KR20130026053A - Glass deposition apparatus for flat display - Google Patents

Abstract

PURPOSE: A glass deposition apparatus for a flat display is provided to easily replace a shield by using a shield support guide unit. CONSTITUTION: A deposition process is performed on a substrate for a flat panel display in a chamber. A shield(120) is arranged in the inner wall of the chamber and prevents a deposition material from being deposited on the inner wall of the chamber. A shield support guide unit(130) carries the shield in or out the chamber.

Description

Glass deposition apparatus for flat display

The present invention relates to a thin film deposition apparatus for a flat panel display, and more particularly, to a thin film deposition apparatus for a flat panel display that can easily replace the shield to prevent deposition of the deposition material on the inner wall of the chamber.

Flat displays are widely used in personal computers, monitors for TVs and computers. Such a flat display is variously classified into an LCD (Liquid Crystal Display), a PDP (Plasma Display Panel) and an OLED (Organic Light Emitting Diodes).

Among these flat panel displays, an organic light emitting display (OLED) is an ultra-thin display device that realizes color images by self-emission of organic materials. In view of its simple structure and high light efficiency, the next generation of promising flat panel displays It is attracting attention as a display.

The organic light emitting display OLED includes an anode, a cathode, and organic layers interposed between the anode and the cathode. Here, the organic layers include at least a light emitting layer and may further include a hole injecting layer, a hole transporting layer, an electron transporting layer, and an electron injecting layer in addition to the light emitting layer.

In addition, the organic light emitting display device (OLED) may be divided into a polymer organic light emitting device and a low molecular organic light emitting device according to an organic layer, in particular, a material forming a light emitting layer.

On the other hand, in order to realize full color, the light emitting layer needs to be patterned. In order to manufacture a large OLED, a direct patterning method using a FMM (Fine Metal Mask) and LITI (Laser Induced Thermal Imaging) The method using the method, the method using a color filter (color filter).

When manufacturing a large OLED by applying a mask method, a so-called horizontal upward deposition method in which a substrate and a patterned mask are horizontally disposed in a chamber and then deposited is applied.

The horizontal upward deposition method is a method of aligning a substrate and a mask disposed horizontally with respect to a bottom surface of a chamber or the like, bonding them together, and depositing organic material on a large substrate in a horizontal state.

Part of the problem in the OLED deposition process is the particle issue.

As described above, the OLED deposits organic material during the deposition process and implements a display based on the principle of emitting light by the deposited organic material. Thus, when particles are generated during the organic material deposition process, it becomes a problem of defects in the finished product.

Particles are generated in the deposition process as the deposition material sticks to the inner wall of the chamber and then falls off.

In order to solve this particle problem, a method of detachably coupling a shield that prevents deposition material from being deposited on the inner wall of the chamber in the deposition process and replacing the shield at predetermined intervals has been used.

However, this method has a safety problem because a person has to go inside the chamber and replace the shield. In addition, there is a problem that the productivity is reduced because the shield used by manual dismantling and installing a new shield.

Patent Publication KR 10-2003-0095579 (Samsung SDI Co., Ltd.), 2003.12.24

Therefore, the technical problem to be achieved by the present invention is to provide a thin film deposition apparatus for a flat panel display that can be drawn back to the inside of the chamber by replacing the shield used in the deposition process to the outside of the chamber and then replaced with a new shield.

According to an aspect of the present invention, a chamber in which a deposition process for a planar display substrate is performed, a shield disposed on an inner wall of the chamber and preventing deposition of deposition material onto an inner wall of the chamber during the deposition process; A flat display thin film deposition apparatus including a shield support guide unit provided inside the chamber to support the shield and guide the shield to be drawn and drawn out and into the chamber to replace the shield. Can provide.

The shield support guide unit may be a sliding guide unit that supports the shield to be slidably movable.

The shield may include a plurality of unit shields that are divided into each other along a sliding direction of the sliding guide unit.

One of the plurality of unit shields may include an insertion protrusion provided in the first unit shield, and an insertion groove into which the insertion protrusion is inserted may be provided in the second unit shield adjacent to the first unit shield.

Wherein the unit shield includes a central shield disposed in a central region of the chamber, adjacent to each other to form a through hole through which the deposition material passes, and a pair of side shields disposed on both sides of the central shield; Thin film deposition apparatus for a flat panel display.

The sliding guide unit may include a sliding center guide part for supporting the center shield to be slidably moved, and a sliding side guide part for supporting the side shields to be slidably movable.

The sliding center guide part includes a plurality of first sliding rollers to slidably support the center shield, and the sliding side guide part includes a plurality of second sliding rollers to slidably support the side shields. The first and second sliding rollers may be symmetrically arranged at both sides of the common roller support member.

The center shield is formed with a first roller bracket which is supported by the first sliding rollers while partially wrapping the first sliding rollers, and the second shield is partially wrapped with the second sliding rollers on the side shield. A second roller bracket may be formed that is supported on the field.

The sliding side guide part may include a plurality of third sliding rollers for slidably supporting the side shields in a position spaced apart from the second sliding rollers, and a roller support member for supporting the third sliding rollers. Can be.

The side shield may further include a third roller bracket which partially supports the third sliding rollers and is supported by the third sliding rollers.

The pair of side shields may include a left shield and a right shield disposed symmetrically in the chamber, and the chamber may be provided with a gate door through which the center shield, the left shield, and the right shield are individually entered. Can be.

The gate door includes a center gate door through which the center shield enters, a left gate door through which the left shield enters, and a right gate door through which the right shield enters, and includes the center gate door, the left and right sides. Gate doors may be provided in opposite directions on both side walls of the chamber.

A source for providing the deposition material toward the substrate is provided in the chamber, and is disposed in a lower region of the shield, and the shield is formed with a through hole in which the deposition material from the source is directed to the substrate. The substrate for a display may be an OLED.

Embodiments of the present invention, by drawing the shield used in the deposition process to the outside of the chamber through the shield support access unit and then replaced with a new shield and introduced into the chamber again, the person directly enters the inside of the chamber and the shield It is safe and productive because it does not replace.

1 is an exploded perspective view showing a thin film deposition apparatus for a flat panel display according to a first embodiment of the present invention.
2 is a plan view schematically showing the interior of the chamber in the thin film deposition apparatus for a flat panel display according to the first embodiment of the present invention.
3 is a cross-sectional view schematically showing the interior of the chamber in the thin film deposition apparatus for a flat panel display according to the first embodiment of the present invention.
4 is a perspective view showing a shield in a thin film deposition apparatus for a flat panel display according to a first embodiment of the present invention.
FIG. 5 is a front view illustrating one side wall of a chamber in which a central gate door through which a central shield is entered is provided in the thin film deposition apparatus for a flat display according to the first embodiment of the present invention.
FIG. 6 is a rear view of the chamber from the opposite direction of FIG. 5;
FIG. 7 is a perspective view illustrating a shield and a shield supporting guide unit in a thin film deposition apparatus for a flat display according to a first embodiment of the present invention.
8 is a cross-sectional view taken along line AA of FIG. 7.
9 is a perspective view showing a shield in a thin film deposition apparatus for a flat panel display according to a second embodiment of the present invention.
10 is a cross-sectional view taken along line BB of FIG. 9.

In order to fully understand the present invention, operational advantages of the present invention, and objects achieved by the practice of the present invention, reference should be made to the accompanying drawings and the accompanying drawings which illustrate preferred embodiments of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Like reference symbols in the drawings denote like elements.

Prior to the description with reference to the drawings, any of a liquid crystal display (LCD), a plasma display panel (PDP), and an organic light emitting diode (OLED) may be used as the flat panel display. However, in the present embodiment, the glass substrate for OLED (Organic Light Emitting Diodes) is regarded as a flat panel display.

Hereinafter, for convenience, a glass substrate for organic light emitting diodes (OLED) will be described as simply a substrate.

1 is an exploded perspective view showing a thin film deposition apparatus for a flat display according to a first embodiment of the present invention, Figure 2 is a schematic view of the interior of the chamber in the thin film deposition apparatus for a flat display according to the first embodiment of the present invention 3 is a cross-sectional view schematically showing the inside of a chamber in the thin film deposition apparatus for a flat display according to the first embodiment of the present invention, and FIG. 4 is a plan view for the flat display according to the first embodiment of the present invention. FIG. 5 is a perspective view illustrating a shield in a thin film deposition apparatus, and FIG. 5 is a front view showing one side wall of a chamber in which a central gate door through which a central shield enters and exits in a thin film deposition apparatus for a flat display according to a first embodiment of the present invention is illustrated. 6 is a rear view of the chamber viewed from the opposite direction of FIG. 5, and FIG. 7 is a shield and a shield in the planar display thin film deposition apparatus according to the first embodiment of the present invention. Resin and the guide unit is illustrated a perspective view, Figure 8 is a cross-sectional view taken along the line A-A of Fig.

1 to 8, the thin film deposition apparatus for a planar display according to the first embodiment of the present invention includes a chamber 110 in which a deposition process is performed on a substrate P, and an inner wall of the chamber 110. A shield 120 disposed in the chamber 110 and preventing the deposition material from being deposited on the inner wall of the chamber 110 during the deposition process, and provided in the chamber 110 to support the shield 120, and to replace the shield 120. The shield 120 includes a shield support guide unit 130 for guiding the shield 120 to be drawn out and drawn into and out of the chamber 110.

The chamber 110 forms the place where the deposition process with respect to the board | substrate P advances. The inside of the chamber 110 forms a vacuum atmosphere so that the deposition process on the substrate P can be reliably performed. Therefore, although not shown, a vacuum pump (not shown) may be connected to one side of the chamber 110 to suck the air in the chamber 110 to maintain the vacuum in the chamber 110. In addition, a gate valve (not shown) forming an access passage of the substrate P is coupled to one side of the chamber 110.

The chamber 110 is provided with gate doors 141, 142, and 143 through which the shield 120 extends into and out of the chamber 110. The gate doors 141, 142, and 143 are opened so that the shield 120 is drawn out and drawn into and out of the chamber 110.

In this embodiment, the gate doors 141, 142, 143 are opened and closed by rotation, and the gate doors 141, 142, 143 are provided with handles W1, W2, and W3 for operation.

In addition, when the gate doors 141, 142, 143 are closed, the inside of the chamber 110 should be a vacuum atmosphere, so that a sealing member (not shown) is provided in the gate doors 141, 142, 143.

Installation positions of the gate doors 141, 142, and 143 will be described later for convenience of description.

Meanwhile, a source (S) for providing a deposition material is provided in the chamber 110. The present embodiment corresponds to a thin film deposition apparatus for a horizontal flat display in which the source S is spaced apart from the lower region of the substrate P, but the present invention is not limited thereto.

A mask (not shown) is disposed between the substrate P and the source S. FIG. Such a mask is contact-supported to the surface of the substrate P in order to proceed with deposition in a predetermined pattern on the surface of the substrate P. FIG. The mask is provided with a plurality of through holes (not shown) through which the deposition material from the source S passes.

Meanwhile, the deposition material emitted from the source S may be scattered toward the inner wall of the chamber 110 in addition to the substrate P. Thus, the deposition material scattered toward the inner wall of the chamber 110 is attached to the inner wall of the chamber 110. It is the shield 120 that prevents it from becoming. That is, the shield 120 is disposed on the inner wall of the chamber 110 and serves to prevent the deposition material from being deposited on the inner wall of the chamber 110 during the deposition process. Therefore, the source S is disposed in the lower region of the shield 120.

The shield 120 includes a center shield 121 disposed in a central region of the chamber 110 and forming a through hole h through which deposition material passes, and a pair of shields disposed on both sides of the center shield 121. Side shields 122 and 123.

The center shield 121 and the side shields 122 and 123 partially overlap each other so that the deposition material does not escape from the deposition process between the center shield 121 and the side shields 122 and 123.

The center shield 121 has a flat plate shape. The pair of side shields 122 and 123 may have a “a” shape, and may include a left shield 122 and a right shield 123 disposed symmetrically in the chamber 110.

In the present embodiment, two through holes h are provided in the central shield 121, which is merely an example of a process in which a deposition process is performed on two substrates P in one chamber 110. The invention is not limited to this configuration.

Meanwhile, as described above, the chamber 110 is provided with gate doors 141, 142, and 143 through which the center shield 121, the left shield 122, and the right shield 123 are individually entered.

The gate doors 141, 142, and 143 include a central gate door 141 through which the center shield 121 enters, a left gate door 142 through which the left shield 122 enters, and a right gate through which the right shield 123 enters and exits. The door 143 includes a central gate door 141 and left and right gate doors 142 and 143 provided in opposite directions on both side walls of the chamber 110.

Accordingly, the center, left and right gate doors 141, 142, 143 to which the center shield 121, the left shield 122, and the right shield 123 enter and exit are separately provided in the chamber 110, and the center shield 121 is provided. Since the direction in and out of the chamber 110 and the direction in which the left shield 122 and the right shield 123 enter and exit the chamber 110 are opposite to each other with the chamber 110 interposed therebetween, Since the interference is not generated in the operation of entering the left and right shields 121, 122, 123, work time is shortened.

Meanwhile, the shield support guide unit 130 includes a sliding guide unit 130 that supports the center shield 121, the left shield 122, and the right shield 123 in a slidable manner.

By the sliding guide unit 130, the center shield 121, the left shield 122, and the right shield 123 are slidably moved in and out of the chamber 110.

In addition, the sliding guide unit 130, the center shield 121, the left shield 122 and the right shield 123 is configured independently, so that the sliding movement irrespective of the movement of each other.

Therefore, the sliding guide unit 130 supports the sliding center guide part 131 for supporting the center shield 121 so that the sliding movement is possible, and the left shield 122 and the right shield 123 for sliding movement. And sliding side guide parts 132 and 133.

The sliding center guide part 131 includes a plurality of first sliding rollers R1 supporting the center shield 121 to be slidably movable.

The sliding side guide parts 132 and 133 include a plurality of second sliding rollers R2 and R3 for slidingly supporting the left shield 122 and the right shield 123.

Further, the first and second sliding rollers R2 and R3 are symmetrically arranged on both sides of the common roller support member Y1.

The common roller support member Y1 consists of an arm coupled to the inner wall of the chamber 110. First and second sliding rollers R1, R2, and R3 are rotatably coupled to both sides of the common roller support member Y1, respectively. In addition, the common roller support members Y1 are provided in pairs spaced apart from each other.

Meanwhile, the central shield 121 is provided with a first roller bracket 124 that partially supports the first sliding rollers R1 and is supported by the first sliding rollers R1. The left shield 122 and the right shield 123 are provided with second roller brackets 125 and 126 which partially support the second sliding rollers R2 and R3 and are supported by the second sliding rollers R2 and R3.

Since the first and second roller brackets 124, 125, and 126 are supported by the first and second sliding rollers R1, R2, and R3, respectively, the center, left, and right shields 121, 122, 123 are respectively supported by the first and second sliding rollers ( Sliding along the R1, R2, R3).

In addition, since the first and second roller brackets 124, 125, and 126 partially wrap the first and second sliding rollers R1, R2, and R3, respectively, the center, left, and right shields 121, 122, and 123 respectively slide the first and second slidings. The sliding movement is performed without leaving the rollers R1, R2, and R3.

Meanwhile, the sliding side guide parts 132 and 133 may include a plurality of third sliding rollers R4 and slidably supporting the left and right shields 122 and 123 in a position spaced apart from the second sliding rollers R2 and R3. R5) and roller support members Y2 and Y3 for supporting the third sliding rollers R4 and R5.

The roller support members Y2 and Y3 are made of an arm that is coupled to the inner wall of the chamber 110 similarly to the common roller support member Y1 described above.

In addition, the left and right shields 122 and 123 are provided with third roller brackets 127 and 128 that partially support the third sliding rollers R4 and R5 and are supported by the third sliding rollers R4 and R5.

As a result, the left and right shields 122 and 123 are stably supported inside the chamber 110 because they are supported by two points by the second sliding rollers R2 and R3 and the third sliding rollers R4 and R5. And sliding movement is possible.

Hereinafter, the operation of the thin film deposition apparatus for a flat panel display according to the present embodiment will be described.

In order to deposit a thin film on the substrate P, the source S emits a deposition material, and the deposition material penetrating through the through hole h of the central shield 121 is deposited on the substrate P. The deposition material that does not pass through the through hole h of the center shield 121 is attached to the inner walls of the center, left and right shields 121, 122, and 123, and after the predetermined number of deposition processes are performed, the center, left and right shields ( 121, 122, 123 are replaced.

This replacement of the center, left and right shields 121, 122, 123 is made independently. That is, all of the center, left, and right shields 121, 122, and 123 may be replaced, and each may be replaced individually according to the degree of contamination.

In the present embodiment, for convenience of description, first, all of the center, left, and right shields 121, 122, and 123 are replaced.

The center gate door 141 is opened to draw the center shield 121 to the outside of the chamber 110. Since the center shield 121 is provided with a first roller bracket 124 supported by the first sliding rollers R1, the center shield 121 slides along the first sliding rollers R1 to allow the chamber 110 to be moved. ) Is drawn outside.

Meanwhile, the left and right shields 122 and 123 are drawn out of the chamber 110 through the left and right gate doors 142 and 143.

Since the left and right shields 122 and 123 are provided with the second and third roller brackets 125, 126, 127 and 128 supported by the second and third sliding rollers R2, R3, R4 and R5, the left and right shields 122 and 123 are provided. Sliding is moved along the second and third sliding rollers (R2, R3, R4, R5) is drawn out of the chamber 110.

Next, new center, left and right shields 123 are drawn into the chamber 110 through the center, left and right gate doors 141, 142, 143.

The center shield 121 is slidably moved along the first sliding rollers R1 to be introduced into the chamber 110, and the left shield 122 and the right shield 123 are formed of the second and third sliding rollers R2, Sliding along the R3, R4, R5 is drawn into the chamber 110.

As such, according to the present exemplary embodiment, the shield 120 used in the deposition process is drawn out of the chamber 110 through the shield support guide unit 130, and then replaced with a new shield 120 to be replaced with the chamber ( By being drawn into the interior of 110, there is no need for a person to enter the interior of the chamber 110 to replace the shield 120, and thus, the replacement time of the shield 120 is short.

In addition, since the shield 120 is separated into the center, left and right shields 121, 122 and 123, the shield 120 can be replaced separately according to the degree of contamination of the center, left and right shields 121, 122 and 123, thereby reducing the replacement cost of the shield 120. Can be.

In addition, the center, left and right gate doors 141, 142, 143, through which the center, left and right shields 121, 122, 123 are drawn out and drawn in, are independently provided, and the center gate door 141 and the left and right gate doors 142, 143 are chambers. Since both sides of the wall 110 are provided in opposite directions from each other, interference is not generated in the process of replacing the center, left, and right shields 121, 122, and 123, and the replacement is convenient and the replacement time is reduced.

FIG. 9 is a perspective view of the shield 120a in the planar display thin film deposition apparatus according to the second embodiment of the present invention, and FIG. 10 is a cross-sectional view taken along line B-B of FIG. 9.

This embodiment differs only in the configuration of the shield 120a when compared with the first embodiment, and in other configurations is the same as that of the first embodiment of FIGS. 1 to 8, and therefore, the shield of the present embodiment ( The configuration of 120a) will be mainly described.

In the present embodiment, the shield 120a includes a plurality of unit shields 121a, 122a, and 123a which are divided into each other along a sliding direction of the sliding guide unit 130.

In the first embodiment, since the length of the shield 120 corresponds to the length of the chamber 110, the shield 120a is divided in this embodiment, whereas a large work space is required for the withdrawal and withdrawal of the shield 120. Since a plurality of unit shields 121a, 122a, and 123a are formed, the replacement operation can be performed even in a narrow place, thereby increasing space utilization.

In addition, in the case of the first embodiment, unlike the worker feels the burden by the weight of the shield 120, in the present embodiment, the shield 120a is composed of a plurality of divided unit shields 121a, 122a, and 123a and unit shields. (121a, 122a, 123a) Since one weight is light, the operator can easily perform the replacement work.

In addition, the shield 120a is disposed in the central region of the chamber 110 and adjacent to each other to form a through hole h through which the deposition material passes, and the central unit shield 121a of the central unit shield 121a. The arrangement on both sides includes a pair of side unit shields 122a and 123a.

The pair of side shields 122a and 123a include a left unit shield 122a and a right unit shield 123a which are disposed symmetrically in the chamber 110.

The center, left, and right unit shields 121a, 122a, and 123a are adjacent to the central unit shields 121a and the adjacent left unit shields 122a to be adjacent to each other to prevent the deposition material from escaping. The unit shields 123a overlap each other.

In addition, a first roller bracket 124 is provided in each of the central unit shields 121a. Therefore, the central unit shield 121a is slidably moved along the first sliding rollers R1 to be withdrawn and drawn into and out of the chamber 110.

Similarly, second and third roller brackets 125, 126, 127, 128 are provided on the left and right unit shields 122a, 123a, respectively. Accordingly, each of the left and right unit shields 122a and 123a is slidably moved along the second and third sliding rollers R2, R3, R4, and R5 to be withdrawn and drawn into and out of the chamber 110.

On the other hand, since the center, left and right unit shields 121a, 122a, and 123a are divided and provided, in order to be drawn out of the chamber 110, adjacent unit shields 122a are adjacent to each other. ) And adjacent right unit shield 123a should be detachably coupled.

Accordingly, as shown in FIG. 10, an insertion protrusion d is provided in one of the center, left, and right unit shields 121a, 122a, and 123a, and the first unit shield 122a3 is provided. Adjacent to the second unit shield 122a4 is provided with an insertion groove (e) into which the insertion protrusion (d) is inserted.

FIG. 10 illustrates the insertion protrusion d of the first unit shield 122a3 and the insertion groove e of the second unit shield 122a4 belonging to the left unit shield 122a for convenience of description. The protrusion d and the insertion groove e are provided in both the center, left and right unit shields 121a, 122a, and 123a.

The insertion protrusion (d) and the insertion groove (e) is provided in a portion where the central unit shield 121a, the left unit shield 122a, and the right unit shield 123a overlap each other.

Hereinafter, the operation of the thin film deposition apparatus for a flat panel display according to the present embodiment will be described.

The replacement of the center, left and right unit shields 121a, 122a, 123a is made independently. That is, all of the center, left, and right unit shields 121a, 122a, and 123a may be replaced, and may be replaced individually according to the degree of contamination.

In the present embodiment, for convenience of description, first, all of the center, left, and right unit shields 121a, 122a, and 123a will be replaced.

The central gate door 141 is opened to draw the central unit shield 121a to the outside of the chamber 110. Since the central unit shield 121a is provided with a first roller bracket 124 supported by the first sliding rollers R1, the central unit shield 121a is slidably moved along the first sliding rollers R1 to form a chamber. It is withdrawn to the outside of 110.

At this time, since the insertion protrusion d of the central unit shield 121a is inserted into the insertion groove e of the neighboring central unit shield 121a, when the central unit shield 121a is pulled out, the entire center unit shield 121a is pulled out. Is slidably moved out of the chamber 110.

Meanwhile, the left and right shields 122 and 123 are drawn out of the chamber 110 through the left and right gate doors 142 and 143.

Similarly, in the case of the left and right unit shields 122a and 123a, the insertion protrusions d of the left and right unit shields 122a and 123a are inserted into the grooves e of the adjacent left and right unit shields 122a and 123a. Since the left unit shield 122a is pulled out, the entire left unit shield 122a is slidably moved out of the chamber 110. This sliding movement is the same with the right unit shield 123a.

In the drawing process, the insertion protrusions d of the center, left and right unit shields 121a, 122a and 123a are released from the insertion grooves e of the adjacent center, left and right unit shields 121a, 122a and 123a. The center, left and right unit shields 121a, 122a, and 123a may be separately collected into each unit shield.

Next, new center, left and right unit shields 121a, 122a, 123a are introduced into the chamber 110 through the center, left and right gate doors 141, 142, 143.

At this time, the insertion protrusions d of the center, left and right unit shields 121a, 122a and 123a are inserted into the insertion grooves e of the adjacent center, left and right unit shields 121a, 122a and 123a. The left and right unit shields 121a, 122a, and 123a are introduced into the chamber 110.

As described above, according to the present embodiment, since the shield 120a used in the deposition process is made of a plurality of unit shields 121a, 122a, and 123a, only the highly contaminated shield 120a can be replaced separately. This is reduced.

In addition, since the shield 120a is formed of a plurality of unit shields 121a, 122a, and 123a, the replacement work can be performed even in a narrow place, thereby increasing the space utilization.

In addition, since the weight of the unit shield (121a, 122a, 123a) single unit is light, the operator can easily perform the replacement operation.

Although the present embodiment has been described in detail with reference to the drawings, the scope of the present invention is not limited to the above-described drawings and descriptions.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. Accordingly, such modifications or variations are intended to fall within the scope of the appended claims.

110: chamber 120, 120a: shield
121: center shield 122: left shield
123: right shield 124: first roller bracket
125,126: second roller bracket 127,128: third roller bracket
121a: center unit shield 122a: left unit shield
123a: right unit shield 130: sliding guide unit
141: center gate door 142: left gate door
143: right gate door R1: first sliding roller
R2, R3: second sliding roller R4, R5: third sliding roller
P: substrate Y1: common roller support member
Y2, Y3: Roller support member h: Through hole
d: Insertion protrusion e: Insertion groove
S: sauce

Claims (13)

A chamber in which a deposition process for a planar display substrate is performed;
A shield disposed on an inner wall of the chamber and preventing deposition of deposition material onto an inner wall of the chamber during the deposition process; And
And a shield support guide unit provided in the chamber to support the shield and to guide the shield to be drawn out and drawn into and out of the chamber for replacement of the shield. Thin film deposition apparatus. The method of claim 1,
The shield support guide unit,
Thin film deposition apparatus for a flat display, characterized in that the sliding guide unit for supporting the shield in a sliding movement. The method of claim 2,
The shield
Thin film deposition apparatus for a flat display, characterized in that it comprises a plurality of unit shields are divided into each other along the sliding direction in the sliding guide unit. The method of claim 3,
One of the plurality of unit shields, the first unit shield is provided with an insertion protrusion, the second unit shield adjacent to the first unit shield is provided with a flat groove for inserting the insertion protrusion is provided Thin film deposition apparatus. The method of claim 3,
The unit shield,
A central shield disposed in a central region of the chamber and adjacent to each other to form a through hole through which the deposition material passes; And
And a pair of side shields arranged on both sides of the center shield. The method of claim 5,
The sliding guide unit,
A sliding center guide part which supports the center shield in a slidable manner; And
And a sliding side guide part for supporting the side shields to be slidably movable. The method according to claim 6,
The sliding center guide portion includes a plurality of first sliding rollers for slidably supporting the center shield,
The sliding side guide part includes a plurality of second sliding rollers for slidably supporting the side shields,
And the first and second sliding rollers are arranged symmetrically on both sides of the common roller support member. The method of claim 7, wherein
The central shield is formed with a first roller bracket which partially supports the first sliding rollers and is supported by the first sliding rollers,
And a second roller bracket which is supported on the second sliding rollers while partially enclosing the second sliding rollers on the side shield. The method of claim 5,
The sliding side guide portion,
A plurality of third sliding rollers for slidably supporting the side shields in a position spaced apart from the second sliding rollers; And
Thin film deposition apparatus for a flat display, characterized in that it further comprises a roller support member for supporting the third sliding rollers. 10. The method of claim 9,
In the side shield,
Thin film deposition apparatus for a flat panel display, characterized in that the third roller bracket is partially formed while surrounding the third sliding rollers are further supported. The method of claim 5,
The pair of side shields includes a left shield and a right shield disposed symmetrically in the chamber;
The chamber is provided with a thin film deposition apparatus for a flat panel display, characterized in that the central door, the left shield and the right shield is provided with a gate door for entering and exiting respectively. The method of claim 11,
The gate door,
A central gate door through which the central shield is entered;
A left gate door through which the left shield enters and exits; And
A right gate door through which the right shield enters and exits,
And the center gate door and the left and right gate doors are provided in opposite directions on both side walls of the chamber. The method of claim 1,
A source for providing the deposition material toward the substrate is provided inside the chamber and is disposed in the lower region of the shield,
The shield is formed with a through hole through which the deposition material from the source is directed to the substrate.
Thin film deposition apparatus for a flat panel display, characterized in that the substrate for a flat panel display.

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