JP6017506B2 - Robot drive with magnetic spindle bearing - Google Patents

Description

Cross-reference of related applications

  This application claims the benefit of US Provisional Application No. 60 / 946,687, filed June 27, 2007, the entire disclosure of which is incorporated herein by reference. Incorporated herein by reference.

  Embodiments described herein relate generally to a robot drive device, and more particularly, to a robot drive device with a magnetic bearing.

Brief description of related development technology

  Conventional robot drive devices, such as drive devices used in a vacuum environment, use ball bearings or roller bearings in a vacuum or other controlled environment to support the drive shaft of the robot drive device. Bearings that support the drive shaft may use various lubricants to prevent metal fatigue and bearing failures. Typically, specially formulated low vapor pressure grease is used to lubricate robot drive bearings in a vacuum or controlled environment.

  However, if the vapor pressure and temperature are reduced in the robot operating environment, the lubricity of the grease is also lowered, so there is a limit to the use of grease to lubricate the bearings of the robot drive device. Grease can also be a source of contamination in a vacuum or other controlled environment, for example, due to outgassing. Furthermore, the grease used in the conventional robot drive device can be decomposed and moved from the bearing, which can contaminate the processing environment. Such grease can cause failure of the motor feedback system due to grease debris moving to the position feedback encoder.

  It would be an advantage if a robotic drive system using a non-contact bearing system was used and the use of grease or other lubricants on the contact surface could be avoided. Furthermore, it would be advantageous to use a robotic drive system that can increase mobility without increasing the number of motors driving the system.

  Aspects and other features of the disclosed embodiments described above are described below in connection with the accompanying drawings.

1 is a schematic plan view of a substrate processing apparatus incorporating features according to one exemplary embodiment. FIG. 6 illustrates an exemplary substrate transporter incorporating features according to one exemplary embodiment. FIG. 3 is a schematic cross-sectional view of a substrate transport drive according to one exemplary embodiment. FIG. 3 is a schematic cross-sectional view of a substrate transport drive according to one exemplary embodiment. 2 is a schematic cross-sectional view of a portion of a substrate transport drive, according to one exemplary embodiment. FIG. FIG. 6 is a schematic view of a portion of a substrate transport drive, each according to a different exemplary embodiment. 2 is a chart showing applied force according to one exemplary embodiment. FIG. 3 is a schematic diagram of a portion of a drive, according to one exemplary embodiment. It is a figure which shows the force applied with the drive part of FIG. 7 typically. 2 is a schematic view of a portion of a transport drive, according to one exemplary embodiment. FIG. FIG. 3 is a schematic cross-sectional view of a substrate transport drive according to one exemplary embodiment. FIG. 6 is another schematic diagram of a portion of a substrate transport driver, according to one exemplary embodiment. 2 is a schematic diagram of a portion of a substrate transport drive, according to one exemplary embodiment. FIG. FIG. 6 is yet another schematic diagram of a portion of a substrate transport drive, according to one exemplary embodiment. FIG. 6 is yet another schematic diagram of a portion of a substrate transport drive, according to one exemplary embodiment. FIG. 6 is another schematic diagram of a portion of a substrate transport driver, according to one exemplary embodiment. FIG. 3 is a schematic view of a portion of a substrate transport drive, according to one exemplary embodiment. 1 is a schematic diagram of a portion of an example drive feedback system, according to one example embodiment. FIG. FIG. 3 is another schematic diagram of a portion of an example drive feedback system, according to one example embodiment. 1 is a schematic diagram of a portion of an example drive feedback system, according to one example embodiment. FIG. FIG. 14 is a schematic diagram of a portion of the example drive feedback system of FIG. 13. 1 is a schematic diagram of a portion of an example drive feedback system, according to one example embodiment. FIG. FIG. 12 is a schematic view from another position of the substrate transport drive of FIG. 11 according to one exemplary embodiment. FIG. 12 is a schematic view from yet another position of the substrate transport drive of FIG. 11 according to one exemplary embodiment. FIG. 2 is a schematic diagram of a substrate transporter according to one exemplary embodiment.

  FIG. 1 shows a perspective view of a substrate processing apparatus 100 incorporating features according to an exemplary embodiment. Although the disclosed embodiments are described with reference to the embodiments shown in the drawings, it should be understood that the embodiments can be incorporated into a number of alternative embodiments. In addition, any suitable size, shape, or type of member or material may be used.

  The exemplary embodiments may be used in any suitable environment, such as, but not limited to, atmosphere, vacuum, or controlled environment, eg, substrate transport, substrate alignment, or any other suitable The reliability, cleanliness, and vacuum performance of the robotic drive that can be used in function can be increased. The robotic drive of the exemplary embodiment manipulates the spindle to support the motor spindle magnetically, and to allow the spindle to move, for example, in a horizontal plane, for example, to tilt relative to a vertical plane. The winding may be configured as described above. Note that the horizontal and vertical planes are mentioned for convenience only, and that the spindle can be moved and tilted with respect to any suitable coordinate system, as described below. The exemplary embodiment detailed below is particularly concerned with a transport device or positioning device having an articulated arm and a rotary drive, but the features of the exemplary embodiment are characterized by any other suitable transport or positioning device. Others, including but not limited to systems, any other device that rotates the substrate (such as a substrate aligner), and any other suitable machine with a rotating or linear drive (linear drive) It can be applied to other devices as well.

  The substrate processing apparatus 100 shown in FIG. 1 is a representative substrate processing tool that incorporates features according to exemplary embodiments. In this example, the processing apparatus 100 is shown as having a general batch processing tool configuration. In alternative embodiments, the tool may have any desired structure, for example, a tool that is configured to perform a single process treatment of a substrate. In other alternative embodiments, the substrate device may be of any desired type, such as a sorter, stocker, measuring device, etc. The substrate 215 to be processed by the apparatus 100 can be a liquid crystal display panel, a semiconductor wafer (a wafer having a diameter of 200 mm, 300 mm, 450 mm, etc.), a substrate having any other desired diameter, or any suitable for processing in the substrate processing apparatus 100 It may be any suitable substrate such as, but not limited to, other types of substrates, blank substrates, or objects having properties similar to the substrate such as specific dimensions and specific masses.

  In this embodiment, the apparatus 100 may typically have a front section 105 that forms, for example, a mini-environment and an adjacent section 110 that is isolated from the atmosphere, and the section 110 may be a vacuum chamber, for example. May be equipped to function as In alternative embodiments, the atmosphere isolated section may retain an inert gas (eg, N 2), any other isolated atmosphere, and / or a controlled atmosphere.

  In the exemplary embodiment, the front section 105 may typically include, for example, one or more substrate holding cassettes 115 and a front end robot 120. The front section 105 may further include other stations or sections such as, for example, an aligner 162 and a buffer located within the front section 105. Section 110 may have one or more processing modules 125 and a vacuum robot arm 130. The processing module 125 may be of any type such as material deposition, etching, baking, polishing, ion implantation cleaning, and the like. As feasible, the position of each module may be registered with the controller 170 with respect to a desired reference frame, such as a robot reference (reference) frame. Further, the one or more modules may process the substrate 215 with a substrate in a desired orientation established using, for example, a reference (not shown) on the substrate. The desired orientation of the substrate within the processing module may also be registered with the controller 170. The vacuum section 110 may further include one or more intermediate chambers referred to as “load locks”. The embodiment shown in FIG. 1 has two load locks, load lock A135 and load lock B140. Load locks A and B function as an interface and allow the substrate to pass between the front section 105 and the vacuum section 110 without losing the integrity of the vacuum in the vacuum section 110. The substrate processing apparatus 100 typically includes a controller 170 that controls the operation of the substrate processing apparatus 100. In one embodiment, the controller is described in US patent application Ser. No. 11 / 178,615 filed Jul. 11, 2005, the entire disclosure of which is incorporated herein by reference. It may be part of a clustered control architecture. In this example, the controller 170 has a processor 173 and a memory 178. In addition to the above information, the memory 178 may include a program such as a technique for detecting and correcting the eccentricity and displacement of the substrate on the spot. The memory 178 may further include processing parameters such as temperature and / or pressure of the processing modules and other parts of the apparatus sections 105, 110 and stations, time information of the substrate 215 being processed, information regarding the weighing of the substrate, etc. . The memory 178 may also include a program such as an algorithm for applying this ephemeris data of the device and the substrate to determine the eccentricity of the substrate on the spot.

  In this exemplary embodiment, the front end robot 120, also referred to as an “atmospheric robot”, may include a drive 150 and one or more arms 155. At least one arm 155 may be attached to the drive unit 150. The at least one arm 155 may be coupled to a wrist 160 that is coupled to one or more end effectors 165 for holding one or more substrates 215. End effector 165 may be rotatably coupled to wrist 160. The atmospheric robot 120 may be for transporting the substrate to an arbitrary position in the front section 105. For example, the atmospheric robot 120 may transfer a substrate between the substrate holding cassette 115, the load lock A135, and the load lock B140. The atmospheric robot 120 may further transport the substrate 215 to and from the aligner 162. The driving unit 150 may receive a command from the controller 170 and perform a radial operation, a circumferential operation, an ascending operation, a complex operation, and other operations of the atmospheric robot 120 accordingly. .

  In this exemplary embodiment, the vacuum robot arm 130 may be mounted in the central chamber 175 (see FIG. 1) of the section 110. The controller 170 may function to cycle through the openings 180, 185 and coordinate the operation of the vacuum robot arm 130 to transport the substrate between the processing module 125, the load lock A135, and the load lock B140. . The vacuum robot arm 130 may include a drive unit 190 and one or more end effectors 195. In other embodiments, the atmospheric bot 120 and the vacuum robot arm 130 are a selective compliance assembly robot arm (SCARA) type robot, articulated arm robot, frog leg type device, or bilateral transfer. It may be any suitable type of transport device such as but not limited to a device.

  Although the exemplary embodiments are described herein with reference to a vacuum robot, such as the robot 800 of FIG. 2, for example, the exemplary embodiments may include (but are not limited to) an atmospheric environment, a controlled atmosphere environment, and / or a vacuum environment. It should be understood that it can be used with any suitable transport or other processing device (eg, aligner, etc.) that operates in any suitable environment (but not limited to). Further, transporters incorporating aspects of the exemplary embodiments include (but are not limited to) a frog-leg configuration of robot arm 130, a SCARA arm configuration of robot 120, a joint arm robot, or a bilateral transport device. It should be understood that it can have any suitable configuration.

  An exemplary robot transporter 800 is shown in FIG. The transporter may include at least one arm having an upper arm 810, a forearm 820, and at least one end effector 830. The end effector 830 may be rotatably coupled to the forearm 820, and the forearm 820 may be rotatably coupled to the upper arm 810. The upper arm 810 may be rotatably coupled to, for example, the drive unit 840 of the transport device. For illustration purposes only, the drive 840 may include a coaxially driven shaft or spindle (see FIG. 3). As shown in FIG. 3, in this example, the coaxial drive shaft or spindle is shown as having two drive shafts 211, 212, but in an alternative embodiment, the spindle has two drive shafts. You may have more or less. In other alternative embodiments, the drive shaft may be non-coaxial or configured, for example, in an adjacent arrangement. In still other alternative embodiments, the drive shaft may have any suitable configuration. In this example, the outer shaft 211 of the coaxial drive shaft may be suitably coupled to the upper arm 810 and the inner shaft 212 may be suitably coupled to the forearm 820. In this example, end effector 830 may be operated in a “slave” configuration, but in alternative embodiments, the drive unit may include an additional drive shaft to operate end effector 830. Good. The driving unit 840 may include two motors 208 and 209, one motor driving an external shaft, and the other motor driving an internal shaft. The two motors 208, 209 allow the arm 800 to move so that the arm 800 has at least two degrees of freedom (ie, for example, rotation in the Z axis and, for example, extension in the XY plane). It may be a thing.

  In operation, the arm 800 drives the motor winding so that a rotational torque Rz is applied to both the inner shaft 212 and the outer shaft 211 of the coaxial spindle in the same direction (ie both shafts in the same direction). Thus, it may be rotated on the Z axis. For example, the arm may be extended or retracted by applying a rotational torque Rz to the internal shaft 212 and the external shaft 211 so that the internal shaft 212 and the external shaft 211 rotate in opposite directions. . As will be described later, the position of the arm may be finely adjusted by controlling the center of rotation T1 of the inner shaft and the outer shaft. According to one exemplary embodiment, the inner shaft 212 and outer shaft 211 of the coaxial spindle and the arm 800 may be supported by magnetic bearings / motors, as described below.

  According to one exemplary embodiment, for example, a magnetic bearing located in the drive unit 840 of the robot transporter 800 is one of the drive units, eg, for driving a robot arm link, as described in detail below. Supports an axial (axial) moment and a radial (radial) moment load applied to one or more drive shafts. The magnetic bearing or bearings that support the drive shaft may be active so that the transporter has more than two degrees of freedom from the two motors, for example, the magnetic bearing may be ( Thus, it may be configured with radial and axial clearance control that may allow controlled movement of the transport end effector. For illustrative purposes only, for example, the drive section has six freedoms in the Rx direction, Ry direction, Rz1 direction, and Rz2 direction as well as in the X direction, Y direction, and Z direction, as detailed below. Degrees or seven degrees of freedom may be provided. In alternative embodiments, the drive may provide more or less degrees of freedom with 6 or 7 degrees of freedom. These multiple degrees of freedom enable, for example, active leveling of arms and end effectors attached to the robotic drive and position / orientation (for centering the substrate) as detailed below. Can be finely adjusted.

  Referring to FIG. 3, in one exemplary embodiment, the drive 840 of the transport machine includes a first motor stator (stator) 208S and a rotor (rotor) 208R (these form the first motor 208). ), A second motor stator 209S and a rotor 209R (which form a second motor 209), and two coaxial shafts 211,212. As feasible, in alternative embodiments, the coaxial shaft may have more or less than two drive shafts. In this example, the center line of the stator is shown in FIG. 3 so as to be located along the line CL. Although the drive 840 is shown as having two stators 208S, 209S, the drive may include any suitable number of stators for driving more or less than two shafts. Please understand that. Stator 208S, 209S may be a rotating assembly or spindle (ie, shaft, rotor, and shaft, for example, by any suitable boundary 210, for example, the boundary of the processing chamber housing that isolates the chamber atmosphere from the outside atmosphere. It may be isolated from other motor parts mounted on the motor. For example, the boundary 210 may allow the rotors 208R, 209R to operate in a vacuum and the stators 208S, 209S to operate in an atmospheric environment. The boundary may be composed of any suitable material used, for example, in a vacuum environment (negative pressure environment), and may be susceptible to eddy currents and heating due to magnetic flux short-circuits or magnetic interactions. Instead, it may be made of a material that can be interposed in the magnetic field.

  The boundary may further be coupled to a suitable heat transfer device (eg, a passive or active device) to minimize the temperature of the drive. In this exemplary embodiment, the first motor rotor 208R may be coupled to the outer drive shaft 211 and the second motor rotor 209R may be coupled to the inner drive shaft 212. As shown in FIG. 3, the outer drive shaft 211 and the inner drive shaft 212 may be concentric or coaxial drive shafts, but in alternative embodiments, the drive shaft may be a side-by-side configuration or other non-concentric configuration, etc. You may have arbitrary suitable structures (however, it is not limited to these).

  According to one exemplary embodiment, the stators 208S, 209S, and the respective rotors 208R, 209R support the respective shafts 211, 212 magnetically (eg, in the illustrated embodiment as radial and Self-bearing motor / magnetic spindle bearings configured to control at least the center of rotation of each shaft 211, 212 (in the Z direction) may be formed. For example, the motors 208, 209 may include an iron core stator and rotor with permanent magnets and iron backing. In alternative embodiments, the stator may include any suitable ferromagnetic material for interacting with the rotor. For example, the relative position between the rotors (rotors) 208R and 209R and the stators (stators) 208S and 209S along the Z direction is, for example, passive between the stators 208S and 209S and the rotors 208R and 209R. The magnetic force can be kept substantially constant. Passive magnetic forces between the stators 208S, 209S and the rotors 208R, 209R can further stabilize, for example, the Rx and Ry orientations of the rotors 208R, 209R in the X and Y axes. The motor windings may be configured to apply torque Rz1 (for shaft 211) and torque Rz2 (for shaft 212) to the respective rotors 208R, 209R to rotate the shafts 211, 212, Also, for example, a radial force and / or a tangential force may be applied to control the center of rotation of the rotor in the X and / or Y direction. As will be described later, the spindle can be tilted by offsetting the X position and / or the Y position of the two rotors 208E, 209R.

  Referring now to FIGS. 4A and 4B, another exemplary coaxial drive according to one exemplary embodiment that can be used, for example, in the drive 840 of the transfer robot 800 is shown. In this exemplary embodiment, the motors 1410, 1420 of the coaxial drive 1400 are located radially rather than axially relative to each other, as shown in FIG. For example, the first motor 1410 may be located radially outward of the second motor 1420. In alternative embodiments, the motors 1410, 1420 may be arranged in an axial configuration (i.e., stacked one above the other) or in any other suitable configuration. In this exemplary embodiment, the first and second motors 1410, 1420 include stators 1410S, 1420S and rotors 1410R, 1420R, respectively, substantially similar to the rotor and stator described above with respect to FIG. May be included. However, the rotors 1410R, 1420R of this exemplary embodiment may be positioned, for example, in passages 1451, 1450 formed by the housing 1460, respectively. Each rotating element, such as but not limited to a shaft, pulley, and robot arm, is attached or coupled to each rotor in any suitable manner, for example, through openings in passages 1451, 1450. You may do it. In a manner substantially similar to that described above with respect to FIG. 3, for example, the relative position between the rotors 1410R, 1420R and the stators 1410S, 1420S along the Z direction is, for example, by passive magnetic forces, It may be kept substantially constant. In alternative embodiments, the active magnetic force may provide relative positioning of the stator and rotor. The motor windings further provide torques Rz1 ′ (for rotor 1410R) and Rz2 ′ (for rotor 1420R) and radial as described above to control the location of the rotor XY plane position. It may be configured to apply force and / or tangential force. In alternative embodiments, the motor may be further arranged to control the rotor tilt.

  Referring now to FIG. 5, a schematic diagram of a self-bearing motor 1300 that can be used, for example, in the drive 840 of the transfer robot 800 is shown, illustrating exemplary magnetic forces controlling the rotor 1310R. . The single rotor / stator shown in FIG. 5 is for illustrative purposes only, and the motor 1300 may have any suitable configuration such as, but not limited to, the configuration described above with respect to FIGS. 3 and 4 and a parallel configuration. It should be understood that any suitable number of rotors / stators may be included. In the exemplary embodiment of FIG. 5, the stator 131OS may be substantially similar to the stators 208S, 209S described above. The rotor 1310R may further be substantially similar to the rotors 208R, 209R described above, and the rotor may be made of a ferromagnetic material, for example, and may include a permanent magnet 1310M and an iron backing 1310B. In alternate embodiments, the rotor may be composed of any suitable material. In other alternative embodiments, the permanent magnet may be replaced with any suitable ferromagnetic material for interacting with the stator. Rotor magnet 1310M may include a row of magnets with alternating polarity mounted around the rotor. The periphery of the rotor may be an inner peripheral wall or an outer peripheral wall of the rotor. In an alternative embodiment, magnet 1310M may be incorporated into the rotor. In other alternative embodiments, the magnet 1310M may be located at any suitable location on or in the rotor. As will be described in detail below, the stator 1310S includes a winding set that rotationally drives the rotor 1310R during excitation and moves it in the radial direction and / or the axial direction. In this exemplary embodiment, stator 1310S may be composed of a ferromagnetic material suitable for interaction with rotor 1310R, but in alternative embodiments, stator 1310S may be any suitable material. It may be constituted by. The interaction between the stator 1310S and the rotor magnet 1301M can generate a passive force that passively levitates the rotor 1310R in the direction of the arrow 1350. The levitation force may be the result of curved magnetic flux lines 1320, 1321, and may be generated, for example, by the edge 1360 of the rotor magnet 1310M being offset with respect to the edge of the stator 1365. . In alternate embodiments, the levitation force may be generated in any suitable manner. Passive levitation forces can create a stable equilibrium along the axial and tilt directions of the rotor 1310R. A radial force or attractive force may occur as a result of magnetic flux lines 1330 in the direction of arrows 1355, 1356, for example. Such attractive forces cause the windings to be excited such that the rotor 1310R is actively centered and / or positioned in the radial direction, maintaining the rotor's geometric center and the rotational axis at the desired position, May cause instability.

  Referring now to FIGS. 6A-6G, exemplary schematics of a motor 208 according to different embodiments are shown in three different configurations. As feasible, the motor 209 may be substantially similar to the motor 208. The stator 208S provides a force (eg, tangential force, radial force, or any combination thereof) for applying torque and rotating the rotor 208R, and activates the center of rotation C of the rotor 208R. Windings may be included to provide a radial positioning force for automatic control. In these exemplary embodiments, for example, windings such that the controller 170 drives each with any suitable number of electrical phases as needed to generate separately controllable torque and bearing force simultaneously. A motor 208 may be disposed in the segment. For illustrative purposes only, each winding set may be one segment of a three-phase brushless DC motor. In alternative embodiments, the winding segments may be part of any suitable AC or DC drive motor. One example of such a motor configuration is the “REDUCED-COMPLEXITY SELF-BEARING BRUSHLESS DC” filed on June 27, 2007, the entire disclosure of which is incorporated herein by reference. No. 11 / 769,651, assigned to the assignee of the present invention, entitled “MOTOR”.

  In the exemplary embodiment shown in FIG. 6A, the stator 208S may include two pairs of winding sets 208SA, 208SB arranged to form any desired mechanical angle between each of them. There may be electrical angle shifts that correspond appropriately between them to cooperate with the respective shaft rotor 208R to form a self-bearing motor. In the example shown, the rotor 208R may have a row of permanent magnets for illustrative purposes only, but in alternative embodiments, the rotor 208R does not have a permanent magnet, eg, ferromagnetic It may be made of a body material or may have a ferromagnetic material attached to the rotor 208R instead of a permanent magnet. As shown in FIG. 6A, winding sets 208SA, 208SB may be located 180 degrees away from each other. In alternative embodiments, the mechanical angle may be any suitable angle and the 180 degrees shown in FIG. 6A are for illustrative purposes only. Further, in the exemplary embodiment, the electrical angle between the winding sets generates a radial or tangential force for rotation and / or positioning of the spindle on which the rotor 208R is mounted, as required. It may be formed as follows. The windings 208SA, 208SB and the rotor 208R generate radial or tangential forces so that the center of rotation C of the rotor 208R can be adjusted, for example, along a linear path or any other desired path. It may be configured to be excited. For example, by changing the magnitude of the radial force RF generated by the windings 208SA, 208SB, for example, in the Y direction, the rotor 208R can move along the Y axis. Similarly, by changing the tangential force TF generated by each winding 208SA, 208SB, for example, the rotor 208R can be moved in the X direction, for example, as described in detail below. The direction of motion of the center of rotation C of the rotor and the direction of forces RF, TF described herein are for illustrative purposes only, and the direction of motion of the rotor in the XY plane and the forces TF, RF Note that the direction of may be any suitable direction. As feasible, the radial and tangential forces may be separated from each other so that radial and tangential forces occur simultaneously for positioning and / or rotation of the rotor 208R. As achievable, the rotor 208R may always be kept centered, for example in the XY plane, due to the resultant force generated by the windings 208SA, 208SB. In alternative embodiments, the motors described herein can be used in any suitable manner such that radial and / or tangential forces move the rotor in any suitable direction in the XY plane. It may be rectified.

  Referring now to FIG. 6B, another exemplary implementation using two winding sets 1515, 1520, with each winding set being arranged, for example, as two winding subsets 1525, 1530, and 1535, 1540, respectively. The form is shown. The winding sets 1515, 1520 may be driven by a current amplifier 1550 that may include software, hardware, or a combination of software and hardware suitable for driving the winding sets 1515, 1520. Current amplifier 1550 may further include a processor for driving the winding set, a rectification function, and a current loop function. In one embodiment, current amplifier 1550 may be included in any suitable controller, such as controller 170, for example. In alternative embodiments, the current amplifier 1550 may be placed in any suitable location. The commutation function may determine the current in one or more windings 1525, 1530 and 1535, 1540 of each winding set 1515, 1520 according to a specified set of functions, and the current loop function determines the determined current Feedback and drive functions may be provided to maintain the power through the winding. The processor, commutation function, and current loop function may include circuitry for receiving feedback from one or more sensors or sensor systems that provide position information.

  The two winding subsets 1525, 1530, and 1535, 1540 of each winding set 1515, 1520 of FIG. 6B are each electrically coupled and shifted relative to each other at an electrical angle of 90 degrees. As a result, when one of the two winding set pairs produces a pure tangential force, the other winding set pair produces a pure radial force and vice versa. In this embodiment, winding set 1515 has two sections 1530 and 1525, and winding set 1520 has two sections 1540 and 1535. Example of desired torque (T) and centripetal force (Fx) along the X axis for the segmented winding set 1515, 1520 of the embodiment of FIG. 6B using, for example, Lorentz force The relationship, and an exemplary relationship between the desired torque (T) and centripetal force (Fy) along the Y-axis, is incorporated herein by reference as “REDUCED-COMPLEXITY SELF-BEARING”. It is described in US patent application Ser. No. 11 / 769,651, entitled “BRUSHLESS DC MOTOR”. As feasible, the winding subsets 1525, 1530, 1535, 1540 are shown as offset by about 90 degrees, although it may be offset at other angles greater or less than about 90 degrees. I want you to understand.

  In the exemplary embodiment shown in FIG. 6C, the stator may include three winding sets 208SC, 208SD, 208SE that extend into three sectors of the rotor 208R. In this example, the winding sets are for illustration purposes only and are 120 degrees apart from each other. In an alternative embodiment, the three winding sets have an angle greater or less than about 120 degrees to provide stable support of the rotor 208R (and shaft 211) with the resultant force generated by the winding sets 208SC, 208SD, 208SE. May have any suitable mechanical angle relationship. As noted above, the winding sets 208SC, 208SD, 208SE further have appropriately corresponding electrical angle shifts between them to cooperate with the respective shaft rotor 208R to form a self-bearing motor. Also good. In the example shown, the rotor 208R may be substantially similar to the rotor described above with respect to FIG. 6A. As feasible, in this exemplary embodiment, the center of rotation C of the rotor 208R can be moved, for example, to any point in the XY plane and is a straight line along a single axis as described above. As not limited to movement, windings 208SC, 208SD, 208SE may be configured and excited to generate radial, tangential and / or axial forces. Note that the operation of the center of rotation C of the rotor 208S can be limited only by the gap G between each one of the windings 208SC, 208SD, 208SE and the rotor 208R.

  As shown in FIG. 6D, in another exemplary embodiment, the stator 208S may include four winding sets 208SF, 208SG, 208SH, 208SI that extend into four sectors of the rotor 208R. In this example, winding sets 208SF, 208SG, 208SH, 208SI are shown for illustrative purposes only, for example, shown as being separated by an angle of 90 degrees. In an alternative embodiment, the four winding sets may be at an angle greater or less than about 90 degrees to provide stable support of the rotor 208R (and shaft 211) with the resultant force generated by the winding sets. May have an appropriate mechanical angle relationship. As noted above, the winding sets 208SF, 208SG, 208SH, 208SI further have appropriately corresponding electrical angle shifts between them to cooperate with the respective shaft rotor 208R to form a self-bearing motor. May be. In the example shown, the rotor 208R may be substantially similar to the rotor described above with respect to FIG. 6A. As noted above, the center of rotation C of the rotor 208R can move toward, for example, an arbitrary point on the XY plane, and is not limited to linear movement along a single axis. The windings 208SF, 208SG, 208SH, 208SI can provide radial and / or tangential forces so that the operation of the center C of the coil can be limited only by the gap G between each one of the windings and the rotor. It may be configured to generate and be excited.

  As feasible, each winding segment described in FIGS. 6A-6D may include any suitable number of circuits for generating a force to operate the rotor 208R. For example, as in FIGS. 6E and 6F, one phase of a winding that may have two circuits 280, 281 with, for example, a zigzag configuration is shown for illustrative purposes only. The exemplary winding configuration shown in FIG. 6E that drives the circuits 280, 281 such that the current in the circuit 280 is greater than the current in the circuit 281 produces a resultant force, for example, in the direction of arrow 282 and in the opposite direction. . As feasible, the circuits 280, 281 may have a cylindrical configuration as shown in FIG. 6F so that the rotational force 282 'is also applied to the rotor 208R, for example. One example motor that includes multiple circuit windings is described in US Patent Application Publication No. 2005/0264119, the entire disclosure of which is hereby incorporated by reference. .

  FIG. 6G illustrates another exemplary embodiment in which the tangential forces TF1-TF4 generated by the motor winding segments are varied to control the operation of the rotor. In the chart shown in FIG. 6G, each “+” or “−” mark represents a force of one unit magnitude, but a tangential force is applied to produce the appropriate different resultant force to position the rotor in the radial direction. Note that you can. The mark shown in the 6G chart is the direction of force or the direction of torque and is not a numerical value. As feasible, the radial direction of each rotor can be varied to provide accurate positioning of the end effector or spindle tilt as described herein by varying the different tangential forces produced by the winding set. Positioning may be performed. One example of utilizing tangential forces for centering is described in US Pat. No. 6,707,200, the entire disclosure of which is hereby incorporated by reference. ing.

  Although the motors 208, 209 described above with respect to FIGS. 6A-6G are shown with two, three, or four winding sets, the motors 208, 209 may have any suitable number of winding sets. It should be understood that it may have. Further, it should be noted that motors 208, 209 are described above as self-bearing motors where the winding set can provide rotor levitation, rotation, axial positioning, and planar positioning. In separate or individual magnetic bearings (eg, dedicated windings that provide some active bearings, either alone or in combination with passive permanent magnets), magnetically support the rotor and each shaft For this purpose, a separate magnetic bearing may be used for controlling the position of the rotor, for example, with or separately from the rotor and stator of the motor. Please understand further. In still other alternative embodiments, the rotor and shaft may be controllably supported in any suitable manner, such as any suitable actuator.

  Referring now to FIGS. 7, 7A and 8, the drive of the exemplary embodiment, such as the drive 840 of the transfer robot 800, further provides for rotor positioning as described herein. To produce a desired amount of force in the gap G (see FIG. 3), such as a planar positioning force (eg, radial force), while producing a desired amount of axial and tilt stiffness, and several An anti-cogging element may be included to minimize disturbance due to cogging along the axis. In one embodiment, the anti-cogging element may be incorporated into the motor stator or integrated as part of the motor stator. In other embodiments, the anti-cogging element may be separate from the stator. The anti-cogging element may allow for the superposition of cogging forces generated by the components of the anti-cogging element such that disturbances due to cogging along the propulsion direction, gap direction, and axial direction are minimized as a whole. One suitable motor that includes an anti-cogging element is described in “Lift Function and Low Cogging” filed on June 27, 2008, the entire disclosure of which is incorporated herein by reference. US Patent Application (Attorney Docket No. 390P012912-US (PAR)) entitled “MOTOR STATUS WITH LIFT CAPABILITY AND REDUCED COGGING CHARACTERISTICS”.

  The exemplary stator 5100 for the rotary motor shown in FIG. 7 may be configured for the desired passive axial and tilt stiffness while reducing or minimizing cogging effects. The stator 5100 may include two or more recesses 5105, 5175 (and 5615, 5665) extending inwardly from the first surface 5110 of the stator 5100. In this exemplary embodiment, the recess may be configured to have negligible effects on the passive shaft stiffness and tilt stiffness of the motor. Each recess may include two transition regions from the first surface to the recess. For example, the recess 5105 may include first and second transition regions 5115, 5120, respectively, between the first surface 5110 and the recess 5105. The transition region may be configured as necessary to function on the rotor permanent magnets 5150, 5180 to produce anti-cogging forces on the rotor and minimize rotor cogging, as appropriate. An example is a United States patent application entitled “MOTOR STATUS WITH LIFT CAPABILITY AND REDUCED COGGING CHARACTERISTICS”, incorporated above and incorporated herein by reference. Explained. Similarly, the recess 5175 may include first and second transition regions 5127, 5137, respectively, between the first surface 5110 and the recess 5175. Similar to the transition region of the first recess, the transition region 5127, 5137 (or the anti-cogging section of the stator) of the second recess functions with the rotor permanent magnets 5190, 5195 to anti-cogg the rotor. It may have a suitable shape so as to generate a respective anti-cogging force that produces an effect. As feasible, the recesses 5615, 5585 may further have suitable transition regions that are substantially similar to the transition regions described with respect to the recesses 5105, 5175. The transition region of the stator recess functions to generate an anti-cogging force that minimizes cogging in the axial direction (eg, Z direction perpendicular to the stator face as shown in FIG. 7) and tangential direction May be. FIG. 7A shows an illustration of the forces 5410, 5415 generated by the respective transition regions acting on the rotor and the cumulative force 5420 showing the anti-cogging effect (eg, axial) of the recess transition region. . In the exemplary embodiment shown, the recesses 5105, 5175 (shown adjacent to each other for illustrative purposes, but may not be adjacent in alternative embodiments) May be positioned to cooperate with each other to minimize cogging in both the tangential and tangential directions.

  In the exemplary embodiment shown in FIG. 7, as few as two winding sets 5585, 5690 may be used to drive the disclosed embodiment. Winding sets 5585, 5690 may include one or more windings. The winding set used in aspects of the exemplary embodiment may include one or more windings located in one or more recesses, and any type of winding suitable for use in the disclosed embodiments. It should be understood that lines may be included. Exemplary embodiments may include segmented windings such as, for example, winding sets that are divided into one or more winding sets disposed in selected recesses of the stator. Each winding subset may include one or more windings and may be driven to generate a motor force in accordance with the disclosed embodiments. In one or more embodiments, the winding set may be arranged as a three-phase winding set, but any suitable winding set arrangement may be used.

  As can be realized from FIG. 7, the rotor operated together with the stator 5100 may include a plurality of permanent magnets such that adjacent magnets have alternating polarity. In alternative embodiments, the rotor may be formed from any suitable ferromagnetic material. Magnets 5150, 5180, 5190, and 5195 are shown for illustrative purposes. It should be understood that other magnets may be distributed between the illustrated magnets.

  In an exemplary embodiment, a reduction in radial cogging force, which is a cogging force parallel to the gap between the stator 100 and its rotor, may be provided. With further reference to FIG. 7, “MOTOR STATUS WITH REDUCED COGGING CHARACTERISTICS”, incorporated above and as a part of this specification, with “MOTOR STATUS WITH LIFT CAPABILITY AND REDUCED COGGING CHARACTERISTICS” As described in the entitled US patent application, the recesses 5105, 5615 in the surface 5110 of the stator 5100 are properly positioned so that the forces generated in the rotor by the respective recesses are combined to reduce the radial cogging force. May be.

  Referring now to FIG. 8, there is shown a schematic diagram of other exemplary anti-cogging elements 6800, 6210, 6215, 6220 according to disclosed embodiments. Anti-cogging elements 6800, 6210, 6215, 6220 may be composed of any suitable material, such as but not limited to a ferromagnetic material. The shapes of the elements 6800, 6210, 6215, 6220 are arranged such that the superposition of cogging forces produced by the component parts results in disturbances due to cogging along the minimum propulsion direction and gap direction as a whole. Yes.

  The anti-cogging element 6800 components of FIG. 8 include an inner arcuate segment 6805, an outer arcuate segment 6810, first and second transition zones 6815, 6820, a series of coil slots 6825, and a span angle 6830. Yes. The inner arcuate segment 6805 may be arranged to allow interaction with a permanent magnet rotor, for example. In alternative embodiments, the inner arcuate segment 6805 may be configured to allow interaction with any suitably configured rotor. The coil slot 6825 may enclose a winding set arranged as, for example, a three-phase winding set. In alternate embodiments, the winding set may have any suitable number of phases. The winding set may be driven using any suitable aspect such as, for example, a sine rectification scheme. Span angle 6830 may be arranged so that span angle 6830 accommodates an odd number of fractional magnet pitches within its arcuate segment. In alternate embodiments, the span angle may be arranged to accommodate any suitable number of magnet pitches.

  In the exemplary embodiment shown in FIG. 8, four anti-cogging elements 6800, 6210, 6215, 6220 are used for exemplary purposes. It should be understood that any number of anti-cogging elements (eg, more or less than four elements) can be used. In one or more embodiments, the anti-cogging elements 6800, 6210, 6215, 6220 may be substantially similar to each other and may be located 90 degrees apart in mechanical and electrical angles. In other embodiments, the anti-cogging elements 6800, 6210, 6215, 6220 are each 90 degrees apart in mechanical angle from the corresponding coil slots 6825, 6230, 6235, 6240 to align with a virtual fractional slot pitch of 360 degrees. You may arrange so that. In some embodiments, only a subset of the coil slots may comprise a coil. In alternative embodiments, the anti-cogging elements may have any suitable configuration and / or mechanical and electrical positioning with respect to each other. A suitable example of an anti-cogging element is a motor stator with a lifting function and low cogging characteristics, which was incorporated above as part of this specification. In the US patent application entitled “

  Referring now to FIG. 9, in one exemplary embodiment, a drive, such as drive 840 of transfer robot 800, includes a Z drive unit 220 located within housing 201, a first rotary motor 208, and A second rotary motor 209 may be included. Although the Z drive unit 220 and the motors 208, 209 are shown as being located in the housing 201 in the figure, in alternative embodiments, any portion of the Z drive unit 220 and / or the motors 208, 209 may be It should be understood that they may be located in separate housings. In still other alternative embodiments, the drive unit may have any suitable configuration.

  The housing 201 may be composed of any suitable material such as, but not limited to, plastic, metal, ceramic, composite material, or any combination of these materials. The Z drive unit 220 may include a guide rail 203, a Z drive device motor 206, a ball screw mechanism 207, and a carriage, that is, a carriage 205. The guide rail 203 may be any suitable guide rail made from any suitable material for linearly guiding the carriage 205 within the housing 201 along the Z direction. The guide rail 203 may be appropriately supported at each end to the housing. In alternative embodiments, the guide rail may be supported at several locations along its length and may be cantilevered within the housing. The carriage may be supported in the housing by linear bearings 204A and 204B and a ball screw member 207A. The linear bearings 204A, 204B and the ball screw member 207A may be mounted on the carriage 205 in any suitable manner such as, for example, mechanical fasteners, chemical fasteners, adhesives, weldments, etc. Good. The linear bearings 204A and 204B may interact with the linear guide rail to enable movement of the carriage in the Z direction. The ball screw member 207A may interact with the ball screw 207 for moving the carriage 205 along the Z direction when the motor 206 rotates the ball screw 207. The ball screw 207 may be supported at one end by any suitable bearing 207B that allows the ball screw member to rotate. The other end of the ball screw may be supported and coupled to the Z drive motor 206 in any suitable manner. In alternative embodiments, the ball screw 207 may be supported within the housing in any suitable manner and may be adapted to rotate. The Z drive motor may be any suitable motor such as but not limited to a stepper motor, servo motor, or any other suitable AC or DC motor. In alternative embodiments, the drive may include any suitable linear actuator that can be driven magnetically, pneumatically, hydraulically, or electrically. In still other alternative embodiments, the linear actuator may be driven in any suitable manner. As feasible, the configuration of the Z drive unit 220 shown in FIG. 9 is exemplary, and the Z drive unit 220 may have any suitable configuration.

  Referring to FIG. 10, another exemplary embodiment of a portion of a drive unit 8000, such as drive unit 840 of transfer robot 800, is shown. In this exemplary embodiment, any suitable number of Z drive units may be used. In one exemplary embodiment, any suitable controller, such as controller 170, for example, may be synchronized to the operation of each Z drive. In alternative embodiments, the operation of the Z drive may be synchronized in any suitable manner. In one embodiment, the stator 1310S may be supported by, for example, linear bearings 204A ', 204B', and as a result, connected to a pair of Z drive units 206 ', 206 ". The Z drive units 206 ′, 206 ″ may be substantially similar to the Z drive unit 206 described above. In alternative embodiments, the Z drive unit may be any suitable drive mechanism.

  Referring now to FIG. 11, an exemplary schematic diagram of a portion of the carriage 205 is shown. Note that the carriage 205 shown in FIG. 11 may be supported by the Z drive unit in the housing 201 (see FIG. 9) as described above with respect to FIGS. In alternative embodiments, the carriage may be supported in the housing 201 in any suitable manner. As feasible, for example, a drive unit 840 of a robotic carrier such as the carrier 800 may be coupled to any suitable processing device using the mounting flange 202. A seal 400 may be provided between the carriage 205 and the mounting flange 202 to prevent particles generated by a Z drive unit such as the Z drive unit 220 from entering the substrate processing environment. For example, one end of the seal 400 may be attached to the mounting flange 202, but the other end of the seal may be attached to the carriage 205. In this example, the seal 400 is shown as a bellows seal to allow Z movement of the carriage 205, but in alternative embodiments the seal may be metal, plastic, rubber, cloth, etc. (however, It may be any suitable seal made from any suitable material (but not limited to). In other alternative embodiments, the seal 400 may be omitted, and any suitable means for isolating the atmosphere through a barrier, such as the housing 201, the mounting flange 202, or a portion of the carriage 205, for example. It may be replaced by a barrier.

  As shown in FIG. 11, the carriage may include a first stator 208S, a second stator 209S, encoders 410A, 410B, 410C, and coaxial drive shafts 211, 212. The outer drive shaft 211 may include an encoder scale 430A, a stop surface 420A, and a first motor rotor 208R. The inner drive shaft 212 may include an encoder scale 430B, a stop surface 420B, and a second motor rotor 209R. As shown in FIG. 11, the drive shafts 211, 212 (part of the motor spindle assembly) are shown in the longitudinal direction along the Z axis for illustrative purposes. The stators 208S, 209S and the rotors 208R, 209R may form the self-bearing motor / magnetic spindle bearings 208, 209 described above. For illustrative purposes only, the stator 208S is shown to include a drive portion 208D and bearing portions 208B1, 208B2, but as noted above, in other exemplary embodiments, the stator may have a rotational force. It should be understood that it may have only one portion or section that provides passive levitation and / or radial positioning forces (this will be discussed later). In alternative embodiments, the stator 208S may include more or less than two bearing portions. When the stator drive portion 208D is energized, the resulting magnetic force causes the rotor drive portion 208RD to rotate about the center of rotation or axis C1, and as a result, the stator drive portion 208D rotates so that the external shaft 211 rotates. Interacts with the rotor drive portion 208RD. In substantially the same manner, the inner shaft 212 is driven for rotation about axis C2 by a stator drive portion 209D and a rotor drive portion 209RD. As described above with respect to FIG. 3, isolation barriers 210A, 210B are provided over each stator 208S, 209S so that the rotor can function in one environment and the stator can function in another environment. Also good. Note that isolation barriers 210A, 210B are substantially similar to barrier 210 described above.

  The center of rotation C1 of the outer shaft 211 may be controlled by the stator bearing portions 208B1, 208B2 and the rotor bearing portions 208RB1, 208RB2. In an exemplary embodiment, the bearing portion includes, for example, active radial bearings (eg, Rx and Ry directions) and passive lifting (eg, Rz), passive radial bearings and active lifting. It may be configured to provide top or passive radial bearings and passive lifting. In this exemplary embodiment, both bearing portions 208B1, 208B2 may be active bearings, but in alternative embodiments, one of the bearing portions may be a passive bearing portion. As feasible, if an active radial bearing is combined with a passive lifting stator, the rotor is stable with respect to pitch and role and the second passive radial bearing may be omitted. . In other alternative embodiments, the active radial bearing, the rotating portion, and the passive lifting stator may be integrated into a single arrangement of stator and rotor. The stator bearing portion 208B1 interacts with the rotor bearing portion 208RB1, for example, to control the gap G1, while the stator bearing portion 208B2, for example, controls the rotor bearing portion 208RB1, to control the gap G2. It interacts with 208RB2. It should be noted that in FIG. 11, for the purposes of illustration only, half of the shaft is shown so that the gaps G1 and G2 correspond only to the half of the drive shown in the figure, for example the gap in the X direction only. . As described above, it should be understood that the gap between the stator and the rotor can change around the outer periphery of the motor 208 as the position of the center of rotation C1 changes.

  Similarly, the center of rotation C2 of the inner shaft 212 is in a manner that is substantially similar to that described above with respect to the bearing portions 208B1, 208B2, 208RB1, and 208RB2, and the stator bearing portions 209B1, 209B2, and the rotor bearings. It may be controlled by the portions 209RB1, 209RB2. In this exemplary embodiment, both bearing portions 209B1, 209B2 may be active bearings, but in alternative embodiments, one of the bearing portions may be a passive bearing portion. As described above, when an active radial bearing is combined with a passive lifting stator, the rotor is stable with respect to pitch and role, and the second passive radial bearing may be omitted. In other alternative embodiments, the active radial bearing, the rotating portion, and the passive lifting stator may be integrated into a single arrangement of stator and rotor. The stator bearing portion 209B1, for example, interacts with the rotor bearing portion 209RB1 to control the gap G3, while the stator bearing portion 209B2 includes, for example, the rotor bearing portion to control the gap G4. Interacts with 209RB2. As noted above, it should be understood that the gaps G3 and G4 between the stator and rotor portions can change around the outer periphery of the motor 209 as the position of the center of rotation C2 changes. For example, controller 170, or any other suitable controller, such that the winding is energized to position shafts 211, 212 in any suitable predetermined position and / or spatial orientation, for example. May be configured to receive gap measurement signals from the sensors at various points around the circumference of the motors 208,209.

  Referring now to FIG. 11A, another exemplary schematic diagram of a portion of carriage 205 is shown. Note that the dolly 205 is substantially similar to the dolly described above with respect to FIG. 11 so that the same type of features have the same type of reference number. Note that the bearing portion may provide control of the rotor in a manner substantially similar to that described above with respect to FIG. However, in this exemplary embodiment, for illustrative purposes only, bearing portions 208B1 and 209B2 are shown as active bearings, while bearing portions 208B2 ′ and 209B1 ′ are shown as passive bearing portions. Has been. In this exemplary embodiment, passive bearing portions 208B2 ', 208B1' may passively provide radial stability to the rotor in any suitable manner. However, it should be understood that in alternative embodiments, the bearing portion may have any suitable active or passive bearing configuration. For example, bearings 209B1 ′ and 209B2 are passive bearings (shaft 212 is suitably supported within shaft 211 such that shaft 212 and shaft 211 are concentric), while bearings 208B1 and 208B2 ′ are It may be an active bearing. In other examples, bearings 208B2 'and 209B1' may be active while bearings 208B1 and 209B2 may be passive. In this example, any suitable controller, such as controller 170, may excite active bearing portions 208B1, 209B2 such that shafts 211, 212 are located at any suitable predetermined location. In this example, the passive bearings 208B2 ′ and 209B1 ′ are respectively active bearings so that the shafts 211, 212 can be spatially oriented, for example, by controlling the size of the gaps G1, G4. May serve as a fulcrum for

  Referring now to FIG. 11B, another exemplary schematic diagram of a portion of the carriage 205 is shown. Note that the cart is substantially similar to the cart described above with respect to FIG. 11, such that the same type of features have the same type of reference number. However, in this exemplary embodiment, the magnetic spindle bearings 450, 451 are separate or separate from the rotary drives 208 ', 209'. The bearings 450, 451 may be substantially similar to the bearing portions 208B1, 208RB1, 208B2, 208RB2, 209B1, 209RB1, 209B2, 209RB2 described above, and in a manner substantially similar to that described above with respect to FIG. Note that it is configured to provide bearing and lift control. In this exemplary embodiment, the drive device 208 ′ may include a stator 208 </ b> S ′ attached to the carriage 205 and a rotor 208 </ b> R ′ attached to the shaft 211. The driving device 209 ′ may include a stator 209 </ b> S ′ attached to the carriage and a rotor attached to the shaft 212. The magnetic bearing 450 may include a first bearing member 450A located on the carriage and a second bearing member 450B attached to the shaft 211. The magnetic bearing 451 may include a first bearing member 451A located on the carriage and a second bearing member 451B attached to the shaft 212. Although only two magnetic bearings 450, 451 (one for each shaft 211, 212) are shown in FIG. 11B, in an alternative embodiment, any suitable number of magnetic bearings are associated with each shaft 211, 212. It should be understood that this can be done. In one exemplary embodiment, the magnetic bearings are vertically segmented such that each bearing 450, 451 provides individual tilt control along the Rx, Ry axis for each one of the shafts 211, 212. (Ie, the segments are offset vertically). In other exemplary embodiments, the shafts 211, 212 are always concentric, while the bearings 450, 451 stabilize the radial position and tilt (eg, Rx, Ry) of the coaxial shafts 211, 212 as a unit. The shafts may be constrained relative to each other in any suitable manner, such as a suitable bearing provided between the shafts 211, 212, for example.

  Referring now to FIG. 11C, an exemplary schematic diagram of a portion of carriage 205 is shown. Note that the cart is substantially similar to the cart described above with respect to FIG. 11, such that the same type of features have the same type of reference number. However, in this exemplary embodiment, the magnetic spindle bearing / stator 208 ″, 209 ″ provides rotational force, levitation, axial force, and / or planar XY (ie, radial) positioning force (eg, The stator and the passive bearing are shown as having one part or section that is configured to provide one integrated within an integral drive member. The magnetic spindle bearing / stator may be configured to provide bearing and lift control in a manner substantially similar to that described above with respect to FIG. In one exemplary embodiment, the magnetic spindle bearing / stator 208 ", 209" may be configured as a set of intervening windings to generate different drive forces for drive operation. In an alternative embodiment, the winding may be a non-intervening winding that is rectified to produce the driving force described herein. In this exemplary embodiment, the interaction between the stators 208S ″, 209S ″ and the respective rotors 208R ″, 209R ″ is in a manner substantially similar to that described above with respect to FIG. Generate magnetic field 1330, 1320 and 1330 ′, 1320 ′, respectively, and corresponding passive and attractive forces. The motor 208 ″ may be configured to control the gap G 5 as described above, while the motor 209 ″ may be configured to control the gap G 6 as described above. As described above, by changing the gaps G5 and G6, for example, for accurate positioning of the robot arm coupled to the spindle and accurate positioning of the substrate mounted on the robot arm, the spindle 600 is , Or can be positioned, for example, in the XY plane. In one exemplary embodiment, the magnetic bearings 208 ″, 209 ″ provide individual tilt control along the Rx, Ry axis for each one of the shafts 211, 212. The stator may be vertically segmented (ie, the segments are vertically offset). In other exemplary embodiments, the shafts 211, 212 are always concentric, while the bearings 208 '', 209 '' are positioned in the radial position and inclination of the coaxial shafts 211, 212 as a unit (e.g., Rx, The shafts may be constrained relative to each other in any suitable manner, such as, for example, a suitable bearing provided between the shafts 211, 212 to stabilize or control Ry).

  Referring now to FIGS. 11D-11F, another exemplary motor configuration is shown, according to one exemplary embodiment. For example, motors 1000, 1010, and their controllers 1050 (which may be similar to controller 170) are used to drive a series of commutation functions with a common electrical angle, and three-dimensional reaction forces (of drive shafts 211, 212). Propulsive force on the rotational axis, propulsive force in the Z direction, and guide force in the X and / or Y directions for tilting, rotating, positioning of the spindle 1070, etc.). That is, by adjusting an electrical angle with an electrical angle offset, at least a one-dimensional reaction force, a two-dimensional reaction force, and a three-dimensional reaction force can be generated by a motor using a common series of commutation equations. An example of such a drive configuration is “COMMUNTATION OF AN ELECTROMAGNETIC PROPULSION AND GUIDANCE SYSTEM” filed on June 27, 2007, the entire disclosure of which is incorporated herein by reference. No. 11 / 769,688, assigned to the assignee of the present invention.

  In this exemplary embodiment, the two motors 1000, 1010 of the drive unit 1099 provide, for example, at least 7 degrees of freedom. For example, if the shafts 211, 212 are held coaxially relative to each other, for example via suitable bearings between the shafts 211, 212, the two motors may provide 7 degrees of freedom. In another example, if the shafts 211, 212 are not constrained with respect to each other (ie, the shaft can move relative to each other in all axes), the degrees of freedom provided by the two motors can be, for example, It may be 12 degrees of freedom. The drive unit 1099 may be substantially similar to the drive unit described above with respect to FIG. 11 unless otherwise noted. FIG. 11D shows a drive unit in which each motor 1000, 1010 is configured to provide power for operation of the transporter in four dimensions (ie, X, Y, Z, and rotation of each shaft). Show. As feasible, the motor may also generate moments along the Rx, Ry, and Rz axes that result from the forces generated by the different segments of the stator winding. For example, in one exemplary embodiment, the motor windings may be vertically segmented in a manner substantially similar to that described above. The propulsion system of the shafts 211 and 212 is, for example, as described above, when the shafts are held concentrically with each other, the propulsion in the Z-axis using the Lorentz force, for example, the rotation Rz1 of the external shaft 211 and the internal shaft 212 rotation Rz2), for example, lifting along the Z-axis using Lorentz force, and gap control along the X-axis and Y-axis using, for example, Lorentz force and Maxwell force (ie, in the XY plane) It is shown as providing planar movement and rotations Rx and Ry) in the X and Y axes. If the shafts are not constrained with respect to each other, the tilt (Rx, Ry) moment is, for example, due to the different lift forces along the Rz axis generated by the winding segments offset vertically along the circumference of each stator. It may be generated separately for each shaft 211, 212. In alternative embodiments, the propulsion system may propel the shafts 211, 212 along any axis or plane of Rx, Ry, Rz1, Rz2, Z, X, Y in any suitable manner.

  In the exemplary embodiment shown in FIG. 11D, each motor 1000, 1010 may include winding sets 1000A, 1000B, and 1010A, 1010B, for example, located on a carriage 205. Each winding set 1000A, 1000B, 1010A, 1010B may include an individual winding 1065, as shown for winding 1000A in FIG. 11F. In an alternative embodiment, the winding set and / or individual windings are, for example, as described in US Patent Application Publication No. 2005/0264119, which was incorporated above as part of this specification. It may have any suitable configuration, such as a zigzag or trapezoidal winding configuration. Winding sets 1000A, 1000B, and 1010A, 1010B may be driven by amplifier 1051, which may be part of controller 1050. In an alternative embodiment, amplifier 1051 may be separate from controller 1050. Amplifier 1051 may be any suitable amplifier, such as, for example, a multi-channel amplifier that can drive each individual winding 1065 of winding sets 1000A, 1000B, 1010A, 1010B separately or in groups. Winding sets 1000A and 1010A may have the same orientation, and may be oriented, for example, approximately 90 degrees from each of winding sets 1000B and 1010B. In alternative embodiments, the winding set can be any suitable machine that can be at an angle greater or less than about 90 degrees to provide stable support of the rotor (and shaft) with the resultant force generated by the winding set. It may have an angular relationship. As noted above, the winding set may further have an appropriately corresponding electrical angle shift between them and cooperate with the respective shaft rotor to form a self-bearing motor.

  In the exemplary embodiment shown in FIG. 11D, each shaft 211, 212 of the drive unit 1099 includes a magnet rotor 1000P, 1010P, respectively. In the example shown, the magnetic rotors 1000P, 1010P may have rows of permanent magnets for illustrative purposes only, but in alternative embodiments, the rotors 1000P, 1010P may have permanent magnets. For example, you may form from the ferromagnetic material. Each rotor 1000P, 1010P may be arranged as a row of magnets, and may extend around the outer periphery of the respective shaft 211,212. In one exemplary embodiment, as shown in FIG. 11E, the row of magnets of the rotors 1000P, 1010P, along with the alternating north pole 1101 and south pole 1102 facing the winding sets 1000A, 1000B, 1010A, 1010B. It may be arranged. In another exemplary embodiment, the rotors 1000P, 1010P are “Commutation of AN ELECTROMAGNETIC PROPULSION AND GUIDANCE SYSTEM” filed on June 27, 2007, which is incorporated herein by reference. It may have any suitable configuration, such as but not limited to the configuration described in the entitled US patent application Ser. No. 11 / 769,688. In alternative embodiments, the winding set and magnet platen may have any suitable configuration for driving the spindle assembly and shaft as described herein.

  To sense the position of the individual shafts 211, 212 and / or spindle assembly 1070, for example, the x, y, z, Rx, Ry, Rz coordinates, for example, as described below with respect to FIGS. 12-15B. Any suitable sensor system such as a sensor system may be provided. In an alternative embodiment, the relative motion between the rotor and stator may generate a back electromotive force. The back electromotive force is, for example, via the sum of the voltages at the phases, in any direction relative to the magnet row, and / or via different circuit voltages, for example, each winding set including multiple circuits. Position information can be provided in a direction perpendicular to the magnet rows. In other alternative embodiments, other suitable sensor systems may be used.

  In one exemplary embodiment, as described above, the spindle assembly 1070 is moved in a plane in the X and / or Y direction, the tilt Rx, Ry of the spindle assembly 1070, the rotations Rz1, Rz2 of each shaft 211, 212, and The movement of the spindle assembly 1070 along the Z axis may be controlled by adjusting the electrical angle with the electrical angle offset using a common series of commutation equations. In alternative embodiments, the operation of the components of the drive unit may be controlled in any suitable manner. Note that in this exemplary embodiment, the two motors 1000, 1010 provide, for example, 7 degrees of freedom to the drive system 1099. As feasible, the drive unit 1099 may further include a Z drive unit, as described above with respect to FIG.

  Referring again to FIG. 11 and with further reference to FIG. 12, the rotational positions of the outer shaft 211 and the inner shaft 212 may be any suitable, such as, for example, encoders 410A, 410B and respective encoder scales 430A, 430B. Tracking may be done via an encoder. In an alternative embodiment, the relative motion between the rotor and stator may cause a back electromotive force that provides position information, as described above. In this exemplary embodiment, encoders 410A, 410B are configured as optical encoders having an emitter 412 and a read head 411. In alternative embodiments, the encoder may be configured as any suitable encoder, including but not limited to optical, reflective, capacitive, magnetic, and inductive encoders. The encoder scales 430A, 430B may be any suitable scale that is configured to allow the encoder to track the rotational position of the respective shaft. In one exemplary embodiment, as shown in FIG. 11, the encoder 410A may be attached to the carriage 205 and may be arranged to interact with the scale 430A. The scale 430A may be attached to the external shaft 211. The encoder 410B may be attached to the carriage 205 and may be arranged to interact with the scale 430B. The scale 430B may be attached to the inner shaft 212. In alternative embodiments, the encoder may be located on each one of the drive shafts while the scale may be located on the carriage. In other alternative embodiments, the encoder and encoder scale may have any suitable configuration. The output of the position signal by encoders 410A, 410B is used, for example, by controller 170 with respect to the position of the arm link coupled to each one of the shafts and / or to provide feedback for motor commutation. May be.

  As shown most clearly in FIG. 12, in one exemplary embodiment, the exemplary encoder emitter 412 and read head 411 may be coupled to an encoder frame or module 500 that may be inserted into a carriage. . The encoder frame may be composed of any suitable material, such as a material that is configured for use in a vacuum environment. Encoder frame 500 may be configured such that emitter 412 and read head 411 move in the directions of arrows A and B and the encoder can be adjusted relative to encoder scale 430A. Any suitable seal 510E, 510C may be provided between the emitter 412, the read head 411, and the encoder frame 500 to prevent particles from entering the substrate processing environment. Further, appropriate seals 510A and 510B may be provided between the encoder frame 500 and the carriage 205 to prevent particles from entering the substrate processing environment. Note that encoder 410B may be substantially similar to encoder 410A. In an alternative embodiment, the encoder frame 500 is held in an environment where the encoder emitter and readhead are separate from the substrate processing environment, for example to reduce the amount of material that can be outgassed to the vacuum processing environment, and the optical view. It may be configured to be used via a port. In other alternative embodiments, any suitable feedback device may be used, including but not limited to Hall effect sensors, inductive sensors, resolvers, and the like.

  Referring now to FIG. 12A, another example encoder configuration is shown, according to another example embodiment. In this exemplary embodiment, the carriage 205 'may have recesses or openings 530A, 530B for receiving sensor inserts or modules 550A, 550B. Recesses 530A, 530B may have viewports 560A, 560B that allow sensor components 411 ', 412' to sense encoder scale 430A. Modules 550A, 550B may have any suitable shape and / or configuration. For example, the modules 550A and 550B may be configured such that when the modules 550A and 550B are inserted into the respective recesses 530A and 530B, the sensors 411 'and 412' are aligned with each other and aligned with the encoder scale. In an alternative embodiment, the module may be adjustable within the recess so that the sensor is aligned with the respective encoder scale. As feasible, modules 550A, 550B are shown in FIG. 12A as separate modules, but in an alternative embodiment, modules 550A, 550B have a unitary structure (eg, a single part). May be. In this exemplary embodiment, module 550A may include an encoder read head 411 ′ located on module 550A such that encoder read head 411 ′ is aligned with viewport 560A when module 550A is inserted into carriage 205 ′. Good. In this exemplary embodiment, the read head 411 ′ includes a module 550 A and a trolley 205 ′ to prevent the atmosphere from leaking out or contaminants from passing into or out of the substrate processing area. A seal 570A is formed therebetween. In alternative embodiments, the seal may be formed between the read head and the carriage in any suitable manner. In other alternative embodiments, the viewport 560A may be covered and sealed with a “window” or optically transparent material that is separate from the read head 411 '. Module 550B may include an encoder emitter 412 'located in module 550B such that when module 550B is inserted into carriage 205', encoder emitter 412 'is aligned with viewport 560B. In this exemplary embodiment, the emitter 412 ′ forms a seal 570B between the module 550A and the carriage 205 ′ to prevent the atmosphere from leaking into or out of the substrate processing region. . In alternative embodiments, the seal may be formed between the read head and the carriage in any suitable manner. In other alternative embodiments, the viewport 560B may be covered and sealed with a “window” or optically transparent material that is separate from the emitter 412 '. As feasible, modules 550A, 550B may be suitably connected to a controller, such as controller 170, for providing feedback regarding shaft orientation, planar position, and rotational position. The configuration of the exemplary modules 550A, 550b shown in the drawings is for illustrative purposes only, and the modules 550A, 550B may be any suitable configuration, and / or such as (but not limited to) inductive or capacitive sensors. Note that it may have any suitable sensor type.

  The encoders 410A, 410B, 550A, 550B may be further configured to measure, for example, one or more gaps G1-G4 between the stator and rotor of the motors 208, 209. For example, the scale 430A may be configured so that the encoder can measure the air gap. In alternative embodiments, the encoder may be configured to measure the air gap in any suitable manner. In other alternative embodiments, additional encoders and other feedback devices may be located, for example, proximate to the shafts 211, 212 to measure one or more gaps G1-G4.

  Referring now to FIG. 13, another exemplary sensor configuration 1100 is shown, eg, for detecting rotational position, axial position, XY plane position, and / or clearance, for example, with respect to the drive shaft 211. Has been. In this exemplary embodiment, sensor configuration 1100 is configured as a non-invasive sensor that does not require an optical viewport or feedthrough, for example, in barrier 210, for example, isolating the vacuum environment from the atmospheric environment.

  The sensor configuration 1100 of FIG. 13 may use, for example, a magnetic circuit principle to measure the spacing from a ferromagnetic target 1110 (eg, which may be secured to a rotor or drive shaft) to a transducer or readhead frame. . The ferromagnetic target may have any suitable contour (eg, a curved contour for a rotary drive or a flat contour for a linear drive), as detailed below. And may have any suitable side profile incorporated into the target. In this exemplary embodiment, the transducer or read head 1120 includes, for example, a ferromagnetic element 1122, a permanent magnet 1123, magnetic sensors 1124A-1124D, and a mounting substrate 1125. The permanent magnet 1123 may have any appropriate shape such as a cylindrical shape shown in FIG. The magnetic poles of the permanent magnet 1123 may be oriented so that the magnetic poles are parallel to the mounting substrate, but in alternative embodiments, the magnetic poles may be oriented in any suitable manner. The magnetic sensors 1124A-1124D may be any suitable magnetic sensor such as, but not limited to, a Hall effect sensor, a reed switch, a material exhibiting a magnetoresistive effect.

  The ferromagnetic element 1122 may have any suitable shape, such as the cup shape shown in FIG. The ferromagnetic element 1122 may be positioned with respect to the permanent magnet 1123 such that the cup shape is concentric with the permanent magnet 1123. In alternative embodiments, the ferromagnetic element 1122 may have any suitable positional relationship with the permanent magnet 1123. Permanent magnet 1123 may be coupled to the center of ferromagnetic element 1122 in any suitable manner, such as, for example, via magnetic forces, mechanical fasteners, and / or adhesives. The configuration of the permanent magnet 1123 and the ferromagnetic element may be such that a magnetic circuit is generated when the magnetic flux is formed with a uniform density along a particular path. In the exemplary embodiment shown in FIG. 13, the magnetic flux density may be uniform along circle 1127.

  In this example, the four magnetic sensors 1124A to 1124D are arranged along a uniform magnetic flux path indicated by a circle 1127 so that their outputs are substantially the same. It should be understood that in alternate embodiments, any suitable number of magnetic sensors may be disposed along the uniform magnetic flux path. The output of the magnetic sensor may be sent to any suitable adjustment circuit 1126 to process the sensor output signal and optimize the quality of the output signal 1128. As feasible, increasing the number of magnetic sensors in the read head 1120 can increase the noise immunity of the read head 1120. In alternative embodiments, the magnetic sensors may be arranged as pairs with alternating orientations with respect to the magnetic flux density lines. Each pair of sensors can provide a different output that can improve noise immunity in signal routing from the position of the readhead to any suitable signal reading device. In other alternative embodiments, the magnetic sensor may be arranged in any suitable manner.

  In operation, placing the ferromagnetic target 1110 in front of the read head 1120 may change the magnetic flux density vector sensed by the magnetic sensors 1124A-1124D, thus changing the output signal 1128 of the magnetic sensors 1124A-1124D. May end up. As feasible, the spacing between the ferromagnetic target 1110 and the read head 1120, ie the gap 1130, affects the value of the output signal 1128. As further feasible, the shape of the permanent magnet 1123 and the ferromagnetic element 1122 may be optimized to maximize the range of operation of the read head 1120 (eg, the spacing 1130).

  The sensor configuration of the exemplary embodiment of FIG. 13 can sense, for example, a gap between the rotor 1200R and the stator 1200S through the barrier 210 in a non-invasive manner, as shown in FIG. Also good. FIG. 14 shows a schematic diagram of a portion of the sensor configuration described above with respect to FIG. In this exemplary embodiment, the ferromagnetic target may be a rotor backing 1210, but in alternative embodiments the target may be any suitable ferromagnetic target. The read head 1120 may interact with the rotor backing 1210 so that the flux lines pass from the read head 1120 through the rotor 210 through the rotor backing 1210 and back to the sensor 1124. The sensor signal may be sent to any suitable electronic device for reading signals and gap 1130 size measurements, such as controller 170, for example.

  Referring now to FIGS. 14A and 14B, another example sensor feedback system is shown according to one example embodiment. As shown in FIG. 14A, the sensor system includes a ferromagnetic target 1340 and three sensors 1350-1370. In alternative embodiments, the feedback system may include more or less than three sensors. In this exemplary embodiment, the ferromagnetic target may be a rotor backing, but in alternative embodiments, the target may be any suitable ferromagnetic target. As most clearly shown in FIG. 14B, the ferromagnetic target 1340 of this example is configured as a rotor 1300R that can be used, for example purposes only, with the motor described above with respect to FIGS. 4A and 4B, for example. Has been. The rotor backing 1340 may have several side profiles that are incorporated into the surface 1390 of the rotor backing 1340. In this example, absolute track side profile 1330 and incremental track side profile 1310 are either incorporated into backing 1340 or otherwise formed. Absolute track side profile 1330 and incremental track side profile 1310 may include any suitable side profile (eg, land, groove, recess, etc.) to properly track the position of rotor 1300R. In alternate embodiments, the rotor 1300R may have a side profile of any suitable configuration. In alternate embodiments, the side profile may be provided separately from the rotor 1300R and located at any suitable location within the drive. Further, it should be noted that the ferromagnetic target is described as a rotor backing, while it should be understood that the ferromagnetic target may be separate from the rotor. For example, the ferromagnetic target may be mounted, for example, at any suitable location on the drive shaft of the exemplary embodiments described herein.

  Sensors 1350-1370 may be substantially similar to each other and may be substantially similar to read head 1120 described above. In alternative embodiments, the sensors 1350-1370 may be any suitable sensor. In this exemplary embodiment, sensors 1350-1370 may be positioned relative to rotor 1300R such that each sensor provides a different sensor reading. For example, sensor 1350 may be aligned with absolute track side profile 1330 to form an absolute position sensor. Sensor 1360 may be aligned to interface with surface 1320 without the side profile of rotor backing 1340 to form a gap sensor. Sensor 1370 may be aligned with incremental track side profile 1310 to form an incremental position sensor. In alternative embodiments, the sensors may be configured with each magnetic target to provide any suitable positioning information. Other suitable feedback systems for use with the drive of the exemplary embodiment are hereby filed June 27, 2008, the entire disclosure of which is hereby incorporated by reference. US Patent Application No. 12 / 163,984 (Attorney Docket No. 390P012911-US (PAR)) entitled “POSITION FEEDBACK FOR SELF BEARING MOTOR”.

  As feasible, the trolley 205 may further include any suitable sensor for sensing the position of the trolley 205 along the Z direction, such as, for example, the sensor 410C shown in FIG. Sensor 410C may be substantially similar to sensors 410A, 410B. In alternative embodiments, sensor 410C may be any suitable sensor having any suitable configuration, such as but not limited to the sensors described herein.

  Referring to FIG. 11 again, it is possible to realize the windings of the motors 208 and 209 when the power of the transport device (for example, the transport machine 800) is cut off or the power is turned off for other reasons. The motor / magnetic spindle bearings 208, 209 may not support the shafts 211, 212 when is not energized. The carriage 205 and / or shafts 211, 212 may be configured such that the shafts 211, 212 are supported in any suitable manner when the windings are not energized. In one exemplary embodiment, as shown in FIG. 11, the carriage 205 may include a support surface 421A, and the outer shaft 211 may include a support member 42IB that is coupled to the shaft in any suitable manner. Good. In an alternative embodiment, the support member 421B may be an integral structure with the shaft 211. When the windings 208B1, 208B2 are de-energized, the outer shaft 211 may be lowered so that the support member 412B rests on the support surface 421A. As feasible, the shape and / or configuration of the support surface 421A and the support member 421B can be any suitable shape and / or configuration to stably support the shaft 211 when the windings 208B1, 208B2 are not energized. It may also be configured.

  The shaft 211 may further have a support surface 420A, and the inner shaft 212 may have a support member 420B. In this example, the support member 420B of the inner shaft 212 is shown as a unitary structure with the shaft 212, but in alternative embodiments, the support member 420B is coupled to the shaft 212 in any suitable manner. It may be a separate member. The inner shaft may be lowered so that when the windings 209B1, 209B2 are de-energized, the inner shaft support member 420B interacts with the support surface 420A of the outer shaft 211 to support the inner shaft 211. The shape and / or configuration of support surface 420A and support member 420B may be any suitable shape and / or configuration for stably supporting shaft 212 when windings 209B1, 209B2 are not energized.

  It should be noted that the support surfaces and support members shown in FIG. 11 are for illustrative purposes only, and the shafts 211, 212 can be supported in any suitable manner when the transporter is powered off. For example, in alternative embodiments, the shaft may be supported on any suitable support such as but not limited to ball bearings, roller bearings, and / or suitable bushings. In other alternative embodiments, the permanent magnets may be located proximate to the outer shaft 211 and the inner shaft 212 within the carriage. The permanent magnets of the carriage may interact with the respective permanent magnets located on the shafts 211 and 212 so that the shafts 211 and 212 are supported when the power of the transporter is cut off. When permanent magnets are used to support the shafts 211, 212, the windings 208B1, 208B2, 209B1, 209B2 are by permanent magnets so that the center of rotation of the shaft can be positioned as described herein. Note that there may be sufficient power to overcome the magnetic force.

  With reference now to FIGS. 15-17, an exemplary operation of an exemplary embodiment will be described. As described above, the shafts 211, 212 may be coupled to the arm links of the transport device in any suitable manner.

  As shown most clearly in FIG. 15, the controller (eg, controller 170) may provide motor windings for stators 208S and 209S such that rotors 208R, 209R are tilted at an angle α along the Z axis. May be configured to generate a radial force and / or a tangential force. Accordingly, as shown in FIG. 15, the longitudinal center lines C1, C2 of the shafts 211, 212 are inclined with respect to the center line Z1 of the carriage 205 and / or the stators 208S, 209S (ie, the spindles). 600 rotates in the X and / or Y axis). As shown in FIG. 15, for the purpose of illustration only, the gaps G1 to G4 are widened toward the bottom 205B of the carriage 205, but the gap may be widened depending on the direction of inclination with respect to the XY plane. Please understand that it becomes narrower. The controller may be configured to encourage winding of the stators 208S, 209S so that the gaps G1-G4 and the tilt angle α are maintained when the arm is extended or retracted. In an alternative embodiment, the winding may be energized to tilt the spindle 600 after the arm is extended or retracted. In still other alternative embodiments, the spindle 600 may be tilted at any point during the operation of the arm. As feasible, the tilt may be any suitable direction, such as a tilt Rx in the X direction, a tilt Ry in the Y direction, or a tilt in both the X and Y directions. The angle of inclination can be limited only by the size of the gaps G1 to G4 between the stators 208S and 209S and the rotors 208R and 209R, for example.

  As shown in FIG. 16, the windings are further excited so that the spindle 600 moves in the XY plane so that the centerline of the shafts 211, 212 (ie, the spindle 600) is always parallel to the Z axis. Can be done. In the example shown in FIG. 16, the longitudinal centerlines or centers of rotation of the shafts 211, 212 are separated by a distance D, for example from the centerline Z1 of the carriage 205 or any other suitable position in the drive system. May be separated. The gaps G1-G4 shown in FIG. 16 are shown as being substantially equal, but as noted above, it is understood that the gaps will vary depending on the location of the outer circumference of the stator / rotor where the gap is measured. I want to be. It should be noted that the interval D in which the spindle moves in the XY plane (for example, XY movement) can be limited only by the size of the gaps G1 to G4.

X-Y movement and / or tilting of the spindle assembly 600 and the arm 800 coupled thereto may be used, for example, for processing and / or storing a substrate processing chamber, load lock, aligner, substrate cassette, or substrate. In other suitable devices, it may be used to fine tune the position of the arm 800 so that the substrate S on the end effector 830 is properly spatially located. For example, referring to FIG. 17, a schematic diagram of a transporter 900 and a substrate station 910 is shown. The transporter includes the spindle assembly 600 and the arm 800 as described above. The substrate station 910 may be any suitable station that supports, stores and / or processes substrates, such as, for example, a substrate aligner. In this example, the transport is performed such that the center line of the spindle 600 ′ (eg, when the gap between the spindle and the stator is substantially uniform) is not perpendicular to the substrate seating surface 911 of the substrate station 910. The machine may be attached, for example.
The substrate S itself located on the end effector 830 of the arm 800 may not be parallel to the substrate seating surface 911. As described above, the windings of the motors of the transfer machine 900 are arranged such that when the substrate S is seated on the substrate station 910, the spindle is angled in the XY plane so that the substrate is substantially parallel to the substrate seating surface 911. It may be excited so as to be inclined at α ′. As feasible, the spindle assembly 600 further includes an X direction and / or Y to fine tune the orientation and / or position of the substrate S mounted on the end effector and the end effector relative to the substrate station 910. It may be moved in the direction. As further feasible, the movement of the substrate in the X and / or Y direction may be effected via a tilt of the spindle in the direction of movement of the substrate, the movement of the spindle in placing the substrate For example, the substrate can be moved in the Z direction. For fine adjustment of the end effector orientation and / or position, the end effector may be horizontal or substantially parallel to the substrate seating surface or plane, and without rotation, extension, or retraction of the robot arm, For example, the position of the end effector may be adjusted on the XY plane. Fine adjustment of the end effector position via control of the center line of the spindle assembly 600 may further be used to offset the sagging of the arm 800 or for any other suitable purpose.

  Further, the substrate station 910 shown in FIG. 17 is described above with respect to FIGS. 15-17, for example, so that the substrate seating surface mounted on the drive shaft of the aligner motor can be tilted and / or moved as described herein. Note that a drive system that is substantially similar to the drive system described above may be incorporated.

  An example embodiment drive as described herein includes seven degrees of freedom including, for example, X, Y, Z, Rx, Ry, Rz1, and Rz2. In one exemplary embodiment, Rz1 and Rz2 are associated with rotation of shafts 211 and 212, respectively. X, Y, Rx, and Ry are related to the position and / or tilt of the spindle 600 (ie, offset the position of the rotors 208R, 209R). Z is related to the movement of the carriage 205 (and arm 800) along the Z direction. Note that in one embodiment, there are six degrees of freedom provided by the two motors 208, 209, while a seventh degree of freedom is provided by the Z drive unit 220. In other embodiments, such as the embodiment shown in FIGS. 11D-11F, two degrees of freedom may be provided by two motors, while eight degrees of freedom are provided by a Z drive unit.

  As noted above, the number of degrees of freedom of the exemplary drive is not limited to seven. In alternative embodiments, the drive according to the exemplary embodiment may have more or less degrees of freedom. For example, the transport device may be attached to a movable carriage that allows the entire transport machine to move in a one-dimensional, two-dimensional, or three-dimensional direction. In other examples, the drive system may have more or less than two drive shafts.

  These multiple degrees of freedom of the drive unit may allow for precise leveling and positioning of the substrate, while any deviation between the transporter and the substrate station, and / or the cantilever of the substrate transporter Offset any deflection from the effect. The magnetic spindle bearing provided by the drive of the exemplary embodiment may further provide a lubricant-free rotating spindle, thereby reducing the possibility of particles entering the substrate processing area. The magnetic spindle bearing of the exemplary embodiment further reduces outgassing that may be caused by, for example, grease or other lubricants that may be used to lubricate the drive spindle.

  As feasible, the exemplary embodiments described herein may be used to drive motors of other devices such as, but not limited to, robotic transporters or substrate aligners, for example. Appropriate embodiments may be used separately or in combination. Further, although possible, the exemplary embodiment is described herein with respect to a rotary motor, the exemplary embodiment is equally applicable to driving a linear motor system.

  It should be understood that the foregoing is only illustrative of the embodiments herein. Various alternatives and modifications can be devised by those skilled in the art without departing from the embodiments herein. Accordingly, the embodiments herein are intended to embrace all such alternatives, modifications and variations that fall within the scope of the appended claims.

Claims (14)

A substrate transfer device,
Frame,
At least one transfer arm having a substrate support;
Anda driving unit connected to the frame,
The drive unit includes a plurality of coaxial spindles connected to the transport arm, and the drive unit includes at least one stator bearing unit for each coaxial spindle so as to support each of the coaxial spindles in a non-contact manner. The drive unit operates the transfer arm through rotation of the coaxial spindle, and each of the stator bearing units is independently controlled, and each of the coaxial spindles is controlled independently. The center line of each of the coaxial spindles is moved in a predetermined plane perpendicular to the center line with respect to the frame by the combination of the slave bearing portions, and the at least one transfer arm is extended and the substrate support portion is substrate transfer device comprising a benzalkonium be positioned within the predetermined plane.   The position of the at least one substrate support is adjusted in the predetermined plane by the rotation of the coaxial spindle and the displacement of the center line of the coaxial spindle, and the substrate can be carried into and out of the substrate holding station by the position adjustment. The substrate transfer apparatus according to claim 1.   The driving unit further includes at least one stator unit connected to the frame and at least one rotor unit connected to each of the coaxial spindles, and the stator unit drives the rotor unit. 2. The substrate transport according to claim 1, wherein at least an angle of a center line of the coaxial spindle is changed along at least one displacement axis, and the angle change is a change with respect to a center line of the stator portion. apparatus. The stator portion and the rotor portion is isolated from each other, the stator unit functions in the first environment, the rotor unit according to claim 3, wherein the function in the second environment Substrate transfer device. And a drive unit feedback system for measuring at least a position of a center line of the coaxial spindle in the predetermined plane and an inclination angle of the center line of the coaxial spindle with respect to a center line of at least one stator of the drive unit. The substrate transfer apparatus according to claim 1 .   The drive feedback system has at least one sensor module connected to the drive and at least one scale connected to at least one of the coaxial spindles, the sensor module detecting the scale. 6. The substrate transfer apparatus according to claim 5, wherein:   The scale includes a ferromagnetic target, the sensor module includes a permanent magnet element, a ferromagnetic element, and a plurality of magnetic sensors, the ferromagnetic element having a wall surrounding the permanent magnetic element, 7. The substrate transfer device according to claim 6, wherein the magnetic sensor is provided along a uniform magnetic flux path between the permanent magnet element and the wall of the ferromagnetic element.   7. The sensor module according to claim 6, wherein the sensor module is provided in a first environment, the scale is provided in a second environment, and the first environment and the second environment are isolated from each other. Substrate transfer device. The coaxial spindle includes at least two coaxial drive shafts, each of the at least two coaxial drive shafts includes a rotor, the drive unit further includes a stator unit, and the stator unit separates each rotor. Each of the at least two coaxial drive shafts is independently driven, and the at least two coaxial drive shafts with respect to a center line of the stator portion due to an interaction between each rotor and the stator portion. 2. The substrate transfer apparatus according to claim 1, wherein an inclination angle of the center line of the substrate is changed.   The stator portion cooperates with each of the rotors to axially offset the center line of the at least two coaxial drive shafts with respect to the center line of the stator portion, and the offset causes the at least one The substrate transfer apparatus according to claim 9, wherein the position of at least one substrate support portion of the transfer arm is adjusted within a predetermined plane.   The drive unit is movably attached to the frame, and the substrate transport apparatus further includes a linear drive system attached to the frame, and the linear drive system moves the drive unit linearly with respect to the frame. The substrate transfer apparatus according to claim 1, wherein the substrate transfer apparatus can perform the operation.   The drive unit has at least one of an active magnetic bearing and a passive magnetic bearing, and the bearing supports the transfer arm in a non-contact manner, and the bearing is configured to rotate the coaxial spindle and the center line of the coaxial spindle. The substrate transfer apparatus according to claim 1, wherein displacement occurs in a predetermined plane. A method of driving a robot transfer arm drive unit,
Supporting the axial moment load and the radial moment load acting on each drive shaft of the coaxial spindle of the robot transport arm drive unit in a non-contact manner by at least one stator bearing unit for each drive shaft of the coaxial spindle; ,
Detecting at least one of an axial direction and a position of a center line of each of the drive shafts of the coaxial spindle around a first rotation axis with respect to a center line of each stator portion of the robot transfer arm drive unit;
Said exciting the windings of the at least one stator driving portion of the robotic transfer arm comprises a step you want to rotate. At least one drive shaft of the coaxial spindle,
Each of the stator bearing portions is independently controlled, and the center of the coaxial spindle with respect to the centerline of each stator portion by a combination of the independently controlled stator bearing portions of each of the drive shafts. The line is displaced ,
The at least one stator drive is operable independently of the at least one stator bearing;
By rotating the drive shaft and displacing the center line of the coaxial spindle, the position of the transporter arm substrate support section driven by the robot transport arm driving section is adjusted, and the position is the center line of the coaxial spindle. A method characterized in that the position is in a plane perpendicular to.   The step of supporting the axial moment load and the radial moment load acting on the coaxial spindle includes actively or passively supporting the axial moment load and the radial moment load. 13. The method according to 13.

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