CN108227253A - Substrate guiding mechanism, base plate transfer device and wet equipment - Google Patents

Substrate guiding mechanism, base plate transfer device and wet equipment Download PDF

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Publication number
CN108227253A
CN108227253A CN201810074472.XA CN201810074472A CN108227253A CN 108227253 A CN108227253 A CN 108227253A CN 201810074472 A CN201810074472 A CN 201810074472A CN 108227253 A CN108227253 A CN 108227253A
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CN
China
Prior art keywords
substrate
guide wheel
guiding mechanism
fixed baffle
idler wheel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201810074472.XA
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Chinese (zh)
Inventor
熊坤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TCL China Star Optoelectronics Technology Co Ltd
Original Assignee
Shenzhen China Star Optoelectronics Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shenzhen China Star Optoelectronics Technology Co Ltd filed Critical Shenzhen China Star Optoelectronics Technology Co Ltd
Priority to CN201810074472.XA priority Critical patent/CN108227253A/en
Publication of CN108227253A publication Critical patent/CN108227253A/en
Pending legal-status Critical Current

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Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs

Abstract

The present invention provides a kind of substrate guiding mechanism, base plate transfer device and wet equipment.The substrate guiding mechanism of the present invention includes the adjusting side guide wheel of substrate both sides being relatively arranged in transmission and fixed edge guide wheel, wherein, the adjusting side guide wheel and fixed edge guide wheel respectively include the first idler wheel of moveable position and the second idler wheel with fixed position, the adjusting side guide wheel is deviated as regulating part for correcting substrate position, and substrate fragmentation will not be led to, position offset when the fixed edge guide wheel is moved as fixing piece for control base board, so as to which existing wet equipment is avoided to lead to substrate fragmentation due to side idler positions set difference, equipment is delayed, and machine etc. is abnormal to be occurred.

Description

Substrate guiding mechanism, base plate transfer device and wet equipment
Technical field
The present invention relates to liquid crystal display manufacture technology field more particularly to a kind of substrate guiding mechanism, transporting substrates, devices It puts and wet equipment.
Background technology
With the development of display technology, the planes such as liquid crystal display (Liquid Crystal Display, LCD) display dress It puts because having many advantages, such as that high image quality, power saving, fuselage is thin and has a wide range of application, and is widely used in mobile phone, TV, a number The various consumer electrical products such as word assistant, digital camera, laptop, desktop computer, become the master in display device Stream.
Liquid crystal display device on existing market is largely backlight liquid crystal display, including liquid crystal display panel and Backlight module (backlight module).The operation principle of liquid crystal display panel is put in the parallel glass substrate of two panels Liquid crystal molecule is put, two panels glass substrate centre is there are many tiny electric wire vertically and horizontally, by controlling liquid crystal whether energization The light of backlight module is reflected generation picture by molecular changes direction.
Usual liquid crystal display panel is by color film (CF, Color Filter) substrate, thin film transistor (TFT) (TFT, Thin Film Transistor) substrate, the liquid crystal (LC, Liquid Crystal) that is sandwiched between color membrane substrates and thin film transistor base plate and close Sealing frame (Sealant) forms, and moulding process can be divided into three big flows, making of the first segment for array substrate and color membrane substrates Technique, second segment for orientation, liquid crystal filling with panel sealing technique, third Duan Zewei polaroids, backlight, driving IC pressing and The integrated process of printed circuit board.Wherein, comprising multiple cleanings, exposure, aobvious in array substrate and the manufacture craft of color membrane substrates The step of shadow, needs to use the wet equipments such as cleaning machine, developing machine.The wet equipments such as cleaning machine, developing machine can all set base Substrate transfer device, it is common, base plate transfer device include carrying platform and the transmission mechanism that is connected on the carrying platform and Guiding mechanism, wherein the guiding mechanism includes the side guide wheel for being respectively arranged at substrate travel both sides, the transmission to substrate Direction carries out limiting correction.
As shown in Figure 1, in existing guiding mechanism, the side of substrate 200 transmitted is applied per one side guide wheel 101 Active force is all rigid.Therefore, before substrate 200 is transmitted, need first to set substrate 200 in transmit process its side with Spacing (spacing is usually 1mm) between side guide wheel 101, after setting, the guide wheel at the position of guide wheel 101 and every group Spacing between 101 is all fixed, if there are deviations for the position setting of side guide wheel 101, then just easily lead to as in Fig. 1 What circle was indicated, is there is substrate 200 and breaks angle, and then cause in transmit process by the extruding of side guide wheel 101 in substrate 200 Delay machine, substrate 200 of equipment is scrapped.
Invention content
The purpose of the present invention is to provide a kind of substrate guiding mechanism, including multigroup adjusting side guide wheel being oppositely arranged and admittedly Deckle guide wheel can avoid existing wet equipment from causing substrate fragmentation, equipment machine etc. of delaying different due to side idler positions set difference Often occur.
The present invention also aims to provide a kind of base plate transfer device, including above-mentioned substrate guiding mechanism, can keep away Exempt from existing wet equipment because side idler positions set difference due to cause substrate fragmentation, equipment delay machine etc. extremely occur.
The purpose of the present invention is to provide a kind of wet equipment, including above-mentioned base plate transfer device, can avoid existing again There is wet equipment that substrate fragmentation, equipment is caused to delay machine etc. extremely due to side idler positions set difference.
To achieve the above object, the present invention provides a kind of substrate guiding mechanism, is led including multigroup adjusting side being oppositely arranged Wheel and fixed edge guide wheel, the adjusting side guide wheel and fixed edge guide wheel are set to the substrate both sides in transmission, for substrate Direction of transfer carries out limiting correction;
Wherein, the side guide wheel that adjusts includes the first idler wheel of moveable position, drives first idler wheel in substrate one Side carries out mobile telescopic elastic component;
The fixed edge guide wheel includes the second idler wheel being correspondingly arranged with first idler wheel with fixed position.
First idler wheel is moved on the line direction of the second idler wheel corresponding thereto.
The adjusting side guide wheel further includes preceding fixed baffle, rear fixed baffle, clutch shaft bearing and the first bottom plate;Described One bearing is L-type bearing;
Wherein, the preceding fixed baffle and rear fixed baffle are vertically installed in from the near to the distant in the first idler wheel side On first bottom plate, the elastic component is set between the preceding fixed baffle and rear fixed baffle, described clutch shaft bearing one end It is stretched into the preceding fixed baffle and rear fixed baffle across the preceding fixed baffle and connects the elastic component, the other end is inserted in In first idler wheel.
The adjusting side guide wheel further includes screw rod, and the rear fixed baffle is equipped with the screw thread being adapted with the screw rod and leads to Hole, one end of the screw rod are screwed in by the tapped through hole between the preceding fixed baffle and rear fixed baffle and described in connection Elastic component, so as to screw in the length between the preceding fixed baffle and rear fixed baffle by adjusting screw rod and then the adjusting bullet Property part it is flexible when dynamics.
The side guide wheel that adjusts further includes sleeve between the preceding fixed baffle and rear fixed baffle and set on institute Casing before stating in fixed baffle, elastic component telescopic moving in the sleeve, the clutch shaft bearing only exist in casing One rectilinear direction telescopic moving;
The shape of the sleeve and casing is linear type.
The elastic component is spring.
First bottom plate is equipped with multiple connecting holes, and the adjusting side guide wheel by first bottom plate install solid It is fixed.
The fixed edge guide wheel further includes second bearing and the second bottom plate;The second bearing is held for straight profile shaft;
Wherein described second roller housing is set in the second bearing, and is vertically connected at by the second bearing described On second bottom plate.
The present invention also provides a kind of base plate transfer device, including being used for the carrying platform of bearing substrate, being carried for transmission substrate Transmission mechanism and the upper substrate guiding mechanism for power.
The present invention also provides a kind of wet equipment, including base plate transfer device as described above.
Beneficial effects of the present invention:The substrate guiding mechanism of the present invention, including the substrate both sides being relatively arranged in transmission Adjusting side guide wheel and fixed edge guide wheel, wherein, it is described adjusting side guide wheel and fixed edge guide wheel respectively include moveable position First idler wheel and the second idler wheel with fixed position, the adjusting side guide wheel are inclined for correcting substrate position as regulating part It moves, and substrate fragmentation will not be caused, the position offset when fixed edge guide wheel is moved as fixing piece for control base board, from And can avoid existing wet equipment because side idler positions set difference due to cause substrate fragmentation, equipment delay machine etc. extremely occur. The base plate transfer device of the present invention, including above-mentioned substrate guiding mechanism, can avoid existing wet equipment because of side idler positions Setting difference and cause substrate fragmentation, equipment delay machine etc. extremely occur.The wet equipment of the present invention is transmitted including above-mentioned substrate Device, can avoid existing wet equipment because side idler positions set difference due to cause substrate fragmentation, equipment delay machine etc. extremely send out It is raw.
For further understanding of the features and technical contents of the present invention, it please refers to below in connection with the detailed of the present invention Illustrate and attached drawing, however, the drawings only provide reference and explanation, is not intended to limit the present invention.
Description of the drawings
Below in conjunction with the accompanying drawings, it is described in detail by the specific embodiment to the present invention, technical scheme of the present invention will be made And other beneficial effects are apparent.
In attached drawing,
Fig. 1 be in existing wet equipment because while idler positions set difference cause substrate by while guide wheel squeeze due to occur it is abnormal Schematic diagram;
Fig. 2 is the schematic side view that side guide wheel is adjusted in substrate guiding mechanism of the present invention;
Fig. 3 is the schematic top plan view that side guide wheel is adjusted in substrate guiding mechanism of the present invention;
Fig. 4 is the schematic side view of fixed edge guide wheel in substrate guiding mechanism of the present invention;
Fig. 5 is the schematic top plan view of fixed edge guide wheel in substrate guiding mechanism of the present invention;
Fig. 6 is that the schematic diagram for adjusting side guide wheel is knocked using the substrate transmitted during substrate guiding mechanism of the present invention;
Fig. 7 passes through the schematic diagram of substrate guiding mechanism for the substrate in Fig. 6;
Fig. 8 is the schematic diagram that fixed edge guide wheel is knocked using the substrate transmitted during substrate guiding mechanism of the present invention;
Fig. 9 passes through the schematic diagram of substrate guiding mechanism for the substrate in Fig. 8.
Specific embodiment
The technological means and its effect taken further to illustrate the present invention, below in conjunction with the preferred implementation of the present invention Example and its attached drawing are described in detail.
Present invention firstly provides a kind of substrate guiding mechanism, including multigroup adjusting side guide wheel 11 and fixed edge being oppositely arranged Guide wheel 12, the adjusting side guide wheel 11 and fixed edge guide wheel 12 are set to the both sides of the substrate 90 in transmission, for substrate 90 Direction of transfer carry out limiting correction.
Wherein, as Figure 2-3, first idler wheel 111 for adjusting side guide wheel 11 including moveable position, drive described in First idler wheel 111 carries out mobile telescopic elastic component 112 in 90 side of substrate, and the adjusting side guide wheel 11 is as adjusting Part for correcting the position offset of substrate 90, and will not lead to 90 fragmentation of substrate.
As illustrated in figures 4-5, the fixed edge guide wheel 12 includes that there is the corresponding with first idler wheel 111 of fixed position to set The second idler wheel 121 put, fixed edge guide wheel 12 be regulating part, position offset when being moved for control base board 90.
Specifically, first idler wheel 111 is moved on the line direction of the second idler wheel 121 corresponding thereto.
Specifically, it is described adjusting side guide wheel 11 further include preceding fixed baffle 113, rear fixed baffle 114, clutch shaft bearing 115, First bottom plate 116 and screw rod 117;The clutch shaft bearing 115 is L-type bearing;
Wherein, the preceding fixed baffle 113 and rear fixed baffle 114 in 111 side of the first idler wheel from the near to the distant It is vertically installed on first bottom plate 116, the elastic component 112 is set on the preceding fixed baffle 113 and rear fixed baffle 114 Between, the preceding fixed baffle 113 and rear fixed gear are stretched into described 115 one end of clutch shaft bearing across the preceding fixed baffle 113 The elastic component 112 is connected between plate 114, the other end is inserted in first idler wheel 111, i.e., described first idler wheel 111 is arranged In on the clutch shaft bearing 115.
Fixed baffle 114 is equipped with the tapped through hole that is adapted with the screw rod 117 after described, and the one of the screw rod 117 End is screwed between the preceding fixed baffle 113 and rear fixed baffle 114 by the tapped through hole and connects the elastic component 112, so as to screw in the length between the preceding fixed baffle 113 and rear fixed baffle 114 by adjusting screw rod 117, push institute It states elastic component 112 fixed position of side is connect with adjusting screw rod 117 and changed, and then adjust the elastic component 112 and stretch Dynamics during contracting.
Specifically, the adjusting side guide wheel 11 is further included between the preceding fixed baffle 113 and rear fixed baffle 114 Sleeve 118, the elastic component 112 telescopic moving in the sleeve 118, so as to prevent elastic component 112 from being produced after being squeezed Life deviates from other active forces of horizontal direction and causes to come off, and controls elastic component 112 and then the first idler wheel 111 is controlled only to exist Moved back and forth in one rectilinear direction;The shape of the sleeve 118 is linear type.
Specifically, the adjusting side guide wheel 11 further includes the casing 120 in the preceding fixed baffle 113, and described the One bearing, 115 one end is stretched into the preceding fixed baffle 113 and rear fixed baffle 114 across described sleeve pipe 120 described in connection Elastic component 112 so that the clutch shaft bearing 115, only in a rectilinear direction telescopic moving, further makes in described sleeve pipe 120 The first idler wheel 111 is obtained only in a rectilinear direction to be moved back and forth;The shape of described sleeve pipe 120 is linear type.
Preferably, the elastic component 112 is spring.
Specifically, first bottom plate 116 is equipped with multiple connecting holes 119, and the adjusting side guide wheel 11 passes through described first Bottom plate 116 carries out installation fixation.
Specifically, the fixed edge guide wheel 12 further includes 125 and second bottom plate 126 of second bearing;Wherein, described second Idler wheel 121 is sheathed in the second bearing 125, and is vertically connected at second bottom plate 126 by the second bearing 125 On;The second bearing 125 is held for straight profile shaft.
Specifically, multiple connecting holes 119 also are provided on second bottom plate 126, the fixed edge guide wheel 12 is by described Second bottom plate 126 carries out installation fixation.
The substrate guiding mechanism of the present invention includes multigroup adjusting side guide wheel being oppositely arranged and fixed edge guide wheel, can avoid Existing wet equipment because side idler positions set difference or or when substrate position difference cause substrate fragmentation, equipment machine etc. of delaying abnormal Occur.
As shown in fig. 6, the substrate 90 transmitted during substrate guiding mechanism of the present invention is used, which knocks, adjusts side guide wheel When 11, the substrate 90 makes elastic component 112 and the directly to 111 1 lateral forces of the first idler wheel for adjusting side guide wheel 11 One idler wheel 111 is extruded, and 111 generation position of the first idler wheel is driven to change by elastic component 112, so as to as shown in fig. 7, making substrate 90 It passes through.
Or as shown in figure 8, the substrate 90 transmitted during substrate guiding mechanism of the present invention is used knocks fixed edge During guide wheel 12, the second idler wheel 121 of fixed edge guide wheel 12 can shift the thrust to the thrust of 90 1 extruding of substrate, substrate 90 Onto the first idler wheel 111,111 push the spring elastic component 112 of the first idler wheel generates displacement, so as to pass through substrate 90. During this, the first idler wheel 111 for generating displacement can be multiple.
Based on above-mentioned substrate guiding mechanism, the present invention also provides a kind of base plate transfer device (not shown), including being used for The carrying platform of bearing substrate 90 provides the transmission mechanism of power and substrate guiding mechanism as described above for transmission substrate 90, The particular technique feature of the substrate guiding mechanism is same as the previously described embodiments, and details are not described herein.
The base plate transfer device of the present invention, used substrate guiding mechanism include the substrate two being relatively arranged in transmission The adjusting side guide wheel of side and fixed edge guide wheel can avoid existing wet equipment from setting difference or or substrate position because of side idler positions Put difference and cause substrate fragmentation, equipment delay machine etc. extremely occur.
Based on above-mentioned substrate guiding mechanism, the present invention also provides a kind of wet equipment (not shown), including as described above Base plate transfer device, can avoid existing wet equipment because side idler positions set difference or or when substrate position difference lead to base Plate fragmentation, equipment are delayed, and machine etc. is abnormal to be occurred.
In conclusion the adjusting side that the substrate guiding mechanism of the present invention includes the substrate both sides being relatively arranged in transmission is led Wheel and fixed edge guide wheel, wherein, it is described adjust side guide wheel and fixed edge guide wheel respectively include moveable position the first idler wheel and The second idler wheel with fixed position, the adjusting side guide wheel is deviated as regulating part for correcting substrate position, and will not be led Cause substrate fragmentation, the position offset when fixed edge guide wheel is moved as fixing piece for control base board, so as to avoid Existing wet equipment because side idler positions set difference due to cause substrate fragmentation, equipment delay machine etc. extremely occur.The base of the present invention Substrate transfer device includes above-mentioned substrate guiding mechanism, and existing wet equipment can be avoided to be led due to side idler positions set difference Cause substrate fragmentation, equipment are delayed, and machine etc. is abnormal to be occurred.The wet equipment of the present invention includes above-mentioned base plate transfer device, can avoid Existing wet equipment because side idler positions set difference due to cause substrate fragmentation, equipment delay machine etc. extremely occur.
The above, for those of ordinary skill in the art, can according to the technique and scheme of the present invention and technology Other various corresponding changes and deformation are made in design, and all these changes and deformation should all belong to the claims in the present invention Protection domain.

Claims (10)

1. a kind of substrate guiding mechanism, which is characterized in that led including multigroup adjusting side guide wheel (11) being oppositely arranged and fixed edge Take turns (12), it is described adjust side guide wheel (11) and fixed edge guide wheel (12) be set to transmit in substrate (90) both sides, for pair The direction of transfer of substrate (90) carries out limiting correction;
Wherein, described adjusting first idler wheel (111) of side guide wheel (11) including moveable position, drive first idler wheel (111) mobile telescopic elastic component (112) is carried out in substrate (90) side;
The fixed edge guide wheel (12) is including having the second idler wheel being correspondingly arranged with first idler wheel (111) of fixed position (121)。
2. substrate guiding mechanism as described in claim 1, which is characterized in that first idler wheel (111) is corresponding thereto The second idler wheel (121) line direction on moved.
3. substrate guiding mechanism as described in claim 1, which is characterized in that the adjusting side guide wheel (11) further includes preceding fixation Baffle (113), rear fixed baffle (114), clutch shaft bearing (115) and the first bottom plate (116);The clutch shaft bearing (115) is L Profile shaft is held;
Wherein, the preceding fixed baffle (113) and rear fixed baffle (114) in the first idler wheel (111) side from the near to the distant Ground is vertically installed on first bottom plate (116), and the elastic component (112) is solid set on the preceding fixed baffle (113) and afterwards Between determining baffle (114), the preceding fixed gear is stretched into described clutch shaft bearing (115) one end across the preceding fixed baffle (113) The elastic component (112) is connected between plate (113) and rear fixed baffle (114), the other end is inserted in first idler wheel (111) It is interior.
4. substrate guiding mechanism as claimed in claim 3, which is characterized in that the adjusting side guide wheel (11) further includes screw rod (117), the rear fixed baffle (114) is equipped with the tapped through hole being adapted with the screw rod (117), the screw rod (117) One end pass through the tapped through hole and screw between the preceding fixed baffle (113) and rear fixed baffle (114) and described in connection Elastic component (112), so as to be screwed between the preceding fixed baffle (113) and rear fixed baffle (114) by adjusting screw rod (117) Length so that adjust the elastic component (112) it is flexible when dynamics.
5. substrate guiding mechanism as claimed in claim 3, which is characterized in that the adjusting side guide wheel (11) is further included set on institute State sleeve (118) between preceding fixed baffle (113) and rear fixed baffle (114) and in the preceding fixed baffle (113) Casing (120), the elastic component (112) is in the sleeve (118) interior telescopic moving, and the clutch shaft bearing (115) is in casing (120) only in a rectilinear direction telescopic moving in;
The shape of the sleeve (118) and casing (120) is linear type.
6. substrate guiding mechanism as described in claim 1, which is characterized in that the elastic component (112) is spring.
7. substrate guiding mechanism as claimed in claim 3, which is characterized in that first bottom plate (116) is equipped with multiple connections Hole (119), the adjusting side guide wheel (11) carry out installation fixation by first bottom plate (116).
8. substrate guiding mechanism as described in claim 1, which is characterized in that the fixed edge guide wheel (12) further includes the second axis Hold (125) and the second bottom plate (126);The second bearing (125) is held for straight profile shaft;
Wherein described second idler wheel (121) is sheathed in the second bearing (125), and is hung down by the second bearing (125) It is direct-connected to be connected on second bottom plate (126).
9. a kind of base plate transfer device, which is characterized in that including being used for the carrying platform of bearing substrate (90), to transmit substrate (90) transmission mechanism and the substrate guiding mechanism as described in any one of claim 1-8 for providing power.
10. a kind of wet equipment, which is characterized in that including base plate transfer device as claimed in claim 9.
CN201810074472.XA 2018-01-25 2018-01-25 Substrate guiding mechanism, base plate transfer device and wet equipment Pending CN108227253A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810074472.XA CN108227253A (en) 2018-01-25 2018-01-25 Substrate guiding mechanism, base plate transfer device and wet equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201810074472.XA CN108227253A (en) 2018-01-25 2018-01-25 Substrate guiding mechanism, base plate transfer device and wet equipment

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Publication Number Publication Date
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110793977A (en) * 2019-10-28 2020-02-14 芜湖东旭光电科技有限公司 Glass substrate contrast detection device
CN110937368A (en) * 2018-09-21 2020-03-31 北京铂阳顶荣光伏科技有限公司 Elastic guide wheel structure
CN112845474A (en) * 2021-01-04 2021-05-28 郑州旭飞光电科技有限公司 A guider and cleaning machine for base plate glass

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1569590A (en) * 2003-07-11 2005-01-26 友达光电股份有限公司 Transport mechanism and wet type processing device thereof
CN202097770U (en) * 2011-05-08 2012-01-04 西安鸿瑞光显部品有限公司 Positioning device for secondary die cutting
KR20130118585A (en) * 2012-04-20 2013-10-30 주식회사 아츠 Floting roller apparatus for transfering glass substrate
CN203558510U (en) * 2013-08-12 2014-04-23 陕西彩虹电子玻璃有限公司 Guiding device for conveying glass substrate
CN107364717A (en) * 2017-07-27 2017-11-21 武汉华星光电技术有限公司 Base plate transfer device and wet equipment

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1569590A (en) * 2003-07-11 2005-01-26 友达光电股份有限公司 Transport mechanism and wet type processing device thereof
CN202097770U (en) * 2011-05-08 2012-01-04 西安鸿瑞光显部品有限公司 Positioning device for secondary die cutting
KR20130118585A (en) * 2012-04-20 2013-10-30 주식회사 아츠 Floting roller apparatus for transfering glass substrate
CN203558510U (en) * 2013-08-12 2014-04-23 陕西彩虹电子玻璃有限公司 Guiding device for conveying glass substrate
CN107364717A (en) * 2017-07-27 2017-11-21 武汉华星光电技术有限公司 Base plate transfer device and wet equipment

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110937368A (en) * 2018-09-21 2020-03-31 北京铂阳顶荣光伏科技有限公司 Elastic guide wheel structure
CN110793977A (en) * 2019-10-28 2020-02-14 芜湖东旭光电科技有限公司 Glass substrate contrast detection device
CN110793977B (en) * 2019-10-28 2022-05-31 芜湖东旭光电科技有限公司 Glass substrate contrast detection device
CN112845474A (en) * 2021-01-04 2021-05-28 郑州旭飞光电科技有限公司 A guider and cleaning machine for base plate glass

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Application publication date: 20180629