KR20140041225A - Light emitting device - Google Patents
Light emitting device Download PDFInfo
- Publication number
- KR20140041225A KR20140041225A KR1020120108308A KR20120108308A KR20140041225A KR 20140041225 A KR20140041225 A KR 20140041225A KR 1020120108308 A KR1020120108308 A KR 1020120108308A KR 20120108308 A KR20120108308 A KR 20120108308A KR 20140041225 A KR20140041225 A KR 20140041225A
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- layer
- light emitting
- emitting device
- barrier layer
- semiconductor layer
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/04—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
- H01L33/06—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction within the light emitting region, e.g. quantum confinement structure or tunnel barrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/14—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a carrier transport control structure, e.g. highly-doped semiconductor layer or current-blocking structure
- H01L33/145—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a carrier transport control structure, e.g. highly-doped semiconductor layer or current-blocking structure with a current-blocking structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of group III and group V of the periodic system
- H01L33/32—Materials of the light emitting region containing only elements of group III and group V of the periodic system containing nitrogen
Abstract
Embodiments relate to a light emitting device, a method of manufacturing a light emitting device, a light emitting device package, and an illumination system.
The light emitting device according to the embodiment includes a first conductive semiconductor layer 112; An active layer 114 including a well layer and a barrier layer 114b on the first conductive semiconductor layer 112; A second conductive semiconductor layer 116 on the active layer 114, wherein the barrier layer 114b comprises: a first barrier layer 114b1 on the first conductive semiconductor layer; A second barrier layer 114b2 is disposed between the first barrier layer 114b1 and the second conductivity-type semiconductor layer 116. The first barrier layer 114b1 includes a GaN barrier layer 114bg and the And an Al x Ga (1-x) N barrier layer 114ba on the GaN barrier layer 114bg.
Description
Embodiments relate to a light emitting device, a method of manufacturing a light emitting device, a light emitting device package, and an illumination system.
Light Emitting Device is a pn junction diode whose electrical energy is converted into light energy. It can be produced from compound semiconductor such as group III and group V on the periodic table and by controlling the composition ratio of compound semiconductor, It is possible.
When a forward voltage is applied to the light emitting device, electrons in the n-layer and holes in the p-layer are coupled to emit energy corresponding to the band gap energy of the conduction band and the valance band. Is mainly emitted in the form of heat or light, and when emitted in the form of light, becomes a light emitting element.
For example, nitride semiconductors have received great interest in the development of optical devices and high power electronic devices due to their high thermal stability and wide bandgap energy. Particularly, blue light emitting devices, green light emitting devices, ultraviolet (UV) light emitting devices, and the like using nitride semiconductors have been commercialized and widely used.
The nitride semiconductor light emitting device may be classified into a lateral type light emitting device and a vertical type light emitting device depending on the position of the electrode layer.
A horizontal type light emitting device is formed such that a nitride semiconductor layer is formed on a sapphire substrate and two electrode layers are disposed on the upper side of the nitride semiconductor layer.
Nitride semiconductors used in blue LEDs are subject to large stresses during growth due to different thermal expansion coefficients and lattice constants of the substrate and each growth layer.
In particular, this phenomenon breaks the uniformity of the entire wafer as the size of the substrate increases. For example, the low current characteristics and the wavelength distribution increase depending on the region, and as a result, the characteristics of the light emitting device chip also vary.
To solve this phenomenon, wafer carriers are designed to be convex as needed to reduce the effects of bowing during growth, but it is difficult to manufacture because it requires precision of tens of μm. In particular, since the state of bowing changes as each layer grows, bowing control in a particular layer which is problematic in the end is important.
Embodiments provide a light emitting device capable of improving overall wafer uniformity, a method of manufacturing the same, a light emitting device package, and an illumination system.
The light emitting device according to the embodiment includes a first
According to the light emitting device, the method of manufacturing the light emitting device, the light emitting device package, and the lighting system according to the embodiment, the wafer bowing is controlled in the growth stage of the quantum well structure which has the greatest influence on the distribution of the light emitting device characteristics. Wafer uniformity can be improved.
In addition, the embodiment can improve the yield by controlling the wafer bow (wafer bowing) generated during the growth of the large-area nitride compound LED structure.
1 is a cross-sectional view of a light emitting device according to an embodiment.
2A is a diagram illustrating a band diagram of a part of a light emitting device according to the first embodiment;
2B is an exemplary band diagram of a portion of a light emitting device according to the second embodiment;
Figure 3 is an illustration of a distribution picture of the brightness of the light emitting device according to the embodiment.
4 is a diagram illustrating a distribution of luminance according to chip emission wavelength (WD) of a light emitting device according to an embodiment;
5 is a cross-sectional view of a light emitting device package according to an embodiment.
6 to 8 are views showing the lighting apparatus according to the embodiment.
9 and 10 are views showing another example of the lighting apparatus according to the embodiment.
11 is a perspective view of a backlight unit according to an embodiment.
In the description of the embodiments, it is to be understood that each layer (film), area, pattern or structure may be referred to as being "on" or "under" the substrate, each layer Quot; on "and" under "are intended to include both" directly "or" indirectly " do. Also, the criteria for top, bottom, or bottom of each layer will be described with reference to the drawings.
The thickness and size of each layer in the drawings are exaggerated, omitted, or schematically shown for convenience and clarity of explanation. Also, the size of each component does not entirely reflect the actual size.
(Example)
1 is a cross-sectional view of a
The
The first
The
The embodiment includes a
In an exemplary embodiment, the first
For example, the first
In an embodiment, a current diffusion layer (not shown), for example, an undoped GaN layer may be formed on the first
In addition, in the embodiment, an
In addition, the embodiment is a
In addition, as the
Next, an
In an embodiment, the
The well
Embodiments provide a light emitting device, a method of manufacturing the same, a light emitting device package, and an illumination system capable of improving yield by improving overall wafer uniformity.
2 is a diagram illustrating a band diagram of a part of the light emitting device according to the first embodiment.
According to the light emitting device, the method of manufacturing the light emitting device, the light emitting device package and the lighting system according to the embodiment to solve the problem, wafer bowing in the growth stage of the quantum well structure that has the greatest effect on the distribution of the light emitting device characteristics By controlling this, the overall wafer uniformity can be improved.
Through this, according to the embodiment, it is possible to increase the overall uniformity by controlling the wafer bowing generated during the growth of the large-area compound LED structure.
In order to achieve the above effect, the
The GaN barrier layer 114bg may include a plurality of layers, and an Al x Ga (1-x) N barrier layer 114ba may be interposed between the GaN barrier layers 114bg.
The bandgap energy of the GaN barrier layer 114bg may be smaller than the bandgap energy of the Al x Ga (1-x) N barrier layer 114ba.
The first barrier layer 114b1 including the Al x Ga (1-x) N barrier layer 114ba is closer to the first conductivity
In an embodiment, the concentration x of Al in the Al x Ga (1-x) N barrier layer 114ba may be 0 <x <0.3. According to the embodiment, the Al is included (0 <x) in the Al x Ga (1-x) N barrier layer 114ba to enable wafer bowing control, and when the Al concentration (x) is 0.3 or more, the barrier may be used. The height of the VANGAP energy level in the M3 is too high, which may interfere with the injection of electrons from the bottom. Accordingly, the concentration x of Al in the Al x Ga (1-x) N barrier layer 114ba is appropriately 0 <x <0.3.
In addition, in the embodiment, the Al x Ga (1-x) N barrier layer 114ba may be doped with an n-type element. For example, Si is doped in the Al x Ga (1-x) N barrier layer 114ba, and the doping concentration of the Si element is 9 × 10 17 atoms / cm 3. To 3 × 10 18 atoms / cm 3 .
According to the embodiment, the Al x Ga (1-x) N barrier layer 114ba must also serve as an electron injection layer, and in particular, the energy barrier of the Al x Ga (1-x) N barrier layer 114ba is a GaN barrier. Since it is higher than (114 bg), the Si doping may be 9 × 10 17 atoms / cm 3 or more for efficient injection of electrons. On the other hand, if the doping concentration of the n-type element is too high, there is a high possibility of recombination only at the very last part of the emission layer even if there are too many electrons in terms of balance between electrons and holes, and the film quality may be poor, so the n-type element is 3 ×. It may be doped up to 10 18 atoms / cm 3 .
In addition, in the embodiment, the Al x Ga (1-x) N barrier layer 114ba may have a thickness of 6 nm or less. In addition, the first barrier layer 114b1 including the Al x Ga (1-x) N barrier layer 114ba may have a thickness of 18 nm or less. For example, the first barrier layer 114b1 may be an InGaN / AlGaN / InGaN multi-barrier and may not exceed 18 nm in total.
In an embodiment, the barrier effect due to the insertion of the Al x Ga (1-x) N barrier layer 114ba may depend on the bandgap energy height and the layer thickness. However, even if the height of the bandgap energy level is too thick, electron injection may be difficult, so doping of n-type elements in the range of 9 × 10 17 atoms / cm 3 to 3 × 10 18 atoms / cm 3 is necessary.
In addition, in the embodiment, in order to control the strain (strain control), the strain must be sufficiently received in the Al x Ga (1-x) N barrier layer 114ba, but if it is too thick, the strain is released. Since disappears, a thickness of about 1 nm to 6 nm or less is appropriate. Further, according to the embodiment, the appropriate thickness of the Al x Ga (1-x) N barrier layer 114ba may be 1 nm to 3 nm, but is not limited thereto.
In addition, in the embodiment, the Al x Ga (1-x) N barrier layer 114ba having a thickness less than half of the total thickness of the single first barrier layer 114b1 may be suitable for controlling wafer warpage. .
3 is a photograph illustrating distribution of brightness of a light emitting device according to an embodiment.
FIG. 3 is mapping data obtained by capturing the brightness of each small chip in a speed mode in a wafer state. It is also distributed in a wafer due to the influence of strain during growth, and the influence and the characteristics of each position can be grasped.
In Figure 3 (c) is a reference example of the intensity (IV) according to the color, (a) is a photograph of the intensity distribution of the wafer in the manufacturing method of the light emitting device according to the prior art, (b) is a light emitting device according to the embodiment In the manufacturing method of the photometric distribution of the wafer.
4 is a diagram illustrating a distribution of luminance according to chip emission wavelength (WD) of a light emitting device according to an embodiment. In FIG. 4 the x axis is the dominant wavelength and the y axis is the luminosity.
Observing the drawings of FIGS. 3 and 4 together, it can be seen that the light intensity is low on the long wavelength side (for example, about 450 nm or more) as shown in FIGS. 3A and 4R. For example, the effect of bowing is to have a large black scatter and a large drop of light.
On the other hand, when the embodiment is applied it can be seen that the dispersion is reduced when the improved by adjusting the wafer bowing (bowing) to increase the average brightness. For example, even in the long wavelength side (for example, about 450 nm or more) as shown in FIGS. 3 (b) and 4 (e), the area of the luminance IV is less than 98 (mV) almost disappears and the luminance distribution of the chip is very uniform. Done.
2B is a diagram illustrating a band diagram of a part of the light emitting device according to the second embodiment.
The second embodiment can employ the technical features of the first embodiment.
In the second exemplary embodiment, the
The Al x Ga (1-x) N layer 114c of the first well layer 114a1 may have the same composition and thickness as the Al x Ga (1-x) N barrier layer 114ba, but is not limited thereto. It is not.
The first well layer 114a1 may be a well layer closest to the first conductivity
In general, the mobility of holes among the carriers is low, so that the
Accordingly, the embodiment introduces an Al x Ga (1-x) N layer 114c into the first well layer 114a1 that is included in the active layer and hardly contributes to light emission. By improving the bowing the brightness can be increased.
According to the light emitting device and the manufacturing method according to the embodiment, the wafer uniformity can be improved by controlling the wafer bowing in the growth stage of the quantum well structure which has the greatest influence on the distribution of the light emitting device characteristics. .
In addition, the embodiment can improve the yield by controlling the wafer bow (wafer bowing) generated during the growth of the large-area nitride compound LED structure.
Next, the following process is demonstrated with reference to FIG.
In an embodiment, the
In an embodiment, the
In addition, the
In addition, the
The second conductivity
For example, the second
In an embodiment, the first
Next, in the embodiment, the light-transmitting
For example, the
The second conductivity
According to the light emitting device and the manufacturing method according to the embodiment, the wafer uniformity can be improved by controlling the wafer bowing in the growth stage of the quantum well structure which has the greatest influence on the distribution of the light emitting device characteristics. .
In addition, the embodiment can improve the yield by controlling the wafer bow (wafer bowing) generated during the growth of the large-area nitride compound LED structure.
5 is a view illustrating a light emitting
The light emitting
The
The
The
The
The
The
A light guide plate, a prism sheet, a diffusion sheet, a fluorescent sheet, and the like, which are optical members, may be disposed on a path of light emitted from the light emitting device package. The light emitting device package, the substrate, and the optical member may function as a backlight unit or function as a lighting unit. For example, the lighting system may include a backlight unit, a lighting unit, a pointing device, a lamp, and a streetlight.
6 to 8 are views showing a lighting apparatus according to an embodiment.
FIG. 6 is a perspective view of the illumination device according to the embodiment viewed from above, FIG. 7 is a perspective view of the illumination device shown in FIG. 6, and FIG. 8 is an exploded perspective view of the illumination device shown in FIG.
6 to 8, the lighting apparatus according to the embodiment includes a
For example, the
The inner surface of the
The
The
The
The surface of the
The
The
The
The
The
The
The
9 and 10 are views showing another example of the lighting apparatus according to the embodiment.
FIG. 9 is a perspective view of a lighting apparatus according to the embodiment, and FIG. 10 is an exploded perspective view of the lighting apparatus shown in FIG.
9 and 10, the illumination device according to the embodiment includes a
The
The
The
The inner surface of the
The
The
10, the
The
In addition, the
The light emitting device 3230 may be a light emitting diode chip that emits red, green, or blue light, or a light emitting diode chip that emits UV light. Here, the light emitting diode chip may be a lateral type or a vertical type, and the light emitting diode chip may emit blue, red, yellow, or green light. .
The light emitting device 3230 may have a phosphor. The phosphor may be at least one of a garnet system (YAG, TAG), a silicate system, a nitride system, and an oxynitride system. Alternatively, the fluorescent material may be at least one of a yellow fluorescent material, a green fluorescent material, and a red fluorescent material.
The
A plurality of radiating
The
Specifically, the
The
The
The material of the
The
The
The plurality of
The
The
The
11 is an exploded
The
The
The light emitting
The
The
The plurality of light emitting device packages 200 may be mounted on the
The
The
The
According to the light emitting device, the method of manufacturing the light emitting device, the light emitting device package, and the lighting system according to the embodiment, the wafer bowing is controlled in the growth stage of the quantum well structure which has the greatest influence on the distribution of the light emitting device characteristics. Wafer uniformity can be improved.
The features, structures, effects and the like described in the embodiments are included in at least one embodiment and are not necessarily limited to only one embodiment. Furthermore, the features, structures, effects and the like illustrated in the embodiments can be combined and modified by other persons skilled in the art to which the embodiments belong. Accordingly, the contents of such combinations and modifications should be construed as being included in the scope of the embodiments.
While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention. It can be seen that the modification and application of branches are possible. For example, each component specifically shown in the embodiments can be modified and implemented. It is to be understood that the present invention may be embodied in many other specific forms without departing from the spirit or essential characteristics thereof.
The first
A
A second conductivity
First barrier layer 114b1 and second barrier layer 114b2
GaN barrier layer 114bg, Al x Ga (1-x) N barrier layer 114ba
First well layer 114a1, Second well layer 114a2
Al x Ga (1-x) N layer 114c
Claims (12)
An active layer including a well layer and a barrier layer on the first conductivity type semiconductor layer;
And a second conductive semiconductor layer on the active layer,
The barrier layer,
A first barrier layer on the first conductive semiconductor layer;
A second barrier layer between the first barrier layer and the second conductive semiconductor layer,
The first barrier layer,
A light emitting device comprising a GaN barrier layer and an Al x Ga (1-x) N barrier layer on the GaN barrier layer.
The GaN barrier layer is provided with a plurality of layers,
A light emitting device in which an Al x Ga (1-x) N barrier layer is interposed between the plurality of GaN barrier layers.
The first barrier layer including the Al x Ga (1-x) N barrier layer is
The light emitting device disposed adjacent to the first conductive semiconductor layer rather than the second conductive semiconductor layer.
In the Al x Ga (1-x) N barrier layer,
The concentration (x) of Al is 0 <x <0.3.
The Al x Ga (1-x) N barrier layer is
A light emitting device doped with an n-type element.
In the Al x Ga (1-x) N barrier layer
Si element is doped, and the doping concentration of the Si element is
9 × 10 17 atoms / cm 3 To 3 × 10 18 atoms / cm 3 Phosphorescent light emitting element.
The Al x Ga (1-x) N barrier layer is
A light emitting element having a thickness of 6 nm or less.
The first barrier layer including the Al x Ga (1-x) N barrier layer is
A light emitting device having a thickness of 18 nm or less.
The Al x Ga (1-x) N barrier layer is
A light emitting device having a thickness of less than half of the total thickness of a single first barrier layer.
The well layer,
A first well layer on the first conductive semiconductor layer;
A second well layer between the first well layer and the second conductivity type semiconductor layer,
The first well layer is
A light emitting device comprising Al x Ga (1-x) N layer.
Al x Ga (1-x) N layer of the first well layer
A light emitting device having the same composition and thickness as the Al x Ga (1-x) N barrier layer.
And the first well layer is a well layer closest to the first conductive semiconductor layer.
Priority Applications (1)
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KR1020120108308A KR20140041225A (en) | 2012-09-27 | 2012-09-27 | Light emitting device |
Applications Claiming Priority (1)
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KR1020120108308A KR20140041225A (en) | 2012-09-27 | 2012-09-27 | Light emitting device |
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KR1020120108308A KR20140041225A (en) | 2012-09-27 | 2012-09-27 | Light emitting device |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10535795B2 (en) | 2014-11-07 | 2020-01-14 | Lg Innotek Co., Ltd. | Ultraviolet light emitting element and lighting system having a quantum barrier structure for improved light emission efficiency |
-
2012
- 2012-09-27 KR KR1020120108308A patent/KR20140041225A/en not_active Application Discontinuation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10535795B2 (en) | 2014-11-07 | 2020-01-14 | Lg Innotek Co., Ltd. | Ultraviolet light emitting element and lighting system having a quantum barrier structure for improved light emission efficiency |
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