JP3200568B2 - Cap unit for chemical solution supply container and chemical solution supply device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cap unit for a chemical solution supply container and a chemical solution supply device, and more particularly to a chemical solution suitable for supplying a chemical solution such as a photoresist, a developing solution, and a thinner to various semiconductor manufacturing apparatuses. The present invention relates to a supply device and a cap unit which is one component thereof.

[0002]

2. Description of the Related Art Various processing apparatuses such as a resist coating apparatus and a developing apparatus in a semiconductor manufacturing process include a photoresist,
Various chemicals, such as a developer and a thinner, used for processing in the process are supplied. In recent years, various improvements have been made to these chemical solutions with the development of devices, and high-quality chemical solutions with extremely stable component compositions have been marketed.
Therefore, this kind of chemical solution used in the semiconductor manufacturing process is generally expensive, and semiconductor manufacturers want to use the purchased chemical solution as much as possible for cost reduction.

[0003] In addition, since the chemical solution is of high quality, there is a fear that when the chemical solution is transferred from a commercially available container to another container and used, there is a risk that contaminants will be mixed in and the quality will deteriorate. It is common practice to suck out or pressurize the inside of a container to send a chemical solution to the device. In general, a pump for introducing a chemical solution is attached to this type of processing apparatus. Therefore, the chemical liquid is introduced into the processing apparatus by operating the pump or using the pump together with high-pressure nitrogen gas or the like.
In that case, a pipe for sending the chemical solution is inserted through the cap into the container, but the pipe naturally requires chemical resistance, and a resin pipe having such chemical resistance is usually used. Met.

[0004] Under such circumstances, as disclosed in Japanese Patent Application Laid-Open No. 1-195328, the present inventors have proposed a container mounting plate for mounting a container at an angle so that a chemical solution in the container can be used to the end. A liquid amount detection device having This device is
In addition to tilting the container containing the drug solution, it has the advantage of being able to effectively use the drug solution that was previously discarded waste by providing a sensor and alarm unit that detects the position of the liquid surface. .

[0005]

By the way, inclining the container itself in order to completely use up the chemical solution in the container,
It is usually conceivable. However, what is important here is that the tip (suction port) of the pipe is located at the lowermost portion of the inclined container and is surely immersed in the chemical solution even when the remaining amount of the chemical solution is decreasing. From this point of view, the conventional resin pipes have various flexing degrees and elasticity depending on the individual pipes, and it is difficult to position the tip at the bottom of the container and maintain the position. Then, when the chemical solution in the container becomes empty, it is replaced with a new container, but adjusting the position of the pipe to an appropriate position every time it is replaced is a very troublesome operation.

If the tip of the pipe is not immersed in the chemical solution, the chemical solution will not remain in the container, but will cause bubbles to enter the pipe by the operation of the pump. When the bubbles are sent to the processing apparatus as they are, the discharge amount of the chemical solution discharged from the nozzle or the like changes, and the processing of the product varies, so that defective products are generated or the yield is reduced. Then, a serious problem occurs in the semiconductor manufacturing process.

Further, as described above, since the resin pipe has a certain degree of bending and elasticity, the tip of the pipe is hooked on the mouth of the container when the pipe is inserted and removed when replacing the container, and the pipe is rebounded. Chemicals attached to the spill may be scattered. Then, the chemical solution will be wasted,
There is also a problem that the container and the surrounding floor are soiled. As described above, the conventional chemical supply system has many problems, and for an operator using this type of apparatus, it is necessary to confirm that the amount of the chemical in the container and that the pipe is immersed in the chemical, Replacing was a very nervous task.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problem, and can use a chemical solution in a container to the end without waste, and can surely supply a chemical solution to a processing apparatus. It is an object of the present invention to provide a cap unit and a chemical solution supply device capable of reducing a burden on a worker who uses the cap unit.

[0009]

To achieve the above object, according to the solution to ## drug solution supply container cap unit of the present invention includes: a cap body comprising a lid of chemical liquid supply container, is secured to the cap body, the chemical liquid supply It has a pipe formed of a material having rigidity for sucking up the drug solution in the container, and the suction port at the tip of the pipe is located at the lowermost portion of the drug solution supply container which is obliquely inclined in a state of being attached to the drug solution supply container. The pipe is bent and the tip of the pipe is slanted.
Position the chemical solution supply container so that it is located at the bottom of the container.
To position the chemical supply container when placing it on a place
Is provided .

Further, the cap unit for a chemical solution supply container of the present invention is provided with a screw screwed into a screw at an opening of the chemical solution supply container.
And the cap body is separate from the cap body.
The positioning means is located
It is characterized by comprising a fixing rod provided on the cap body .

In the cap unit for a chemical solution supply container according to the present invention , the pipe is formed of metal, and the pipe is formed of metal.
Resin resistant to chemicals on both outer and inner surfaces
Characterized by being coated with

Further, the cap unit for a chemical solution supply container according to the present invention is characterized in that a dripping preventing means for preventing dripping of the chemical solution from the suction port at the tip of the pipe is provided at the tip of the pipe. It is.

[0013] The chemical solution supply device of the present invention comprises a chemical solution supply container for accommodating a chemical solution to be supplied, a frame on which the chemical solution supply container is mounted in an obliquely inclined state, and a frame mounted on the frame. A base unit including a liquid level detection sensor that detects the position of the liquid level in the chemical liquid supply container and issues a signal when the remaining amount of the chemical liquid is equal to or less than a set value, a cap body serving as a lid of the chemical liquid supply container, A cap unit including a pipe fixed to the cap body and bent so that the suction port at the tip thereof is obliquely inclined at the bottom of the liquid supply container when attached to the liquid supply container, and a liquid level detection sensor. receiving a signal becomes an output unit for informing the user that the remaining amount of the chemical liquid is equal to or smaller than the set value, the cap
The unit is provided with a fixing rod and this cap
Chemical supply container with unit mounted on base unit
The hook where the fixing bar is hooked while placed on
Fixed unit was hooked on the hook
In the state, the tip of the pipe of the cap unit tilted obliquely
It is characterized in that it is located at the lowermost part of the chemical solution supply container .

Further, chemical liquid supply apparatus of the present invention, the calibration
Screw unit is screwed into the screw at the mouth of the chemical solution supply container.
Screw part is provided and it is separate from the cap body
The fixing rod has a cap screw
It is characterized by being provided on the body .

Further, in the chemical liquid supply apparatus of the present invention, the pipe of the cap unit is formed of metal, and both the outer surface and the inner surface of the pipe are coated with a resin having resistance to the chemical. Things.

Further, in the chemical liquid supply apparatus according to the present invention, a dripping preventing means for preventing dripping of a chemical liquid from a suction port at a tip of the pipe of the cap unit is provided at a tip of the pipe. It is.

The chemical liquid supply container cap unit of the present invention is intended to be used for a chemical liquid supply container which is placed in an inclined state. In this cap unit, since the pipe fixed to the cap body and sucking up the chemical in the container is bent, the tip of the pipe is located at the bottom of the container when the cap unit is attached to the container, and the liquid Even if the remaining amount becomes small, it is surely immersed in the chemical solution. Further, since the pipe is formed of a rigid material, the shape of the pipe does not change depending on the case, and the pipe always keeps a constant shape. And by using the positioning means, the pipe
So that the tip of the cap is at the bottom of the container.
Cap unit because knit can be attached
Mounting and container positioning work are facilitated.

[0018] In the chemical liquid supply container cap unit of the present invention, when the pipe is made of metal, rigid different from the conventional resin pipe is high, the pipe will always retain a constant shape. Moreover, since both the outer and inner surfaces of the pipe are coated with a resin that is resistant to chemicals,
It is possible to prevent the metal from being damaged by the chemical solution, thereby deteriorating the pipe and contaminating the chemical solution.

[0019]

[0020] In the chemical liquid supply container cap unit of the present invention, if the anti-drip means at the distal end of the pipe is provided, never drug solution dropping from the tip of the pipe when performing insertion and removal of the pipe.

[0021] Then, chemical liquid supply apparatus of the present invention, the present
The system includes the cap unit of the invention and is combined with a chemical solution supply container, a base unit, and a display box. Therefore, when the container is placed on the base unit, the container is naturally held in an inclined state. In addition, even if the remaining amount of the chemical solution in the container is reduced by the action of the cap unit, the tip of the pipe is surely immersed in the chemical solution. Then, when the remaining amount of the chemical drops below the set value,
The liquid level detection sensor issues a signal, and upon receiving the signal, the output unit notifies that the remaining amount of the chemical solution has become equal to or less than the set value.

Further, the chemical liquid supply device according to the sixth to eighth aspects has the same function in the portion relating to the cap unit for the chemical liquid supply container according to the second to fourth aspects.

[0023]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to FIGS. FIG. 1 is a diagram showing an overall configuration of a chemical solution supply device 1 according to the present embodiment, and the chemical solution supply device 1 includes a photoresist (chemical solution) in a resist coating device.
Is to supply. In the figure, reference numeral 2 denotes a chemical solution supply container, 3 denotes a cap unit, 4 denotes a base unit, and 5 denotes a display box (output unit).

As shown in FIG. 1, this chemical supply device 1
Is composed of a chemical solution supply container 2 (hereinafter simply referred to as a container), a cap unit 3, a base unit 4, and a display box 5. In the case of the present embodiment, a glass bottle (capacity: 1 gallon) into which the photoresist enters when the photoresist is purchased is used as the container 2 as it is. The mouth of the glass bottle is of a type that opens and closes a lid with screws. As shown in FIGS. 2 and 3, the base unit 4 has a mounting plate 6 on which the container is mounted is inclined from the near side to the back side, and side plates are provided on the left and right edges of the upper surface of the mounting plate 6. 7 are provided, and rear plates 8 and 9 are provided between the side plates 7. A frame 10 for placing the container 2 with these metal plates.
Is configured.

On the lower rear plate 9, a sensor mounting plate 11 is skewed over the mounting plate 6, and at the center of the sensor mounting plate 11, the liquid level of the photoresist R in the container 2 is detected. The sensor 12 of the electrostatic capacity type is attached. The hook plate 1 is attached to the upper rear plate 8.
3 protrudes upward, and a hook portion 14 (positioning means) made of Teflon is attached to a tip end thereof. The hook part 14 is a fixing rod 1 of the cap unit 3 described later.
9 is provided with a groove 14a for hooking. Further, guide rods 15 for positioning the container 2 when placing the container 2 are provided on both sides on the front side of the mounting plate 6.
Is fixed at a position corresponding to the dimensions of. Therefore,
When the container 2 is placed on the frame 10, as shown in FIG. 2, a position where the front surface of the container 2 contacts the two guide rods 15 and at the same time the curved lower surface of the rear surface contacts the sensor 12. Become a relationship.

As shown in FIGS. 4 and 5, the cap unit 3 includes a column-shaped cap body 16 serving as a lid of the container 2, a pipe 17 for sucking up the photoresist R, and a port of the container 2. Screw 18 having a threaded portion to be screwed into the portion, and a fixing rod 19 for positioning the container 2
(Positioning means), and joints 23 and 24 and the like. The cap body 16 is made of Teflon, and a pipe 17 is fixed to the lower surface thereof. As shown in FIG. 4, the main body of the pipe 17 is formed of SUS20,
Resin tubes 21a, 21b, 21c having resistance to photoresist are coated and welded to both the outer surface and the inner surface. In particular, resin tubes 21b and 21c are double-coated on the outer surface side. The pipe 17 is bent in the middle, and a dripping prevention cap 22 (dripping prevention means) is attached to the end. The dripping prevention cap 22 is made of Teflon, has a closed end, and is provided with a suction port 22a for sucking the photoresist R on the outer peripheral surface. Since the diameter of the suction port 22a is set to a size that can obtain the surface tension of the photoresist R, the photoresist R can be prevented from dripping.

As shown in FIG. 5, the cap body 16 is provided with two joints, a discharge side joint 23 and a pressure side joint 24. As shown in FIG. 1, the discharge side joint 23 is for connecting to a pump 25 and a pipe line 27 on the processing device 26 side, and the pressurizing side joint 24 is a pipe line 29 for a pressurizing source 28 such as a high pressure nitrogen gas line. It is for connecting to. The discharge side joint 23 and the pipe 17 communicate with each other through a resist flow path (not shown) inside the cap body 16, while the pressurizing side joint 24 and the space inside the container 2 are connected with a hole (not shown in the figure) inside the cap body 16. ).

Also, as shown in FIG.
6 is provided with a SUS fixing rod 19 extending in a direction perpendicular to the two joints 23 and 24. Fixed bar 19
When the container 2 is placed on the base unit 4, the container 2 is hooked on the groove 14 a of the hook portion 14 of the base unit 4 to determine the orientation of the container 2 with respect to the base unit 4. As described above, the pipe 17 is bent in the middle, but the bending direction coincides with the direction in which the fixing rod 19 extends when the cap unit 3 is viewed in a plan view (when viewed from above). Further, as shown in FIG. 5, an enlarged diameter portion 16a is provided at a lower portion of the cap body 16, and a cap screw 18 is engaged with the enlarged diameter portion 16a. A screw portion (not shown) is formed inside the cap screw 18 to be screwed into the screw at the mouth of the container.
The cap body 16 and the cap screw 18 are separate bodies, and the cap body 16 does not rotate even when the cap screw 18 is rotated.

As shown in FIG. 1, the display box 5 is electrically connected to the sensor 12 of the base unit 4 through a cable 30. The display box 5 is provided with a power switch, an LED, and the like. And the sensor 12
Detects the liquid level of the photoresist R in the container 2 and issues a signal when the remaining amount of the photoresist R is equal to or less than a set value. Then, the signal is sent to the display box 5 through the cable 30, and the display box 5 receives the signal and
Is turned on to notify the operator that the remaining amount of the photoresist R is low. The means for informing the worker is not limited to the LED or the like, but may be a means for issuing a warning by a sound such as a buzzer.

Next, a method of using the chemical liquid supply device 1 having the above-described structure will be described with reference to FIG. 1 by taking an example in which an empty container 2 is replaced. First, pump 2
After stopping the container 5, the cap unit 3 is removed from the empty container 2, and the cap unit 3 is mounted on a new container 2 containing the photoresist R. In this case, since the joints 23 and 24 of the cap unit 3 are connected to the conduits 27 and 29, respectively, the pipe 17 is pulled out of the empty container 2 as it is, and then inserted into a new container 2, and the cap 17 is inserted. Tighten screw 18. At this time, since only the outer cap screw 18 can be turned without turning the cap body 16, the cap unit 3 is connected to each of the conduits 27 and 29.
The cap unit 3 can be attached and detached without any trouble even when the cap unit 3 is connected. Then, the container 2 is placed on the base unit 4 while the fixing rod 19 of the cap unit 3 is inserted into the groove 14a of the hook portion 14 of the base unit 4, and the pump 25 is operated.

In the case of the chemical liquid supply device 1 of the present embodiment, when the container 2 is placed on the base unit 4, the container 2 is inclined to sufficiently use up the remaining photoresist R. If the pipe 17 is straight in this state, the tip of the pipe 17 does not reach the lowermost part of the container 2,
In this device 1, since the pipe 17 is bent, the tip of the pipe 17 reaches the lowermost part of the container 2. Also, pipe 1
Since 7 is made of SUS, the shape does not change unlike a conventional resin pipe, and the pipe 17 always keeps a constant shape. Therefore, the photoresist R
Even if the remaining amount of the photoresist becomes small, the pipe 17 remains the photoresist R
Since the photoresist R is reliably immersed in the inside, the photoresist R can be used up to the end without wasting.

Further, the pipe 17 always has the photoresist R
Since it is immersed in the inside, it is possible to stably supply a constant amount of photoresist to the resist coating device without causing bubbles to enter the pipe 17, and to reduce the yield of conventional products such as generation of defective products and reduction in yield. Problems can be solved. Further, since the pipe 17 always keeps a constant shape, even when the pipe 17 is removed and inserted when the container is replaced, the work is easily performed, and the tip of the pipe 17 is hooked on the mouth of the container 2 to scatter the photoresist R. There is less fear of doing. Moreover, since the dripping prevention cap 22 is attached to the tip of the pipe 17, the photoresist R does not drip when the pipe 17 is pulled out.

Further, if the pipe 17 is simply bent, the tip of the pipe 17 may not be located at the lowermost part of the container 2 depending on the direction in which the container 2 with the cap unit 3 is placed. However, in the case of the present embodiment, the fixing rod 19 is provided on the cap unit 3, and the hook portion 14 is provided on the lower side of the mounting plate 6 of the base unit 4. Is fixed in the direction in which the hook rod 14 extends.
When the container 2 is placed on the base unit 4 so as to be inserted into the container 4a, the tip of the pipe 17 is naturally located at the lowermost portion of the container 2. Therefore, the operator can set the container 2 on the base unit 4 without paying attention to the direction in which the container 2 is placed. Further, since the fixing rod 19 is hung in the groove 14a of the hook portion 14, the container 2 rotates on the base unit 4 during use, and the tip of the pipe 17 floats from the photoresist R. Not even.

A sensor 12 is provided on the base unit 4, and the sensor 12 detects the liquid level of the photoresist R in the container 2, and displays when the remaining amount of the photoresist R is less than a set value. Since the LED of the box 5 is turned on, the operator can easily know that the remaining amount of the photoresist R is small. In order to avoid exposure, the container 2 for storing the photoresist R is usually a brown glass bottle, and the interior is difficult to see. Therefore, it is particularly effective to provide the liquid level detection sensor 12 and the display box 5 of this type.

As described above, according to the chemical liquid supply device 1 of the present embodiment, all of the many problems of the conventional chemical liquid supply device can be solved, and the burden on the operator using this device can be sufficiently reduced. Can be reduced.

Although the SUS pipe 17 is used for the cap unit 3, both the outer surface and the inner surface of the pipe 17 are covered with resin tubes 21a, 21b and 21c having resistance to the photoresist. SUS
The portion 20 is not affected by the photoresist R. Generally, contamination by heavy metals is avoided as much as possible in a semiconductor manufacturing process. However, the pipe 17 having such a structure can prevent contamination by heavy metals. In addition, since the outer surface side of the pipe 17 is particularly double coated with the resin tubes 21b and 21c, the pipe 1 can be used for a long time.
Even if 7 rubs against the mouth of the container 2, the SUS portion 20 can be prevented from being exposed by breaking the resin tube.

The technical scope of the present invention is not limited to the above embodiment, and various changes can be made without departing from the spirit of the present invention. For example, although the cap unit 3 in the above embodiment has a mouth corresponding to a screw-type glass bottle, it may correspond to a container of other forms, for example, a canister or the like, or as a fixing means to the container. May not be a screw type, but may be a simple fitting type cap unit. However, even in that case, it is desirable to have some positioning means for determining the orientation of the container when setting the container on the base unit. As the positioning means, in addition to the method using the fixing bar 19 and the hook portion 14 as in the above-described embodiment, for example, a method such as simply marking the opposing positions of the cap unit and the base unit may be used.

The specific shapes, constituent materials, dimensions and the like of the base unit and the cap unit can be appropriately designed. Further, it goes without saying that the chemical solution supply device of the present invention can be applied to various chemical solutions other than the photoresist. Then, instead of using the chemical liquid supply device alone as in the above embodiment, a plurality of chemical liquid supply devices are connected to one processing device, and when one container becomes empty, the other It may be configured to include a switching mechanism or the like that automatically switches a plurality of chemical liquid supply devices so as to supply the chemical liquid as needed. Then, a more rational chemical solution supply system is obtained.

[0039]

As described above in detail, according to the present invention, the pipe for sucking up the chemical solution in the container is bent, so that when the cap unit is mounted on the container, the tip of the pipe is in contact with the container. It is located at the bottom, so that it is surely immersed in the chemical even when the remaining amount of the chemical is low. Further, since the pipe has rigidity, the pipe always keeps a fixed shape.
Therefore, the photoresist can be effectively used to the end without being wasted, the bubbles do not enter into the pipe, and defective products are generated in the product processing process, and the yield is reduced. Can be prevented. Further, even when the pipe is inserted and removed when replacing the container, the operation is easy, and the risk of splashing the chemical solution is reduced. In addition, a liquid level detection sensor is provided on the base unit, and when the remaining amount of the chemical solution is equal to or less than the set value, the output unit notifies the operator of the fact that the remaining amount of the chemical solution is small. .

Further, when the metal pipe is covered with a resin having resistance to a chemical solution, it is possible to prevent the metal solution from being contaminated by the chemical solution. If the positioning means is used when placing the container, the tip of the pipe can be positioned at the lowermost part of the container, so that the cap unit can be easily attached and the container can be easily positioned.

As described above, according to the chemical solution supply device of the present invention, the problems of the conventional chemical solution supply device can be solved, the burden on the operator can be sufficiently reduced, and various processing devices in the semiconductor manufacturing process can be used. It is suitable for use.

[Brief description of the drawings]

FIG. 1 is a schematic diagram showing an entire configuration of a chemical liquid supply device according to an embodiment of the present invention.

FIG. 2 is a side view showing a part of a container that stores a base unit and a photoresist in the apparatus.

FIG. 3 is a rear view of the same.

FIG. 4 is a side view showing a cap unit in the apparatus.

FIG. 5 is a rear view of the same.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Chemical liquid supply apparatus 2 Chemical liquid supply container 3 Cap unit 4 Base unit 5 Display box (output part) 10 Frame 12 Liquid level detection sensor 14 Hook part (Positioning means) 16 Cap body 17 Pipe 18 Cap screw 19 Fixing rod (Positioning means) Reference Signs List 20 SUS 21a, 21b, 21c Resin tube 22 Liquid dripping prevention cap (liquid dripping prevention means) 26 Processing device R Photoresist (chemical liquid)

Continuation of the front page (56) References JP-A-1-195328 (JP, A) JP-A-6-247482 (JP, A) JP-A-7-132981 (JP, A) Jpn. , U) JP 31-10693 (JP, B1) (58) Fields investigated (Int. Cl. ⁷ , DB name) B65D 83/00 G01F 23/00 B65D 83/14 B05B 9/04

Claims (8)

(57) [Claims] 1. A chemical solution to be supplied to a processing device is stored,
A cap unit attached to an opening of a chemical solution supply container placed in an obliquely inclined state, comprising: a cap body serving as a lid of the chemical solution supply container; Having a pipe formed of a material having rigidity for sucking up the chemical solution, so that the suction port at the tip of the pipe is located at the lowermost portion of the obliquely inclined chemical solution supply container in a state of being attached to the chemical solution supply container. the pipe has bent, the bottom of the chemical liquid supply container tip of the pipe is inclined obliquely
The chemical solution supply container is placed at an arbitrary location so that
Position for determining the orientation of the chemical supply container when placing
A cap unit for a chemical solution supply container, wherein a determining means is provided . 2. The cap unit for a chemical solution supply container according to claim 1, wherein a screw at an opening of the chemical solution supply container is screwed.
The cap body is provided with a screw portion to be screwed.
And a cap screw separate from the
The cap means for a chemical solution supply container, wherein the cap means comprises a fixing rod provided on the cap body . 3. A chemical liquid supply container cap unit according to claim 1 or 2, wherein the pipe is made of metal, coated with a resin in which both the outer surface and inner surface of the pipe is resistant to the chemical A cap unit for a chemical solution supply container. 4. The cap unit for a chemical solution supply container according to claim 1, wherein a dripping preventing means for preventing a chemical solution from dropping from a suction port at a tip of the pipe is provided at a tip of the pipe. A cap unit for a chemical solution supply container, wherein the cap unit is provided. 5. A chemical solution supply device for supplying a chemical solution to a processing device, comprising: a chemical solution supply container for accommodating a chemical solution to be supplied; and a frame on which the chemical solution supply container is mounted in an obliquely inclined state. A base unit including a liquid level detection sensor that detects the position of the liquid level in the chemical liquid supply container placed on the frame and issues a signal when the remaining amount of the chemical liquid is equal to or less than a set value; A cap body serving as a lid of the container, and a pipe fixed to the cap body and bent so as to be positioned at the lowermost part of the medicinal solution supply container in which the suction port at the tip is obliquely inclined in a state of being attached to the medicinal solution supply container. Yes and the cap unit, and an output unit for informing the user that the remaining amount of the chemical in response to a signal from the liquid level detecting sensor is equal to or smaller than the set value including
And a fixing rod is provided in the cap unit,
The chemical supply container equipped with this cap unit is
The fixed bar is hooked while placed on the base unit
A hook portion to be provided is provided on the base unit, and the cap is held in a state where the fixing rod is hooked on the hook portion.
Liquid supply volume with the tip of the pipe of the tap unit inclined obliquely
A chemical solution supply device, which is located at the bottom of a vessel . 6. The chemical solution supply device according to claim 5, wherein the cap unit is provided at a mouth of the chemical solution supply container.
A screw portion to be screwed into the
It has a cap screw separate from the main body,
A drug supply device, wherein a stick is provided on the cap body . 7. A chemical liquid supply apparatus according to claim 5 or 6, wherein the cap unit of the pipe is formed of metal, both the outer surface and inner surface of the pipe is coated with a resin having a resistance to the chemical A chemical solution supply device characterized by the above-mentioned. 8. The chemical liquid supply device according to claim 5, wherein a dripping preventing means for preventing dripping of a chemical liquid from a suction port at a tip of the pipe of the cap unit is provided at a tip of the pipe. A chemical solution supply device provided.