KR20110079500A - Barrier film composites, display apparatus comprising the same, manufacturing method of the barrier film composites, and manufacturing method of display apparatus comprising the same - Google Patents

Abstract

PURPOSE: A barrier film complex and display device including the same and manufacturing method of barrier film complex and display device including the same are provided to control or minimize the crack occurrence and protect the organic light-emitting layer from the outer moisture and oxygen. CONSTITUTION: The barrier film complex includes: a film(125); a decoupling layer(115); a barrier layer(120). On the surface of film, wave pattern is formed. The decoupling layer and barrier layer locate in the one side of film. The decoupling layer and barrier layer are laminated as wave pattern at least over mono-layer. The film includes extensive material. The film includes at least one selected from polyethylene, polycarbonate, and combination of the two.

Description

Barrier film composites, display apparatus comprising the same, manufacturing method of the barrier film composites, and manufacturing method of display apparatus comprising the same}

The present invention relates to a barrier film composite, a display device including the same, a method of manufacturing the barrier film composite, and a method of manufacturing the display device including the same.

Thin film barrier composites with alternating layers of barrier material and decoupling material are well known. Such composites are typically formed by depositing alternating layers of barrier material and decoupling material, such as vapor deposition. Decoupling layers typically have a thickness of several tens of micrometers or less, while barrier layers typically have a thickness of several hundred ohms.

There is a need for a stretchable multilayer barrier film composite and a manufacturing method, and a display device including the stretchable multilayer barrier film composite and a method of manufacturing the same.

An object of the present invention is to provide a stretchable barrier film composite, a display device including the same, a method of manufacturing the barrier film composite, and a method of manufacturing the display device including the same.

According to an aspect of the invention, the film having a wavy surface; And a decoupling layer and a barrier layer disposed on one surface of the film and stacked at least one or more layers in the wave shape.

According to another feature of the invention, the film may comprise a stretchable material.

According to another feature of the invention, the film may include at least one selected from polyethylene, polypropylene, polycarbonate, and combinations thereof.

According to another feature of the invention, the film may comprise a stretchable first layer, and a second layer having a wavy surface on the first layer.

According to another feature of the invention, the first layer may comprise a plastic, the second layer may comprise a soft monomer (soft monomer).

According to another feature of the invention, the decoupling layer and the barrier layer may be alternately stacked.

According to another feature of the invention, the decoupling layer may comprise a material that is crosslinked and has a low glass transition temperature.

According to another feature of the invention, the decoupling layer may comprise acrylates.

According to another feature of the invention, the barrier layer comprises a metal, a metal mixture comprising two or more materials, an intermetallic compound or alloy, a metal mixed metal oxide, a metal mixed metal fluoride, a metal mixed metal nitride, a metal At least one selected from mixed metal carbides, mixed metal carbides with metals, mixed metal oxynitrides with metals, mixed metal borides with metals, mixed metal borides with metals, mixed metal silicides with metals, and combinations thereof It may include.

According to another aspect of the invention, the first substrate; A second substrate facing the first substrate; And a light emitting device positioned between the first substrate and the second substrate, wherein at least one of the first substrate and the second substrate is a barrier film composite according to any one of claims 1 to 7. Provided is a display device.

According to another feature of the invention, the light emitting device may be an organic light emitting device.

According to another aspect of the present invention, there is provided a film having a wavy surface; And a decoupling layer and a barrier layer positioned on one surface of the film and stacked at least once in the wave shape.

According to another feature of the invention, further provides a molder having a wavy surface, to form the decoupling layer and the barrier layer to match the molder surface, the film on one side of the decoupling layer and the barrier layer Can be formed.

According to another feature of the invention, forming a wavy surface in the molder may be formed by relief or photolithography.

According to another feature of the invention, the adhesion between the first layer formed on the surface of the molder and the surface of the molder of the decoupling layer and the barrier layer, the adhesive force between the layer formed by the decoupling layer and the barrier layer and the film Can be less than

According to another feature of the present invention, after the formation of the film, the molder can be released from the layer formed by the film, the decoupling layer, and the barrier layer.

According to another feature of the invention, the provision of the film is provided including a first layer and a second layer formed on the first layer, the second layer by locally irradiating the second layer with the first light Can form a wavy surface.

According to another feature of the invention, the first light irradiation may be laser writing or irradiation through a mask.

According to another feature of the present invention, the wavy surface can be fixed by irradiating the second layer with second light.

According to another aspect of the present invention, there is provided a semiconductor device, comprising: providing a first substrate and a second substrate opposite the first substrate; And positioning a light emitting device between the first substrate and the second substrate, wherein at least one of the first substrate and the second substrate includes the barrier film composite described above.

According to another feature of the invention, the light emitting device may be provided as an organic light emitting device.

The barrier film composite according to the present embodiment, a display device including the same, a method of manufacturing the barrier film composite, and a method of manufacturing the display device including the same may provide a flexible structure with a waving polymer.

1A to 1C are schematic views of a barrier film composite and a method of manufacturing the same according to an embodiment of the present invention;
FIG. 2 is a schematic view of an organic light emitting display device to which the barrier film composite of FIG. 1C is applied;
3A to 3C are schematic views of a barrier film composite and a method of manufacturing the same according to another embodiment of the present invention;
4 is a schematic view of a barrier film composite according to another embodiment of the present invention;
5A and 5B are schematic views of a barrier film composite according to another embodiment of the present invention;
6 is a schematic view of a barrier film composite according to another embodiment of the present invention;
7 is a schematic view of a barrier film composite according to another embodiment of the present invention;
FIG. 8 is a schematic view of an organic light emitting display device to which the barrier film composite of FIG. 7 is applied, and
9 is a schematic diagram of a barrier film composite according to another embodiment of the present invention.

Multi-layered barrier coated films are described in US Pat. No. 6,268,695, which is incorporated by reference in the present application, issued July 31, 2001, entitled “Environmental Barrier Material For Organic Light Emitting Device And Method Of Making”; US Patent No. 6,522,067, issued February 18, 2003, entitled “Environmental Barrier Material For Organic Light Emitting Device And Method Of Making”; US Patent No. 6,570,325, issued May 27, 2003, entitled “Environmental Barrier Material For Organic Light Emitting Device And Method Of Making”; US Patent No. 6,866,901, issued March 15, 2005, entitled "Method for Edge Sealing Barrier Films," US Patent No. 7,198,832, issued April 3, 2007, entitled "Method for Edge Sealing Barrier Films"; US Patent Application No. 11 / 068,356, filed February 28, 2005, entitled "Method for Edge Sealing Barrier Films," US Patent Application No. 11, filed March 29, 2007, entitled "Method for Edge Sealing Barrier Films." / 693,020, filed March 29, 2007, entitled "Method for Edge Sealing Barrier Films," US Patent Application No. 11 / 693,022, and July 12, 2007, "Multilayer Barrier Stacks and Methods of Making Multilayer Barrier Stacks" As disclosed in US patent application Ser. No. 11/776616, filed with the title, it produces a barrier film with very good barrier performance.

The number of barrier stacks is unlimited. The number of barrier stacks required depends on the substrate material used and the level of penetration resistance required for the particular application. In some applications, one or two barrier stacks may provide sufficient barrier properties. In the most stringent applications, five or more barrier stacks may be required.

The barrier stack may have one or more decoupling layers, and one or more barrier layers. One decoupling layer and one barrier layer, one or more decoupling layers on one side of one or more barrier layers, one or more decoupling layers on both sides of one or more barrier layers, or One or more barrier layers may be located on both sides of the one or more decoupling layers. An important feature is that the barrier stack has at least one decoupling layer and at least one barrier layer. The barrier layers included in the barrier stack may be made of the same material or different materials as the decoupling layers.

Barrier layers typically have a thickness of about 100 GPa to 2000 GPa. Preferably, the initial barrier layer may be thicker than subsequent barrier layers. For example, the initial barrier layer may range from about 1000 microseconds to about 1500 microseconds, while subsequent barrier layers may range from about 400 microseconds to about 500 microseconds. In other situations, the original barrier layer may be thinner than subsequent barrier layers. For example, the initial barrier layer may range from about 100 microseconds to about 400 microseconds, while subsequent barrier layers may range from about 400 microseconds to about 500 microseconds. The decoupling layers may typically be about 0.1 μm to about 10 μm thick. Preferably, the initial decoupling layer may be thicker than subsequent decoupling layers. For example, the initial decoupling layer may range from about 3 μm to 5 μm, while subsequent decoupling layers may be about 0.1 μm to 2 μm.

The barrier stacks may have the same layers or different layers, and the layers may be formed in the same or different order.

The decoupling layers can be formed of the same decoupling material or other decoupling materials. The decoupling layer may consist of any suitable decoupling materials selected from organic polymers, polymers containing inorganic elements, organometallic polymers, organic / inorganic hybrid polymer systems, and combinations thereof, but is not limited thereto. Organic polymers include urethanes, polyamides, polyimides, polybutylenes, polyisobutylene polyisoprene, polyolefins, epoxys, Parylenes, benzocyclobutadiene, polynorbornenes, polyarylethers, polycarbonates, alkyds, polyaniline, ethylene vinyl acetate vinyl acetate, ethylene acrylic acid, and combinations thereof, but is not limited thereto. Polymers containing inorganic elements include silicon, polyphosphazenes, polysilazanes, polycarbosilanes, polycarboranes, carborane siloxanes, and polishes. But may be selected from, but are not limited to, polysilanes, phosphonitriles, sulfur nitride polymers, siloxanes, and combinations thereof. The organometallic polymer may be selected from main group metals, transition metals, and organometals of lanthanum / actinium metals or combinations thereof, but is not limited thereto. Organic / inorganic hybrid polymer systems include organically modified silicates, preceramic polymers, polyimide-silica hybrids, and (meth) acrylate-silica hybrids. (meth) acrylate-silica hybrids, polydimethylsiloxane-silica hybrids, and combinations thereof, but is not limited thereto.

The barrier layers may be formed of the same barrier material or other barrier materials. The barrier layers can be composed of any suitable barrier materials. Suitable inorganic materials based on metals include individual metals, metal mixtures comprising two or more materials, intermetallic compounds or alloys, metal and mixed metal oxides, metal and mixed metal fluorides, metal and mixed metal nitrides, metal and mixed metal carbides , Metal and mixed metal carbides, metal and mixed metal oxynitrides, metal and mixed metal borides, metal and mixed metal borides, metal and mixed metal silicides, and combinations thereof, but are not limited thereto. It is not. Metals are transition ("d") metals, lanthanide ("f") metals, aluminum, indium, germanium, tin, antimony and bismuth And combinations thereof, but is not limited thereto. Many of the final metals based on the materials may be conductors or semiconductors. Fluoride and oxide may include dielectrics (insulators), semiconductors and metal conductors. Conductor oxides include aluminum doped zinc oxide, indium tin oxide (ITO), antimony tin oxide, titanium oxides (TiOx), where 0.8 ≦ x ≦ 1 ), And tungsten oxides (Wox, where 2.7 ≦ x <3.0)), but are not limited thereto. Suitable inorganic materials based on P block semiconductors and base metals may be selected from, but are not limited to, silicon, silicon mixtures, boron, boron mixtures, carbon mixtures containing amorphous carbon, diamond-like carbon, and combinations thereof. It doesn't happen. Silicone mixtures include silicon oxide (SiOx, where 1 ≦ x ≦ 2), polysilicic acids, alkali and alkaline earth silicates, aluminosilicates (AlxSiOy), silicon nitride (SnxHy) , Where 0 ≦ y <1), silicon oxynitride (SiNxOyHz, where 0 ≦ z <1), silicon carbide (SiCxHy, where 0 ≦ y <1), and silicon aluminum oxynitride (SiAlONs), but It is not limited to this. The boron mixture may be selected from boron carbide, boron nitride, boron oxynitride, boron carbide nitride, and combinations thereof, but is not limited thereto.

Common vacuum processes are sputtering, evaporation, sublimation, chemical vapor deposition (CVD), plasma enhanced chemical vapor deposition (PECVD), and electron cyclotron resonance (electron cyclotron resonance). plasma enhanced vapor deposition ECR-PECVD), and combinations thereof may be deposited by any suitable process, but is not limited thereto.

It can be prepared by a plurality of known processes that provide improved surface flatness, including atmospheric processes and vacuum processes. The decoupling layer may be formed by depositing a liquid layer and then treating the liquid layer with a solid film. Deposition of the decoupling layer into the liquid can cause the liquid to flow over the defects that were in the substrate or the previous layer, filling the low areas and covering the high locations, providing a surface with very improved flatness. When the decoupling layer is treated with a solid film, improved surface flatness is maintained. Suitable processes for depositing a layer with a liquid material and treating the liquid layer with a solid film may include, but are not limited to, a vacuum process and an atmospheric process. Suitable vacuum processes are disclosed in US Pat. Nos. 5,260,095, 5,395,644, 5,547,508, 5,691,615, 5,902,641, 5,440,446, and 5,725,909, all of which are incorporated herein by reference. It is not limited to this. The liquid spreading apparatus disclosed in U.S. Patent Nos. 5,260,095, 5,395,644, and 5,547,508 further discloses the feature of accurately printing liquid monomers in discrete locations of the receiving substrate.

Suitable atmospheric processes may include, but are not limited to, spin coating, printing, inkjet printing, and / or spraying, and the like. By the atmospheric process, it means that the process can be carried out under about 1 atmospheric pressure which can use the ambient atmosphere. The use of atmospheric processes has many requirements, including the need to cycle between the vacuum environment in which the barrier layer is deposited and the ambient conditions for the decoupling layer, and the exposure of environmentally sensitive devices to environmental sources such as oxygen and moisture. Provide difficulties. One way to mitigate these problems is to use a special gas (purge gas) to control the exposure of the receiving substrate to environmental pollutants during the atmospheric process. For example, the process may include cycling between a vacuum environment for barrier layer deposition and an ambient pressure nitrogen environment for an atmospheric process. Printing processes, including inkjet printing, can enable the decoupling layer to be deposited in the correct area without the use of a mask.

One method of making a decoupling layer is to deposit a polymer precursor such as (meth) acrylate containing a polymer precursor and polymerize the polymer precursor in situ to form a decoupling layer. will be. As used herein, the term polymer precursor refers to a material that can be polymerized to form polymers including monomers, oligomers, and resins, but is not limited thereto. As another method of making the decoupling layer, a preceramic precursor may be deposited into the liquid by spin coating and then converted to a solid layer. Films of this type formed directly on glass or oxygen coated substrates are capable of full thermal conversion. Although not fully convertible to ceramic at temperatures compatible with some flexible substrates, partial conversion to cross-lined network structures is satisfactory. Electron beam technology can be used to cross-link and / or dense some of this type of polymer, and if the substrate can control the exposure of the electron beam, it can be combined with thermal technology to overcome the thermal limitations of the substrate. Another method of making the decoupling layer involves depositing a material, such as a polymer precursor, at a temperature above the melting point in the liquid state and cooling the subsequently deposited polymer precursor in place.

A method of making a barrier film composite includes providing a substrate and depositing a barrier layer adjacent the substrate at a barrier deposition station. The substrate on which the barrier layer is formed is moved to a decoupling material deposition station. A mask with an opening is provided, which limits the deposition of the decoupling layer to an area smaller than the area covered by the barrier layer. The deposited first layer can be a barrier layer or a decoupling layer, depending on the design of the barrier film composite.

The multilayer, barrier coating and barrier film thus formed are each flexible. They typically only begin cracking when wrapped with a 7 mm radius spindle. Currently, the thin (about 60 nm) aluminum oxide barrier layer in the barrier coating begins to show cracks near about 0.75% tensile strain. While the optimization of materials and adhesion can shift the threshold of the original crack to a higher value, such multilayer barrier films can be stretched to a few percent elongation.

The original multilayer barrier film has shown almost stress free (the tensile stress of the aluminum oxide layer is only 471 MPa and the tensile stress of the polymer layers is much lower), and as a result the multilayer barrier film according to the process is flat. And no curl occurs under heat treatment.

The barrier properties of the original multilayer barrier film exhibit a water vapor transmission rate (WVTR) of 1 × 10 −6 g / m 2 / day.

Stretchable barrier film composites can be applied to environmentally sensitive materials and objects, and can protect a wide range from flexible displays and solar cells to automotive bumpers, to medical applications for corrosion protection.

Instead of applying wet or spray coatings to three-dimensional objects (such as painting, for example), more and more industries are wet-processing with environmentally unfriendly chemicals, resulting in isolation and waste disposal issues. There is a need for a moldable coating that can be wrapped on a subject (such as a car bumper, for example) without causing the manufacturing company to cause it.

The extensible barrier film composite can be applied to inserting a barrier film into a mold and injecting plastic into the molder to create a three-dimensional object with a barrier coating on the outside.

The stretchable barrier film composite can also potentially be applied to medical packaging for pill individual packaging.

There are a number of ways to recognize such constructs. These methods make use of the flexibility of the barrier layer, or allow for consideration of the barrier layer breaking upon stretching.

It is an object of the present invention to prevent the barrier layer from cracking or to minimize and compensate for cracks. The resulting barrier may not meet a WVTR of 1 × 10 −6 g / m 2 / day, but is still homogeneous, such as polychlorotrifluorene film (ACLAR® film, available from Honeywell International, Inc.). It may have a WVTR that is 100 times better than the barrier film.

1A to 1C are schematic views of a barrier film composite and a method of manufacturing the same according to an embodiment of the present invention.

Referring to FIG. 1A, a molder 105 having a wavy or bubbled surface 110 is provided. As described above, the molder 105 may be embossed or formed by a photolithography method to form the wavy or bubble-shaped surface 110.

The decoupling layer 115 and the barrier layer 120 are formed to match the surface 110 of the molder 105. Accordingly, the decoupling layer 115 and the barrier layer 120 form a highly flexible and elastic wavy structure. As a result, the decoupling layer 115 and the barrier layer 120 have a stretchable structure. The decoupling layer 115 is coated on the surface 110 of the mold 105, and then the barrier layer 120 is sputtered onto the mated decoupling layer 115. Although the decoupling layer 115 is formed directly on the surface 110 of the molder 105 in the figure, as described above, this is an example, and the stacking order of the decoupling layer 115 and the barrier layer 120 may be changed. The decoupling layer 115 may be cross-linked and include acrylates having a low glass transition temperature (Tg) (eg, about 80 ° C. to about 40 ° C.), but are not limited thereto. no. This process can be repeated as many times as needed, resulting in an alternating layer of matched decoupling layer 115 and barrier layer 120.

Referring to FIG. 1B, a film 125 is laminated on one surface of a layer in which the decoupling layer 115 and the barrier layer 120 are alternated. The wave form of the decoupling layer 115 and the barrier layer 120 is transferred to the film 125 to form a wave shape on one surface thereof. The film 125 is formed of a stretchable material. Thus, the base film 125 has a stretchable structure. The base film 125 may include at least one selected from polyethylene, polypropylene, polycarbonate, and a combination thereof, but is not limited thereto.

Referring to FIG. 1C, the molder 105 is released from the barrier film composite 1 including the decoupling layer 115 and the barrier layer 120, and the film 125. In order to facilitate the release of the molder 105 and the barrier film composite 1, the adhesion between the surface 110 of the molder 105 and the layer formed directly on the surface 110 may be achieved by the decoupling layer 115 and the barrier layer. It is better to be smaller than the adhesive force with the 120 and the film 125.

As a result, the molder 105 is released, and the barrier film composite 1 composed of the layer 125 and the film 125 in which the remaining decoupling layer 115 and the barrier layer 120 are alternated is a very flexible and elastic polymer wave. You can provide a structure. In addition, instead of wet or spray coating, it is possible to reduce the problem of environmental pollution by forming a wavy structure using a molding method using the molder 105 as described above.

FIG. 2 is a schematic diagram of an organic light emitting diode display to which the barrier film composite of FIG. 1c is applied.

As described above, the barrier film composite may be applied to environmentally sensitive materials and objects, and may also be applied to flexible display devices. An organic light emitting display device includes an organic light emitting layer vulnerable to oxygen and moisture, and has a high demand as a flexible display device as a next generation display device.

Referring to FIG. 2, in the organic light emitting diode display 100 according to the present exemplary embodiment, an organic light emitting diode 20 is provided on one surface of a substrate 10, and the barrier film composite 1 encapsulates the organic light emitting diode 20. Doing. In the drawings, an example in which the barrier film composite 1 is used as an encapsulation member of the organic light emitting device 20 is illustrated, but the present invention is not limited thereto. The barrier film composite 1 may also be used as the substrate 10. When the barrier film composite 1 is used only as an encapsulation member, the substrate 10 may include a flexible material such as plastic or polyimide.

The organic light emitting diode 20 includes a first electrode layer 21, an organic light emitting layer 23, and a second electrode layer 25.

The first electrode layer 21 and the second electrode layer 25 may be used as one of an anode and a cathode, respectively, and may be used as one of a reflective electrode, a transparent electrode, and a translucent electrode.

The organic light emitting layer 23 may be a low molecular weight organic material or a high molecular weight organic material. When the organic light emitting layer 23 is a low molecular organic material, a hole transport layer (HTL), a hole injection layer (HIL), an electron transport layer (ETL), and electrons are formed around the light emitting layer 23. An injection layer (EIL) or the like may be stacked. In addition, various layers may be stacked as needed. In this case, copper phthalocyanine (CuPc), N'-di (naphthalen-1-yl) -N (N'-Di (naphthalene-1-yl) -N), and N'-diphenyl are usable organic materials. It can be variously applied, including benzine (N'-diphenyl-benzidine (NPB), tris-8-hydroxyquinoline aluminum (Alq3)). Meanwhile, when the organic light emitting layer 23 is a polymer organic material, a hole transport layer (HTL) may be included in addition to the organic light emitting layer 23. The hole transport layer may be polyethylene dihydroxythiophene (PEDOT: poly- (2,4) -ethylene-dihydroxy thiophene), polyaniline (PANI: polyaniline), or the like. In this case, a polymer organic material such as polyvinylvinylene (PPV) or polyfluorene may be used as an organic material that can be used.

As described above, the organic light emitting diode display 100 including the barrier film structure may form a flexible and elastic structure as a result. In addition, the organic light emitting layer may be protected from external moisture and oxygen by suppressing or minimizing crack generation.

The above description has been described based on the organic light emitting diode display, but is not limited thereto. That is, the barrier film composite according to the present embodiment may be applied to various display devices.

3A to 3C are schematic views of a barrier film composite and a method of manufacturing the same according to another embodiment of the present invention.

Referring to FIG. 3A, a second layer 145 is formed on the first layer 140 and the first layer, and a first light irradiation L1 is locally performed on the second layer 145. The first layer 140 may comprise plastic that is a flexible material. The second layer 145 may include a soft monomer having a low glass transition temperature (Tg). Soft monomers include long chain alkyl acrylates including n-butyl acrylate, 2-ethyl hexyl acrylate, iso-octyl acrylate, and the like. loner chain alkyl acrylates). The first light irradiation L1 may be performed by laser writing or irradiation through a mask.

Referring to FIG. 3B, a wavy surface 150 is formed on one surface of the second layer 145 by the first light irradiation L1. One surface of the second layer 145 irradiated locally by the first light irradiation L1 contracts or expands to form a wavy shape, and the shape of the water surface is fixed by the second light irradiation (not shown).

Referring to FIG. 3C, the decoupling layer 115 and the barrier layer 120 are stacked on the wavy surface 150 of the second layer 145 as in the above-described embodiment. Wave forms of the decoupling layer 115 and the barrier layer 120 are transferred on the second layer 145 to form a wave shape on one surface thereof.

As described above, the first layer 140, the second layer 145 having one surface wavy on the first layer 140, the wavy decoupling layer 115, and the barrier layer 120 alternately. The barrier film composite 2 composed of a layered layer can provide a highly flexible and elastic polymer waving structure. In addition, instead of wet or spray coating, it is possible to reduce the problem of environmental pollution by forming a wave structure using light irradiation as described above.

4 is a schematic diagram of a barrier film composite 3 according to another embodiment of the present invention.

The preparation of the three-dimensional barrier described in US patent application Ser. No. 11/627583, filed Jan. 26, 2007, entitled "Three Dimensional Multilayer Barrier And Method Of Making", is incorporated herein by reference.

Referring to FIG. 3, bubbles 310 of polymeric material are surrounded by barrier material 315. The polymeric material 310 is flexible and extensible. When elongated, most bubbles extend but do not break. Even if some bubbles are broken, they will not provide a path directly outward because the broken part is covered by other bubbles.

5A and 5B are schematic views of barrier film composites 4-1 and 4-2 according to another embodiment of the present invention.

Referring to FIG. 5A, the barrier film composite 4-1 includes the formation of double barrier layers 405 and 410. Instead of a single barrier layer, the barrier layers 405 and 410 consist of two barrier layers 405 and 410 separated by a polymer 415 of a rubbery stretchable thin film layer (about 10 nm to about 100 nm). Rubber-extensible polymers may include, but are not limited to, crosslinked acrylates having a low glass transition temperature (Tg).

Referring to FIG. 5B, the polymer layer 415 of the barrier film composite 4-2 may include a getter material 420. The particle size of getter material 120 may be nanometer scale particles (eg, about 1 nm to about 100 nm). The rubber-like stretchable polymer layer 415 may include inorganic oxide or nitride particles to provide a winding path for moisture.

6 is a schematic diagram of a barrier film composite 5 according to another embodiment of the present invention.

Referring to FIG. 6, the barrier film composite 5 has an alternating layer of inorganic barrier layers 505 and decoupling layers 510. Each inorganic barrier layer 505 is covered by a thin film layer 515 of getter material. When the barrier film composite 5 is stretched, cracks occur in the inorganic barrier layer 505, but the getter layer 515 may reduce the effects of the cracks.

7 is a schematic diagram of a barrier film composite 6 according to another embodiment of the present invention.

Referring to FIG. 7, the barrier film composite 6 includes a plurality of barrier layers 605 and decoupling layers 610 that are alternately stacked.

The barrier layer 605 may comprise an inorganic material, and as described above, a metal, a metal mixture comprising two or more materials, an intermetallic compound or alloy, a metal mixed metal oxide, a metal mixed metal fluoride, a metal And mixed metal nitrides, metal and mixed metal carbides, metal and mixed metal carbides, metal and mixed metal oxynitrides, metal and mixed metal borides, metal and mixed metal borides, metal and mixed metal silicides, and their It may include at least one selected from the combination.

The barrier layer 605 includes a first portion 615 and a second portion 620 thinner than the first portion 615. Thus, the second portion 620 has a smaller mechanical strength than the first portion 615. Thus, when tensile force is applied to the barrier film composite 6, the second portion 620 relieves stress so that the barrier film composite 6 can be stretched.

The first portion 615 and the second portion 620 may be formed of the same material. In addition, the first portion 615 and the second portion 620 may be formed of different materials, and the material forming the second portion 620 has a lower mechanical strength than the material forming the first portion 615. It may be a material.

The thickness of the second portion 620 may vary. As shown in the figure, the thickness of the second portion 620 may be a wedge shape that becomes thinner from the edge to the center portion, but is not limited thereto.

A plurality of second portions 620 may be formed in one barrier layer 605. In this case, the pitches P of the plurality of second portions 620 may be the same, but the present invention is not limited thereto. The plurality of second portions 620 as described above may be formed by using a shadow mask, but is not limited thereto.

The barrier film composite 6 may include a plurality of barrier layers 605, and the positions of the second portions 620 formed in the barrier layers 605 may not be overlapped. Thus, when the barrier film composite 6 is stretched, even if a crack occurs inside the barrier layer 605, the distance between the second portions 620 located in each barrier layer 605 becomes further apart. Since the path from the west to the outside becomes long, the influence on the crack can be reduced.

FIG. 8 is a schematic diagram of the organic light emitting diode display 200 to which the barrier film composite of FIG. 7 is applied.

Referring to FIG. 8, in the organic light emitting diode display 200 according to the present exemplary embodiment, an organic light emitting diode 20 is provided on one surface of a substrate 10, and the barrier film composite 6 encapsulates the organic light emitting diode 20. Doing. In the drawings, an example in which the barrier film composite 6 is used as an encapsulation member of the organic light emitting device 20 is illustrated, but the present invention is not limited thereto. The barrier film composite 6 may also be used as the substrate 10. When the barrier film composite 6 is used only as an encapsulation member, the substrate 10 may include a flexible material such as plastic or polyimide.

The organic light emitting diode 20 includes a first electrode layer 21, an organic light emitting layer 23, and a second electrode layer 25. Reference to the organic light emitting diode display 100 is described, and a detailed description of the organic light emitting diode 20 will be omitted.

As described above, the organic light emitting diode display 200 including the barrier film composite 6 may implement a flexible display by forming a flexible and elastic structure. In addition, since the occurrence of cracks or the occurrence of cracks, the distance between the second portions 620 is increased so that the path to the outside becomes long, thereby reducing the influence on the cracks, thereby protecting the organic light emitting layer from external moisture and oxygen. have.

9 is a schematic diagram of a barrier film composite 7 according to another embodiment of the present invention.

Referring to FIG. 9, the barrier film composite 7 alternates on the substrate 705. Inorganic layers 710 and decoupling layers 715 are provided. If partial loss of transmission is allowed, metal ribs 720 may be located inside the inorganic layers 710. The metal ribs 720 may include a material selected from a metal or an alloy, tin, indium, and a combination thereof, but is not limited thereto. The metal ribs 720 may extend without breakage. The metal ribs 720 may be two-dimensional.

Another method of making the barrier film composite may include making an inorganic barrier layer from a ductile flexible metal or metal alloy, such as tin. Such multilayer structures may be translucent or opaque, depending on the number and thickness of layers used. However, if the case does not require a transparent barrier, the Barry film composite can be applied.

Another method of making the barrier film composite is to cover the inorganic barrier layer with a thin layer of nanoparticles of inorganic oxide or nitride. Inorganic barrier layers may crack when stretched, but nanoparticles will reduce the effect of cracks generated by meanderingly increasing the path length.

Another way to make the barrier film composite is to stretch the flexible substrate and deposit inorganic barrier layers on the substrate while it is stretched. The inorganic barrier layer will compress when the tension is removed. Such a structure will make part of the inorganic barrier layer extensible.

While the present invention has been described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, but, on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims. Therefore, the true technical protection scope of the present invention will be defined by the technical spirit of the appended claims.

1,2: barrier film composite 10: substrate
20: organic light emitting element 21: first electrode layer
23: organic light emitting layer 25: second electrode layer
100: organic light emitting display 105: mold
115: decoupling layer 120: barrier layer
125: film 140: first layer
145: second layer

Claims (21)

A film having a wavy surface; And
A barrier film composite comprising: a decoupling layer and a barrier layer positioned on one surface of the film and laminated at least one or more layers in the wave shape. The method of claim 1,
And the film comprises a stretchable material. The method of claim 2,
The film includes at least one selected from polyethylene, polypropylene, polycarbonate, and a combination thereof. The method of claim 1,
And the film comprises a first extensible layer and a second layer having a wavy surface on the first layer. The method of claim 4, wherein
The first layer includes a plastic, and the second layer comprises a soft monomer. The method of claim 1,
The decoupling layer and the barrier layer are alternately stacked barrier film composite. The method of claim 1,
Wherein said decoupling layer is crosslinked and comprises a material having a low glass transition temperature. The method of claim 7, wherein
The decoupling layer comprises a acrylate (acrylates) barrier film composite. The method of claim 1,
The barrier layer is a metal, a metal mixture comprising two or more materials, an intermetallic compound or alloy, a metal mixed metal oxide, a metal mixed metal fluoride, a metal mixed metal nitride, a metal mixed metal carbide, a metal mixed with A barrier film composite comprising at least one selected from metal carbide nitrides, metal and mixed metal oxynitrides, metal and mixed metal borides, metal and mixed metal boride oxides, metal and mixed metal silicides, and combinations thereof. A first substrate;
A second substrate facing the first substrate;
And a light emitting device positioned between the first substrate and the second substrate.
The display device of claim 1, wherein at least one of the first substrate and the second substrate is a barrier film composite according to any one of claims 1 to 7. The method of claim 10,
The light emitting device is an organic light emitting device. Providing a film with a wavy surface; And
Located on one side of the film, to provide a decoupling layer and the barrier layer laminated at least once in the wave shape; manufacturing method of a barrier film composite comprising a. The method of claim 12,
Further provides a molder with a wavy surface,
Forming the decoupling layer and the barrier layer so as to match the mold surface;
The method of claim 1, wherein the film is formed on one surface of the decoupling layer and the barrier layer. The method of claim 13,
Forming a wavy surface in the molder is a method of manufacturing a barrier film composite to form by relief or photo etching. The method of claim 13,
Method for producing a barrier film composite of the decoupling layer and the barrier layer of the first formed on the surface of the molder and the adhesive force between the surface of the molder is less than the adhesive force between the layer formed by the decoupling layer and the barrier layer and the film. . The method of claim 13,
And after the formation of the film, the molder is released from the layer formed by the film and the decoupling layer and the barrier layer. The method of claim 12,
Providing the film includes a first layer and a second layer formed on the first layer, and forming a wavy surface on the second layer by locally irradiating the first layer with the first light. Method of Making Barrier Film Composites. The method of claim 17,
Wherein the first light irradiation is laser writing or irradiation through a mask. The method of claim 17,
The manufacturing method of the barrier film composite which fixes the said wavy surface by irradiating a 2nd light to the said 2nd layer. Providing a first substrate and a second substrate opposite the first substrate;
Positioning a light emitting device between the first substrate and the second substrate;
The method of claim 1, wherein at least one of the first substrate and the second substrate comprises the barrier film composite of claim 8. The method of claim 20,
The light emitting device is a manufacturing method of a display device provided with an organic light emitting device.

Images