200, in the electricity touching for realizing different the 1st implementation form of length
In the case where first 200, it can be answered by change as the length (such as length of contact portion) of the helical spring 201 of plunger
Right, the electrical contact of different length can share plunger 263.Also, straight by the wire rod of the selected helical spring 201 as plunger
Diameter can easily select the interval between two plungers 263.
Also, if the electrical contact 200 using the 1st implementation form uses general as the part contacted with the 1st contact object
Spiral wire is formed as the contact portion of warpage shape, therefore the freedom degree of front end geometry is big, can be using the shape with contact object
The corresponding front end geometry such as shape.
If, can be according to the property etc. of the signal flowed through when measuring, respectively using the arrangements of electric connection 11 of the 1st implementation form
Using the electrical contact 200 for the electrical contact 20 and the 1st implementation form for paying attention to signal waveform, therefore less pay attention to the ground of signal waveform
Electrical contact 200 can be used between the contact object of two components of side, it can be according to each place, using the electricity for the quality for being suitble to the place
Contact.As a result, can reduce the price of the arrangements of electric connection 11 of the 1st implementation form.
(B) other implementation forms
Also the implementation form of various modifications is referred in the explanation of above-mentioned 1st implementation form, it is also possible to enumerate following example
The deformation implementation form shown.
The arrangements of electric connection 11 of 1st implementation form is the electricity touching for paying attention to the electrical contact 20 and the 1st implementation form of signal waveform
First 200 devices being used in mixed way, but the electrical contact that can certainly be carried when constituting arrangements of electric connection all uses the 1st reality
Apply the electrical contact 200 of form.
In described above, the electricity touching of the attention signal waveform of two the 2nd 63, the 1st plungers 62 of plunger of setting recite
First 20 and two plungers 263 of setting and a helical spring 201 as plunger rod-insertion section 262 the 1st implementation form
Electrical contact 200, but can also respectively be arranged one with the plunger and rod-insertion section that connect in the 1st contact object and the 2nd contact object.?
In this case, helical spring 64 and the diameter of abutting small diameter portion as the both ends or one end of the helical spring 201 of plunger are examined
It selectes, can support after considering plunger one by one and rod-insertion section.Conversely, the plunger connected in the 1st contact object one, the 2nd
The plunger or rod-insertion section two connected in contact object can also be with.It, can also in the case where constituting two rod-insertion sections with spiral wire
To be formed as the structure of dual winding in the up-down direction with the comparable part of contact portion.
Electrical contact of the invention can be used to be contacted in the electrode etc. that wiring substrate or semiconductor integrated circuit etc. have
All devices.Also, arrangements of electric connection of the invention is the device at least partly using electrical contact of the invention, the purposes of device
It is not limited to check device.
Claims (5)
1. a kind of electrical contact, which is characterized in that have:
It saves up strength when contact portion and the compression that wire rod is formed as to warpage shape contacted with the 1st contact object and exerts a force to prolonging direction
The helical spring of contact force that is integrally formed by same wire rod of coil spring part；And
The plunger of the plate contacted with the 2nd contact object, the wire segment of the base end side of the helical spring of the contact force
It is in electrical contact with the plane of the plunger, and the plunger can be telescopically subject to by the coil spring part on the prolonging direction
Bearing,
The helical spring of the contact force has engaging portion, and the engaging portion is same with the plane that forms above-mentioned contact portion
The end for being formed with the above-mentioned wire rod of above-mentioned contact portion is led into the plunger side in one plane,
Two plungers are set in a manner of clipping the wire segment of base end side of the contact portion and the engaging portion.
2. electrical contact as described in claim 1, which is characterized in that
The contact portion includes: to contact towards the wire segment of the 1st contact object side, with the 1st contact object
Wire segment and the wire segment for leaving the 1st contact object side.
3. electrical contact as claimed in claim 2, which is characterized in that the contact portion contacted with the 1st contact object
Wire segment is with wavy extension, by contacting pair to the 1st contact object side multiple protruding portion outstanding with the described 1st
As contact.
4. a kind of arrangements of electric connection has multiple electrical contacts for making to be in electrical contact between the 1st contact object and the 2nd contact object, special
Sign is,
At least part electrical contact is using electrical contact described in any one of claims 1 to 3.
5. arrangements of electric connection as claimed in claim 4, which is characterized in that also using in addition to any one of claims 1 to 3
2nd electrical contact except 1st electrical contact, using plunger, the plunger and the 2nd electrical contact of the 1st electrical contact
Plunger be of similar shape.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014128111A JP6404008B2 (en) | 2014-06-23 | 2014-06-23 | Electrical contact and electrical connection device |
| JP2014-128111 | 2014-06-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105322337A CN105322337A (en) | 2016-02-10 |
| CN105322337B true CN105322337B (en) | 2019-03-01 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510351110.7A Active CN105322337B (en) | 2014-06-23 | 2015-06-23 | Electrical contact and arrangements of electric connection |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP6404008B2 (en) |
| KR (1) | KR101678146B1 (en) |
| CN (1) | CN105322337B (en) |
| TW (1) | TWI587585B (en) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101853846B1 (en) * | 2016-07-29 | 2018-05-02 | 주식회사 마이크로컨텍솔루션 | Contact probe |
| JP2018092813A (en) * | 2016-12-05 | 2018-06-14 | 株式会社ネバーグ | Probe pin and IC socket |
| JP6915797B2 (en) * | 2017-01-26 | 2021-08-04 | 株式会社笠作エレクトロニクス | Probe pin |
| WO2019159349A1 (en) * | 2018-02-19 | 2019-08-22 | ユニテクノ株式会社 | Contact probe and inspection socket provided with same |
| TWI797109B (en) * | 2018-03-01 | 2023-04-01 | 日商由利科技股份有限公司 | Contact probe and inspection sleeve provided with the contact probe |
| CN112086765B (en) * | 2020-08-21 | 2022-04-01 | 国家电网有限公司 | Female support fitting of pipe and transmission system |
| KR102414615B1 (en) * | 2020-10-16 | 2022-06-30 | (주)아이윈솔루션 | Connection Pin with Consistant Electric Characteristics |
| JP2022079959A (en) * | 2020-11-17 | 2022-05-27 | 山一電機株式会社 | Inspection socket |
| KR102235344B1 (en) * | 2020-12-31 | 2021-04-05 | 황동원 | Contact pin, and a spring contact and test socket with the same for high speed signal ic test |
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| JP3768183B2 (en) | 2002-10-28 | 2006-04-19 | 山一電機株式会社 | IC socket for narrow pitch IC package |
| KR100584225B1 (en) | 2004-10-06 | 2006-05-29 | 황동원 | Contact for electronic device |
| TWI427863B (en) * | 2009-08-17 | 2014-02-21 | Human Light Co Ltd | The spring type earthing terminal having the upper and lower electric contact |
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| JP4998838B2 (en) * | 2010-04-09 | 2012-08-15 | 山一電機株式会社 | Probe pin and IC socket having the same |
| DE202010010827U1 (en) * | 2010-07-29 | 2010-10-21 | Rosenberger Hochfrequenztechnik Gmbh & Co. Kg | High Power Connectors |
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| JP5858781B2 (en) * | 2011-12-29 | 2016-02-10 | 株式会社エンプラス | Probe pin and socket for electrical parts |
| US8408946B1 (en) * | 2012-05-26 | 2013-04-02 | Jerzy Roman Sochor | Low inductance contact with conductively coupled pin |
| DE102012024185A1 (en) * | 2012-12-11 | 2014-06-12 | Rosenberger Hochfrequenztechnik Gmbh & Co. Kg | Contact element and method for its production |
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| CN102224641A (en) * | 2008-12-26 | 2011-10-19 | 山一电机株式会社 | Electrically connecting device for semiconductor device and contact used in the electrically connecting device |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI587585B (en) | 2017-06-11 |
| KR101678146B1 (en) | 2016-11-23 |
| JP6404008B2 (en) | 2018-10-10 |
| TW201601384A (en) | 2016-01-01 |
| JP2016008835A (en) | 2016-01-18 |
| CN105322337A (en) | 2016-02-10 |
| KR20150146383A (en) | 2015-12-31 |
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