KR20120022529A - Composite container with an inner reservoir of 60 liters and chemical discharging tube - Google Patents

Abstract

PURPOSE: A composite container with an inner reservoir and a chemical discharging tube are provided to reduce the complexity of discharging chemicals from the container. CONSTITUTION: A composite container includes an inner reservoir(110) and an outer reservoir(120). The inner reservoir is formed with a resin, and can store 60L of liquid chemicals. The inner reservoir includes a liquid inlet/outlet hole(112) on the upper surface(111a). The outer reservoir is formed with a hard material, and stores the inner reservoir along to the inner surface of a storing unit(120a). The storing unit is formed by seaming a lower cover plate(122) to a body(121). The outer reservoir is obtained by seaming an upper cover plate(123) to the body.

Description

COMPOSITE CONTAINER WITH AN INNER RESERVOIR OF 60 LITERS AND CHEMICAL DISCHARGING TUBE}

The present invention relates to an inner reservoir composite container having a capacity of 60 liters in which a resin inner container is provided in a forced outer container, and a chemical liquid discharge tube for the 60 liter inner reservoir composite container.

For example, in a forced container for storing food or chemical liquids, in order to prevent the occurrence of corrosion or the like caused by the food or chemical liquid directly contacting the inner surface of the forced container, a resin inner container for storing the food or chemical liquids is placed outside of the forced container. The form of the inner reservoir composite container 10 as shown in FIG. 11 accommodated in the container is employ | adopted.

In the inner reservoir composite container 10, the inner container 1 has a main body portion 1a made of polyethylene and is formed in a bag shape, and an entrance 1b for allowing the filling in and out is integrated with the container main body portion. It is formed. Moreover, the outer peripheral surface of the entrance 1b is shape | molded by the male screw shape.

On the other hand, as for the outer container 2 of the inner reservoir composite container 10, the trunk | drum 2a which consists of a cylindrical steel plate, and the lower cover plate 2b which consists of a steel plate are seamed, and an accommodating part is formed.

And after loading the said inner container 1 in the said accommodating part, the trunk | drum 2a and the upper cover plate in the state which protruded the said doorway 1b from the opening formed in the upper cover plate 2c made of steel plate. (2c) is seamed and the inner reservoir composite container 10 which accommodated the resin inner container 1 in the forced outer container 2 is produced. After the filling is injected into the inner reservoir composite container 10, the cap 3 is screwed to the doorway 1b protruding from the upper cover plate 2c to seal the filling.

Examples of the chemical liquid include, for example, CMP slurry, photoresist, developer, etching solution, cleaning liquid, etc. in the semiconductor field, and photoresist, color resist, color filter material and the like in the liquid crystal field. In addition, some of these chemical liquids require light shielding, and since the forced outer container 2 has light shielding properties, the use of the inner reservoir composite container 10 is also advantageous in this respect.

When handling the chemical liquid in the semiconductor field or the like, high cleanliness is required for the inner reservoir composite container 10 as well as the inner container 1. In addition, high cleanliness is also required for discharging the chemical liquid, and as the discharging method, a method of discharging using the dispenser having the discharging tube attached to the cap 3 is attached. This includes a pump-up system for sucking up the chemical liquid with a pump, or a pressurization system for extruding the chemical liquid by injecting and pressurizing nitrogen gas or the like into the drum.

Japanese Patent Publication No. 2007-45429

As the inner reservoir composite container for chemical liquids used in the semiconductor field as described above, a so-called fail drum having a content of 20 liters is widely used. On the other hand, as described above, since a method using a dispenser is employed for discharging the chemical liquid, whenever the 20 liter chemical liquid is discharged, it is necessary to attach or detach the dispenser to the container, and very complicated work is strongly demanded.

In addition, there is a demand from the user side that the chemical liquid used in the semiconductor field or the like is very expensive and the cost of the remaining liquid in the inner reservoir composite container is reduced as much as possible.

The present invention has been made to solve such a problem, and an object of the present invention is to provide a 60 liter inner reservoir composite container capable of reducing troublesome work, and to provide a chemical liquid discharge tube for the 60 liter inner reservoir composite container. do.

In order to achieve the above object, the present invention is configured as follows.

That is, the 60-liter inner reservoir composite container according to the first embodiment of the present invention is made of a resin and contains a chemical liquid whose high cleanliness is required for handling, and has a capacity of 60 liters and a liquid inlet portion formed on the upper surface thereof. Courage,

An upper cover plate which is forced and accommodates the inner container along the inner surface of the housing portion formed by seaming the lower cover plate to the cylindrical body, and has a mouth opening for protruding the liquid inlet and outlet parts. It characterized by having an outer container that is molded by seaming to the body.

The liquid inlet / outlet portion of the built-in container has two stages of a retaining screw and a cap screw concentrically in the outer circumferential surface of the liquid inlet portion along the axial direction of the liquid inlet portion. And a screw for screwing a hanger having a diameter passing through the bent opening of the outer container and holding the liquid inlet and the upper cover plate, wherein the cap screw is formed by being spaced apart from the upper surface. You may comprise with the screw for screwing the cap which is smaller diameter and closes the bent part of the said liquid inlet / outlet part.

In addition, the upper cover plate may form a depression from the opening for the bend to a region exceeding the center of the upper cover plate around the opening for the bend.

In addition, the outer container is formed of an electrogalvanized steel sheet, which can be omitted, the chemical liquid is a chemical liquid used in at least one of the semiconductor field and the liquid crystal field, the interior container is made of a high-density polyethylene resin according to the specifications for the chemical liquid The blow molding may be performed under high quality control.

Moreover, the chemical | medical solution discharge tube in 2nd Embodiment of this invention can be attached to the liquid inlet part in the built-in container with which the 60 liter inner reservoir composite container in 1st Embodiment is equipped, A chemical liquid discharge tube for the 60 liter inner reservoir composite container for discharging the contained chemical liquid to the outside of the container,

It is made of a flexible, chemical-resistant resin, and has a weight that orients the liquid inlet to a deformation portion that occurs in the lower cover plate of the 60 liter inner reservoir composite container according to the pressure in the container for discharging the liquid to the tip portion near the liquid inlet. It is characterized by.

Effect of the Invention

According to the 60 liter inner reservoir composite container in 1st Embodiment of this invention, since the capacity is 60 liters, capacity | capacitance is increased with respect to the conventional 20 liters, and reduction of the troublesome operation regarding chemical liquid discharge can be aimed at.

Moreover, in the 60 liter inner reservoir composite container as mentioned above, the holding screw and the cap screw were formed in the liquid inlet part of the built-in container. Therefore, the liquid inlet and outlet portion of the built-in container projecting from the opening for the bent portion of the upper cover plate can be held on the upper cover plate in a protruding state by a hanger screwed to the retaining screw. Therefore, attachment and detachment of the cap screwed to the cap screw can be performed easily, and the workability regarding chemical liquid discharge operation | work can be improved.

Further, a depression was formed in the upper cover plate around the opening for the bend. Therefore, the swelling of the upper cover plate can be prevented or suppressed even when the container is pressurized for discharging the chemical liquid. On the other hand, a study for internal pressure has not been conducted on the lower cover plate. Accordingly, the lower cover plate, in particular the lower cover plate center portion, may swell out of the container by the pressure due to the synergistic effect with the depression. As a result, the remaining liquid can be collected in the swelled deformed portion immediately before the end of the chemical liquid discharge, so that the chemical liquid can be discharged efficiently and the amount of the remaining liquid can be reduced.

In addition, by molding the interior container with a high-density polyethylene resin it can have chemical resistance and high cleanliness. Further, the chemical liquid is a chemical liquid used in at least one of the semiconductor field and the liquid crystal field, and blow molded under quality control suitable for the chemical liquid. Therefore, the built-in container has high cleanliness and is suitable for handling the chemical liquid used in at least one of the semiconductor field and the liquid crystal field. In addition, the outer surface coating can also be omitted by shaping the outer container with an electrogalvanized steel sheet. Therefore, it is possible to reduce the possibility of foreign matter mixing into the container and to achieve high cleanliness not only in the interior container but also in the entire container.

Moreover, according to the chemical liquid discharge tube in 2nd embodiment of this invention, it can be attached to the 60 liter inner reservoir composite container of the said 1st embodiment, and has a weight in the front-end | tip part of the said chemical liquid discharge tube. Therefore, it becomes possible to orient the liquid intake port of the chemical liquid discharge tube to the deformed portion in the lower cover plate of the outer container, and with the formation of the depression of the upper cover plate described above, more efficient chemical liquid discharge is possible. It is also possible to reduce the residual amount.

BRIEF DESCRIPTION OF THE DRAWINGS It is a figure containing the partial cross section which shows the structure of the 60 liter inner reservoir composite container in one Embodiment of this invention.
It is a top view of the 60 liter inner reservoir composite container shown in FIG.
It is a perspective view of the 60 liter inner reservoir composite container shown in FIG.
It is sectional drawing about the liquid entrance and exit part of the interior container of the 60 liter inner reservoir composite container shown in FIG.
It is a figure which shows the residual liquid state at the time of discharging a chemical | medical solution upside-down the 60 liter inner reservoir composite container shown in FIG.
FIG. 6: is a figure which shows an example of the modification of the interior container with which the 60 liter inner reservoir composite container shown in FIG. 1 is equipped, FIG. 6 (A) is a top view, FIG. 6 (B) is a side view according to the arrow B, FIG. C) is a side view according to arrow C. FIG.
FIG. 7: is a figure which shows the other modified example of the built-in container provided in the 60 liter inner reservoir composite container shown in FIG. 1, FIG. 7 (A) is a top view, and FIG. 7 (B) is a side view.
FIG. 8: is a figure which shows the other modified example of the built-in container with which the 60 liter inner reservoir composite container shown in FIG. 1 is equipped, FIG. 8 (A) is a top view, and FIG. 8 (B) is a side view.
It is a figure which shows the chemical liquid discharge tube and dispenser mechanism which can be attached to the 60 liter inner reservoir composite container shown in FIG.
It is a perspective view which shows the inclination table applicable to the 60 liter inner reservoir composite container shown in FIG.
It is a figure which shows the structure of the conventional 20 liter inner reservoir composite container.

EMBODIMENT OF THE INVENTION The 60 liter inner reservoir composite container which is embodiment of this invention is demonstrated below, referring drawings. In addition, in each figure, the same code | symbol is attached | subjected about the same or same component part.

1-4, the structure of the 60 liter inner reservoir composite container 100 in this embodiment is shown. The 60 liter inner reservoir composite container 100 also has a resin inner container 110 and a forced outer container 120 for storing the inner container 110 similarly to the conventional 20 liter inner reservoir compound container. do.

The built-in container 110 has a main body 111 made of high-density polyethylene resin, blow-molded into a bag shape, the capacity of which is 60 liters, and a liquid inlet / outlet for allowing chemicals to enter and exit the upper surface 111a of the main body 111. 112 is integrally formed with the main body 111. The liquid inlet / outlet part 112 may be simultaneously molded at the time of blow molding of the main body 111, or may be separately molded and attached to the main body 111 by fusion or the like. Further, as shown in FIG. 4, the retaining screw 1121 and the cap screw 1122 are concentrically arranged along the axial direction 112a of the liquid entrance and exit portion 112 on the outer circumferential surface of the liquid entrance and exit portion 112. It is molded into a male screw shape in two steps.

The holding screw 1121 is a male screw that is formed to be close to the upper surface 111a and has a diameter passing through the bent opening 123a formed in the upper cover plate 123 of the outer container 120. It is a screw for screwing the hanger 113 which hold | maintains 112 to the upper cover plate 123 of the outer container 120.

The cap screw 1122 is a male screw having a diameter smaller than that of the holding screw 1121 described above, and is located above the holding screw 1121 in the axial direction 112a, and has a bend 112b of the liquid inlet portion 112. It is a screw for screwing the cap 115 for abolishing).

The chemical liquid contained in the interior container 110 is a chemical liquid that requires high cleanliness for handling, including at the time of storage. For example, the chemical liquid used in at least one of the semiconductor field and the liquid crystal field is considerable. As described above, the chemical liquid in the semiconductor field is, for example, a CMP slurry, a photoresist, a developer, an etching solution, a cleaning liquid, and the like, and a liquid crystal field is a photoresist, a color resist, a color filter material and the like.

Since such a chemical liquid is contained, high cleanliness is required for the internal container 110. Therefore, as described above, the internal container 110 is made of high-density polyethylene resin according to the chemical solution specification and manufactured under high quality management. Immediately after manufacture, an inner stopper 114 is applied to the bend 112b of the liquid inlet and outlet 112 to seal the inside, and the cap 115 is screwed to the cap screw 1122 and the inner stopper 114. Seal.

In addition, as will be described later, when discharging the contained chemical liquid, the cap 115 and the inner cap 114 are removed, and as shown in FIG. 9, the plug main body 201 constituting the dispenser mechanism 200. Is screwed to the cap screw 1122.

The outer container 120 of the 60-liter inner reservoir composite container 100 has a torso body 121 made of a cylindrical steel plate, a lower cover plate 122 made of a steel plate, and an upper cover plate 123. As described above, since the accommodating material of the 60-liter inner reservoir composite container 100 is a chemical liquid requiring high cleanliness in handling, the outer container 120 is also required to be manufactured with higher cleanliness than a general purpose product. Therefore, the body 121, the lower cover plate 122, and the upper cover plate 123 of the outer container 120 can omit the outer surface coating by using an electrogalvanized steel sheet. Thereby, the possibility of foreign material mixing into a container is reduced, and high cleanliness is achieved not only in the built-in container 110 but in the entire 60 liter inner reservoir composite container 100.

The body 121 has the same diameter at both ends. By accommodating the body 121 and the lower cover plate 122, a housing portion 120a is formed, and the interior container 110 described above is loaded in the housing portion 120a. Moreover, the size of the accommodating part 120a is a size suitable for the internal container 110 which has a capacity | capacitance of 60 liters, and the internal container 110 is also contacted and accommodated along the inner surface of the accommodating part 120a. After storing, the upper cover plate 123 is formed with a top cover plate 123 having a bent opening 123a having a size through which the holding screw 1121 of the liquid inlet and outlet 112 of the built-in container 110 can pass. Seaming on At this time, the liquid inlet / outlet part 112 protrudes out of the container from the bend opening 123a of the upper cover plate 123, and the liquid inlet / outlet by screwing the hanger 113 to the holding screw 1121. The portion 112 is held on the upper cover plate 123 by the hanger 113.

The hanger 113 is made of resin or metal, and is, for example, a plate-shaped member, and has a through hole formed in the inner circumferential surface of the female screw 113a engaging with the holding screw 1121 of the liquid inlet and outlet portion 112, and having an upper cover plate ( It has the outer peripheral part 113b of the magnitude | size exceeding the opening 123a for the bend of 123. Accordingly, the hanger 113 is screwed by screwing the female screw 113a of the hanger 113 from the outside of the container to the retaining screw 1121 protruding outward from the opening 123a of the upper cover plate 123. The outer peripheral portion 113b of the upper cover plate 123 is in contact with the hanger 113 maintains the liquid inlet and outlet portion 112 of the interior container 110 to the upper cover plate 123 of the outer container 120. In addition, the shape of the hanger 113 is not limited to the shape shown in drawing.

2 and 3, the upper cover plate 123 is uniformly recessed from the outside of the container to the inner side of the bend opening 123a around the upper cover plate 123. The recessed portion 123b is formed. In addition, although the recessed part 123b and the upper cover plate 123 are connected by the slope 123d, it is not limited to this, For example, circular shape etc. may be sufficient. The depression 123b is formed from the vicinity of the opening 123a to the region 123c exceeding the center of the upper cover plate 123. This is because the center portion is most easily deformed in the upper cover plate 123 due to the pressurization in the container described below. In addition, in this embodiment, as shown in the figure, the recessed part 123b is narrow in shape, although the said area | region 123c part is narrow compared with the said liquid entrance-port part 112 part, but is limited to this shape. For example, an elliptic shape or the like having the same size as that of the liquid inlet / outlet part 112 in the region 123c may be used.

Similarly to the conventional inner reservoir composite container, also in the 60-liter inner reservoir composite container 100 in the present embodiment, the discharge of the chemical liquid as a receptacle can be performed by pressurization by injection of an inert gas into the container 100. have. The recessed part 123b is for preventing or suppressing swelling deformation of the upper cover plate 123 at the time of the pressing. Further, as described below, the deformed portion 123 is attached to the lower cover plate 122. And 129).

On the other hand, as shown in FIG. 1, the deformation | transformation prevention research like the recessed part 123b is not carried out to the lower cover plate 122, but remains flat. In addition, the lower cover plate 122 and the upper cover plate 123 use the steel plate of the same plate thickness with the same material. Therefore, the pressurizing portion 123b is not formed due to the difficulty of deformation of the upper cover plate 123 due to the recessed portion 123b, especially the lower cover plate 122, especially the lower cover plate ( The central portion of 122 may bulge out of the container. The portion thus inflated is referred to as the deformed portion 129 (FIG. 9) in the description. As a result, the remaining liquid can be collected in the deformable portion 129 of the lower cover plate 122 immediately before the end of the chemical liquid discharge. Therefore, it is possible to discharge the chemical liquid efficiently and to reduce the amount of remaining liquid. From this point of view, it can be said that the recessed part 123b is for forming the deformation | transformation part 129 in the lower cover plate 122, and also aims at reducing residual amount.

In addition, in this embodiment, although the depression part 123b was formed as mentioned above, the deformation | transformation prevention of the upper cover plate 123 and the deformation | stimulation acceleration of the lower cover plate 122 were aimed at, but in order to achieve these objectives, the depression part 123b is achieved. ), But may be implemented, for example, by providing a rib on the upper cover plate 123.

1 and 3, the upper cover plate 123 is positioned one step lower with respect to the upper end 101 of the 60 liter inner reservoir composite container 100, and also has a depression 123b. As a result, the installation position of the hanger 113 is further lowered by one stage. Therefore, by forming the recessed part 123b, as shown clearly in FIG. 1, the upper surface of the cap 115 in the state which screwed in the cap 115 in the cap screw 1122 of the liquid inlet / outlet part 112 is shown. Can be located below the upper end 101 of the 60 liter inner reservoir composite container 100. Accordingly, even when the 60-liter inner reservoir composite container 100 is stacked, for example, the cap 115 can be prevented from being damaged.

2 and 3, two or more handles 124 for handling containers are attached to the outer surface of the upper cover plate 123. In FIG. 2, when the handle 124 is provided in two places, FIG. 3 shows the case where it is provided in three places.

In addition, as shown in FIG. 1, the surface of the body 121 also has a circular shape for preventing and suppressing deformation of the body body 121 by increasing the rigidity of the body body 121 at two positions of the upper cover plate side and the lower cover plate side. A strip 121a is formed along the circumferential direction of the body 121.

In this way, the 60-liter inner reservoir composite container 100 which accommodated the resin built-in container 110 in the forced outer container 120 is produced.

The chemical liquid is injected into the built-in container 110 through the liquid inlet part 112 protruding from the upper cover plate 123 with respect to the 60 liter inner reservoir composite container 100. After the injection, the inner stopper 114 is applied to the bend 112b of the liquid inlet and outlet 112, and the cap 115 is screwed onto the cap screw 1122 to seal the chemical liquid.

By using the 60-liter inner reservoir composite container 100 configured as described above, the frequency of chemical liquid discharge operation can be reduced by increasing the capacity of the conventional 20-liter, so that the troublesome operation can be reduced.

Discharge of the chemical liquid contained in the 60-liter inner reservoir composite container 100 is usually carried out by pressurizing the inside of the container from the viewpoint of weight and workability, but when the remaining amount of the chemical liquid becomes very small, It is also conceivable to invert the container 100 downward. However, even in such a case, the chemical liquid 108 tends to remain in the shoulder portion of the built-in container 110 near the liquid entrance and exit portion 112 as shown in FIG. 5.

In order to remove such chemical liquid residue as much as possible, the built-in container may adopt the following configuration. That is, like the interior container 110-1 shown in FIG. 6, the shoulder portion of the interior container 110-1 in the vicinity of the liquid entrance and exit portion 112 has a concave portion concave inward from the outside of the interior container 110-1 ( 130). 6 (A) is a top view of the interior container 110-1, FIG. 6 (B) is a side view seen from the arrow B direction in FIG. 6 (A), and FIG. 6 (C) is FIG. It is a side view seen from the arrow C direction in 6 (A). Further, reference numerals 131 and 132 are attached to the slopes formed on the upper surface 111a of the interior container 110-1.

The recessed part 130 is a shoulder part of the upper surface 111a, and is formed in the both sides of the line segment which passes the center of the upper surface 111a, and the center of the liquid entrance-and-exit part 112. As shown in FIG. Such concave portion 130 can be easily formed by blow molding when molding the interior container 110-1.

When the chemical liquid is discharged by tilting the container by forming the recess 130, since the recess 130 is formed in the portion where the chemical liquid has stayed, the chemical liquid is discharged from the liquid inlet 112 without remaining. It becomes possible to cut down.

The angle of the slope 132 connecting the upper surface 111a and the recess 130 is about 45 degrees. When the 60-liter inner reservoir composite container 100 falls or the hydraulic pressure in the container weakens the connection between the upper surface 111a and the recess 130, the impact can be alleviated by making this portion the slope 132. have. It is preferable to form the upper and lower ends of the slope 132 in an arc shape. By the formation of the arc shape, the strength of the connection portion between the upper surface 111a and the recess 130 can be improved to prevent and reduce the damage to the interior container 110.

In the planar shape, the corner portions 130a, 130b and 130c of the recess 130 are also preferably formed in an arc shape. By configuring in this way, the strength of the connection part of the upper surface 111a and the recessed part 130 improves further.

Although not shown in the figure, it is preferable that a spacer is provided in the gap portion of the recess 130 in the outer container 120 and the inner container 110-1. As the spacer, for example, polystyrene foam can be used. If the recess 130 is formed, the strength of the built-in container 110-1 may be reduced, but it is reinforced by interposing a spacer in the gap portion.

Moreover, the recessed part 135 shown in FIG. 7 can also be comprised as a modification of the recessed part 130. FIG. 7A is a plan view of the interior container 110-2, and FIG. 7B is a side view. The recessed part 135 is formed by chamfering the shoulder part (dashed line part) of the interior container 110-2 of the liquid entrance-and-exit part 112, and forming it in the shape of a slope. The residual amount can also be reduced by the recess 135. Moreover, it is not limited to a slope but also exhibits a considerable effect also by making circular arc part in a shoulder part larger than before.

Moreover, the structure shown in FIG. 8 can also be employ | adopted as a modification of the recessed part 130. FIG. 8A is a plan view of the interior container 110-3, and FIG. 8B is a side view. In the interior container 110-3, the liquid inlet part 112 is brought close to the side wall of the interior container 110-3, and the extension line of the line segment passing through the center of the upper surface 111a and the center of the liquid inlet part 112 is formed. The shoulder part is made larger than the circular arc R of the conventional shoulder part (dotted line), and the said 60-liter inner reservoir composite container 100 is inclined, and it is comprised so that a chemical | medical solution may not remain in a shoulder part when discharging a chemical | medical solution. Also in such a structure, a residual amount can be reduced. In addition, you may make this part a slope instead of making circular arc R enlarge. In addition, in this example, since the liquid inlet / outlet part 112 is close to the side wall of the interior container 110-3, the shape of the exterior container 120 needs to be changed accordingly.

Subsequently, the chemical liquid discharge tube which can be attached to the liquid inlet and outlet portion 112 of the 60 liter inner reservoir composite container 100 configured as described above, and discharges the chemical liquid contained in the internal container 110 out of the container, will also be described. A description with reference to 9 is provided below.

The chemical liquid discharge tube 150 is made of a flexible, chemical-resistant resin, for example, molded of Teflon (registered trademark), for example, about 8 mm in diameter, and has a lower portion with respect to the length in the container from the liquid inlet portion 112. The liquid intake port 151 located at the tip is in contact with the bottom 111b of the built-in container 110 in contact with the cover plate 122, and the liquid intake port 151 is in the 60 liter inner reservoir composite container 100. It has a length enough to be located to the center of the lower cover plate 122. In addition, in this embodiment, the liquid intake port 151 consists of a cross section which obliquely intersect | crossed over the radial direction of the chemical liquid discharge tube 150 with respect to the axial direction of the chemical liquid discharge tube 150 as shown in the figure. In addition, the liquid intake port 151 may be formed in the cross section in which only a part of the said radial direction of the chemical | medical agent discharge tube 150 was cut, or the some location was inclined.

In addition, the chemical liquid discharge tube 150 is a deformation of the lower cover plate 122 in which the lower cover plate 122 is inflated to the outside of the container in accordance with the pressure in the container for discharging the liquid to the tip portion 152 near the suction port 151. The portion 129 has a weight 153 that directs the liquid intake 151 by gravity action. The weight 153 is made of a metal material that does not chemically react with the chemical liquid contained in the container, for example, a member having a through hole for fitting the chemical liquid discharge tube 150 in the center thereof by a rectangular or circular plate member, Or it is formed of a cylindrical member, it is held by the front end portion 152 by the elasticity of the chemical liquid discharge tube 150. In addition, the shape and attachment position of the weight 153 are appropriate so that the suction port 151 is separated from the bottom 111b of the interior container 110 by the thickness of the weight 153 by attaching the weight 153. Is chosen. As an example, in the present embodiment, the weight 153 is cylindrical in shape, and the chemical liquid discharge tube 150 is inserted through the inner diameter portion and attached to the vicinity of the liquid intake port 151. Moreover, the weight of the weight 153 becomes like this. Preferably it is about 55-65g, and is 60g in this embodiment.

The other end of the distal end portion 152 of the chemical liquid discharge tube 150 is connected to the dispenser mechanism 200 as shown in FIG. 9, for example. The dispenser mechanism 200 is a mechanism for discharging the chemical liquid contained in the internal container 110 out of the container. In FIG. 9, an inert gas such as nitrogen gas is injected into the 60 liter inner reservoir composite container 100 to pressurize the chemical liquid. The structure of the pressurization system to extrude is shown. The pump up method which sucks up chemical | medical solution with suction apparatuses, such as a pump, can also be employ | adopted.

The pressurized dispenser mechanism 200 is largely divided into a cylindrical plug body 201, a gas supply device 202 for supplying pressurized inert gas into the internal container 110, and the chemical liquid discharge tube 150 described above. Has

The plug body 201 is, for example, a resin plug that is attached to the liquid inlet and outlet portion 112 after removing the above-mentioned cap 115, and has a coupling ring 201r, a plug shell 201s, and a sealing ring 2012. It consists of. The coupling ring 201r is a cylindrical member, one end of which is opened in a circular shape, and on the inner circumferential surface of the opening, a female screw 2011 is engaged with the cap screw 1122 formed in the liquid inlet and outlet portion 112. . Therefore, the coupling ring 201r of the plug body 201 can be screwed to the cap screw 1122 of the liquid inlet and outlet 112, and a pleat knurled portion is formed on the outer circumference of the coupling ring 201r. The plug body 201 can be screwed securely to the liquid inlet / outlet 112.

The other end of the coupling ring 201r is also circularly opened, and the plug shell 201s is fitted into the opening so as to be rotatable with respect to the coupling ring 201r. That is, the plug shell 201s is a disk-shaped member having a flange, and is inserted from an opening at one end of the coupling ring 201r so that the flange contacts the coupling ring 201r so that the coupling ring 201r is formed. It is penetrated to the opening of the said other end of. In addition, the sealing ring 2012 is attached by attaching the sealing ring 2012 to the coupling ring 201r and screwing the coupling ring 201r to the cap screw 1122 of the liquid inlet and outlet portion 112. The sphere 112b of the liquid inlet and outlet portion 112 is sealed, and the flange of the plug shell 201s is fitted between the sealing ring 2012 and the coupling ring 201r. As a result, the sealing ring 2012 also seals the ventilation at the boundary between the coupling ring 201r and the plug shell 201s.

In the plug shell 201s, a first joint 203 made of synthetic resin detachably fixing the other end of the chemical liquid discharge tube 150 and a second joint 204 for connecting the gas supply device 202 are screwed. Is inserted.

The first joint 203 can use a commercially available straight type holder, and keeps the chemical liquid discharge tube 150 slidable along the axial direction with respect to the plug body 201, and is fixed by tightening the nut securely. can do. Accordingly, the length and position of the liquid inlet 151 of the chemical liquid discharge tube 150 can be adjusted to the center of the lower cover plate 122 using the first joint 203 as described above.

The second joint 204 is an L-shaped (elbow type) synthetic resin joint connected to the opening 2013 in the coupling ring 201r of the plug body 201, and is a commercial elbow quick joint. joint) can be used.

By connecting the hose connected to the gas supply device 202 to the second joint 204, the gas supply device 202 can supply the inert gas pressurized into the interior container 110.

By using the dispenser mechanism 200 configured as described above, the interior of the interior container 110 is pressurized by the gas supply device 202 in the range of, for example, about 100 Kpa to about 150 Kpa, and accommodated in the interior container 110. It is possible to extrude the chemical liquid to the outside of the container through the chemical liquid discharge tube 150 to discharge.

In addition, when discharging the chemical liquid to the outside of the container by using the dispenser mechanism 200, a ramp as described below for loading and inclining the 60-liter inner reservoir composite container 100 may be used.

That is, the ramp 250 shown in FIG. 10 includes a main body 251 and a pair of fall prevention poles 252. The main body 251 is formed of a metal plate such as a stainless plate, and forms a slope 251a which is inclined at about 10 to 15 degrees with respect to the bottom surface serving as a horizontal plane. The 60-liter inner reservoir composite container 100 is loaded on the slope 251a so as to orient the liquid inlet portion 112 of the 60-liter inner reservoir composite container 100 toward the lower side of the slope 251a. Here, when the inclination angle exceeds 15 degrees, the possibility of liquid overflow is high, which is not preferable.

In addition, the pair of fall prevention poles 252 are made of metal round rods such as stainless steel, and are installed on the lower side of the slope 251a.

By using the ramp 250 as described above, the liquid inlet part 112 is oriented downward to incline the 60 liter inner reservoir composite container 100 so that the chemical liquid in the built-in container 110 is discharged when the liquid is discharged. 112 can be gathered on the side, and the remaining amount of liquid can be reduced by interaction with the chemical liquid discharge tube 150 provided with the weight 153 described above.

INDUSTRIAL APPLICABILITY The present invention is applicable to a 60-liter inner reservoir composite container having a capacity of 60 liters provided with an inner container made of resin in a forced outer container, and a chemical liquid discharge tube for the 60-liter inner reservoir composite container.

100 ... 60 liter inner reservoir composite container
110. Built-in container 111a. Top surface
112. Liquid exit portion 112b. Bend
113. Hanger 115... cap
120... Outer container 120a... A storage section
121. Body 122... Lower cover plate
123. Top cover plate 123a... Bend opening
123b. Depression 150. Chemical Drain Tube
151. Suction port 153. sinker
1121. Holding screw 1122. Cap Screw

Claims (5)

A built-in container 110 made of resin and containing a chemical liquid whose high cleanliness is required for handling, and having a capacity of 60 liters and having a liquid inlet and outlet portion 112 formed on the upper surface 111a; And
A bent opening in which the built-in container is accommodated along the inner surface of the receiving portion 120a, which is forced and is shaped by seaming the lower cover plate 122 to the cylindrical body 121. A 60 liter inner reservoir composite container, comprising: an outer container 120 formed by seaming the upper cover plate 123 having 123a formed on the body. The method of claim 1,
The liquid inlet / outlet portion of the built-in container has concentrically arranged two-stage retaining screws 1121 and cap screws 1122 along the axial direction 112a of the liquid inlet and outlet parts on the outer circumferential surface of the liquid inlet and outlet. Is a screw for screwing a hanger 113 formed near the top surface and having a diameter passing through the bent opening of the outer container and holding the liquid entrance and exit portion on the upper cover plate, wherein the cap screw is A 60 liter inner reservoir composite container characterized in that it is a screw spaced apart from an upper surface and formed to have a diameter smaller than that of the holding screw and for screwing a cap (115) for closing the bend (112b) of the liquid entrance and exit portion. The method according to claim 1 or 2,
The upper cover plate is a 60-liter inner reservoir composite container, wherein a recessed portion (123b) is formed in the periphery of the opening for opening from the opening for opening to an area (123c) exceeding the center of the upper cover plate. The method of claim 1,
The outer container is formed of an electrogalvanized steel sheet, which can be omitted, and the chemical liquid is a chemical liquid used in at least one of the semiconductor field and the liquid crystal field, and the internal container is made of a high density polyethylene resin according to the specification for the chemical liquid and is of high quality. A 60 liter inner reservoir composite container, which is blow molded under control. The said liquid outlet which can be attached to the liquid inlet / outlet part 112 in the built-in container 110 with which the 60 liter inner reservoir composite container of Claim 1 was equipped, and discharges the chemical liquid 108 accommodated in the said built-in container outside the container. As a chemical liquid discharge tube 150 for a 60 liter inner reservoir composite container:
The deformation part which is flexible and chemically-resistant resin and arises in the lower cover plate 122 of the said 60 liter inner reservoir composite container according to pressurization in the chemical | medical agent discharge container to the front end part 152 near the suction port 151 ( 129) having a weight (153) for orienting the suction port.

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