KR20130084621A - Apparatus and method of inspecting appearance of work - Google Patents

Abstract

PURPOSE: An exterior inspection device of a work and an exterior inspection method thereof are provided to accurately determine the position of a work on a returning table and to prevent electrostatic destruction about a work or degradation of the property of the work. CONSTITUTION: An exterior inspection device (30) of a work comprises a linear feeder (1), a circular returning table (2), a transferred material alignment unit (21), an electrifying unit, and an imaging device. The linear feeder returns a work with a hexahedron shape. The circular returning table returns the work, which is transferred from the linear feeder to a transferring point (4x), to the upper side of the work returning circular arc. The transferring material alignment unit aligns the work on the returning table by transferring the work from the linear feeder. The electrifying unit is arranged on the lower side of the return table, and charges the lower side of the returning table to maintain the work which is loaded on the returning table. The imaging unit takes pictures of six sides of the work on the returning table.

Description

[0001] APPARATUS AND METHOD OF INSPECTING APPEARANCE OF WORK [0002]

The present invention relates to an apparatus for inspecting the appearance of a work for picking up a six-sided body of the work while conveying a work of a hexahedron, and a method for inspecting the appearance of the work.

Description of the Related Art [0002] Conventionally, as a visual inspection device for a chip-type electronic component (hereinafter referred to as " workpiece ") such as a resistor or capacitor having a hexahedron shape, a workpiece is mounted on a transport table made of a transparent body such as glass, 2. Description of the Related Art [0002] There is known a device for picking up images of each surface by an image pickup means such as a camera while carrying a work to perform a visual inspection.

In this case, the work carrying table of the visual inspection apparatus electrostatically attracts and transports the work by electrostatic force.

That is, first, the work is charged on a linear feeder that aligns and conveys the work by vibration, and the work is placed on a transport table and transported to a predetermined work position, and the workpiece surface of the transport table is moved And the work is electrostatically adsorbed thereon (see Patent Document 1).

Japanese Patent Application Laid-Open No. 2008-260594

However, the conventional appearance inspection apparatus for work has the following problems.

The first problem is that it is difficult to position the work when the work is transferred from the linear feeder to the transport table. The work on the transport table has two surfaces in the transport direction, two surfaces in the up and down direction, and two surfaces on the left and right in the transport direction, in total six surfaces. In order to capture these six faces, it is necessary to capture these six faces with high precision using fixed imaging means. However, regardless of whether the workpiece is transferred in a predetermined direction when the workpiece on the linear feeder is transferred to the transfer table, since the posture of the workpiece is fixed by electrostatic adsorption after transferring, a subtle difference There is a possibility that the imaging accuracy is lowered.

In addition, since the workpiece is charged while the workpiece is being conveyed in the linear feeder, the workpiece is attracted to the linear feeder by the action of adsorption of static electricity during transportation, and the conveying speed may decrease. In the worst case, the workpiece stops.

The second problem is that the electrostatic attraction force after the workpiece is deteriorated. Even if sufficient suction force is secured immediately before the workpiece is transferred, the workpiece is brought into contact with the workpiece surface and the charge is neutralized at the contact point, . Therefore, the electrostatic attraction force acting on the work placed on the transport table is lowered.

Further, when charging the workpiece surface of the transport table, the ionizer provided on the top surface of the transport table emits charge of a polarity opposite to that of charging the workpiece toward the workpiece. Therefore, a part of the charge of the workpiece immediately before being transferred to the transfer table is neutralized. In this case, the electrostatic attraction force acting on the workpiece placed on the transfer table is lowered.

The third problem is the influence of the static electricity on the work. When the workpiece surface is brought into contact with the workpiece surface by the above-mentioned workpiece surface, the charge accompanied with the movement of the charge is neutralized, which may cause electrostatic breakdown or deterioration of characteristics of the workpiece.

SUMMARY OF THE INVENTION The present invention has been made in view of the above points, and it is an object of the present invention to provide a linear feeder which can precisely position a work when transferred from a linear feeder to a transport table, And a method for inspecting the appearance of a work.

The present invention relates to a rotary feeder comprising a linear feeder for feeding a work having a hexahedron shape, a rotatable circular transport table formed of a transparent body, which is transferred from the linear feeder at a workpiece transfer point, A separation member disposed between the linear feeder and the conveyance table and configured to allow the workpiece from the linear feeder to be arranged on the conveyance table and aligned with the conveyance table and a holding means disposed below the conveyance table for holding the workpiece placed on the conveyance table, And an image pickup means for picking up images of six surfaces of the work on the conveyance table. The deviation sorting means includes a non-oscillation portion provided between the linear feeder and the conveyance table, and a non-oscillation portion provided on the downstream side of the non- , The guide surface of the alignment guide has an alignment guide having a straight guide surface, And a tangent line of the workpiece conveying arc is formed downstream of the transfer point. The aligning guide is positioned on the conveying table, and the aligning guide and the conveying table And a vacuum suction means for vacuum suctioning a gap between the workpiece and the workpiece.

The vacuum suction device according to the present invention is characterized in that the vacuum suction means comprises a vacuum source and a suction passage provided in the alignment guide and having one end opened in a gap between the transfer table and the alignment guide and the other end communicating with the vacuum source Inspection apparatus.

The present invention is an apparatus for inspecting the appearance of a workpiece characterized in that the circular transport table is made of a transparent glass body.

The present invention is the apparatus for inspecting the appearance of a workpiece characterized in that the holding means comprises a charging means for charging the lower surface of the transport table by ejecting charged ions toward the lower surface of the transport table.

According to the present invention, the holding means is made of a conductor disposed below the transfer table, and a DC voltage is applied to the conductor to generate an electric field.

The present invention is a work visual inspection apparatus characterized in that the conveying speed of the work by the conveying table is larger than the conveying speed of the work by the linear feeder.

According to the present invention, the guide surface of the alignment guide forms an acute angle of 75 degrees to 88 degrees with respect to a straight line connecting the transfer point and the transfer point on a plane.

The present invention provides a method for inspecting a workpiece using a visual inspection apparatus for a work, comprising the steps of: transporting a workpiece having a hexahedron shape by a linear feeder; conveying the workpiece from the linear feeder to a circular conveyance table A step of aligning the workpiece with the guide surface of the alignment guide, and a step of holding the workpiece placed on the transfer table by the holding means, and transferring the workpiece on the workpiece transferring arc of the transfer table And a step of picking up images of the six surfaces of the work on the transport table by the image pick-up means.

According to the present invention, when the work is placed on the conveying table from the linear feeder by holding the work placed on the upper surface by the holding means disposed on the lower surface of the conveying table, The distance on the transfer table is made substantially constant and the posture with respect to the conveying direction is made constant. Therefore, the imaging accuracy by the imaging means is improved, and a high-precision visual inspection can be performed. In addition, since the workpiece is held by the holding means disposed on the lower surface of the transfer table without charging the workpiece surface of the workpiece or the transfer table, the electrostatic attraction force is not lowered by neutralization of charges after transferring the workpiece to the transfer table. Therefore, the processing capability of the visual inspection apparatus is improved, and the work is not charged, so that there is no adverse effect such as electrostatic breakdown and characteristic deterioration of the work.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view of an apparatus for inspecting the appearance of a work according to a first embodiment of the present invention; Fig.
2 is a perspective view showing a work.
3 is an enlarged plan view showing the area S of Fig. 1; Fig.
Fig. 4 is a perspective view of the region S of Fig. 1 viewed from the direction of the arrow Y. Fig.
5 is a schematic diagram showing adsorption of a work to a transport table in the first embodiment of the present invention.
6 (a) and 6 (b) are explanatory views showing the principle of electrostatic induction in the first embodiment of the present invention.
FIGS. 7A and 7B are explanatory diagrams showing the principle of dielectric polarization in the first embodiment of the present invention; FIG.
8 (a) and 8 (b) are explanatory diagrams of electric lines of force according to the first embodiment of the present invention. Fig.
9 (a) and 9 (b) are views for explaining the operation of the alignment guide in the first embodiment of the present invention. Fig.
Fig. 10 is a perspective view of a visual inspection apparatus for a work according to a second embodiment of the present invention, which corresponds to Fig. 4 in the first embodiment. Fig.
11 is an enlarged plan view of an apparatus for inspecting the appearance of a work according to a second embodiment of the present invention.
12 is a schematic diagram showing the adsorption of a work to a transport table in the second embodiment of the present invention.
13 is an explanatory diagram of electric lines of force according to a second embodiment of the present invention.
Fig. 14 is an explanatory diagram of an electric line of force according to a second embodiment of the present invention; Fig.
15 is an explanatory diagram of an electric line of force according to a second embodiment of the present invention;
Fig. 16 is a view showing the vacuum suction means provided in the alignment guide, as viewed from the L-line direction in Fig. 3;
FIG. 17 is a view seen from the same direction as FIG. 16 showing the relationship between the alignment guide and the transport table;

First Embodiment

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described with reference to drawings. 1 to 9 are views showing a first embodiment of an apparatus for inspecting the appearance of a work and a method for inspecting the appearance of a work according to the present invention.

First, the work to be inspected by the visual inspection apparatus of the work will be described with reference to Fig.

2, the work W to be a chip component such as a capacitor and a resistor has a hexahedron shape and includes a main body Wd made of an insulator and an electrode made of a conductor formed at both ends in the longitudinal direction of the main body Wd Wa, Wb). The work W is placed on the transport table 2 to be described later and the transport table 2 is rotated in the direction of the arrow Z in Fig. ). The side of the side opposite to the paper surface is picked up from the direction of the arrow A by the image pickup means 20 and picked up from the side of the front side of the paper from the direction of the arrow B, And picks up the lower surface from the direction of the arrow D and picks up the front surface from the direction of the arrow E and picks up the rear surface from the direction of the arrow F. [ At this time, by using the transparent transport table 2 made of glass, the entire six surfaces of the work W can be picked up with the work W placed thereon.

Next, the appearance inspection apparatus for a workpiece will be described. 1 and 3, a visual inspection apparatus 30 for a workpiece includes a linear feeder 1 for transporting a workpiece W and a linear feeder 2 for transporting the workpiece W from the linear feeder 1 at a transfer point 4x A circular transport table 2 made of a transparent material transported on the workpiece carrier 5 in a state where the workpiece W is mounted on the transport table 2 and a workpiece W from the linear feeder 1, And holding means for holding the work W placed on the conveying table 2 by charging the lower surface of the conveying table 2 and disposed below the conveying table 2, And image pickup means 20 for picking up images of six surfaces of the workpiece W on the transport table 2. The image pickup means 20 is provided with an image pick-

The separation sorting means 21 includes a non-oscillation portion 4 provided between the linear feeder 1 and the transport table 2 and a sorting guide (not shown) for aligning the work W provided on the downstream side of the non- 7, and the alignment guide 7 includes a guide surface 7a for aligning the work W. As shown in Fig. The guide surface 7a has a linear shape when viewed in a plane (viewed from above).

The image pickup means 20 includes a side camera portion 8, an inner camera portion 9, an upper face camera portion 10, a lower face camera portion 11, a front camera portion 12, , And a rear camera unit (13).

Next, the constituent parts of the visual inspection apparatus 30 of the work will be further described with reference to Figs. 1 to 4. Fig.

3 is a magnified plan view of a region S surrounded by a broken line in Fig. 1. Fig. 4 is an enlarged plan view of an area S surrounded by a broken line in Fig. 1 is a perspective view of the region S viewed from the direction of the arrow Y. Fig.

1, a linear linear feeder 1 is vibrated by a driving source (not shown), and a workpiece W fed into a part feeder (not shown) located on the upstream side of the linear feeder 1 is aligned And is conveyed in the direction of arrow N by vibration.

The conveyance table 2 provided below the linear feeder 1 is made of transparent glass and is installed horizontally and rotates clockwise in the clockwise direction X) direction. 4, the linear feeder 1 is lowered at a slight inclination toward the conveying table 2, and at the downstream end thereof, a non-vibrating portion (not shown) having a slope equivalent to that of the linear feeder 1, 4 are connected to the transport table 2 with a slight gap therebetween. Thus, the work W is gradually lowered from the linear feeder 1 via the non-vibrating portion 4 and is transferred to the transport table 2. [

1, a workpiece carrier 5 is formed as an arc around the rotary shaft 3, and a workpiece W (a workpiece W) is provided in the vicinity of the outer edge of the upper surface of the transport table 2, Is transferred from the noninvasive portion 4 to the transport table 2 and then aligned on the workpiece carrier 5 by the action of the alignment guide 7 which will be described later. Here, the workpiece carrier 5 is a target position assumed for aligning the workpiece W, and the mark on the top surface of the carrier table 2 is not a mark that can visually identify the workpiece carrier 5.

The charging means 6A also functions as a holding means for holding the workpiece W placed on the transfer table 2. This charging means 6A is constituted by an ionizer 6 provided at a position slightly ahead of the position of the noninverting portion 4. The ionizer 6 is provided directly under the conveying table 2, (Hereinafter referred to as " charge ") toward the lower surface of the transfer table 2 to positively charge the lower surface of the transfer table 2.

On the other hand, among these constituent parts, the unmoving portion 4 and the guide 7 having the guide surface 7a constitute the clearance aligning means 21.

3, the alignment guide 7 having the linear guide surface 7a has a slight gap with the transport table 2 on the upper side (directly above) the outer edge side of the transport table 2 Is installed. 3 shows a straight line connecting the movement point 4x and the rotation axis 3 of the transport table 2 as a broken line K. FIG.

3, the alignment guide 7 is formed so that the angle? Formed by the guide surface 7a and the broken line K is an acute angle of 75 degrees to 88 degrees, and the guide surface 7a is the clearance point 4x Of the workpiece W is tangent to the workpiece carrier 5 at the confluence point 7x of the workpiece carrier 5 located downstream of the workpiece W in the conveying direction. That is, when the straight line connecting the confluence point 7x and the rotation axis 3 of the transport table 2 is represented by the broken line L, the angle? Formed by the broken line L and the guide surface 7a is 90 degrees .

1, on the downstream side of the non-vibration section 4, along the rotation direction of the conveyance table 2, a side camera section 8, an inner side camera section 9 constituting the image pickup means 20, An upper camera unit 10, a lower camera unit 11, a front camera unit 12, and a rear camera unit 13 are provided. The imaging means 20 can take an image of each surface of the workpiece W indicated by the arrows A to F in Fig. 2 with respect to the workpiece W on the workpiece carrier 5, have. At this time, the conveying direction of the work W indicated by the arrow Z in Fig. 2 coincides with the rotation direction X of the conveying table 2 in Fig.

More specifically, the side camera portion 8 picks up the side surface A on the side opposite to the paper surface with respect to the work W, the inner surface camera portion 9 picks up the front side B of the paper surface, The upper face camera section 10 picks up the upper face C and the lower face camera 11 picks up the lower face D and the front face camera section 12 picks up the front face E and the rear face camera section 13 picks up, Thereby picking up a rear face F.

As shown in Fig. 1, a discharge unit 14 as discharge means is provided downstream from the image pickup means 20 in the rotational direction of the transfer table 2. The work W that has undergone the appearance inspection is discharged from the workpiece transfer arcuate surface to a storage box (not shown) by the discharge portion 14 in response to the result of the appearance inspection.

Next, a method for inspecting the appearance of a work using the apparatus for inspecting the appearance of a work having such a constitution will be described in detail.

1, the work W is fed into a part feeder (not shown) located on the upstream side of the linear feeder 1, and the work W fed into the part feeder is fed to a linear feeder 1), and are serially transported in the direction of arrow N in Fig. At this time, the work W is aligned so that the longitudinal direction thereof coincides with the transport direction, and the arrow Z in Fig. 2 becomes the transport direction of the work W. That is, the direction of the arrow Z in Fig. 2 coincides with the direction of the arrow N in Fig.

Next, the operation of the linear feeder 1 will be described in detail with reference to Fig. 4 shows the shape of the work W carried by the linear feeder 1 and is a perspective view of the area S surrounded by the broken line in Fig. 1 viewed from the direction of the arrow Y. Fig. 4 is a perspective view showing the position of the alignment guide 7 in broken lines in order to make the shape of the work W on the transport table 2 easier to see. As addition to the work (W) it is shown as a work to the work (W _O ~ W ₆₎ on the individual parts, regardless of the place, and shows the general work as a work (W).

As shown in Fig. 4, the linear feeder 1 has a slight inclination toward the conveying table 2 positioned horizontally below the linear feeder 1, and the linear feeder 1 vibrates to the succeeding work W pushed to move the work (W), as shown by W _0, in succession in the longitudinal direction is lowered little by little toward the transport table (2). When the linear feeder 1 is moved up to the position directly above the transport table 2 when the work W is transferred from the linear feeder 1 to the transport table 2, There is a risk that the feeder 1 and the conveyance table 2 come into contact with each other. In order to prevent this, a vibration-free section 4 that does not vibrate is provided between the downstream end of the linear feeder 1 and the transport table 2. [

It is also conceivable that the deviation of the conveying speed of the workpiece W in the linear feeder 1 may occur due to the deviation of the vibration of the linear feeder 1. However, This conveying speed can be made uniform by intervening between the conveying tables 2.

The non-oscillatory portion 4 has an inclination equivalent to that of the linear feeder 1, and has a slight gap between the upper surface of the transport table 2 and the upper surface. The work W on the non-vibrating section 4 advances by being pushed by a subsequent work in the same manner as on the linear feeder 1, and is gradually lowered toward the transport table 2 continuously before and after, as indicated by W ₀ .

And, a work reaches a dust-downstream end of the East (4) (W ₁₎ is pushed onto the work (W ₀₎ which is located immediately after being dissimilar in dissimilar points (4x) on the transport table (2), since the conveying table (X) in Fig. 4 by the rotation of the main body 2 in Fig. If the length of the vibrationless portion 4 is too short, it is difficult to equalize the conveying speed. On the other hand, if the length of the vibrationless portion 4 is too long, the work W may be stopped on the way. In the embodiment of the present invention, since the length of the non-vibration section 4 is eight times the length of the work in the longitudinal direction, the conveyance speed of the work W can be made uniform without stopping the work W .

As described above, the ionizer 6 is provided on the lower side of the transport table 2 to jet positive charge toward the lower surface of the transport table 2 to positively charge the lower surface of the transport table 2 have. In Fig. 4, this positive charge is schematically represented by +. Thus, the lower surface of the transport table 2 is positively charged, so that the work W carried on the transfer point 4x is adsorbed on the upper surface of the transport table 2. [

Next, the adsorption action of the workpiece W on the transport table 2 will be described with reference to Figs. 5 to 7. Fig.

6 (a) and 6 (b) are explanatory views showing the principle of electrostatic induction. In Fig. 6 (a), the electrode Wa at one end in the longitudinal direction of the work W is shown. The electrode Wa is made of a conductive material. In the normal state, as shown in FIG. 6A, a plus charge indicated by + and a minus charge indicated by - are present in an arbitrary position. Fig. 6 (b) shows the shape of the electrode Wa when a positive charge is approached from the left side.

In this case, the whole large battery (T) charged with a positive charge is approached. At this time, the negative charge in the electrode Wa is attracted to the positive charge in the large-capacity whole T, and the negative charge is gathered on the seat-side WaL side of the electrode Wa close to the large- The plus charge in the electrode Wa responds to the positive charge in the large whole T and collects on the side of the right side WaR of the electrode Wa far from the large whole T. At this time, a negative charge appears on the seat surface WaL side, and a positive charge appears on the right surface WaR side. On the other hand, since the electrode Wa is made of a conductive material, the internal electric charge can move freely. Therefore, in Fig. 6B, electric charges are applied to the portion between the seat surface WaL and the right surface WaR of the electrode Wa It does not exist. This phenomenon is called electrostatic induction.

An attractive force indicated by an arrow G in Fig. 6 (b) acts between the negative charge accumulated on the seat surface WaL side of the electrode Wa and the positive charge in the large- do. For this reason, the electrode Wa is attracted to the large-sized main body T. When the entire body T is away from the electrode Wa, the electric charge in the electrode Wa returns to the state of Fig. 6 (a) again. The same applies to the electrode Wb.

7 (a) and 7 (b) are explanatory diagrams showing the principle of dielectric polarization. 7 (a) shows the main body Wd at the center of the work W in the longitudinal direction. The main body Wd is an insulator. In the normal state, as shown in Fig. 7A, a molecule (an ellipse of broken line) in which positive charge indicated by + and negative charge represented by - Is present at an arbitrary position.

Fig. 7 (b) shows a state in which a positive charge is approached from the left side to the main body Wd. In this case, the whole large battery (T) charged with a positive charge is approached. At this time, the negative charge in the main body Wd is attracted to the positive charge in the main body T and the positive charge in the main body Wd repels the positive charge in the main body T. The direction of the molecules in the main body Wd is set such that the side of the body Wd close to the large body T becomes a negative charge and the side of the body Wd far from the large body T (WdR) side is a positive charge.

A negative charge appears on the seat surface WdL side of the main body Wd and a positive charge appears on the right side surface WdR side as shown in Fig. 7 (b). On the other hand, since the main body Wd is an insulator, the internal charge can not move freely, and molecules are aligned in a certain direction between the seat surface WdL and the right side surface WdR. This phenomenon is called dielectric polarization. An attraction force indicated by an arrow G in Fig. 7B is formed between the negative charge appearing on the seat surface WaL side of the main body Wd and the positive charge in the large-size main body T by dielectric polarization, . For this reason, the main body Wd is attracted to the large-size main body T. When the large body T is moved away from the main body Wd, the molecules in the main body Wd return to the state of Fig. 7 (a) again.

Next, FIG. 5 shows a state in which the work W transferred to the transfer point 4x is attracted to the upper surface of the transfer table 2 by electrostatic induction and dielectric polarization. In Fig. 5, the lower surface of the transport table 2 is positively charged by the action of the ionizer 6. Since the glass as the material of the conveyance table 2 is an insulator, the above-described dielectric polarization occurs due to the positive charge existing on the lower surface of the conveyance table 2 and negative charge is generated on the lower surface of the inside of the conveyance table 2 And a positive charge appears on the upper surface side. Likewise, with respect to the workpiece (W ₂₎ of different materials from the dust-Eastern 4 to the dissimilar points (4x) on the transport table (2), electrodes (Wa and Wb) it is by the electrostatic induction, and the main body (Wd) is By the dielectric polarization, negative charges appear on the respective lower surface side, and positive charges appear on the upper surface side.

5, an electrostatic attraction force G shown by an arrow is formed between the negative charges appearing on the lower surfaces of the electrodes Wa and Wb and the main body Wd and the positive charges present on the lower surface of the transport table 2, by the action, so the workpiece (W ₂₎ is by adsorption on an upper surface of the transfer table (2). At this time, on the lower surface of the work W ₂ and on the upper surface of the transport table 2, electric charges appear due to electrostatic induction or dielectric polarization, and no charging is caused by the movement of electric charges. Therefore, neutralization of charges does not occur at the time of adsorption, and the adsorption force does not decrease even after adsorption. So the work (W ₂₎ is conveyed in the direction of an arrow (X) by the rotation of the conveying table in the state (2) adsorbed on the upper surface of the transfer table (2).

Next, the workpiece (W) of different materials from the dust-Eastern 4 to the dissimilar points (4x) on the transport table (2) shows a workpiece (W _2), the conveying table in the adsorbed state to the transport table (2) ( 2 in the direction of the arrow X.

In this case, the transport table (2) to the conveying speed by the rotation greater than the conveying speed by the linear feeder 1 and the dust-ET (4), g (for example, between on the workpiece transport table (2), and W ₂ W ₃ ) are spaced apart from each other. 1 allows the front face E of the work W shown in Fig. 2 to be picked up and the rear face camera unit 1 of Fig. 1 13 can reliably pick up the entire surface when picking up the rear face F of the work W shown in Fig.

That is, when the work W is transferred from the transfer point 4x to the transport table 2 and transported, in the section P in Fig. 3, the work W is transported from W _{2 to} W ₃ → W _4. The interval of the work in the section Q is widened, for example, between W ₄ and W ₅ .

At this time, since there is a slight gap between the vibrationless portion 4 and the conveyance table 2 and the conveyance speed by the rotation of the conveyance table 2 is larger than the conveyance speed by the non-vibration portion 4, ₂ is not sufficiently attracted to the conveyance table ₂ , there is a case where the work W ₂ makes a slight leap at the time when it is transferred from the non-vibration section 4 to the transfer point 4x on the transfer table 2 have. In this case, the jumping that occurs in the workpiece W becomes irregular for each workpiece W, which causes a deviation in the interval of the workpiece W on the transport table 2 after acceleration. On the other hand, according to the present invention, since the work W2 is sucked sufficiently on the transport table ₂ , when the work W is transferred from the non-vibration section 4 to the transfer point 4x on the transport table 2, ₂ are not jumping, and are fixed on the transport table 2. Therefore, the interval of the work W after the acceleration can be kept substantially constant.

An alignment guide 7 having a linear guide surface 7a is provided with a slight gap from the transport table 2 on the transport point 4x of the outer edge of the transport table 2. 3, when the straight line connecting the margin point 4x and the rotation axis 3 is a broken line K, the alignment guide 7 is arranged so that the line connecting the guide surface 7a and the broken line K The guide surface 7a is provided so as to be tangent to the workpiece carrier 5 at the confluence point 7x located in the downstream direction of the release point 4x so that the angle alpha is an acute angle. That is, when the straight line connecting the confluence point 7x and the rotary shaft 3 is represented by the broken line L, the angle? Formed by the broken line L and the guide surface 7a is 90 °. Therefore, the transfer point 4x is located on the side of the outer edge of the transfer table 2 with respect to the workpiece carrier 5. Therefore, the carrying direction (arrow X) of the work W transferred to the transfer point 4x is the direction toward the guide surface 7a, and the transfer direction (arrow X) of the work W transferred to the transfer point 4x You can fix the subtle differences and do the same.

Next, the alignment operation by the alignment guide 7 will be described with reference to Figs. 9 (a) and 9 (b).

9A shows a case in which the posture of the work _W2E1 transferred to the transfer point 4x is slightly leftward in the right direction. The position of the transfer point 4x is on the outer edge side of the transfer table 2 with respect to the workpiece carrier 5 and the rotational direction of the transfer table 2 indicated by the arrow X in Fig. The work _W2E1 is in the same direction as the locus of the workpiece carrier 5 and the transport direction of the work _W2E1 is the direction toward the guide surface 7a. Therefore, the work _W2E1 is brought into contact with the guide surface 7a like the work _W2E2 , and then pressed against the guide surface 7a. At this time, since the work _W2E1 is attracted to the glass table 2 with a force stronger than the frictional force acting between the guide surface 7a and the guide surface 7a, the work _W2E1 does not decelerate in the state of being pressed against the guide surface 7a, (7a).

Fig. 9B shows a case where the posture of the work _{W2E3 carried} on the transfer point 4x is slightly rightward with respect to the correct direction. In this case also, the conveying direction of the work _W2E3 is the direction toward the guide surface 7a. After the work _{W2E3 abuts} on the guide surface 7a like the work _W2E4 , ) attached to the slide and is conveyed in the form along the guide surface (7a), such as W _2. In this way, the gap between the workpiece W on the transfer table 2 is made substantially constant by the attraction by the charge existing on the lower surface of the transfer table 2 and the action of the guide surface 7a, It is possible to perform positioning with high accuracy so as to make the posture with respect to the carrying direction constant.

As described above, since the conveying speed by the rotation of the conveying table 2 is larger than the conveying speed by the linear feeder 1 and the non-vibrating section 4, the positioned workpiece W is conveyed to the section In the state of electrostatically attracted by the transporting table P, the transport speed by the rotation of the transport table 2 is rapidly accelerated like W ₂ ? W ₃ ? W _4, and the interval of the work in the section Q is Widen as W ₄ and W ₅ . And the workpiece (W ₅₎ is conveyed As pushed to the guide surface section (7a), like (P), become gradually close to the workpiece transport arc (5). Then, the conveying direction of a workpiece (W ₆₎ reach confluence (7x), the guide surface (7a) is in contact with the workpiece transport arc 5 is coincident with the direction of workpiece transport arc (5) in the region (R) , The workpiece W ₆ is transported in a direction away from the guide surface 7a. That is, since the electrostatic attraction force acts on the work W on the transport table 2 from the positive charge existing on the lower surface of the transport table 2, the work W ₆ is attracted to the transport table 2 Away from the guide surface 7a, and then conveyed in a state of being placed on the workpiece carrier 5 in a retracted position.

3, the alignment guide 7 is provided with a slight gap from the transport table 2 on the transporting point 2 immediately above the transfer point 4x of the outer edge of the transporting table 2. As shown in Fig. Fig. 16 shows the alignment guide 7 and the transport table 2 in the vicinity of the transfer point 4x as viewed from the L-line direction in Fig.

16, the work W ₂ is a work immediately after it is transferred from the non-vibration section 4 to the transfer point 4x on the transfer table 2 and then started to be conveyed by the rotation of the transfer table 2 . As described above, the workpiece (W ₂₎ is being conveyed to follow a guide surface (7a) by the action of the alignment in the electrostatic suction on the upper surface of the transfer table (2) state, the alignment guide (7) form. In this case, the conveying table 2 is formed in a circular shape by glass, and the conveying table 2 has a slight warp near the outer edge portion due to the working precision at the time of molding. When the conveying table 2 having such a warp is rotated in a state where there is a slight gap between the lower side of the alignment guide 7 and the lower surface 7z of the alignment guide 7, The dimension of the gap g on the upper surface 2s of the substrate 2 varies. The gap g between the lower surface 7z of the alignment guide 7 and the upper surface 2s of the transport table 2 is transported from the gap g between the alignment guide 7 and the transport table 2 when the gap g varies, toward the workpiece (W ₂₎ disposed on the upper surface (2s) of the table (2) is an air jet from the gap, it could still reach the workpiece (W _2). Here, the workpiece (W ₂₎ is, as described above, by charging the lower face of the transfer table (2) to the positive and the upper surface of the transfer table (2) by the action of an electric charge of a positive occurred on the lower surface of the conveying table (2) (2s).

However, the air that is injected from the gap (γ) of the the work face touching the (W _2), at the time the work the work by the pressure applied to the (W ₂₎ (W ₂₎ is spaced apart from the guide surface (7a), or there is a possibility that the position of the workpiece (W ₂₎ unstable.

Vacuum suction means 17 and 18 for vacuum suctioning the gap g formed between the lower surface 7z of the alignment guide 7 and the upper surface 2s of the transfer table 2 are provided in the alignment guide 7 ) Is installed. That is, the vacuum suction means 17 and 18 have a vacuum source 17 and a suction passage 18 provided in the alignment guide 7. One of the suction passage 18 and the suction passage 18 is connected to the gap g And the other end 18b is connected to the vacuum source 17 through the connection line 17a.

The gap between the lower surface 7z of the alignment guide 7 and the upper surface 2s of the transport table 2 is defined by the vacuum source 17 and the suction passage 18 as indicated by arrows? , delta 2, delta 3). By this vacuum attraction, do not touch the transport table (2), the work (W2) to air is ejected from the gap even at the time of rotation so that the required dimension of the gap (γ) changes, towards the workpiece (W ₂₎ of the. Therefore, the work W ₂ is transported stably on the top surface 2s of the transport table 2 in a state of being attracted electrostatically.

16 is a comparative diagram of Fig. 16, in which the alignment guide 70 having no vacuum suction means 17, 18 is provided with a slight gap from the transport table 2 as shown in Fig. The dimension of the gap 7 between the lower surface 70z of the alignment guide 70 and the upper surface 2s of the transport table 2 fluctuates as shown by the broken line in Fig. The air in the gap is compressed so that air is jetted in the direction of the arrow epsilon from the gap toward the work W _{2 placed} on the upper surface 2s of the rotating transport table 2, (W ₂ ). The pressure of the air, the work (W ₂₎ are so remote from the guide surface (70a), transport table (2) is rotated while the workpiece (W ₂₎ is even reached confluence (7x) of 3, the workpiece (W ₂₎ can not be arranged mounted on the workpiece transport arc 5 shown in Figure 3, it is impossible to work the purpose good precision positioning of the present invention. Further, due to the pressure of the air workpiece (W ₂₎ the guide surface even if they are large enough to be remote from (70a), the guide face (70a) becomes near the attitude of the workpiece (W ₂₎ unstable in, also in the present invention It is impossible to determine the position of a work having a high precision.

On the other hand, according to the present invention, since the gap 7z between the lower surface 7z of the alignment guide 7 and the upper surface 2s of the transport table 2 is always evacuated, air is ejected from the gap g work without touching the (W _2), the workpiece (W ₂₎ can be arranged stably on the transport table (2).

3, the workpiece W reaches the image pickup means 20, and the side surface of the workpiece W is transferred to the side surface camera portion 20 of the image pickup means 20. Then, (A to F) in Fig. 2 by the inner camera section 8, the inner camera section 9, the upper camera section 10, the lower camera section 11, the front camera section 12 and the rear camera section 13, The respective surfaces are picked up from the direction indicated by the arrows, and the visual inspection is performed. In this case, since the positioning of the workpiece W is performed with high accuracy by the attraction by the charge existing on the lower surface of the transfer table 2 and the action of the guide surface 7, . The work W that has undergone the appearance inspection reaches the discharge portion 14 and is discharged toward a storage box (not shown) according to the result of the appearance inspection.

When the work W is discharged from the discharge unit 14, for example, compressed air is jetted from the inner peripheral side of the transport table 2 with respect to the front side B of the paper in Fig. 2, Can be guided to the storage box while being spaced apart from the outer circumferential side of the transport table 2. The work W in the storage box has the state shown in Figs. 6 (b) and 7 (b) due to the positive electric charge existing on the lower surface thereof on the transport table 2, 6 (a) and 7 (a). In the meantime, the work W itself does not generate static electricity.

As described above, in the present embodiment, although the workpiece W is attracted to the transfer table 2 by using the static electricity, it is possible to prevent the workpiece W from causing electrostatic breakdown or deteriorating characteristics , And Figs. 8 (a) and 8 (b).

8A shows a state in which the work W is placed on the upper surface of the transport table 2 to positively charge the lower surface of the transport table 2 and a positive Shows the shape of the electric force line generated by the charge. As shown in Fig. 8 (a), the electric lines of force start from a positive charge and are terminated at a negative charge. In this case, since the negative electric charge is considered to be present in the infinite distance, the electric force line E1 starts from the positive electric charge existing on the lower surface of the transport table 2, passes through the transport table 2 and the work W, . In addition to that, there exist electric force lines starting from the positive charge toward the lower side or the left and right side, but they are not shown because they are irrelevant to the present invention. At this time, negative charges appear on the lower surface of each of the electrodes Wa and Wb of the work W by electrostatic induction and by a dielectric polarization of the main body Wd, and positive charges appear on the respective upper surfaces at the same time . At this time, since the electrodes Wa and Wb are conductors, positive charges are gathered on the upper surface thereof, and negative charges are gathered on the lower surface. Therefore, the electric lines of force E2 are generated in the electrodes Wa and Wb by these charges. The direction starts from the positive charge existing on the upper surface and terminates at the negative charge existing on the lower surface.

Therefore, in the electrodes Wa and Wb, the electric force lines E1 and E2 are opposite to each other and thus cancel each other. As shown in Fig. 8B, It is in a non-existent state. The electric lines of force divided by the electrodes Wa and Wb are denoted by E1 'in Fig. 8 (b). In this state, since there is no electric force line in the electrodes Wa and Wb, the electrode Wa and the electrode Wb are at the same potential. That is, no voltage is applied between the electrode Wa and the electrode Wb, so that electrostatic breakdown or characteristic deterioration of the work does not occur.

In the transient state in which the work W is transferred from the noninverting portion 4 to the transfer table 2, the electrostatic induction based on the charge existing on the lower surface of the transfer table 2 causes the electrode It is also conceivable that the electrodes Wa and Wb repeatedly come into contact with or separated from the non-oscillation portion 4 and the transport table 2 while the charges in the wafers Wa and Wb move within the respective electrodes. It is also conceivable that when the charges in the electrodes Wa and Wb move between the electrodes when the electrodes Wa and Wb are brought into contact with each other or apart from each other, electrostatic destruction due to discharge is caused. In this case, since the non-vibration section 4 is made of a material having a high resistance value such as an insulator in the same manner as the transport table 2, no movement of charges is caused between the electrodes Wa and Wb.

In the above embodiment, the lower surface of the transport table 2 is positively charged. However, the lower surface of the transport table 2 may be negatively charged as required. Further, although the example in which the transport table 2 is made of a glass material is shown, if the material of the transport table 2 is a transparent material, it is not limited to glass.

Second Embodiment

Hereinafter, a second embodiment of the present invention will be described with reference to Figs. 10 to 15. Fig.

The second embodiment of the present invention shown in Figs. 10 to 15 is different from the first embodiment in that the charging means 6A is disposed below the transport table 2 and the conductive plate (conductor) 15 ), And the other configuration is substantially the same as that of the first embodiment shown in Figs. 1 to 9. Fig.

In the second embodiment shown in Figs. 10 to 15, the same parts as those in the first embodiment shown in Figs. 1 to 9 are denoted by the same reference numerals and the detailed description is omitted.

Here, FIG. 10 is a perspective view of the region S surrounded by the broken line in FIG. 1 viewed from the direction of the arrow Y, and corresponds to FIG. A conductive plate 15 made of a conductive material is provided on the lower side of the transport table 2 in place of the charging means 6A made of the ionizer 6 shown in Fig. With a slight gap between them. The conductive plate 15 has a planar shape and its surface 15a is substantially parallel to the transport table 2 as shown in Fig. A DC power supply 16 is connected to the conductive plate 15 and a DC voltage is applied thereto to constitute an electric field generating means. Fig. 11 shows the location of the conductive plate 15. Fig. Fig. 11 is an enlarged plan view of the area S surrounded by the broken line in Fig. 1, and corresponds to Fig. 11, the conductive plate 15 extends in an elongated shape in the horizontal direction and extends from the transfer point 4x to the work transfer arm 5 on the transfer table 2 of the work W and to the alignment guide The longitudinal direction is disposed along the workpiece carrier arcs 5 of the workpiece W on the lower side of the transport table 2 corresponding to the guide surface 7a of the workpiece W.

Next, the operation of the second embodiment of the present invention will be described with reference to Figs. 10 to 15. Fig.

11, the work W conveyed in line by the vibration of the linear feeder 1 is transferred to the transfer point 2x on the conveyance table 2, 15 and is attracted to the upper surface of the transport table 2 by induction of electrostatic induction and dielectric polarization due to the action of electric charges generated in the transport table 2.

This type of adsorption action is shown in Fig. 12, the conductive plate 15 is disposed with a slight gap from the lower surface of the transport table 2, and the DC power supply 16 is connected to the conductive plate 15 to apply a positive DC voltage. For this reason, a positive charge appears on the conductive plate 15.

As a result of the positive charge, dielectric polarization takes place in the same manner as in Fig. 5, negative charge appears on the lower surface side of the transfer table 2 opposite to the conductive plate 15, and positive charge appears on the upper surface side . Likewise, according to the workpiece (W ₂₎ of different materials from the dust-Eastern 4 to the dissimilar points (4x) on the transport table (2) by, the electrostatic induction electrode (Wa and Wb), also has dielectric polarization unit (Wd) A negative charge appears on the lower surface side and a positive charge appears on the upper surface side, respectively.

An electrostatic attraction force G indicated by an arrow acts between the negative charges appearing on the lower surfaces of the electrodes Wa and Wb and the body Wd and the positive charges on the conductive plate 15, W ₂ are transported in the direction of the arrow X by the rotation of the transport table 2 while being adsorbed on the upper surface of the transport table 2.

In this case, as in the case of the first embodiment shown in Figs. 8A and 8B, static electricity is not charged in the work W itself, so that the work W causes electrostatic breakdown or deteriorates characteristics .

Although the plane of the conductive plate 15 is described as being substantially parallel to the plane of the transport table 2 in the description of the above embodiment, the positional relationship between the plane of the conductive plate 15 and the plane of the transport table 2 Are not limited to these. Fig. 13 is an enlarged view of Fig. 11 viewed from the L direction, and Fig. 13 shows the shape of an electric line of force starting from the positive charge of the conductive plate 15. Fig.

As shown in Fig. 13, electrostatic induction and dielectric polarization occur due to the electric force line passing through the transport table 2 and the work W, negative charge is generated on the lower surface of the work W, Thereby generating a positive charge. Here, for the sake of simplicity, the electric charge generated in the transfer table 2 by the dielectric polarization is not shown.

(Ex in the figure) starting from a positive charge existing in the vicinity of the end face 15x of the conductive plate 15 out of the electric lines of force starting from the positive charge on the conductive plate 15 , And is bent toward the side where no charge is present, that is, toward the outside of the conductive plate 15. Therefore, instead of the configuration shown in Fig. 13, the conductive plate 15 may be arranged such that its surface 15a is substantially perpendicular to the transport table 2, as shown in Fig. In this case, the conductive plate 15 extends in a horizontally elongated shape, and is arranged on the lower side of the transport table 2 corresponding to the guide surface 7a of the alignment guide 7, And is arranged substantially parallel to the workpiece carrier 5 of the workpiece W.

14, an electric line of force originating from a positive electric charge in the vicinity of the end face 15x of the electric line of force starting from the positive electric charge of the conductive plate 15 passes through the transport table 2 and the work W. 13, negative electric charges are generated on the lower surface of the work W by electrostatic induction and dielectric polarization, and a positive charge is generated on the upper surface of the work W. As shown in Fig.

In addition, as shown in Fig. 15, a conductive plate 15 having an L-shaped cross section may be provided. In this case, of the two intersecting surfaces 15b and 15c of the conductive plate 15, the surface 15b is arranged at a substantially right angle to the transport table 2, and the surface 15c is roughly placed on the transport table 2 It may be arranged in parallel. In this case, the conductor 15 extends in a horizontally elongated shape and is arranged on the lower side of the transport table 2 corresponding to the guide surface 7a of the alignment guide 7, And is arranged substantially parallel to the workpiece carrier 5.

15, the electric lines of force starting from the positive electric charge existing in the vicinity of the end face 15x of the electric lines of force starting from the positive electric charges of the conductive plate 15 do not intersect with each other, And the work W. 13, negative charge is generated on the lower surface of the work W by electrostatic induction and dielectric polarization, and positive charge is generated on the upper surface of the work W.

On the other hand, in the description of the second embodiment, the conductive plate 15 is positively electrified, but it may be negatively charged if necessary.

1 Linear Feeder
2 conveyance table
3 The center axis of the transport table
4 non-vibrating eastern
4x leverage point
5 Workpiece return arc
6 Ionizers
6A fighting means
7 alignment guide
7a guide surface
7x junction
8 side camera part
9 Internal camera part
10 Top camera part
11,
12 Front camera part
13 Rear camera unit
14 outlet
15 conductive plate
17 vacuum source
17a connecting line
18 suction passage
18a One end of the suction passage
18b The other end of the suction passage
20 Means of shooting
21 spacer alignment means
30 Appearance inspection system of work
W work
Wa, Wb electrode of work
Body of Wd work

Claims (8)

Linear feeder which conveys the work of hexagonal shape,
Rotatable circular conveyance table which consists of a transparent body which a workpiece transfers from a linear feeder at a transfer point, and conveys on a workpiece conveyance arc in the state which mounted this workpiece,
Transfer material alignment means disposed between the linear feeder and the transfer table, and moving the workpieces from the linear feeder onto the transfer table and aligned;
A holding means disposed below the conveying table and holding the workpiece placed on the conveying table;
It is provided with the imaging means which image | photographs 6 surfaces of the workpiece | work on a conveyance table,
The dissimilar material aligning means has a vibration-free part provided between the linear feeder and the conveying table, and an alignment guide having a guide face of a linear shape when viewed from a plane aligning the work, which is provided downstream of the vibration-free part,
The guide surface of the alignment guide forms an acute angle with respect to a straight line connecting the transfer point and the rotation axis of the transfer table on a plane, and forms a tangent of the workpiece conveyance arc downstream of the transfer point,
The alignment guide is located on the conveyance table and is provided with a vacuum suction means for vacuum sucking the gap between the alignment guide and the conveyance table in the alignment guide. The method of claim 1,
The vacuum suction means is provided in the vacuum source and the alignment guide, and has a suction passage, one end of which is opened between the gap between the conveying table and the alignment guide, and the other end of which communicates with the vacuum source. The method of claim 1,
The circular conveyance table consists of a transparent glass body, The appearance inspection apparatus of the workpiece | work characterized by the above-mentioned. The method of claim 1,
The holding means consists of charging means which blows out charged ions toward the lower surface of the conveyance table, and charges the lower surface of the conveyance table. The method of claim 1,
The holding means consists of a conductor arrange | positioned under the conveyance table, and applies the direct current voltage to this conductor, and produces an electric field, The external appearance inspection apparatus of the workpiece | work characterized by the above-mentioned. The method of claim 1,
The conveyance speed of the workpiece | work by a conveyance table is larger than the conveyance speed of the workpiece | work by a linear feeder, The external appearance inspection apparatus of the workpiece | work characterized by the above-mentioned. The method of claim 1,
The guide surface of the alignment guide forms an acute angle of 75 degrees to 88 degrees with respect to a straight line connecting the transfer point and the conveyance table on a plane. A method for inspecting the appearance of a workpiece using the apparatus for inspecting a workpiece according to claim 1,
A process of conveying a hexagonal work piece by a linear feeder,
The process of aligning the workpiece by the guide surface of the alignment guide while transferring the workpiece from the linear feeder to the transfer point on the circular conveyance table through the vibration-free part and the alignment guide;
A step of conveying the workpiece on the workpiece conveyance arc of the conveying table while holding the workpiece placed on the conveying table by the holding means;
Process of imaging 6 surfaces of the workpiece | work on a conveyance table by an imaging means
And a step of inspecting the appearance of the work.

Images