KR20150016132A - 코팅 장치 및 코팅 장치를 제조하기 위한 방법 - Google Patents

코팅 장치 및 코팅 장치를 제조하기 위한 방법 Download PDF

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Publication number
KR20150016132A
KR20150016132A KR1020140098374A KR20140098374A KR20150016132A KR 20150016132 A KR20150016132 A KR 20150016132A KR 1020140098374 A KR1020140098374 A KR 1020140098374A KR 20140098374 A KR20140098374 A KR 20140098374A KR 20150016132 A KR20150016132 A KR 20150016132A
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KR
South Korea
Prior art keywords
layer
coating
structural elements
substrate
coating apparatus
Prior art date
Application number
KR1020140098374A
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English (en)
Korean (ko)
Inventor
버그하트 마쿠스
크리스티안 헥트 한스
Original Assignee
폰 아르데네 게엠베하
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Application filed by 폰 아르데네 게엠베하 filed Critical 폰 아르데네 게엠베하
Publication of KR20150016132A publication Critical patent/KR20150016132A/ko

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Laminated Bodies (AREA)
  • Physical Vapour Deposition (AREA)
KR1020140098374A 2013-08-01 2014-07-31 코팅 장치 및 코팅 장치를 제조하기 위한 방법 KR20150016132A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102013108315.3A DE102013108315B4 (de) 2013-08-01 2013-08-01 Beschichtungsvorrichtung und Verfahren zum Herstellen einer Beschichtungsvorrichtung
DEDE102013108315.3 2013-08-01

Publications (1)

Publication Number Publication Date
KR20150016132A true KR20150016132A (ko) 2015-02-11

Family

ID=52341777

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020140098374A KR20150016132A (ko) 2013-08-01 2014-07-31 코팅 장치 및 코팅 장치를 제조하기 위한 방법

Country Status (3)

Country Link
JP (1) JP2015030918A (de)
KR (1) KR20150016132A (de)
DE (1) DE102013108315B4 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016105796B4 (de) 2016-03-30 2024-09-26 Leander Kilian Gross Verfahren zur lokal differenzierten Abscheidung eines Materials auf ein Substrat und Verwendung eines solchen Verfahrens

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7670450B2 (en) * 2006-07-31 2010-03-02 3M Innovative Properties Company Patterning and treatment methods for organic light emitting diode devices
DE102011082939B4 (de) * 2011-09-19 2015-11-26 Von Ardenne Gmbh Transfermaske und Verfahren zur Herstellung einer Transfermaske
DE102011082956B4 (de) * 2011-09-19 2015-10-15 Von Ardenne Gmbh Transfermasken zur lokalen Bedampfung von Substraten und Verfahren zu deren Herstellung

Also Published As

Publication number Publication date
DE102013108315B4 (de) 2016-08-04
DE102013108315A1 (de) 2015-02-05
JP2015030918A (ja) 2015-02-16

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