KR20140059445A - Light emitting device - Google Patents
Light emitting device Download PDFInfo
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- KR20140059445A KR20140059445A KR1020120125921A KR20120125921A KR20140059445A KR 20140059445 A KR20140059445 A KR 20140059445A KR 1020120125921 A KR1020120125921 A KR 1020120125921A KR 20120125921 A KR20120125921 A KR 20120125921A KR 20140059445 A KR20140059445 A KR 20140059445A
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- light emitting
- emitting device
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/04—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
- H01L33/06—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction within the light emitting region, e.g. quantum confinement structure or tunnel barrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/20—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
- H01L33/32—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Led Devices (AREA)
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Abstract
Description
Embodiments relate to a light emitting device, a method of manufacturing a light emitting device, a light emitting device package, and an illumination system.
Light Emitting Device is a pn junction diode whose electrical energy is converted into light energy. It can be produced from compound semiconductor such as group III and group V on the periodic table and by controlling the composition ratio of compound semiconductor, It is possible.
When a forward voltage is applied to the light emitting device, electrons in the n-layer and holes in the p-layer are coupled to emit energy corresponding to the band gap energy of the conduction band and the valance band. Is mainly emitted in the form of heat or light, and when emitted in the form of light, becomes a light emitting element.
For example, nitride semiconductors have received great interest in the development of optical devices and high power electronic devices due to their high thermal stability and wide bandgap energy. Particularly, blue light emitting devices, green light emitting devices, ultraviolet (UV) light emitting devices, and the like using nitride semiconductors have been commercialized and widely used.
The light emitting device according to the related art can form a patterned sapphire substrate (PSS) on a predetermined growth substrate to vertically reflect light escaping horizontally to increase light extraction efficiency.
However, when PSS is used, the GaN does not merge at the top of the dome-shaped pattern.
Therefore, dislocation increases due to voids and defects formed at the top of the PSS, which in turn affects the epilayer, thereby causing degradation of ESD characteristics and low current characteristics.
Embodiments provide a light emitting device, a method of manufacturing a light emitting device, a light emitting device package, and an illumination system capable of improving ESD characteristics and low current characteristics.
The light emitting device according to the embodiment includes a
According to the light emitting device, the method of manufacturing the light emitting device, and the light emitting device package and the illumination system according to the embodiment, since the n-type AlGaN series layer doped with the first conductive type element is provided under the active layer, voids voids and dislocations transferred on defects are controlled to improve the crystallinity at the bottom of the active layer, thereby improving the ESD characteristics and the low current characteristics.
1 is a cross-sectional view of a light emitting device according to an embodiment.
2 to 5 are process sectional views of a method of manufacturing a light emitting device according to an embodiment.
6 is a cross-sectional view of a light emitting device package according to an embodiment.
7 to 9 are views showing a lighting apparatus according to an embodiment.
10 and 11 are views showing another example of the lighting apparatus according to the embodiment.
12 is a perspective view of a backlight unit according to an embodiment;
In the description of the embodiments, it is to be understood that each layer (film), area, pattern or structure may be referred to as being "on" or "under" the substrate, each layer Quot; on "and" under "are intended to include both" directly "or" indirectly " do. Also, the criteria for top, bottom, or bottom of each layer will be described with reference to the drawings.
The thickness and size of each layer in the drawings are exaggerated, omitted, or schematically shown for convenience and clarity of explanation. Also, the size of each component does not entirely reflect the actual size.
(Example)
1 is a cross-sectional view of a
The
The light emitting device according to the related art can form a patterned sapphire substrate (PSS) on a substrate to vertically reflect the light that escapes horizontally to increase the light extraction efficiency. However, the problem of voids and defects Dislocations increase, which in turn affects the epi layer, resulting in degradation of ESD characteristics and low current characteristics.
Accordingly, a method of manufacturing a light emitting device and a light emitting device according to an embodiment of the present invention includes an n-type AlGaN layer doped with a first conductive type element under the active layer. Accordingly, it is possible to improve the crystallinity at the lower portion before the active layer and to improve the ESD characteristic and the low current characteristic by controlling the dislocation.
For example, the first conductivity
According to the embodiment, the first conductive semiconductor layer the Al x Ga 1 first conductivity type in a 112-by providing the x N layer (112c), effectively an evoked potential by a light reflection pattern (P) formed on a PSS, such as the substrate Can be blocked.
In this case, the embodiment wherein the first-conductivity-type Al x Ga 1 - it is possible to space the distance between x N layer (112c) and the GaN-based
In the embodiment, the gallium
A first conductivity type Al x Ga 1 according to the AlGaN / GaN super lattice layer as in Example in contact for a so-called strain relief in the prior art - in the case of forming an x N layer (112c) operating due to the difficulty of Si doped with Al voltage (VF3) is rapidly increased.
Accordingly, embodiments of these prior art to solve the technical problem, a first conductive semiconductor layer the Al x Ga 1 first conductivity type in a 112-by providing the x N layer (112c), the light reflection pattern formed on a PSS substrate or the like ( P and the distance between the first conductivity type Al x Ga 1-x
Table 1 is a comparison table of characteristics of a light emitting device according to an embodiment and a light emitting device characteristic of a comparative example at a specific wavelength (WD: dominant wavelength).
Table 1 According to the light emitting device according to the embodiment as shown in the first-conductivity-type element is doped n-type Al x Ga 1 to the active layer under-ride x N Boyd and D that may occur when using the PSS by providing a layer defect transfer The electrostatic discharge (ESD) characteristics and the luminous intensity (IV) can be remarkably improved by improving the crystallinity at the lower portion before the active layer by controlling the dislocation.
Embodiment the first first-conductivity-type semiconductor layer (112a) in the example is the first-conductivity-type Al x Ga 1 - x N can be formed thicker than the layer (112c), for example, the first-conductivity-type Al x Ga 1 The thickness of the -x
For example, the first-conductivity-type Al x Ga 1 - x N layer (112c) is because it may cause the lattice constant difference between the first conductive type semiconductor layer material may form up to about 50nm, for the potential barrier Gt; 5nm < / RTI >
In embodiments wherein the first conductivity-type Al x Ga 1 - concentration (x) of Al in the x N layer (112c) may be 0.15 <x <0.25. For example, the first-conductivity-type Al x Ga 1 - In x N layer (112c) Al is, but may be doped at least about 15% for a potential blocking consider the lattice constant difference between the first conductive type semiconductor layer material To about 25% or less.
According to the embodiment, since the n-type AlGaN-based layer doped with the first conductive type element is provided under the active layer, voids and defects that may occur when using PSS By controlling the dislocation transferred on the substrate, the crystallinity can be improved in the lower portion before the active layer, and the ESD characteristic and the low current characteristic can be improved.
1 will be described in the following manufacturing method.
Hereinafter, a method of manufacturing a light emitting device according to an embodiment will be described with reference to FIGS. 2 to 5. FIG.
2 to 5 show a horizontal light emitting device in which a
2, the
The embodiment may include a light reflection pattern P to increase light extraction efficiency. For example, a patterned sapphire substrate (PSS) may be formed on the
The embodiment also includes a
For example, the material of the
Next, as shown in FIG. 3, the first conductivity
On the other hand, the conventional light emitting device can increase the light extraction efficiency by forming PSS on the substrate, but dislocation increases due to voids and defects formed on the PSS, Thereby lowering ESD characteristics and low current characteristics.
The first
In an embodiment, the first and second
For example, the first first-conductivity-type semiconductor layer (112a), the second first-conductivity-type semiconductor layer (112b) is In x Al y Ga 1 -x- y N (0≤x≤1, 0≤y≤1 , 0 < x + y < 1), and may include, for example, a semiconductor material having a composition formula of GaN, InN, AlN, InGaN, AlGaN, InAlGaN, AlInN, AlGaAs, InGaAs, AlInGaAs, GaP, AlGaP, InGaP , AlInGaP, and InP, but the present invention is not limited thereto.
According to the embodiment, the first conductive semiconductor layer the Al x Ga 1 first conductivity type in a 112-by providing the x N layer (112c), effectively an evoked potential by a light reflection pattern (P) formed on a PSS, such as the substrate Can be blocked.
Embodiment the first first-conductivity-type semiconductor layer (112a) in the example is the first-conductivity-type Al x Ga 1 - x N can be formed thicker than the layer (112c), for example, the first-conductivity-type Al x Ga 1 The thickness of the - x
For example, the first-conductivity-type Al x Ga 1 - x N layer (112c) is because it may cause the lattice constant difference between the first conductive type semiconductor layer material may form up to about 50nm, for the potential barrier Gt; 5nm < / RTI >
In embodiments wherein the first conductivity-type Al x Ga 1 - concentration (x) of Al in the x N layer (112c) may be 0.15 <x <0.25. For example, the first-conductivity-type Al x Ga 1 - In x N layer (112c) Al is, but may be doped at least about 15% for a potential blocking consider the lattice constant difference between the first conductive type semiconductor layer material To about 25% or less.
According to the embodiment, since the n-type AlGaN-based layer doped with the first conductive type element is provided under the active layer, voids and defects that may occur when the PSS is used By controlling the dislocation transferred on the substrate, the crystallinity can be improved in the lower portion before the active layer, and the ESD characteristic and the low current characteristic can be improved.
Next, a gallium nitride-based
In this case, the embodiment wherein the first-conductivity-type Al x Ga 1 - it is possible to space the distance between x N layer (112c) and the GaN-based
In the embodiment, the gallium
In addition, the gallium
A first conductivity type Al x Ga 1 according to the AlGaN / GaN super lattice layer as in Example in contact for a so-called strain relief in the prior art - in the case of forming an x N layer (112c) operating due to the difficulty of Si doped with Al voltage (VF3) is rapidly increased.
Accordingly, embodiments of these prior art to solve the technical problem, a first conductive semiconductor layer the Al x Ga 1 first conductivity type in a 112-by providing the x N layer (112c), the light reflection pattern formed on a PSS substrate or the like ( P and the distance between the first conductivity type Al x Ga 1-x N layer 112c and the gallium
The light emitting device according to the embodiment has n-type Al x Ga 1 - x N layers doped with a first conductive type element at the bottom of the active layer as shown in Table 1, so that voids and defects, The electrostatic discharge (ESD) characteristics and the luminous intensity (IV) can be remarkably improved by improving the crystallinity at the lower portion before the active layer by controlling the dislocation.
Next, as shown in FIG. 4, the
In an embodiment, the
For example, the
The well layer / barrier layer of the
Next, in the embodiment, the
In addition, the
The electron blocking layer 126 can efficiently block the electrons that are ion-implanted into the p-type and overflow, and increase the hole injection efficiency. For example, the electron blocking layer 126 may be formed by implanting Mg in a concentration range of about 10 18 to 10 20 / cm 3 to effectively block electrons that overflow and increase the hole injection efficiency.
Thereafter, a second
For example, the second
In an embodiment, the first
The second
5, a light-transmitting electrode 130 is formed on the second
The transmissive electrode 130 may be formed of one of indium tin oxide (ITO), indium zinc oxide (IZO), indium zinc oxide (IZTO), indium aluminum zinc oxide (IAZO), indium gallium zinc oxide ZnO, ZnO, IrOx, ZnO, AlGaO, AZO, ATO, GZO, IZO, RuOx, and NiO, and is not limited to such a material.
Thereafter, a
According to the embodiment, since the n-type AlGaN-based layer doped with the first conductive type element is provided under the active layer, voids and defects that may occur when the PSS is used By controlling the dislocation transferred on the substrate, the crystallinity can be improved in the lower portion before the active layer, and the ESD characteristic and the low current characteristic can be improved.
6 is a view illustrating a light emitting
The light emitting
The
The
The
The
The
The
A light guide plate, a prism sheet, a diffusion sheet, a fluorescent sheet, and the like, which are optical members, may be disposed on a path of light emitted from the light emitting device package. The light emitting device package, the substrate, and the optical member may function as a backlight unit or function as a lighting unit. For example, the lighting system may include a backlight unit, a lighting unit, a pointing device, a lamp, and a streetlight.
7 to 9 are views showing a lighting apparatus according to an embodiment.
FIG. 7 is a perspective view of the illumination device according to the embodiment viewed from above, FIG. 8 is a perspective view of the illumination device shown in FIG. 7, and FIG. 9 is an exploded perspective view of the illumination device shown in FIG.
7 to 9, the illumination device according to the embodiment includes a
For example, the
The inner surface of the
The
The
The
The surface of the
The
The
The
The
The
The
The
10 and 11 are views showing another example of the lighting apparatus according to the embodiment.
FIG. 10 is a perspective view of a lighting apparatus according to the embodiment, and FIG. 11 is an exploded perspective view of the lighting apparatus shown in FIG.
10 and 11, the lighting device according to the embodiment includes a
The
The
The
The inner surface of the
The
The
11, the
The
In addition, the
The light emitting device 3230 may be a light emitting diode chip that emits red, green, or blue light, or a light emitting diode chip that emits UV light. Here, the light emitting diode chip may be a lateral type or a vertical type, and the light emitting diode chip may emit blue, red, yellow, or green light. .
The light emitting device 3230 may have a phosphor. The phosphor may be at least one of a garnet system (YAG, TAG), a silicate system, a nitride system, and an oxynitride system. Alternatively, the fluorescent material may be at least one of a yellow fluorescent material, a green fluorescent material, and a red fluorescent material.
The
A plurality of radiating
The
Specifically, the
The
The
The material of the
The
The
The plurality of
The
The
The
12 is an exploded
The
The
The light emitting
The
The
The plurality of light emitting device packages 200 may be mounted on the
The
The
The
According to the light emitting device, the method of manufacturing the light emitting device, and the light emitting device package and the illumination system according to the embodiment, since the n-type AlGaN series layer doped with the first conductive type element is provided under the active layer, voids voids and dislocations transferred on defects are controlled to improve the crystallinity at the lower part before the active layer and to improve the ESD characteristics and the low current characteristics.
The features, structures, effects and the like described in the embodiments are included in at least one embodiment and are not necessarily limited to only one embodiment. Furthermore, the features, structures, effects and the like illustrated in the embodiments can be combined and modified by other persons skilled in the art to which the embodiments belong. Accordingly, the contents of such combinations and modifications should be construed as being included in the scope of the embodiments.
While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention. It can be seen that the modification and application of branches are possible. For example, each component specifically shown in the embodiments can be modified and implemented. It is to be understood that the present invention may be embodied in many other specific forms without departing from the spirit or essential characteristics thereof.
The
The first
A first conductive type Al x Ga 1 - x N layer 112c, a second first conductivity
A gallium
The second conductivity
Claims (9)
A first conductive semiconductor layer on the substrate;
A gallium nitride superlattice layer on the first conductive type semiconductor layer;
An active layer on the gallium nitride superlattice layer; And
And a second conductive semiconductor layer on the active layer,
Wherein the first conductive type Al x Ga 1 - x N layer (0 <x <1) is contained in the first conductive type semiconductor layer.
The first conductivity type semiconductor layer may include a first conductivity type semiconductor layer,
A first conductive type semiconductor layer on the substrate;
A first conductive type Al x Ga 1 - x N layer on the first first conductivity type semiconductor layer; And
And a second first conductivity type semiconductor layer on the first conductive type Al x Ga 1 - x N layer.
Wherein the first conductivity type Al x Ga 1 - x N layer and the gallium nitride superlattice layer are spaced apart from each other by a predetermined distance.
Wherein the first conductive type Al x Ga 1 - x N layer and the gallium nitride superlattice layer are spaced apart by 0.5 μm to 1.5 μm.
The first conductive type semiconductor layer
Wherein the first conductive type Al x Ga 1 - x N layer is thicker than the first conductive type Al x Ga 1 - x N layer.
The thickness of the first conductive type Al x Ga 1 - x N layer is
5 nm to 50 nm.
In the first conductive Al x Ga 1 - x N layer
And the concentration (x) of Al is 0.15 < x < 0.25.
The gallium nitride-based superlattice layer
Al y Ga 1 - y N / GaN (where 0 <y <1).
The gallium nitride-based superlattice layer
And the first conductivity type.
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US10374124B2 (en) | 2015-05-29 | 2019-08-06 | Lg Innotek Co., Ltd. | Light emitting device, method for manufacturing light emitting device and lighting system having same |
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