KR20110091131A - Transferring apparatus - Google Patents

Abstract

PURPOSE: A transfer device minimizing generation of ripple phenomenon is provided to minimize ripple phenomenon by rotating a rotary shaft in high speed and reducing unbalance of cogging in magnetic force generation. CONSTITUTION: A transfer device comprises a permanent magnet part(140), an electromagnet part(150), and a controller. The permanent magnet part is combined at the end part of the rotary shaft for the rotation of a target object. The electromagnet part is separately placed near the circumference of the permanent magnet part. The electromagnet part produces the magnetic force to rotate the rotary shaft using interaction with the permanent magnet part. The controller controls the supply of the current applied to the electromagnet part so that the rotary shaft can be rotated based on the operation that N/S polarity of the electromagnet part about N/S polarity of the permanent magnet part is selectively varied.

Description

Conveyer {TRANSFERRING APPARATUS}

The present invention relates to a transfer apparatus, and more particularly, even when the rotating shaft is rotated at a high speed, the phenomenon in which the magnets are damaged by a collision as in the prior art can be significantly reduced as compared with the conventional one, and the maintenance work can be easily performed. In addition, the present invention relates to a transfer apparatus capable of minimizing the occurrence of ripple by reducing an imbalance of cogging when a magnetic force is generated.

The conveying device is a device for conveying a conveyed object. The object to be transported is a substrate including a liquid crystal display (LCD), a plasma display panel (PDP), organic light emitting diodes (OLED), a wafer for semiconductors, a tray or a cassette for receiving and supporting a substrate or a wafer. Not only can be a variety of logistics, including a general box (box), but the following will be described as a substrate to be transported.

At present, a conveying apparatus for conveying a substrate is known as a conveyor type conveying apparatus, a stage type conveying apparatus, a roller type conveying apparatus and the like, and these conveying apparatuses are applied to the process with their advantages and disadvantages.

Among such transfer apparatuses, in particular, the roller-type transfer apparatus has a structure for transferring a substrate based on the rotation of the roller according to the rotation of the rotary shaft in a state in which a plurality of rollers are coupled to the rotary shaft.

The roller-type feeder is configured to rotate and drive a rotating shaft in which the roller is coupled by a contact method for rotating the rotating shaft coupled to the roller by a combination of a motor and a bevel gear, and a non-contact type by a magnet (permanent magnet). It is roughly classified in a contactless manner.

The latter, non-contact conveying device has the advantage of reducing noise and particle generation over the conveying device of the former contacting method, and therefore is particularly present in substrate transfer processes in clean rooms. It is widely applied.

A roller-type conveying apparatus having a non-contact type by a conventional magnet includes a plurality of rotating shafts, in which a plurality of rollers are coupled and spaced apart from each other, and a plurality of first magnets (permanent magnets) respectively coupled to ends of the plurality of rotating shafts. A power transmission shaft disposed in a direction crossing the rotation axis in an area in which the plurality of first magnets are positioned, and spaced apart from the first magnet so as to correspond to the plurality of first magnets one by one, and to generate magnetic force therebetween; A plurality of second magnets (permanent magnets) are coupled to the power transmission shaft.

Thus, when the motor rotates the power transmission shaft, a plurality of second magnets coupled to the power transmission shaft rotate together with the power transmission shaft, and as the plurality of second magnets rotate, between the first and second magnets paired with each other. Based on the repulsive force, as the plurality of first magnets rotate, the rotating shaft combined with the plurality of rollers is rotated, so that the substrate seated on the plurality of rollers can be transferred.

However, in the conventional transfer apparatus, when the power transmission shaft rotates at a high speed, the first and second magnets to be operated while being spaced apart from each other by various factors such as shaft assembly tolerance of the power transmission shaft and shaft assembly tolerance of the rotating shaft. There is a problem in that during the rotation operation, especially when the rotation operation at high speed collides with each other and is broken.

In addition, the conventional transfer device, when attempting to repair and replace any one of the plurality of second magnets coupled to the power transmission shaft, repair and replace all the adjacent second magnets from the power transmission shaft There is a problem that maintenance work is not easy because the replacement work.

An object of the present invention, even if the rotating shaft is rotated at a high speed can not only significantly reduce the phenomenon that the magnets are damaged by the collision as in the prior art, but also can easily perform maintenance work, and furthermore, when a magnetic force is generated It is to provide a transfer device that can minimize the occurrence of ripple by reducing the imbalance of cogging (cogging).

The object is, in accordance with the present invention, a permanent magnet unit coupled to the end of the rotating shaft for rotation of the object to be transported; An electromagnet unit disposed to be adjacent to a circumferential surface of the permanent magnet unit, the separation distance from the permanent magnet unit being different for each position, and generating a magnetic force for rotating the rotary shaft by interaction with the permanent magnet unit ; And a control unit controlling a supply of a current applied to the electromagnet unit to rotate the rotating shaft based on an operation in which the N / S polarity of the electromagnet unit is selectively varied with respect to the N / S polarity of the permanent magnet unit. It is achieved by a conveying device comprising.

Here, the permanent magnet unit may have a circular shape, the virtual line connecting the inner surface of the electromagnet unit may have an arc shape disposed in a portion of the peripheral surface of the permanent magnet unit.

The imaginary line connecting the inner surface of the electromagnet unit may have a size smaller than or equal to a predetermined degree of semicircle (180 degrees) of the permanent magnet unit.

The separation distance between the permanent magnet unit and the electromagnet unit may be gradually widened from the central region of the electromagnet unit to both regions.

The electromagnet unit may include: a plurality of slots arranged at equal angle intervals along the circumferential direction with respect to the center axis of the permanent magnet unit, the coil being wound on an outer surface thereof; And it may include an arc type connecting portion for integrally connecting the plurality of slots.

At the exposed end of the slot, a head portion larger than the cross-sectional area of the slot may be further formed.

The inner surface of the head portion may have an arc shape.

Grooves recessed toward the arc connecting portion may be further formed on the inner surface of the head portion.

The rotating shaft may be arranged to be spaced apart from each other a plurality of feed rollers to be conveyed in contact with the object to be conveyed, the plurality of the rotating shaft may be coupled to the device frame to be relatively rotatable, the permanent magnet unit is provided with one of the rotating shaft hemp The electromagnet units may be provided to correspond to each one of the permanent magnet units.

It may further include a unit coupling unit connected to the electromagnet unit to couple the electromagnet unit to the device frame.

The plurality of permanent magnet units may be regularly coupled to only one end of the rotary shafts or may be coupled to both ends of the rotary shafts in a zigzag manner, and the object to be transferred may be a liquid crystal display (LCD) substrate.

Lines of the dividing surfaces of the N pole and the S pole in the permanent magnet unit may form a twisted angle with respect to the longitudinal direction of the rotation axis.

According to the present invention, even if the rotating shaft is rotated at a high speed, the phenomenon in which the magnets are damaged by collision as in the prior art can be significantly reduced as compared with the conventional, and the maintenance work can be easily performed. By reducing the cogging imbalance can minimize the occurrence of ripple.

1 is a perspective view of a transfer apparatus according to a first embodiment of the present invention.
2 is a plan view of FIG. 1.
3 is an enlarged view of region A of FIG. 1.
4 is a perspective view of an arrangement state between the permanent magnet unit and the electromagnet unit.
5 is a front view of FIG. 4.
FIG. 6 is a chart tested with different arrangements between the permanent magnet unit and the electromagnet unit. FIG.
7 is a perspective view of the arrangement state between the permanent magnet unit and the electromagnet unit in the transfer apparatus according to the second embodiment of the present invention.
8 is a plan view of a transfer apparatus according to a third embodiment of the present invention.

Prior to the description of the drawings, the object to be described below is a substrate including a liquid crystal display (LCD), a plasma display panel (PDP) and organic light emitting diodes (OLED), a wafer for a semiconductor, a substrate, and the like. In addition, it can be a tray or a cassette for receiving and supporting wafers, as well as various logistic products including a general box. However, for convenience of description, the following example will be described as a substrate to be transported.

1 is a perspective view of a conveying apparatus according to a first embodiment of the present invention, FIG. 2 is a plan view of FIG. 1, FIG. 3 is an enlarged view of region A of FIG. 1, and FIG. 4 is between a permanent magnet unit and an electromagnet unit. FIG. 5 is a front view of FIG. 4, and FIG. 6 is a chart tested while changing an arrangement state between the permanent magnet unit and the electromagnet unit.

As shown in these figures, in the conveying apparatus 100 of this embodiment, the apparatus frame 110 and the plurality of conveying rollers 120 and 122, which are conveyed by contacting a substrate as a conveyed object (not shown), are spaced apart from each other. And a plurality of rotation shafts 130 coupled to the apparatus frame 110 so as to be relatively rotatable, a plurality of permanent magnet units 140 coupled to end portions of the plurality of rotation shafts 130, and permanent magnet units 140. Is spaced apart adjacent to each circumferential surface, but the separation interval with the permanent magnet unit 140 is formed different for each position and generates a magnetic force for rotating the rotary shaft 130 by interaction with the permanent magnet unit 140 Electromagnet unit such that the rotating shaft 130 can be rotated based on the operation of the electromagnet unit 150 and the N / S polarity of the electromagnet unit 150 with respect to the N / S polarity of the permanent magnet unit 140 are selectively varied. To control the supply of current applied to 150 It includes a control unit (not shown).

The device frame 110 is a part forming an appearance of the conveying apparatus 100 of the present embodiment, including a plurality of conveying rollers 120 and 122, a plurality of rotating shafts 130, a plurality of permanent magnet units 140, and an electromagnet unit. Support 150. In the present embodiment, the device frame 110 is manufactured by assembling the metal frame in the shape of a square pipe horizontally and vertically.

A foot member 111 (see FIG. 1) supporting the device frame 110 with respect to the ground is provided at the lower end of the device frame 110. The foot member 111 is provided so that the height of the device frame 110 can be adjusted in a horizontal state with respect to the ground. In the form of height adjustment, a simple screw method can be applied.

The plurality of feed rollers 120 and 122 is a portion for transferring the substrate in contact with the outer surface thereof. Since the substrate has a property that is very vulnerable to the impact applied from the outside, a defect such as a scratch should not occur in the substrate while the substrate is contacted and transferred by the plurality of transfer rollers 120 and 122. Therefore, in this embodiment, the plurality of feed rollers 120 and 122 are made of a material such as urethane, silicon, or rubber.

The feed rollers 120 and 122 are provided in plural numbers spaced apart from each other on one rotation shaft 130. In the present embodiment, a total of ten feed rollers 120 and 122 are coupled to one rotation shaft 130.

Among the ten transport rollers 120 and 122, most of the transport rollers 120 have a circular structure in which bearings are mounted, whereas the transport rollers 120 are provided at both ends of the rotating shaft 130, that is, adjacent to the permanent magnet unit 140. The roller 122 has a slightly different structure.

That is, a flange portion 122a (see FIG. 3) having a diameter larger than the surface on which the substrate is substantially contacted is formed in the feed rollers 122 provided at both ends of the rotation shaft 130. The flange portion 122a is provided adjacent to the permanent magnet unit 140 side, respectively, and this flange portion 122a serves to prevent the substrate from leaving the transfer line to the outside of the apparatus frame 110. Serve.

The plurality of rotation shafts 130 rotatably support the feed rollers 120 and 122. As described above, the conveying apparatus 100 of the present embodiment has a structure in which each of the ten conveying rollers 120 and 122 is coupled to one rotation shaft 130.

However, since the scope of the present invention is not limited thereto, the number of feed rollers 120 and 122 coupled to one rotating shaft 130 may be appropriately changed. In addition, the number of the rotating shaft 130 provided in the device frame 110 may also be appropriately changed.

As in the present embodiment, in order to transfer large area substrates, for example, so-called 11th generation substrates having a length and width of about 3 meters (m), about 10 feed rollers 120 and 122 are provided on one rotation shaft 130. ) Should be combined, and the length of the rotation shaft 130 should be substantially long.

In this case, there is a fear that sagging occurs in the central region of the long rotating shaft 130. In order to prevent this, the present embodiment further includes a deflection stopper 131 coupled to the apparatus frame 110 to prevent deflection of the plurality of rotation shafts 130. However, the sag stop 131 may be excluded in the configuration.

On the other hand, the plurality of permanent magnet unit 140, as shown in Figures 3 and 4, are respectively coupled to the end of the rotation shaft 130.

These permanent magnet units 140 serve to rotate the rotating shaft 130 by the interaction by the magnetic force with the electromagnet unit 150.

Each of the permanent magnet units 140 has a circular cross-sectional structure in which the N pole and the S pole are sequentially arranged with each other along the circumferential direction thereof. In other words, the permanent magnet units 140 in this embodiment have a cylindrical or cylindrical structure. Therefore, the permanent magnet unit 140 viewed from the front has a circular shape as shown in FIG.

The N pole and the S pole formed in the permanent magnet units 140 are arranged to be divided regularly and evenly. In this case, it is preferable that the sum of the divided surfaces of the N pole and the S pole is an even number, so that the rotation force due to the interaction with the electromagnet unit 150 can be effectively provided. However, the scope of the present invention is not necessarily limited thereto.

In the permanent magnet unit 140 of the present embodiment, the lines L1 (see FIG. 4) of the dividing surfaces of the N pole and the S pole form a slightly twisted angle with respect to the longitudinal direction of the rotation shaft 130. However, as shown in FIG. 7 illustrating another embodiment, the line L2 of the dividing surfaces of the N pole and the S pole of the permanent magnet unit 140 may be parallel to the longitudinal direction of the rotation shaft 130. That is, although any of FIG. 4 and FIG. 6 may be applied, it may be found that it is advantageous to have a constant twist angle (skew) as shown in FIG. 4.

On the other hand, the electromagnet unit 150 is disposed adjacent to the peripheral surface of each of the permanent magnet units 140 to generate a magnetic force for rotating the rotating shaft 130 by interaction with the permanent magnet unit 140 Play a role. The electromagnet unit 150 is coupled to the device frame 110 by the unit coupling unit 155.

Looking at the structure of the electromagnet unit 150, in the present embodiment, the electromagnet unit 150 is arranged at equal angle intervals along the circumferential direction with respect to the center axis of the permanent magnet unit 140 and coiled to the outer surface. And a plurality of slots 151 wound around the plurality of slots 151, and an arc-type connection part 152 connecting the plurality of slots 151 integrally.

In the present embodiment, the arc-shaped connection portion 152 has a form that is connected in an arc shape at the root side of the plurality of slots 151, but the scope of the present invention is not limited to this matter.

In the present embodiment, the electromagnet unit 150 is applied in a six-slot slot structure in which six slots 151 are formed at six equal intervals along the circumferential direction. Since the relationship between the number of slots 151 and the number of poles of the permanent magnet unit 140 is almost fixed in the motor art, it may be referred to them, and the number of cases may vary. Therefore, the scope of the present invention need not be limited to the six-slot 151 structure.

At the exposed ends of the slots 151, a head portion 153 larger than the cross-sectional area of the slot 151 is formed. At this time, the inner surface 153a of the head portion 153 has an arc shape. And the head portion 153 is formed with a groove 154 recessed toward the arc-shaped connection portion 152.

The circumferential surface of the permanent magnet unit 140 has a perfect circular shape, but the imaginary line connecting the inner surface of the electromagnet unit 150 cuts a portion of the circle rather than a circular shape, that is, has an arc shape. Here, the virtual line connecting the inner surface of the electromagnet unit 150 means a virtual line connecting the inner surface 153a of the head unit 153.

In this case, the virtual line connecting the inner surface of the electromagnet unit 150 has a size smaller than or equal to a semicircle (180 degrees) of the permanent magnet unit 140 or a predetermined degree. Preferably, both ends of the imaginary line connecting the inner surface of the electromagnet unit 150 may be located at 180 degrees which is a semicircle of the permanent magnet unit 140.

And the separation interval between the electromagnet unit 150 and the permanent magnet unit 140 is formed differently, that is, the separation interval between the electromagnet unit 150 and the permanent magnet unit 140 is the central region of the electromagnet unit 150 It is gradually widened from both sides to the two regions.

In other words, as shown in FIG. 5, the separation width G1 (minimum gap) in the central region between the electromagnet unit 150 and the permanent magnet unit 140 is the narrowest, and the electromagnet unit 150 and the permanent magnet unit are the narrowest. The separation width G2 (maximum void) in the side region between the 140 is the widest.

For example, the narrowest minimum gap G1 in the central region between the electromagnet unit 150 and the permanent magnet unit 140 is about 0.5 mm, and the side region between the electromagnet unit 150 and the permanent magnet unit 140. The largest maximum void G2 in can be about 2.5 mm. Of course, it is not necessary to limit the scope of the present invention to these values.

By having such a structure, it is possible to minimize the occurrence of ripple by reducing the imbalance of cogging when generating magnetic force. Therefore, as a result, it is possible to ensure a smooth rotation of the rotary shaft 130.

I will talk about this. The strength of magnetic force (magnetic force) is close to that of magnetic and stator (coil) in a normal motor. The greater the impact.

In a typical motor, the strength of the magnetic force is proportional to the magnitude of the torque. Therefore, it is common to make efforts to minimize the gap between the rotor and the stator in the development of the motor, but generally, the shaft of the rotor is fixed by the bearing and the method of selecting the void is considered in consideration of mechanical tolerances. do.

Also, as the torque increases, the cogging phenomenon, which is represented by the relationship between the number of slots and the number of magnetic poles, generally increases relatively. In fact, cogging is not a problem for ordinary motors unless it is a very precise motor. In a typical motor, cogging imbalance does not occur because the rotor is arranged 360 degrees relative to the stator.

In this general theory it will be described by narrowing the range toward the motor that can be applied to the transfer device 100 as in the present embodiment. If the electromagnet unit 150 has a 180-degree arrangement based on the permanent magnet unit 140 without making a difference between the gaps G1 and G2 slightly different from this embodiment, the slot 151 is cut. The unbalance of cogging occurs in the 180 degree portion. The imbalance increases ripple. However, the transfer apparatus 100 of this embodiment should minimize the ripple phenomenon.

Of course, ripple is a physical phenomenon that cannot be completely eliminated. Therefore, as shown in the present embodiment, the electromagnet unit 150 has an ideal 180-degree arrangement based on the permanent magnet unit 140, but the gap G1 is uniformly brought to a caulking force at the 180-degree end. G2) In other words, if the separation interval between the electromagnet unit 150 and the permanent magnet unit 140 is different for each slot 151, i.e., for each position, the cogging imbalance can be prevented to reduce the ripple phenomenon. do.

For example, unlike the present embodiment, when the electromagnet unit 150 is arranged 360 degrees with respect to the permanent magnet unit 140, the size and shape of the magnetic flux are each angular position each time 30 degrees are moved in the 12 slots 151, for example. It is very different, but it is constant because it changes in a certain pattern.

However, when the 180 degree arrangement structure of the electromagnet unit 150 is applied based on the permanent magnet unit 140 as in the present embodiment, the size and shape of the magnetic flux are completely changed at the time of 180 degree deviation. Because of this, if it is out of 180 degrees, the diamagnetic material and the magnetic material may be in a state in which the amount of change may increase. In this embodiment, between the electromagnet unit 150 and the permanent magnet unit 140 in order to smooth the change. The separation intervals of the gaps, that is, the voids (G1, G2, see FIG. 5) are set differently, and the application of such a structure can reduce the unbalance of the cogging, thereby minimizing the occurrence of the ripple phenomenon.

6, the first model MODE. 1 and the second model MODE. 2 are permanent magnet units 140 while maintaining a gap between the permanent magnet unit 140 and the electromagnet unit 150. Only the twist angle of skew is different, and the third model (MODE.3) and the fourth model (MODE.4) are permanent magnets with different air gaps between the permanent magnet unit 140 and the electromagnet unit 150. This is an example in which the twist angle skew of the unit 140 is different.

As a result of the experiment, it can be seen that the ripple phenomenon does not appear as the cogging imbalance disappears toward the fourth model (MODE.4). FIG. 4 and FIG. Corresponds to the fourth model of MODE.4. Of course, the third model MODE.3 is also applicable.

The controller (not shown) may be configured to rotate the rotating shaft 130 based on an operation of selectively changing the N / S polarity of the electromagnet unit 150 with respect to the N / S polarity of the permanent magnet unit 140. It serves to control the supply of current applied to 150.

At this time, the direction of the current applied to the electromagnet unit 150 is determined based on the transfer direction of the substrate. In other words, the controller of the present embodiment controls the direction of the current applied to the electromagnet unit 150 so that the rotating shaft 130 can be rotated according to the direction in which the substrate is conveyed based on the left hand law of Fleming. By controlling the strength of the current as well as the direction control of the control the substrate transfer speed according to the rotational speed of the rotary shaft 130.

Accordingly, when the control unit alternately changes the N / S polarity formed in the electromagnet unit 150 by controlling the direction of the current applied to the electromagnet unit 150, the N pole and the S pole are regularly and equally divided. The repulsive force is generated at positions corresponding to each other between the permanent magnet units 140 arranged, and the permanent magnet units 140 rotate the rotating shaft 130 due to the generated repulsive force.

Referring to the operation of the transfer device 100 having such a configuration as follows.

When the substrate is moved to the transfer apparatus 100 by a separate transfer robot, first, the controller alternately controls the N / S polarity formed in the electromagnet unit 150 by controlling the direction of the current applied to the electromagnet unit 150. Change it.

Then, the repulsive force is generated at a position corresponding to each other between the electromagnet unit 150 having a six-slot slot structure and the permanent magnet units 140, in which the N poles and the S poles are regularly divided and arranged equally. The permanent magnet units 140 rotate based on the repulsive force, thereby rotating the rotating shaft 130 so that the substrate seated on the conveying rollers 120 and 122 on the rotating shaft 130 can be transferred in a desired direction.

As such, the transfer device 100 according to the present embodiment rotates the rotating shaft 130 while the permanent magnet units 140 rotate by magnetic force at a position spaced apart from the electromagnet unit 150 fixed to the apparatus frame 110. Since the electromagnet unit 150 does not rotate even if the rotating shaft 130 is rotated at a high speed because of its structure and principle, the phenomenon in which magnets (magnets) are damaged by collision as in the prior art can be significantly reduced. .

In addition, even if the electromagnet unit 150 is not processed so precisely, it is possible to prevent the phenomenon in which magnets (magnets) are broken by collision as in the prior art during operation.

And the conveying apparatus 100 of the present embodiment, the electromagnet unit 150 is coupled to the device frame 110, because one permanent magnet unit 140 has a structure that is coupled to the end of the rotating shafts 130 assembling work Not only is it easy, but also maintenance work has the advantage of being much easier than the conventional.

As such, according to the present embodiment, even if the rotating shaft 130 is rotated at a high speed, the phenomenon in which magnets (magnets) are damaged by collision as in the prior art can be significantly reduced as compared with the conventional art, and the maintenance work can be easily performed. In addition, it is possible to minimize the occurrence of the ripple phenomenon by reducing the imbalance of cogging (cogging) when the magnetic force is generated.

8 is a plan view of a transfer apparatus according to a third embodiment of the present invention.

In the above-described embodiment, the permanent magnet units 140 are arranged in one line only on one side of the device frame 110 and regularly coupled to only one end of the rotation shaft 130.

However, like the transfer device 200 of the present embodiment, the permanent magnet units 140 may be coupled in a zigzag manner at both ends of the rotating shafts 130.

In this case, the feed rollers 120 and 122 may also be seen in a zigzag manner in the arrangement direction, even if the configuration is as shown in FIG. 7, there is no problem in providing the effect of the present invention.

However, as shown in FIG. 7, when the permanent magnet units 140 are provided in a zigzag manner, the electromagnet unit 150 should also be disposed in a zigzag manner at a position corresponding thereto.

As described above, the present invention is not limited to the described embodiments, and various modifications and changes can be made without departing from the spirit and scope of the present invention, which will be apparent to those skilled in the art. Therefore, such modifications or variations will have to be belong to the claims of the present invention.

110: device frame 120,122: feed roller
130: rotating shaft 140: permanent magnet unit
150: electromagnet unit 151: slot
152 arc connection portion 153 head portion
154 groove

Claims (12)

A permanent magnet unit coupled to an end of a rotating shaft for rotating the object to be transferred;
An electromagnet unit disposed to be adjacent to a circumferential surface of the permanent magnet unit and spaced apart from the permanent magnet unit according to positions, and generating a magnetic force for rotating the rotary shaft by interaction with the permanent magnet unit ; And
And a control unit controlling a supply of a current applied to the electromagnet unit to rotate the rotating shaft based on an operation in which the N / S polarity of the electromagnet unit is selectively varied with respect to the N / S polarity of the permanent magnet unit. Transfer device, characterized in that. The method of claim 1,
The permanent magnet unit has a circular shape,
And a virtual line connecting the inner surface of the electromagnet unit has an arc shape disposed in a portion of the peripheral surface of the permanent magnet unit. The method of claim 2,
And a virtual line connecting the inner surface of the electromagnet unit has a semicircle (180 degrees) of the permanent magnet unit or a predetermined size smaller than that. The method of claim 3,
The separation device between the permanent magnet unit and the electromagnet unit is characterized in that the transfer device is gradually widened from the central region of the electromagnet unit toward both sides. The method of claim 1,
The electromagnet unit,
A plurality of slots arranged at equal isotropic intervals along the circumferential direction with respect to the center axis of the permanent magnet unit, the coil being wound on an outer surface thereof; And
Transfer device characterized in that it comprises an arc-shaped connecting portion for connecting the plurality of slots integrally. The method of claim 5,
And a head portion larger than the cross-sectional area of the slot is formed at the exposed end of the slot. The method of claim 6,
Transfer device, characterized in that the inner surface of the head portion has an arc shape. The method of claim 7, wherein
And a groove recessed toward the arc-shaped connecting portion is further formed on the inner surface of the head portion. The method of claim 1,
The plurality of feed rollers to be transported in contact with the conveyed object is arranged spaced apart from each other,
A plurality of the rotation axis is coupled to the device frame to be relatively rotatable,
The permanent magnet unit is provided with one of the rotating shaft hemp, the electromagnet unit is characterized in that the corresponding one provided per one permanent magnet unit. 10. The method of claim 9,
And a unit coupling part connected to the electromagnet unit to couple the electromagnet unit to the device frame. 10. The method of claim 9,
The plurality of permanent magnet units are regularly coupled to only one end of the rotary shaft or zigzag coupled to both ends of the rotary shaft,
The transported object is characterized in that the liquid crystal display (LCD) substrate. The method of claim 1,
And the lines of the dividing surfaces of the N pole and the S pole in the permanent magnet unit form a twisted angle with respect to the longitudinal direction of the rotating shaft.

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