KR20130079830A - Apparatus for providing polycrystal raw material and single crystal growth apparatus - Google Patents

Abstract

PURPOSE: An apparatus for supplying polycrystalline materials and a single crystal growing apparatus using the same are provided to reduce the breakdown of an inner wall of a tube due to the lower concentration of stress by spirally forming an inner structure of the tube. CONSTITUTION: A tube (10) receives polycrystalline materials. A hole column (30) is located on the central part of the tube. A lower cover (40) closes an opening part on the lower side of the tube. A connection bar (50) is connected to the lower cover and passes through the tube. A polycrystalline material guide (20) spirally rotates around the connection bar as a rotation axis.

Description

Polycrystalline raw material supply device and single crystal growth device using the same {APPARATUS FOR PROVIDING POLYCRYSTAL RAW MATERIAL AND SINGLE CRYSTAL GROWTH APPARATUS}

The present invention relates to a polycrystalline raw material supply device and a single crystal growth device using the same.

In general, in order to grow a silicon single crystal, a polycrystalline silicon lump is filled in a quartz crucible and then heated with a heating element to melt the polycrystalline silicon.

Subsequently, the single crystal seed is immersed in the molten liquid, and then the silicon single crystal is grown by slowly pulling it up.

In recent years, in order to improve the productivity of a silicon single crystal, the charge amount is increasing.

However, due to the limited amount of initial charge, polycrystalline silicon is a method of taking up a constant amount of initial polycrystalline silicon, dissolving polycrystalline silicon, and then recharging the polycrystalline silicon using a polycrystalline silicon supply device. Has been supplied.

As a device for recharging polycrystalline silicon, a polycrystalline silicon supply device called a hopper tube was used.

The polycrystalline silicon supply apparatus may be composed of a tube made of quartz, a cone pedestal, and a metal rod surrounding a wire connected to the cone pedestal.

As such, the configured polycrystalline silicon supply device has a tube upper part seated in a chamber inner guide ring while the tube is lowered with a wire, in which the tube is fixed, in the form of a cone. When the stopper was lowered, the tube was opened and the polycrystalline silicon loaded in the tube was dropped, thereby recharging the polycrystalline silicon.

Existing polycrystalline silicon supply device can increase the production effect by dropping additional polycrystalline silicon in addition to initial stacking at the time of dumping, but in the process of dropping the loaded polycrystalline silicon to the bottom, Impact may occur when hitting the lower inner wall, whereby cracking of the tube may occur.

In addition, the weight of the loaded polycrystalline silicon may cause stress concentration on the lower inner wall of the tube due to gravity, thereby lowering the durability of the tube itself.

In addition, the existing tube has a large drop radius of polycrystalline silicon, and splashes from the melt contaminate the hot zone inside the chamber, thereby reducing the life time of the hot zone. It is becoming.

The present invention is to solve these problems, and to provide a polycrystalline raw material supply apparatus and a single crystal growth apparatus using the same by changing the structure inside the tube, to prevent damage to the tube and to minimize the splash.

The polycrystalline raw material supply apparatus according to the present invention is formed on the inner wall of the tube, and a connecting rod penetrating the inside of the tube connected to the lower cover, the lower cover to block the opening of the lower end of the tube, the tube is loaded with the polycrystalline raw material, It may include a polycrystalline raw material guide that rotates in a spiral with the rod as the axis of rotation.

Here, the tube may be formed with a hole pillar surrounding the connecting rod.

At this time, the hole pillar is located in the center of the tube, it may extend from the top of the tube to the bottom.

The diameter of the hole pillar may be larger than the diameter of the connecting rod, and the ratio of the diameter of the hole pillar to the diameter of the connecting rod may be 1.1-3: 1.

The opening at the bottom of the tube may be formed at the edge of the bottom of the tube.

The opening at the bottom of the tube may then comprise a first opening and a second opening perpendicular to the first opening.

Here, one surface of the first opening and the second opening may contact each other.

And, the first opening may be parallel to the surface of the lower lid, and the second opening may be perpendicular to the surface of the lower lid.

Subsequently, the lower lid may have a third opening and may face each other with the first opening at the bottom of the tube.

In addition, the lower lid may have a stopper formed on a surface facing the bottom of the tube, and the stopper may close the second opening at the bottom of the tube.

Here, the height of the closure may be the same as the height of the second opening of the bottom of the tube, or the height of the closure may be higher than the height of the second opening of the bottom of the tube.

The polycrystalline raw material guide may have a spiral shape that rotates from the top of the tube to the bottom of the tube with the connecting rod as the central axis.

The cross section of the polycrystalline raw material guide may then have an inclined surface inclined from left to right, or from right to left.

In addition, the polycrystalline raw material guide and the tube may be formed of the same material.

In addition, a stopper protruding continuously or discontinuously may be formed on the outer wall of the upper end of the tube.

On the other hand, the single crystal growth apparatus using the polycrystalline raw material supply device includes a crucible, a heater for heating the crucible, and a polycrystalline raw material supply device for supplying the polycrystalline raw material to the crucible, and the polycrystalline raw material supply device includes a tube on which the polycrystalline raw material is loaded. And a lower cover for blocking the opening of the lower end of the tube, a connecting rod connected to the lower cover and penetrating the inside of the tube, and a polycrystalline raw material guide formed on the inner wall of the tube and rotating in a spiral shape with the connecting rod as the rotation axis. .

According to the present invention, since the internal structure of the tube is manufactured in a threaded form, the polycrystalline raw material can be separated and stacked in layers, thereby dividing the stress in the lower part of the tube, thereby reducing the inner wall crack of the tube due to the concentration of the lower part of the stress. Can be.

In addition, when the polycrystalline raw material is dropped and the inner wall impact of the tube is minimized, a safe work can be performed during the dumping operation.

In addition, since the dropping radius of the polycrystalline raw material can be concentrated to the center of the melt, it is possible to extend the life time of the hot zone according to the splash.

1A and 1B show a polycrystalline raw material supply device
Figure 2a shows in detail the bottom of the tube of Figure 1a;
FIG. 2B is a detailed view of the lower cover of FIG. 1B
3A and 3B show the tube and the lower cover combined
4a and 4b show the discharge process of the polycrystalline raw material loaded in the tube
5 is a cross-sectional view showing a stopper of the polycrystalline raw material supply device
6 is a view showing a single crystal growth apparatus using a polycrystalline raw material supply device
7 to 9 are views showing the effect of the polycrystalline raw material supply apparatus according to the present invention

BRIEF DESCRIPTION OF THE DRAWINGS The above and other objects, features and advantages of the present invention will be more apparent from the following detailed description taken in conjunction with the accompanying drawings, in which: FIG.

In the description of the embodiments, it is to be understood that each layer (film), region, pattern or structure is formed "on" or "under" a substrate, each layer The terms " on "and " under " encompass both being formed" directly "or" indirectly " In addition, the criteria for above or below each layer will be described with reference to the drawings.

The thickness and size of each layer in the drawings are exaggerated, omitted, or schematically shown for convenience and clarity of explanation. In addition, the size of each component does not necessarily reflect the actual size.

1A and 1B are views showing a polycrystalline raw material supply device, in which the tube of FIG. 1A and the lower cover of FIG. 1B are separated.

As shown in FIGS. 1A and 1B, the polycrystalline raw material supply apparatus may include a tube 10 having a polycrystalline raw material guide 20 and a lower cover 40 having a connecting rod 50.

Here, the tube 10 is a space in which the polycrystalline raw material is loaded, but may be manufactured in a cylindrical shape, but is not limited thereto.

In addition, a hole pillar 30 is positioned at the center of the tube 10, and may extend from an upper end to a lower end of the tube 10.

Here, the diameter of the hole pillar 30 is preferably larger than the diameter of the connecting rod (50).

In one example, the ratio of the diameter of the hole pillar 30 and the diameter of the connecting rod 50 may be about 1.1-3: 1.

If the diameter of the hole pillar 30 is too large, the loading space of the polycrystalline raw material is too small, if the diameter of the hole pillar 30 is too small, there is a disadvantage that the movement of the connecting rod 50 is not desired.

Then, the polycrystalline raw material guide 20 is formed on the inner wall of the tube 10, it can be rotated in a spiral with the hole pillar 30 as the rotation axis.

That is, the polycrystalline raw material guide 20 may have a spiral shape rotated from the upper end of the tube 10 to the lower end of the tube 10 with the hole pillar 30 as the central axis.

Further, the cross section of the polycrystalline raw material guide 20 may have an inclined surface inclined from left to right, or from right to left.

Here, the inclined surface may have an inclination of about 10 to 80 degrees with respect to the plane, preferably 30 to 60 degrees.

The polycrystalline raw material guide 20 and the tube 10 may be formed of the same material, but in some cases, may be formed of different materials.

For example, the polycrystalline raw material guide 20 may be made of a smoother material than the tube 10 so that the polycrystalline raw material moves well in the downward direction of the tube.

Subsequently, an opening may be formed at the bottom of the tube 10, and the opening may be formed at an edge of the bottom of the tube.

Here, the opening may include a first opening 14 and a second opening 12.

In this case, the second opening 12 may be disposed perpendicularly to the first opening.

In addition, one surface of the first opening 14 and the second opening 12 may be in contact with each other.

That is, the first opening 14 may be parallel to the surface of the lower lid 40, and the second opening 12 may be perpendicular to the surface of the lower lid 40.

In addition, although not shown, a stopper protruding continuously or discontinuously may be formed on the outer wall at the top of the tube 10.

Here, when the stopper is mounted on the silicon single crystal growth apparatus, the stopper may serve to stop the stopper on the gate of the chamber, thereby fixing the tube 10 at a predetermined position.

On the other hand, the lower cover 40 may block the opening of the lower end of the tube (10).

Here, the lower cover 40 may have the same shape as the lower end of the tube 10 to block the entire lower end of the tube 10.

For example, when the shape of the tube 10 is a circular columnar shape, the lower cover 40 may have a circular shape in the same manner as the shape of the lower end of the tube 10.

Here, the area of the lower cover 40 may be equal to the lower area of the tube 10.

In some cases, the area of the bottom cover 40 may be smaller than the area of the bottom of the tube 10.

The lower cover 40 may have a third opening 44 formed therein.

Here, the third opening 44 may face each other with the first opening 14 at the bottom of the tube 10.

When the lower cover 40 is mounted at the bottom of the tube 10, the third opening 44 of the lower cover 40 is connected to the first opening 14 at the bottom of the tube 10, so that the loaded polycrystalline raw material Upon discharge of the polycrystalline raw materials, the polycrystalline raw materials may pass through the second opening 12 and the first opening 14 of the tube 10, and then through the third opening 44 of the lower lid 40.

Subsequently, the lower cover 40 may have a stopper 42 formed on a surface facing the bottom of the tube 10.

Here, the stopper 42 may serve to block the second opening 12 at the bottom of the tube 10.

Thus, the height of the stopper 42 may be equal to the height of the second opening 12 at the bottom of the tube 10.

In some cases, the height of the stopper 42 may be higher than the height of the second opening 12 at the bottom of the tube 10.

In addition, the connecting rod 50 may be connected to the lower cover 10 to penetrate the inside of the hole pillar 30 of the tube 10.

Therefore, the diameter of the connecting rod 50 is preferably smaller than the diameter of the hole pillar 30.

For example, the ratio of the diameter of the hole pillar 30 and the diameter of the connecting rod 50 may be about 1.1-3: 1.

If the diameter of the connecting rod 50 is too large, movement is not desired, and if the diameter of the connecting rod 50 is too small, the weight of the lower cover 40 may be broken or bent without overcoming the weight of the lower cover 40.

FIG. 2A is a detailed view of the bottom of the tube of FIG. 1A, and FIG. 2B is a detailed view of the lower cover of FIG. 1B.

First, as shown in FIG. 2A, a first opening 14 and a second opening 12 may be formed at a lower end of the tube 10.

The first and second openings 14 and 12 are formed at the edge of the bottom of the tube 10, and the second opening 12 may be disposed perpendicular to the first opening.

In addition, one surface of the first opening 14 and the second opening 12 may be in contact with each other.

In addition, one side of the second opening 12 may be in contact with the hole pillar 30 of the tube 10, and the first opening 14 may have a tube (rather than an area adjacent to the hole pillar 30 of the tube 10). The area of the area far from the hole pillar 30 of 10 may be wider.

For example, the shape of the first opening 14 may be a fan shape.

Next, as shown in FIG. 2B, the lower cover 40 may block an opening at the bottom of the tube 10.

Here, the lower cover 40 may have the same shape as the lower end of the tube 10 to block the entire lower end of the tube 10.

For example, when the shape of the tube 10 is a circular columnar shape, the lower cover 40 may have a circular shape in the same manner as the shape of the lower end of the tube 10.

Here, the area of the lower cover 40 may be equal to the lower area of the tube 10.

In some cases, the area of the bottom cover 40 may be smaller than the area of the bottom of the tube 10.

The lower cover 40 may have a third opening 44 formed therein.

Here, the third opening 44 may face each other with the first opening 14 at the bottom of the tube 10.

Thus, the area S2 of the third opening 44 may be larger than the area S1 of the first opening 14 of the tube 10.

This is for smooth discharge of the polycrystalline raw materials loaded in the tube 10.

In addition, the lower cover 40 may be formed with a stopper 42 on the surface facing the bottom of the tube (10).

Here, the stopper 42 may serve to block the second opening 12 at the bottom of the tube 10.

Thus, the height h2 of the stopper 42 may be equal to the height h1 of the second opening 12 at the bottom of the tube 10.

In some cases, the height h2 of the stopper 42 may be higher than the height h1 of the second opening 12 at the bottom of the tube 10.

And, one side of the stopper 42 may be in contact with the connecting rod (50).

In addition, one side of the third opening 44 may be in contact with the connecting rod 50, and the third opening 44 has an area of an area farther from the connecting rod 50 than the area adjacent to the connecting rod 50. It can be wide.

For example, the shape of the third opening 44 may be a fan shape.

 As such, the third opening 44 of the disposed lower lid 40 is connected to the first opening 14 at the bottom of the tube 10 so that, upon discharge of the loaded polycrystalline raw materials, the polycrystalline raw materials are removed from the tube 10. It may pass through the second opening 12 and the first opening 14, and then may be discharged through the third opening 44 of the lower lid 40.

3A and 3B are views in which a tube and a bottom cover are combined, and FIG. 3A is a view showing a bottom cover which closes the bottom of the tube, and FIG. 3B is a view showing a bottom cover which opens the bottom of the tube.

As shown in FIG. 3A, the connecting rod 50 is coupled to the hole pillar of the tube 10, and the lower cover 40 connected to the connecting rod 50 may be arranged to block the lower end of the tube 10. have.

Here, the stopper 42 of the lower cover 40 blocks the second opening 12 of the lower end of the tube 10.

In this case, the second opening 12 of the lower end of the tube 10 may be an outlet through which the polycrystalline raw materials loaded in the tube 10 are discharged.

As shown in FIG. 3B, when the connecting rod 50 is moved downward, the lower cover 40 connected to the connecting rod 50 may open the lower end of the tube 10.

Thus, the second opening 12 at the bottom of the tube 10 can be opened from the closure 42 of the lower lid 40.

In this case, the third opening 44 of the lower cover 40 may be positioned to correspond to the first and second openings 14 and 12 of the lower end of the tube 10.

4A and 4B are views illustrating a process of discharging polycrystalline raw materials loaded in a tube.

As shown in FIG. 4A, the connecting rod 50 is coupled in the hole pillar of the tube 10, and the lower cover 40 connected to the connecting rod 50 is disposed to block the lower end of the tube 10. The stopper 42 of the lower cover 40 may be arranged to block the second opening 12 of the lower end of the tube 10.

At this time, the polycrystalline raw materials 60 loaded in the tube 10 are loaded from the upper part to the lower part of the tube 10 along the polycrystalline raw material guide 20 formed on the inner wall of the tube 10.

The polycrystalline raw material guide 20 is formed on the inner wall of the tube 10, and can rotate in a spiral with the hole pillar 30 as the rotation axis.

That is, the polycrystalline raw material guide 20 may have a spiral shape rotated from the upper end of the tube 10 to the lower end of the tube 10 with the hole pillar 30 as the central axis.

Further, the cross section of the polycrystalline raw material guide 20 may have an inclined surface inclined from left to right, or from right to left.

Here, the inclined surface may have an inclination of about 10 to 80 degrees with respect to the plane, preferably 30 to 60 degrees.

Therefore, the polycrystalline raw materials 60 loaded in the tube 10 are sequentially loaded from the upper part to the lower part of the tube 10 along the spiral polycrystalline raw material guide 20.

And, as shown in Figure 4b, when the connecting rod 50 is moved in the lower direction, the lower cover 40 connected to the connecting rod 50 may open the lower end of the tube (10).

Thus, the second opening 12 at the bottom of the tube 10 can be opened from the closure 42 of the lower lid 40.

At this time, the polycrystalline raw materials 60 loaded in the tube 10 are discharged from the second opening 12 of the lower end of the tube 10, and the first opening 14 and the lower lid 40 of the lower end of the tube 10 are closed. It may be sequentially discharged through the third opening 44.

As described above, according to the present invention, since the internal structure of the tube is manufactured in a threaded form, the polycrystalline raw material can be separated and stacked in layers, thereby dividing the stress in the lower part of the tube, and the inner wall of the tube is cracked due to the concentration of the lower part of the stress. ) Can be reduced.

In addition, when the polycrystalline raw material is dropped and the inner wall impact of the tube is minimized, a safe work can be performed during the dumping operation.

In addition, since the dropping radius of the polycrystalline raw material can be concentrated to the center of the melt, it is possible to extend the life time of the hot zone according to the splash.

5 is a cross-sectional view showing a stopper of the polycrystalline raw material supply device.

As shown in FIG. 5, the polycrystalline raw material supply apparatus may include a tube 10 having a polycrystalline raw material guide 20 and a lower cover 40 having a connecting rod 50.

Here, the hole pillar 30 is located in the center portion of the tube 10, and may extend from the top to the bottom of the tube 10.

Then, the polycrystalline raw material guide 20 is formed on the inner wall of the tube 10, it can be rotated in a spiral with the hole pillar 30 as the rotation axis.

That is, the polycrystalline raw material guide 20 may have a spiral shape rotated from the upper end of the tube 10 to the lower end of the tube 10 with the hole pillar 30 as the central axis.

Further, the cross section of the polycrystalline raw material guide 20 may have an inclined surface inclined from left to right, or from right to left.

Here, the inclined surface may have an inclination of about 10 to 80 degrees with respect to the plane, preferably 30 to 60 degrees.

In addition, a stopper 70 protruding continuously or discontinuously may be formed on the outer wall at the top of the tube 10.

Here, when the stopper 70 is mounted on the silicon single crystal growth apparatus, the stopper 70 may act to fix the stopper to the gate of the chamber, thereby fixing the tube 10 at a predetermined position.

On the other hand, the lower cover 40 may block the opening of the lower end of the tube (10).

Here, the lower cover 40 may have the same shape as the lower end of the tube 10 to block the entire lower end of the tube 10.

Subsequently, the lower cover 40 may have a stopper 42 formed on a surface facing the bottom of the tube 10.

Here, the stopper 42 may serve to close the opening at the bottom of the tube 10.

In addition, the connecting rod 50 may be connected to the lower cover 10 to penetrate the inside of the hole pillar 30 of the tube 10.

6 is a view showing a single crystal growth apparatus using a polycrystalline raw material supply apparatus.

As shown in FIG. 6, the single crystal growth apparatus may include a crucible 130, a heater 140 for heating the crucible 130, and a polycrystalline raw material supply device for supplying the polycrystalline raw material 60 to the crucible 130. Can be.

In addition, the single crystal growth apparatus may be sealed to the outside by the lower chamber 110 and the upper chamber 120.

Subsequently, the crucible 130, the heater 140, and the heat insulating material 150 may be disposed in the lower chamber 110.

Here, the polycrystalline raw material supply device is connected to the tube 10 on which the polycrystalline raw material 60 is loaded, the lower cover 40 which closes the opening of the lower end of the tube 10, and the lower cover 40, and is connected to the tube 10. It may include a connecting rod 50 penetrating the inside, and a polycrystalline raw material guide 20 which is formed on the inner wall of the tube 10 and rotates helically with the connecting rod 50 as the rotation axis.

Here, the polycrystalline raw material may be polycrystalline silicon, but is not limited thereto.

In addition, a stopper 70 protruding continuously or discontinuously may be formed on the outer wall at the top of the tube 10.

Here, the stopper 70 may serve to fix the tube 10 at a predetermined position by causing the stopper 70 to be caught by the gate 160 of the chamber 110.

7 to 9 are views showing the effect of the polycrystalline raw material supply apparatus according to the present invention.

As shown in FIG. 7, in the conventional polycrystalline raw material supply apparatus, the weight of the loaded polycrystalline raw material 60 causes gravity to concentrate stress on the lower inner wall of the tube 1, thereby causing durability of the tube 1 itself. The polycrystalline raw material supply apparatus of the present invention can reduce the weight of the polycrystalline raw material 60 by layering the inner structure of the tube 10 so that the polycrystalline raw material 60 can be stacked in layers to form a tube. (10) Since the stress of the lower part can be divided | segmented, the fall of durability of the tube 10 itself can be prevented.

In addition, as shown in FIG. 8, in the existing polycrystalline raw material supply apparatus, in the process of dropping the loaded polycrystalline raw material 60 downward, the polycrystalline silicon 60 collides with the lower inner wall of the tube 1 to generate an impact. As a result, cracking of the tube 1 may occur.

However, in the polycrystalline raw material supply apparatus according to the present invention, when the polycrystalline raw material 60 is dropped, the load of the polycrystalline raw material 60 is divided and discharged through the opening 44 of the lower lid 40. By minimizing the damage of the inner wall of the panel, it is possible to carry out safe work during dumping work.

In addition, as shown in FIG. 9, in the conventional polycrystalline raw material supply apparatus, the dropping radius of the polycrystalline raw material 60 is wide, so that the splash 6 splashed from the melt melts a hot zone inside the chamber. Since the zone 5 is contaminated, the life time of the hot zone is reduced.

However, in the polycrystalline raw material supply apparatus according to the present invention, since the load of the polycrystalline raw material 60 is divided and the polycrystalline raw material 60 is discharged through the opening 44 of the lower lid 40, the polycrystalline raw material 60 Since the drop radius of can be concentrated to the center of the melt, it is possible to extend the life time of the hot zone 5 according to the splash 6.

Features, structures, effects, and the like described in the above embodiments are included in at least one embodiment of the present invention, and are not necessarily limited to only one embodiment. Furthermore, the features, structures, effects, and the like illustrated in each embodiment may be combined or modified with respect to other embodiments by those skilled in the art to which the embodiments belong. Therefore, it should be understood that the present invention is not limited to these combinations and modifications.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is clearly understood that the same is by way of illustration and example only and is not to be taken by way of illustration, It can be seen that various modifications and applications are possible. For example, each component specifically shown in the embodiments can be modified and implemented. It is to be understood that all changes and modifications that come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein.

100: single crystal ingot 200: water cooling pipe assembly support
300: first water cooling pipe 400: second water cooling pipe
500: third water cooling tube

Claims (18)

A tube on which polycrystalline raw materials are loaded;
A lower cover blocking an opening at the bottom of the tube;
A connecting rod connected to the lower cover and penetrating the inside of the tube; And,
And a polycrystalline raw material guide formed on an inner wall of the tube and rotating in a spiral manner using the connecting rod as a rotation axis. The polycrystalline raw material supply apparatus according to claim 1, wherein the tube is formed with a hole pillar surrounding the connecting rod. The polycrystalline raw material supply apparatus according to claim 2, wherein the hole pillar is located at the center of the tube and extends from an upper end to a lower end of the tube. The polycrystalline raw material supply apparatus according to claim 2, wherein the diameter of the hole pillar is larger than the diameter of the connecting rod. The polycrystalline raw material supply device according to claim 4, wherein the diameter ratio of the hole pillar to the diameter of the connecting rod is 1.1-3: 1. The polycrystalline raw material supply apparatus according to claim 1, wherein the opening at the bottom of the tube is formed at an edge of the bottom of the tube. According to claim 1, wherein the opening of the lower end of the tube,
The first opening,
And a second opening perpendicular to said first opening. 8. The polycrystalline raw material supply apparatus according to claim 7, wherein the first opening and the second opening are in contact with each other. 8. The apparatus of claim 7, wherein the first opening is parallel to the surface of the lower lid and the second opening is perpendicular to the surface of the lower lid. 8. The apparatus of claim 7, wherein the lower lid is provided with a third opening and faces each other with the first opening at the bottom of the tube. 8. The apparatus of claim 7, wherein the bottom cover has a stopper formed on a surface facing the bottom of the tube, the stopper closing a second opening in the bottom of the tube. The polycrystalline raw material supply apparatus according to claim 11, wherein the height of the plug is the same as the height of the second opening of the bottom of the tube. 12. The apparatus of claim 11, wherein the height of the plug is higher than the height of the second opening at the bottom of the tube. The polycrystalline raw material supply device according to claim 1, wherein the polycrystalline raw material guide has a spiral shape that rotates from the upper end of the tube to the lower end of the tube with the connecting rod as a central axis. The polycrystalline raw material supply apparatus according to claim 1, wherein a cross section of the polycrystalline raw material guide has an inclined surface inclined from left to right or from right to left. The apparatus of claim 1, wherein the polycrystalline raw material guide and the tube are formed of the same material. The polycrystalline raw material supply apparatus according to claim 1, wherein a stopper protruding continuously or discontinuously is formed on an outer wall of the upper end of the tube. Crucible;
A heater for heating the crucible; And,
It includes a polycrystalline raw material supply device for supplying a polycrystalline raw material to the crucible,
The polycrystalline raw material supply apparatus,
A tube on which polycrystalline raw materials are loaded;
A lower cover blocking an opening at the bottom of the tube;
A connecting rod connected to the lower cover and penetrating the inside of the tube; And,
And a polycrystalline raw material guide device formed on an inner wall of the tube and rotating in a spiral manner with the connecting rod as a rotation axis.

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