KR20120084738A - 고속, 고해상도, 3차원 태양 전지 검사 시스템 - Google Patents

고속, 고해상도, 3차원 태양 전지 검사 시스템 Download PDF

Info

Publication number
KR20120084738A
KR20120084738A KR1020127009863A KR20127009863A KR20120084738A KR 20120084738 A KR20120084738 A KR 20120084738A KR 1020127009863 A KR1020127009863 A KR 1020127009863A KR 20127009863 A KR20127009863 A KR 20127009863A KR 20120084738 A KR20120084738 A KR 20120084738A
Authority
KR
South Korea
Prior art keywords
camera array
illumination
inspection system
workpiece
optical inspection
Prior art date
Application number
KR1020127009863A
Other languages
English (en)
Korean (ko)
Inventor
칼 이. 하우건
티모시 에이. 스쿠네스
폴 알. 하우젠
스티븐 케이. 카세
Original Assignee
사이버옵틱스 코포레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 사이버옵틱스 코포레이션 filed Critical 사이버옵틱스 코포레이션
Publication of KR20120084738A publication Critical patent/KR20120084738A/ko

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G01N21/8903—Optical details; Scanning details using a multiple detector array
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N2021/845—Objects on a conveyor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8838—Stroboscopic illumination; synchronised illumination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N2021/95638—Inspecting patterns on the surface of objects for PCB's

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
KR1020127009863A 2009-09-22 2010-09-21 고속, 고해상도, 3차원 태양 전지 검사 시스템 KR20120084738A (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US24467109P 2009-09-22 2009-09-22
US24461609P 2009-09-22 2009-09-22
US61/244,616 2009-09-22
US61/244,671 2009-09-22

Publications (1)

Publication Number Publication Date
KR20120084738A true KR20120084738A (ko) 2012-07-30

Family

ID=43086315

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020127009863A KR20120084738A (ko) 2009-09-22 2010-09-21 고속, 고해상도, 3차원 태양 전지 검사 시스템

Country Status (5)

Country Link
JP (2) JP5809628B2 (fr)
KR (1) KR20120084738A (fr)
CN (2) CN102656444B (fr)
DE (1) DE112010003742T5 (fr)
WO (2) WO2011037903A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210113955A (ko) * 2020-03-09 2021-09-17 파스포드 테크놀로지 주식회사 다이 본딩 장치 및 반도체 장치의 제조 방법
KR20210118488A (ko) * 2017-02-02 2021-09-30 이스메카 세미컨덕터 홀딩 에스.아. 부품을 검사하는 방법 및 조립체

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120133920A1 (en) * 2009-09-22 2012-05-31 Skunes Timothy A High speed, high resolution, three dimensional printed circuit board inspection system
CN102253051A (zh) * 2011-05-03 2011-11-23 3i系统公司 一种线扫描探测器检测太阳能电池片缺陷的系统
CN103076330A (zh) * 2013-01-05 2013-05-01 王锦峰 多面阵相机aoi设备及其拍摄图像方法
US20140198185A1 (en) * 2013-01-17 2014-07-17 Cyberoptics Corporation Multi-camera sensor for three-dimensional imaging of a circuit board
KR101351000B1 (ko) * 2013-04-10 2014-01-15 주식회사 미루시스템즈 복수 개의 검사 모드를 가지는 인라인 카메라 검사 장치
US10126252B2 (en) 2013-04-29 2018-11-13 Cyberoptics Corporation Enhanced illumination control for three-dimensional imaging
US9599572B2 (en) * 2014-04-07 2017-03-21 Orbotech Ltd. Optical inspection system and method
CA2947720C (fr) 2014-05-05 2019-09-10 Alcoa Inc. Appareil et procedes pour mesure de soudure
CN106796721B (zh) * 2014-09-11 2021-05-04 赛博光学公司 三维轮廓测量中根据多个相机和源的点云合并
DE102015101252B4 (de) * 2015-01-28 2023-10-19 Chromasens Gmbh Beleuchtungsvorrichtung, optisches Analysesystem sowie Verfahren zum Abtasten einer Oberfläche
CN106706657A (zh) * 2015-11-17 2017-05-24 北大方正集团有限公司 基于喷墨印刷的在线检测系统及方法
WO2017172819A1 (fr) * 2016-03-30 2017-10-05 Optical Wavefront Laboratories, Llc Imagerie de microscope à cameras multiples avec éclairage à motifs
CN106093068A (zh) * 2016-08-10 2016-11-09 武汉科技大学 锂电池极片表面缺陷检测装置的成像系统及其使用方法
CN106501267A (zh) * 2016-10-18 2017-03-15 凌云光技术集团有限责任公司 用于表面缺陷检测的线性光源装置及系统
CN106525874A (zh) * 2016-11-01 2017-03-22 凌云光技术集团有限责任公司 一种大幅面工业品表面检测系统
TWI647444B (zh) * 2017-05-12 2019-01-11 廣盈自動化工程股份有限公司 Battery yield automatic detecting device and method thereof
JP6584454B2 (ja) * 2017-06-14 2019-10-02 キヤノン株式会社 画像処理装置及び方法
CN109425617A (zh) * 2017-08-31 2019-03-05 菱光科技股份有限公司 光学检测系统及图像处理方法
CN107478661A (zh) * 2017-09-11 2017-12-15 深圳市中天元光学玻璃有限公司 一种玻璃屏幕在线检测装置
WO2019188198A1 (fr) * 2018-03-30 2019-10-03 倉敷紡績株式会社 Dispositif de mesure en trois dimensions pour objet linéaire et procédé de mesure en trois dimensions pour objet linéaire
CN109000566B (zh) * 2018-08-15 2020-09-11 深圳科瑞技术股份有限公司 激光扫描三维成像和ccd二维成像组合测量方法及装置
WO2020148749A1 (fr) * 2019-01-14 2020-07-23 Orbotech Ltd. Dispositif d'acquisition d'image multiplexée pour système optique
CN111060516B (zh) * 2019-12-10 2022-03-08 中国工程物理研究院激光聚变研究中心 光学元件亚表面缺陷的多通道原位检测装置及检测方法
DE102021104947B4 (de) 2021-03-02 2023-05-25 Gerhard Schubert Gesellschaft mit beschränkter Haftung Scanner, damit ausgestattete Ermittlungs-Vorrichtung sowie Verfahren für deren Betrieb
CN113075232A (zh) * 2021-03-31 2021-07-06 深圳中科飞测科技股份有限公司 一种检测设备及检测方法
KR102528246B1 (ko) * 2021-04-30 2023-05-03 (주)자비스 배터리 내부 전체 전극 상태 검사 시스템
CN116500050B (zh) * 2023-06-28 2024-01-12 四川托璞勒科技有限公司 一种pcb板视觉检测系统

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1577388A (en) 1923-05-19 1926-03-16 Hilger Ltd Adam Projection apparatus
JP4558112B2 (ja) * 1998-10-13 2010-10-06 山形カシオ株式会社 部品搭載装置用の照明装置とその照明装置を備える部品搭載装置
GB9828109D0 (en) * 1998-12-19 1999-02-17 Kestra Ltd Inspection equipment and methods of inspection
US6577405B2 (en) 2000-01-07 2003-06-10 Cyberoptics Corporation Phase profilometry system with telecentric projector
CN1242290C (zh) * 2003-09-18 2006-02-15 中国科学院上海技术物理研究所 一种能使光束光能分布均匀的均化光学组件
WO2009094489A1 (fr) * 2008-01-23 2009-07-30 Cyberoptics Corporation Système d'inspection optique à haute vitesse avec imagerie par multiples éclairages
US20100074515A1 (en) * 2008-02-05 2010-03-25 Kla-Tencor Corporation Defect Detection and Response

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210118488A (ko) * 2017-02-02 2021-09-30 이스메카 세미컨덕터 홀딩 에스.아. 부품을 검사하는 방법 및 조립체
KR20210113955A (ko) * 2020-03-09 2021-09-17 파스포드 테크놀로지 주식회사 다이 본딩 장치 및 반도체 장치의 제조 방법

Also Published As

Publication number Publication date
WO2011037903A1 (fr) 2011-03-31
JP2013505464A (ja) 2013-02-14
WO2011037905A1 (fr) 2011-03-31
DE112010003742T5 (de) 2013-06-06
CN102498387A (zh) 2012-06-13
CN102656444A (zh) 2012-09-05
CN102656444B (zh) 2016-08-03
JP2013505465A (ja) 2013-02-14
JP5809628B2 (ja) 2015-11-11

Similar Documents

Publication Publication Date Title
KR20120084738A (ko) 고속, 고해상도, 3차원 태양 전지 검사 시스템
US8388204B2 (en) High speed, high resolution, three dimensional solar cell inspection system
US8670031B2 (en) High speed optical inspection system with camera array and compact, integrated illuminator
US20120133920A1 (en) High speed, high resolution, three dimensional printed circuit board inspection system
US8681211B2 (en) High speed optical inspection system with adaptive focusing
US8872912B2 (en) High speed distributed optical sensor inspection system
EP2800946B1 (fr) Agencement pour des mesures optiques et procédé associé
TWI663381B (zh) 電子零件搬送裝置及電子零件檢查裝置
WO2018088423A1 (fr) Dispositif d'inspection optique
CN109632828B (zh) 一种平板玻璃缺陷复检系统及复检方法
US11467261B2 (en) Distance measuring device and moving object
US20110175997A1 (en) High speed optical inspection system with multiple illumination imagery
WO2013051716A1 (fr) Système d'inspection des surfaces d'une plaquette de semi-conducteur
US9594028B2 (en) Method and apparatus for determining coplanarity in integrated circuit packages
KR20130045351A (ko) 웨이퍼 톱니 자국의 ３차원 조사 장치 및 방법
CN103140804A (zh) 使用微透镜阵列的扫描曝光装置
TWI661176B (zh) 三次元測定裝置、三次元測定方法及基板之製造方法
KR20120086333A (ko) 적응 초점을 갖는 고속 광학 검사 시스템
JP2011247690A (ja) コネクターピン検査装置およびその検査方法
CN210180399U (zh) 一种平整度测量装置
TWM491841U (zh) 大視野量測系統
WO2023139136A1 (fr) Agencement pour mesures optiques et procédé associé
JPH03188312A (ja) 測距装置
JP2007017379A (ja) 表面形状測定装置

Legal Events

Date Code Title Description
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid