KR20120041885A - Multi-wafer finger robot capable of varing the pitch easily - Google Patents

Multi-wafer finger robot capable of varing the pitch easily Download PDF

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Publication number
KR20120041885A
KR20120041885A KR1020100103280A KR20100103280A KR20120041885A KR 20120041885 A KR20120041885 A KR 20120041885A KR 1020100103280 A KR1020100103280 A KR 1020100103280A KR 20100103280 A KR20100103280 A KR 20100103280A KR 20120041885 A KR20120041885 A KR 20120041885A
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KR
South Korea
Prior art keywords
ball screw
coupled
pitch
finger
nut
Prior art date
Application number
KR1020100103280A
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Korean (ko)
Inventor
김진오
한진석
정현국
태상돈
Original Assignee
(주)로봇앤드디자인
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Priority to KR1020100103280A priority Critical patent/KR20120041885A/en
Publication of KR20120041885A publication Critical patent/KR20120041885A/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0052—Gripping heads and other end effectors multiple gripper units or multiple end effectors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/102—Gears specially adapted therefor, e.g. reduction gears
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/141—Associated with semiconductor wafer handling includes means for gripping wafer

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)
  • Transmission Devices (AREA)

Abstract

PURPOSE: A multi-wafer finger robot with a variable pitch is provided to control a pitch between fingers by connecting, separating a ball screw and a ball screw nut by a coupler. CONSTITUTION: A multi-wafer finger robot with a variable pitch comprises a power generator(300), a first driving unit(400), a second driving unit(500) and a finger unit(600). The first and second driving units convert rotary motions into vertical motions of different pitches by a guide connected to a nut and a ball screw with receiving the power form the power generator. The finger unit is connected to the first and second driving unit. The finger unit has a different space for wafers by the vertical motions of the different pitch converted by the first and second diving unit.

Description

Multi-wafer finger robot capable of varing the pitch easily}

The present invention relates to a multi-wafer finger robot having a variable pitch that can easily change a pitch for each finger in a robot having a multi-wafer finger.

The semiconductor forms a plurality of circuit patterns through selective and repetitive processes such as photolithography, etching, implantation, diffusion, and deposition on a wafer. At this time, the wafer is not only transferred to a semiconductor manufacturing facility that performs each unit process until the semiconductor device is completed, but also a transfer process of a process performing position or a setting position assisting the process is performed within the semiconductor device manufacturing facility. Going through.

In order to perform this transfer process, finger robots are used in semiconductor manufacturing facilities to transfer wafers to each unit process and to align wafers to perform each unit process.

Recently, in order to improve the work efficiency of the wafer finger robot, it is common to use a multi-finger mounted to be able to transfer a plurality of wafers at the same time. In the conventional multi-finger robot, since the vertical pitch of the fingers is fixed, the vertical pitch of the self to transfer and convey the wafers is different from each other. .

In order to solve this problem, Patent Publication No. 10-2009-0052424 discloses a variable pitch multi-finger robot that can collectively transfer wafers by varying the pitch of the finger according to the pitch of the self to transfer and transport the wafer. .

According to the present invention, in a multi-finger robot having a plurality of fingers in a vertical direction for collectively transferring wafers, a vertical transfer guide in which each finger is fixed to be vertically transported, and a vertical of the fingers A transfer belt connected to different sides of a pair of fingers symmetrically on the upper side and the lower side with respect to the center of the direction, and on the upper side and the lower side of the vertical transfer guide to wind each transfer belt to vary the pitch between the fingers. And a feed motor for driving each of the feed pulleys. With this configuration, the pitch between the fingers can be varied using a transfer belt and a transfer pulley.

However, although the pitch between the fingers can be varied by the Patent Publication No. 10-2009-0052424, there is a problem that the position of the finger does not have the required pitch value due to the weakening of the tension caused by the long time use of the belt, accordingly The belt should be replaced at regular intervals. On the other hand, since the semiconductor process is usually carried out about 14 days, there is a problem in that the production disruption due to the replacement of the belt is deviated.

Therefore, there is a need for the development of a variable pitch multi-finger robot with improved durability and simple configuration. In addition, in the conventional pitch-variable multi-finger robot, since the center of the pulley must be coupled to the drive shaft of the motor while the belt is coupled to the pulley every time the pitch is adjusted according to the change in the field, the pitch is not easily changed. There is a feeling.

Disclosure of Invention An object of the present invention is to provide a multi-finger robot that can easily change pitch with a structure having improved durability in a pitch-variable multi-finger robot.

In addition, another object of the present invention is to provide a multi-finger robot that is easy to change the pitch that can easily adjust the pitch between the fingers according to each process of the semiconductor wafer.

In addition, another object of the present invention is to provide a multi-finger robot that is easy to change the pitch can be made compact by performing a function in a simple structure in varying the pitch of the multi-finger.

According to the present invention, the power generator 300 coupled to the frame 100, the power from the power generator 300 is received by the ball screw having a screw thread of different pitch to the nut and nut coupled to the ball screw In response to the first driving unit 400 and the first driving unit 400 for converting the rotational movement into the vertical movements of different pitches by the combined guides, a screw thread having a different pitch from the power generating unit 300 is applied. The second drive unit 500 and the first drive unit 400 for converting the rotational movement into vertical movements of different pitches by the nut coupled to the ball screw and the guide coupled to the nut received by the ball screw having a Finger parts coupled to the first driver 400 and the second driver 500 in order to have different separation spaces with respect to the wafer by vertical pitches of different pitches switched by the second driver 500. 600) The pitch variable is also easy multi-finger robot is provided.

Here, the power generating unit 300 is the upper through the motor 302 mounted on the upper frame 122, the motor shaft 304 passing through the upper frame 122 from the motor 302 to provide a rotational force The first pulley 304a and the second pulley 304b and the first pulley 304a which are rotated in a forward direction with respect to the motor shaft 304 by receiving rotational force from the first pulley 304a and the first pulley 304a positioned on the frame 122. Belt 304d coupled to the third pulley 304c, the first pulley 304a, the second pulley 304b and the third pulley 304c to interlock with the second pulley 304b and transmit the forward rotational force. , Coaxially coupled to the transmission shaft 306 axially coupled to the third pulley 304c, engaged with the electric gear 308a and the electric gear 308a for transmitting rotational force, and thus against the forward rotation of the motor 302. A driven gear 308b through which rotational force is transmitted in the reverse direction, a first drive shaft 310 axially coupled to the second pulley 304b, and a second drive shaft 320 axially coupled to the driven gear 308b. It is preferable to lose.

In addition, the first driving unit 400 receives a power from the first drive shaft 310 having the forward rotation of the power generating unit 300 for the first linear movement with a first pitch with respect to the forward rotational movement The moving part 410 and a second moving part 420 for linearly moving with a second pitch smaller than the first pitch with respect to the forward rotational movement by receiving power from the first driving shaft 310 are preferable. Do.

In addition, the first moving part 410 is a first ball screw 412 having a first pitch and a thread in the forward direction, a first ball screw nut 414 nut-coupled to the first ball screw 412, and It is coupled to the first ball screw nut 414 consists of a first guide 416 for guiding in a linear upward motion with respect to the forward rotation of the first ball screw 412, the second moving part 420 A second ball screw 422 having a second pitch which is a pitch smaller than the first pitch and having a thread in the forward direction, a second ball screw nut 424 nut-coupled to the second ball screw 422, and a second ball screw It is preferably composed of a second guide 426 coupled to the nut 424 for guiding in a linear upward motion with respect to the forward rotation of the second ball screw 422.

In addition, the second driver 500 receives a power from the second drive shaft 320 having the reverse rotation of the power generating unit 300 has a fourth pitch that is the same pitch as the second pitch for the reverse rotational movement. Fifth movement for linear movement with a fifth pitch that is equal to the first pitch with respect to the reverse rotational movement by receiving power from the fourth moving unit 540 and the second drive shaft 320 for linear movement It is preferable that the portion 550 is formed.

In addition, the fourth moving part 540 is fourth ball screw 542 having a fourth pitch and threaded in the opposite direction, a fourth ball screw nut 544 nut-coupled to the fourth ball screw 542, and A fourth guide 546 is coupled to the fourth ball screw nut 544 to guide the linear movement of the fourth ball screw 542 in the downward direction with respect to the reverse rotation. A fifth ball screw 552 having a fifth pitch equal to the first pitch and having a thread in the reverse direction and a fifth ball screw nut 554 nut-coupled to the fifth ball screw 552. And a fifth guide 556 coupled to the fifth ball screw nut 554 for guiding in a linear downward motion with respect to the reverse rotation of the fifth ball screw 552.

In addition, the finger part 600 includes first to fifth fingers 610, 620, 630, 640, and 650 sequentially from top to bottom, and the first finger 610 is coupled to the first guide 416. The second finger 620 is coupled to the second guide 426, the third finger 630 is fixedly coupled to the support 130 extending from the frame 100, and the fourth finger 640 is made of a second finger 640. 4 is coupled to the guide 546, the fifth finger 650 is preferably coupled to the fifth guide (556).

In addition, the finger unit 600 includes first to fifth fingers 610, 620, 630, 640, and 650 sequentially from top to bottom, and the first driving unit 400 includes a first ball screw 412. And the second ball screw 422 are coupled with the interval of the first pitch and the thread direction is opposite to each other, the fourth ball screw 542 and the fifth ball screw 552 of the second drive unit 500. Has a pitch smaller than the first pitch and the thread directions are coupled with opposite directions to each other, and the first finger 610 is coupled to the first guide 416 for linear movement by being coupled to the first ball screw nut 414. The fifth finger 650 is coupled to the second guide 426 for linear movement by being coupled to the second ball screw nut 424, and the fifth finger 650 is coupled to the fourth ball screw nut 544 for linear movement. The second finger 620 is coupled to the fourth guide 546, and the fourth ping is coupled to the fifth ball screw nut 554 to the fifth guide 556 for linear movement. That the 640 is coupled is preferred.

In addition, the finger part 600 includes first to fifth fingers 610, 620, 630, 640, and 650 sequentially from top to bottom, and is coupled to an output shaft of the power generator 300 to form an upper frame ( 122 and the first, second, second, fourth, fifth moving parts 410, 420, 540, and 550 sequentially axially coupled in the space between the bottom frame 110 and the first, second, fourth and fifth movements. The parts 410, 420, 540, and 550 have first, second, fourth, and fifth ball screws 412, 422, 542, and 552, respectively, and the first, second, fourth, and fifth ball screw nuts 414 coupled thereto. 424. 544. 554) and first, second, fourth and fifth ball screw nuts 414. 424. 544. 554, respectively, for the first, second, fourth and fifth guides for transmitting linear motion in the vertical direction. (416, 426, 546, 556), and the first, second, fourth, and fifth guides (416, 426, 546, 556) have first, second, fourth, and fifth fingers (610, 620, 640, 650, respectively). The third finger 630 is coupled to the support 130 fixed to the frame 100, the first ball screw 412 is the first blood in the first direction The first ball screw nut 414 is coupled, the second ball screw 422 has a thread of the second pitch in the first direction and the second ball screw nut 424 is coupled, the fourth ball The screw 542 has a thread of a second pitch in a second direction opposite the first direction and is coupled to the fourth ball screw nut 544, and the fifth ball screw 552 has a first pitch in the second direction. It is preferable to have a thread of and coupled to the fifth ball screw nut 554.

Therefore, according to the present invention, it is possible to provide a structure with improved durability in a variable pitch multi-finger robot. In addition, the pitch between the fingers can be easily adjusted by separating and coupling the ball screw and the ball screw nut by the coupler for each pitch according to each process of the semiconductor wafer. In addition, it is to provide a multi-finger robot that is easy to change the pitch can be made compact by performing a function in a simple structure in changing the pitch of the multi-finger.

1 is a left side perspective view of a multi-finger robot with easy pitch change according to a first preferred embodiment of the present invention.
2 is a right side perspective view of a multi-finger robot having a variable pitch according to a first preferred embodiment of the present invention.
Fig. 3 is a schematic diagram of a main portion of pitch variation for a multi-finger robot with easy pitch variation according to a modification of the first preferred embodiment of the present invention.
Fig. 4 is a schematic diagram of an essential part of pitch variation for a multi-finger robot with easy pitch variation according to a second preferred embodiment of the present invention.

Hereinafter, with reference to the accompanying drawings it will be described in detail with respect to the multi-finger robot easy to change the pitch according to an embodiment of the present invention.

1 is a left side perspective view of a multi-finger robot with easy pitch change according to a first preferred embodiment of the present invention, and FIG. 2 is a right side of a multi-finger robot with easy pitch change according to a first preferred embodiment of the present invention. Perspective view.

As shown in Figure 1 and 2, the multi-finger robot easy to change the pitch according to the first embodiment of the present invention, the vertical frame 120 of the vertically extending from the center portion of the bottom frame 110 Vertical movements of different pitches are rotated by receiving power from the power generating unit 300 and the power generating unit 300 coupled to the upper frame 122 extending horizontally parallel to the bottom frame 110 at the top. The second drive unit for converting the rotational movement into vertical movements of different pitches by receiving power from the power generating unit 300 corresponding to the first drive unit 400, the first drive unit 400 for switching to the 500 and the first driving unit 400 and the first driving unit 400 so as to have different separation spaces with respect to the wafer by vertical movements of different pitches switched by the first driving unit 400 and the second driving unit 500. 2 Finger portion 600 coupled to the drive portion 500 It includes.

Here, the frame 100 has a vertical frame 120 extending vertically from the center with respect to the floor frame 110, the upper portion for mounting the motor 302 of the power generating unit 300 on the vertical frame 120. The frame 122 is extended.

The power generating unit 300 is a motor 302 mounted on the upper frame 122 to provide rotational force, and the upper frame 122 through the motor shaft 304 passing through the upper frame 122 from the motor 302. The first pulley (304a) located on the), the second pulley (304b), the first pulley (304a) and the second pulley which is rotated in the forward direction with respect to the motor shaft 304 receives the rotation force from the first pulley (304a) A belt 304d coupled to the third pulley 304c, the first pulley 304a, the second pulley 304b, and the third pulley 304c to interlock with the 304b to transmit the rotational force in the forward direction, and the third Coaxially coupled to the transmission shaft 306 axially coupled to the pulley 304c is engaged with the electric gear 308a for transmitting the rotational force, the electric gear 308a and the rotational force in the opposite direction to the forward rotation of the motor 302 The driven gear 308b includes a first drive shaft 310 axially coupled to the second pulley 304b and a second drive shaft 320 axially coupled to the driven gear 308b.

In addition, the motor shaft 304, the transmission shaft 306, the first drive shaft 310 and the second drive shaft 320 are all coupled to the upper frame 122 via a bearing.

The first drive unit 400 receives power from the first drive shaft 310 in the space between the bottom of the upper frame 122 and the bottom frame 110 to linearly move with a first pitch with respect to the forward rotational movement. A first moving unit 410 for receiving the power from the first driving shaft 310 and a second moving unit 420 for linear movement with a second pitch smaller than the first pitch with respect to the forward rotational movement, and It consists of a first coupler 460 for coupling them coaxially with respect to the axes of the first moving part 410 and the second moving part 420.

The first moving part 410 is a first ball screw 412 having a first pitch and threaded in the forward direction, a first ball screw nut 414 nut-coupled to the first ball screw 412, and the first ball It is coupled to the screw nut 414 consists of a first guide 416 for guiding in a linear upward movement with respect to the forward rotation of the first ball screw 412.

The second moving part 420 has a second pitch, which is a pitch smaller than the first pitch, and a second ball screw 422 having a thread in the forward direction, and a second ball screw nut nut-coupled to the second ball screw 422 ( 424, and a second guide 426 coupled to the second ball screw nut 424 for guiding in linear upward motion with respect to the forward rotation of the second ball screw 422.

Here, it is preferable that ratio of the 1st pitch which the thread of the 1st ball screw 412 has, and the 2nd pitch which the thread of the 2nd ball screw 422 has is 2: 1.

The first coupler 460 axially couples the lower end of the first ball screw 412 of the first moving part 410 and the upper end of the second ball screw 422 of the second moving part 420 coaxially.

Therefore, when the motor 302 is rotated in the forward direction and the rotational force is transmitted to the first ball screw 412 of the first drive unit 400 and the second ball screw 422 of the second drive unit 500 in the forward direction, the first The first guide 416 coupled to the ball screw nut 414 is linearly moved upward by the interval of the first pitch, and the second ball screw 422 is larger than the first pitch of the first ball screw 412. Since the second guide 426 coupled to the second ball screw 422 has a smaller second pitch, the second guide 426 has a smaller distance than the first guide 416 and linearly moves upwards, thereby enabling multi-variability.

The second drive unit 500 receives power from the second drive shaft 320 in the space between the bottom of the upper frame 122 and the bottom frame 110, and has a pitch equal to the second pitch for the reverse rotational motion. The fourth moving part 540 for the linear movement with a pitch, the second drive shaft 320 for receiving the power to the linear movement with the fifth pitch, the same pitch as the first pitch for the rotational movement in the reverse direction The fifth moving part 550 and the second coupler 560 for coupling them coaxially with respect to the axes of the fourth moving part 540 and the fifth moving part 550.

The fourth moving part 540 includes a fourth ball screw 542 having a fourth pitch and threaded in a reverse direction, a fourth ball screw nut 544 nut-coupled to the fourth ball screw 542, and a fourth ball. The fourth guide 546 is coupled to the screw nut 544 to guide the linear movement of the fourth ball screw 542 in a downward linear motion.

The fifth moving part 550 is nut-coupled to the fifth ball screw 552 and the fifth ball screw 552 having a thread in the reverse direction with a fifth pitch equal to the first pitch and larger than the fourth pitch. A fifth guide 556 is coupled to the fifth ball screw nut 554 and the fifth ball screw nut 554 to guide the linear movement of the fifth ball screw 552 in a downward linear motion.

The second coupler 560 coaxially couples the lower end of the fourth ball screw 542 of the fourth moving part 540 and the upper end of the fifth ball screw 552 of the fifth moving part 550.

Therefore, when the motor 302 is rotated in the forward direction and the rotational force is transmitted to the fourth ball screw 542 and the fifth ball screw 552 of the second drive unit 500 in the reverse direction, the fourth ball screw nut 544 and The combined fourth guide 546 moves linearly downward by the interval of the fourth pitch, which is the same pitch as the second pitch, and the fifth ball screw 552 is smaller than the fourth pitch of the fourth ball screw 542. Since the fifth guide 556 coupled to the fifth ball screw 552 has a larger fifth pitch, the fifth guide 556 has a larger distance than the fourth guide 546 and moves linearly downward, thereby enabling multi-variability.

On the other hand, a plurality of fingers of the finger portion 600 for seating and transferring the wafer, for example, the first to fifth fingers 610, 620, 630, 640, 650 sequentially from top to bottom, each finger End portions 610, 620, 630, 640, and 650 are connected to the first through fifth brackets 612, 622, 632, 642 and 652, which are connecting members, to the first to fifth brackets 614 and 624. 634, 644, 654 at one end.

The other end of the first bracket 614 is coupled to the first guide 416, the other end of the second bracket 624 is coupled to the second guide 426, and the other end of the third bracket 634 is framed. It is fixedly coupled to the upper portion of the support 130 extending vertically on both sides of the (100), the other end of the fourth bracket 644 is coupled to the fourth guide 546, the fifth bracket 654 is fifth Coupled to the guide 556.

Therefore, when the motor 302 is rotated in the forward direction and the rotational force is transmitted to the first ball screw 412 of the first drive unit 400 and the second ball screw 422 of the second drive unit 500 in the forward direction, the first As the first guide 416 coupled to the ball screw nut 414 linearly moves upward by the interval of the first pitch, the first finger 610 coupled to the first guide 416 moves upward in the first direction. The second guide 426 is coupled to the second ball screw 422 because the second ball screw 422 has a second pitch smaller than the first pitch of the first ball screw 412. As the linear motion in the upward direction with a smaller interval than the first guide 416, the second finger 620 coupled to the second guide 426 is raised to a pitch smaller than the first pitch in the upward direction.

At this time, since the third finger 630 is fixedly coupled to the support 130 of the frame 100, it is fixed at a predetermined position.

On the other hand, the second driving unit 500 is opposite to the first driving unit 400, the motor 302 is rotated in the forward direction, the rotation force is reversed in the fourth ball screw 542 and the fifth ball screw ( In the process of transmitting to 552, the fourth guide 546 coupled with the fourth ball screw nut 544 is linearly moved downward by the interval of the fourth pitch, which is the same pitch as the second pitch, and thus the fourth guide. The fourth finger 640 coupled to 546 is lowered by an interval of a fourth pitch, which is the same pitch as the second pitch, and the fifth ball screw 552 is smaller than the fourth pitch of the fourth ball screw 542. Since the fifth guide 556 coupled to the fifth ball screw 552 has a large fifth pitch, the fifth guide 556 has a larger distance than the fourth guide 546 and moves linearly downward in a downward direction. The combined fifth finger 650 is lowered by the interval of the fifth pitch which is the same pitch as the first pitch.

As described above, the multi-finger robot having a variable pitch according to the first exemplary embodiment of the present invention may have respective fingers 610, 620, 630, 640, which are interlocked by the rotation of the motor 302 of the power generator 300. 650 may have a predetermined pitch and have a vertical interval.

As described above, the multi-finger robot which can be easily changed in pitch according to the first exemplary embodiment of the present invention has a second driving unit that reversely rotates with the first driving unit 400 which rotates forward from the power generator 300. 500) to divide the linear motion in the upward direction and the downward direction.

According to the multi-finger robot with easy pitch change according to the first preferred embodiment of the present invention, each of the first ball screw 412 and the second ball screw 422 of the first drive unit 400 having a thread in the forward direction, respectively. The first ball screw nut 414 and the second ball screw nut 424 are coupled to each of the fourth ball screw 542 and the fifth ball screw 552 of the second driving part 500 having a thread in the forward direction. Although the fourth ball screw nut 544 and the fifth ball screw nut 554 are configured to be coupled, various modifications thereof will be possible in FIG. 3.

Fig. 3 is a schematic diagram of a main portion of pitch variation for a multi-finger robot with easy pitch variation according to a modification of the first preferred embodiment of the present invention.

As shown in FIG. 3, the first ball screw 412 and the second ball screw 422 of the first driving part 400 have a gap of a first pitch and have a thread direction opposite to each other, and a second driving part. The fourth ball screw 542 and the fifth ball screw 552 of the 500 have a pitch smaller than the first pitch, have a thread direction opposite to each other, and are coupled to the first ball screw nut 414. The first bracket 614 for coupling the first finger 610 to the guide 416 is coupled, and the fifth finger 650 is coupled to the second guide 426 coupled to the second ball screw nut 424. The fifth bracket 654 is coupled, and the second bracket (not shown) for coupling the second finger 620 to the fourth guide 546 coupled to the fourth ball screw nut 544 is coupled, First preferred embodiment of the present invention except that it is coupled to a fourth bracket (not shown) for coupling the fourth finger 640 to the fifth guide 556 coupled to the five ball screw nut 554. Easy to have the same configuration as the multi-finger robot according to a variable pitch.

The multi-finger robot having a variable pitch easily according to the first embodiment of the present invention described above has a power generating unit 300 having a multi-stage power transmission configuration, but to enable the multi-variable to a simpler configuration. A multi-finger robot with easy pitch change according to a second preferred embodiment of the present invention will be described.

In the multi-finger robot having a variable pitch according to the second preferred embodiment of the present invention, the description of the same configuration as that of the first embodiment will be omitted, and the difference will be described with reference to FIG. 4.

Fig. 4 is a schematic diagram of an essential part of pitch variation for a multi-finger robot with easy pitch variation according to a second preferred embodiment of the present invention.

As shown in FIG. 4, in the multi-finger robot having a variable pitch according to the second exemplary embodiment of the present invention, the motor 302, which is the power generator 300, is mounted on the frame 100. A first coupled to the output shaft of 302 and sequentially coaxially coaxially in the space between the upper frame 122 and the bottom frame 110 via first to third couplers 710, 720, and 730, respectively. And two, four and five moving parts 410, 420, 540 and 550.

First, second, fourth, and fifth moving parts 410, 420, 540, and 550 are respectively provided with first, second, fourth, and fifth guides 416, 426, 546, and 556 for transmitting linear motion in the vertical direction. The first, second, second, fourth and fifth fingers 610, 620, 640, 650 (see FIG. 1) coupled to the first, second, fourth, and fifth brackets 614, 624, 644, 654, respectively. A third bracket 634 to which the third finger 630 is coupled is fixedly coupled to the support 130 (see FIG. 1) fixed to 100.

At this time, the first ball screw 412 has a thread of the first pitch in the first direction and the first ball screw nut 414 is coupled, the second ball screw 422 is of the second pitch in the first direction. The second ball screw nut 424 is coupled to the fourth ball screw 542, and the fourth ball screw 542 has a thread of a second pitch in a second direction opposite to the first direction and is connected to the fourth ball screw nut 544. The fifth ball screw 552 is coupled to the fifth ball screw nut 554 with the thread of the first pitch in the second direction. Here, it is preferable that ratio of 1st pitch and 2nd pitch is 2: 1.

The first, second, fourth and fifth ball screw nuts 414, 424, 544 and 554 are guided in a linear motion with respect to the rotational movement of the first, second, fourth and fifth ball screws 412. 522, 542 and 552, respectively. The first, second, fourth and fifth guides 416, 426, 546, 556 are respectively coupled to each other.

Accordingly, when the motor 302 rotates forward, for example, the first finger 610 rises to the first pitch, and the second finger 620 rises to the second pitch, which is smaller than the first pitch. The third finger 630 is located at the center, the fourth finger 640 is lowered to the second pitch, the fifth finger 650 is lowered further to the first pitch.

As described above, the multi-finger robot which can easily change the pitch according to the second preferred embodiment of the present invention has the same function as the first embodiment, but in the configuration, the process of transmitting power is greatly simplified, and thus the power transmission loss. As well as reducing the energy savings, there is an effect that can reduce the size of the robot.

100: frame
110: floor frame
120: vertical frame
122: upper frame
130: support
300: power generating unit
302: motor
304: motor shaft
304a: first pulley
304b: second pulley
304c: third pulley
304d: belt
306: transmission shaft
308a: electric gear
308b: driven gear
310: first drive shaft
320: second drive shaft
400: first driving unit
410: first moving part
412: first ball screw
414: first ball screw nut
416: First guide
420: second moving part
422: second ball screw
424: second ball screw nut
426: Second guide
460: first coupler
500: second drive unit
540: fourth moving part
542: fourth ball screw
544: fourth ball screw nut
546: Fourth Guide
550: fifth moving part
552: fifth ball screw
554: fifth ball screw nut
556: Fifth Guide
560: second coupler
600: finger
610: first finger
612: first connecting rod
614: first bracket
620: second finger
622: second connecting rod
624: second bracket
630: third finger
632: third connecting rod
634: third bracket
640: fourth finger
642: fourth connecting rod
644: fourth bracket
650: fifth finger
652: fifth connecting rod
654: fifth bracket
710: first coupler
720: second coupler
730: third coupler

Claims (9)

A power generator 300 coupled to the frame 100;
Receiving power from the power generating unit 300 by a ball screw having a thread of different pitches for converting the rotational movement into vertical movements of different pitches by a nut coupled to the ball screw and a guide coupled to the nut First drive unit 400;
Corresponding to the first drive unit 400 by receiving the power from the power generating unit 300 by the ball screw having a screw thread of different pitch to rotate the rotational movement by the nut coupled to the ball screw and the guide coupled to the nut A second driver 500 for converting the pitch into vertical movements; And
The first driver 400 and the second driver 500 to have different separation spaces with respect to the wafer by vertical movements of different pitches switched by the first driver 400 and the second driver 500. Pitch variable easy multi-finger robot, characterized in that it comprises a finger portion 600 coupled to. The motor shaft 304 penetrating the upper frame 122 from the motor 302, the motor 302 is mounted to the upper frame 122 in order to provide a rotational force The first pulley (304a) located on the upper frame 122, the second pulley (304b), the first pulley rotated in the forward direction with respect to the motor shaft (304) by receiving a rotational force from the first pulley (304a) Coupled to the third pulley 304c, the first pulley 304a, the second pulley 304b, and the third pulley 304c for interlocking with the 304a and the second pulley 304b to transmit the rotational force in the forward direction. Coaxially coupled to the transmission shaft 306 axially coupled to the belt 304d and the third pulley 304c, the motor 302 is engaged with the electric gear 308a and the electric gear 308a for transmitting rotational force. A driven gear 308b to which rotational force is transmitted in a reverse direction with respect to the forward rotation of the first drive shaft, a first drive shaft 310 axially coupled to the second pulley 304b, and a second drive shaft 320 axially coupled to the driven gear 308b Variable pitch is easy multi-finger robot which comprises a. According to claim 1, wherein the first driving unit 400 receives power from the first drive shaft 310 having the forward rotation of the power generating unit 300 to linearly move with a first pitch with respect to the forward rotational movement The first moving part 410 and the second moving part 420 for linear movement having a second pitch smaller than the first pitch with respect to the forward rotational movement received power from the first drive shaft 310 Pitch variable easy multi-finger robot, characterized in that consisting of. 4. The first ball screw nut of claim 3, wherein the first moving part 410 is nut-coupled to the first ball screw 412 and the first ball screw 412. 414, and a first guide 416 coupled to the first ball screw nut 414 for guiding in linear upward motion with respect to the forward rotation of the first ball screw 412.
The second moving part 420 has a second pitch, which is smaller than the first pitch, and a second ball screw nut nut-coupled to the second ball screw 422 and the second ball screw 422 having threads in the forward direction. And a second guide 426 coupled to the second ball screw nut 424 for guiding in linear upward motion with respect to the forward rotation of the second ball screw 422. This easy multi finger robot. According to claim 1, wherein the second drive unit 500 receives power from the second drive shaft 320 having the reverse rotation of the power generating unit 300 is the same pitch as the second pitch for the reverse rotational movement Receiving power from the fourth moving part 540 and the second drive shaft 320 for linear movement with four pitches, the linear movement with the fifth pitch is the same pitch as the first pitch with respect to the reverse rotational movement. Easily variable pitch multi-finger robot, characterized in that consisting of a fifth moving part (550). The fourth ball screw nut (4) of claim 5, wherein the fourth moving part (540) is nut-coupled to the fourth ball screw (542) and the fourth ball screw (542) having a fourth pitch and threaded in a reverse direction. 544, and a fourth guide 546 coupled to the fourth ball screw nut 544 for guiding in a linear downward motion with respect to the reverse rotation of the fourth ball screw 542.
The fifth moving part 550 has a fifth pitch equal to the first pitch and a pitch larger than the fourth pitch, and is nut-coupled to the fifth ball screw 552 and the fifth ball screw 552 having threads in the reverse direction. A fifth guide 556 coupled to the fifth ball screw nut 554 and the fifth ball screw nut 554 for guiding in a linear downward motion with respect to the reverse rotation of the fifth ball screw 552. Multi-finger robot easy pitch variable, characterized in that. The method of claim 4 or 6, wherein the finger portion 600 has a first to fifth fingers (610, 620, 630, 640, 650) sequentially from top to bottom, the first finger 610 is Coupled to the first guide 416, the second finger 620 is coupled to the second guide 426, and the third finger 630 is fixedly coupled to the support 130 extending from the frame 100, The fourth finger 640 is coupled to the fourth guide 546, the fifth finger 650 is a multi-finger robot easy pitch variable, characterized in that coupled to the fifth guide (556). The method of claim 1, wherein the finger portion 600 has a first to fifth fingers (610, 620, 630, 640, 650) sequentially from top to bottom,
The first driving unit 400 is coupled to the first ball screw 412 and the second ball screw 422 having a gap of the first pitch and the thread direction opposite to each other,
The fourth ball screw 542 and the fifth ball screw 552 of the second driving part 500 have a pitch smaller than the first pitch and the thread directions are coupled to each other in opposite directions.
The first finger 610 is coupled to the first guide 416 for linear movement coupled to the first ball screw nut 414,
The fifth finger 650 is coupled to the second guide 426 for linear movement by being coupled to the second ball screw nut 424,
The second finger 620 is coupled to the fourth guide 546 coupled to the fourth ball screw nut 544 for linear movement.
Pitch variable easy multi-finger robot, characterized in that the fourth finger 640 is coupled to the fifth guide 556 for linear movement coupled to the fifth ball screw nut (554). The method of claim 1, wherein the finger portion 600 has a first to fifth fingers (610, 620, 630, 640, 650) sequentially from top to bottom,
First, second, second, fourth, fifth moving parts 410, 420, 540, 550 coupled to an output shaft of the power generator 300 and sequentially coupled in a space between the upper frame 122 and the bottom frame 110. ),
The first, second, fourth, and fifth moving parts 410, 420, 540, and 550 have first, second, fourth, and fifth ball screws 412, 422, 542, and 552, respectively, and the first, second, and fourth ball screws 412, 422, 542, and 552, respectively. , 4, 5 ball screw nuts (414. 424. 544. 554), and the first, 2, 4, 5 ball screw nuts (414. 424. 544. 554), respectively, to transmit the linear motion in the vertical direction The first, second, fourth, and fifth guides 416, 426, 546, 556, and the first, second, fourth, and fifth guides 416, 426, 546, 556, respectively. It is coupled to the five fingers (610, 620, 640, 650), the third finger 630 is coupled to the support 130 fixed to the frame 100,
The first ball screw 412 has a thread of the first pitch in the first direction and the first ball screw nut 414 is coupled, the second ball screw 422 is a thread of the second pitch in the first direction. The second ball screw nut 424 is coupled, the fourth ball screw 542 is coupled to the fourth ball screw nut 544 having a thread of the second pitch in a second direction opposite to the first direction. , The fifth ball screw 552 has a thread of the first pitch in the second direction and is coupled to the fifth ball screw nut (554) multi-finger robot easy to change the pitch.
KR1020100103280A 2010-10-22 2010-10-22 Multi-wafer finger robot capable of varing the pitch easily KR20120041885A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020100103280A KR20120041885A (en) 2010-10-22 2010-10-22 Multi-wafer finger robot capable of varing the pitch easily

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020100103280A KR20120041885A (en) 2010-10-22 2010-10-22 Multi-wafer finger robot capable of varing the pitch easily

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KR20120041885A true KR20120041885A (en) 2012-05-03

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230026037A (en) 2021-08-17 2023-02-24 ㈜온새미로 Apparatus for transferring wafers of vertical diffusion furnace
KR20230064995A (en) * 2021-11-04 2023-05-11 주식회사 유케이로보틱스 An apparatus for transporting semiconductor wafers
CN116110836A (en) * 2023-04-13 2023-05-12 北京锐洁机器人科技有限公司 Semiconductor single-chip-to-multi-chip wafer carrying executing mechanism, manipulator and operating method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230026037A (en) 2021-08-17 2023-02-24 ㈜온새미로 Apparatus for transferring wafers of vertical diffusion furnace
KR20230064995A (en) * 2021-11-04 2023-05-11 주식회사 유케이로보틱스 An apparatus for transporting semiconductor wafers
CN116110836A (en) * 2023-04-13 2023-05-12 北京锐洁机器人科技有限公司 Semiconductor single-chip-to-multi-chip wafer carrying executing mechanism, manipulator and operating method
CN116110836B (en) * 2023-04-13 2023-07-04 北京锐洁机器人科技有限公司 Semiconductor single-chip-to-multi-chip wafer carrying executing mechanism, manipulator and operating method

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