KR20110090586A - Droplet unit and substrate processing appratus - Google Patents

Abstract

PURPOSE: A discharging unit and a substrate processing apparatus is provided to prevent the generation of leakage by sealing an inlet and an outlet while a raw material is discharged and introduced. CONSTITUTION: A discharging unit includes a syringe(430), a cylinder rod(441), a first valve(460), and a second valve(470). The syringe includes an internal space, an inlet(431-1), and an outlet(431-2). The cylinder rod moves in the syringe. The first valve is in connection with the inlet of the syringe and controls the connection according to the movement of the cylinder rod. The second valve is in connection with the outlet of the syringe and controls the connection according to the movement of the cylinder.

Description

Dispensing unit and substrate processing appratus

The present invention relates to a discharge unit and a substrate processing apparatus, and more particularly, to a discharge unit and a substrate processing apparatus capable of easily injecting a raw material into a syringe and easily discharging the raw material in the syringe.

Conventionally, a CRT (Cathode Ray Tube) is used as a display device. This has the disadvantage of being bulky and heavy. Recently, the use of flat panel displays such as a liquid crystal display panel (LCD), a plasma display panel (PDP), and an organic light emitting device (OLED) has been increasing. It has the characteristics of light weight, thinness and low power consumption.

In the case of such a flat panel display panel, a pair of flat panel type boards are bonded together and manufactured. That is, taking the manufacture of a liquid crystal display panel as an example, first, a lower substrate on which a plurality of thin film transistors and pixel electrodes are formed, and an upper substrate on which a color filter and a common electrode are formed are manufactured. Thereafter, a liquid crystal is dropped on the lower substrate, and the upper substrate and the lower substrate are bonded and sealed to manufacture a liquid crystal display panel.

At this time, a liquid crystal substrate processing apparatus is used to drop the liquid crystal onto the substrate. The liquid crystal substrate processing apparatus includes a stage on which a substrate is seated, a gantry disposed on the stage, a gantry mounted on the gantry, a plurality of discharge units arranged in one direction and spaced apart from each other, and a discharge unit for horizontally moving the plurality of discharge units. Moving means, the gantry moving means is installed on the stage to move the gantry in the horizontal direction. Here, each of the plurality of discharge units includes a liquid crystal storage unit for storing liquid crystal, a syringe for accommodating a certain amount of liquid crystal, a nozzle for supplying liquid crystal from the syringe to discharge liquid crystal onto the substrate, and a valve for controlling communication between the first and third tubes. It includes. At this time, the first tube is arranged to connect between the liquid crystal reservoir and the valve, the second tube is arranged to connect between the syringe and the valve, and the third tube is arranged to connect between the valve and the nozzle. That is, the valve is connected to both ends of each of the first to third tubes, thereby controlling communication between the first to third tubes. Accordingly, the valve opens the first to third tubes to supply the liquid crystal in the container into the syringe, or the liquid crystal in the syringe to the nozzle. At this time, it is preferable that the third tube is in a clogged state during the step of opening the first and second tubes to supply liquid crystal into the syringe. In addition, it is preferable that the first and second tubes be in a clogged state in the process of opening the third tube and supplying the liquid crystal to the nozzle.

On the other hand, conventionally used an electronic valve for controlling the communication of the first to third tubes by using an electrical signal as a valve. In the case of the electronic valve as described above, the error of the signal is frequently generated. Accordingly, when the first and second tubes are opened by using a valve to inject liquid crystal into the syringe, there is a problem in that the third tube is opened due to an error in the signal and leaks occur. For this reason, liquid crystal is not injected easily into a syringe. In addition, when the third tube is opened to supply the liquid crystal in the syringe to the nozzle, there is a problem in that the first and second tubes are opened and a leak is generated due to a signal error. For this reason, the liquid crystal in a syringe is not easily supplied to a nozzle. Therefore, in the process of dropping the liquid crystal on the substrate, a problem of a product occurs or a process time is delayed.

One technical problem of the present invention is to provide a discharge unit and a substrate processing apparatus which can easily inject a raw material into a syringe and easily discharge the raw material from the syringe.

In addition, one technical problem of the present invention is to provide a discharge unit and a substrate processing apparatus capable of preventing the leakage of the raw material during the process of injecting the raw material into the syringe and the process of discharging the raw material inside the syringe. There is.

The discharge unit according to the present invention has an internal space in which the raw material is accommodated, the syringe having an injection hole for injecting the raw material material into the internal space and the discharge port for discharging the raw material of the internal space, part of the internal space of the syringe Is inserted into the cylinder rod for forward and backward movement inside the syringe, one end is connected to the injection port of the syringe, the first valve is controlled communication according to the forward and backward of the cylinder rod, one end is the discharge port of the syringe And a second valve in communication with the forward and backward of the cylinder rod, wherein one of the first valve and the second valve is opened by the forward and backward of the cylinder rod, and the other is It is desirable to be sealed.

A first supply pipe for supplying a raw material to the first valve is connected to the other end of the first valve, and a second supply pipe for discharging the raw material of the second valve is connected to the other end of the second valve.

A nozzle for discharging the raw material is connected to one end of the second supply pipe.

A check valve is used as the first valve and the second valve.

When the first valve is opened by forward or backward of the cylinder rod, the second valve is closed, and when the first valve is closed by forward or backward of the cylinder rod, the second valve is closed. Open.

The forward and backward of the cylinder rod are repeated a plurality of times, and the raw material is continuously injected into the syringe, and the raw material is discharged from the syringe.

Liquid crystal is used as the raw material.

A substrate processing apparatus according to the present invention includes a stage on which a substrate is placed, a gantry disposed above the stage, a discharge unit mounted on the gantry and fixed to discharge raw material onto the substrate, wherein the discharge unit includes A syringe having an injection hole for injecting the raw material into the inner space and an outlet for discharging the raw material in the inner space, a cylinder rod partially inserted into the inner space of the syringe to move forward and backward in the syringe, and once The first valve is connected to the injection port of the syringe, the first valve to control the communication in accordance with the forward and backward of the cylinder rod, one end is connected to the outlet of the syringe, the communication is controlled in accordance with the forward and backward of the cylinder rod And two valves, wherein either one of the first valve and the second valve Open and the other is sealed.

It is preferable to use check valves as the first and second valves.

When the first valve is opened by forward or backward of the cylinder rod, the second valve is closed, and when the first valve is closed by forward or backward of the cylinder rod, the second valve is closed. To be open.

The raw material is injected into the syringe continuously by repeating forward and backward of the cylinder rod a plurality of times, and the raw material is discharged from the syringe to drop the raw material onto the substrate.

As described above, in the embodiments of the present invention, communication between the inlet and the outlet of the syringe can be easily controlled by using the cylinder rod reciprocating in the syringe and the first and second valves having different directions. Thus, the outlet can be easily closed while injecting the raw material into the syringe through the inlet. In addition, while discharging the raw material inside the syringe through the discharge port, the injection port can be easily closed. Therefore, it is possible to prevent the leakage of the raw material during the process of injecting the raw material into the syringe and the process of discharging the raw material in the syringe. Therefore, it is possible to reduce the defect of the product due to leakage and the delay of the process time.

In addition, embodiments of the present invention can implement the function of the electronic valve, without using the conventional electronic valve. And as in the prior art it is possible to simplify the device by eliminating the need for a separate pipe connected to the valve from the syringe. In addition, since no electronic valve is used, no electrical connection is required, and the detachment is easy and the cleaning is easy.

1 illustrates a substrate processing apparatus according to an embodiment of the present invention.
2 is an enlarged cross-sectional view of the discharge unit shown in FIG.
Figure 3a is a cross-sectional view showing an open state of the first valve according to an embodiment of the present invention, Figure 3b is a cross-sectional view showing a closed state of the first valve.
Figure 4a is a cross-sectional view showing an open state of the second valve according to an embodiment of the present invention, Figure 4b is a cross-sectional view showing a closed state of the first valve.
5A and 5B are cross-sectional views illustrating the operation of the discharge unit according to the embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but may be implemented in various forms, and only the embodiments are intended to complete the disclosure of the present invention and to those skilled in the art. It is provided for complete information.

1 is a view showing a substrate processing apparatus according to an embodiment of the present invention. FIG. 2 is an enlarged cross-sectional view of the discharge unit shown in FIG. 1.

1 and 2, a substrate processing apparatus according to an exemplary embodiment of the present invention includes a stage 100 on which a substrate s is seated, a gantry 200 disposed on an upper side of the stage 100, and a gantry 200. Mounted and fixed on the plurality of discharge units 400 arranged in one direction and spaced apart, the plurality of discharge units 400 on the gantry 200 are installed in the same direction as the direction in which the plurality of discharge units ( And a discharge unit moving unit 500 for horizontally moving the 400. In addition, it is provided on the stage 100 includes a gantry moving means 300 for moving the gantry 200 in the horizontal direction. In an embodiment, a liquid crystal is used as a raw material dropped on the substrate s, and the substrate processing apparatus according to the embodiment may be a liquid crystal substrate processing apparatus. Of course, without being limited to this, various liquids may be used.

The stage 100 is manufactured in a shape corresponding to the substrate s so as to settle the substrate s. In the embodiment, since the glass substrate of the rectangular shape is used as the substrate s, the stage 100 also uses the stage 100 of the rectangular shape. In addition, although not shown, the stage 100 may include a separate fixing part for fixing the substrate s. In this case, an electrostatic chuck or a vacuum fixing device may be used as the fixing part. Here, in the case of using the vacuum fixing device, although not shown, a plurality of holes communicating with the vacuum pump may be provided on the upper side of the stage 100. Through this, the substrate s placed on the upper side of the stage 100 may be fixed.

The gantry moving unit 300 is preferably manufactured to move the gantry 200 in a direction crossing the direction in which the plurality of discharge units 400 horizontally move. The gantry moving means 300 is installed on the pair of guide rails 310, the pair of guide rails 310 which are installed in parallel and spaced apart in parallel on the stage 100, the pair of guide rails And a gantry driving member 320 sliding along 310. Here, the pair of guide rails 310 are installed on the stage 100 so as to be orthogonal to the direction in which the plurality of discharge units 400 move horizontally. The upper portion of the gantry driving member 320 is coupled to the lower portion of the gantry 200. Thus, as the gantry driving member 320 slides along the guide rail 310, the gantry 200 coupled to the gantry driving member 320 is horizontally moved. In this case, the gantry driving member 320 may be, for example, a combination of a linear motor for linear movement and a motor for rotating the ball screw and the ball screw. Of course, the present invention is not limited thereto, and any method in which the gantry driving member 320 may slide on the guide rail 310 may be applied.

Each of the plurality of discharge units 400 is coupled to the discharge unit moving unit 500 mounted on the gantry 200, and the coupling member 410 and the coupling member horizontally moved by the discharge unit moving unit 500. A raw material storage unit 420 mounted above the 410 and storing liquid crystal, an injection hole 431-1 which is a passage through which liquid crystal is injected into an internal space, and an outlet 431-2 which is a passage through which the liquid crystal is discharged. The syringe 430 provided therein is partially inserted into the syringe 430 to receive liquid crystals from the driving unit 440 and the syringe 430 reciprocating vertically in the syringe 430 and the liquid crystal on the substrate s. Discharge portion 450 for discharging the gas, a first valve 460 connected to the inlet 431-1 of the syringe 430, and a second valve 470 connected to the outlet 431-2 of the syringe 430. do. In addition, one end is connected to the raw material storage 420, the other end is connected to the first supply pipe 480, the first supply pipe 480, one end is connected to the second valve 470, the other end is discharged to the 450 Connected second supply pipe 490, each of which is mounted on the coupling member 410, syringe support for supporting the raw material storage unit support means 420-1 for supporting the raw material storage unit 420 and the syringe 430 And means 430-1. Here, the first and second supply pipes 480 and 490 are manufactured in a tube shape having an inner space. In addition, the raw material storage unit support means 420-1 is mounted on the coupling member 410 to be disposed below the raw material storage unit 420 to support the raw material storage unit 420. The syringe support means 430-1 is mounted on the coupling member 410 in a state of being coupled with the lower region of the syringe 430 adjacent to the second valve 470. Of course, the present invention is not limited thereto, and the raw material storage part supporting means 420-1 and the syringe supporting means 430-1 may be disposed at various positions capable of supporting each of the raw material storage part 420 and the syringe 430. Do. In addition, the rear surface of each of the coupling members 410 of the plurality of discharge units 400 is coupled to the discharge unit moving unit 500 mounted on the gantry 200 as described above. Here, the coupling member 410 according to the embodiment is manufactured in a plate shape, and the raw material storage part 420, the syringe 430, and the discharge part 450 are mounted on the front side, and the discharge unit moving unit 500 is provided on the rear side. Connected. Thus, the plurality of discharge units 400 may drop the liquid crystal onto the substrate s while moving in the horizontal direction through the discharge unit moving means 500.

The raw material storage unit 420 stores the liquid crystal to be supplied to the syringe 430, and in this embodiment, the raw material storage unit 420 is manufactured in a cylindrical shape. However, the present invention is not limited thereto and may be manufactured in various shapes. And although not shown in the raw material storage unit 420, a degassing device (not shown) may be provided with a vacuum means therein to discharge the air in the raw material storage unit 420 to the atmosphere.

The syringe 430 receives liquid crystal from the raw material storage unit 420 and serves to provide a predetermined amount to the discharge unit 450. The syringe 430 is connected to the body portion 431 having an internal space for storing the liquid crystal, the side of the body portion 431, the injection hole 431-1 for injecting liquid crystal into the body portion 431, the body It is connected to the lower portion of the portion 431 includes a discharge port 431-2 for discharging the liquid crystal in the body portion 431. The body 431 may be manufactured in a cylindrical shape having an internal space, and may be made of various materials such as metal, plastic, or glass. One end of the inlet 431-1 is connected to a first valve 460 that controls communication between the first supply pipe 480 and the inlet 431-1. In addition, a second valve 470 is connected to one end of the outlet 431-2 for controlling communication between the outlet 431-2 and the second supply pipe 490.

The driving part 440 is a part of which is inserted into the body portion 431, the power portion 442 for providing a driving force to the piston rod 441, the piston rod 441 reciprocating in the vertical direction in the body portion 431 ). In the following, the upward movement of the piston rod 441 is referred to as backward, and the downward movement is defined as forward. The piston rod 441 is preferably manufactured to correspond to the shape of the inner space of the body portion 431. Therefore, in the Example, the piston rod 441 was produced in the shape of a cylinder. And the power unit 442 is preferably disposed outside the syringe 430. The opening and closing of the first and second valves 470 are controlled by changing the pressure in the syringe 430 using the driving unit 440. That is, the piston rod 441 is reversed by using the power unit 442 to open the first valve 460 and seal the second valve 470. As a result, the liquid crystal supplied to the first supply pipe 480 passes through the opened first valve 460 and moves inside the syringe 430. Meanwhile, at this time, since the second valve 470 is in a sealed state, the liquid crystal inside the syringe 430 is not discharged from the second valve 470. In addition, the piston rod 441 is advanced using the power unit 442 to seal the first valve 460 and open the second valve 470. For this reason, the liquid crystal supplied into the syringe 430 moves to the discharge part 450 through the discharge port 431-2, the second valve 470, and the second supply pipe 490. Meanwhile, since the first valve 460 is in a sealed state, the liquid crystal supplied to the first supply pipe 480 is blocked by the first valve 460 and does not move inside the syringe 430. A detailed description of a method of controlling communication between the first and second valves 460 and 470 using forward and backward of the piston rod 441 of the driving unit 440 will be described later.

The discharge part 450 is mounted to the coupling member 410 to be disposed below the syringe 430, and discharges the liquid crystal onto the substrate s placed on the stage 100. The discharge part 450 includes a nozzle 451 for discharging liquid crystal on the substrate s, and nozzle support means 452 to which the nozzle 451 is mounted and fixed. At this time, the nozzle support means 452 is mounted on the coupling member 410, the nozzle 451 is fixed to the nozzle support means 452. Here, the nozzle 451 is connected to the other end of the second supply pipe 490 receives the liquid crystal in the syringe 430 through the second supply pipe 490 and discharges it onto the substrate s.

3A is a cross-sectional view illustrating an open state of a first valve according to an embodiment of the present invention, and FIG. 3B is a cross-sectional view illustrating a closed state of a first valve. 4A is a cross-sectional view illustrating an open state of a second valve according to an embodiment of the present invention, and FIG. 4B is a cross-sectional view illustrating a closed state of a first valve.

In the embodiment, the first and second valves 460 and 470 use check valves in which communication is controlled by a change in the pressure inside the syringe 430. In this case, when the first valve 460 is opened, the second valve 470 is closed, and when the first valve 460 is closed, the first and second valves 460, 470 is preferably provided.

First, as shown in FIGS. 3A and 3B, one end of the first valve 460 is connected to the first supply pipe 480, and the other end of the first valve 460 is connected to the inlet 431-1 of the syringe 430. The first housing 461, the first stopper 462 disposed on the inner wall of the first housing 461 so as to face each other, and the first blocking member 463 disposed on the right side of the first stopper 462 and the first blocking unit. The first support member 464 is disposed on the right side of the member 463 to support the first blocking member 463. Here, the first stopper 462 is formed in a shape in which the center region is opened, and the liquid crystal supplied into the first valve 460 through the first supply pipe 480 to the open region of the first stopper 462. This is the passage to move. Hereinafter, an open area of the first stopper 462 is defined as a first outlet hole 462-1. In the embodiment, a spring is used as the first support member 464 and a ball is used as the first blocking member 463. At this time, one end of the first support member 464 is fixed to the inside of the first housing 461 and the other end supports the first blocking member 463. The ball used as the first blocking member 463 is preferably made larger than the diameter of the first outlet hole 462-1 and made smaller than the inner diameter of the first housing 461.

E.g. When the piston rod 441 is moved backward by using the power unit 442 of the driving unit 440, the pressure inside the body portion 431-1 of the syringe 430 decreases. Thus, due to the pressure difference between the injection hole 431-1 communicating with the body part 431 and the body part 431, the body part 431 is disposed inside the injection hole 431-1 in the direction in which the body part 431 is disposed. The pulling force will act. Thus, the first blocking member 463 of the first valve 460 communicating with the injection hole 431-1 moves in the direction in which the injection hole 431-1 is disposed. Thus, as shown in FIG. 3A, the first blocking member 463 and the first stopper 462 are spaced apart from each other to open the first outlet hole 462-1. At this time, since the spring is used as the first support member 464 for supporting the first blocking member 463, the first blocking member 463 can be easily moved in the direction in which the syringe 430 is disposed. In addition, the first support member 464 is compressed in the direction in which the syringe 430 is disposed by the force that the first blocking member 463 moves in the direction in which the syringe 430 is disposed.

Meanwhile, when the piston rod 441 is advanced by using the power unit 442 of the driving unit 440, the pressure inside the syringe 430 increases. Thus, due to the pressure difference between the injection hole 431-1 and the body portion 431 in communication with the internal space of the body portion 431 of the syringe 430, the body portion 431 inside the injection hole 431-1. ) Is pushed in the direction opposite to the direction in which it is arranged. Thus, the first blocking member 463 of the first valve 460 communicating with the injection hole 431-1 moves in a direction opposite to the direction in which the injection hole 431-1 is disposed. Thus, as shown in FIG. 3B, the first blocking member 463 and the first stopper 462 are in close contact with each other to close the first outlet hole 462-1. At this time, the first support member 464 is relaxed compared to when the piston rod 441 reverses due to the force that the first blocking member 463 moves in the direction in which the syringe 430 is disposed.

4A and 4B, one end of the second valve 470 is connected to the outlet 431-2 of the syringe 430, and the other end of the second valve 470 is connected to the second supply pipe 490. The second housing 471, the second stopper 472 mounted on the inner wall of the second housing 471 so as to face each other, and the second blocking member 473 disposed below the second stopper 472, and the second housing 471. The second support member 474 is disposed below the blocking member 473 to move the second blocking member 473. Here, the second stopper 472 is formed in a shape in which the center region is opened, and the liquid crystal supplied into the first valve 460 through the first supply pipe 480 to the open region of the first stopper 472. This is the passage to move. Hereinafter, an open area of the second stopper 472 is defined as a second outlet hole 471-1. In the embodiment, the spring is used as the second support member 474 of the second opening and closing part and the ball is used as the second blocking member 473. At this time, one end of the second support member 474 is fixed to the inside of the second housing 471 and the other end supports the second blocking member 473. Here, the ball used as the second blocking member 473 is preferably made larger than the diameter of the second outlet hole 471-1 and made smaller than the inner diameter of the second housing 471.

For example, when the piston rod 441 is advanced using the power unit 442 of the driving unit 440, the pressure inside the syringe 430 increases. Thus, due to the pressure difference between the outlet portion 431-2 and the body portion 431 communicating with the body portion 431 of the syringe 430, the body portion 431 is disposed inside the outlet portion 431-2. The pushing force acts in the opposite direction to the given direction. As a result, the second blocking member 473 of the second valve 470 connected to the outlet 431-2 moves in a direction opposite to the direction in which the outlet 431-2 is disposed. As described above, as the second blocking member 473 is spaced apart from the second stopper 472, the second outlet hole 471-1 opens. At this time, the second blocking member 473 is supported by the second support member 474 made of a spring. Accordingly, the second support member 474 is compressed in a direction opposite to the direction in which the outlet 431-2 is disposed by the force of the second blocking member 473.

On the other hand, when the piston rod 441 is reversed by using the power unit 442 of the driving unit 440, the pressure inside the syringe 430 decreases. Thus, due to the pressure difference between the outlet portion 431-2 and the body portion 431 communicating with the body portion 431 of the syringe 430, the body portion 431 is disposed inside the outlet portion 431-2. The pulling force acts in the correct direction. Thus, the second blocking member 473 of the second valve 470 communicating with the outlet 431-2 moves in the direction in which the outlet 431-2 is disposed. Accordingly, as shown in FIG. 4B, the second outlet hole 471-1 is sealed as the second blocking member 473 is in close contact with the second stopper 472. At this time, the second support member 474 is loosened in the direction in which the discharge port 431-2 is disposed as the piston rod 441 moves forward by the force that the second blocking member 473 moves.

The first and second valves 460 and 470 are not limited to the above-described check valve. That is, the injection hole 431-1 and the pressure difference between the body portion 431 of the syringe 430 and the injection hole 431-1 and the discharge port 431-2 by the forward and backward movement of the cylinder rod 441 and Any valve capable of controlling the communication of each of the outlets 431-2 may be used.

Further, in the embodiment, the first valve 460 is opened when the cylinder rod 441 is reversed, the first valve 460 is sealed when the cylinder rod 441 is advanced, and the second valve 470 is opened. The case was described. However, the present invention is not limited thereto and vice versa.

5A and 5B are sectional views illustrating the operation of the discharge unit according to the embodiment of the present invention.

First, the substrate s is seated on the stage 100 and the plurality of discharge units 400 are disposed correspondingly on the substrate s. The substrate s according to the embodiment may be a substrate on which a plurality of thin film transistors and pixel electrodes are formed. Then, the liquid crystal is dropped onto the substrate s using the plurality of discharge units 400. Then, the gantry 200 is horizontally moved using the gantry moving means 300, or the liquid crystal is transferred onto the substrate s while the discharge unit moving means 500 horizontally moves the plurality of discharge units 400. It is preferable to add dropping. In order to drop the liquid crystal onto the substrate s, the liquid crystal is first supplied into the syringe 430. To this end, the liquid crystal in the raw material storage unit 420 is supplied to the first supply pipe 480, and the cylinder rod 441 is reversed by using the driving unit 440 as shown in FIG. 5A. As the cylinder rod 441 moves backward in the syringe 430, a pulling force acts in the direction in which the body portion 431 is disposed in each of the inlet 431-1 and the outlet 431-2. Accordingly, the first blocking member 463 of the first valve 460 communicating with the injection hole 431-1 moves in the direction in which the injection hole 431-1 is disposed while the cylinder rod 441 moves backward. The first blocking member 463 is spaced apart from the first stopper 462. As a result, the first outlet hole 462-1 is opened. Accordingly, the liquid crystal in the first supply pipe 480 moves through the first outlet hole 462-1 of the first valve 460 and moves into the syringe 430 while the cylinder rod 441 moves backward. On the other hand, while the cylinder rod 441 moves backward, the second blocking member 473 of the second valve 470 communicating with the outlet 431-2 is opposite to the direction in which the outlet 431-2 is disposed. Move. Accordingly, the second outlet hole 471-1 is sealed as the second blocking member 473 and the second stopper 472 are in close contact with each other. Therefore, the liquid crystal supplied into the syringe 430 while the cylinder rod 441 is backward does not pass through the second outlet hole 471-1 of the second valve 470. Accordingly, the liquid crystal is not supplied to the nozzle 451 of the second supply pipe 490 and the discharge part 450, and thus the liquid crystal is not discharged from the nozzle 451. As such, the liquid crystal is injected into the syringe 430 through the first supply pipe 480 and the first valve 460 while the cylinder rod 441 moves backward. In addition, in the embodiment, the second valve 470 is easily closed while the cylinder rod 441 moves backward and injects liquid crystal into the syringe 430, thereby preventing leakage.

Subsequently, when a predetermined amount of liquid crystal is filled in the syringe 430, the liquid crystal is dropped on the substrate s using the discharge part 450. To this end, as shown in FIG. 5B, the cylinder rod 441 is advanced by using the driving unit 440. As the cylinder rod 441 moves forward in the syringe 430, the first blocking member 463 of the first valve 460 moves in a direction opposite to the direction in which the injection hole 431-1 is disposed. Thus, as the first blocking member 463 and the first stopper 462 are in close contact with each other, the first outlet hole is sealed. In addition, while the cylinder rod 441 moves forward, the second blocking member 473 of the second valve 470 moves in the direction in which the discharge port 431-2 is disposed. Accordingly, the second outlet hole 471-1 opens as the second blocking member 473 is spaced apart from the second stopper 472. Therefore, the liquid crystal in the syringe 430 moves to the second supply pipe 490 through the discharge port 431-2 and the second outlet hole 471-1 of the second valve 470. The liquid crystal of the second supply pipe 490 moves to the nozzle 451, and the nozzle 451 discharges the liquid crystal onto the substrate s. As described above, the liquid crystal inside the syringe 430 moves to the nozzle 451 through the outlet 431-2, the second valve 470, and the second supply pipe 490 while the cylinder rod 441 is advanced. 451 discharges the liquid crystal onto the substrate s. In addition, in the embodiment, the first valve 460 is easily sealed while the cylinder rod 441 is advanced to discharge the liquid crystal onto the substrate s using the nozzle 451, thereby preventing leakage. can do.

The process of advancing and retracting the cylinder rod 441 as described above is repeated a plurality of times to repeat the process of filling the liquid crystal in the syringe 430 and discharging it onto the substrate s.

In this embodiment, the first and second valves connected to the inlet 431-1 and the outlet 431-2 by using the cylinder rod 441 reciprocating in the body 431 of the syringe 430, respectively. Each communication can be easily controlled. Thus, as compared with the related art, it is possible to reduce the incidence of leakage in the process of injecting liquid crystal into the syringe 430 or discharging the liquid crystal from the syringe 430.

In the embodiment, the liquid crystal substrate processing apparatus for discharging the liquid crystal onto the substrate s has been described. However, the present invention is not limited thereto and may be applied to a substrate processing apparatus for dropping or processing various raw materials other than the liquid crystal.

400: discharge unit 430: syringe
431 body 431-1: injection hole
431-2: discharge port 450: discharge part
460: first valve 470: second valve

Claims (11)

A syringe having an inner space in which the raw material is accommodated, and having an inlet for injecting the raw material into the inner space and an outlet for discharging the raw material in the inner space;
A portion of the cylinder rod inserted into the inner space of the syringe to move forward and backward in the syringe;
A first valve, one end of which is connected to the injection port of the syringe and whose communication is controlled according to forward and backward of the cylinder rod;
A second valve having one end connected to the outlet of the syringe, the second valve having communication controlled according to the forward and backward of the cylinder rod,
And one of the first valve and the second valve is opened and the other is sealed by the forward and backward of the cylinder rod. The method according to claim 1,
And a first supply pipe for supplying a raw material to the first valve at the other end of the first valve, and a second supply pipe for discharging the raw material of the second valve to the other end of the second valve. The method according to claim 2,
And a nozzle for discharging the raw material to one end of the second supply pipe. The method according to claim 1,
A discharge unit using a check valve as the first valve and the second valve. The method according to claim 1,
When the first valve is opened by forward or backward of the cylinder rod, the second valve is closed, and when the first valve is closed by forward or backward of the cylinder rod, the second valve is closed. The discharge unit being opened. The method according to any one of claims 1 to 5,
A discharge unit for discharging the raw material from the syringe by continuously injecting the raw material into the syringe by repeating the forward and backward of the cylinder rod a plurality of times. The method according to any one of claims 1 to 6,
Discharge unit using a liquid crystal as the raw material. A stage on which the substrate is placed;
A gantry disposed above the stage;
A discharge unit mounted on the gantry and fixed to discharge the raw material onto the substrate;
The discharge unit includes a syringe having an injection hole for injecting the raw material into the inner space and an outlet for discharging the raw material in the inner space;
A portion of the cylinder rod inserted into the inner space of the syringe to move forward and backward in the syringe;
A first valve, one end of which is connected to the injection port of the syringe and whose communication is controlled according to forward and backward of the cylinder rod;
A second valve having one end connected to the outlet of the syringe, the second valve having communication controlled according to the forward and backward of the cylinder rod,
And one of the first valve and the second valve is opened and the other is closed by the forward and backward of the cylinder rod. The method according to claim 8,
And a check valve as the first and second valves. The method according to claim 8,
When the first valve is opened by forward or backward of the cylinder rod, the second valve is closed, and when the first valve is closed by forward or backward of the cylinder rod, the second valve is closed. Substrate processing apparatus that is opened. The method according to any one of claims 8 to 10,
And injecting a raw material into the syringe continuously by repeating forward and backward of the cylinder rod a plurality of times, and discharging the raw material from the syringe to drop the raw material onto the substrate.

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