KR20130132455A - 갭-결합 전극을 갖는 전기 광학 소자 - Google Patents
갭-결합 전극을 갖는 전기 광학 소자 Download PDFInfo
- Publication number
- KR20130132455A KR20130132455A KR1020137013504A KR20137013504A KR20130132455A KR 20130132455 A KR20130132455 A KR 20130132455A KR 1020137013504 A KR1020137013504 A KR 1020137013504A KR 20137013504 A KR20137013504 A KR 20137013504A KR 20130132455 A KR20130132455 A KR 20130132455A
- Authority
- KR
- South Korea
- Prior art keywords
- electrode
- electro
- coating
- substrate
- optic crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000758 substrate Substances 0.000 claims abstract description 149
- 239000013078 crystal Substances 0.000 claims abstract description 141
- 238000000576 coating method Methods 0.000 claims abstract description 121
- 239000011248 coating agent Substances 0.000 claims abstract description 102
- 239000000463 material Substances 0.000 claims abstract description 42
- 239000003507 refrigerant Substances 0.000 claims description 77
- 238000000034 method Methods 0.000 claims description 63
- 230000010287 polarization Effects 0.000 claims description 40
- 229910052594 sapphire Inorganic materials 0.000 claims description 22
- 239000010980 sapphire Substances 0.000 claims description 22
- 239000007788 liquid Substances 0.000 claims description 15
- 239000012530 fluid Substances 0.000 claims description 13
- 239000012799 electrically-conductive coating Substances 0.000 claims description 8
- 239000006117 anti-reflective coating Substances 0.000 claims description 5
- 239000012790 adhesive layer Substances 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 36
- 238000013461 design Methods 0.000 description 30
- 230000003287 optical effect Effects 0.000 description 26
- 238000001816 cooling Methods 0.000 description 25
- 230000005684 electric field Effects 0.000 description 21
- 230000008859 change Effects 0.000 description 18
- 230000003667 anti-reflective effect Effects 0.000 description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 13
- 238000010521 absorption reaction Methods 0.000 description 13
- 230000035882 stress Effects 0.000 description 13
- 230000015556 catabolic process Effects 0.000 description 12
- 230000006866 deterioration Effects 0.000 description 11
- 239000010410 layer Substances 0.000 description 11
- 230000000694 effects Effects 0.000 description 10
- 238000000137 annealing Methods 0.000 description 9
- 239000002826 coolant Substances 0.000 description 9
- 230000031700 light absorption Effects 0.000 description 9
- 238000012986 modification Methods 0.000 description 9
- 230000004048 modification Effects 0.000 description 9
- 230000008901 benefit Effects 0.000 description 8
- 235000019796 monopotassium phosphate Nutrition 0.000 description 8
- 230000008832 photodamage Effects 0.000 description 8
- 238000000151 deposition Methods 0.000 description 7
- 239000010408 film Substances 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 7
- 230000002829 reductive effect Effects 0.000 description 7
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 6
- 238000000149 argon plasma sintering Methods 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 6
- 230000008021 deposition Effects 0.000 description 6
- 239000011521 glass Substances 0.000 description 6
- 238000011282 treatment Methods 0.000 description 6
- 230000008033 biological extinction Effects 0.000 description 5
- 239000005350 fused silica glass Substances 0.000 description 5
- 238000010791 quenching Methods 0.000 description 5
- 230000000171 quenching effect Effects 0.000 description 5
- 238000004088 simulation Methods 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 238000004364 calculation method Methods 0.000 description 4
- 230000006378 damage Effects 0.000 description 4
- NNBZCPXTIHJBJL-UHFFFAOYSA-N decalin Chemical class C1CCCC2CCCCC21 NNBZCPXTIHJBJL-UHFFFAOYSA-N 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 230000000149 penetrating effect Effects 0.000 description 4
- 230000009467 reduction Effects 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000006731 degradation reaction Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 238000002955 isolation Methods 0.000 description 3
- 230000036961 partial effect Effects 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 230000000930 thermomechanical effect Effects 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- 230000007704 transition Effects 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- 239000011787 zinc oxide Substances 0.000 description 3
- XBJJRSFLZVLCSE-UHFFFAOYSA-N barium(2+);diborate Chemical compound [Ba+2].[Ba+2].[Ba+2].[O-]B([O-])[O-].[O-]B([O-])[O-] XBJJRSFLZVLCSE-UHFFFAOYSA-N 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000000499 gel Substances 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 229910003437 indium oxide Inorganic materials 0.000 description 2
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- GNSKLFRGEWLPPA-UHFFFAOYSA-M potassium dihydrogen phosphate Chemical class [K+].OP(O)([O-])=O GNSKLFRGEWLPPA-UHFFFAOYSA-M 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 229910052701 rubidium Inorganic materials 0.000 description 2
- IGLNJRXAVVLDKE-UHFFFAOYSA-N rubidium atom Chemical compound [Rb] IGLNJRXAVVLDKE-UHFFFAOYSA-N 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 230000008646 thermal stress Effects 0.000 description 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
- 229910001887 tin oxide Inorganic materials 0.000 description 2
- PFNQVRZLDWYSCW-UHFFFAOYSA-N (fluoren-9-ylideneamino) n-naphthalen-1-ylcarbamate Chemical compound C12=CC=CC=C2C2=CC=CC=C2C1=NOC(=O)NC1=CC=CC2=CC=CC=C12 PFNQVRZLDWYSCW-UHFFFAOYSA-N 0.000 description 1
- DJHGAFSJWGLOIV-UHFFFAOYSA-K Arsenate3- Chemical compound [O-][As]([O-])([O-])=O DJHGAFSJWGLOIV-UHFFFAOYSA-K 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- 229910005540 GaP Inorganic materials 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910052771 Terbium Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000002745 absorbent Effects 0.000 description 1
- 239000002250 absorbent Substances 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229940000489 arsenate Drugs 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000002144 chemical decomposition reaction Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 239000012809 cooling fluid Substances 0.000 description 1
- 239000000112 cooling gas Substances 0.000 description 1
- 239000000110 cooling liquid Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000000313 electron-beam-induced deposition Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- HZXMRANICFIONG-UHFFFAOYSA-N gallium phosphide Chemical compound [Ga]#P HZXMRANICFIONG-UHFFFAOYSA-N 0.000 description 1
- 239000002223 garnet Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000007735 ion beam assisted deposition Methods 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- WYOHGPUPVHHUGO-UHFFFAOYSA-K potassium;oxygen(2-);titanium(4+);phosphate Chemical compound [O-2].[K+].[Ti+4].[O-]P([O-])([O-])=O WYOHGPUPVHHUGO-UHFFFAOYSA-K 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910052950 sphalerite Inorganic materials 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 230000002277 temperature effect Effects 0.000 description 1
- GZCRRIHWUXGPOV-UHFFFAOYSA-N terbium atom Chemical compound [Tb] GZCRRIHWUXGPOV-UHFFFAOYSA-N 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- PXXNTAGJWPJAGM-UHFFFAOYSA-N vertaline Natural products C1C2C=3C=C(OC)C(OC)=CC=3OC(C=C3)=CC=C3CCC(=O)OC1CC1N2CCCC1 PXXNTAGJWPJAGM-UHFFFAOYSA-N 0.000 description 1
- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/0305—Constructional arrangements
- G02F1/0311—Structural association of optical elements, e.g. lenses, polarizers, phase plates, with the crystal
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/0305—Constructional arrangements
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/0305—Constructional arrangements
- G02F1/0322—Arrangements comprising two or more independently controlled crystals
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/0327—Operation of the cell; Circuit arrangements
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/38—Anti-reflection arrangements
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/01—Function characteristic transmissive
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/02—Function characteristic reflective
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/60—Temperature independent
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Polarising Elements (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Surface Treatment Of Optical Elements (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/913,651 | 2010-10-27 | ||
| US12/913,651 US8514475B2 (en) | 2010-10-27 | 2010-10-27 | Electro-optic device with gap-coupled electrode |
| PCT/US2011/057383 WO2012058123A2 (en) | 2010-10-27 | 2011-10-21 | Electro-optic device with gap-coupled electrode |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20130132455A true KR20130132455A (ko) | 2013-12-04 |
Family
ID=45994672
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020137013504A Withdrawn KR20130132455A (ko) | 2010-10-27 | 2011-10-21 | 갭-결합 전극을 갖는 전기 광학 소자 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US8514475B2 (enExample) |
| EP (2) | EP3528039B1 (enExample) |
| JP (1) | JP6071889B2 (enExample) |
| KR (1) | KR20130132455A (enExample) |
| CA (1) | CA2815068A1 (enExample) |
| RU (1) | RU2013124063A (enExample) |
| WO (1) | WO2012058123A2 (enExample) |
Families Citing this family (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9136668B2 (en) * | 2010-10-29 | 2015-09-15 | Lawrence Livermore National Security, Llc | Method and system for compact efficient laser architecture |
| US20140218795A1 (en) * | 2013-02-05 | 2014-08-07 | Electro-Optics Technology, Inc. | Power scalable multi-pass faraday rotator |
| CN103197442A (zh) * | 2013-03-12 | 2013-07-10 | 中国科学院上海光学精密机械研究所 | 反射式透明导电膜电光开关 |
| US20150124318A1 (en) * | 2013-11-05 | 2015-05-07 | Electro-Optics Technology, Inc. | High magnetic field-type multi-pass faraday rotator |
| CN104155776B (zh) * | 2014-07-22 | 2017-02-15 | 京东方科技集团股份有限公司 | 电子窗及其控制方法 |
| EP3368235A4 (en) | 2015-10-30 | 2019-07-03 | Seurat Technologies, Inc. | CHAMBER SYSTEMS FOR GENERATIVE MANUFACTURING |
| US11656511B2 (en) * | 2020-10-23 | 2023-05-23 | Seurat Technologies, Inc. | Laser damage hardening of light modulator components for use with high optical fluence systems |
| US12459200B2 (en) | 2017-05-11 | 2025-11-04 | Seurat Technologies, Inc. | Solid state routing of patterned light for additive manufacturing optimization |
| EP3411170A4 (en) | 2016-01-28 | 2020-02-12 | Seurat Technologies, Inc. | SYSTEM AND METHOD FOR ADDITIVE MANUFACTURING AND SPATIAL HEAT TREATMENT |
| WO2017132668A1 (en) | 2016-01-29 | 2017-08-03 | Seurat Technologies, Inc. | Additive manufacturing, bond modifying system and method |
| RU2621365C1 (ru) * | 2016-08-22 | 2017-06-02 | Федеральное государственное бюджетное научное учреждение "Федеральный исследовательский центр Институт прикладной физики Российской академии наук" (ИПФ РАН) | Ячейка Поккельса для мощного лазерного излучения |
| US10718963B1 (en) | 2016-11-16 | 2020-07-21 | Electro-Optics Technology, Inc. | High power faraday isolators and rotators using potassium terbium fluoride crystals |
| KR102626294B1 (ko) | 2017-05-11 | 2024-01-17 | 쇠라 테크널러지스 인코포레이티드 | 적층 가공을 위한 패턴화된 광의 스위치야드 빔 라우팅 |
| GB201708315D0 (en) * | 2017-05-24 | 2017-07-05 | Science And Tech Facilities Council | Laser amplifer module |
| CN110799899B (zh) * | 2017-07-03 | 2024-04-23 | 伊雷克托科学工业股份有限公司 | 经光学接触的声光装置及其制造方法 |
| US10983372B2 (en) * | 2017-07-14 | 2021-04-20 | Redlen Technologies, Inc. | Fast-switching electro-optic modulators and method of making the same |
| WO2019046212A1 (en) | 2017-08-28 | 2019-03-07 | Lawrence Livermore National Security, Llc | GAS COOLED FARADAY ROTATOR AND METHOD |
| US10437082B2 (en) * | 2017-12-28 | 2019-10-08 | Tetravue, Inc. | Wide field of view electro-optic modulator and methods and systems of manufacturing and using same |
| WO2020123828A1 (en) | 2018-12-14 | 2020-06-18 | Seurat Technologies, Inc | Additive manufacturing system for object creation from powder using a high flux laser for two-dimensional printing |
| US11541481B2 (en) | 2018-12-19 | 2023-01-03 | Seurat Technologies, Inc. | Additive manufacturing system using a pulse modulated laser for two-dimensional printing |
| EP3783422B1 (en) * | 2019-08-16 | 2024-02-28 | Bme Messgeräte Entwicklung Kg | An optical system comprising a symmetric cooling arrangement for cooling an optical device |
| KR102853656B1 (ko) * | 2019-10-14 | 2025-09-01 | 에이에스엠엘 네델란즈 비.브이. | 광학 변조기 |
| JP2021165814A (ja) * | 2020-04-08 | 2021-10-14 | 三菱重工業株式会社 | レーザ加工装置 |
| US12162074B2 (en) | 2020-11-25 | 2024-12-10 | Lawrence Livermore National Security, Llc | System and method for large-area pulsed laser melting of metallic powder in a laser powder bed fusion application |
| CN113031315B (zh) * | 2021-04-28 | 2022-06-24 | 青岛海泰光电技术有限公司 | 晶体电光开关及其制作方法 |
| EP4479799A4 (en) * | 2022-02-18 | 2025-06-18 | Gentex Corporation | Improved electro-optic element electrode |
| CN116435857B (zh) * | 2023-04-04 | 2025-07-25 | 中国工程物理研究院激光聚变研究中心 | 一种光束偏振可控装置、热退偏补偿系统及使用方法 |
| US20250258397A1 (en) * | 2024-02-12 | 2025-08-14 | Ii-Vi Delaware, Inc. | Passive interference reduction in pockels cells |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS607766B2 (ja) * | 1977-09-24 | 1985-02-27 | 住友電気工業株式会社 | 画像変換素子 |
| US4229079A (en) * | 1978-07-20 | 1980-10-21 | United Technologies Corporation | Electro-optic modulator with improved acousto-optic suppression, heat transfer and mechanical support |
| DE2903838C2 (de) * | 1979-02-01 | 1986-01-23 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Elektrooptisches Lichtmodulationselement |
| US4615588A (en) * | 1984-10-19 | 1986-10-07 | The United States Of America As Represented By The United States Department Of Energy | Transparent electrode for optical switch |
| JP3144270B2 (ja) * | 1995-06-21 | 2001-03-12 | 富士ゼロックス株式会社 | 光偏向素子 |
| US6016023A (en) * | 1998-05-12 | 2000-01-18 | Ultra Sonus Ab | Tubular ultrasonic transducer |
| JP2003177370A (ja) * | 2001-12-12 | 2003-06-27 | Nippon Hoso Kyokai <Nhk> | 画像変換素子およびその製造方法 |
| SG115590A1 (en) * | 2002-11-27 | 2005-10-28 | Asml Netherlands Bv | Lithographic projection apparatus and device manufacturing method |
| US20060011326A1 (en) * | 2004-07-15 | 2006-01-19 | Yassour Yuval | Heat-exchanger device and cooling system |
| US7531239B2 (en) * | 2005-04-06 | 2009-05-12 | Eclipse Energy Systems Inc | Transparent electrode |
| NL1036407A1 (nl) * | 2008-01-23 | 2009-07-27 | Asml Netherlands Bv | Polarization control apparatus and method. |
| US8131124B2 (en) * | 2008-04-22 | 2012-03-06 | Jamshid Nayyer | Optical guided mode spatial switches and their fabrication |
| GB0821670D0 (en) * | 2008-11-28 | 2008-12-31 | Durham Scient Crystals Ltd | Laser modulator |
-
2010
- 2010-10-27 US US12/913,651 patent/US8514475B2/en active Active
-
2011
- 2011-10-21 EP EP19167877.0A patent/EP3528039B1/en active Active
- 2011-10-21 RU RU2013124063/28A patent/RU2013124063A/ru not_active Application Discontinuation
- 2011-10-21 WO PCT/US2011/057383 patent/WO2012058123A2/en not_active Ceased
- 2011-10-21 EP EP11836901.6A patent/EP2633362B1/en active Active
- 2011-10-21 KR KR1020137013504A patent/KR20130132455A/ko not_active Withdrawn
- 2011-10-21 CA CA2815068A patent/CA2815068A1/en not_active Abandoned
- 2011-10-21 JP JP2013536687A patent/JP6071889B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US8514475B2 (en) | 2013-08-20 |
| RU2013124063A (ru) | 2014-12-10 |
| EP3528039A1 (en) | 2019-08-21 |
| JP2013545135A (ja) | 2013-12-19 |
| WO2012058123A2 (en) | 2012-05-03 |
| JP6071889B2 (ja) | 2017-02-01 |
| EP2633362A2 (en) | 2013-09-04 |
| CA2815068A1 (en) | 2012-05-03 |
| EP3528039B1 (en) | 2021-12-15 |
| EP2633362A4 (en) | 2014-03-19 |
| WO2012058123A3 (en) | 2012-06-14 |
| US20120105931A1 (en) | 2012-05-03 |
| EP2633362B1 (en) | 2019-05-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR20130132455A (ko) | 갭-결합 전극을 갖는 전기 광학 소자 | |
| US10367324B2 (en) | Laser component | |
| US11221535B2 (en) | Moisture resistant electrochromic device | |
| US8810758B2 (en) | Dual-function alignment layer for liquid crystal devices to improve degradation resistance to radiation | |
| JP3212931B2 (ja) | 波長変換方法及び波長変換素子 | |
| Scrymgeour et al. | Cascaded electro-optic scanning of laser light over large angles using domain microengineered ferroelectrics | |
| EP1198733B1 (en) | Cooling of nonlinear optical devices | |
| US4270847A (en) | Electro-optical light modulation element | |
| US6859467B2 (en) | Electro-optic modulator material | |
| Hutchings et al. | Theory of optical bistability in metal mirrored Fabry-Perot cavities containing thermo-optic materials | |
| JP5158319B2 (ja) | 波長変換素子、レーザ装置、画像形成装置及び表示装置 | |
| WO2019169140A1 (en) | Optical components having hybrid nano-textured anti-reflective coatings and methods of manufacture | |
| EP3676657B1 (en) | Gas cooled faraday rotator and method | |
| JP4184706B2 (ja) | 反射防止膜の製造方法 | |
| JP5883764B2 (ja) | 光学装置 | |
| Tatsumi et al. | Planar electro-optic deflector using KTa1− xNbxO3 for low-power-consumption operation | |
| Imai et al. | Performance of varifocal lenses using KTa1− xNbxO3 crystals with response times faster than 2 μs | |
| WO2020110981A1 (ja) | 液晶光学素子およびその製造方法 | |
| RU2621365C1 (ru) | Ячейка Поккельса для мощного лазерного излучения | |
| WO2024084050A1 (en) | Optical switching device | |
| JP4269836B2 (ja) | 液晶素子および光ヘッド装置 | |
| CN116859643A (zh) | 空间光调制器及其制备方法 | |
| WO2023101704A1 (en) | Spatially homogeneous nonlinear spectral broadening | |
| JP2018189880A (ja) | 偏光部材及び光アイソレータ | |
| Balenko et al. | Switching of lasing wavelength in a sol—gel laserwith dynamic distributed feedback |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0105 | International application |
Patent event date: 20130527 Patent event code: PA01051R01D Comment text: International Patent Application |
|
| PG1501 | Laying open of application | ||
| PC1203 | Withdrawal of no request for examination | ||
| WITN | Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid |