JP5365884B2 - Halogen heater lamp unit and heat treatment apparatus - Google Patents
Halogen heater lamp unit and heat treatment apparatus Download PDFInfo
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- JP5365884B2 JP5365884B2 JP2011129052A JP2011129052A JP5365884B2 JP 5365884 B2 JP5365884 B2 JP 5365884B2 JP 2011129052 A JP2011129052 A JP 2011129052A JP 2011129052 A JP2011129052 A JP 2011129052A JP 5365884 B2 JP5365884 B2 JP 5365884B2
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- 238000010438 heat treatment Methods 0.000 title claims abstract description 93
- 229910052736 halogen Inorganic materials 0.000 title claims abstract description 75
- 150000002367 halogens Chemical class 0.000 title claims abstract description 75
- 238000003780 insertion Methods 0.000 claims abstract description 31
- 230000037431 insertion Effects 0.000 claims abstract description 31
- 238000009413 insulation Methods 0.000 claims abstract description 11
- 239000011810 insulating material Substances 0.000 claims abstract description 10
- 230000002093 peripheral effect Effects 0.000 claims description 52
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- 238000012545 processing Methods 0.000 claims description 7
- 230000007774 longterm Effects 0.000 abstract 1
- 239000000463 material Substances 0.000 description 16
- 239000012535 impurity Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000013021 overheating Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 238000012546 transfer Methods 0.000 description 4
- 239000011449 brick Substances 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 239000000376 reactant Substances 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- 239000011888 foil Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 230000000717 retained effect Effects 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 229910052918 calcium silicate Inorganic materials 0.000 description 1
- 239000000378 calcium silicate Substances 0.000 description 1
- OYACROKNLOSFPA-UHFFFAOYSA-N calcium;dioxido(oxo)silane Chemical compound [Ca+2].[O-][Si]([O-])=O OYACROKNLOSFPA-UHFFFAOYSA-N 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000009970 fire resistant effect Effects 0.000 description 1
- 239000011491 glass wool Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011490 mineral wool Substances 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67248—Temperature monitoring
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
Description
本発明は、太陽電池基板などの熱処理に用いられるハロゲンヒータランプユニットおよび熱処理装置に関する。 The present invention relates to a halogen heater lamp unit and a heat treatment apparatus used for heat treatment of a solar cell substrate or the like.
太陽電池基板の製造方法などにおいては、雰囲気温度が１０００℃前後の高温に保たれた領域で熱処理を行う工程が必要とされており、このような熱処理を行う装置として、例えば、図３に示されるように、ワークＷを加熱する熱処理空間Ｈを取り囲む、断熱材からなる断熱筐体４１の上壁に、挿入孔４５，４５が設けられると共に、ワークＷを加熱する熱源として、水平部５１Ａおよびその両端から垂直方向に伸びる垂直部５１Ｂ，５１ＣよりなるＵ字状の発光管５１を備え、発光管５１内における少なくとも水平部５１Ａにフィラメント（図示せず）が配設されたハロゲンヒータランプ５０が、その垂直部５１Ｂ，５１Ｃが挿入孔４５，４５内に挿通されるよう配設された装置が開示されている（例えば、特許文献１参照。）。
なお、図３において、４３はワークＷが載置された搬送手段４２が搬入される搬入口、４４は当該搬送手段４２が搬出される搬出口である。
In a method for manufacturing a solar cell substrate, etc., a step of performing a heat treatment in a region where the ambient temperature is maintained at a high temperature of about 1000 ° C. is required. As an apparatus for performing such a heat treatment, for example, shown in FIG. As shown in the figure, insertion holes 45 and 45 are provided in the upper wall of the heat insulating casing 41 made of a heat insulating material surrounding the heat treatment space H for heating the workpiece W, and the horizontal portion 51A and the heat source for heating the workpiece W are provided. A halogen heater lamp 50 is provided with a U-shaped arc tube 51 composed of vertical portions 51B and 51C extending in the vertical direction from both ends, and a filament (not shown) is disposed at least in the horizontal portion 51A in the arc tube 51. A device is disclosed in which the vertical portions 51B and 51C are disposed so as to be inserted into the insertion holes 45 and 45 (see, for example, Patent Document 1).
In FIG. 3, reference numeral 43 denotes a carry-in port through which the transfer means 42 on which the workpiece W is placed is carried in, and 44 denotes a carry-out exit from which the transfer means 42 is carried out.
しかしながら、この熱処理装置においては、長期間にわたって使用するとハロゲンヒータランプの発光管の破損が生じる、という問題があった。
この問題を検証したところ、ハロゲンヒータランプの発光管の垂直部の外周面が断熱材による壁に囲われていることにより、発光管が過熱状態となり、その状態でワークが加熱されることによって、当該ワークから蒸発した不純物が発光管に付着し、発光管と不純物とが反応することによって発光管が劣化して破損するものと推測された。
However, this heat treatment apparatus has a problem that the arc tube of the halogen heater lamp is damaged when used for a long period of time.
When this problem was verified, when the outer peripheral surface of the vertical part of the arc tube of the halogen heater lamp is surrounded by a wall made of a heat insulating material, the arc tube becomes overheated, and the workpiece is heated in that state, It was estimated that the impurities evaporated from the workpiece adhered to the arc tube, and the arc tube and the impurities reacted to cause the arc tube to deteriorate and break.
本発明は、以上のような事情に基づいてなされたものであって、その目的は、長期間にわたって使用した場合にも発光管の破損が生じない長寿命のハロゲンヒータランプユニットおよび熱処理装置を提供することにある。 The present invention has been made based on the above circumstances, and an object thereof is to provide a long-life halogen heater lamp unit and a heat treatment apparatus that do not cause breakage of the arc tube even when used for a long period of time. There is to do.
本発明のハロゲンヒータランプユニットは、水平部およびその両端から垂直方向に伸びる垂直部よりなるＵ字状の発光管を備え、発光管内における少なくとも水平部にフィラメントが配設されたハロゲンヒータランプと、
当該ハロゲンヒータランプの各々の垂直部の周囲に、当該垂直部の外周面との間に間隙を介するよう配設された筒状体とを備えることを特徴とする。
The halogen heater lamp unit of the present invention comprises a U-shaped arc tube comprising a horizontal portion and a vertical portion extending vertically from both ends thereof, and a halogen heater lamp in which a filament is disposed at least in the horizontal portion of the arc tube;
A cylindrical body disposed around the vertical portion of each of the halogen heater lamps with a gap between the vertical portion and the outer peripheral surface of the vertical portion.
本発明のハロゲンヒータランプユニットにおいては、前記ハロゲンヒータランプは、ハロゲンヒータランプの発光管の各々の垂直部の端部が、前記筒状体の上端に支持されて配設されている構成とすることが好ましい。 In the halogen heater lamp unit of the present invention, the halogen heater lamp is configured such that the end of each vertical portion of the arc tube of the halogen heater lamp is supported by the upper end of the cylindrical body. It is preferable.
本発明の熱処理装置は、ワークを加熱する熱処理空間を取り囲む、断熱材からなる断熱筐体と、
当該断熱筐体の上壁に形成された挿入孔に挿通されるよう配設された筒状体と、
ワークを加熱する熱源として、水平部およびその両端から垂直方向に伸びる垂直部よりなるＵ字状の発光管を備え、発光管内における少なくとも水平部にフィラメントが配設されたハロゲンヒータランプとを備える熱処理装置であって、
当該ハロゲンヒータランプが、当該ハロゲンヒータランプの発光管の各々の垂直部が前記筒状体内に当該垂直部の外周面と前記筒状体の内周面との間に間隙を介する状態で挿通されるよう配設されていることを特徴とする。
The heat treatment apparatus of the present invention includes a heat insulating casing made of a heat insulating material surrounding a heat treatment space for heating a workpiece,
A cylindrical body arranged to be inserted through an insertion hole formed in the upper wall of the heat insulating housing;
Heat treatment comprising a U-shaped arc tube comprising a horizontal portion and a vertical portion extending vertically from both ends thereof as a heat source for heating the workpiece, and a halogen heater lamp having a filament disposed at least in the horizontal portion of the arc tube A device,
The halogen heater lamp is inserted into the cylindrical body with each vertical portion of the arc tube of the halogen heater lamp interposed between the outer peripheral surface of the vertical portion and the inner peripheral surface of the cylindrical body. It is arranged so that it may be arranged.
本発明の熱処理装置においては、前記垂直部の外周面と前記筒状体の内周面との間の間隙の大きさが、５〜１０ｍｍであることが好ましい。 In the heat treatment apparatus of the present invention, the size of the gap between the outer peripheral surface of the vertical portion and the inner peripheral surface of the cylindrical body is preferably 5 to 10 mm.
また、本発明の熱処理装置においては、前記筒状体が、石英ガラスからなるものであることが好ましい。 Moreover, in the heat processing apparatus of this invention, it is preferable that the said cylindrical body consists of quartz glass.
また、本発明の熱処理装置においては、前記ハロゲンヒータランプは、ハロゲンヒータランプの発光管の各々の垂直部の端部が、前記筒状体の上端に支持されて配設されている構成とされることが好ましい。 In the heat treatment apparatus of the present invention, the halogen heater lamp is configured such that the end of each vertical portion of the arc tube of the halogen heater lamp is supported by the upper end of the cylindrical body. It is preferable.
また、本発明の熱処理装置においては、前記筒状体が、前記断熱筐体の上壁に形成された挿入孔に、当該筒状体の外周面と前記挿入孔の内周面との間に間隙を介する状態で挿通されて配設されている構成とされることが好ましい。 Further, in the heat treatment apparatus of the present invention, the cylindrical body is inserted into the insertion hole formed in the upper wall of the heat insulating casing between the outer peripheral surface of the cylindrical body and the inner peripheral surface of the insertion hole. It is preferable to be configured to be inserted through a gap.
また、本発明の熱処理装置においては、前記筒状体の外周面と前記挿通孔の内周面との間の間隙の大きさが、０より大きく１０ｍｍ以下であることが好ましい。 In the heat treatment apparatus of the present invention, it is preferable that the size of the gap between the outer peripheral surface of the cylindrical body and the inner peripheral surface of the insertion hole is greater than 0 and 10 mm or less .
さらに、本発明の熱処理装置においては、前記筒状体は、前記断熱筐体に支持されたピンチ型筒状体保持具によってピンチされることにより、当該断熱筐体に支持されて配設されていることが好ましい。 Furthermore, in the heat treatment apparatus according to the present invention, the cylindrical body is supported and disposed on the heat insulating casing by being pinched by a pinch type cylindrical body holder supported by the heat insulating casing. Preferably it is.
本発明のハロゲンヒータランプユニットによれば、発光管の垂直部の周囲に、当該垂直部の外周面との間に間隙を介するよう筒状体が支持されているために、当該ハロゲンヒータランプによる熱気流を垂直部の周囲に滞留させずに間隙を通過させることができ、従って、熱処理装置の加熱源として用いた場合に、長期間にわたって使用しても発光管の破損が生じず、長寿命が得られる。 According to the halogen heater lamp unit of the present invention, the cylindrical body is supported around the vertical portion of the arc tube so as to have a gap between the vertical portion and the outer peripheral surface of the vertical portion. The hot air current can pass through the gap without staying around the vertical part. Therefore, when used as a heat source for heat treatment equipment, the arc tube is not damaged even if it is used for a long period of time, and it has a long service life. Is obtained.
本発明の熱処理装置によれば、断熱筐体の上壁に形成された挿通孔に挿通された筒状体内に、ハロゲンヒータランプが、その発光管の垂直部が当該垂直部の外周面と筒状体の内周面との間に間隙を介する状態で挿通されるよう配設されている。このため、垂直部の外周面が断熱筐体の上壁に直接接触せず、しかも、熱処理空間内に発生する熱気流を垂直部の周囲に滞留させることなく間隙を流通させて外部に排出させることができ、その結果、垂直部の過熱が抑止される。従って、当該垂直部の外周面にワークから蒸発した不純物が付着しても、発光管と反応して当該外周面に反応物を生成することが抑止され、これにより、長期間にわたって使用した場合にも発光管の破損が生じず、長寿命が得られる。 According to the heat treatment apparatus of the present invention, the halogen heater lamp is disposed in the cylindrical body inserted through the insertion hole formed in the upper wall of the heat insulating casing, and the vertical portion of the arc tube is connected to the outer peripheral surface of the vertical portion and the cylinder. It is arrange | positioned so that it may penetrate in the state through a gap | interval between the inner peripheral surfaces of a shape-like body. For this reason, the outer peripheral surface of the vertical part is not in direct contact with the upper wall of the heat-insulating housing, and the thermal air flow generated in the heat treatment space is circulated through the gap without being retained around the vertical part and discharged to the outside. As a result, overheating of the vertical part is suppressed. Therefore, even if impurities evaporated from the workpiece adhere to the outer peripheral surface of the vertical portion, it is prevented from reacting with the arc tube to generate a reactant on the outer peripheral surface, and thus when used over a long period of time. However, the arc tube is not damaged and a long life is obtained.
以下、本発明について具体的に説明する。 Hereinafter, the present invention will be specifically described.
〔熱処理装置〕
図１は、本発明の熱処理装置の構成の一例を示す説明用断面図、図２は、本発明の熱処理装置におけるハロゲンヒータランプおよび筒状体の説明用平面図である。
本発明の熱処理装置は、断熱筐体１１と、その上壁１１Ａに形成された挿入孔１５，１５に挿通されるよう配設された筒状体３０，３０と、水平部２１Ａおよびその両端から垂直方向に伸びる垂直部２１Ｂ，２１ＣよりなるＵ字状の発光管２１を備えたハロゲンヒータランプ２０とを備えるものである。
[Heat treatment equipment]
FIG. 1 is a cross-sectional view for explaining an example of the configuration of the heat treatment apparatus of the present invention, and FIG. 2 is a plan view for explaining a halogen heater lamp and a cylindrical body in the heat treatment apparatus of the present invention.
The heat treatment apparatus of the present invention includes a heat insulating casing 11, cylindrical bodies 30 and 30 disposed so as to be inserted through insertion holes 15 and 15 formed in the upper wall 11A, the horizontal portion 21A and both ends thereof. And a halogen heater lamp 20 having a U-shaped arc tube 21 composed of vertical portions 21B and 21C extending in the vertical direction.
この熱処理装置は、複数、例えば６本のハロゲンヒータランプ２０の水平部２１Ａが、断熱筐体１１の上壁に平行かつハロゲンヒータランプ２０の発光管２１の水平部２１Ａに垂直な方向（図１において紙面に垂直な方向）に並設されなる処理ブロックが、当該断熱筐体１１の上壁に平行かつハロゲンヒータランプ２０の発光管２１の水平部２１Ａに垂直な方向に１〜８ブロック並設されている。 In this heat treatment apparatus, a plurality of, for example, six horizontal portions 21A of the halogen heater lamps 20 are parallel to the upper wall of the heat insulating housing 11 and perpendicular to the horizontal portion 21A of the arc tube 21 of the halogen heater lamp 20 (FIG. 1 to 8 blocks are arranged in parallel in a direction parallel to the upper wall of the heat insulating housing 11 and perpendicular to the horizontal portion 21A of the arc tube 21 of the halogen heater lamp 20. Has been.
〔断熱筐体〕
本発明の熱処理装置を構成する断熱筐体１１は、断熱材からなり、その内部はワークＷを加熱する熱処理空間Ｈとされている。
断熱筐体１１の対向する側壁１１Ｂ，１１Ｃには、それぞれ、ワークＷを搬送するための例えばメッシュベルトコンベアなどの搬送手段１２を搬入する搬入口１３および当該搬送手段１２を熱処理空間Ｈから搬出する搬出口１４が設けられている。
[Insulated housing]
The heat insulating casing 11 constituting the heat treatment apparatus of the present invention is made of a heat insulating material, and the inside thereof is a heat treatment space H for heating the workpiece W.
Into the opposite side walls 11B and 11C of the heat insulating casing 11, a carry-in port 13 for carrying a conveyance means 12 such as a mesh belt conveyor for conveying the workpiece W and the conveyance means 12 are carried out from the heat treatment space H, respectively. A carry-out port 14 is provided.
断熱筐体１１を構成する断熱材としては、熱処理空間Ｈ内の雰囲気温度を一定に保持することができる断熱性を有するものであればよく、例えばセラミック、ガラスウール、珪酸カルシウム、ロックウール、耐火断熱レンガなどを用いることができる。 As the heat insulating material constituting the heat insulating housing 11, any heat insulating material that can keep the atmospheric temperature in the heat treatment space H constant can be used. For example, ceramic, glass wool, calcium silicate, rock wool, fireproof Insulating bricks can be used.
断熱筐体１１に形成された挿入孔１５，１５は、例えば断面が真円である円柱状とされる。
この挿入孔１５，１５の内径は、筒状体３０，３０の外径によっても異なるが、例えばφ２５〜φ３０ｍｍとされる。
The insertion holes 15 and 15 formed in the heat insulating housing 11 are, for example, cylindrical shapes having a perfect cross section.
The inner diameters of the insertion holes 15 and 15 vary depending on the outer diameters of the cylindrical bodies 30 and 30, but are, for example, φ25 to φ30 mm.
〔筒状体〕
本発明の熱処理装置を構成する筒状体３０，３０は、例えば円筒状のものであり、断熱筐体１１の上壁１１Ａに形成された挿入孔１５，１５に配設されており、筒状体３０，３０の外周面が、挿入孔１５，１５の内周面に接触した状態に配設されていてもよいが、特に、当該筒状体３０，３０の外周面と挿入孔１５，１５の内周面との間に間隙を介する状態で挿通されて配設されていることが好ましい。
具体的には、筒状体３０，３０は、断熱筐体１１に、当該断熱筐体１１の上壁１１Ａから外方に伸びる保持具支持アーム３７，３７の凹所に載置されて支持されたピンチ型筒状体保持具３５，３５によってピンチされることにより、当該断熱筐体１１に支持されている。
[Cylindrical body]
The cylindrical bodies 30, 30 constituting the heat treatment apparatus of the present invention are, for example, cylindrical, and are disposed in the insertion holes 15, 15 formed in the upper wall 11 A of the heat insulating casing 11. The outer peripheral surfaces of the bodies 30 and 30 may be disposed in contact with the inner peripheral surfaces of the insertion holes 15 and 15. In particular, the outer peripheral surface of the cylindrical bodies 30 and 30 and the insertion holes 15 and 15 are arranged. It is preferable that it is inserted and disposed in a state of interposing a gap between the inner peripheral surface and the inner peripheral surface.
Specifically, the cylindrical bodies 30 and 30 are mounted and supported by the heat insulating casing 11 in the recesses of the holder support arms 37 and 37 extending outward from the upper wall 11A of the heat insulating casing 11. By being pinched by the pinch-shaped cylindrical body holders 35, 35, they are supported by the heat insulating casing 11.
筒状体３０，３０の外周面と挿入孔１５，１５の内周面との間の間隙は、断面が全周にわたって均一な厚みを有する円環状である環状空隙であることが好ましい。 The gap between the outer peripheral surface of the cylindrical bodies 30 and 30 and the inner peripheral surface of the insertion holes 15 and 15 is preferably an annular gap having a circular cross section with a uniform thickness over the entire circumference.
筒状体３０，３０の外周面と挿入孔１５，１５の内周面との間の間隙の大きさ、すなわち環状空隙Ｒ１の厚みは、０〜１０ｍｍであることが好ましく、より好ましくは５〜８ｍｍである。
筒状体３０，３０の外周面と挿入孔１５，１５の内周面との間の間隙の大きさが上記の範囲にあることにより、断熱筐体１１内の温度を一定温度に維持することができながら、当該断熱筐体１１内における熱気流を当該間隙に滞留させることなく流通させることができる。また、当該間隙の大きさが過大である場合は、断熱筐体１１内（熱処理空間Ｈ）の温度を一定温度に維持することが難しい。
特に、当該間隙の大きさが５ｍｍ以上である場合は、当該間隙において自然対流がなされて、確実に、当該断熱筐体１１内における熱気流を当該間隙に滞留させることなく流通させることができる。
The size of the gap between the outer peripheral surface of the cylindrical bodies 30 and 30 and the inner peripheral surface of the insertion holes 15 and 15, that is, the thickness of the annular gap R1 is preferably 0 to 10 mm, more preferably 5 to 5 mm. 8 mm.
Maintaining the temperature in the heat insulating housing 11 at a constant temperature by the size of the gap between the outer peripheral surface of the cylindrical bodies 30 and 30 and the inner peripheral surface of the insertion holes 15 and 15 being in the above range. However, it is possible to circulate the hot air flow in the heat insulating casing 11 without staying in the gap. Moreover, when the size of the gap is excessive, it is difficult to maintain the temperature in the heat insulating casing 11 (heat treatment space H) at a constant temperature.
In particular, when the size of the gap is 5 mm or more, natural convection is performed in the gap, and the hot air flow in the heat insulating casing 11 can be reliably circulated without staying in the gap.
筒状体３０，３０は、その上部および下部が、断熱筐体１１の上壁の下面および上面にそれぞれ突出する状態に配設されることが好ましい。
このような状態に配設されることにより、熱処理空間Ｈから熱処理装置の外部への熱気流の自然排出を確実に行うことができる。
It is preferable that the cylindrical bodies 30 and 30 are disposed so that the upper and lower portions protrude from the lower surface and the upper surface of the upper wall of the heat insulating housing 11, respectively.
By being arranged in such a state, it is possible to surely discharge the hot airflow from the heat treatment space H to the outside of the heat treatment apparatus.
筒状体３０，３０を構成する材料としては、ワークＷの加熱を行うときの熱処理空間Ｈ内の雰囲気温度において変形や損傷などを生じない耐久性を有し、かつ、ワークＷの加熱を行うときの熱処理空間Ｈ内の雰囲気温度においてワークＷにコンタミネーションを生じさせないものであり、さらに断熱筐体１１を形成する断熱材の熱伝導率よりも高い熱伝導率を有するものが好ましく、例えば石英ガラスやセラミック、あるいはステンレスなどの金属などを用いることができ、特に石英ガラスを用いることが好ましい。 As the material constituting the cylindrical bodies 30, 30, the material has durability that does not cause deformation or damage at the atmospheric temperature in the heat treatment space H when the workpiece W is heated, and the workpiece W is heated. It is preferable that the workpiece W does not cause contamination at the atmospheric temperature in the heat treatment space H, and further has a thermal conductivity higher than that of the heat insulating material forming the heat insulating casing 11, for example, quartz Glass, ceramic, or metal such as stainless steel can be used, and quartz glass is particularly preferable.
筒状体３０，３０が、断熱筐体１１を形成する断熱材の熱伝導率よりも高い熱伝導率を有する材料より形成されたものであることにより、発光管２１の垂直部２１Ｂ，２１Ｃの過熱が抑止されるものと考えられる。
具体的には、筒状体が設けられていない構成を有する従来の熱処理装置においては、発光管の垂直部と断熱部材との間を熱気流が通過する際に、当該熱気流の熱が断熱部材にはほとんど伝熱されずに発光管に伝熱されるため、発光管は、フィラメントからの伝熱を受け、さらに、熱気流からの熱を受けることによって過熱される結果、発光管と不純物とが反応するものと推測される。
然るに、筒状体３０，３０が設けられた構成を有する本発明の熱処理装置においては、発光管２１の垂直部２１Ｂ，２１Ｃと断熱筐体１１との間を熱気流が通過する際に、当該熱気流の熱が、断熱筐体１１にはほとんど伝熱されず、発光管２１の垂直部２１Ｂ，２１Ｃには伝熱されるが、筒状体３０，３０が断熱筐体１１を構成する断熱材よりも熱伝導率が高い材料からなることから、熱気流の熱のうち筒状体３０，３０が受けた熱量分、従来よりも発光管２１の垂直部２１Ｂ，２１Ｃへの伝熱量が減るものと推測される。
このため、発光管２１は、フィラメント２４からの熱を受け、さらに、熱気流からの熱を受けるものの、当該熱気流からの伝熱量が従来よりも少ないために、発光管２１は過熱の程度が抑制され、その結果、発光管２１と不純物とが反応することを抑制することができるものと考えられる。
The cylindrical bodies 30 and 30 are made of a material having a thermal conductivity higher than that of the heat insulating material forming the heat insulating casing 11, so that the vertical portions 21 </ b> B and 21 </ b> C of the arc tube 21 are formed. It is thought that overheating is suppressed.
Specifically, in the conventional heat treatment apparatus having a configuration in which the cylindrical body is not provided, when the hot airflow passes between the vertical portion of the arc tube and the heat insulating member, the heat of the hot airflow is insulated. Since the heat is transferred to the arc tube with little heat transfer to the member, the arc tube receives heat from the filament and is further heated by receiving heat from the hot air stream. Is presumed to react.
However, in the heat treatment apparatus of the present invention having the configuration in which the cylindrical bodies 30 and 30 are provided, when the hot airflow passes between the vertical portions 21B and 21C of the arc tube 21 and the heat insulating casing 11, The heat of the hot air current is hardly transferred to the heat insulating casing 11 and is transferred to the vertical portions 21B and 21C of the arc tube 21, but the tubular bodies 30 and 30 constitute the heat insulating casing 11. Since the heat conductivity is higher than that of the material, the amount of heat transferred to the vertical portions 21B and 21C of the arc tube 21 is reduced as compared with the conventional case by the amount of heat received by the cylindrical bodies 30 and 30 in the heat of the hot airflow. It is guessed.
For this reason, although the arc tube 21 receives heat from the filament 24 and further receives heat from the hot air stream, the amount of heat transfer from the hot air stream is smaller than before, so the arc tube 21 has a degree of overheating. As a result, it is considered that the reaction between the arc tube 21 and impurities can be suppressed.
筒状体３０，３０の肉厚は、例えば０．５〜３ｍｍとされ、好ましくは１．５〜２．５ｍｍである。 The thickness of the cylindrical bodies 30 and 30 is, for example, 0.5 to 3 mm, and preferably 1.5 to 2.5 mm.
〔ハロゲンヒータランプ〕
本発明の熱処理装置を構成するハロゲンヒータランプ２０は、ワークＷを加熱する熱源であり、両端部が溶着されて封止部２２ａ，２２ｂが形成された、例えば石英ガラスなどの光透過性材料からなる直管状の発光管２１を備えている。この発光管２１内における少なくとも水平部２１Ａに例えばタングステンからなるフィラメント２４が当該発光管２１と接触しないよう、管軸方向に伸びる状態に配設されていると共にハロゲンガスが封入されている。
[Halogen heater lamp]
The halogen heater lamp 20 constituting the heat treatment apparatus of the present invention is a heat source for heating the workpiece W, and is made of a light-transmitting material such as quartz glass having both ends welded to form the sealing portions 22a and 22b. A straight tubular arc tube 21 is provided. The filament 24 made of, for example, tungsten is disposed in the arc tube 21 so as not to come into contact with the arc tube 21 at least in the horizontal portion 21A, and is filled with halogen gas.
フィラメント２４には、その一端部に給電用の内部リード２４ａが連結されると共に、その他端部に給電用の内部リード２４ｂが連結されており、当該内部リード２４ａ，２４ｂが、それぞれ、発光管２１の垂直部２１Ｂ，２１Ｃ内において管軸方向に伸びて封止部２２ａ，２２ｂに気密に埋設された金属箔２９ａ，２９ｂを介して、外部リード２８ａ，２８ｂに電気的に接続されている。そして、外部リード２８ａ，２８ｂが、給電線２７ａ，２７ｂを介して図示しない電源に電気的に接続されている。 The filament 24 is connected to an internal lead 24a for power supply at one end thereof, and is connected to an internal lead 24b for power supply at the other end, and the internal leads 24a and 24b are respectively connected to the arc tube 21. Are electrically connected to the external leads 28a and 28b through metal foils 29a and 29b extending in the tube axis direction and hermetically embedded in the sealing portions 22a and 22b. The external leads 28a and 28b are electrically connected to a power source (not shown) via the power supply lines 27a and 27b.
そして、ハロゲンヒータランプ２０は、その発光管２１の各々の垂直部２１Ｂ，２１Ｃが筒状体３０，３０内に当該垂直部２１Ｂ，２１Ｃの外周面と筒状体３０，３０の内周面との間に間隙を介する状態で挿通されるよう、支持されている。
また、ハロゲンヒータランプ２０は、その水平部２１ＡがワークＷと平行に伸びる状態とされると共に、その垂直部２１Ｂ，２１Ｃが断熱筐体１１の外方に突出する状態とされる。
In the halogen heater lamp 20, the vertical portions 21 </ b> B and 21 </ b> C of the arc tube 21 are arranged in the cylindrical bodies 30 and 30, and the outer peripheral surfaces of the vertical portions 21 </ b> B and 21 </ b> C and the inner peripheral surfaces of the cylindrical bodies 30 and 30. It is supported so that it may be inserted through a gap.
The halogen heater lamp 20 has a horizontal portion 21 </ b> A extending in parallel with the workpiece W, and vertical portions 21 </ b> B and 21 </ b> C projecting outward from the heat insulating housing 11.
具体的には、ハロゲンヒータランプ２０の発光管２１の垂直部２１Ｂ，２１Ｃの上部に、例えばステアタイトのようなセラミックからなる円柱状の胴部２６ａ，２６ｂを有するランプベース２５ａ，２５ｂが、例えば無機接着剤を介してそれぞれ設けられている。このランプベース２５ａ，２５ｂの胴部２６ａ，２６ｂには、その外周壁に全周にわたって伸びる状態に環状凹溝２３ａ，２３ｂが形成されている。
一方、筒状体３０，３０の上端には、例えばステンレス鋼などの金属製の円盤状のフランジ３１，３１が設けられている。このフランジ３１，３１には、略四角形状の係止凹所３２，３２が形成されている。
そして、ハロゲンヒータランプ２０の発光管２１の垂直部２１Ｂに係るランプベース２５ａの環状凹溝２３ａが、フランジ３１の係止凹所３２の対向する２つの側縁３３，３３にスライド嵌合され、必要に応じてＮｉ線によって係止されている。また、ハロゲンヒータランプ２０の発光管２１の垂直部２１Ｃに係るランプベース２５ｂの環状凹溝２３ｂが、フランジ３１の係止凹所３２の対向する２つの側縁３３，３３にスライド嵌合され、必要に応じてＮｉ線によって係止されている。これにより、ハロゲンヒータランプ２０が、筒状体３０，３０内に吊下げられた状態で支持されている。
ハロゲンヒータランプ２０が筒状体３０，３０にこのように支持されていることにより、フランジ３１，３１の係止凹所３２，３２において筒状体３０，３０の上端に環状空隙Ｒ２が露出した状態とされ、これにより、筒状体３０，３０は、その上端が大気に連通される。
Specifically, lamp bases 25a and 25b having columnar body portions 26a and 26b made of ceramic such as steatite on the vertical portions 21B and 21C of the arc tube 21 of the halogen heater lamp 20 are, for example, Each is provided via an inorganic adhesive. In the body portions 26a and 26b of the lamp bases 25a and 25b, annular grooves 23a and 23b are formed on the outer peripheral wall so as to extend over the entire circumference.
On the other hand, disk-shaped flanges 31 and 31 made of metal such as stainless steel are provided at the upper ends of the cylindrical bodies 30 and 30. The flanges 31, 31 are formed with substantially rectangular locking recesses 32, 32.
Then, the annular groove 23a of the lamp base 25a associated with the vertical portion 21B of the arc tube 21 of the halogen heater lamp 20 is slidably fitted to the two opposite side edges 33, 33 of the locking recess 32 of the flange 31, It is locked by Ni wire as necessary. Further, the annular groove 23b of the lamp base 25b associated with the vertical portion 21C of the arc tube 21 of the halogen heater lamp 20 is slidably fitted to the two opposite side edges 33, 33 of the locking recess 32 of the flange 31; It is locked by Ni wire as necessary. Thereby, the halogen heater lamp 20 is supported in a state of being suspended in the cylindrical bodies 30 and 30.
Since the halogen heater lamp 20 is supported by the cylindrical bodies 30 and 30 in this way, the annular gap R2 is exposed at the upper ends of the cylindrical bodies 30 and 30 in the locking recesses 32 and 32 of the flanges 31 and 31. Thus, the upper ends of the cylindrical bodies 30 and 30 are communicated with the atmosphere.
ハロゲンヒータランプ２０の垂直部２１Ｂ，２１Ｃの外周面と筒状体３０，３０の内周面との間の間隙は、断面が全周にわたって均一な厚みを有する円環状である環状空隙であることが好ましい。 The gap between the outer peripheral surfaces of the vertical portions 21B and 21C of the halogen heater lamp 20 and the inner peripheral surface of the cylindrical bodies 30 and 30 is an annular gap having a circular cross section with a uniform thickness over the entire circumference. Is preferred.
垂直部２１Ｂ，２１Ｃの外周面と筒状体３０，３０の内周面との間の間隙の大きさ、すなわち環状空隙Ｒ２の厚みは、５〜１０ｍｍであることが好ましく、より好ましくは５〜８ｍｍ、特に好ましくは５ｍｍである。
垂直部２１Ｂ，２１Ｃの外周面と筒状体３０，３０の内周面との間の間隙の大きさが上記の範囲にあることにより、断熱筐体１１内（熱処理空間Ｈ）の温度を一定温度に維持することができながら、当該断熱筐体１１内における熱気流を当該間隙に滞留させることなく流通させることができる。また、当該間隙の大きさが５ｍｍ未満である場合は、当該間隙において自然対流がなされず、当該断熱筐体１１内における熱気流を当該間隙に滞留させることなく流通させることができず、ハロゲンヒータランプ２０の発光管２１の垂直部２１Ｂ，２１Ｃが過熱されて当該ハロゲンヒータランプ２０が破損するおそれがある。さらに、当該間隙の大きさが過大である場合は、断熱筐体１１内（熱処理空間Ｈ）の温度を一定温度に維持することが難しい。
The size of the gap between the outer peripheral surfaces of the vertical portions 21B and 21C and the inner peripheral surface of the cylindrical bodies 30, 30, that is, the thickness of the annular gap R2, is preferably 5 to 10 mm, more preferably 5 to 5 mm. 8 mm, particularly preferably 5 mm.
Since the size of the gap between the outer peripheral surface of the vertical portions 21B and 21C and the inner peripheral surface of the cylindrical bodies 30 and 30 is in the above range, the temperature in the heat insulating casing 11 (heat treatment space H) is constant. While maintaining the temperature, the hot air flow in the heat insulating casing 11 can be circulated without staying in the gap. Further, when the size of the gap is less than 5 mm, natural convection does not occur in the gap, and the hot air current in the heat insulating casing 11 cannot be circulated without staying in the gap, and the halogen heater The vertical portions 21B and 21C of the arc tube 21 of the lamp 20 may be overheated and the halogen heater lamp 20 may be damaged. Furthermore, when the size of the gap is excessive, it is difficult to maintain the temperature in the heat insulating housing 11 (heat treatment space H) at a constant temperature.
以上の熱処理装置における発光管２１、筒状体３０および断熱筐体１１の具体的な寸法例を以下に示す。
（１）発光管２１
・水平部２１Ａの長さ：１７５ｍｍ
・垂直部２１Ｂ，２１Ｃの長さ：２７０ｍｍ
・水平部２１Ａおよび垂直部２１Ｂ，２１Ｃの外径：φ１５ｍｍ
（２）筒状体３０
・内径：φ２１ｍｍ
・外径：φ２５ｍｍ
・長さ：２５１ｍｍ
（３）断熱筐体１１
・挿入孔：φ３５ｍｍ
・上壁１１Ａの厚み：１００ｍｍ
・上壁１１Ａの上面からの筒状体３０の突出長さ：１２７ｍｍ
・上壁１１Ａの下面からの筒状体３０の突出長さ：４８ｍｍ
Specific examples of dimensions of the arc tube 21, the cylindrical body 30, and the heat insulating housing 11 in the heat treatment apparatus described above are shown below.
(1) Arc tube 21
・ Length of horizontal portion 21A: 175 mm
・ Length of vertical portions 21B and 21C: 270 mm
・ Outer diameter of horizontal portion 21A and vertical portions 21B and 21C: φ15mm
(2) Cylindrical body 30
・ Inner diameter: φ21mm
・ Outer diameter: φ25mm
・ Length: 251mm
(3) Insulated housing 11
・ Insertion hole: φ35mm
-Upper wall 11A thickness: 100 mm
-Protruding length of the cylindrical body 30 from the upper surface of the upper wall 11A: 127 mm
-Projection length of the cylindrical body 30 from the lower surface of the upper wall 11A: 48 mm
この熱処理装置においては、搬送手段１２によって搬入口１３からワークＷを搬入させ、１つの処理ブロックに係る所定の位置に１つのワークＷを載置させた状態で、ハロゲンヒータランプ２０を点灯させ、ハロゲンヒータランプ２０のフィラメント２４による加熱によって熱処理空間Ｈ内の大気が加熱されて当該熱処理空間Ｈ内の雰囲気温度が上昇され、断熱筐体１１によって所望の雰囲気温度に所定時間保温されることによって、ワークＷに対する熱処理が行われる。
この熱処理時において、熱処理空間Ｈ内の大気が加熱されることによって熱対流が生じ、熱処理空間Ｈ内の温度分布が均一化が図られると同時に、当該熱対流を生じさせる熱気流の一部が断熱筐体１１の上壁１１Ａに向かって上昇し、断熱筐体１１の上壁１１Ａの挿入孔１５，１５と筒状体３０，３０との間の環状空隙Ｒ１、および、筒状体３０，３０とハロゲンヒータランプ２０の発光管２１の垂直部２１Ｂ，２１Ｃとの間の環状空隙Ｒ２を通過して熱処理装置の外部に自然に排出される。
In the heat treatment apparatus, the halogen heater lamp 20 is turned on in a state where the work W is carried in from the carry-in port 13 by the carrying means 12 and one work W is placed at a predetermined position related to one treatment block. The atmosphere in the heat treatment space H is heated by heating with the filament 24 of the halogen heater lamp 20 to increase the atmosphere temperature in the heat treatment space H, and the heat insulation housing 11 keeps the desired atmosphere temperature for a predetermined time. A heat treatment is performed on the workpiece W.
At the time of this heat treatment, the air in the heat treatment space H is heated to generate thermal convection, and the temperature distribution in the heat treatment space H is made uniform, and at the same time, part of the thermal airflow that causes the heat convection is generated. Ascending toward the upper wall 11A of the heat insulating casing 11, the annular gap R1 between the insertion holes 15, 15 of the upper wall 11A of the heat insulating casing 11 and the cylindrical bodies 30, 30, and the cylindrical body 30, 30 passes through the annular gap R2 between the vertical portions 21B and 21C of the arc tube 21 of the halogen heater lamp 20 and is naturally discharged to the outside of the heat treatment apparatus.
ワークＷの熱処理に係る熱処理空間Ｈ内の雰囲気温度は、ワークＷの種類によっても異なるが、例えば８００〜１０００℃とされ、より好ましくは８００〜９００℃とされる。 Although the atmospheric temperature in the heat treatment space H related to the heat treatment of the workpiece W varies depending on the type of the workpiece W, it is set to, for example, 800 to 1000 ° C., more preferably 800 to 900 ° C.
ワークＷの熱処理に係る熱処理空間Ｈ内の雰囲気温度が１０００℃である場合に、筒状体３０，３０とハロゲンヒータランプ２０の発光管２１の垂直部２１Ｂ，２１Ｃとの間の環状空隙Ｒ２の下端における温度は約９５０℃、上端における温度は約２００℃となる。 When the atmospheric temperature in the heat treatment space H related to the heat treatment of the workpiece W is 1000 ° C., the annular gap R2 between the cylindrical bodies 30 and 30 and the vertical portions 21B and 21C of the arc tube 21 of the halogen heater lamp 20 The temperature at the lower end is about 950 ° C., and the temperature at the upper end is about 200 ° C.
以上のような熱処理装置によれば、断熱筐体１１の上壁１１Ａに形成された挿入孔１５，１５に挿通された筒状体３０，３０内に、ハロゲンヒータランプ２０が、その発光管２１の垂直部２１Ｂ，２１Ｃが当該垂直部２１Ｂ，２１Ｃの外周面と筒状体３０，３０の内周面との間に間隙を介する状態で挿通されるよう支持されている。このため、垂直部２１Ｂ，２１Ｃの外周面が断熱筐体１１の上壁１１Ａに直接接触せず、しかも、熱処理空間Ｈ内に発生する熱気流を垂直部２１Ｂ，２１Ｃの周囲に滞留させることなく環状空隙Ｒ１，Ｒ２を流通させて外部に排出させることができ、その結果、垂直部２１Ｂ，２１Ｃの過熱が抑止される。従って、当該垂直部２１Ｂ，２１Ｃの外周面にワークＷから蒸発した不純物が付着して発光管２１と反応して当該外周面に反応物を生成することが抑止され、これにより、長期間にわたって使用した場合にも発光管２１の破損が生じず、長寿命が得られる。 According to the heat treatment apparatus as described above, the halogen heater lamp 20 is connected to the arc tube 21 in the cylindrical bodies 30, 30 inserted through the insertion holes 15, 15 formed in the upper wall 11 </ b> A of the heat insulating casing 11. The vertical portions 21B and 21C are supported so as to be inserted between the outer peripheral surfaces of the vertical portions 21B and 21C and the inner peripheral surfaces of the cylindrical bodies 30 and 30 with a gap therebetween. For this reason, the outer peripheral surfaces of the vertical portions 21B and 21C are not in direct contact with the upper wall 11A of the heat insulating casing 11, and the hot air flow generated in the heat treatment space H is not retained around the vertical portions 21B and 21C. The annular gaps R1 and R2 can be circulated and discharged to the outside. As a result, overheating of the vertical portions 21B and 21C is suppressed. Accordingly, it is possible to prevent impurities evaporated from the work W from adhering to the outer peripheral surfaces of the vertical portions 21B and 21C and react with the arc tube 21 to generate reactants on the outer peripheral surface. In this case, the arc tube 21 is not damaged and a long life is obtained.
以上、本発明の実施形態について説明したが、上記実施形態に限定されるものではなく、種々の変更を加えることができる。
例えば、挿入孔、筒状体、ハロゲンヒータランプの発光管の形状は、それぞれ、断面が相似形状を有することに限定されず、例えば、挿入孔が円柱状を有すると共にハロゲンヒータランプの発光管が円筒状のものであるときに、筒状体が角筒状のものとしてもよい。
As mentioned above, although embodiment of this invention was described, it is not limited to the said embodiment, A various change can be added.
For example, the shape of the arc tube of the insertion hole, the cylindrical body, and the halogen heater lamp is not limited to having a similar cross section, for example, the insertion hole has a cylindrical shape and the arc tube of the halogen heater lamp has When it is cylindrical, the cylindrical body may be a rectangular tube.
以下に、本発明の効果を確認するための実験を行った。
図１の構成を有する熱処理装置〔１〕〜〔５〕を作製した。具体的な構成は、以下の通りである。
（１）処理ブロック
・１つ
・１つの処理ブロックに６本のハロゲンヒータランプ２０
（２）ハロゲンヒータランプ２０
・フィラメント２４の材質：タングステン
・フィラメント２４の長さ：１６０ｍｍ
・発光管２１の材料：石英ガラス
・発光管２１の水平部２１Ａの長さ：１７５ｍｍ
・発光管２１の垂直部２１Ｂ，２１Ｃの長さ：２７０ｍｍ
・発光管２１の水平部２１Ａおよび垂直部２１Ｂ，２１Ｃの外径：φ１５ｍｍ
・ランプ入力：１１００Ｗ
（３）筒状体３０
・筒状体３０の材料：石英ガラス
・内径：表１に示す通り
・外径：表１に示す通り
・長さ：２６０ｍｍ
（４）断熱筐体１１
・断熱筐体１１の材料：耐火断熱レンガ
・挿入孔１５の内径：表１に示す通り
・上壁１１Ａの厚み：１００ｍｍ
・上壁１１Ａの上面からの筒状体３０の突出長さ：１２７ｍｍ
・上壁１１Ａの下面からの筒状体３０の突出長さ：４８ｍｍ
・ワークＷと水平部２１Ａの離間距離：５０ｍｍ
An experiment for confirming the effect of the present invention was performed below.
Heat treatment apparatuses [1] to [5] having the configuration shown in FIG. 1 were produced. The specific configuration is as follows.
(1) Processing block, one halogen heater lamp 20 in one processing block
(2) Halogen heater lamp 20
-Material of filament 24: Tungsten-Length of filament 24: 160mm
-Material of arc tube 21: quartz glass-Length of horizontal portion 21A of arc tube 21: 175 mm
-Length of the vertical portions 21B and 21C of the arc tube 21: 270 mm
The outer diameter of the horizontal portion 21A and the vertical portions 21B and 21C of the arc tube 21: φ15 mm
・ Lamp input: 1100W
(3) Cylindrical body 30
-Material of cylindrical body 30: quartz glass-Inner diameter: as shown in Table 1-Outer diameter: as shown in Table 1-Length: 260mm
(4) Insulated housing 11
-Material of heat insulation housing 11: Fireproof heat insulation brick-Inner diameter of insertion hole 15: As shown in Table 1-Thickness of upper wall 11A: 100 mm
-Protruding length of the cylindrical body 30 from the upper surface of the upper wall 11A: 127 mm
-Projection length of the cylindrical body 30 from the lower surface of the upper wall 11A: 48 mm
・ Distance between workpiece W and horizontal part 21A: 50 mm
この熱処理装置〔１〕〜〔５〕を、それぞれ、ハロゲンヒータランプ２０を１１００Ｗで点灯させ、ワークＷ（太陽電池基板）を１０００℃で加熱する熱処理を行い、熱処理後のハロゲンヒータランプ２０の色の程度を観察した。結果を表１に示す。 In each of the heat treatment apparatuses [1] to [5], the halogen heater lamp 20 is turned on at 1100 W, heat treatment is performed to heat the workpiece W (solar cell substrate) at 1000 ° C., and the color of the halogen heater lamp 20 after the heat treatment is performed. The degree of was observed. The results are shown in Table 1.
＜実施例１＞
図１の構成を有する熱処理装置〔６〕を作製した。具体的な構成は、以下の通りである。
（１）処理ブロック
・１つ
・１つの処理ブロックに６本のハロゲンヒータランプ
（２）ハロゲンヒータランプ
・フィラメントの材質：タングステン
・フィラメントの長さ：１６０ｍｍ
・発光管の材料：石英ガラス
・発光管の水平部の長さ：１７５ｍｍ
・発光管の垂直部の長さ：２７０ｍｍ
・発光管の水平部および垂直部の外径：φ１５ｍｍ
・ランプ入力：１１００Ｗ
（３）筒状体
・筒状体の材料：石英ガラス
・内径：φ２１ｍｍ
・外径：φ２５ｍｍ
・長さ：２５１ｍｍ
（４）断熱筐体
・断熱筐体の材料：耐火断熱レンガ
・挿入孔：φ２５ｍｍ
・上壁の厚み：１００ｍｍ
・上壁の上面からの筒状体の突出長さ：１２７ｍｍ
・上壁の下面からの筒状体の突出長さ：４８ｍｍ
・ワークと水平部の離間距離：５０ｍｍ
<Example 1>
A heat treatment apparatus [6] having the configuration of FIG. 1 was produced. The specific configuration is as follows.
(1) Process block, 6 halogen heater lamps per process block (2) Halogen heater lamp Filament material: Tungsten filament length: 160mm
・ Material of arc tube: Quartz glass ・ Horizontal length of arc tube: 175 mm
・ Vertical length of arc tube: 270mm
・ Outer diameter of horizontal and vertical arc tube: φ15mm
・ Lamp input: 1100W
(3) Cylindrical body / tubular body material: quartz glass, inner diameter: φ21 mm
・ Outer diameter: φ25mm
・ Length: 251mm
(4) Heat-insulating housing / material of heat-insulating housing: fire-resistant and heat-insulating brick / insertion hole: φ25mm
-Upper wall thickness: 100 mm
-Projection length of cylindrical body from upper surface of upper wall: 127 mm
-Projection length of the cylindrical body from the lower surface of the upper wall: 48 mm
・ Distance between workpiece and horizontal part: 50mm
＜比較例１＞
図３の構成を有する熱処理装置〔７〕を作製した。具体的な構成は以下の通りである。
（１）処理ブロック
・１つ
・１つの処理ブロックに６本のハロゲンヒータランプ
（２）ハロゲンヒータランプ
・フィラメントの材質：タングステン
・フィラメントの長さ：１６０ｍｍ
・発光管の材料：石英ガラス
・発光管の水平部の長さ：１７５ｍｍ
・発光管の垂直部の長さ：２７０ｍｍ
・発光管の水平部および垂直部の外径：φ１５ｍｍ
・ランプ入力：１１００Ｗ
（３）断熱筐体
・断熱筐体の材料：耐火断熱レンガ
・挿入孔：φ２０ｍｍ
・上壁の厚み：１００ｍｍ
・ワークと水平部の離間距離：５０ｍｍ
<Comparative Example 1>
A heat treatment apparatus [7] having the configuration of FIG. 3 was produced. The specific configuration is as follows.
(1) Process block, 6 halogen heater lamps per process block (2) Halogen heater lamp Filament material: Tungsten filament length: 160mm
・ Material of arc tube: Quartz glass ・ Horizontal length of arc tube: 175 mm
・ Vertical length of arc tube: 270mm
・ Outer diameter of horizontal and vertical arc tube: φ15mm
・ Lamp input: 1100W
(3) Material of heat insulation housing / heat insulation housing: fireproof heat insulation brick / insertion hole: φ20mm
-Upper wall thickness: 100 mm
・ Distance between workpiece and horizontal part: 50mm
上記の熱処理装置〔６〕，〔７〕を、それぞれ、ワークとして太陽電池基板を載置し、ハロゲンヒータランプを１１００Ｗで点灯させ、破損するまでの時間を観察した。
その結果、本発明に係る熱処理装置〔６〕においては、点灯から５００時間を経過しても６本中１本もハロゲンヒータランプの発光管の破損が観察されなかったのに対して、比較用の従来の熱処理装置〔７〕においては、点灯から１６０時間で６本すべてのハロゲンヒータランプの発光管が破損した。
このように、本発明の熱処理装置に係るハロゲンヒータランプの発光管の破損が防止された理由としては、筒状体を具備することにより、ハロゲンヒータランプの発光管の垂直部の過熱が抑止されて当該発光管の垂直部の温度が低く抑制されたために、当該垂直部の外周面にワークから蒸発した不純物が付着しても、発光管と反応して当該外周面に反応物を生成することが防止されたものと推測される。
Each of the above heat treatment apparatuses [6] and [7] was mounted with a solar cell substrate as a work, the halogen heater lamp was turned on at 1100 W, and the time until breakage was observed.
As a result, in the heat treatment apparatus [6] according to the present invention, no breakage of the arc tube of the halogen heater lamp was observed in one out of six lamps even after 500 hours had elapsed from lighting. In the conventional heat treatment apparatus [7], the arc tubes of all six halogen heater lamps were damaged after 160 hours from lighting.
As described above, the reason why the arc tube of the halogen heater lamp according to the heat treatment apparatus of the present invention is prevented from being damaged is that the vertical portion of the arc tube of the halogen heater lamp is prevented from being overheated. Since the temperature of the vertical part of the arc tube is suppressed to a low level, even if impurities evaporated from the work adhere to the outer peripheral surface of the vertical part, it reacts with the arc tube and generates a reactant on the outer peripheral surface. Is presumed to have been prevented.
１１ 断熱筐体
１１Ａ 上壁
１１Ｂ，１１Ｃ 側壁
１２ 搬送手段
１３ 搬入口
１４ 搬出口
１５ 挿入孔
２０ ハロゲンヒータランプ
２１ 発光管
２１Ａ 水平部
２１Ｂ，２１Ｃ 垂直部
２２ａ，２２ｂ 封止部
２３ａ，２３ｂ 環状凹溝
２４ フィラメント
２４ａ，２４ｂ 内部リード
２５ａ，２５ｂ ランプベース
２６ａ，２６ｂ 胴部
２７ａ，２７ｂ 給電線
２８ａ，２８ｂ 外部リード
２９ａ，２９ｂ 金属箔
３０ 筒状体
３１ フランジ
３２ 係止凹所
３３ 側縁
３５ ピンチ型筒状体保持具
３７ 保持具支持アーム
４１ 断熱筐体
４２ 搬送手段
４３ 搬入口
４４ 搬出口
４５ 挿入孔
５０ ハロゲンヒータランプ
５１ 発光管
５１Ａ 水平部
５１Ｂ，５１Ｃ 垂直部
Ｈ 熱処理空間
Ｒ１，Ｒ２ 環状空隙
Ｗ ワーク
DESCRIPTION OF SYMBOLS 11 Heat insulation housing | casing 11A Upper wall 11B, 11C Side wall 12 Carrying means 13 Carry-in port 14 Carry-out port 15 Insertion hole 20 Halogen heater lamp 21 Arc tube 21A Horizontal part 21B, 21C Vertical part 22a, 22b Sealing part 23a, 23b Annular groove 24 Filaments 24a and 24b Internal leads 25a and 25b Lamp bases 26a and 26b Body portions 27a and 27b Power supply lines 28a and 28b External leads 29a and 29b Metal foil 30 Tubular body 31 Flange 32 Locking recess 33 Side edge 35 Pinch type tube Shaped body holder 37 Holder support arm 41 Heat insulation housing 42 Transport means 43 Carry-in port 44 Carry-out port 45 Insertion hole 50 Halogen heater lamp 51 Arc tube 51A Horizontal portion 51B, 51C Vertical portion H Heat treatment space R1, R2 Annular void W Workpiece
Claims (9)
当該ハロゲンヒータランプの各々の垂直部の周囲に、当該垂直部の外周面との間に間隙を介するよう配設された筒状体とを備えることを特徴とするハロゲンヒータランプユニット。 A halogen heater lamp having a U-shaped arc tube comprising a horizontal portion and a vertical portion extending vertically from both ends thereof, and a filament disposed at least in the horizontal portion of the arc tube;
A halogen heater lamp unit comprising a cylindrical body disposed around each vertical portion of the halogen heater lamp with a gap between the vertical portion and an outer peripheral surface of the vertical portion.
当該断熱筐体の上壁に形成された挿入孔に挿通されるよう配設された筒状体と、
ワークを加熱する熱源として、水平部およびその両端から垂直方向に伸びる垂直部よりなるＵ字状の発光管を備え、発光管内における少なくとも水平部にフィラメントが配設されたハロゲンヒータランプとを備える熱処理装置であって、
当該ハロゲンヒータランプが、当該ハロゲンヒータランプの発光管の各々の垂直部が前記筒状体内に当該垂直部の外周面と前記筒状体の内周面との間に間隙を介する状態で挿通されるよう配設されていることを特徴とする熱処理装置。 A heat-insulating housing made of a heat insulating material surrounding a heat treatment space for heating the workpiece;
A cylindrical body arranged to be inserted through an insertion hole formed in the upper wall of the heat insulating housing;
Heat treatment comprising a U-shaped arc tube comprising a horizontal portion and a vertical portion extending vertically from both ends thereof as a heat source for heating the workpiece, and a halogen heater lamp having a filament disposed at least in the horizontal portion of the arc tube A device,
The halogen heater lamp is inserted into the cylindrical body with each vertical portion of the arc tube of the halogen heater lamp interposed between the outer peripheral surface of the vertical portion and the inner peripheral surface of the cylindrical body. The heat processing apparatus characterized by arrange | positioning.
The size of the gap between the outer peripheral surface of the cylindrical body and the inner peripheral surface of the insertion hole is greater than 0 and equal to or less than 10 mm , according to any one of claims 3 to 7. Heat treatment equipment.
The said cylindrical body is supported and arrange | positioned by the said heat insulation housing | casing by being pinched by the pinch type | mold cylindrical body holder supported by the said heat insulation housing | casing. The heat treatment apparatus according to claim 8.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011129052A JP5365884B2 (en) | 2011-06-09 | 2011-06-09 | Halogen heater lamp unit and heat treatment apparatus |
| KR1020120059245A KR20120137244A (en) | 2011-06-09 | 2012-06-01 | Halogen heater lamp unit and heat treatment apparatus |
| CN201210186578.1A CN102821493B (en) | 2011-06-09 | 2012-06-07 | Halogen heating lamp unit and annealing device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011129052A JP5365884B2 (en) | 2011-06-09 | 2011-06-09 | Halogen heater lamp unit and heat treatment apparatus |
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| Publication Number | Publication Date |
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| JP2012256523A JP2012256523A (en) | 2012-12-27 |
| JP5365884B2 true JP5365884B2 (en) | 2013-12-11 |
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| JP (1) | JP5365884B2 (en) |
| KR (1) | KR20120137244A (en) |
| CN (1) | CN102821493B (en) |
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| JP5858891B2 (en) * | 2012-09-27 | 2016-02-10 | オリジン電気株式会社 | Heat treatment equipment |
| CN104697329B (en) * | 2015-03-26 | 2017-03-01 | 江西泰明光伏有限公司 | A kind of heating arrangement of crystal silicon solar cell sheet sintering furnace and sintering furnace |
| CN107101258A (en) * | 2017-06-15 | 2017-08-29 | 中创杰能（天津）科技有限公司 | A kind of novel photoelectric heat supply process |
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| US4349724A (en) * | 1980-11-07 | 1982-09-14 | Russell Ellersick | Articulate radiant heater module |
| JPS6180594U (en) * | 1984-11-01 | 1986-05-29 | ||
| JP2000082573A (en) * | 1998-09-07 | 2000-03-21 | Raito Black:Kk | Carbon heating element |
| JP3438658B2 (en) * | 1999-07-22 | 2003-08-18 | ウシオ電機株式会社 | Lamp unit and light irradiation type heating device |
| JP2001208478A (en) * | 2000-01-31 | 2001-08-03 | Tokyo Electron Ltd | Thermal processor |
| JP3659863B2 (en) * | 2000-04-06 | 2005-06-15 | 大日本スクリーン製造株式会社 | Heat treatment equipment |
| JP4948701B2 (en) * | 2000-12-28 | 2012-06-06 | 東京エレクトロン株式会社 | Heating apparatus, heat treatment apparatus having the heating apparatus, and heat treatment control method |
| JP4828031B2 (en) * | 2001-03-02 | 2011-11-30 | 東京エレクトロン株式会社 | Lamp, heat treatment equipment using lamp |
| JP3932843B2 (en) * | 2001-09-03 | 2007-06-20 | ウシオ電機株式会社 | Heater lamp and light irradiation type heating device |
| JP4102239B2 (en) * | 2003-04-03 | 2008-06-18 | 日鉱金属株式会社 | Furnace with heating elements on the inner wall |
| JP4523479B2 (en) * | 2005-03-01 | 2010-08-11 | 日本碍子株式会社 | Continuous heat treatment furnace and heat treatment method |
| CN100413020C (en) * | 2004-10-04 | 2008-08-20 | 日本碍子株式会社 | Continuous heat treatment furnace and heat treatment method |
| JP2008071787A (en) * | 2006-09-12 | 2008-03-27 | Ushio Inc | Heating device of light irradiation type and heating method of light irradiation type |
| JP5282393B2 (en) * | 2007-11-06 | 2013-09-04 | ウシオ電機株式会社 | Light irradiation type heat treatment equipment |
| JP5293453B2 (en) * | 2009-06-25 | 2013-09-18 | ウシオ電機株式会社 | Filament lamp |
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| JP2012256523A (en) | 2012-12-27 |
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