KR20130118585A - Floting roller apparatus for transfering glass substrate - Google Patents

Floting roller apparatus for transfering glass substrate Download PDF

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Publication number
KR20130118585A
KR20130118585A KR1020120041559A KR20120041559A KR20130118585A KR 20130118585 A KR20130118585 A KR 20130118585A KR 1020120041559 A KR1020120041559 A KR 1020120041559A KR 20120041559 A KR20120041559 A KR 20120041559A KR 20130118585 A KR20130118585 A KR 20130118585A
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KR
South Korea
Prior art keywords
glass substrate
guide
transfer
chamber
transfer unit
Prior art date
Application number
KR1020120041559A
Other languages
Korean (ko)
Inventor
정진황
조재현
Original Assignee
주식회사 아츠
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 아츠 filed Critical 주식회사 아츠
Priority to KR1020120041559A priority Critical patent/KR20130118585A/en
Publication of KR20130118585A publication Critical patent/KR20130118585A/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G39/00—Rollers, e.g. drive rollers, or arrangements thereof incorporated in roller-ways or other types of mechanical conveyors 
    • B65G39/02—Adaptations of individual rollers and supports therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The present invention provides a glass substrate loaded into an inside of a chamber or a transfer unit installed inside of a chamber to transfer a tray on which a glass substrate is seated; A guide unit for guiding the transfer unit to move in the width direction perpendicular to the transfer direction of the glass substrate; And a spring providing a resilient force to the conveying unit so that the conveying unit is guided by the guide part to return to the win position.
According to the present invention, even if deformation occurs in the chamber by the vacuum pressure inside the chamber, to minimize the deformation applied to the transfer unit installed in the chamber in order to transfer the glass substrate or the tray on which the glass substrate is placed, the transfer unit is deformed In addition, it is possible to stably transport the glass substrate or the tray on which the glass substrate is placed, while preventing damage.

Description

Floating roller apparatus for transfering glass substrate

The present invention relates to a floating roller device for transferring a glass substrate, and more particularly, a deformation applied to a transfer unit installed in a chamber in order to transfer a tray on which a glass substrate is placed even if deformation occurs in the chamber by an internal vacuum pressure. The present invention relates to a floating roller device for glass substrate transfer for minimizing.

In general, a flat panel display (FPD) refers to a flat thin display having a thickness of only a few centimeters and a few millimeters in a display and having a thickness of 1/4 or less of a screen diagonal length.

Such flat panel displays have advantages in terms of thinness, light weight, and low power consumption, and include liquid crystal display (LCD), plasma display panel (PDP), organic light emitting diode (OLED), field emission display (FED), and electronic paper ( Electronic Paper).

On the other hand, the glass substrate for use in the flat panel display during the flat panel display manufacturing process is transferred between the equipment and the equipment or in the equipment by a transfer device, for this purpose, a glass substrate or a tray on which the glass substrate is mounted on the roller or conveyor And so on.

In addition, the glass substrate transfer device can maintain the interior in a vacuum by the chamber, the chamber is deformed by the vacuum pressure inside, in this case the deformation in the transfer unit of the glass substrate or tray installed inside the chamber In addition, it is difficult to stably transfer the glass substrate or the tray due to this, and also has a problem of causing damage to the transfer unit.

In order to solve the conventional problems as described above, the present invention is applied to the transfer unit installed in the chamber to transfer the glass substrate or the tray on which the glass substrate is placed, even if deformation occurs in the chamber by the vacuum pressure inside the chamber. The purpose of the present invention is to minimize deformation, to prevent the transfer unit from being damaged by deformation, and to stably transfer the glass substrate or the tray on which the glass substrate is placed.

Other objects of the present invention will be readily understood through the following description of the embodiments.

In order to achieve the above object, according to an aspect of the present invention, a glass unit loaded into the inside of the chamber or a transfer unit is installed inside the chamber to transfer the tray is mounted glass substrate; A guide unit for guiding the transfer unit to move in a width direction perpendicular to a transfer direction of a glass substrate; And a spring providing an elastic force to the transfer unit so that the transfer unit is guided by the guide unit to return to the win position.

The transfer unit is formed in a pair so as to be placed side by side along the transfer direction of the glass substrate on both sides in the chamber, the support member is provided with a plurality of rollers along the longitudinal direction for transporting the tray on which the glass substrate is seated Each of the guide portion, the fixing member fixed in the chamber; And a plurality of first guide modules installed at the side portions of the fixing member and the supporting member, guiding the width direction movement of the supporting member, and the springs respectively installed.

The conveying unit may include: a conveying drive shaft installed to be rotatable in parallel with the support member to transmit rotational force to each of the rollers by connecting the shafts of the rollers to bevel gears; A rotating shaft connected to the transfer driving shaft with a bevel gear; And a transfer motor installed outside the chamber to rotate the rotary shaft.

The guide part may further include a second guide module which is installed at both ends of the fixing member and the support member, guides the longitudinal movement of the support member, and the springs are respectively installed.

The first and second guide module, the guide plate is provided to face each other on the support member and the fixing member; Guide bolts slidably coupled to both sides of the guide plates, respectively; A fixing nut which is screwed to both ends of the guide bolt to suppress the separation of the guide plate from the guide bolt; And mounting protrusions respectively provided on opposite surfaces of the guide plate, and fitted to both ends of the spring to mount the spring to provide elastic force between the guide plates.

The fixing member may include a pair of fixing plates fixed in the chamber to be positioned below each of the supporting members; And it may include a reinforcement connecting portion provided in plurality to connect the fixing plate to each other.

According to the floating roller apparatus for glass substrate transfer according to the present invention, even if the deformation occurs in the chamber by the vacuum pressure inside the chamber, the deformation is applied to the transfer unit installed in the chamber to transfer the tray on which the glass substrate or the glass substrate is placed. In order to minimize the damage, this prevents the transfer unit from being damaged due to deformation, and also stably transfers the glass substrate or the tray on which the glass substrate is placed.

1 is a perspective view showing a floating roller device for glass substrate transfer according to an embodiment of the present invention,
2 is a plan view showing a floating roller device for glass substrate transfer according to an embodiment of the present invention,
3 is a cross-sectional view taken along line AA of FIG. 2,
4 is a plan view showing a portion of FIG. 3;
5 is a perspective view illustrating a second guide module of the floating roller apparatus for glass substrate transfer according to an embodiment of the present invention.

While the invention is susceptible to various modifications and alternative forms, specific embodiments thereof are shown by way of example in the drawings and will herein be described in detail. It is to be understood, however, that the invention is not to be limited to the specific embodiments, but is to be understood to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention, And the scope of the present invention is not limited to the following examples.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings, wherein like or corresponding elements are denoted by the same reference numerals, and redundant explanations thereof will be omitted.

1 is a perspective view illustrating a glass substrate conveying floating roller apparatus according to an embodiment of the present invention, Figure 2 is a plan view showing a glass substrate conveying floating roller apparatus according to an embodiment of the present invention.

As shown in Figure 1 and 2, the glass substrate conveying floating roller device 10 according to an embodiment of the present invention includes a conveying unit 100, a guide portion 200, a spring 300 do.

The transfer unit 100 is installed inside the chamber 300 to transfer the glass substrate loaded into the chamber 20 or the tray on which the glass substrate is seated. The conveying unit 100 may use a conveyor means or a roller conveying means to directly convey the glass substrate, and a roller conveying means may be used to convey the tray on which the glass substrate is seated as in this embodiment. Here, the tray plays a role of mediating the transfer of the glass substrate, and may have various structures and shapes for safe transfer of the glass substrate, including a plate structure or the like in which a glass substrate is placed thereon.

The transfer unit 100 is formed in a pair so as to be placed side by side along the transfer direction of the glass substrate on both sides in the chamber 20, and the roller 120 for transferring the tray on which the glass substrate is seated is transferred in the glass substrate. Along the support member 110 may be provided in plurality. Here, the roller 120 may be rotatably installed in the housing 122 of the shaft is installed in the support member 110 via a bearing or the like.

In addition, in addition to the support member 110 and the roller 120, the transfer unit 100 is connected to each of the shafts (not shown) of the roller 120 by bevel gears 131 and 132 (shown in FIG. 4), thereby providing rotational force to the roller 120. ) A transmission drive shaft 130 installed to be rotated in parallel with the support member 110 so as to be transmitted to each other, a rotation shaft 140 connected to the transport driving shaft 130 by bevel gears 141 and 142, and a rotation shaft 140. It may further include a transfer motor 150 is installed on the outside of the chamber 20 to rotate the. Here, the axis of each of the feed drive shaft 130 and the roller 120 is perpendicular to each other, and to transmit the rotational force of the feed drive shaft 130 to the roller 120 by the bevel gears (131, 132; shown in Figure 4).

The guide part 200 guides the transfer unit 100 to move in the width direction perpendicular to the transfer direction of the glass substrate. For example, the guide member 200 and the fixed member 210 are fixed in the chamber 20. And a plurality of first guide modules 220 installed on the side portions of the support member 110, guide the width direction movement of the support member 110, and springs 300 are respectively installed.

The fixing member 210 includes a pair of fixing plates 211 fixed in the chamber 20 so as to be positioned below each of the supporting members 110, and a reinforcing connection part 212 provided in plurality to connect the fixing plates 211 to each other. ) May be included.

As shown in FIGS. 3 and 4, the first guide module 220 includes a pair of guide plates 221 and guide plates respectively provided to face the support member 110 and the fixing member 210. Guide bolts 222 slidably coupled to both sides of the 221, respectively, and the fixing nuts for inhibiting the separation of the guide plate 221 from the guide bolt 222 by screwing to both ends of the guide bolt 222 ( 223 and the mounting protrusions respectively provided on opposite surfaces of the guide plate 221 and fitted to both ends of the spring 300 so that the spring 300 is mounted to provide elastic force between the guide plates 221. 224. Here, the guide plate 221 is formed to be perpendicular to each of the fixing member 210 and the support member 110 are positioned to face each other. In addition, the guide bolts 222 may be made of, for example, computer bolts, or may be made of bolts having male threads formed at both ends thereof, and may be made of four as in the present embodiment.

The guide part 200 is installed at both ends of the fixing member 210 and the supporting member 110, and guides the longitudinal movement of the supporting member 110, and the second guide module having the springs 300 installed therein, respectively. 230 may be further included.

As shown in FIG. 5, the second guide module 230 may have the same configuration as that of the first guide module 220. The second guide module 230 may have the same configuration as that of the support member 110. A pair of guide plates 231 provided to face each other on the fixing member 210, guide bolts 232 slidably coupled to both sides of the guide plates 231, and guide bolts 232, respectively. Fixing nuts 233 for suppressing detachment of the guide plate 231 from the guide bolts 232 by screwing to both ends and the guide plates 231 are respectively provided on opposite sides of the guide plate 231, and are provided at both ends of the spring 300. Each of the springs 300 may include mounting protrusions (not shown) mounted to provide elastic force between the guide plates 231.

The spring 300 provides an elastic force to the transfer unit 100 so that the transfer unit 100 is guided by the guide unit 200 to return to the win position, and is formed of a compression spring installed in the guide unit 200, for example. In the present embodiment, the guide plate 221 of the first guide module 220 and the guide plate 231 of the second guide module 230 are respectively installed in the width direction and length in the transfer unit 100 as in the present embodiment. To provide an elastic force in each direction.

The operation of the glass substrate transfer floating roller device according to the present invention will be described.

Even when deformation occurs in the chamber 20 due to the vacuum pressure inside the chamber 20, the deformation applied to the transfer unit 100 installed in the chamber 20 is minimized to transfer the glass substrate or the tray on which the glass substrate is placed. Do it. That is, as in the present embodiment, the transfer unit 100 for transferring the tray on which the glass substrate is placed may be changed in the width direction by the first guide module 220 and the second guide module 230 may be used. Position can be changed in the longitudinal direction by the spring, and an elastic force is applied to the transfer unit 100 in the longitudinal direction and the width direction by the spring 300, respectively. Therefore, even if the force applied by the deformation of the chamber 20 is transmitted to the transfer unit 100, not only the position change of the transfer unit 100 is possible, but also the return to the original position is possible.

Therefore, while preventing deformation and damage of the transfer unit 100 due to the deformation of the chamber 20, thereby to stably transfer the tray on which the glass substrate or the glass substrate is placed.

Although the present invention has been described with reference to the accompanying drawings, it is to be understood that various changes and modifications may be made without departing from the spirit of the invention. Therefore, the scope of the present invention should not be limited to the described embodiments, but should be determined by the equivalents of the claims, as well as the following claims.

20: chamber 100: transfer unit
110: support member 120: roller
122: housing 130: feed drive shaft
131,132: bevel gear 140: rotation axis
141,142: Bevel gear 141 is a feed drive shaft
150: transfer motor 200: guide portion
210: fixing member 211: fixing plate
212: reinforcing connector 220: first guide module
221: guide plate 222: guide bolt
223: fixing nut 224: mounting projection
230: second guide module 231: guide plate
232: Guide bolt 233: Fixing nut
300: spring

Claims (6)

A transfer unit installed inside the chamber to transfer a glass substrate loaded into the chamber or a tray on which the glass substrate is mounted;
A guide unit for guiding the transfer unit to move in a width direction perpendicular to a transfer direction of a glass substrate; And
And a spring for providing an elastic force to the transfer unit so that the transfer unit is guided by the guide unit to return to the win position. The method of claim 1, wherein the transfer unit,
It is formed in a pair so as to be arranged side by side in the conveying direction of the glass substrate, respectively on both sides in the chamber, each having a supporting member provided with a plurality of rollers along the longitudinal direction for transporting the tray on which the glass substrate is seated,
The guide unit,
A fixing member fixed in the chamber; And
Floating roller apparatus for glass substrate transfer comprising a plurality of first guide module is installed on the fixing member and the side of the support member, the first guide module to guide the width movement of the support member, the spring is installed, respectively . The method of claim 2, wherein the transfer unit,
A feed drive shaft which is rotatably installed side by side on the support member to transmit rotational force to each of the rollers by connecting the shafts of the rollers to bevel gears;
A rotating shaft connected to the transfer driving shaft with a bevel gear; And
And a transfer motor installed on the outside of the chamber to rotate the rotating shaft. The method of claim 2, wherein the guide portion,
Floating roller apparatus for glass substrate transfer further comprises a second guide module which is installed at both ends of the fixing member and the support member, guides longitudinal movement of the support member, and each spring is installed. . The method of claim 4, wherein the first and second guide module,
Guide plates provided on the support member and the fixing member to face each other;
Guide bolts slidably coupled to both sides of the guide plates, respectively;
A fixing nut which is screwed to both ends of the guide bolt to suppress the separation of the guide plate from the guide bolt; And
Floating glass substrate transfer, characterized in that provided on the opposite sides of the guide plate, each mounting end is fitted to each of the ends of the spring is mounted to provide an elastic force between the guide plate. Roller device. The method of claim 2, wherein the fixing member,
A pair of fixing plates fixed in the chamber to be positioned below each of the supporting members; And
And a reinforcing connection part provided in plural to connect the fixing plates to each other.
KR1020120041559A 2012-04-20 2012-04-20 Floting roller apparatus for transfering glass substrate KR20130118585A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020120041559A KR20130118585A (en) 2012-04-20 2012-04-20 Floting roller apparatus for transfering glass substrate

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Application Number Priority Date Filing Date Title
KR1020120041559A KR20130118585A (en) 2012-04-20 2012-04-20 Floting roller apparatus for transfering glass substrate

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105083844A (en) * 2014-05-08 2015-11-25 宁夏巨能机器人系统有限公司 Displacement mechanical arm
CN105883416A (en) * 2016-06-27 2016-08-24 渤海大学 Glass transportation device
CN108227253A (en) * 2018-01-25 2018-06-29 深圳市华星光电技术有限公司 Substrate guiding mechanism, base plate transfer device and wet equipment
CN109625970A (en) * 2019-01-23 2019-04-16 深圳市华星光电技术有限公司 Substrate handling robot

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105083844A (en) * 2014-05-08 2015-11-25 宁夏巨能机器人系统有限公司 Displacement mechanical arm
CN105083844B (en) * 2014-05-08 2017-07-21 宁夏巨能机器人系统有限公司 A kind of dislocation mechanical arm
CN105883416A (en) * 2016-06-27 2016-08-24 渤海大学 Glass transportation device
CN108227253A (en) * 2018-01-25 2018-06-29 深圳市华星光电技术有限公司 Substrate guiding mechanism, base plate transfer device and wet equipment
CN109625970A (en) * 2019-01-23 2019-04-16 深圳市华星光电技术有限公司 Substrate handling robot

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