CN214682944U - Semiconductor packaging equipment detection device - Google Patents
Semiconductor packaging equipment detection device Download PDFInfo
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- CN214682944U CN214682944U CN202120479577.0U CN202120479577U CN214682944U CN 214682944 U CN214682944 U CN 214682944U CN 202120479577 U CN202120479577 U CN 202120479577U CN 214682944 U CN214682944 U CN 214682944U
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 29
- 238000004806 packaging method and process Methods 0.000 title claims abstract description 15
- 238000009434 installation Methods 0.000 claims description 15
- 230000007306 turnover Effects 0.000 claims description 11
- 238000007689 inspection Methods 0.000 claims description 6
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- 238000005457 optimization Methods 0.000 description 5
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Abstract
The utility model belongs to the technical field of semiconductors, in particular to a semiconductor packaging equipment detection device, which comprises a belt conveyor, wherein the upper end surface of the belt conveyor is provided with a frame, the lower end surface of the frame is provided with an ultrasonic scanning detection device, the lower end surface of the ultrasonic scanning detection device is provided with a detection head, when an electric sucker rotates one hundred eighty degrees, a gear just breaks away from a toothed plate, so that the direction of the electric sucker is fixed, at the moment, a detection product adsorbed by the electric sucker is overturned one hundred eighty degrees, the ultrasonic scanning detection device can conveniently detect the bottom of the detection product again, the detection effect is greatly improved, the detection precision is improved, the semiconductor packaging good product detection device is solved, the detection product is fixedly placed at the upper end of a detection seat, the ultrasonic scanning detection device can only scan and detect the detection product through the top, and the detection product can not be overturned, the scanning effect is poor, and the detection result has errors.
Description
Technical Field
The utility model relates to the field of semiconductor technology, concretely relates to semiconductor package equipment detection device.
Background
The semiconductor packaging refers to a process of processing a wafer passing a test according to a product model and a functional requirement to obtain an independent chip. Carry out the finished product test after the encapsulation is accomplished, a semiconductor package non-defective products detection device has been recorded in open No. CN208655594U, including frame and the belt conveyor who sets up in the frame lower extreme, a plurality of article of waiting to examine are arranged along the moving direction line style of calligraphy of conveyer belt on the belt conveyor, the vertical fixed mounting in frame upper end has the slide rail, slidable mounting has the ultrasonic scanning detection device who is used for waiting to examine the article and carry out ultrasonic scanning detection from top to bottom in the slide rail, detect defective products and non-defective products in waiting to examine the article through this ultrasonic scanning detection device, slide rail upper end fixed mounting has and is used for promoting ultrasonic scanning detection device to slide from top to bottom along the slide rail, the frame lower extreme is installed and is used for detecting whether the article of waiting to examine comes to the photoelectric switch under the ultrasonic scanning detection device and is used for rejecting the mechanism that detects, still fixed mounting has the display that is used for showing ultrasonic scanning detection device's inspection result and the upper position that is connected with ultrasonic scanning detection device electricity in the frame The machine, host computer one side electricity is connected with the microcomputer time switch, and the detection cover is installed to ultrasonic scanning detection device's lower extreme, detects the upper surface of seat and has seted up the draw-in groove, rejects the mechanism and include with frame fixed connection's mounting bracket and horizontal installation the push rod motor on the mounting bracket, the push rod motor is connected with the microcomputer time switch electricity, installs the push pedal on the push rod head of push rod motor.
However, the semiconductor package good product detection device has the following defects:
wait to detect that fixed the placing of article is detecting the seat upper end, and ultrasonic scanning detection device can only scan the detection article through the top and detect, and the detection article can not overturn, leads to the scanning effect not good, leads to the testing result error to appear.
SUMMERY OF THE UTILITY MODEL
For solving the problem that provides among the above-mentioned background art, the utility model provides a semiconductor package equipment detection device has and to overturn the detection article, and the upset is swift convenient, enlarges detection range, improves the detection effect, avoids influencing the characteristics that detect the precision.
In order to achieve the above object, the utility model provides a following technical scheme: a semiconductor packaging equipment detection device comprises a belt conveyor, wherein a rack is installed on the upper end face of the belt conveyor, an ultrasonic scanning detection device is installed on the lower end face of the rack, a detection head is arranged on the lower end face of the ultrasonic scanning detection device, a detection cover is arranged below the detection head, the lower end face of the detection head penetrates through the upper end face of the detection cover and extends into the detection cover, a plurality of detection seats which are uniformly distributed are arranged on the upper end face of the belt conveyor, detection products are arranged on the upper end faces of the detection seats, a turnover device is installed on the back of the belt conveyor and is positioned at the rear lower part of the rack, the turnover device comprises an installation frame, two vertically arranged slide bars are fixedly connected inside the installation frame, electric sliders are connected to the outer walls of the two slide bars in a sliding mode, and through holes are formed in the outer walls of the electric sliders in a penetrating mode, the utility model discloses a gear wheel, including through-hole, installation frame, installation piece, installation frame, gear wheel, installation frame, one side fixedly connected with pinion rack of fixed plate, the pinion rack is connected with the gear engagement.
In order to make the detection cover fixed more firm, conduct the utility model relates to a semiconductor package equipment detection device is preferred, detect the up end of seat seted up with detect cover assorted rectangle recess.
For the convenience dismouting fixed plate, as the utility model relates to a semiconductor package equipment detection device is preferred, the fixed plate passes through fixing bolt and can dismantle with the back of installing frame and be connected.
In order to avoid electric chuck to shelter from the detection head and detect the field of vision, conduct the utility model relates to a semiconductor package equipment detection device is preferred, electric chuck is located the rear below of detecting the head.
For convenient control operation equipment, as the utility model relates to a semiconductor package equipment detection device is preferred, electronic slider and electronic sucking disc all control through outside PLC control system.
For the convenience of the ultrasonic scanning detection device is flexible, conduct the utility model relates to a semiconductor package equipment detection device is preferred, the bottom fixed connection of electric telescopic handle and frame is passed through to ultrasonic scanning detection device's up end.
Compared with the prior art, the beneficial effects of the utility model are that:
when the turnover device is in an initial state, the electric slider is arranged at the lower half section of the sliding rod, the electric sucker is positioned right above a detected product and does not contact the detected product, so that the detected product can be detected conveniently, after the detected product is detected completely, the electric slider is started to move downwards to enable the electric sucker to adsorb the detected product from the top, then the electric slider is started to move upwards again, when the electric slider moves upwards to drive the gear at the back of the rotating shaft to be meshed with the toothed plate at one side, the toothed plate is fixed in position and gradually moves upwards along with the electric slider to drive the gear to rotate, the gear drives the rotating shaft to rotate, so that the electric sucker at the front end rotates the toothed plate, the number of the teeth of the toothed plate is tested and installed, when the electric sucker rotates by one hundred eighty degrees, the gear just breaks away from the toothed plate, so that the direction of the electric sucker is fixed, at the moment, the detected product adsorbed by the electric sucker is turned by one hundred eighty degrees, make things convenient for ultrasonic scanning detection device to detect the bottom of detecting the article once more, improve detection effect greatly, improve and detect the precision.
To sum up, this kind of semiconductor package equipment detection device has can overturn to detecting the article, and the upset is swift convenient, enlarges detection range, improves detection effect, avoids influencing the characteristics that detect the precision.
Drawings
The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention, and together with the description serve to explain the invention and not to limit the invention. In the drawings:
FIG. 1 is an overall structure diagram of the present invention;
FIG. 2 is a front view of the turning device of the present invention;
FIG. 3 is a rear view structural view of the turning device of the present invention;
FIG. 4 is a schematic view of the electric suction cup of the present invention in an upward state;
in the figure, 1, a belt conveyor; 2. a frame; 3. an ultrasonic scanning detection device; 4. a detection head; 5. a detection cover; 6. a detection seat; 7. detecting; 8. a turning device; 9. installing a frame; 10. a slide bar; 11. an electric slider; 12. a through hole; 13. a rotating shaft; 14. mounting blocks; 15. an electric suction cup; 16. a gear; 17. a fixing plate; 18. a toothed plate; 19. and (5) fixing the bolt.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
In the description of the present invention, it is to be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are merely for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. In addition, in the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.
Referring to fig. 1-4, the present invention provides the following technical solutions: a detection device of semiconductor packaging equipment comprises a belt conveyor 1, a frame 2 is installed on the upper end face of the belt conveyor 1, an ultrasonic scanning detection device 3 is installed on the lower end face of the frame 2, a detection head 4 is arranged on the lower end face of the ultrasonic scanning detection device 3, a detection cover 5 is arranged below the detection head 4, the lower end face of the detection head 4 penetrates through the upper end face of the detection cover 5 and extends into the detection cover 5, a plurality of detection seats 6 which are uniformly distributed are arranged on the upper end face of the belt conveyor 1, detection products 7 are arranged on the upper end faces of the detection seats 6, a turnover device 8 is installed on the back of the belt conveyor 1, the turnover device 8 is positioned behind and below the frame 2, the turnover device 8 comprises a mounting frame 9, two vertically arranged slide bars 10 are fixedly connected inside the mounting frame 9, electric sliders 11 are connected on the outer walls of the two slide bars 10 in a sliding manner, through holes 12 are formed in the outer wall of the electric sliders 11, the inside of through-hole 12 rotates through the bearing and is connected with pivot 13, and the preceding terminal surface of pivot 13 has cup jointed installation piece 14, and the lower terminal surface of installation piece 14 is provided with electric chuck 15, and the back of pivot 13 has cup jointed gear 16, and the back of installing frame 9 is provided with fixed plate 17, and one side fixedly connected with pinion rack 18 of fixed plate 17, pinion rack 18 and gear 16 meshing are connected.
In this embodiment: the detecting device comprises a rack 2, an ultrasonic scanning detecting device 3 and related accessories on a semiconductor packaging good product detecting device in the prior art, wherein a plurality of detecting seats 6 are arranged on a belt conveyor 1, the belt conveyor 1 is a conveying and conveying device commonly used in production and can convey the detecting seats 6 in a translation and conveying mode from left to right, a detecting product 7 is placed on each detecting seat 6, a detecting head 4 is arranged at the lower end of the ultrasonic scanning detecting device 3, a slide rail is vertically and fixedly arranged at the upper end of the rack 2, the ultrasonic scanning detecting device 3 used for carrying out ultrasonic scanning detection on the detecting product 7 is vertically and slidably arranged in the slide rail, defective products and good products in the detecting products 7 can be detected through the ultrasonic scanning detecting device 3, an electric telescopic rod used for pushing the ultrasonic scanning detecting device 3 to slide up and down along the slide rail is fixedly arranged at the upper end of the slide rail, when the detecting products 7 come under the ultrasonic scanning detecting device 3, the ultrasonic scanning detection device 3 moves downwards to drive the detection cover 5 to directly cover the detection product 7, then ultrasonic scanning detection is carried out to detect good products and defective products of semiconductors, when the turnover device is in an initial state, the electric sliding block 11 is arranged at the lower half section of the sliding rod 10, the electric sucking disc 15 is positioned right above the detection product 7 and does not contact with the detection product 7, so that the detection of the detection product 7 is facilitated, after the front detection of the detection product 7 is finished, the electric sliding block 11 is started to move downwards to enable the electric sucking disc 15 to suck the detection product 7 from the top, then the electric sliding block 11 is started to move upwards again, when the electric sliding block 11 moves upwards to drive the gear 16 at the back of the rotating shaft 13 to be meshed with the toothed plate 18 at one side, because the toothed plate 18 is fixed in position, the gear 16 is driven to rotate along with the gradual upward movement of the electric sliding block 11, the gear 16 drives the rotating shaft 13 to rotate, thereby make the electronic sucking disc 15 of 13 front ends of pivot rotatory, the tooth nail quantity of pinion rack 18 is through the test installation, and gear 16 breaks away from pinion rack 18 just when electronic sucking disc 15 is rotatory one hundred eighty degrees to make the direction of electronic sucking disc 15 fixed, the adsorbed detection article 7 of electronic sucking disc 15 this moment carries out one hundred eighty degree upset, makes things convenient for ultrasonic scanning detection device 3 to detect the bottom of detection article 7 once more, improves detection effect greatly, improves the detection precision.
As a technical optimization scheme of the utility model, detect the up end of seat 6 and offer and detect 5 assorted rectangle recesses of cover.
In this embodiment: when electric telescopic handle drives and detects cover 5 and move down to the upper end that detects seat 6, detect inside the cover edge entering rectangle recess of cover 5, improve the leakproofness and make and detect cover 5 more stable, be favorable to detecting work.
As a technical optimization scheme of the utility model, fixed plate 17 can be dismantled through fixing bolt 19 and the back of installing frame 9 and be connected.
In this embodiment: the fixing plate 17 is mounted on the back of the mounting frame 9 through the fixing bolt 19, so that the mounting and dismounting are more convenient, and the toothed plate 18 is convenient to replace and maintain.
As a technical optimization scheme of the utility model, electric suction cup 15 is located the rear below of detecting head 4.
In this embodiment: the electric suction cup 15 is positioned at the rear lower part of the detection head 4, so that the electric suction cup 15 can not shield the detection head 4, and the detection work is prevented from being hindered.
As a technical optimization scheme of the utility model, electronic slider 11 and electronic sucking disc 15 all control through outside PLC control system.
In this embodiment: the electric slide block 11 and the electric sucker 15 are controlled to work through an external PLC control system, and the control is more convenient.
As a technical optimization scheme of the utility model, the bottom fixed connection of electric telescopic handle and frame 2 is passed through to ultrasonic scanning detection device 3's up end.
In this embodiment: when the detection object 7 comes under the ultrasonic scanning detection device 3, the ultrasonic scanning detection device 3 moves downwards through the electric telescopic rod, the detection cover 5 is driven to directly cover the detection object 7, and then ultrasonic scanning detection is carried out.
The utility model discloses a theory of operation and use flow: the detecting device comprises a rack 2, an ultrasonic scanning detecting device 3 and related accessories on a semiconductor packaging good product detecting device in the prior art, wherein a plurality of detecting seats 6 are arranged on a belt conveyor 1, the belt conveyor 1 is a conveying and conveying device commonly used in production and can convey the detecting seats 6 in a translation and conveying mode from left to right, a detecting product 7 is placed on each detecting seat 6, a detecting head 4 is arranged at the lower end of the ultrasonic scanning detecting device 3, a slide rail is vertically and fixedly arranged at the upper end of the rack 2, the ultrasonic scanning detecting device 3 used for carrying out ultrasonic scanning detection on the detecting product 7 is vertically and slidably arranged in the slide rail, defective products and good products in the detecting products 7 can be detected through the ultrasonic scanning detecting device 3, an electric telescopic rod used for pushing the ultrasonic scanning detecting device 3 to slide up and down along the slide rail is fixedly arranged at the upper end of the slide rail, when the detecting products 7 come under the ultrasonic scanning detecting device 3, the ultrasonic scanning detection device 3 moves downwards to drive the detection cover 5 to directly cover the detection product 7, then ultrasonic scanning detection is carried out to detect good products and defective products of semiconductors, when the turnover device is in an initial state, the electric sliding block 11 is arranged at the lower half section of the sliding rod 10, the electric sucking disc 15 is positioned right above the detection product 7 and does not contact with the detection product 7, so that the detection of the detection product 7 is facilitated, after the front detection of the detection product 7 is finished, the electric sliding block 11 is started to move downwards to enable the electric sucking disc 15 to suck the detection product 7 from the top, then the electric sliding block 11 is started to move upwards again, when the electric sliding block 11 moves upwards to drive the gear 16 at the back of the rotating shaft 13 to be meshed with the toothed plate 18 at one side, because the toothed plate 18 is fixed in position, the gear 16 is driven to rotate along with the gradual upward movement of the electric sliding block 11, the gear 16 drives the rotating shaft 13 to rotate, thereby make the electronic sucking disc 15 of 13 front ends of pivot rotatory, the tooth nail quantity of pinion rack 18 is through the test installation, and gear 16 breaks away from pinion rack 18 just when electronic sucking disc 15 is rotatory one hundred eighty degrees to make the direction of electronic sucking disc 15 fixed, the adsorbed detection article 7 of electronic sucking disc 15 this moment carries out one hundred eighty degree upset, makes things convenient for ultrasonic scanning detection device 3 to detect the bottom of detection article 7 once more, improves detection effect greatly, improves the detection precision.
The above description is only exemplary of the present invention and should not be construed as limiting the present invention, and any modifications, equivalents and improvements made within the spirit and principles of the present invention are intended to be included within the scope of the present invention.
Claims (6)
1. A semiconductor packaging equipment detection device comprises a belt conveyor (1), and is characterized in that: the upper end face of the belt conveyor (1) is provided with a rack (2), the lower end face of the rack (2) is provided with an ultrasonic scanning detection device (3), the lower end face of the ultrasonic scanning detection device (3) is provided with a detection head (4), a detection cover (5) is arranged below the detection head (4), the lower end face of the detection head (4) penetrates through the upper end face of the detection cover (5) and extends into the detection cover (5), the upper end face of the belt conveyor (1) is provided with a plurality of detection seats (6) which are uniformly distributed, the upper end faces of the detection seats (6) are provided with detection products (7), the back of the belt conveyor (1) is provided with a turnover device (8), the turnover device (8) is positioned below the back of the rack (2), the turnover device (8) comprises an installation frame (9), and the interior of the installation frame (9) is fixedly connected with two vertically arranged slide bars (10), two the outer wall sliding connection of slide bar (10) has electronic slider (11), through-hole (12) have been seted up in the outer wall of electronic slider (11) runs through, the inside of through-hole (12) is rotated through the bearing and is connected with pivot (13), installation piece (14) have been cup jointed to the preceding terminal surface of pivot (13), the lower terminal surface of installation piece (14) is provided with electric chuck (15), gear (16) have been cup jointed at the back of pivot (13), the back of installing frame (9) is provided with fixed plate (17), one side fixedly connected with pinion rack (18) of fixed plate (17), pinion rack (18) are connected with gear (16) meshing.
2. The inspection apparatus for semiconductor packaging equipment according to claim 1, wherein: the upper end face of the detection seat (6) is provided with a rectangular groove matched with the detection cover (5).
3. The inspection apparatus for semiconductor packaging equipment according to claim 1, wherein: the fixing plate (17) is detachably connected with the back of the mounting frame (9) through a fixing bolt (19).
4. The inspection apparatus for semiconductor packaging equipment according to claim 1, wherein: the electric sucker (15) is positioned at the rear lower part of the detection head (4).
5. The inspection apparatus for semiconductor packaging equipment according to claim 1, wherein: the electric sliding block (11) and the electric sucker (15) are controlled by an external PLC control system.
6. The inspection apparatus for semiconductor packaging equipment according to claim 1, wherein: the upper end face of the ultrasonic scanning detection device (3) is fixedly connected with the bottom of the rack (2) through an electric telescopic rod.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120479577.0U CN214682944U (en) | 2021-03-05 | 2021-03-05 | Semiconductor packaging equipment detection device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120479577.0U CN214682944U (en) | 2021-03-05 | 2021-03-05 | Semiconductor packaging equipment detection device |
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| CN214682944U true CN214682944U (en) | 2021-11-12 |
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| CN202120479577.0U Active CN214682944U (en) | 2021-03-05 | 2021-03-05 | Semiconductor packaging equipment detection device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114089143A (en) * | 2022-01-21 | 2022-02-25 | 江苏吉泰科电气有限责任公司 | Motor controller insulation withstand voltage testing device and implementation method thereof |
| CN115078256A (en) * | 2022-05-25 | 2022-09-20 | 安徽陆科光电科技有限公司 | Detection device and detection method for integrated circuit package appearance |
-
2021
- 2021-03-05 CN CN202120479577.0U patent/CN214682944U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114089143A (en) * | 2022-01-21 | 2022-02-25 | 江苏吉泰科电气有限责任公司 | Motor controller insulation withstand voltage testing device and implementation method thereof |
| CN114089143B (en) * | 2022-01-21 | 2022-04-05 | 江苏吉泰科电气有限责任公司 | Motor controller insulation withstand voltage testing device and implementation method thereof |
| CN115078256A (en) * | 2022-05-25 | 2022-09-20 | 安徽陆科光电科技有限公司 | Detection device and detection method for integrated circuit package appearance |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: A semiconductor packaging equipment detection device Granted publication date: 20211112 Pledgee: Agricultural Bank of China Limited by Share Ltd. Chizhou branch Pledgor: ANHUI WEITAI NAVIGATION ELECTRONIC TECHNOLOGY CO.,LTD. Registration number: Y2024980005167 |
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| PE01 | Entry into force of the registration of the contract for pledge of patent right |