KR20120137244A - Halogen heater lamp unit and heat treatment apparatus - Google Patents

Abstract

PURPOSE: A halogen heater lamp unit and a heat treatment apparatus are provided to extend lifetime by controlling the overheating of a vertical part. CONSTITUTION: A heat insulating housing(11) is made of an insulating material that surrounds a heat treatment space which heats up a work. A cylindrical shape is arranged in order to be inserted and passed through an inserting hole which is formed on an upper wall of the heat insulating housing. A halogen heater lamp(20) comprises a horizontal part and an u-shaped light emitting tube(21). The light emitting tube comprises a vertical part, which is extended in a vertical direction, in both ends thereof. A filament(24) is installed on a horizontal part within the light emitting tube. Each vertical part of halogen heater lamp is arranged to be inserted and pass through while interposing a gap between an outer circumferential surface of the vertical part within the cylindrical shape and an inner circumferential surface of the cylindrical shape.

Description

Halogen heater lamp unit and heat treatment device {HALOGEN HEATER LAMP UNIT AND HEAT TREATMENT APPARATUS}

TECHNICAL FIELD This invention relates to the halogen heater lamp unit and heat processing apparatus used for heat processing of a solar cell board | substrate.

In the manufacturing method of a solar cell substrate, etc., the process of heat-processing in the area | region where the atmospheric temperature was maintained at high temperature about 1000 degreeC is needed, As an apparatus which performs such heat processing, for example, as shown in FIG. In the upper wall of the heat insulating housing 41 made of the heat insulating material surrounding the heat treatment space H for heating the W), insertion holes 45 and 45 are provided, and as a heat source for heating the work W, the horizontal portion is provided. U-shaped light emitting tube 51 made of 51A and vertical portions 51B and 51C extending in the vertical direction at both ends thereof, and having a filament (shown in at least horizontal portion 51A in light emitting tube 51). The apparatus in which the halogen heater lamp 50 provided with (not shown) is provided so that the vertical parts 51B and 51C can be inserted through the insertion holes 45 and 45 is disclosed (for example, refer patent document 1).

In addition, in FIG. 3, 43 is an inflow port into which the conveyance means 42 on which the workpiece | work W was mounted is carried in, and 44 is a delivery outlet in which the said conveyance means 42 is carried out.

Japanese Patent Publication No. 2006-275499

However, in this heat treatment apparatus, there is a problem that breakage of the light emitting tube of the halogen heater lamp occurs when used over a long period of time.

This problem was verified. As the outer circumferential surface of the vertical part of the light emitting tube of the halogen heater lamp is surrounded by the wall by the heat insulating material, the light emitting tube is in an overheated state, and the work is heated in that state. It is assumed that impurities adhere to the light emitting tube, and the light emitting tube deteriorates due to reaction between the light emitting tube and the impurity.

This invention is made | formed based on the above circumstances, Comprising: It aims at providing the halogen heater lamp unit and heat processing apparatus of long lifetime which a damage of a light tube does not generate | occur | produce, even if it uses for a long time.

The halogen heater lamp unit of the present invention comprises a U-shaped light emitting tube comprising a horizontal portion and a vertical portion extending in the vertical direction at both ends thereof, the halogen heater lamp having a filament provided at least in the horizontal portion of the light emitting tube;

It is characterized by including the tubular body provided around the vertical part of the said halogen heater lamp so that the clearance gap may be provided between the outer peripheral surface of the said vertical part.

In the halogen heater lamp unit of the present invention, the halogen heater lamp is preferably configured such that an end portion of each vertical portion of the light emitting tube of the halogen heater lamp is supported on the upper end of the cylindrical body.

The heat treatment apparatus of the present invention comprises a heat insulating housing made of a heat insulating material surrounding a heat treatment space for heating the work;

A cylindrical member installed to be inserted through an insertion hole formed in an upper wall of the heat insulating housing;

A heat source for heating a work, comprising: a U-shaped light emitting tube comprising a horizontal portion and a vertical portion extending in a vertical direction at both ends thereof, the heat treatment apparatus including a halogen heater lamp provided with a filament at least in a horizontal portion of the light emitting tube; ,

The said halogen heater lamp is provided so that each vertical part of the light emitting tube of the said halogen heater lamp may be inserted through the clearance gap between the outer peripheral surface of the said vertical part and the inner peripheral surface of the said cylindrical body in the said cylindrical body. .

In the heat treatment apparatus of this invention, it is preferable that the magnitude | size of the clearance gap between the outer peripheral surface of the said vertical part and the inner peripheral surface of the said cylindrical body is 5-10 mm.

Moreover, in the heat processing apparatus of this invention, it is preferable that the said cylindrical body consists of quartz glass.

Moreover, in the heat processing apparatus of this invention, it is preferable that the said halogen heater lamp is set as the structure by which the edge part of each vertical part of the light emitting tube of a halogen heater lamp is supported by the upper end of the said cylindrical body.

Moreover, in the heat processing apparatus of this invention, the said cylindrical body is inserted in the insertion hole formed in the upper wall of the said heat insulation housing, and is inserted through the gap between the outer peripheral surface of the said cylindrical body and the inner peripheral surface of the said insertion hole, and is installed. It is desirable to have a structure which is.

Moreover, in the heat processing apparatus of this invention, it is preferable that the magnitude | size of the clearance gap between the outer peripheral surface of the said cylindrical body and the inner peripheral surface of the said insertion hole is 0-10 mm.

Moreover, in the heat processing apparatus of this invention, it is preferable that the said cylindrical body is supported by the said heat insulation housing, and is supported by the said heat insulation housing, and is pinched by the pinch cylindrical body holder.

According to the halogen heater lamp unit of the present invention, since the tubular body is supported around the vertical portion of the light emitting tube with a gap between the outer peripheral surface of the vertical portion, hot air flow caused by the halogen heater lamp is applied around the vertical portion. The gap can be passed without remaining, and therefore, when used as a heating source of the heat treatment apparatus, even if it is used over a long period of time, breakage of the light emitting tube does not occur and a long service life is obtained.

According to the heat treatment apparatus of this invention, in the cylindrical body inserted into the insertion through-hole formed in the upper wall of the heat insulation housing, a halogen heater lamp has a vertical part of the light-emitting tube which interposes the clearance gap between the outer peripheral surface of the said vertical part, and a cylindrical inner peripheral surface. It is installed to pass through the state. For this reason, even though the outer peripheral surface of the vertical portion does not directly contact the upper wall of the heat insulating housing, the hot air generated in the heat treatment space can be discharged to the outside by discharging the gap without remaining around the vertical portion. Suppressed. Therefore, even if impurities evaporated from the work adhere to the outer circumferential surface of the vertical portion, the reaction product is suppressed from reacting with the light emitting tube to suppress the formation of the reactant on the outer circumferential surface. Long life is obtained.

BRIEF DESCRIPTION OF THE DRAWINGS It is sectional drawing for description which shows an example of the structure of the heat processing apparatus of this invention.
FIG. 2 is a plan view for explaining the halogen heater lamp and the cylindrical body in the heat treatment apparatus of FIG. 1. FIG.
3 is a cross-sectional view illustrating the structure of a conventional heat treatment apparatus.

Hereinafter, the present invention will be described in detail.

[Heat treatment apparatus]

BRIEF DESCRIPTION OF THE DRAWINGS Explanatory cross section which shows an example of the structure of the heat processing apparatus of this invention, FIG. 2: is a top view for explanatory description of the halogen heater lamp and the cylindrical body in the heat processing apparatus of this invention.

The heat treatment apparatus of the present invention includes a cylindrical body (30, 30), a horizontal portion (21A) and both ends thereof provided to be inserted through the heat insulating housing (11), the insertion holes (15, 15) formed in the upper wall (11A). The halogen heater lamp 20 provided with the U-shaped light-emitting tube 21 which consists of the vertical part 21B, 21C extended in a vertical direction is provided.

In this heat treatment apparatus, a plurality of horizontal parts 21A of the six halogen heater lamps 20 are arranged in parallel with the upper wall of the heat insulating housing 11 and in the light emitting tube 21 of the halogen heater lamp 20. A processing block formed side by side in a direction perpendicular to the horizontal portion 21A (the direction perpendicular to the ground in FIG. 1) is provided with a light emitting tube of the halogen heater lamp 20 in parallel with the upper wall of the heat insulating housing 11. 1 to 8 blocks are provided side by side in a direction perpendicular to the horizontal portion 21A of the 21. FIG.

[Insulation housing]

The heat insulating housing 11 which comprises the heat processing apparatus of this invention consists of a heat insulating material, and the inside becomes the heat processing space H which heats the workpiece | work W. As shown in FIG.

The inlet 13 which carries in conveyance means 12, such as a mesh belt conveyor, for conveying the workpiece | work W, respectively, to the side wall 11B, 11C which the heat insulation housing 11 opposes, and the said The carry-out port 14 which carries out the conveyance means 12 from the heat processing space H is provided.

As a heat insulating material which comprises the heat insulating housing 11, what is necessary is just to have heat insulation which can maintain the atmospheric temperature in the heat processing space H uniformly, For example, ceramic, glass wool, calcium silicate, lock wool, fire-resistant heat insulation lead etc. Can be used.

The insertion holes 15 and 15 formed in the heat insulation housing 11 are columnar in cross section, for example.

The inner diameters of the insertion holes 15 and 15 are different depending on the outer diameters of the cylindrical bodies 30 and 30, for example, φ25 to φ30mm.

[Cylindrical body]

The cylindrical bodies 30 and 30 constituting the heat treatment apparatus of the present invention are cylindrical, for example, and are provided in the insertion holes 15 and 15 formed in the upper wall 11A of the heat insulating housing 11, and the cylindrical bodies are formed. Although the outer peripheral surface of 30 and 30 may be provided in the state which contacted the inner peripheral surface of the insertion hole 15 and 15, in particular, the outer peripheral surface of the said cylindrical body 30 and 30 and the inner peripheral surface of the insertion hole 15 and 15 are mentioned. It is preferable to be inserted through and installed in the state through a clearance gap between them.

Specifically, the cylindrical bodies 30 and 30 are mounted on the heat insulating housing 11 to the recessed portions of the holder support arms 37 and 37 extending outward from the top wall 11A of the heat insulating housing 11. It is supported by the said heat insulating housing 11 by being pinched by the pinch cylindrical body holders 35 and 35 which were put and supported.

The gap between the outer circumferential surfaces of the cylindrical bodies 30 and 30 and the inner circumferential surfaces of the insertion holes 15 and 15 is preferably an annular annular void having a uniform thickness in cross section over its entire circumference.

The size of the gap between the outer circumferential surfaces of the cylindrical bodies 30 and 30 and the inner circumferential surfaces of the insertion holes 15 and 15, that is, the thickness of the annular void R1 is preferably 0 to 10 mm, more preferably 5 to 8 mm. to be.

The size of the gap between the outer circumferential surfaces of the cylindrical bodies 30 and 30 and the inner circumferential surfaces of the insertion holes 15 and 15 is in the above range, whereby the temperature in the heat insulating housing 11 can be maintained at a constant temperature, and the heat insulating housing ( The hot air flow in 11) can be passed without remaining in the gap. In addition, when the size of the gap is excessive, it is difficult to maintain the temperature in the heat-insulating housing 11 (heat treatment space H) at a constant temperature.

In particular, when the size of the gap is 5 mm or more, natural convection occurs in the gap, so that hot air flow in the thermally insulating housing 11 can be circulated without remaining in the gap.

It is preferable that the cylindrical body 30, 30 is provided in the state which the upper part and the lower part protrude on the lower surface and upper surface of the upper wall of the heat insulation housing 11, respectively.

By providing in such a state, it is possible to reliably naturally discharge hot air from the heat treatment space H to the outside of the heat treatment apparatus.

The material constituting the tubular bodies 30 and 30 has durability that does not cause deformation or damage at an ambient temperature in the heat treatment space H at the time of heating the workpiece W, and furthermore, the workpiece W It is preferable not to generate a contamination in the workpiece | work W at the ambient temperature in the heat processing space H at the time of heating of the heat, and to have a thermal conductivity higher than the thermal conductivity of the heat insulating material which forms the heat insulation housing 11, For example, metal, such as quartz glass, ceramic, stainless steel, etc. can be used, It is preferable to use quartz glass especially.

It is considered that the cylindrical bodies 30 and 30 are formed of a material having a thermal conductivity higher than that of the heat insulator forming the heat insulating housing 11, so that overheating of the vertical portions 21B and 21C of the light emitting tube 21 is suppressed. .

Specifically, in a conventional heat treatment apparatus having a configuration in which no tubular body is provided, heat of the hot air flows almost without heat transfer to the heat insulating member when the heat flow passes between the vertical portion of the light emitting tube and the heat insulating member. Since it heats to a tube, a light emitting tube receives heat from a filament, receives heat from a hot air, and overheats, and it is estimated that a light tube and an impurity react.

By the way, in the heat processing apparatus of this invention which has the structure provided with the cylindrical bodies 30 and 30, when a hot air flows between the vertical part 21B, 21C of the light emitting tube 21, and the heat insulation housing 11, the said Heat of the hot air flows hardly to the heat insulating housing 11, but heats to the vertical portions 21B and 21C of the light emitting tube 21, and the heat insulating material of the tubular bodies 30 and 30 constitutes the heat insulating housing 11. Since it is made of a material having a higher thermal conductivity than that of heat, the amount of heat received by the cylindrical bodies 30 and 30, and the amount of heat transfer to the vertical portions 21B and 21C of the light emitting tube 21 from the conventional one, are estimated to be reduced. do.

For this reason, the light emitting tube 21 receives heat from the filament 24 and receives heat from the hot air flow, but the amount of heat transfer from the hot air flow decreases as compared with the prior art, so that the light emitting tube 21 is overheated. Is suppressed, and as a result, it is thought that the reaction of the light emitting tube 21 and impurities can be suppressed.

The thickness of the cylindrical body 30, 30 is 0.5-3 mm, for example, Preferably it is 1.5-2.5 mm.

[Halogen heater lamp]

The halogen heater lamp 20 which comprises the heat processing apparatus of this invention is a heat source which heats the workpiece | work W, and both ends are welded and the sealing part 22a, 22b was formed, for example, transparent materials, such as quartz glass, etc. A straight tube light emitting tube 21 is provided. The filament 24 made of, for example, tungsten, is provided in at least the horizontal portion 21A in the light emitting tube 21 so as to extend in the tubular direction so that the filament 24 made of, for example, tungsten does not come into contact with the light emitting tube 21. Is enclosed.

The filament 24 is connected to an inner lead 24a for power supply at one end thereof, and an inner lead 24b for power supply is connected to the other end thereof, and the inner leads 24a and 24b are connected to each other. Each of the external leads 28a and 28b extends in the tube axis direction in the vertical portions 21B and 21C of the light emitting tube 21 and through the metal foils 29a and 29b hermetically embedded in the sealing portions 22a and 22b. Is electrically connected to. The external leads 28a and 28b are electrically connected to a power source (not shown) via the feed lines 27a and 27b.

In the halogen heater lamp 20, each of the vertical portions 21B, 21C of the light emitting tube 21 has an outer circumferential surface of the vertical portions 21B, 21C and the cylindrical body 30 in the cylindrical body 30, 30. , 30 is supported so as to pass through the gap between the inner circumferential surfaces of the tube.

In addition, the halogen heater lamp 20 is in a state in which the horizontal portion 21A extends in parallel with the work W, and the vertical portions 21B and 21C protrude outward of the heat insulating housing 11. It is in a state.

Specifically, the cylindrical body portions 26a and 26b made of a ceramic such as stair tight are placed on the vertical portions 21B and 21C of the light emitting tube 21 of the halogen heater lamp 20. Lamp bases 25a and 25b to have are respectively provided, for example through an inorganic adhesive agent. In the body portions 26a and 26b of the lamp bases 25a and 25b, annular recessed grooves 23a and 23b are formed in the outer circumferential wall in a state extending over the entire circumference.

On the other hand, the disk-shaped flanges 31 and 31 made of metal, such as stainless steel, are provided in the upper end of the cylindrical body 30, 30, for example. The flanges 31 and 31 are formed with locking recesses 32 and 32 having a substantially quadrangular shape.

The annular concave groove 23a of the lamp base 25a along the vertical portion 21B of the light emitting tube 21 of the halogen heater lamp 20 faces the locking concave portion 32 of the flange 31. The two side edges 33 and 33 are slide-fitted and hung by Ni wire as needed. The annular recess 23b of the lamp base 25b along the vertical portion 21C of the light emitting tube 21 of the halogen heater lamp 20 faces the locking recess 32 of the flange 31. The two side edges 33 and 33 are slide-fitted and hung by Ni wire as needed. Thereby, the halogen heater lamp 20 is supported in the state suspended in the cylindrical body 30,30.

The halogen heater lamp 20 is thus supported by the tubular bodies 30 and 30, whereby the annular voids are formed on the upper ends of the tubular bodies 30 and 30 at the locking recesses 32 and 32 of the flanges 31 and 31. (R2) is exposed, whereby the upper ends of the tubular bodies 30 and 30 communicate with the atmosphere.

The gap between the outer circumferential surfaces of the vertical portions 21B and 21C of the halogen heater lamp 20 and the inner circumferential surfaces of the cylindrical bodies 30 and 30 is preferably an annular void having a uniform thickness in cross section over its entire circumference.

The size of the gap between the outer circumferential surfaces of the vertical portions 21B and 21C and the inner circumferential surfaces of the cylindrical bodies 30 and 30 and the thickness of the annular void R2 are preferably 5 to 10 mm, more preferably 5 to 8 mm, Especially preferably, it is 5 mm.

Since the size of the gap between the outer circumferential surface of the vertical portions 21B and 21C and the inner circumferential surface of the cylindrical bodies 30 and 30 is in the above range, the temperature in the heat insulating housing 11 (heat treatment space H) is kept constant. While being able to hold | maintain, hot air flow in the said heat insulating housing 11 can be made to flow, without remaining in the said clearance gap. In addition, when the size of the gap is less than 5 mm, natural convection does not occur in the gap, and the hot air flow in the heat insulating housing 11 cannot flow without remaining in the gap, so that the halogen heater lamp 20 emits light. The vertical portions 21B and 21C of the tube 21 may be overheated, and the halogen heater lamp 20 may be damaged. In addition, when the size of the gap is excessive, it is difficult to maintain the temperature in the heat insulating housing 11 (heat treatment space H) at a constant temperature.

Examples of specific dimensions of the light emitting tube 21, the cylindrical body 30, and the heat insulating housing 11 in the above heat treatment apparatus are shown below.

(1) light tube (21)

Length of horizontal part 21A: 175 mm

Length of vertical part 21B, 21C: 270mm

Outer diameter of horizontal portion 21A and vertical portion 21B, 21C: φ 15 mm

(2) tubular body (30)

Inner diameter: φ 21mm

Outer diameter: 25 mm

Length: 251mm

(3) insulated housing (11)

Insertion hole: φ 35 mm

· Thickness of the top wall 11A: 100 mm

Protrusion length of the cylindrical body 30 from the upper surface of 11 A of upper walls: 127 mm

Protrusion length of the cylindrical body 30 from the lower surface of 11 A of upper walls: 48 mm

In this heat treatment apparatus, the conveyance means 12 carries in the workpiece | work W from the delivery opening 13, and in the state which put one workpiece | work W in the predetermined position according to one process block, halogen The heater lamp 20 is turned on, and the atmosphere in the heat treatment space H is heated by heating by the filament 24 of the halogen heater lamp 20, so that the ambient temperature in the heat treatment space H is raised, and the heat insulating housing The heat treatment with respect to the workpiece | work W is performed by keeping heat in predetermined | prescribed predetermined temperature by (11).

At the time of this heat treatment, the air in the heat treatment space H is heated to generate tropical air, thereby uniformizing the temperature distribution in the heat treatment space H, and at the same time, a part of the heat flow that generates the heat flow is insulated from the housing 11. Raised toward 11 A of upper walls, annular void R1 between insertion holes 15 and 15 and cylindrical bodies 30 and 30 of upper wall 11A of heat insulating housing 11, and cylindrical body ( 30, 30 and the annular gap R2 between the vertical portions 21B, 21C of the light emitting tube 21 of the halogen heater lamp 20 are naturally discharged to the outside of the heat treatment apparatus.

Although the atmosphere temperature in the heat processing space H according to the heat processing of the workpiece | work W differs according to the kind of workpiece | work W, it is 800-1000 degreeC, for example, Preferably it is 800-900 degreeC.

When the ambient temperature in the heat treatment space H according to the heat treatment of the workpiece W is 1000 ° C., the vertical portions 21B and 21C of the tubular bodies 30 and 30 and the light emitting tube 21 of the halogen heater lamp 20 are used. The temperature at the lower end of the annular void R2 between the () is about 950 ° C, and the temperature at the top is about 200 ° C.

According to the heat treatment apparatus as described above, the halogen heater lamp 20 in the tubular body 30, 30 inserted through the insertion holes 15, 15 formed in the upper wall 11A of the heat insulating housing 11, the light emitting tube. The vertical portions 21B and 21C of 21 are supported to be inserted through the gap between the outer circumferential surfaces of the vertical portions 21B and 21C and the inner circumferential surfaces of the cylindrical bodies 30 and 30. For this reason, the outer peripheral surface of the vertical parts 21B and 21C does not directly contact 11A of the upper walls of the heat insulation housing 11, and the hot air which generate | occur | produces in the heat processing space H is also wound around the vertical parts 21B and 21C. The annular voids R1 and R2 can be passed through and discharged to the outside without staying in the mold, and as a result, overheating of the vertical portions 21B and 21C is suppressed. Therefore, impurities evaporated from the workpiece W adhere to the outer peripheral surfaces of the vertical portions 21B and 21C, and the reaction with the light emitting tube 21 is suppressed to generate a reactant on the outer peripheral surface. Even in this case, breakage of the light emitting tube 21 does not occur, and a long service life is obtained.

As mentioned above, although embodiment of this invention was described, it is not limited to the said embodiment, A various change can be added.

For example, the shape of the light emitting tube of the insertion hole, the cylindrical body, and the halogen heater lamp is not limited to each having a similar cross-sectional shape. For example, the insertion hole has a cylindrical shape and a halogen. When the light emitting tube of the heater lamp is cylindrical, the cylindrical body may be square cylindrical.

Below, the experiment for confirming the effect of this invention was done.

The heat treatment apparatus [1]-[5] which has the structure of FIG. 1 was produced. The specific structure is as follows.

(1) processing block

·One

6 halogen heater lamps 20 in one processing block

(2) halogen heater lamp (20)

Material of filament 24: tungsten

Length of filament 24: 160 mm

Material of light emitting tube 21: quartz glass

The length of the horizontal portion 21A of the light emitting tube 21: 175 mm

Length of the vertical portions 21B and 21C of the light emitting tube 21: 270 mm

The outer diameter of the horizontal portion 21A and the vertical portions 21B and 21C of the light emitting tube 21: φ 15 mm

Lamp input: 1100W

(3) tubular body (30)

Material of cylindrical body 30: Quartz glass

Inner diameter: as shown in Table 1

Outer diameter: as shown in Table 1

Length: 260mm

(4) insulated housing (11)

Material of insulation housing 11

Inner diameter of insertion hole 15: as shown in Table 1.

· Thickness of the top wall 11A: 100 mm

Protrusion length of the cylindrical body 30 from the upper surface of 11 A of upper walls: 127 mm

Protrusion length of the cylindrical body 30 from the lower surface of 11 A of upper walls: 48 mm

Distance between workpiece W and horizontal portion 21A: 50 mm

The heat treatment apparatuses [1] to [5] respectively light the halogen heater lamp 20 at 1100 W, perform a heat treatment for heating the work W (solar cell substrate) at 1000 ° C., and then the halogen heater lamp after the heat treatment. The degree of color of (20) was observed. The results are shown in Table 1.

(Example)

≪ Example 1 >

The heat treatment apparatus [6] which has the structure of FIG. 1 was produced. The specific structure is as follows.

(1) processing block

·One

Six halogen heater lamps in one processing block

(2) halogen heater lamp

Material of filament: tungsten

Length of filament: 160mm

Material of light emitting tube: Quartz glass

Length of horizontal part of light emitting tube: 175 mm

Length of vertical part of light emitting tube: 270 mm

Outer diameter of the horizontal and vertical portions of the light emitting tube: φ 15 mm

Lamp input: 1100W

(3) cylindrical body

Material of cylindrical body: Quartz glass

Inner diameter: φ 21mm

Outer diameter: 25 mm

Length: 251mm

(4) insulation housing

Material of insulation housing: fireproof insulation lead

Insertion hole: φ 25 mm

Top wall thickness: 100 mm

Protrusion length of the cylindrical body from the upper surface of the upper wall: 127 mm

Protrusion length of the cylindrical body from the lower surface of the upper wall: 48 mm

Distance between workpiece and horizontal part: 50mm

≪ Comparative Example 1 &

The heat treatment apparatus [7] which has a structure of FIG. 3 was produced. The specific structure is as follows.

(1) processing block

·One

Six halogen heater lamps in one processing block

(2) halogen heater lamp

Material of filament: tungsten

Length of filament: 160mm

Material of light emitting tube: Quartz glass

Length of horizontal part of light emitting tube: 175 mm

Length of vertical part of light emitting tube: 270 mm

Outer diameter of the horizontal and vertical portions of the light emitting tube: φ 15 mm

Lamp input: 1100W

(3) insulation housing

Material of insulation housing: fireproof insulation lead

Insertion hole: φ 20 mm

Top wall thickness: 100 mm

Distance between workpiece and horizontal part: 50mm

Using the heat treatment apparatuses [6] and [7] as a work, respectively, the solar cell board | substrate was put, the halogen heater lamp was lighted at 1100W, and time to break was observed.

As a result, in the heat treatment apparatus [6] which concerns on this invention, even if it passed 500 hours after lighting, even if one of the six was not observed the damage of the light emitting tube of a halogen heater lamp, it compares with the conventional heat treatment apparatus [7] for comparison. In all, six light-emitting tubes of the halogen heater lamps were damaged within 160 hours after the lighting.

As described above, the reason why the breakage of the light emitting tube of the halogen heater lamp according to the heat treatment apparatus of the present invention is prevented is that by providing a cylindrical body, overheating of the vertical portion of the light emitting tube of the halogen heater lamp is suppressed and the temperature of the vertical portion of the light emitting tube is suppressed. Since is suppressed low, it is assumed that even if impurities evaporated from the work adhere to the outer circumferential surface of the vertical portion, it is prevented from reacting with the light emitting tube to form a reactant on the outer circumferential surface.

11: insulation housing
11A: Upper wall
11B, 11C: Side wall
12: Transfer means
13: carry-on
14: exit exit
15: insertion hole
20: halogen heater lamp
21: Light-emitting tube
21A ： Horizontal part
21B, 21C: Vertical part
22a, 22b: Sealing part
23a, 23b: annular concave groove
24: Filament
24a, 24b: Internal lead
25a, 25b ： lamp base
26a, 26b: Body part
27a, 27b ： Feed wire
28a, 28b: External lead
29a, 29b: Metal foil
30: cylindrical body
31: Flange
32: Hanging recess
33: Side edge
35: Pinch-type cylindrical body holder
37: Yuji support arm
41: Insulation housing
42: Transfer means
43: Entrance entrance
44: Exit
45: insertion hole
50: halogen heater lamp
51: Light-emitting tube
51A: Horizontal part
51B, 51C: Vertical part
H ： Heat treatment space
R1 and R2: annular voids
W ： Work

Claims (8)

A halogen heater lamp having a U-shaped light emitting tube comprising a horizontal portion and a vertical portion extending in a vertical direction at both ends thereof, the filament being provided at least in a horizontal portion in the light emitting tube;
And a tubular member provided around each vertical portion of said halogen heater lamp so as to interpose a gap between the vertical portion of said halogen heater lamp and an outer peripheral surface of said halogen heater lamp. The method according to claim 1,
The halogen heater lamp unit is a halogen heater lamp unit, characterized in that the end of each vertical portion of the light emitting tube of the halogen heater lamp is supported on the upper end of the cylindrical body. A heat insulating housing made of a heat insulating material surrounding a heat treatment space for heating the work;
A cylindrical member installed to be inserted through an insertion hole formed in an upper wall of the heat insulating housing;
A heat source for heating a work, comprising: a U-shaped light emitting tube comprising a horizontal portion and a vertical portion extending in a vertical direction at both ends thereof, the heat treatment apparatus including a halogen heater lamp provided with a filament at least in a horizontal portion of the light emitting tube,
The halogen heater lamp is provided so that each vertical portion of the light emitting tube of the halogen heater lamp is inserted into the tubular body with a gap interposed between the outer peripheral surface of the vertical portion and the inner peripheral surface of the tubular body. Heat treatment device. The method according to claim 3,
A size of a gap between an outer circumferential surface of the vertical portion and an inner circumferential surface of the tubular body is 5 to 10 mm. The method according to claim 3 or 4,
The said cylindrical body consists of quartz glass, The heat processing apparatus characterized by the above-mentioned. The method according to claim 3 or 4,
An end portion of each of the vertical portions of the light emitting tube of the halogen heater lamp is provided with the halogen heater lamp being supported on the upper end of the tubular member. The method according to claim 3 or 4,
And the tubular body is inserted into and inserted into an insertion hole formed in an upper wall of the heat insulating housing with a gap interposed between an outer circumferential surface of the cylindrical body and an inner circumferential surface of the insertion hole. The method according to claim 3 or 4,
The magnitude | size of the clearance gap between the outer peripheral surface of the said cylindrical body and the inner peripheral surface of the said insertion hole is 0-10 mm, The heat processing apparatus characterized by the above-mentioned.

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