TWI442672B - Motor with lift capability and reduced cogging characteristics - Google Patents

Description

Motor with lifting capacity and reduced turning characteristics

This invention relates to motor stators, and more particularly to reduced complexity motor stators having reduced on-rotation characteristics.

At present, iron core motors are widely used. The ferromagnetic core provides a gain in the magnetic flux density of the air gap between the permanent magnet rotor and the stator. Therefore, the motor constant is substantially higher than the motor constant of the non-core design. On the other hand, since the conventional stator is constructed as a trough, the gravitational force between the permanent magnet of the rotor and the slot teeth of the stator generates a high torque or a counter-rotation force, thus causing precise motion control of the rotary motor or the linear motor. Highly unwanted interference.

In an exemplary application, substrate processing equipment typically performs multiple operations on a single substrate. U.S. Patent 4,951,601 discloses a substrate processing apparatus having a plurality of processing chambers and a substrate transfer apparatus. The substrate transfer apparatus moves the substrate between the process chambers when performing different operations such as spraying, etching, coating, wetting, and the like. Production processes used by semiconductor equipment manufacturers and material manufacturers often require precise positioning of substrates in substrate processing equipment. The transmission device can include a large number of moving components, such as multiple motors. The transition can affect the accuracy of the transmission application. Turning around may also adversely affect other functions of the motor.

In some applications, materials must be handled in a controlled, clean environment, as subtle contamination can cause serious problems. In these applications, cleaning is directly related to revenue and affects costs. Other applications can include Process steps in harsh environments such as highly corrosive gases and high temperatures. Motors with contact bearings can wear out, cause particulate contamination, and eventually cannot be used due to harsh environments. The bearing will also vibrate and beat continuously until it fails. Self-bearing motors provide other possibilities for these applications. To maximize torque and generate a center force, a self-bearing motor can typically include a toothed stator having a segmented winding set wound in a component around the stator.

The bearing motor may be disturbed by cogging forces in the tangential, radial and axial directions. Different components and techniques are available to minimize distortion in these directions.

Several embodiments of the invention are described with reference to the drawings, but it should be understood that they can be implemented in many other forms. It should also be understood that the invention may be practiced using any suitable size, shape or type of elements or materials.

1A and 1B are schematic illustrations of a motor 10 that can implement the embodiments disclosed herein. Although the presently disclosed embodiments are described with reference to the drawings, it should be understood that they can be implemented in many other forms. At the same time, it can be implemented using any suitable size, shape or type of elements or materials.

In the embodiment of FIG. 1A, motor 10 includes a drive element, such as rotor 11, winding sets 12, 15, and a stator 14. For the disclosed embodiments, it should be understood that the drive element includes performing a movement or applying a force in response to this Equipment for the force generated by the winding set device described in the premises. The drive elements include the rotor and platen in the disclosed embodiments.

The embodiment of the example motor 10 depicted in FIG. 1A has a rotational configuration, although other embodiments may include the linear configuration described below. The winding sets, 12, 15 may include one or more coils and may be driven by a current amplifier 25. Amplifier 25 may comprise a combination of software, hardware or a combination of soft and hard suitable for driving a winding set. Amplifier 25 may also include a processor 27, a commutation function 30, and a current loop function 35 that drives the winding set. The commutation function 30 can provide current to one or more coils of each winding set through a specific set of functions. The current loop function 35 provides feedback and drive capability to maintain current through the coil when powering the coil. Processor 27, commutation function 30, and current loop function 35 may also include circuitry for receiving feedback from one or more sensors or sensor systems that provide positional information. Each current amplifier disclosed herein includes circuitry, hardware, software, or a combination of hardware and software that performs functions and calculations on the disclosed embodiments as desired.

Figure 2 shows another exemplary embodiment with a linear configuration. The motor 20 includes a drive member 21 which, in the present embodiment, is comprised of a pressure plate, a winding assembly 22, 24 and a stator 45. Similar to the embodiment of Figure 1, the rotor 21 can be made in any suitable manner, and the winding sets 22, 24 can include one or more coils.

Both motors 10, 20 can utilize a minimum air gap and ferromagnetic material to increase the flux density between the air gaps to produce the desired passive axial and tilt stiffness. The motors 10, 20 can be embodied as synchronous brushless motors. horse Up to 10, 20 can also be represented by other types of motors.

Figure 1B is a schematic cross-sectional view of the stator and rotor (e.g., drive element) configuration and the resulting axial force generated by the illustrated configuration in the exemplary embodiment. In the exemplary embodiment shown, the motor arrangement enables the drive element to generate a passive axial lift. As shown in FIG. 1B, the drive element 1405 is displaced along the Z-axis, and the flux line extends through the surface of the stator 1432 perpendicular to the gap 1430 to the outside of the gap 1430, thereby creating a lifting force. Figure 1C is a schematic illustration of the stator and rotor configuration of the present embodiment, which produces a passive radial force and a resultant radial force that can cause a tumbling. For example, a difference in the gap between the magnets N, S of the rotor 1435 and the stator 1440 produces a radial resultant force F _R . Figure 1D is a schematic illustration of the stator and rotor configuration of the present embodiment, which provides passive tilt and longitudinal stability and corresponding tilting forces that can cause clicks. For example, a passive tilting force acts on the rotor 1450 to momentarily cancel the axial and radial resultant moments to produce the desired tilt and longitudinal stiffness.

The required axial and tilt stiffness as well as other functional parameters can result in uneven stator profile. However, in conventional motors, an increase in magnetic flux density and a non-uniform stator profile also cause a large rotational force when the distance between the air gaps suddenly changes. The disclosed embodiments are directed to different example components that minimize the transition.

3 and 4 are schematic views of exemplary components used to reveal embodiments. The example elements of Figures 3 and 4 can be represented as part of a stator 100, 200 in a rotary motor and a linear motor, respectively. Some embodiments may also include an arrangement of magnets 150, 180, 190, 195, 250, 280, 290, and 295 to.

The presently disclosed embodiments include one or more example components and techniques that minimize torsional disturbances on some axes when producing many desired axial and tilt stiffnesses. One or more of the example components also create the required forces between the air gaps, including the centering force of the rotary motor application and the positioning or guiding force of the linear motor application. At least some of the disclosed embodiments utilize elements in such a way as to superimpose the resulting rotational forces of each of the component elements to minimize total tumbling interference along the propulsion, spacing and axial directions.

Figure 3 shows an example component shown by the stator 100 of a rotary motor. The stator 100 can include a plurality of recesses 105, 175 that extend inwardly from the first surface 110 of the stator 100. The four depressions 105, 175, 197, 198 shown in Figure 3 are merely examples, but in other embodiments, the stator depressions may be more or less than four. In the exemplary embodiment, the depressions shown are substantially identical to each other and are evenly distributed around the periphery of the stator. In other embodiments, the recesses may be positioned in any suitable manner, and the configuration of the recesses, particularly the recessed transition regions, may vary, as will be further described below. Each recess may include two transition regions from the first surface to the recess. For example, the recesses 105 can include first and second transition regions 115, 120 between the first surface 110 and the recesses 105, respectively. The first transition region 115 can include a first transition portion 125 and a second transition portion 130, and the second transition region 120 can include a third transition portion 135 and a fourth transition portion 140. Likewise, the recesses 175 can include first and second transition region 127, 137 between the first surface 110 and the recess 175, respectively. The first transition region 127 can include a first transition portion The minute transition region 137 may include a third transition portion 157 and a fourth transition portion 163.

The rotor 145 that operates with the stator 100 can include a plurality of permanent magnets, and the magnetic properties of adjacent magnets are opposite. The illustrated magnets 150, 180, 190, and 195 are merely examples. It will be appreciated that other magnets may be distributed in the magnets shown.

An example configuration of stator 100 will be described in further detail herein. It should be understood that any suitable size specification can be employed for the disclosed embodiments. In at least one exemplary embodiment, the distance 155 between the first transition portion 125 and the third transition portion 135 is approximately nP/2+(ε), where n is an arbitrary integer and P is the distance between magnets having the same magnetic pole, ε is the adjustment factor, which will be further elaborated later. In one embodiment, the cooperating depressions 105, 175 (adjacent portions as shown in Figure 3) may have the same distance between their first and third transition portions. In the exemplary embodiment, the pitch of the first transition portion 125 of the recess 105 and the first transition portion 147 of the adjacent slot 175 (in the direction of travel) is approximately nP/2+mP/4, where mP/4 is the corresponding magnet The offset between adjacent recesses (e.g., m can be an odd integer 1, 3, 5...).

The distance 165 between the first and second transition portions 125, 130 can be any suitable distance. In the exemplary embodiment, the distance 170 between the third and fourth transition portions 135, 140 of the same recess is similar to the distance 165. In other embodiments, the respective distances, slopes, or shapes of the first and second transition regions may vary, as will be further described below. In the exemplary embodiment, the distance 157 between the first transition portion 125 of the component and the fourth transition portion 140 (e.g., the total distance between the initial transition and the final transition) is approximately nP/2+L, where L is the distance 170 of the transition region 120. In the exemplary embodiment, the total distance 161 of the cooperating depressions 175 (the distance between the respective initial transitions and the final transition) is similar to the distance 157. However, in other embodiments, the total distance of the synergistic depressions may be any value that conforms to nP/2+L.

Figure 4 also shows one or more example components configured to reduce the revolution. For example, the components in the linear motor stator 200. Similar to the stator 100, the stator 200 can include two or more recesses 205 that can extend inwardly from the first surface 210 of the stator 200. Each recess 205 can include first and second transition regions 215, 220 between the first surface 210 and the recess 205, respectively. The first transition region 215 can include a first transition portion 225 and a second transition portion 230, and the second transition region domain 220 can include a third transition portion 235 and a fourth transition portion 240.

An example size of the stator 200 of the linear embodiment will now be described. It should be understood that any suitable size may be employed for the disclosed embodiments. In at least one exemplary embodiment, the linear distance 255 from the first transition portion 225 to the third transition portion 235 (in the direction of travel) may be approximated as nP/2+(ε), where n is an integer. P is the distance between magnets having the same magnetic pole, and ε is an adjustment factor similar to that in the example of FIG. The linear distance 260 between the first transition portions 225 of adjacent recesses 205, 275 is approximately nP / 2 + mP / 4. Distances 265 and 270 may be equal, but may not be equal in other embodiments.

The platen 245 that operates with the stator 200 can include a plurality of magnetically opposite permanent magnets. The illustrated magnets 250, 280, 290, and 295 are merely examples. It should be understood that other magnets may be distributed between the displayed magnets.

The operation of the embodiment in Figures 3 and 4 will now be described.

As described above, in the embodiment of the present invention, the anti-rotation system of the selectable motor can simultaneously minimize the turn in the advancement, clearance, and radial force directions. The operation of the embodiment of Figure 3 in the advancement direction, e.g., the clockwise movement of the rotor, will now be described. It will be appreciated that this embodiment also functions in other directions of advancement, such as counterclockwise movement of the rotor. Due to the above distance 155, the magnets 150, 180 (it will be appreciated that in the exemplary embodiment, the magnets 150, 180 are spaced apart from each other by a distance of nP/2, moving clockwise) will approach the first and third transition regions, respectively, at approximately the same time. 125 and 135, and various adjustments are made as a function of the adjustment factor described below.

When passing through the first transition portion 125, the magnet 150 is subjected to a counterclockwise tangential force opposite to the propulsive force, referred to as cogging, by the step on the stator surface associated with the first transition 115. Generated (generally oriented to the tangential direction). The magnet 180 is subjected to a clockwise tangential force in the direction of the propulsive force, also referred to as a tumbling, which is caused by the stepping of the associated second transition region 120 by the magnet 180 as it passes through the third transition portion 135. Therefore, the counterclockwise tangential force acting on the magnet 150 and the clockwise tangential force acting on the magnet 180 are reversed and cancel each other out. Therefore, the reverse rotation force can be applied to minimize or eliminate the tumbling of the rotor 145. In the present example, if the distance 155 is approximately nP/2, the magnet 180 may be swung forward in front of the magnet 150 due to the direction of the second transition region 120. The adjustment factor ε can be selected to adjust the distance 155 to compensate in this direction to produce a substantially in-phase rotatory force for optimal cancellation. The adjustment factor ε may also include other adjustments of the difference between the magnets 150, 180 whole. For example, ε may include tolerances to compensate for the fabrication of stator 100, rotor 145, differences in shape of magnets 150, 180, or any other suitable compensating element. In other embodiments, the distance between the first and third transition portions may have no adjustment factor, and the phase compensation that counteracts the torsional force may be affected by shapes, ranges, or other differences in the first and second transition region domains. In other embodiments, the adjustment factor ε can be used with differently shaped transition regions.

FIG. 5A is a schematic diagram showing the tangential force acting on the magnet 150, the tangential force 315 on the magnet 180, and the tangential turning force 320 generated by superimposing the tangential forces 310 and 315. Because the magnets 150 and 180 reach and pass through the first and third transition portions 125 and 135, respectively, at approximately the same time, the resulting tangential counterforces 320 are less than the forces they arrive at different times. As shown in FIG. 5A, the force cancellation in the leading transition region and the trailing transition region can be regarded as the first level of anti-rotation.

Further reduction of the rotational force, such as secondary resistance, can be achieved by the above-described distance 160 and the forces acting on the additional magnets 190 and 195. As noted above, the distance 160 between the first transition portion 125 of the slot 105 and the first transition portion 147 of the adjacent slot 175 is approximately nP/2+mP/4. In the example dimensions of Figure 3, m can be one. Thus, when magnet 195 has the same electronic offset as magnet 180, magnet 190 can produce an offset of about ±90 electrical degrees from magnet 150. When the magnets 190 reach the first transition region 147 and the magnets 195 reach the third transition region 157, they are subjected to an electrical angular offset similar to that described above for the magnets 150, 180.

Figure 5B shows the magnet 190 on the size of the example stator 100. A tangential thrust force 330, a tangential thrust force 335 on the magnet 195, and a tangential turn-to-turn force 340 resulting from the superposition of the tangential forces 330 and 335. Similar to the magnets 150 and 180, the magnets 190 and 195 reach the first transition portion and the third transition portions 147 and 157 at approximately the same time, and the resulting tangential thrust force 340 is greater than the force they generate at different times. small.

Figure 5C shows an exemplary tangential thrust force 345 (e.g., secondary anti-rotation force) produced by the resultant forces 320 and 340. As described above, it can be seen in FIG. 5C that the distance between the recess pitch and the first transition portion of the adjacent recess 160 of the stator 100 further reduces the tangential thrust.

The disclosed embodiment also reduces the tumbling in the axial direction (Z direction), ie the direction perpendicular to the plane of the rotor. 6A is a schematic illustration of the axial force 410 on the magnet 150 of the exemplary size of the stator 100, the axial force 415 of the magnet 180, and the axial force 420 resulting from the superposition of the axial forces 410 and 415. Similar to the above embodiment, the resulting axial tumbling force 420 is reduced by the magnets 150 and 180 reaching at about the same time and passing through the first and third transition regions 125 and 135, respectively.

The distance 160 described above separates the common operating regions (e.g., recesses 105, 175) such that the forces acting on the magnets 190 and 195 can also reduce the axial thrust with the anti-rotation forces generated on the magnets 150 and 180. As previously mentioned, the distance 160 between the first transition portion 125 of the recess 105 and the first transition portion 147 of the adjacent recess 175 is approximately nP/2+mP/4. Therefore, when the magnet 190 reaches the first transition portion 147 and the magnet 195 reaches the third transition portion 157, they both generate an axis similar to the above-described magnets 150, 180. To the force, an electronic offset is generated.

6B shows the axial thrust force 430 on the magnet 190 of the exemplary size of the stator 100, the axial thrust force 435 on the magnet 95, and the axial thrust force 440 produced by the superposition of the axial forces 430 and 435. . Since the magnets 190 and 195 reach the first transition portion 147 and the third transition portion 157, respectively, at about the same time, a smaller axial thrust force 440 can be produced. Figure 6C shows the axial thrust force 445 produced by the resultant forces of the axial directions 320 and 340.

As described above, the contours of the respective rotational forces (the same anti-rotational forces) may differ depending on the shape and size of the surface of the transition region. Thus, the transition regions 115, 120, 127, and 137 can have different shapes and sizes as desired. In the exemplary embodiment shown in FIG. 3, as described above, the distances of the various transition regions may be similar. For example, the distance of each transition zone may be equal to or greater than P/2. In other embodiments, the distance and shape of the leading transition region and the trailing transition region may be different, for example, the trailing transition region (similar to region 120) is longer than the previous transition region (similar to distance 165) (similar to distance 170) ). Therefore, the trailing transition region is activated slightly later for the moving magnet than the leading transition region, but longer than the leading transition region. In the exemplary embodiment, the transition region is shaped such that one or more of the forces 310, 315, 330, 335, 410, 415, 430, 435 produce a smoother transition region or a more uniform profile.

Figure 3 shows example transition regions 115, 120 having angular shapes. Turning to FIG. 7A, the example transition regions 510, 515 are concave relative to the first surface 520, the curves of which are inwardly directed from the first surface 520. 525. It should be understood that the surface shape can be asymmetrical. Another embodiment is shown in FIG. 7B in which the example transition regions 530, 535 are concave relative to the inner surface 520. In the embodiment shown in FIG. 7C, the transition regions 540, 545 are retracted from the first surface 520 and the recess 525. Figure 7D shows a cross section, and Figure 7E shows a side view of the stator component 550, wherein the shape of one exemplary transition region is complex, including the composite angle from the transition portion 560 to the transition portion 565. It will be appreciated that in the exemplary embodiment, component 550 is generally commensurate with the Z-axis overlap between the permanent magnet and the stator. In the exemplary embodiment illustrated in Figures 7D-7E, the composite angular transition surfaces 555A, 555B can be advanced to the axial direction (Z) to counteract the counterforce (e.g., provide the desired anti-rotation) effect.

Other suitable transition area configurations, such as linear, non-linear, composite, and other shapes, may also be employed. It should be understood that the transition regions may be asymmetrical or may have different shapes and sizes. In the disclosed embodiment, the transition region may comprise a different material, for example, some of the materials used are different from the rest of the stator. In some embodiments, different materials can be selected for the transition region to achieve a variable impedance.

The exemplary embodiment can also reduce the radial counterforce, i.e., keep the rotational force parallel to the spacing between the stator 100, 200 and the rotor 145 or platen 245, respectively. 8 is a schematic illustration of the stator 100 of FIG. 3 including a magnet 150, a recess 105, and first, second, third, third, and fourth 140 transition portions. The magnet 605, which is completely opposite the magnet 150, can be any of the magnets or other magnets shown in FIG. Other elements in Figure 3 are not explicitly shown. The illustrated stator 100 has at least two depressions along the first surface 110 105, 610. The recess 610 can be a recess 175 (Fig. 3) or other recess. The recess 610 includes a first 630, a second 635, a third 640, and a fourth 645 transition portion. At least one method of reducing the radial counterforce includes placing recesses 105, 610 along the first surface 110 of the stator 100 such that the two oppositely opposite magnets 105, 605 on the rotor 100 can reach the first at substantially the same time. Second, third and fourth transitions.

Figure 9A shows the radial force 710 generated on the rotor 145 as the magnet 150 passes through the first 125 and second 130 transition portions, and Figure 9B shows the rotor when the magnet 605 passes through the first 630 and second 635 transition portions. Radial force 720 generated on 145. The forces 710 and 720 are essentially opposite each other, so they can cancel each other as long as the rotor remains in the center position.

Referring again to Figure 8, only two winding sets 685, 690 can be used to drive the embodiments of the present disclosure. The winding sets 685, 690 can include one or more coils. It will be appreciated that the winding set for the various components of the embodiments of the present disclosure may include one or more coils in one or more recesses, and may include any type of coil suitable for use in embodiments of the present disclosure. Embodiments disclosed may include a segmented winding set, for example, a winding set is divided into one or more sub-winding groups in a selected stator recess. Each sub-wound group can include one or more coils and can be driven to produce a motor force for the disclosed embodiments. In one or more embodiments, the winding sets can be arranged as a three-phase winding set, although any other suitable arrangement can be used.

Figures 10 and 11 are schematic illustrations of other example anti-rotation elements 800, 900 that are configured to reduce the revolution of the disclosed embodiment. The anti-rotation elements 800, 900 can be fabricated using ferromagnetic materials.

The anti-rotation elements 800, 900 can be used for both rotary and linear applications. Arranging the anti-rotation elements 800, 900 in a geometric shape allows the superposition of the tumbling forces generated by the element elements to minimize the total tumbling disturbances in the advancement and gap directions. For example, the winding of the stator winding set can be reduced by selecting the winding pitch of the winding group, and the rotation caused by the interruption of the stator can be reduced by selecting an appropriate transition region shape and size.

The anti-rotation element 800 element shown in FIG. 10 includes an inner arc segment 805, an outer arc segment 810, first and second transition regions 815, 820, a coil slot sequence 825, and a span angle 830. By arranging the inner arc segments 805, interaction with the permanent magnet rotor can be achieved, such as 1035 (Fig. 12). The coil slot 825 can include a winding set, such as a three-phase winding set. A sinusoidal commutation scheme can be used to drive the winding set. The span angle 830 is set such that the angle 830 = n (P/2), where n is an arbitrary integer and P is the pitch between the two magnets of the rotor having the same polarity.

Element 900 in FIG. 11 includes an inner segment 905, an outer segment 910, first and second transition regions 915, 920, a coil slot sequence 925, and a span angle 930. Interaction with the permanent magnet platen 935 can be achieved by providing the inner segment 905. The coil slot 925 can include a winding set, such as a three-phase winding set. The winding group can be driven by a sinusoidal commutation scheme. The span distance 930 can be set such that the span angle 930 = n (P/2), where n is an arbitrary integer and P is the pitch between the magnets of the platen having the same polarity.

For Figures 10 and 11, the slot slots 825, 925 may be fractional in applications where an odd number of anti-rotation elements 800, 900 are used, or in applications where an even number of anti-rotation elements 800, 900 are used. Can be an integer. It is thus possible to reduce or substantially eliminate the tumbling caused by the teeth of the stator windings by selecting the slot pitch. It should be understood that any number of anti-rotation elements 800, 900 can be used.

The exemplary embodiment shown in Figure 12 employs a single anti-rotation element 1000. The slot pitch of the coil slot 1025 in this embodiment is a fraction, and thus the rotational force generated by the coil slot 1025 can cancel each other by destructive interference. Figure 13 shows an exemplary embodiment comprising two elements 1105, 1110 configured to reduce rotation. This embodiment can adopt different techniques to minimize the turn. For example, 1105 and 1110 can be substantially identical and positioned such that the spacing of reference angles 1115 and 1190 is an electrical angle of 90 degrees. In other examples, the positioning 1105 and 1110 can cause the reference angles 1115 and 1190 to be at a 180 degree mechanical angle, and the coil slots 1125 and 1130 are aligned with a virtual 360 degree fractional slot. The coil slots 1125 and 1130 in this method are different.

Figure 14 shows an exemplary embodiment of four elements 1205, 1210, 1215, and 1220 configured to reduce revolutions. In one or more embodiments, the elements can be the same and can be separated from each other by a mechanical angle and an electrical angle of 90 degrees. In other embodiments, the spacing of elements 1205, 1210, 1215, 1220 can be a 90 degree mechanical angle, while corresponding respective coil slots 1225, 1230, 1235, 1240 are aligned with a virtual 360 degree fractional slot. In some embodiments, only the sub-coil slots are filled with coils because only the passive interaction between the rotor or platen magnets and the components configured to reduce the revolution is considered.

Figure 15 shows a motor including a rotor 1815 and at least two cores 1800, wherein at least the first core 1805 has a winding set, and at least the second core 1810 has no winding set. The offset of the core 1810 from the core 1805 is 90 degrees, thereby providing mechanical means for other embodiments to reduce the tumbling.

U.S. Patent Application Serial No. 11/769,651, filed on Jun. 27, 2007, which is incorporated herein by reference in its entirety, it is incorporated herein by reference in its entirety in the in the in the in the U.S. Patent Application Serial No. 11/769,688, filed on Jun. 27, 2007, which is incorporated herein by reference in its entirety, is incorporated herein by reference in its entirety in the the the the the the the Therefore, a simpler coil implementation can be used to generate arbitrary rotor torque and centering force by independent control. For example, there are only two motor winding groups. The presently disclosed embodiments can be used to reduce some of the axis's tumbling interference and provide centering forces for the embodiments described in the above-referenced U.S. Patent Application Serial Nos. 11/769,651 and 11/769,688.

In one or more disclosed embodiment configurations, the elements configured to reduce the rotation may include one or more ferromagnetic materials, a plurality of electrically insulating ferromagnetic layers, or metal powders contained in the structure.

Figure 16 is a top plan view of an exemplary substrate processing apparatus 1300 incorporating the functionality of the disclosed embodiments. Substrate processing apparatus 1300 typically has a gas component 1350 that is exposed to the atmosphere, an adjacent vacuum component 1305 that is equipped as a vacuum chamber. The gas component 1350 can have one or more substrate support tapes 1310 and a gas substrate transport device 1315. The vacuum component 1305 can have one or more processing modules 1320 and a vacuum substrate transport device 1325. The embodiment shown in Figure 13 has load locks 1340, 1345 that support the substrate passing between the atmospheric component 1350 and the vacuum component 1305 without damaging. The integrity of any vacuum included in vacuum component 1305.

The substrate processing apparatus 1300 also includes a controller 1355 that controls the operation of the substrate processing apparatus 1300. The controller 1355 can include a processor 1360 and a memory 1365. Controller 1355 can be coupled to substrate processing system 1300 via link 1370. For the disclosed embodiments, the substrate can be a semiconductor wafer (such as a 200 mm or 300 mm wafer), a flat panel display substrate, any other substrate suitable for substrate processing apparatus 1300 processing, a blank substrate, or a device having similar substrate characteristics, such as a specific Size or special section.

The atmospheric substrate transport device 1315 can include one or more components configured to reduce the motoring of the disclosed embodiments, such as 1375, 1380. The motors 1375, 1380 can conveniently utilize one or more of the example elements similar to those disclosed herein, such as the stator 100, 200, 550, 625 or anti-rotation elements 800, 900, to The interference is reduced to a minimum. These directions may include tangent, axial and gap directions, and the like.

Likewise, vacuum substrate transfer device 1325 can include one or more motors, such as 1900, 1950, that are configured to reduce the components of the disclosed embodiments. Motors 1900, 1950 may use one or more components, such as stators 100, 200, 550, 625 or anti-rotation elements 800, 900. Running one or more components minimizes undome interference in multiple directions, such as tangent, axial, and gap directions.

Thus, one or more of the components can minimize the effects of multiple axial runouts when producing the desired axial and tilt stiffness and provide a more accurate substrate position through the substrate processing equipment.

The presently disclosed embodiments describe various components that minimize torsional disturbances in propulsion, clearance, and axial directions. The components that can be configured to minimize the rollover include the components that are placed, because the superposition of the counterforce generated by each component minimizes the total disturbance in the thrust, clearance, and axial directions. One or more components also produce the required force between the air gaps, including the centering force of the rotary motor application and the positioning and guiding forces of the linear motor application. At least some of the disclosed embodiments use elements in such a way that the superposition of the counterforce generated by each element element minimizes the total tumbling interference in the advancement, clearance and axial directions.

It should be understood that the above description is directed only to the current embodiment. Various alternatives and modifications can be made by those skilled in the art without departing from the embodiments. Accordingly, the examples are intended to cover all alternatives, modifications, and variations that fall within the scope of the application.

10‧‧‧ motor

11‧‧‧Rotor

12, 15, 22, 24‧‧‧ Winding Group

14‧‧‧ Stator

21‧‧‧ Drive components

25‧‧‧Amplifier

27‧‧‧ Processor

30‧‧‧Reversing function

35‧‧‧ Current loop function

105‧‧‧ dent

1A is a schematic view of a motor in which an embodiment of the present invention can be implemented; FIG. 1B is a schematic cross-sectional view of a stator and a rotor configured in the embodiment; and FIG. 1C is a schematic view showing a synthetic radial force that can cause a turn-around; .

Figure 1D is a schematic illustration of the roll force causing the tumbling.

2 is a schematic illustration of other motors in which embodiments of the present invention may be practiced.

3 and 4 are schematic views of an anti-rotation element based on an embodiment of the present invention.

5A to 5C are diagrams showing an example of the tangential rotation force generated by the embodiment.

6A to 6C are diagrams showing an example of the axial tumbling force generated by the embodiment.

7A to 7E are diagrams showing an example of a transition region disclosed in the embodiment.

Figure 8 shows an embodiment in which the radial tumbling force can be reduced.

9A and 9B are exemplary views of the radial tumbling force provided by the embodiment.

10 and 11 are schematic views of other anti-rotation elements of the present invention.

12 to 14 show the configuration of the anti-rotation element different from those shown in Figs.

Fig. 15 shows a motor having at least two cores; and Fig. 16 is a plan view showing a substrate apparatus for carrying out an embodiment of the present invention.

10‧‧‧ motor

12, 15‧‧‧ Winding Group

14‧‧‧ Stator

25‧‧‧Amplifier

27‧‧‧ Processor

30‧‧‧Reversing function

35‧‧‧ Current loop function

Claims (10)

A motor comprising: a stator including a surface; a rotor configured to move at least in a first direction relative to the stator, the rotor operatively forming an interface with the stator to generate a motor force in a first direction, the rotor comprising a permanent magnet; the stator includes a plurality of components disposed on the surface and configured to form an interface with the permanent magnet such that a pitch of the permanent magnets and at least one of the components are configured such that a leading edge of the individual magnets of the pair of permanent magnets is adjacent to the a first transition region between the surface and a component and substantially simultaneously approaching a second transition region between the component and the surface to form an angle at least in the first direction and relative to the first direction The second direction is opposite to the rotor; wherein the first transition region and the second transition region each include a first transition portion and a second transition portion, wherein the first transition portion is located at a radial center from the rotor At a distance, the second transition portion is located at a second distance from the radial center of the rotor, the first distance being different from the second distance; wherein the first transition region is The third distance of the first transition portion and the second transition portion of the second transition region is substantially the pitch of the permanent magnets of the same polarity divided by 2; and wherein the pitch of the adjacent elements is a permanent magnet of the same polarity An integer multiple of the pitch. A motor as claimed in claim 1 includes a synchronous brushless motor. A motor according to claim 1, wherein at least one of the elements is configured to generate an anti-rotation force to the rotor at least in a third direction that forms an angle with the first direction and the second direction. The motor of claim 1, wherein the at least one component comprises: at least one first recess extending inwardly from an inner surface of the stator; at least two transition regions extending from the inner surface to the first recess, wherein at least The distance between the two transition regions is approximately nP/2, where n is an arbitrary integer and P is the pitch between magnets of the same polarity connected to the stator interface. The motor of claim 4, wherein the at least one component comprises at least one second recess extending inwardly from an inner surface of the stator, wherein a distance between the first and second recesses is approximately nP/2+mP/ 4, where n is an arbitrary integer and m is an odd number. A motor of claim 4, wherein at least one of the transition regions forms an angle with the inner surface. A motor of claim 4, wherein at least one of the transition regions has a surface recess relative to the inner surface. A motor of claim 4, wherein at least one of the transition regions has a surface projection relative to the inner surface. The motor of claim 4, wherein at least one of the transition regions is retracted rearwardly from the inner surface and the first recess. The motor of claim 4, wherein at least one of the transition regions defines a composite between the inner surface and the first recess angle.