KR20120135785A - Processing apparuatus and method of cassette loading type - Google Patents

Processing apparuatus and method of cassette loading type Download PDF

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Publication number
KR20120135785A
KR20120135785A KR1020110054693A KR20110054693A KR20120135785A KR 20120135785 A KR20120135785 A KR 20120135785A KR 1020110054693 A KR1020110054693 A KR 1020110054693A KR 20110054693 A KR20110054693 A KR 20110054693A KR 20120135785 A KR20120135785 A KR 20120135785A
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KR
South Korea
Prior art keywords
cassette
unit
processing
processing unit
transparent plate
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KR1020110054693A
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Korean (ko)
Inventor
김윤택
송진규
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에이스하임 주식회사
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Priority to KR1020110054693A priority Critical patent/KR20120135785A/en
Publication of KR20120135785A publication Critical patent/KR20120135785A/en

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
    • H01L21/67173—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers in-line arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67745—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber characterized by movements or sequence of movements of transfer devices

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

PURPOSE: A cassette loadable processing device and a processing method are provided to automate a treatment process of a transparent plate cut at a predetermined size to be applied to a mobile display. CONSTITUTION: A cassette loadable processing device(200) comprises a cassette transferring part and multiple process treatment parts. Workpiece mounting parts for mounting multiple transparent plates are laminated on a cassette in multi-stages. The process treatment parts are connected each other by the cassette transferring part and performs a process with a batch or an inline mode after inserting a cassette unit number of the transparent plates. A cassette-unit number of the transparent plates is transferred regardless of the internal treatment mode of the process.

Description

Cassette loading type process equipment and process method {PROCESSING APPARUATUS AND METHOD OF CASSETTE LOADING TYPE}

The present invention relates to a cassette loading type process apparatus and a process method, and more particularly, to a process apparatus and a process method for transferring between processes in a cassette unit and facilitating logistics automation between processes.

Transparent plates used for screen protection and design of mobile displays are manufactured using glass, acrylic, and the like.

A portion of the touch screen structure is deposited or etched on the transparent plate, and a contaminant such as a fingerprint material is deposited, and a reinforcing process is applied, and these processes are cut to a size applicable to the mobile display. You must proceed afterwards.

This is because when the above processes, in particular, the reinforcing process and cutting are performed in the form of a large-size transparent disc, the transparent plate is damaged and cannot be applied to the product.

Therefore, the transparent plate, in particular, the transparent plate used in high-end models must first be cut to the size of the mobile display, and then the process must be carried out in units of product size.

However, it is difficult to apply the conventional display processing apparatus to the transparent plate process of the product size because the target mainly targets the transparent plate of a large area. This is because a large number of cut transparent plates had to be processed at one time, and there were problems with transfer and linkage between processes.

In addition, even when implementing the process of processing the transparent plate of the product size, there is a difference in the processing form for each process, it was difficult to achieve the automation of linking all the processes. Depending on the types of processes, some process equipments are processed in-line and other equipments are processed in batch form. Because it was difficult.

Therefore, it is possible to automate the whole process of the transparent plate cut to product size, to control the type and quantity of the transparent plate to be processed, and to make the process automation by linking with each other even if the shape of the process equipment is different. Development of apparatus and process methods is required.

The cassette loading type processing apparatus and processing method according to the present invention have a problem of automating the entire process of processing a transparent plate cut to a size that can be applied to a mobile display.

In addition, the cassette loading type process apparatus and the process method according to the present invention is to make it possible to link the processing steps of the process equipment having a different form to each other.

In addition, the cassette loading-type processing apparatus and the method according to the present invention is to solve the problem that can be simplified in the logistics of the entire process by transferring the transparent plate to be processed in the cassette unit.

In addition, the cassette loading type processing apparatus and the process method according to the present invention is a problem to enable the automated process configuration of a cell type (cell type).

Cassette-loading type processing apparatus according to the present invention for solving the above problems, the cassette (cassette) in which the processing unit mounting portion for mounting a plurality of transparent plates are stacked in multiple stages; A cassette transfer unit for transferring the cassette; And a plurality of process units connected to each other through the cassette transfer unit and processing the process in a batch or in-line manner after the transparent plate is introduced into the cassette unit. Regardless of the processing method, the transfer between the processes is made in the unit of cassette, and it is characterized by facilitating the logistics automation between the processes.

In addition, the cassette loading type processing apparatus according to the present invention is characterized in that the plurality of transparent plate is a transparent plate cut to a size that can be applied to a mobile display of 15 inches or less.

In addition, in the cassette loading type processing apparatus according to the present invention, when the process processing unit is an in-line method, the transparent plate is introduced into the process unit in the cassette unit, and after the process, the unit is mounted in the unit of the processing unit. It is characterized by being processed while moving.

In addition, the cassette loading process apparatus according to the present invention, each of the plurality of process processing unit, the vacuum chamber for maintaining the interior in a vacuum state; And a cassette inlet for introducing the cassette into or out of the vacuum chamber.

In addition, in the cassette loading type processing apparatus according to the present invention, the process processing unit is formed along the cassette conveying unit and the inlet and the outlet of the cassette inlet are formed as one, the process processing unit and the cassette inlet are connected in one direction, It is characterized in that the entire process is composed of a cell type (cell type).

In addition, the cassette loading type processing apparatus according to the present invention is characterized in that the plurality of process units, the process unit for the reinforcement process is included.

In addition, the cassette loading type processing apparatus according to the present invention, the transparent plate is characterized in that the glass (glass) or acrylic.

And, in order to solve the above problems, the cassette loading type process method according to the present invention, the processing unit mounting portion including a plurality of transparent plates are stacked in multiple stages, the cassette is transferred to the process processing unit; After the cassette is added to the processing unit, performing a process for the transparent plate included in the cassette in a batch or in-line manner; And when the process is completed by the process processing unit, the cassette is again taken out and moved to the next process processing unit. The transfer between processes is performed in cassette units regardless of the internal processing method of the process, and the logistics automation between processes is performed. It is characterized in that to facilitate.

In addition, in the cassette loading type process method according to the present invention, when the process of the process unit proceeds in an in-line manner, the process unit is separated from the cassette after being fed to the process unit and the process The process is carried out while being transferred to the water mounting unit; And forming the cassette by stacking the processing unit mounting unit processed by the processing unit again in multiple stages.

In addition, in the cassette loading type process method according to the present invention, a plurality of the process processing unit is disposed along the conveyance path of the cassette, and the introduction and export of the cassette is made through one entrance formed in the process processing unit, the process processing unit It is possible to change the process just by moving the simple.

Cassette-loading type processing apparatus and method according to the present invention, it is possible to automate the entire process of processing the transparent plate cut to a size that can be applied to the mobile display.

In addition, the cassette loading type processing apparatus and the process method according to the present invention, it is possible to link the processing steps of the process equipment having a different form. Thus, automation can be achieved even between different types of processes.

In addition, the cassette loading type processing apparatus and the method according to the present invention, by transferring the transparent plate to the cassette unit to simplify the logistics of the entire process. In addition, it is possible to reduce the installation space of the equipment by configuring a compact cassette, and also to increase the ability to respond to small quantities of various types.

In addition, the cassette loading type process apparatus and the process method according to the present invention may enable a cell type (automatic) process configuration. Therefore, the process can be changed only by a simple horizontal movement of the process equipment during the process change.

1 is a block diagram showing the configuration of the workpiece mounting portion and the cassette included in the cassette loading process apparatus according to the present invention.
Figure 2 is a block diagram showing the configuration of a cassette loading process apparatus according to an embodiment of the present invention.
3 is a block diagram showing a configuration of a process processor included in the cassette loading process apparatus according to an embodiment of the present invention.
Figure 4 is a block diagram showing the configuration of a cassette loading process apparatus according to another embodiment of the present invention.
5 is a block diagram showing a configuration of a process processing unit included in a cassette loading process apparatus according to another embodiment of the present invention.
6 is a flowchart of a cassette loading type process method according to the present invention.

Hereinafter, a cassette loading type processing apparatus and a process method according to the present invention will be described with reference to the accompanying drawings. The embodiments are provided so that those skilled in the art can easily understand the technical spirit of the present invention, and thus the present invention is not limited thereto. In addition, matters represented in the accompanying drawings may be different from the form actually embodied in the schematic drawings in order to easily explain the embodiments of the present invention.

Hereinafter, a cassette loading type processing apparatus according to an embodiment of the present invention will be described in detail with reference to FIGS. 1 to 3.

1 is a block diagram showing the configuration of the processing unit mounting portion 100 and the cassette 200 included in the cassette loading type processing apparatus according to the present invention, Figure 2 is a cassette loading type processing apparatus according to an embodiment of the present invention 3 is a configuration diagram illustrating a configuration of FIG. 3 is a configuration diagram illustrating a configuration of a process processing unit 400 included in a cassette loading process apparatus according to an embodiment of the present invention.

1 to 3, a cassette loading type processing apparatus according to an embodiment of the present invention includes a cassette 200 in which a processing unit mounting part 100 on which a plurality of transparent plates 110 are mounted is stacked in multiple stages ( cassette), a cassette transfer unit 300 for transferring the cassette 200, and connected to each other through the cassette transfer unit 300, and after the transparent plate 110 is introduced in units of the cassette 200, the batch is disposed. Or it may include a plurality of process processing unit 400 to proceed the process in an in-line (in-line) method.

Here, the cassette (cassette, 200) is a configuration in which the processing unit mounting portion 100 for mounting the plurality of transparent plates 110 cut into a size that can be applied to a mobile display is formed by stacking in multiple stages, thereby forming a process apparatus. It is a configuration in charge of the transfer of the transparent plate 110 made between the plurality of process processing unit 400.

The cassette 200 can simplify the logistics of the entire process, thereby reducing the installation space of the equipment. In addition, it is possible to control the size of the cassette 200 and the selection of stacked materials, thereby ensuring a corresponding force for small quantities of various types.

On the other hand, the workpiece mounting portion 100 stacked on the cassette 200 is a configuration for mounting a plurality of transparent plate 110 cut to a size that can be applied to a mobile display, the transparent plate 110 It serves as a medium for mounting on the cassette 200, the inside of the process processor 400 serves as a carrier for moving the transparent plate 110 in accordance with the process.

In addition, the transparent plate 110, preferably used in a mobile display, preferably be composed of a glass (glass) or acrylic (arylic) material, such as a large area such as 370mm horizontal, 470mm vertical The glass disc that is configured may be formed by cutting to various sizes that can be applied to a mobile display, such as 10.1 inches, 7 inches, 5 inches or 4 inches. For reference, the size of the glass disc is preferably formed to a size of 15 inches, and is not limited to the size mentioned above.

Referring to FIG. 1, the cassette 200 includes a plurality of transparent plates 110 cut to a size that can be applied to a mobile display to the workpiece mounting portion 100, and the workpiece mounting portion 100. It may be configured to be stacked at regular intervals in the vertical direction. The cassette 200 is configured to be freely mounted and detached from the workpiece mounting portion 100, and is preferably configured to move the workpiece mounting portion 100 in an inner space. The cassette 200 In the case of being introduced into the process processing unit 400 of the in-line method, the process processing is carried out while separating the stacked processing unit mounting units 100 in order, and after the process processing, the process is stacked again in order. Because you should be able to.

The cassette transporter 300 is configured to transport the cassette 200, and is responsible for the transport of the cassette 200 that is formed between the plurality of process processors 400, and through the transport of the cassette 200. It serves to connect the whole process.

The cassette transfer part 300 may be preferably configured in the form of a straight line, it is also possible to configure the cassette transfer part 300 in the form of a conveyor system (conveyer system).

The process processor 400 is configured to individually handle a plurality of processes that may be performed in the process apparatus according to the present invention, and accommodates the transparent plate 110 transferred to the cassette 200. The configuration to proceed.

The process processed by the process processing unit 400 may include all processes that can be applied to the transparent plate 110, such as a deposition process, an etching process, a strengthening process, depending on the conditions of the transparent plate 110 to be processed The type and order of the, etc. are determined, and thus the process processor 400 may be configured.

Meanwhile, the process treatment method of the process processor 400 may be configured in various forms such as a batch method and an in-line method. Such a method may be freely selected according to a process. That is, the transfer and input of the transparent plate 110 need only be made in the cassette 200 unit, and the manner in which the transparent plate 110 is processed in the process processor 400 may be freely selected. Although the processing method inside the process processor 400 is not limited, if the object to be input and taken out by the process processor 400 is maintained in the cassette 200, the entire process is not affected.

In detail, the process processor 400 may process the transparent plate 110 in a batch manner after inserting the cassette 200, or may process the cassette 200 in the processing unit mounting unit ( After separation into 100 units, the process can be carried out in-line.

In this case, when the process processing unit 400 performs the process in an in-line manner, the cassette 200, which is introduced after the cassette 200 is introduced, is separated by the processing unit mounting unit 100. The process is applied to the workpiece mounting part 100 to be moved, and the cassette 200 is formed by being stacked in multiple stages in the order of the workpiece mounting part 100 which has been processed. As a result, the input and the export of the transparent plate 110 is made in the cassette 200, and the process of the transparent plate 110 is made in the processing unit mounting unit 100.

Referring to FIG. 3, the structure of the process processor 400 is characterized in that the process processor 400 includes a vacuum chamber 410 for keeping an interior in a vacuum state and a cassette entrance 420 for feeding or unloading the cassette 200. And a process treatment configuration 430 for processing the transparent plate 110 fixed to the workpiece mounting portion 100 constituting the cassette 200.

Here, the vacuum chamber 410 is configured to provide a space in which a process such as deposition, etching, and strengthening is provided, and includes equipment necessary to proceed with the process, and means a chamber in which the inside is maintained in vacuum.

In addition, the cassette inlet / outlet 420 is configured to insert or eject the cassette 200 transferred by the cassette transporter 300 into the process processor 400, and thus, the outlet of the process processor 400. It is a configuration that plays a role. The cassette inlet 420 is configured to be opened and closed to the process processing unit 400, the outlet and the inlet can be configured separately, as well as the outlet and the inlet to form a single integrated form. It may be.

In addition, the process treatment configuration 430 is a configuration for a process that the process processor 400 is in charge of, and may include an etching apparatus, a deposition apparatus, a reinforcement process equipment, and the like depending on the type of the process being performed. The process treatment configuration 430 may be preferably disposed in the vacuum chamber 410, and directly processing the input transparent plate 110.

As described above, the cassette loading type processing apparatus according to an embodiment of the present invention transfers the transparent plate 110 to the cassette 200 as shown in FIG. 2. Specifically, the transfer between the plurality of process processing apparatus is made through the cassette 200, and the input and export of the transparent plate 110 made in the individual process processing apparatus are also performed through the cassette 200.

Therefore, the cassette loading type processing apparatus according to the embodiment of the present invention enables to link the processing steps of the processing equipment taking different forms. Thus, automation can be achieved even between different types of processes.

In addition, the cassette loading type processing apparatus according to an embodiment of the present invention may simplify the logistics of the entire process by transferring the transparent plate 110 to be processed in the cassette 200 unit. In addition, it is possible to reduce the installation space of the equipment by configuring a compact cassette 200, and also to increase the ability to respond to small quantities of various types.

Hereinafter, a cassette loading type processing apparatus according to another embodiment of the present invention will be described in detail with reference to FIGS. 4 and 5.

4 is a block diagram showing a configuration of a cassette loading type processing apparatus according to another embodiment of the present invention, Figure 5 is a configuration of a processing unit 400 included in the cassette loading type processing apparatus according to another embodiment of the present invention It is a block diagram which shows.

4 and 5, in the cassette loading type processing apparatus according to another exemplary embodiment of the present invention, the process processor 400 is formed along the cassette transporter 300, and the inlet of the cassette outlet 420 is provided. And the outlet may be integrally formed.

Specifically, as shown in FIG. 5, the outlet and the inlet of the cassette inlet and outlet 420 constituting the process processor 400 may be integrally formed, and the cassette 200 that is input or taken out to the process processor 400 may be the same. Can be entered or taken out while sharing the route.

Accordingly, as shown in FIG. 4, an automatic facility of a cell type can be configured through linkage with the cassette transfer unit 300, and the entire process can be changed by a simple movement of the process processor 400. .

Hereinafter, a cassette loading type process method according to the present invention will be described in detail with reference to FIG. 6.

For reference, the following sequence of steps S10 to S17 are disclosed for the purpose of illustration, and the cassette loading type process method according to the present invention may be achieved even if the steps S10 to S17 are combined in different orders.

6 is a flowchart of a cassette loading type process method according to the present invention.

Referring to FIG. 6, the cassette loading type process method according to the present invention may include a step of stacking the workpiece mounting part 100 for mounting the plurality of transparent plates 110 on the cassette 200 in multiple stages. (S10)

The step S10 may or may not be included as part of the cassette loading type process method according to the present invention. When the cassette loading type process method according to the present invention does not include the step S10, the step S10 is an external step. After proceeding it is associated with the process method according to the invention.

On the other hand, the transparent plate 110 is preferably formed in a size that can be used in a mobile display, it may be composed of glass (glass) or acrylic (arylic) material, such as 370mm wide, 470mm long It is desirable to cut and form a glass disc composed of an area into various sizes that can be applied to a mobile display such as 10.1 inch, 7 inch, 5 inch or 4 inch.

In addition, the workpiece mounting portion 100 to be stacked on the cassette 200 is preferably stacked in a vertical direction, the workpiece mounting portion 100 and the cassette 200 is the size of the transparent plate 110 to be processed or It can be configured in various forms depending on the quantity.

Such step S10 is included in the course of the cassette loading type process method according to the present invention,

After the step S10, the cassette 200 is transferred to be input to the process processing unit 400. (S11)

The transfer of the cassette 200 is performed between a plurality of process processing units 400 constituting the entire process. Accordingly, the transparent plate 110 is a unit of the transparent plate 110 itself or the process. It is transferred between processes in units of the cassettes 200, not in units of the processing units 400.

As a result, it is possible to simplify the logistics of the entire process by the transfer of the cassette 200 unit, it is also possible to reduce the installation space of the equipment.

In step S11, when the cassette 200 is input to the process processor 400, the process processor 400 is included in the cassette 200 by a batch or in-line method. The transparent plate 110 is processed. (S12)

First, when the processing method of the process processing unit 400 is an in-line form, the cassette 200 is separated into the processing unit mounting unit 100 after being introduced into the process processing unit 400. . The separated processing unit mounting unit 100 is moved in order within the process processing unit 400, the process equipment of the processing unit 400 is disposed in the movement path of the processing unit mounting unit 100, Accordingly, the treatment object mounting portion 100 is processed in order. (S13)

By the step S13, the workpiece mounting portion 100 after the process is stacked again in multiple stages, and thus the cassette 200 including the workpiece mounting portion 100 is formed again. )

In addition, the cassette 200 formed by the step 14 is again carried out by the process processing unit 400 and is transferred to the next process. Accordingly, the transfer of the transparent plate 110 made between processes is performed again from the cassette 200. Unit). (S15)

Next, when the processing method of the processing unit 400 is a batch method, the transparent plate 110 is collectively processed after the cassette 200 is inserted, and the processed transparent plate 110 is processed. The cassette 200 included therein is again taken out. (S16)

The cassette 200 carried out by the step S16 is similarly transferred to the next process, and thus the transfer of the transparent plate 110 between the processes is performed in units of the cassette 200. (S15)

The steps S11 to S16 are continued until the cassette 200 passes through all the processing units 400 constituting the entire process, and by this operation, the inter-process transfer of the transparent plate 110 is performed by the cassette ( 200), and the processing in the process processor 400 is performed by each method (S17).

On the other hand, in the cassette loading type process method according to the present invention can be achieved by the steps S10 to S17, a plurality of the processing unit 400 is disposed along the transfer path of the cassette 200, the cassette 200 ) May be configured in the form of the input and the export through a single entrance formed in the process processing unit (400).

By such a configuration, it is possible to implement an automated process of the cell type (cell type), it is possible to change the entire process through the simple movement of the process processor 400.

Salping, the cassette-loading process method according to the present invention makes it possible to link the processing process of the processing equipment taking different forms. Thus, automation can be achieved even between different types of processes.

In addition, the cassette loading type process method according to the present invention, by transferring the transparent plate 110 to be processed in the cassette 200 unit to simplify the logistics of the entire process. In addition, it is possible to reduce the installation space of the equipment by configuring a compact cassette 200, and also to increase the ability to respond to small quantities of various types.

In addition, the cassette loading type process apparatus and the process method according to the present invention may enable a cell type (automatic) process configuration. Therefore, the process can be changed only by a simple horizontal movement of the process equipment during the process change.

It will be apparent to those skilled in the art that various modifications, additions and substitutions are possible, without departing from the spirit and scope of the invention, , Changes and additions should be considered to fall within the scope of the claims of this patent.

100: processing unit mounting part 110: transparent plate
200: cassette 300: cassette transfer unit
400: process processing unit 410: vacuum chamber
420: cassette entrance 430: process treatment configuration

Claims (10)

A cassette for stacking a plurality of workpiece mounting portions for mounting a plurality of transparent plates in multiple stages;
A cassette transfer unit for transferring the cassette; And
A plurality of process units connected to each other through the cassette transfer unit and processing the process in a batch or in-line manner after inserting the transparent plate in the cassette unit;
Including,
Regardless of the internal processing method of the process, the cassette-loading process apparatus, characterized in that the transfer between the processes is made in the cassette unit, facilitating the logistics automation between processes.
The method of claim 1,
The plurality of transparent plates, cassette loading type processing apparatus, characterized in that the transparent plate cut to a size that can be applied to a mobile display of 15 inches or less.
The method of claim 1,
In the case where the processing unit is an in-line method,
The transparent plate is inserted into the processing unit in the cassette unit, the cassette loading type processing apparatus, characterized in that the processing while moving to the processing unit mounting unit after the input.
The method of claim 1,
Each of the plurality of process units,
A vacuum chamber for keeping the interior in a vacuum state; And
A cassette entrance for injecting or ejecting the cassette into the vacuum chamber;
It characterized in that it comprises a, cassette loading type processing apparatus.
The method of claim 4, wherein
The process processor is formed along the transfer path of the cassette transfer unit,
Inlet and outlet of the cassette inlet and the outlet connected to the cassette transfer unit is formed as one,
The cassette loading type processing apparatus, characterized in that the input and export of the carrier is made in one direction, the whole process is configured in a cell type (cell type).
The method of claim 1,
Cassette-loading type processing apparatus, characterized in that the plurality of process processing unit, the process processing unit for the strengthening process is included.
The method of claim 1,
Cassette-loading process apparatus, characterized in that the transparent plate is glass or acrylic.
A step of transferring the cassette, in which the processing unit mounting part including the plurality of transparent plates is stacked in multiple stages, to be put into the processing unit;
After the cassette is added to the processing unit, performing a process for the transparent plate included in the cassette in a batch or in-line manner; And
When the process is completed by the process processor, the cassette is again taken out and moved to the next process processor;
Including,
Regardless of the internal processing method of the process, the cassette-loading process method characterized in that the transfer between the processes is made in the cassette unit, facilitating the logistics automation between processes.
The method of claim 8,
In the case where the process of the process unit is performed in an in-line manner,
After the process unit is added to the process unit, the process unit is separated from the cassette, and the process proceeds while being transferred to the process unit unit; And
Forming the cassette by stacking the workpiece mounting portion treated by the process processor again in multiple stages;
Cassette loading type process characterized in that it further comprises.
The method of claim 8,
A plurality of the processing unit is disposed along the transfer path of the cassette,
Input and export of the cassette is made through a single entrance formed in the processing unit,
Cassette-loading process method characterized in that the process can be changed only by the simple movement of the process.
KR1020110054693A 2011-06-07 2011-06-07 Processing apparuatus and method of cassette loading type KR20120135785A (en)

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Application Number Priority Date Filing Date Title
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104064427A (en) * 2013-03-18 2014-09-24 住友重机械工业株式会社 Ion Implantation Apparatus And Film Formation Apparatus
CN104851831A (en) * 2015-04-08 2015-08-19 沈阳拓荆科技有限公司 Automatic wafer transfer device applied to semiconductor device and control method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104064427A (en) * 2013-03-18 2014-09-24 住友重机械工业株式会社 Ion Implantation Apparatus And Film Formation Apparatus
CN104851831A (en) * 2015-04-08 2015-08-19 沈阳拓荆科技有限公司 Automatic wafer transfer device applied to semiconductor device and control method

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