KR20110093301A - Apparatus and method of rotation, and rotational system - Google Patents

Abstract

PURPOSE: A rotating device, a rotating driving method, and a rotating system are provided to reduce costs and process time by rotating and translating a rotation member which supports an object. CONSTITUTION: A rotating device(100) includes a rotation member(110), a transmission member(120), and a driver(130). The rotation member is installed in a support frame and includes a holding member which holds an object. The transmission member is connected to the rotation member. The driver is connected to the transmission member. The transmission member changes the rotation movement of the driver into the intermittent rotation and translation of the rotation member.

Description

Rotary device, rotary driving method, and rotating system {APPARATUS AND METHOD OF ROTATION, AND ROTATIONAL SYSTEM}

The present invention relates to a rotating device, a rotating driving method, and a rotating system, and more particularly, to a rotating device, a rotating driving method, and a rotating system for rotating a rotating member supporting an object together with a translational motion.

During the manufacturing process of LED products or semiconductors, defective products occur for various reasons. If these defective products are not properly removed during manufacturing, unnecessary subsequent processes are caused, resulting in loss of material costs and process costs. In order to reduce such a loss, an apparatus for testing an object such as an LED chip or a semiconductor chip during the manufacturing process and classifying the object into an appropriate grade according to the test result is used.

As one example of such a device, an LED chip test apparatus or an LED chip sorting apparatus which measures the optical characteristics of the LED chip and classifies the LED chip based on the LED chip prior to the package process is known in the art.

Referring to Figure 1, the configuration of a conventional LED chip test device will be described.

The LED chip test apparatus 1 includes a rotating member 10, a contact unit 20, and a measuring unit 30. The rotating member 10 includes a seating member 11 for supporting an object L, such as an LED chip, and a support frame 12 supporting the seating member 11 and extending radially about the rotation axis A. It includes. The lower side of the support frame 12 is connected to a drive unit 13, such as a motor. The support frame 12 and the seating member 11 are provided in plural, and the rotating member 10 is rotated by the driving of the driving unit 13 so that the seating member 11 on which the object L is placed is sequentially placed in the test position. do.

The contact unit 20 is made of a probe card, for example, and has a contact pin 21 such as a probe pin. For example, when the contact pin 21 contacts the LED chip on the seating member 11 and supplies a current to the LED chip, the LED chip emits light to perform a test. The contact unit 20 is movably connected in the vertical direction with respect to the fixed frame 22.

The measuring unit 30 is an apparatus for receiving light emitted from an LED chip, for example, an integrating sphere, to measure optical characteristics. The measuring unit 30 is provided with a measuring device 31 such as a photodetector or a spectrometer.

Referring to Figure 2, the test process of the conventional LED chip test device will be described. 2 is a graph illustrating the driving timing of the rotating member 10, wherein the x axis represents the time axis and the y axis represents the rotational speed (angular velocity) of the rotating member 10. As shown in FIG. 2 is a graph illustrating the driving timing of the contact unit 20, wherein the x-axis represents the time axis and the y-axis represents the translational speed of the contact unit 20. FIG. Here, the (+) direction (upward direction) of the y axis indicates that the contact unit 20 moves upward with respect to the frame 22, and the (-) direction (lower direction) of the y axis indicates that the contact unit 20 is framed. The movement in the downward direction with respect to 22 is shown.

In order to measure the characteristics of the object L, such as an LED chip, first, the measurement unit 30 is moved upward, and the connection with the object L after the test is terminated (section I). Next, the rotating member 10 is rotated to move the object to be tested (L) is located below the measuring unit 30 (section II). Next, the measurement unit 30 moves downward to make the connection between the object L to be tested and the contact pin 21 (section III). Since the contact pin 21 is a member having a fine probe or cantilever shape with elasticity, vibration may occur due to the contact of the contact pin 21 and the object L. Therefore, a predetermined stabilization time is required after the contact pin 21 contacts the object L (section IV). Subsequently, a current is applied to the object L through the contact pin 21 and the characteristic thereof is measured (V section). In the IV and V sections, the rotation / translational movement of the rotating member 10 or the contact unit 20 does not occur.

As described above, in the conventional apparatus, since the movement section of the rotating member and the contact member proceeds sequentially, there is a limit in reducing the process time. In addition, the need for stabilization time after contact of the contact pin and the object also hindered the process time. This made it difficult to reduce the overall process time of the LED or semiconductor product. In addition, in the conventional apparatus, a control operation for sequentially driving the rotating member and the contact member is required, and a driving unit for driving these members is also required, which is disadvantageous in terms of cost.

The present invention has been made to solve the above-mentioned problems of the prior art, and an object of the present invention is to provide a rotating apparatus, a rotation driving method, and a rotating system, which reduce process time and are advantageous in terms of cost.

According to a first aspect of the present invention for achieving the above object, the present invention is a rotating member including a support frame radially extending around a rotation axis, and a mounting member installed on the support frame to hold an object And a rotating member connected to the rotating member, and a driving unit connected to the rotating member, wherein the rotating member is configured to intermittently rotate the rotating member of the driving member. And it provides a rotating device characterized in that the conversion to translation.

Next, according to a second aspect of the present invention, the present invention provides a rotating member including a support frame extending radially about a rotation axis, and a mounting member installed on the support frame to hold an object. In a rotation driving method for driving a rotating device including a connected electric member, the rotation and translational movement step of rotating the rotating member at the same time as the movement in the direction to move or move the rotary member with respect to the transmission member And, it provides a rotation drive method comprising a pause step of rotation and translation does not occur.

Next, according to the third aspect of the present invention, the present invention is a rotary system for driving a rotating member, the rotating member can support a plurality of objects, the rotating member is a rotary motion and the state in support of the object It provides a rotation system characterized in that the translational motion can be executed at the same time.

Finally, according to the fourth aspect of the present invention, the present invention is a rotary system for driving a rotating member, the rotating member can support a plurality of objects, and the translational motion for elevating the rotating member, and the rotating member After the rotational motion to rotate, and at least one of the rotational and translational motion to rotate the rotary member at the same time as the lifting and lowering is performed, the rotating system characterized in that the idle state does not rotate and lift the rotating member do.

According to the rotating apparatus, the rotating driving method, and the rotating system according to the present invention, by rotating the rotating member supporting the object together with the translational movement, the process time is reduced and the cost is advantageous.

1 is a side view schematically showing a conventional LED chip test apparatus.
2 is a timing diagram schematically showing an operation process of a conventional LED chip test apparatus.
Figure 3 is a side view schematically showing an LED chip test apparatus equipped with a rotating apparatus according to an embodiment of the present invention.
Figure 4 is a perspective view schematically showing the operation of the transmission member according to an embodiment of the present invention.
5 to 9 are driving timing diagrams of a rotating apparatus according to an embodiment of the present invention.
10 is a perspective view showing a rotating apparatus according to an embodiment of the present invention.
11 is a side view of the rotating apparatus according to FIG. 10.
12 is a schematic diagram showing a working mode of the rotating member according to an embodiment of the present invention.
13 and 14 are schematic views showing the configuration of the transmission member according to an embodiment of the present invention.

Hereinafter, with reference to the accompanying drawings will be described the present invention. As those skilled in the art would realize, the described embodiments may be modified in various different ways, all without departing from the spirit or scope of the present invention. In the drawings, parts irrelevant to the description are omitted in order to clearly describe the present invention, and like reference numerals designate like parts throughout the specification.

Throughout the specification, when a part is 'connected' to another part, it includes not only 'directly connected' but also 'indirectly connected' with another member in between. . In addition, when a part is said to "include" a certain component, this means that it may further include other components, without excluding other components unless otherwise stated.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

Figure 3 is a side view schematically showing an LED chip test apparatus equipped with a rotating apparatus according to an embodiment of the present invention. As shown, the LED chip test apparatus includes a rotating device 100, a contact unit 200, and a measuring unit 300, the rotating device 100 is a rotating member 110, a rolling member ( 120, and a driver 130.

Rotating member 110 is a seating member 111 for supporting the object (L), such as LED chip, and the support frame 112 for supporting the seating member 111 and extending radially about the rotation axis (A) And, it includes a rod (113) connected to the lower center of the rotating member (110).

The seating member 111 may be formed integrally with or separately from the support frame 112, and penetrates to fix the object L to the seating member 111 by sucking air inside the seating member 111. Balls (not shown) may be formed.

The material and shape of the seating member 111 is not particularly limited. If the object is a vertical LED chip (vertical LED chip), the current must be emitted to the LED chip by supplying a current to the lower surface of the vertical LED chip through the mounting member 111, the mounting member 111 is a conductive material Can be formed. In addition, when the object is an LED chip, in particular, a horizontal LED chip (lateral LED chip), in order to reduce the light loss that the light emitted from the LED chip does not flow into the measuring unit 300, the mounting member 111 May be formed of a material having high reflectance. In particular, the mounting member 111 may be formed of a material having a high reflectance at 200 nm to 1000 nm, which is a measurement wavelength band of the LED chip. In addition, since a plurality of objects are continuously attached to and detached from the seating member 111, the seating member 111 may be formed of a material having good wear resistance and hardness.

The support frame 112 may be formed in a cantilever shape, but there is no particular limitation on the shape. The support frame 112 may be a plurality, for example four or eight, in which case the seating member 111 placed at the end of the support frame 112 may be placed in different working modes at the same time. For example, while one seating member 111 is placed at a position (test position) at which the test of the object L is performed, the other seating member 111 sets the object L to be tested at the seating member 111. The other mounting member 111 may be placed at a position (unloading position) for loading the object L, which has been tested, from the mounting member 111. This speeds up the process and improves work efficiency.

The rod 113 is provided below the support frame 112 and is connected to the transmission member 120 so as to rotate and translate. The rod 113 may be formed in a hollow shaft. Thus, an intake pipe (not shown) connected to the through hole provided in the seating member 111 may be connected to an external device, for example, an exhaust pump, etc. along the inner hollow portion of the rod 113.

The transmission member 120 is a component connecting the driving unit 160 and the rotation member 110. As schematically illustrated in FIG. 4, the driving member 120 receives power from the driving unit 160 through the coupling shaft 130 and outputs power to the rotating member 110 through the rod 113. . Machine elements such as gears, cams, rollers, and the like are coupled to the inside of the transmission member 120, and the rotational movement of the driving unit 160 is interrupted by the rotation member 110 by such a mechanical element or a combination thereof. 으로) converted into rotational and translational motion. Here, the 'intermittent rotation and translational movement' means that the rotational or translational movement, or the rotational and translational movements overlap in a certain time interval, and the rest period is followed by no movement. In this way, the operation leading to the exercise section and the rest period may be repeated a plurality of times.

On the other hand, if the number of the support frame 112 is n, the transmission member 120 may be rotated by 360 ° / n after the rotation member 110 can be stopped. For example, if the number of support frames 112 is eight (see FIGS. 10 and 12), the rotating member 110 is rotated by 45 ° in one process and then stopped. In the rest period, various processes such as measurement, loading, and unloading of the object L are performed.

The transmission member 120 is connected to the coupling member 140 through the coupling shaft 130, the coupling member 140 is connected to the driving unit 160 such as a motor through the driving shaft 150. The driving unit 160 is a component that generates power, and the coupling member 140 is positioned between the driving unit 160 and the transmission member 120 to control the transmission of the driving force of the driving unit 160. The driving speed of the driving unit 160, for example, the rotational speed of the driving shaft 150 may be kept constant and may be changed under external control. For example, the driving speed of the driving unit 160 is increased in the movement section (rotational and translational movement section) of the rotating member 110, and the driving speed of the driving unit 160 is slowed in the rest period of the rotating member 110, or It is possible to set it in the opposite case. In this way, it is possible to set the idle section longer or shorter according to the required time of the work process made in the idle section.

The contact unit 200 is located at the upper side of the object (L) at least part of which is placed on the seating member (111). The contact unit 200 is made of a probe card, for example, and has a contact pin 210 such as a probe pin. When the contact pin 210 contacts the object L on the seating member 111, for example, the LED chip, and supplies a current to the LED chip, the LED chip emits light to perform a test. The contact unit 200 is fixed to the frame 220 in the vertical direction.

In the conventional LED chip test apparatus, the contact unit 200 had to be driven up and down, thereby requiring a separate drive unit for vertical movement of the contact unit 200 (see FIG. 1). However, in the present invention, since the rotating member 110 performs the translational movement in the vertical direction as well as the rotational movement, it is unnecessary to drive the contact unit 200, thereby reducing the process time and achieving the simplification and cost reduction of the apparatus. can do.

The measuring unit 300 is an apparatus for receiving light emitted from an LED chip, for example, an integrating sphere, to measure optical characteristics. The measuring unit 300 may be provided with a measuring device 310 such as a photo detector or a spectrometer.

Referring to Figure 5, it will be described the operation of the rotating apparatus according to an embodiment of the present invention. 5, the x axis represents a time axis, and the y axis represents a rotational speed (angular velocity) of the rotating member 110. Rotating member 110 may be a translational movement in addition to the rotational movement, here the translational movement is not shown separately.

As can be seen in Figure 5, in the rotary device 100 according to an embodiment of the present invention after the end of the rotation and translational movement section (section I) of the rotating member 110 is followed by a rest section (section II). . In the rotational and translational motion section (section I), the rotational member 110 moves in the direction of being spaced or approached with respect to the transmission member 120 (translational movement) and at the same time, the rotational member 110 rotates about the rotation axis A. (Rotational movement). In the resting section (Section II), the rotating member 110 does not rotate or translate.

Conventionally, the rotational motion of the rotating member and the translational motion of the contact unit had to be sequentially performed (see FIG. 2), but in the present invention, the translational motion of the contacting unit is unnecessary, and the rotating member itself can perform the rotational motion and the translational motion at the same time. As a result, the process time is greatly reduced. In addition, in the prior art, although the stabilization time was required after contacting the object after the translational movement of the contact unit (section III of FIG. 2), in the present invention, since the contact unit does not move, after the rotation and translational movement section (section I) No extra stabilization time is needed. This contributes to the reduction of process time.

6 to 9, various operations of the rotating member 110 will be described in detail. 6 to 9 are graphs showing the rotational motion of the rotating member 110, wherein the x-axis represents the time axis and the y-axis represents the rotational speed (angular velocity) of the rotating member 110. Referring to FIGS. 6 to 9 are graphs showing the translational motion of the rotating member 110, wherein the x-axis represents the time axis and the y-axis represents the translational speed of the rotating member 110. FIG. Here, the (+) direction (upward direction) of the y axis represents the upward movement of the rotating member 110 with respect to the transmission member 120, and the (-) direction (downward direction) of the y axis represents the rotation member 110. The movement in the downward direction with respect to the transmission member 120 is shown.

Referring to FIG. 6, the rotation and translational motion section (section I) of the rotation member 110 translates in the direction in which the rotation member 110 approaches the transmission member 120 and at the same time the rotation member 110 is moved. The first rotation and translation movement section (segment 1) that rotates, and the second rotation and translation movement in which the rotation member 110 rotates at the same time as the rotation member 110 translates away from the transmission member 120. It includes a section (2 sections).

As a result, since the rotating member 110 moves downward in one section, the object L, for example, the connection between the LED chip and the measurement unit 200 completed in the previous step is released. At the same time, the rotating member 110 rotates. Next, since the rotating member 110 moves upward in two sections, the connection between the object L, for example, the LED chip to be tested and the measuring unit 200 is fastened. At the same time, the rotating member 110 rotates. Thereafter, the LED chip is measured in the resting period II.

Meanwhile, the case in which the contact unit 200 and the measuring unit 300 are positioned above the rotating member 110 has been described with reference to the drawings, but the contact unit 200 and the measuring unit 300 are the rotating member. It is also possible to be located below with respect to 110.

In this case, in one section, the rotary member 110 translates in the direction away from the transmission member 120, and in the second section, the rotary member 110 translates in the direction approaching the transmission member 120.

Next, another operation method of the rotating member 110 will be described with reference to FIG. 7. The same parts as described above with reference to FIG. 6, for example, a measurement process of the LED chip, a case where the contact unit 200 and the measurement unit 300 are located below the rotating member 110, will be omitted. .

According to FIG. 7, the rotation and translational motion section (section I) of the rotation member 110 translates in the direction in which the rotation member 110 approaches the transmission member 120, and at the same time, the rotation member 110 rotates. The first rotational and translational motion section (segment 1), the rotational member 110 is a rotational section (two sections) only the rotational movement without the translational movement, and the rotational member 110 is spaced apart from the transmission member 120 The second rotational and translational movement section (three sections) in which the rotating member 110 rotates at the same time as the translational movement in the direction.

Unlike the case of FIG. 6, since the rotation section (division 2) is provided separately, the translational movement of the rotation member 110 is made relatively quickly in the first section and the third section, and thus the object L and the contact unit 200. Fastening and release of the connection can be made more quickly.

Next, another operation of the rotating member 110 will be described with reference to FIG. 8. The same parts as those already described with reference to FIG. 6 will be omitted.

According to FIG. 8, the rotational and translational motion section (section I) of the rotational member 110 may include a first translational motion in which the rotational member 110 approaches the transmission member 120 without the rotational motion. A movement section (section 1), a first rotational and translational movement section (section 2) in which the rotation member 110 rotates at the same time as the rotation member 110 approaches the transmission member 120, and The second rotational and translational motion section (3 sections) in which the rotational member 110 rotates apart from the transmission member 120 and the rotational member 110 rotates, and the rotational member 110 rotates. It does not include a second translational motion section (four sections) that only translates in the direction away from the transmission member 120.

Unlike the case of FIGS. 6 and 7, the first and second translational movement sections (1, 4 sections) are separately provided, and thus the connection between the object L and the contact unit 200 in a state in which the rotational movement is not made. Fastening and release of can be performed more stably.

Next, another operation of the rotating member 110 will be described with reference to FIG. 9. The same parts as those already described with reference to FIG. 6 will be omitted.

According to FIG. 9, the rotational and translational motion section (section I) of the rotational member 110 may include a first translational motion in which the rotational member 110 approaches the transmission member 120 without the rotational motion. A movement section (section 1), a first rotational and translational movement section (section 2) in which the rotation member 110 rotates at the same time as the rotation member 110 approaches the transmission member 120, and Rotation member 110 is a rotation section (three sections) that does not translate, but only a rotational movement, and the rotation member 110 is translated in the direction away from the transmission member 120 and at the same time the rotation member 110 The second rotation and translational motion section (4 sections) to rotate, and the second translational motion section (5 sections), in which the rotational member 110 does not rotate but only translates in a direction away from the transmission member 120. Include. According to this operation method, the fastening and releasing of the connection between the object L and the contact unit 200 can be performed more quickly and stably.

10 and 11 are a perspective view and a side view showing in more detail the rotary device according to an embodiment of the present invention. Here, the seating member 111 and the support frame 112 is provided with eight. In this case, as shown in FIG. 12, the angle θ at which the rotating member 110 rotates through one rotational and translational motion section is 45 °. On the other hand, when one seating member 111 is placed in the test position, the other seating member 111, for example -90 ° position in the test position (where the (-) symbol is reversed in the direction of rotation of the rotating member 110) The seating member 111 is placed in the loading position, and the seating member 111 in the 90 ° position in the test position is placed in the unloading position. In the loading position, the object to be tested L is placed on the seating member 111, and in the unloading position, the object L to be tested is collected from the seating member 111. Various working modes can also be carried out in the seating member 111 in other positions, for example in the test position at 45 °, 135 °, 180 °, -45 °, -135 °. Examples of such a working mode include a process of cleaning or washing the seating member 111, a process of correcting the position of the object L placed on the seating member 111, and an object not unloaded from the seating member 111. The process of recollection, the process of cooling or heating the object L, the process of observing the state of the object L, the process of processing or processing the object L, etc. are mentioned.

13 and 14 are schematic views showing the configuration of the transmission member according to an embodiment of the present invention. As part of the mechanical elements provided in the transmission member 120, a roller gear cam mechanism is shown in FIG. 13 and a Geneva gear mechanism is shown in FIG.

Referring to FIG. 13, the transmission member 120 may be configured by using the coupling shaft 130 and the rod 113 as the input shaft and the output shaft, respectively, and providing roller gear cam mechanisms 121 and 122 therebetween. Eight gear teeth are provided in the driven roller gear cam 122, whereby the driven roller gear cam 122 rotates 1/8 when the driving roller gear cam 121 rotates once. According to the tooth design of the driving roller gear cam 121, the length of the exercise section and the rest section is determined. Accordingly, the continuous motion of the driving unit 160 is converted into the intermittent motion of the rotating member 110.

Referring to FIG. 14, the transmission member 120 may be configured by using the coupling shaft 130 and the rod 113 as the input shaft and the output shaft, respectively, and providing a Geneva gear mechanism therebetween. In the figure, the rod 113 is shown to be rotated 1/4 in one rotation of the coupling shaft 130, but by inserting a reduction gear therebetween, the rod 113 may be changed to rotate 1/8.

Since the structure and design method of such a roller gear cam mechanism and a Geneva gear mechanism are well known, detailed description thereof is omitted. In addition, a method of converting the rotational motion of the input side into the intermittent rotational and translational motion of the output side by additionally coupling mechanical elements such as reduction gears, accelerator gears, and cams to the roller gear cam mechanism or the Geneva gear mechanism is known. Detailed description thereof will also be omitted.

The foregoing description of the present invention is intended for illustration, and it will be understood by those skilled in the art that the present invention may be easily modified in other specific forms without changing the technical spirit or essential features of the present invention. will be. It is therefore to be understood that the above-described embodiments are illustrative in all aspects and not restrictive. For example, each component described in one piece or in one piece may be implemented separately, and similarly, components described as separated may be implemented in combined form.

In addition, in the embodiment of the present invention, the measurement of the optical characteristics of the LED chip for the convenience of understanding has been described, but the subject of the present invention is not limited thereto.

The scope of the present invention is represented by the following claims, and it should be construed that all changes or modifications derived from the meaning and scope of the claims and their equivalents are included in the scope of the present invention.

By adopting the above-described configuration, the present invention provides a rotating device, a rotating driving method, and a rotating system, which reduce processing time and are advantageous in terms of cost.

Claims (21)

A rotation member including a support frame radially extending around the rotation shaft, and a seating member installed on the support frame to hold an object;
An electric member connected to the rotating member,
In the rotating device including a drive unit connected to the transmission member,
The transmission member is a rotating device, characterized in that for converting the rotational movement of the drive unit to intermittent rotation and translational movement of the rotating member. The method of claim 1,
And the support frame is plural. The method of claim 2,
When the number of the support frame is n, the rotating member is rotated by rotating the rotating member by 360 ° / n, characterized in that the rotating device. 4. The method according to any one of claims 1 to 3,
The intermittent rotation and translational movement of the rotating member includes a rotational and translational movement section for rotating the rotating member at the same time as the rotational member moves in a direction away from or approaching the rotating member, and rotation or translational movement occurs. Rotating device comprising a non-rest period. The method of claim 4, wherein
The rotational and translational movement section may include a first rotational and translational movement section that rotates the rotational member at the same time as the rotational member moves in a first direction to move or move the rotational member with respect to the transmission member, and the rotational member to the first direction. And a second rotational and translational movement section for rotating the rotating member simultaneously with the movement in the opposite direction. The method of claim 4, wherein
The rotational and translational movement section may include a first rotational and translational movement section that rotates the rotational member simultaneously with a movement in a first direction to move the rotational member away from or approaching the transmission member, and rotational rotation of the rotational member. And a second rotational and translational movement section for rotating the rotating member at the same time as moving the rotating member in a direction opposite to the first direction. The method of claim 4, wherein
The rotational and translational movement section may include a first translational movement section moving in a first direction to move the rotating member away from or approaching the rotating member, and simultaneously rotating the rotating member in the first direction to rotate the rotating member. A first rotational and translational motion section, a second rotational and translational motion section to rotate the rotational member simultaneously with the rotational member moving in the opposite direction to the first direction, and the rotational member to the opposite direction in the first direction Rotating device comprising a second translational movement section moving to. The method of claim 4, wherein
The rotational and translational movement section may include a first translational movement section moving in a first direction to move the rotating member away from or approaching the rotating member, and simultaneously rotating the rotating member in the first direction to rotate the rotating member. A first rotational and translational movement section, a rotational section for rotating the rotating member, a second rotational and translational movement section for rotating the rotating member simultaneously with the rotational member moving in the opposite direction to the first direction, and And a second translational movement section for moving the rotating member in a direction opposite to the first direction. The method of claim 4, wherein
Rotating device, characterized in that the drive speed of the drive unit is different in the rotation and translation period and the rest period. 4. The method according to any one of claims 1 to 3,
And said transmission member comprises a roller gear cam mechanism. 4. The method according to any one of claims 1 to 3,
The transmission member is a rotary device, characterized in that it comprises a Geneva gear mechanism. 4. The method according to any one of claims 1 to 3,
And a coupling member installed between the transmission member and the driving unit and controlling a transmission of driving force between the driving unit and the transmission member. 4. The method according to any one of claims 1 to 3,
The object is a rotating device, characterized in that the semiconductor chip or LED chip. 4. The method according to any one of claims 1 to 3,
The rotating member is a rotating device, characterized in that connected to the transmission member through a hollow shaft. A rotation member including a support frame radially extending around the rotation shaft, and a seating member installed on the support frame to hold an object;
In the rotation driving method for driving a rotating device including a rotating member connected to the rotating member,
A rotational and translational movement step of rotating the rotating member at the same time as the movement of the rotating member in a direction away from or approaching the rotating member;
Rotation driving method characterized in that it comprises a pause step of rotation and translation does not occur. 16. The method of claim 15,
The rotating and translational step may include a first rotational and translational step of rotating the rotating member at the same time as moving in the first direction to move the rotating member away from or approaching the rolling member, and rotating the rotating member to the first member. And a second rotation and translational step of rotating the rotating member simultaneously with the movement in the opposite direction. 16. The method of claim 15,
The rotating and translational step may include: a first rotational and translational step of rotating the rotating member at the same time as moving in the first direction to move the rotating member away from or approaching the rotating member, and rotating the rotating member. And a second rotation and translational movement step of rotating the rotation member at the same time as moving the rotation member in a direction opposite to the first direction. 16. The method of claim 15,
The rotating and translational step may include: a first translational step of moving the rotating member in a first direction spaced or approaching the rotating member; and simultaneously rotating the rotating member in the first direction and rotating the rotating member. A first rotational and translational motion step, a second rotational and translational motion step of rotating the rotational member simultaneously with the movement of the rotational member in a direction opposite to the first direction, and the rotational member in an opposite direction to the first direction Rotation drive method comprising a second translational movement step moving. 16. The method of claim 15,
The rotating and translational step may include: a first translational step of moving the rotating member in a first direction spaced or approaching the rotating member; and simultaneously rotating the rotating member in the first direction and rotating the rotating member. A first rotational and translational movement step, a rotational step of rotating the rotational member, a second rotational and translational movemental step of rotating the rotational member simultaneously with the rotational member moving in a direction opposite to the first direction; And a second translational step of moving the rotating member in a direction opposite to the first direction. A rotating system for driving a rotating member,
The rotating member may support a plurality of objects,
The rotating member is characterized in that the rotary motion and the translational motion can be executed simultaneously while supporting the object. A rotating system for driving a rotating member,
The rotating member may support a plurality of objects,
After the one or more movements of the translational motion for elevating the rotating member, the rotational motion for rotating the rotating member, and the rotational and translational motion for rotating and simultaneously elevating the rotating member, the rotating member is rotated and elevated. Rotation system, characterized in that the idle state.

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