KR20070097708A - Transferring apparatus for vacuum chamber - Google Patents

Abstract

A transferring apparatus for a vacuum chamber is provided to facilitate a transfer of the vacuum chamber at a high temperature and high vacuum state by securely coupling a driven gear with a driving gear. A transferring apparatus for a vacuum chamber includes a frame, rollers, driven gears(25), driving gears(27), and driving shafts(29). A pair of frames are arranged to be parallel to each other in the vacuum chamber. The rollers are rotatably implemented on the frame to support and transfer an object to be transferred. The driven gears are coupled with the rollers. The driving gears are gear-coupled with the driven gears. The driving shafts are implemented on the frame. The driving shaft is coupled with the frame such that the driving gear is moved in an axial direction. The driving gear includes an elastic material(31), which is arranged at an opposite side with respect to the driven gear on the driving shaft.

Description

Feeder for vacuum chamber {TRANSFERRING APPARATUS FOR VACUUM CHAMBER}

1 is a plan view of a transfer apparatus for a vacuum chamber according to an embodiment of the present invention.

FIG. 2 is a cross-sectional view taken along the line II-II of FIG. 1.

3 is a perspective view of a power transmission unit;

4 is a perspective view of a drive shaft of a power transmission unit;

5 is an exploded perspective view of a drive gear, an elastic member, and a snap ring of a power transmission unit;

6 is a cross-sectional view showing a state of movement of a drive gear and a driven gear during thermal expansion of the power transmission unit.

The present invention relates to a conveying apparatus for a vacuum chamber, and more particularly to a conveying apparatus for a vacuum chamber for smoothly conveying the object to be conveyed under a high temperature and high vacuum environment.

Generally, a vacuum chamber is used to produce the product under vacuum environment. For example, a vacuum chamber is used when using the vacuum deposition method. In-line equipment, such as vacuum deposition equipment, includes a transfer device for transferring the object to be transported in the vacuum chamber.

For example, the object to be transferred is a substrate of a flat panel display element such as a plasma display panel. Therefore, the transfer apparatus for the vacuum chamber is configured to transfer the substrate of the plasma display panel in the vacuum chamber.

In general, a plasma display panel displays an image using a gas discharge phenomenon, and has excellent display capability such as display capacity, brightness, contrast, afterimage, viewing angle, and the like.

The plasma display panel includes a discharge cell between the front substrate and the rear substrate, and is formed by filling a discharge gas into the discharge cells and encapsulating both substrates.

As an example of this plasma display panel, a three-electrode surface discharge plasma display panel includes display electrodes on the front substrate so as to correspond to discharge cells, and covers the display electrodes with a dielectric layer.

In order to protect this dielectric layer from gas discharge and to increase the secondary electron emission coefficient, a protective film, that is, an MgO film, for example, is formed in this dielectric layer.

As described above, the MgO film formed on the substrate can be formed by a vacuum deposition method. For this purpose, a vacuum chamber for forming a vacuum as described above and a transfer device for transferring the substrate in the vacuum chamber are used.

During vacuum deposition, the vacuum chamber maintains high temperature and high vacuum, thereby thermally expanding components of the power transmission part formed by the drive shaft and the gear and a combination thereof in the transfer apparatus.

In particular, as the parts of the power transmission portion are thermally expanded, the engagement play between the parts decreases, so that the joining of the parts is tightened more than necessary, and a biasing force is generated in a specific direction.

As a result, in a high temperature and high vacuum vacuum chamber, the transfer apparatus has a problem that it is difficult to transfer the substrate smoothly due to thermal expansion of the power transmission component.

The present invention is to solve the above problems, an object of the present invention to provide a conveying apparatus for a vacuum chamber for smoothly conveying the object to be transferred even when the thermal expansion of the power transmission parts in a high temperature high vacuum environment.

In one embodiment, a conveying apparatus for a vacuum chamber includes a frame installed in a pair in parallel with each other in a vacuum chamber, rollers rotatably installed on the frame to support and transport a conveyed object, and the rollers. Driven gears coupled to the driven gears, the drive gears coupled to the driven gears, and drive shafts mounted on the frame by mounting the drive gears, wherein the drive shafts transmit rotational power to the drive gears. Is coupled to move in the axial direction, the drive gear may include an elastic member provided on the opposite side of the driven gear on the drive shaft.

The driven gear and the drive gear may be formed of a bevel gear.

In addition, the transfer apparatus for the vacuum chamber of the present invention may include a coupling for connecting the drive shafts adjacent to each other among the drive shafts.

The drive shaft may include a spline portion coupled to the drive gear.

The driving shaft may include a first fixing groove to which a first stopper for supporting the opposite side of the driving gear of the elastic member is coupled.

The first stopper may be formed of a snap ring.

 The driving shaft may include a second fixing groove to which a second stopper for supporting the opposite side of the elastic member of the driving gear is coupled.

The frame may form a pair in a horizontal state to transfer the object to be transferred in a horizontal state.

The object to be transferred may be a substrate for a plasma display panel.

The elastic member may be formed of a compression coil spring.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art may easily implement the present invention. As those skilled in the art would realize, the described embodiments may be modified in various different ways, all without departing from the spirit or scope of the present invention. In the drawings, parts irrelevant to the description are omitted in order to clearly describe the present invention, and like reference numerals designate like elements throughout the specification.

1 is a plan view of a conveying apparatus for a vacuum chamber according to an embodiment of the present invention, Figure 2 is a cross-sectional view taken along the line II-II of FIG.

Referring to these drawings, the transfer apparatus of the present embodiment is provided in the vacuum chamber 100 and is configured to transfer the object to be transferred 10 in the vacuum chamber 100. For convenience, the outline of the vacuum chamber 100 is omitted in the drawing. Therefore, the space provided with the conveying apparatus of the present embodiment is referred to as a vacuum chamber 100.

This conveying apparatus conveys the object to be conveyed under the environment of high temperature and high vacuum, and it is more severe than normal to convey the object to be conveyed under the environment of normal temperature and atmospheric pressure. Put it in the environment.

Therefore, in spite of the high temperature and high vacuum, the components of the conveying apparatus cause thermal expansion, but the conveying apparatus of the present embodiment should be configured to smoothly convey the conveyed object 10.

In other words, the components constituting the power transmission unit must be combined in a structure that can maintain a proper clearance between each other, even during thermal expansion of the components.

The object to be transported 10 is a substrate of a flat panel display device which undergoes many processes in a high temperature and high vacuum environment, and for example, a substrate of a plasma display panel.

The conveying apparatus of the present embodiment includes a frame 21, rollers 23, driven gears 25, drive gears 27 and a drive shaft 29. Here, the driven gears 25, the drive gears 27 and the drive shaft 29 form the main part of the power transmission part P in the transfer apparatus (see Fig. 3).

The frame 21 forms the basis of the conveying apparatus, and may be configured in various structures and shapes according to the formation of the conveyed body 10 and the power transmission units P. FIG.

Referring to FIG. 1, the frame 21 is provided in a pair in parallel with each other in the vacuum chamber 100, and is provided long along the traveling direction PD of the object to be transported 10. That is, the frame 21 is disposed on both sides of the object to be transported so as to correspond to the width of the object to be conveyed 10 to form a corresponding structure. Hereinafter, one frame 21 will be described.

The rollers 23 are rotatably installed in the frame 21 via the rotating shaft 23a so as to transfer the object to be conveyed 10 on the frame 21. In other words, the rollers 23 are mounted on the rotating shaft 23a, and the rotating shaft 23a is supported by the frame 21 in a rotatable structure. The rollers 23 are substantially the part which supports the to-be-transported body 10. FIG. That is, the rollers 23 move the conveyed object 10 placed on the rollers 23 while rotating.

In addition, although the rollers 23 may support and transport the object 10 directly, the rollers 23 may support the object 10 using the tray 11. That is, the rollers 23 support the tray 11, and the tray 11 mounts the object to be conveyed 10 so that the rollers 23 convey the tray 11 so that the object to be conveyed 10 is transferred. Can be transferred (see Figure 2).

The driven gear 25 is connected to the opposite side of the roller 23 of the rotating shaft 23a, and transmits rotational power to the roller 23 together with the rotating shaft 23a.

The drive gear 27 is geared with the driven gear 25 to transmit rotational power to the driven gear 25. The drive gear 27 transmits power to the driven gear 25 installed in a direction perpendicular to its axial direction. To this end, the drive gear 27 and the driven gear 25 are formed of a bevel gear.

The drive shaft 29 is rotatably driven together with the drive gear 27 by mounting the drive gear 27, and is connected to a separate rotation means (for example, a motor) to be rotated and driven. In addition, the drive shaft 29 is installed in the frame 21 along the longitudinal direction of the frame 21. That is, the drive shaft 29 is installed in the conveying direction of the object to be conveyed 10.

The power transmission unit P causes thermal expansion in a high temperature and high vacuum environment, and in this case, the rotational power of the drive shaft 29 is driven by the drive gear 27, the driven gear 25, the rotation shaft 23a, and the roller 23. It is configured to transfer the object to be conveyed 10 by the transfer.

4 and 5, the drive shaft 29 includes a spline portion 29 coupled to the drive gear 27. Therefore, the drive gear 27 is formed in the structure corresponding to this spline part 29. As shown in FIG.

The drive shaft 29 and the drive gear 27 form a spline coupling structure as an example of a coupling structure that can rotate together. In addition, the drive shaft 29 and the drive gear 27 may be coupled to each other via a key (not shown).

The drive gear 27 is supported by the elastic member 31, so that it is possible to maintain the gear engagement with the driven gear 25 at all times. To this end, the elastic member 31 is provided on the opposite side of the driven gear 25 to apply a force for pushing the drive gear 27 toward the driven gear 25 on the drive shaft 29.

This elastic member 31 is formed by the compression coil spring as an example. In addition, the elastic member 31 may be formed of a leaf spring (not shown).

In addition, the drive shaft 29 includes a first fixing groove 29b and a second fixing groove 29c with the spline portion 29a therebetween. The first fixing groove 29b is formed at one side of the spline portion 29a at a position far from the driven gear 25, and the first stopper 32a is coupled to the first fixing groove 29b, and the first stopper ( 32 a) supports the opposite side of the drive gear 27 of the elastic member 31. The second fixing groove 29b is formed at one side of the spline portion 29a near the driven gear 25, and the second stopper 32b is coupled to the second fixing groove 29c, and the second stopper is coupled to the second fixing groove 29c. 32b supports the opposite side of the elastic member 31 of the drive gear 27.

The first stopper 32a defines the position of the elastic member 31 on the drive shaft 29, and the second stopper 32b defines the position of the drive gear 27 on the drive shaft 29. Therefore, the elastic member 31 does not retreat beyond the first stopper 32a and the drive gear 27 does not move forward beyond the second stopper 32b.

That is, even during thermal expansion, the drive gear 27 maintains a gear coupling structure with the driven gear 25 while being operated forward and backward on the spline portion 29a formed between the first and second stoppers 32a and 32b. .

The first stopper 32a and the second stopper 32b are formed of a snap ring, and are coupled to the first fixing groove 29b and the second fixing groove 29c, thereby minimizing the driving shaft 29 and driving shaft. It is possible to prevent the torsional stress drop of (29).

In addition, the drive shaft 29 is formed with a small diameter D1 on the side where the drive gear 27 is mounted so that the drive gear 27 can be mounted, and the opposite side thereof is formed with a large diameter D2 (Fig. 6). Reference).

In addition, a plurality of drive shafts 29 are provided along the longitudinal direction of the frame 21, and adjacent drive shafts 29 are connected to the coupling 34. This coupling 34 absorbs the increase in the axial length of the drive shaft 29 due to thermal expansion.

Meanwhile, referring to FIG. 6, in the high temperature and high vacuum environment of the vacuum chamber 100, the rotating shaft 23a and the driven gear 25 connected to the roller 23 due to thermal expansion are driven along the driving shaft 29 as the first arrow A1. ) And the drive gear 27.

Since the driven gear 25 and the drive gear 27 are geared to the inclined surface of the bevel gear, according to the movement A1 of the driven gear 25, the drive gear 27 is driven as shown by the second arrow A2. 29 is retracted toward the elastic member 31 on the spline portion 29a.

At this time, the elastic member 31 is supported by the first stopper 32a to maintain the coupling structure capable of transmitting power between the drive gear 27 and the driven gear 25 while applying an elastic force to the drive gear 27.

In addition, when the thermal expansion is reduced, the rotary shaft 23a and the driven gear 25 connected to the roller 23 move away from the drive shaft 29 and the drive gear 27, that is, in a direction opposite to the first arrow A1. do.

In this case, the elastic member 31 is supported by the first stopper 32a and exerts an elastic force on the drive gear 27 while moving the drive gear 27 closer to the driven gear 25 on the spline portion 29a. 2, the arrow A2 is pushed in the opposite direction to maintain the drive gear 27 and the driven gear 25 in a coupling structure capable of transmitting power.

When the driving gear 27 moves on the spline portion 29a as described above, the elastic member 31 applies a force applied to the driving gear 27 so as to reduce the gear engagement between the driving gear 27 and the driven gear 27. It makes it possible to transmit the rotational power while maintaining it properly.

In addition, as described above, the frame 21 for transferring the object to be conveyed 10 is formed in a pair in a horizontal state as shown to convey the object to be conveyed 10 in a horizontal state.

In addition, the frames may be formed in pairs in the vertical direction to transfer the object to be transferred in a vertical state (not shown). This vertical frame enables transfer while effectively preventing sagging of large substrates.

Although the preferred embodiments of the present invention have been described above, the present invention is not limited thereto, and various modifications and changes can be made within the scope of the claims and the detailed description of the invention and the accompanying drawings. Naturally, it belongs to the scope of the invention.

As described above, according to the transfer apparatus for a vacuum chamber according to the present invention, the driven gear is connected to a roller for transferring the driven object, the drive gear is coupled to the driven gear, and the driven gear can be moved in the axial direction to the drive shaft. And the driven gear is supported by the elastic member on the opposite side to be coupled to the driven gear so that the driving gear is in a state where the driving gear pushes back the elastic member and retracts the gear during the thermal expansion in the vacuum chamber. As a result, there is an effect of smoothly transferring the object to be conveyed even under an environment of high temperature and high vacuum.

Claims (10)

A frame installed in a pair in parallel with each other in the vacuum chamber; Rollers rotatably installed on the frame to support and transport the object to be transferred; Driven gears connected to the rollers; Drive gears geared to the driven gear; And A drive shaft mounted on the frame by mounting the drive gear; The drive shaft, Coupled to move the drive gear in the axial direction while transmitting rotational power to the drive gear, The drive gear is, Transfer device for a vacuum chamber including an elastic member provided on the drive shaft on the opposite side of the driven gear. According to claim 1, The driven gear and the drive gear is a transfer device for a vacuum chamber formed by a bevel gear. According to claim 1, And a coupling for connecting the drive shafts adjacent to each other among the drive shafts. According to claim 1, The drive shaft is a transport apparatus for a vacuum chamber including a spline coupled to the drive gear. According to claim 1, And the drive shaft includes a first fixing groove to which a first stopper for supporting the opposite side of the drive gear of the elastic member is coupled. The method of claim 5, The first stopper is a transfer device for a vacuum chamber formed by a snap ring. According to claim 1,  And the drive shaft includes a second fixing groove to which a second stopper for supporting the opposite side of the elastic member of the drive gear is coupled. According to claim 1, And the frame forms a pair in a horizontal state to convey the object to be transferred in a horizontal state. The method of claim 8, The conveyed body is a substrate for a vacuum chamber which is a substrate for a plasma display panel. According to claim 1, The elastic member is a conveying device for a vacuum chamber formed by a compression coil spring.

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