KR20150025053A - Apparatus for remote controlling in semiconductor device fabricating - Google Patents

Apparatus for remote controlling in semiconductor device fabricating Download PDF

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Publication number
KR20150025053A
KR20150025053A KR20130102182A KR20130102182A KR20150025053A KR 20150025053 A KR20150025053 A KR 20150025053A KR 20130102182 A KR20130102182 A KR 20130102182A KR 20130102182 A KR20130102182 A KR 20130102182A KR 20150025053 A KR20150025053 A KR 20150025053A
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KR
South Korea
Prior art keywords
semiconductor manufacturing
manufacturing facilities
facilities
display
remote control
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Application number
KR20130102182A
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Korean (ko)
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KR102046795B1 (en
Inventor
박영화
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세메스 주식회사
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Priority to KR1020130102182A priority Critical patent/KR102046795B1/en
Publication of KR20150025053A publication Critical patent/KR20150025053A/en
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Publication of KR102046795B1 publication Critical patent/KR102046795B1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67276—Production flow monitoring, e.g. for increasing throughput
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67253—Process monitoring, e.g. flow or thickness monitoring

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Automation & Control Theory (AREA)
  • General Factory Administration (AREA)

Abstract

A remote control device of a semiconductor manufacturing facility for simultaneously remotely controlling operational states of at least two semiconductor manufacturing facilities, the remote control device comprising: at least two semiconductor fabrication units At least two first display units connected to each of the at least two semiconductor manufacturing facilities within the same space where the equipment is located; Wherein at least two semiconductor manufacturing facilities are connected to the at least two first display units so that the at least two semiconductor manufacturing facilities are connected to the at least two first semiconductor fabrication facilities, A second display unit connected to the two first display units; And a connection portion connecting the at least two first display portions and the second display portion, wherein the at least two semiconductor manufacturing facilities can be used in an actual semiconductor manufacturing process or in a virtual semiconductor manufacturing process .

Description

Technical Field [0001] The present invention relates to a remote control apparatus for a semiconductor manufacturing facility,

BACKGROUND OF THE INVENTION 1. Field of the Invention [0002] The present invention relates to a remote control device of a semiconductor manufacturing facility, and more particularly, to a remote control device of a semiconductor manufacturing facility for remotely controlling operation states of at least two semiconductor manufacturing facilities.

In general, a plurality of manufacturing facilities for semiconductor manufacturing may be provided. In addition, the manufacturing facilities for semiconductor manufacturing must be monitored at all times. Each of the semiconductor manufacturing facilities may be provided so that members for monitoring are connected to each other. For example, in the case of a test handler for inspecting a semiconductor package in the semiconductor manufacturing facility, a member for monitoring the result of inspection of the semiconductor package may be provided to be connected to each of the test handlers. At this time, examples of the member for monitoring include an alarm device, a display unit, and the like.

And the member for monitoring may be connected to the semiconductor manufacturing facility in the same space where the semiconductor manufacturing facility is located. The monitoring of the operation state of each of the semiconductor manufacturing facilities may be performed in a space where the semiconductor manufacturing facility is located.

Therefore, when an abnormality is detected in the operation state of each of the semiconductor manufacturing facilities, it is possible for the operator to move to a space where the semiconductor manufacturing facility is located, so that the semiconductor manufacturing facility is provided with at least two units, There is a problem in that it is impossible to monitor in real time whether there is an abnormality or not.

It is an object of the present invention to provide a remote control device of a semiconductor manufacturing facility capable of remotely monitoring at least two semiconductor manufacturing facilities in a space apart from a space where at least two semiconductor manufacturing facilities are located.

In order to accomplish the above object, a remote control apparatus of a semiconductor manufacturing facility according to an embodiment of the present invention is a remote control apparatus of a semiconductor manufacturing facility for remotely controlling operation states of at least two semiconductor manufacturing facilities, At least two first display units connected to each of the at least two semiconductor manufacturing facilities in the same space in which the at least two semiconductor manufacturing facilities are located so as to be able to display an operating state for each of the at least two semiconductor manufacturing facilities; Wherein at least two semiconductor manufacturing facilities are connected to the at least two first display units so that the at least two semiconductor manufacturing facilities are connected to the at least two first semiconductor fabrication facilities, A second display unit connected to the two first display units; And a connection portion connecting the at least two first display portions and the second display portion, wherein the at least two semiconductor manufacturing facilities can be used in an actual semiconductor manufacturing process or in a virtual semiconductor manufacturing process .

In the remote control apparatus for a semiconductor manufacturing facility according to an embodiment of the present invention, the connection unit may be provided by using any one selected from the group consisting of a LAN, RS232, wireless communication, and a memory .

According to the remote control apparatus of the semiconductor manufacturing facility of the present invention, since the first display unit and the second display unit are provided, even in a space apart from the space where at least two semiconductor manufacturing facilities are located, Can be performed remotely.

As described above, since the remote control device of the semiconductor manufacturing facility of the present invention can remotely monitor at least two semiconductor manufacturing facilities, it is possible to replace the remote control device more quickly in the event of abnormality, Can be expected.

In addition, since the remote control device of the semiconductor manufacturing facility of the present invention can be applied to simulations of a virtual process in addition to an actual process, it is possible to check beforehand any possible anomalies, thereby improving the reliability of semiconductor manufacturing You can expect.

1 is a schematic block diagram for explaining a remote control apparatus of a semiconductor manufacturing facility according to an embodiment of the present invention.

While the present invention has been described in connection with certain exemplary embodiments, it is obvious to those skilled in the art that various changes and modifications may be made therein without departing from the spirit and scope of the invention. It is to be understood, however, that the invention is not intended to be limited to the particular forms disclosed, but on the contrary, is intended to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention. Like reference numerals are used for like elements in describing each drawing. The terms first, second, etc. may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. The terminology used in this application is used only to describe a specific embodiment and is not intended to limit the invention. The singular expressions include plural expressions unless the context clearly dictates otherwise. In the present application, the term "comprises" or "comprising ", etc. is intended to specify that there is a stated feature, figure, step, operation, component, But do not preclude the presence or addition of one or more other features, integers, steps, operations, components, parts, or combinations thereof.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Terms such as those defined in commonly used dictionaries are to be interpreted as having a meaning consistent with the contextual meaning of the related art and are to be interpreted as either ideal or overly formal in the sense of the present application Do not.

Example

1 is a schematic block diagram for explaining a remote control apparatus of a semiconductor manufacturing facility according to an embodiment of the present invention.

1, semiconductor manufacturing equipments 11a, 11b, 11c and 11d are provided. Examples of the semiconductor manufacturing equipments 11a, 11b, 11c and 11d include manufacturing equipments and inspection equipments . Here, the manufacturing facility may include an etching facility, a deposition facility, and the like, and the inspection facility may include a test handler and the like. In particular, at least two semiconductor manufacturing facilities 11a, 11b, 11c, and 11d may be provided in the present invention.

The remote control device of the semiconductor manufacturing facility of the present invention may include a first display unit 13, a second display unit 21, connection units 15a and 15b, and the like.

The first display unit 13 is connected to the semiconductor manufacturing facilities 11a, 11b, 11c and 11d and is provided in the same space 10 in which the semiconductor manufacturing facilities 11a, 11b, 11c and 11d are located. . That is, the first display unit 13 may be directly connected to the semiconductor manufacturing facilities 11a, 11b, 11c, and 11d. Particularly, in the present invention, since at least two semiconductor manufacturing equipments 11a, 11b, 11c, and 11d may be provided, the first display unit 13 may also include at least two semiconductor manufacturing equipments 11a, 11b, 11d.

The first display unit 13 according to the present invention includes at least two semiconductor manufacturing facilities 11a, 11b, 11c, and 11d in the same space 10 in which the at least two semiconductor manufacturing facilities 11a, 11b, 11c, , 11b, 11c, and 11d, respectively.

Accordingly, the remote control device of the semiconductor manufacturing facility of the present invention can display the operation states of at least two semiconductor manufacturing equipments 11a, 11b, 11c, and 11d by including the first display unit 13. [ The first display unit 13 may be provided with four display units 13a, 13b, 13c, and 13d by providing four semiconductor manufacturing facilities 11a, 11b, 11c, and 11d .

In addition, the first display unit 13 may include a monitor and a member capable of providing an alarm.

The second display unit 21 may be connected to the first display unit 13 in a space 20 away from the space 10 where the semiconductor manufacturing facilities 11a, 11b, 11c, and 11d are located. have. That is, the second display unit 21 is not a manufacturing line, which is a space 10 in which the semiconductor manufacturing facilities 11a, 11b, 11c, and 11d are located, but a separate space 20, As shown in FIG. In particular, the second display unit 21 may be configured to have a single structure, and may have a configuration capable of outputting to a single display.

The second display unit 21 according to the present invention is configured to operate the at least two semiconductor manufacturing equipments 11a, 11b, 11c, and 11d transmitted from each of the at least two first display units 13 (20) in a space (20) away from the space (10) where the at least two semiconductor manufacturing facilities (11a, 11b, 11c, 11d) As shown in FIG. In addition, the second display unit 21 may include a monitor and a member capable of providing an alarm.

Therefore, when an abnormality occurs in any of the semiconductor manufacturing facilities 11a during the manufacturing process using the at least two semiconductor manufacturing facilities 11a, 11b, 11c, and 11d, the at least two semiconductor manufacturing facilities 11a, 11b, 11c, 11d are positioned in the space 10, the abnormality is displayed through one of the first display portions 13a connected to the one semiconductor manufacturing facility 11a, and at the same time, the at least two semiconductor manufacturing facilities The abnormality can be displayed through the second display unit 21 provided in the space 20 away from the space 10 in which the first display unit 11a, 11b, 11c, or 11d is located. When an abnormality is displayed through the first display unit 13, a work instruction is transmitted to the second display unit 21 through the first display unit 13, Measures for the manufacturing facility 11a can be remotely performed.

Therefore, the remote control device of the semiconductor manufacturing facility of the present invention may have a configuration in which the first display unit 13 and the second display unit 21 are connected by the connection units 15a and 15b. That is, the connection portions 15a and 15b may be provided so that the first display portion 13 and the second display portion 21 are connected to each other.

The connection units 15a and 15b may be connected to each other using a communication member between the first display unit 13 and the second display unit 21. The connection units 15a and 15b may be a LAN, Memory or the like. At this time, the connection units 15a and 15b may be provided by using any one of the LAN, RS232, wireless communication, and memory, or by using two or more of them.

Thus, since the remote control device of the semiconductor manufacturing facility of the present invention can remotely monitor at least two of the at least two semiconductor manufacturing facilities 11a, 11b, 11c, and 11d, It is possible to expect an effect of improving productivity by manufacturing.

The remote control device of the semiconductor manufacturing facility of the present invention can be applied not only to an actual process but also to a virtual process. That is, the remote control device of the semiconductor manufacturing facility of the present invention may be provided in a manner such that it can be simulated in a member such as a computer so that an abnormality that can be virtually generated can be checked in advance.

As described above, the remote control device of the semiconductor manufacturing facility of the present invention is capable of real-time monitoring of operation states of at least two semiconductor manufacturing facilities 11a, 11b, 11c, and 11d, as well as at least two semiconductor manufacturing facilities 11a , 11b, 11c, and 11d can be monitored at a glance.

Since the remote control device of the semiconductor manufacturing facility of the present invention can virtually derive the driving results to be obtained by driving the semiconductor manufacturing equipments 11a, 11b, 11c, and 11d, the semiconductor manufacturing equipments 11a, 11b, 11c, and 11d) can be checked in advance, and various data can be checked in advance.

As described above, since the remote control device of the semiconductor manufacturing facility of the present invention can perform remote monitoring for each of at least two semiconductor manufacturing facilities, it is possible to perform a quicker substitution in the event of abnormality, Price competitiveness can be expected to improve.

In addition, since the remote control device of the semiconductor manufacturing facility of the present invention can be applied to the simulation of the virtual process in addition to the actual process, it is possible to check beforehand any possible anomalies, It can be expected to improve competitiveness.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the present invention as defined by the following claims. It can be understood that it is possible.

13: first display portion 15a, 15b: connection portion
21:

Claims (2)

A remote control device of a semiconductor manufacturing facility for simultaneously remotely controlling operation states of at least two semiconductor manufacturing facilities,
At least two first display units connected to each of the at least two semiconductor manufacturing facilities in the same space in which the at least two semiconductor manufacturing facilities are located so as to be able to display an operating state for each of the at least two semiconductor manufacturing facilities;
Wherein at least two semiconductor manufacturing facilities are connected to the at least two first display units so that the at least two semiconductor manufacturing facilities are connected to the at least two first semiconductor fabrication facilities, A second display unit connected to the two first display units; And
And a connection portion connecting the at least two first display portions and the second display portions,
Wherein said at least two semiconductor manufacturing facilities are used in an actual semiconductor manufacturing process or in a virtual semiconductor manufacturing process. The remote control apparatus of claim 1, wherein the connection unit is provided by using any one selected from the group consisting of LAN, RS232, wireless communication, and memory.
KR1020130102182A 2013-08-28 2013-08-28 Apparatus and Method for remote controlling in semiconductor device fabricating KR102046795B1 (en)

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KR1020130102182A KR102046795B1 (en) 2013-08-28 2013-08-28 Apparatus and Method for remote controlling in semiconductor device fabricating

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KR102046795B1 KR102046795B1 (en) 2019-12-02

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20090054242A (en) * 2007-11-26 2009-05-29 세메스 주식회사 Monitoring device and remote control system comprising the same
KR20100060078A (en) * 2008-11-27 2010-06-07 세메스 주식회사 System for controlling semiconductor manufacturing equipment and method for managing recipe thereof

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20090054242A (en) * 2007-11-26 2009-05-29 세메스 주식회사 Monitoring device and remote control system comprising the same
KR20100060078A (en) * 2008-11-27 2010-06-07 세메스 주식회사 System for controlling semiconductor manufacturing equipment and method for managing recipe thereof

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