KR20110078255A

KR20110078255A - Wet station for reusing and deviding liquid with estimating liquid appartus

Info

Publication number: KR20110078255A
Application number: KR1020090135015A
Authority: KR
Inventors: 노민수
Original assignee: 주식회사 동부하이텍
Priority date: 2009-12-31
Filing date: 2009-12-31
Publication date: 2011-07-07

Abstract

The present invention provides a solution tank, a drain line connected to the solution tank to become a movement path of the chemical liquid or deionized water, and a first branch of the chemical liquid or deionized water connected to one side of the drain line to the wastewater line or the recovery / reuse line. A three-way valve, a second three-way valve connected to one side of the recovery / reuse line for branching the moved chemical or deionized water to a recovery line or reuse line, the chemical liquid connected to one side of the waste water line to the first wastewater line or A third three-way valve branching to the second wastewater line, a first densitometer installed on the drain line, a second densitometer installed on the recovery / reuse line, and a third installed on the wastewater line to measure the concentration of the chemical liquid or deionized water It is determined whether or not drainage, recovery and recycling of the chemical liquid or deionized water according to the concentration meter and the concentration measured by the concentration meter. The third three-way with a solution of an evaluation device that comprises a solution of an evaluation device for controlling the valve, characterized in providing a station that can wet chemical separation and re-use.

Wet Station, Three Way Valve, Densitometer

Description

Wet station capable of separating and reusing chemicals using a solution evaluation device and a control method thereof {Wet Station for reusing and deviding Liquid with estimating Liquid appartus}

The present invention relates to a wet station capable of separating and reusing a chemical solution using a solution evaluation device and a method of controlling the same, and more particularly, after determining a concentration of the chemical liquid discharged from a chemical bath and determining the drainage, The present invention relates to a wet station capable of separating and reusing a chemical liquid using a solution evaluation device having a piping structure according to recovery and recycling, and a control method thereof.

In general, semiconductor devices are manufactured by performing various unit processes on a wafer, and various semiconductor manufacturing facilities are used when performing such unit processes. In the semiconductor manufacturing process, the wet process is mainly a process of cleaning or etching a semiconductor wafer using deionized water and various liquid chemicals.

As the semiconductor device becomes high density and high density and the diameter of the wafer increases, impurities, contaminants, etc. generated on the semiconductor wafer during the etching, ion implantation, diffusion, and metallization process have a great influence on the yield of the product. do. For this reason, in the semiconductor manufacturing process, a cleaning process for removing various contaminants present on the wafer is essentially performed.

The wet station is an apparatus for performing an etching process and a cleaning process required for a wafer manufacturing process, and puts a wafer carrier on which a plurality of wafers are loaded, and performs a plurality of etching processes to perform an etching process and a cleaning process. It has a solution tank of. The solution bath may be classified into a chemical bath, a rinse bath, and a final rinse bath according to the nature of the work.

1 is a view schematically showing a plurality of solution tanks.

Referring to FIG. 1, a conventional wet station is provided with a robot arm 10 for immersing the wafer 20 to etch or clean the wafer 20. In addition, the wafer 20 is immersed in a plurality of solution tanks 30, 40, 50, 60 by the robot arm 10, and an etching or cleaning process of the wafer 20 is performed.

For example, when the solution tank 30 is used as a cleaning tank, the wafer 20 is transferred to the solution tank 30 in which the first chemical liquid is contained, and the wafer is transferred to the first chemical liquid in the solution tank 30. Immerse it. The first chemical liquid in the solution tank 30 is maintained at a predetermined temperature, and the time for which the wafer is immersed in the first chemical liquid is set in advance on the wet equipment.

For example, the wafer 20 transferred by the robot arm 10 may be immersed in a first chemical liquid contained in the solution tank 30 at a temperature of about 65 ° C. for about 300 seconds. In addition, a drain device for draining the chemical liquid used several times in the solution tank 30 is further provided, and the drain device serves to treat the waste water by sending the chemical liquid contained in the solution tank 30 to the waste water. do.

On the other hand, in the conventional wet station, all the chemical liquids discharged are treated with wastewater, and 6000 tons are discarded for a year, which has a problem that greatly affects the cost increase.

The present invention has been made to solve the above problems, by using a solution evaluation device having a piping structure according to the drainage, recovery and recycling by measuring the concentration of the chemical liquid discharged from the chemical bath (chemical bath) It is an object of the present invention to provide a wet station and a control method thereof capable of separating and reusing a chemical solution.

The wet station capable of separating and reusing the chemical solution using the solution evaluation device of the present invention for achieving the above object is a solution tank, a drain line connected to the solution bath and a path for moving the chemical or deionized water, and the drain line. A first three-way valve connected to one side of the branched chemical liquid or deionized water to a wastewater line or a recovery / reuse line, and the chemical liquid or deionized water connected to one side of the recovery / reuse line to a recovery line or a reuse line The second three-way valve for branching, the third three-way valve connected to one side of the waste water line, the third three-way valve for branching to the first waste water line or the second waste water line, the drain line for measuring the concentration of the chemical liquid or deionized water A first densitometer installed at the second, a second densitometer installed at the recovery / reuse line, and a third concentrate installed at the wastewater line System, and is characterized in that formed in accordance with the measured concentration by the density meter determines whether drainage, collection and recycling of the chemical or the deionized water containing a solution of an evaluation device for controlling the first, second and third three-way valve.

In addition, the solution evaluation device is characterized in that by controlling the first, second, third three-way valve at the same time by determining the waste water, recovery or reuse according to the measured concentration of the chemical liquid or deionized water measured only by the first densitometer. do.

According to the wet station capable of separating and reusing the chemical liquid using the solution evaluation device according to the present invention, the chemical liquid or deionized water used in the solution tank can be separated separately, and the concentration of the chemical liquid or deionized water in the process of draining By measuring and setting the flow path formed according to the pollution degree, there is an advantage in that the waste water load can be finally reduced and reused through re-evaluation of the chemical liquid.

Hereinafter, the configuration and operation of the preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings. Here, the same reference numerals will be used for the same components as the prior art.

Figure 2 is a block diagram showing the drainage, recovery and reuse of the chemical liquid or deionized water by controlling each three-way valve according to the concentration measured by each densitometer according to the present invention, Figure 3 is a solution evaluation apparatus according to the present invention Flow chart for controlling each three-way valve.

As shown in FIG. 2, the wet station according to the embodiment of the present invention has a solution tank 110 capable of storing chemical or deionized water, and a three-way valve determining a flow path of the chemical or deionized water ( 300, 310, 320), the concentration meter (200, 210, 220) and the solution evaluation device 400 for measuring the concentration of the chemical or deionized water.

A drain line 130 capable of draining the chemical liquid or deionized water contained in the solution tank 110 and a first movement path of the chemical liquid or deionized water which is mounted on one side of the drain line 130 and moved; A three-way valve 300 and a recovery / reuse line 140 connected to one side of the first three-way valve 300 is a flow path of the chemical liquid or deionized water.

It also includes a second three-way valve 310 is connected to one side of the recovery / reuse 140 line for branching the chemical or deionized water to the recovery line 180 or reuse line 190. In addition, the third three-way valve 320 for providing a movement path of the chemical liquid or deionized water is mounted on one side of the waste water line 190 and the waste water line 150 connected to one side of the first three-way valve 300. ), The first wastewater line 160 which is connected to one side of the third three-way valve 320 and becomes a flow path of the chemical liquid or deionized water, and is connected to and moved to one side of the third three-way valve 320. A second wastewater line 170 that is a flow path of the chemical liquid or deionized water is included.

In addition, the recovery line 180 serves as a guide to a recovery treatment plant, and the reuse line 190 serves as a guide to a predetermined supply device for introducing the chemical liquid or deionized water back into the solution tank. In addition, the wastewater line 150 serves to guide the chemical liquid or deionized water to the wastewater treatment plant. In the present invention, the third three-way valve 320 is provided at one side of the wastewater line 150 to provide a concentration of the chemical liquid or deionized water. The concentrated solution according to the first wastewater line 160 to the low concentration of the solution to the second wastewater line 170 to guide the wastewater treatment according to the concentration.

In addition, the concentration crab is the first concentration meter 200 installed in the drain line 130, the second concentration meter 210 installed in the recovery / reuse line 140 and the waste water line to measure the concentration of the chemical or deionized water. It is installed at 150.

Wherein the three-way valve (300, 310, 320) serves to provide a path of the moving chemical or deionized water, the solution evaluation device (b of Figure 2) of the chemical or deionized water according to the measured concentration by the densitometer (200,210,220) The first, second, and third three-way valves 300, 310, and 320 are independently or sequentially controlled by determining whether to drain, recover, and recycle.

That is, as shown in Figure 3, the wet station control method of the present invention first measures the concentration of the solution from the first densitometer installed on the drainage line, the second densitometer installed on the recovery / reuse line and the third densitometer installed on the wastewater line (S10).

In the solution evaluation apparatus, each of the three-way valves is independently or sequentially controlled by comparing the measured value of each line with a reference value set according to a recipe. In one embodiment, when the measured concentration of the first densitometer exceeds the reference value (S20), the first three-way valve is opened (S30) so that the solution flows into the wastewater line (S30), or when the solution does not exceed the reference value, the recovery / reuse line Open the first three-way valve (S70) to flow to.

Next, when the solution flows to the recovery / reuse line by opening the first three-way valve, when the second concentration meter exceeds the reference value (S80), the second three-way valve is opened (S90) so that the solution flows to the recovery line. If not exceeding the reference value, the second three-way valve is opened so that the solution flows to the reuse line (S100).

On the other hand, when the solution flows to the wastewater line by opening the first three-way valve, when the third concentration meter exceeds the reference value (S40), the third three-way valve is opened (S50) so that the solution flows to the first wastewater line; If the reference value is not exceeded, the third three-way valve is opened to allow the solution to flow into the second wastewater line (S60).

And, the solution discharged to the reuse line 190 may be connected to a predetermined supply device (not shown) that can be re-introduced into the solution tank 110, in this case, the chemical liquid moved to the reuse line 180 Or deionized water will be the case of the lowest pollution.

The solution tank 110 includes a plurality of chemical tanks 210 and 410 in which a liquid is used for etching or cleaning the wafer 200 immersed therein, and a cleaning tank in which deionized water is used ( 310 and 510, and a drying unit 610 for drying the etched or cleaned wafer 200. And, of course, the number and use of the wet station can be changed according to the change of implementation.

Therefore, by controlling the three-way valve through the solution evaluation device for comparing the concentration value measured by the densitometer installed in each line with the chemical liquid or deionized water drained from the solution tank, the chemical liquid or deionized water to meet the draining purpose By separating so as to increase the utilization of the chemical or deionized water used.

It is apparent to those skilled in the art that the present invention is not limited to the above embodiments and can be practiced in various ways without departing from the technical spirit of the present invention. will be.

1 is a view schematically showing a plurality of solution tanks.

Figure 2 is a block diagram showing the drainage, recovery and reuse of the chemical liquid or deionized water by controlling each three-way valve in accordance with the concentration measured by each concentration meter according to the present invention.

Figure 3 is a flow chart for controlling each three-way valve by the solution evaluation device according to the present invention.

110: solution tank 130: drainage line

140: recovery / reuse line 150: wastewater line

160: first wastewater line 170: second wastewater line

180: recovery line 190: reuse line

200, 210, 220: Densitometer 300, 310, 320: Three-way valve

400: solution evaluation device

Claims

A solution tank, a drain line connected to the solution tank to become a movement path of the chemical liquid or deionized water, a first three-way valve connected to one side of the drain line and branching the chemical liquid or deionized water to a wastewater line or a recovery / reuse line, A second three-way valve connected to one side of the recovery / reuse line and branching the moved chemical liquid or deionized water to a recovery line or a reuse line, and the chemical liquid connected to one side of the waste water line to the first wastewater line or the second wastewater; Third three-way valve branching into line,

A first densitometer installed in said drainage line, a second densitometer installed in said recovery / reuse line, and a third densitometer installed in said wastewater line for measuring the concentration of chemical liquid or deionized water, and

And a solution evaluation device for controlling the first, second and third three-way valves by determining whether the chemical liquid or deionized water is drained, recovered and recycled according to the concentration measured by the densitometer. Wet station for chemical separation and reuse.

According to claim 1, wherein the solution evaluation device

Using the solution evaluation device characterized in that for controlling the first, second, third three-way valve at the same time by determining the waste water, recovery or reuse according to the measured concentration of the chemical liquid or deionized water measured only by the first densitometer Wet station for chemical separation and reuse.

Measuring the concentration of the solution from a first densitometer installed in the drainage line, a second densitometer installed in the recovery / reuse line, and a third densitometer installed in the wastewater line;

When the measured concentration of the first densitometer exceeds the reference value, opening the first three-way valve so that the solution flows to the waste water line, or opening the first three-way valve so that the solution flows to the recovery / reuse line if the solution does not exceed the reference value step;

If the solution flows into the recovery / reuse line and the second concentration meter exceeds a reference value, opening the second three-way valve to flow the solution into the recovery line; And

If the solution flows to the wastewater line and the third densitometer exceeds a reference value, opening the third three-way valve to flow the solution to the first wastewater line. Control method of wet station that can be separated and reused.