KR20110071434A - Electrolytic copper foil improved in structure of surface treatment layer and method for producing the same, and copper clad laminate and printed circuit board having the same - Google Patents

Electrolytic copper foil improved in structure of surface treatment layer and method for producing the same, and copper clad laminate and printed circuit board having the same Download PDF

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KR20110071434A
KR20110071434A KR1020090128002A KR20090128002A KR20110071434A KR 20110071434 A KR20110071434 A KR 20110071434A KR 1020090128002 A KR1020090128002 A KR 1020090128002A KR 20090128002 A KR20090128002 A KR 20090128002A KR 20110071434 A KR20110071434 A KR 20110071434A
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copper foil
surface treatment
treatment layer
copper
electrolytic copper
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KR1020090128002A
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Korean (ko)
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KR101168613B1 (en
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김승민
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엘에스엠트론 주식회사
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/04Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B15/08Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/20Layered products comprising a layer of metal comprising aluminium or copper
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/28Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42
    • B32B27/281Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42 comprising polyimides
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/38Electroplating: Baths therefor from solutions of copper
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00Electrical equipment
    • B32B2457/08PCBs, i.e. printed circuit boards

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroplating Methods And Accessories (AREA)

Abstract

PURPOSE: An electrolytic copper foil with improved structure of surface treatment layer, a manufacturing method thereof, a copper clad laminate and a printed circuit board are provided to improve heat resistance due to an optimization of concentration of barrier element, and to prevent an etchant from penetrating on the edge area of pattern. CONSTITUTION: The electrolytic copper foil is composed of a copper film(100); and a surface processing layer(101). The surface processing layer has a plurality of copper nodules and is formed in the surface of the copper film. The rate of thickness of the surface processing layer takes 5-30% as to the one adding the copper film and the surface processing layer. The rate of the multi nodule among copper nodules is less than 10%. The surface processing layer includes a plurality of barrier elements more attached on the copper nodule. The electrodeposition amount of the barrier element is 0.02~1.00g per 1m^2. The gravimetric anomaly of the electrodeposited copper foil is below 2g /m^2.

Description

표면처리층의 구조가 개선된 전해동박 및 그 제조방법과, 동장적층판 및 인쇄회로기판{Electrolytic copper foil improved in structure of surface treatment layer and method for producing the same, and copper clad laminate and printed circuit board having the same}Electrolytic copper foil improved in structure of surface treatment layer and method for producing the same, and copper clad laminate and printed circuit board having the same }

본 발명은 전해동박에 관한 것으로서, 특히 에칭(etching) 및 박리강도(peel strength) 특성이 우수한 전해동박 및 그 제조방법과, 동장적층판 및 인쇄회로기판에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrolytic copper foil, and more particularly, to an electrolytic copper foil having excellent etching and peel strength characteristics, a method of manufacturing the same, and a copper clad laminate and a printed circuit board.

인쇄회로기판의 제작에 사용되는 기초소재인 전해동박은 전기도금법으로 구리 원박을 제조하는 제박공정과, 구리 원박에 대하여 노듈 처리, 내약품 처리, 내열 처리, 방청 처리 등을 수행하는 후처리 공정을 통하여 제조된다.Electrolytic copper foil, which is a basic material used in the manufacture of printed circuit boards, is manufactured through the electroplating process, which manufactures copper foils, and the post-treatment process that performs nodule treatment, chemical treatment, heat treatment, and antirust treatment on copper foils. Are manufactured.

통상의 제박공정에 의해 제조된 구리 원박은 제박장치의 음극 드럼에서 박리되어 상대적으로 조도가 낮은 광택면(S면: Shiny Side)과, 광택면(S면)의 타면에 위치하고 상대적으로 조도가 높은 매트면(M면: Matte Side)을 포함한다.The copper foil prepared by the usual milling process is peeled from the cathode drum of the mill and is placed on the other side of the relatively low gloss surface (S side: Shiny side) and the gloss side (S side) and has a relatively high roughness. Matte side (M side) is included.

상기 구리 원박은 후처리 공정에서 구리 노듈(Cu-nodule)과 배리어(barrier) 등을 형성하는 표면처리를 거침으로써 인쇄회로기판용으로 적합한 물리적, 화학적 특성이 부여된다.The copper foil is subjected to a surface treatment to form a copper nodule and a barrier in a post-treatment process, thereby giving physical and chemical properties suitable for a printed circuit board.

후처리 공정에 의해 구리 원박의 매트면(M면) 위에는 구리노듈층이 형성되고, 구리노듈층 위에는 니켈(Ni), 크롬(Cr) 등의 도금층인 배리어층이 형성되어 내열, 내염산성, 내산화성 등이 부여된다. 배리어층 위에는 동박에 접착되는 수지 필름과의 접착력을 향상시키기 위해 실란 커플링 에이전트(silane coupling agent)가 추가로 피막된다.By the post-treatment process, a copper nodule layer is formed on the mat surface (M surface) of the copper foil, and a barrier layer, which is a plating layer such as nickel (Ni) and chromium (Cr), is formed on the copper nodule layer to provide heat resistance, hydrochloric acid resistance, and Oxidative properties and the like are imparted. On the barrier layer, a silane coupling agent is further coated to improve the adhesion with the resin film adhered to the copper foil.

전해동박은 그 표면처리층의 구조에 의해 주요 물리적, 화학적 특성이 결정되는 바, 후처리 공정이 제대로 이루어지지 않을 경우에는 동박과 수지 필름 간의 접착 신뢰성이 좋지 않고 에칭성, 박리강도, 내굴곡성 등에 열화가 발생할 수 있다.Since the main physical and chemical properties of the electrolytic copper foil are determined by the structure of the surface treatment layer, when the post-treatment process is not performed properly, the adhesion reliability between the copper foil and the resin film is poor and the etching, peeling strength, flex resistance, and the like deteriorate. May occur.

특히, 최근에 전해동박은 휴대용 전자기기의 굴곡 부위에 적용되는 연성 인쇄회로기판(FPC)용 연성동장적층판(FCCL)의 소재로 널리 사용되므로 회로 패턴의 크랙(Crack)이나, 단선 등을 방지하기 위해서는 에칭성이나 박리강도 특성이 우수한 동박이 제공되어야 한다.In particular, recently, electrolytic copper foil is widely used as a material of flexible copper clad laminate (FCCL) for flexible printed circuit boards (FPC), which is applied to curved portions of portable electronic devices, to prevent cracks or disconnection of circuit patterns. Copper foil excellent in etching properties and peel strength properties should be provided.

본 발명은 상기와 같은 점을 고려하여 창안된 것으로서, 동박에서 표면처리층이 차지하는 비율이 최적화되어 에칭 및 박리강도 특성이 향상된 전해동박 및 그 제조방법과, 동장적층판 및 인쇄회로기판을 제공하는 데 그 목적이 있다.The present invention has been made in view of the above, and the present invention provides an electrolytic copper foil, a method of manufacturing the same, and a copper clad laminate and a printed circuit board having improved etching and peel strength characteristics by optimizing the proportion of the surface treatment layer in the copper foil. There is a purpose.

본 발명의 다른 목적은 표면처리층을 이루는 구리 노듈이나 배리어의 형성 구조가 개선된 전해동박 및 그 제조방법과, 동장적층판 및 인쇄회로기판을 제공하는 데 있다.Another object of the present invention is to provide an electrolytic copper foil having improved structure of a copper nodule or barrier forming a surface treatment layer, a method of manufacturing the same, and a copper clad laminate and a printed circuit board.

본 발명의 목적은 상술한 과제에 제한되지 않으며, 언급되지 않은 또 다른 기술적 과제들은 본 발명의 실시예에 의해 명확하게 이해될 수 있을 것이다.The object of the present invention is not limited to the above-described problem, and other technical problems not mentioned will be clearly understood by the embodiments of the present invention.

상기와 같은 목적을 달성하기 위해 본 발명에 따른 전해동박은 구리 원박; 및 다수의 구리 노듈을 포함하도록 상기 구리 원박의 표면에 형성된 표면처리층;을 구비하고, 상기 구리 원박과 표면처리층을 합한 전체 두께에 대한 상기 표면처리층 두께의 비율이 5~30%인 것을 특징으로 한다.Electrolytic copper foil according to the present invention to achieve the above object is copper foil; And a surface treatment layer formed on the surface of the copper foil to include a plurality of copper nodules, wherein the ratio of the thickness of the surface treatment layer to the total thickness of the copper foil and the surface treatment layer is 5 to 30%. It features.

상기 구리 노듈 중에서 멀티노듈의 비율은 10% 미만인 것이 바람직하다.It is preferable that the ratio of the multi-nodules in the said copper nodules is less than 10%.

상기 표면처리층은 상기 구리노듈 위에 전착된 다수의 배리어 원소를 더 포함하고, 상기 배리어 원소의 전착량은 1㎡당 0.02~1.00g인 것이 바람직하다.The surface treatment layer further includes a plurality of barrier elements electrodeposited on the copper nodule, the electrodeposition amount of the barrier element is preferably 0.02 ~ 1.00g per m 2.

상기 전해동박의 중량편차는 2g/㎡ 이하인 것이 바람직하다.It is preferable that the weight deviation of the said electrolytic copper foil is 2 g / m <2> or less.

상기 구리 원박의 매트면(M면) 쪽에 위치한 표면처리층의 표면조도(Rz)는 0.5~3.5㎛인 것이 바람직하다.It is preferable that the surface roughness Rz of the surface treatment layer located in the mat surface (M surface) side of the said copper foil is 0.5-3.5 micrometers.

상기 구리 원박과 표면처리층을 합한 전체 두께는 5~70㎛인 것이 바람직하다.It is preferable that the total thickness which combined the said copper foil and the surface treatment layer is 5-70 micrometers.

본 발명의 다른 측면에 따르면, 구리 원박과, 다수의 구리 노듈을 포함하도록 상기 구리 원박의 표면에 형성된 표면처리층을 구비하고, 상기 구리 원박과 표면처리층을 합한 전체 두께에 대한 상기 표면처리층 두께의 비율이 5~30%인 전해동 박; 및 상기 구리 원박의 매트면(M면) 쪽에 위치한 표면처리층에 부착된 폴리이미드(PI) 필름;을 포함하는 것을 특징으로 하는 동장적층판이 제공된다.According to another aspect of the present invention, a copper foil and a surface treatment layer formed on the surface of the copper foil to include a plurality of copper nodules, the surface treatment layer for the total thickness of the copper foil and the surface treatment layer combined Electrolytic copper foil having a thickness ratio of 5 to 30%; And a polyimide (PI) film attached to the surface treatment layer located on the mat surface (M surface) of the copper foil.

본 발명의 또 다른 측면에 따르면, 구리 원박과, 다수의 구리 노듈을 포함하도록 상기 구리 원박의 표면에 형성된 표면처리층;을 구비하고, 상기 구리 원박과 표면처리층을 합한 전체 두께에 대한 상기 표면처리층 두께의 비율이 5~30%인 전해동박; 및 상기 구리 원박의 매트면(M면) 쪽에 위치한 표면처리층에 부착된 폴리이미드(PI) 필름;을 포함하는 동장적층판을 구비한 것을 특징으로 하는 인쇄회로기판이 제공된다.According to another aspect of the invention, the copper foil and the surface treatment layer formed on the surface of the copper foil to include a plurality of copper nodules; and the surface for the total thickness of the combined copper foil and the surface treatment layer Electrolytic copper foil whose ratio of the thickness of the treated layer is 5 to 30%; And a copper-clad laminate comprising a polyimide (PI) film attached to a surface treatment layer positioned on a mat surface (M surface) of the copper foil.

본 발명의 또 다른 측면에 따르면, 전기도금법으로 구리 원박을 제조하는 제박공정과, 상기 구리 원박의 매트면(M면)에 구리 노듈을 포함하는 표면처리층을 형성하는 표면처리공정을 포함하고, 상기 구리 원박과 표면처리층을 합한 전체 두께에 대한 상기 표면처리층 두께의 비율이 5~30%가 되도록 상기 표면처리층을 형성하는 것을 특징으로 하는 전해동박의 제조방법이 제공된다.According to still another aspect of the present invention, there is provided a manufacturing process of manufacturing a copper foil by an electroplating method, and a surface treatment process of forming a surface treatment layer including a copper nodule on a mat surface (M surface) of the copper foil. A method for producing an electrolytic copper foil is provided, wherein the surface treatment layer is formed such that the ratio of the thickness of the surface treatment layer to the total thickness of the copper foil and the surface treatment layer is 5 to 30%.

본 발명에 따른 전해동박은 최적화된 표면처리층의 비율에 의해 박리강도 특성이 향상되어 수지와의 접착 신뢰성이 우수하고 내굴곡성이 뛰어나며, 회로 패턴 형성을 위한 에칭 후 잔동이 발생하지 않는 장점이 있다.The electrolytic copper foil according to the present invention has the advantage that the peel strength property is improved by the ratio of the optimized surface treatment layer, so that the adhesive strength with the resin is excellent, the bending resistance is excellent, and the residual after the etching for the circuit pattern formation does not occur.

또한, 배리어 원소의 농도가 최적화됨으로써 내열성이 우수하고, 에칭 작업 시 에칭액이 패턴의 에지(edge) 부분으로 침투되는 현상이 방지될 수 있다.In addition, by optimizing the concentration of the barrier element, the heat resistance is excellent, and the phenomenon that the etching liquid penetrates into the edge portion of the pattern during the etching operation can be prevented.

따라서, 본 발명에 따른 전해동박을 FPC, FCCL, COF(Chip On Film) 등에 적 용할 경우 연성회로 패턴의 크랙(Crack)이나, 단선 등의 발생을 효과적으로 방지할 수 있다.Therefore, when the electrolytic copper foil according to the present invention is applied to FPC, FCCL, or Chip On Film (COF), it is possible to effectively prevent the occurrence of cracks or disconnection of the flexible circuit pattern.

이하, 첨부된 도면을 참조하여 본 발명의 바람직한 실시예를 상세히 설명하기로 한다. 이에 앞서, 본 명세서 및 청구범위에 사용된 용어나 단어는 통상적이거나 사전적인 의미로 한정해서 해석되어서는 아니되며, 발명자는 그 자신의 발명을 가장 최선의 방법으로 설명하기 위해 용어의 개념을 적절하게 정의할 수 있다는 원칙에 입각하여 본 발명의 기술적 사상에 부합하는 의미와 개념으로 해석되어야만 한다. 따라서, 본 명세서에 기재된 실시예와 도면에 도시된 구성은 본 발명의 가장 바람직한 일 실시예에 불과할 뿐이고 본 발명의 기술적 사상을 모두 대변하는 것은 아니므로, 본 출원시점에 있어서 이들을 대체할 수 있는 다양한 균등물과 변형예들이 있을 수 있음을 이해하여야 한다.Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. Prior to this, terms or words used in the specification and claims should not be construed as having a conventional or dictionary meaning, and the inventors should properly explain the concept of terms in order to best explain their own invention. Based on the principle that can be defined, it should be interpreted as meaning and concept corresponding to the technical idea of the present invention. Therefore, the embodiments described in the specification and the drawings shown in the drawings are only the most preferred embodiment of the present invention and do not represent all of the technical idea of the present invention, various modifications that can be replaced at the time of the present application It should be understood that there may be equivalents and variations.

먼저, 도 1에는 전해동박의 베이스가 되는 구리 원박의 제조를 위한 제박장치의 구성이 도시되어 있다.First, in FIG. 1, the structure of the foil manufacturing apparatus for manufacture of the copper raw foil used as the base of an electrolytic copper foil is shown.

도 1을 참조하면, 제박장치는 전해액(10)이 지속적으로 공급되는 용기(C)와, 용기(C) 내에 회전 가능하게 설치된 음극 드럼(20)과, 용기(C) 내에서 드럼(20)으로부터 이격되게 설치된 애노드(30)를 포함한다.Referring to FIG. 1, the milling device includes a container C to which the electrolyte solution 10 is continuously supplied, a negative electrode drum 20 rotatably installed in the container C, and a drum 20 in the container C. Referring to FIG. An anode 30 is installed spaced apart from the.

구리 원박(100)을 제조하는 제박공정시 회전드럼(20)은 화살표 방향으로 회전하고, 드럼(20)과 애노드(30)에는 전원이 공급되어 전해액(10)을 매개로 하여 전류가 흐름으로써 전착 과정이 진행된다. 드럼(2) 표면에 전착된 구리 원박(100)은 가이드 롤(50)에 의해 권취(take up) 된다.During the manufacturing process of manufacturing the copper foil 100, the rotating drum 20 rotates in the direction of the arrow, and the drum 20 and the anode 30 are supplied with electric power, and the electrode flows through the electrolytic solution 10 for electrodeposition. The process goes on. The copper foil 100 electrodeposited on the drum 2 surface is taken up by the guide roll 50.

전해액(10)은 황산구리를 주성분으로 하고, 젤라틴, HEC, 황화물계 화합물, 질화물 등과 같은 각종 첨가제를 포함하여 구성된다.The electrolyte solution 10 is composed of copper sulfate as a main component, and includes various additives such as gelatin, HEC, sulfide compounds, nitrides, and the like.

드럼(20)과 애노드(30) 사이에는 10~80ASD의 전류밀도로 직류전원이 공급되고, 이에 따라 드럼(20) 상에 구리가 전착되어 구리 원박(100)이 제조된다.DC power is supplied between the drum 20 and the anode 30 at a current density of 10 to 80 ASD, and thus copper is electrodeposited on the drum 20 to produce a copper foil 100.

이렇게 제조된 구리 원박(100)은 드럼(20)의 표면에서 박리되어 상대적으로 조도가 낮은 광택면(S면: Shiny Side)과, 광택면(S면)의 타면에 위치하고 상대적으로 조도가 높은 매트면(M면: Matte Side)을 포함한다.The copper foil 100 thus prepared is peeled off the surface of the drum 20 to have a relatively low gloss surface (S-side: Shiny Side) and a mat having a relatively high roughness on the other side of the gloss-side (S-side). It includes the side (M side: Matte Side).

구리 원박(100)의 제조가 완료된 후에는 구리 원박의 매트면(M면)에 대하여 구리 노듈을 형성하고, 내약품성, 내열성, 방청성 등을 부여하기 위한 배리어 원소를 전착하는 표면처리공정이 진행된다.After the production of the copper foil 100 is completed, a surface treatment step of forming a copper nodule on the mat surface (M surface) of the copper foil and electrodepositing a barrier element for imparting chemical resistance, heat resistance, and rust resistance is performed. .

표면처리공정에서는 구리 원박을 구리 도금조에 통과시켜 구리 원박의 매트면(M면)에 구리 노듈을 형성하고, 이어서 구리 노듈 위에 배리어 원소를 전착하는 공정을 수행한다. 이때 표면처리층의 두께 비율이나 구리 노듈의 구조, 배리어 원소의 전착량 등의 인자를 후술하는 바와 같이 조절하면 에칭성과 박리강도 특성 등이 우수한 전해동박을 제조할 수 있다.In the surface treatment step, the copper foil is passed through a copper plating bath to form a copper nodule on the mat surface (M surface) of the copper foil, followed by electrodeposition on the copper nodule. At this time, by adjusting factors such as the thickness ratio of the surface treatment layer, the structure of the copper nodule, and the electrodeposition amount of the barrier element as described below, an electrolytic copper foil having excellent etching properties and peel strength characteristics and the like can be produced.

도 2는 표면처리공정에 의해 구리 원박(100)의 매트면(M면) 위에 표면처리층(101)이 형성된 전해동박의 단면 구성을 관찰한 SEM(주사전자현미경) 사진이다.FIG. 2 is a SEM (scanning electron microscope) photograph observing the cross-sectional configuration of an electrolytic copper foil having a surface treatment layer 101 formed on a mat surface (M surface) of a copper foil 100 by a surface treatment process.

도 2를 참조하면, 전해동박에 있어서 표면처리층(101)의 두께 비율은 5~30%를 만족하도록 구성된다. 표면처리층(101)의 두께 비율은, 구리 원박(100)의 두께 와 표면처리층(101)의 두께를 합한 전체 두께에서 표면처리층(101)의 두께가 차지하는 백분율로 정의된다.Referring to FIG. 2, in the electrolytic copper foil, the thickness ratio of the surface treatment layer 101 is configured to satisfy 5 to 30%. The thickness ratio of the surface treatment layer 101 is defined as a percentage of the thickness of the surface treatment layer 101 in the total thickness of the sum of the thickness of the copper foil 100 and the thickness of the surface treatment layer 101.

표면처리층(101)의 두께 비율이 5% 미만인 경우에는 폴리이미드(PI)나 FR(Flame Retardant)-4와 같은 수지 필름의 접착시 수지 필름과 전해동박 간의 박리강도가 충분히 확보되지 못하고, 표면처리층(101)의 두께 비율이 30%를 초과할 경우에는 회로 패턴의 형성을 위한 에칭 후 잔동이 발생하게 된다.When the thickness ratio of the surface treatment layer 101 is less than 5%, the peeling strength between the resin film and the electrolytic copper foil may not be sufficiently secured when the resin film such as polyimide (PI) or flame retardant (FR) -4 is adhered. If the thickness ratio of the layer 101 exceeds 30%, residual after etching for the formation of the circuit pattern occurs.

바람직하게 구리 원박(100)과 표면처리층(101)을 합한 전체 두께는 5~70㎛로 결정된다.Preferably, the total thickness of the copper foil 100 and the surface treatment layer 101 is determined to be 5 to 70 μm.

표면처리층(101)에 포함된 구리 노듈 중에서 멀티노듈이 차지하는 비율은 10% 미만인 것이 바람직하다. 멀티노듈은 도 3에 도시된 바와 같이 구리 원박(100)의 바로 위에 형성된 지지노듈(일점쇄선 표시 참조)과 상기 지지노듈의 말단부에 부착된 미세노듈(점선 표시 참조)을 포함하고, 상기 미세노듈의 개수가 2개 이상인 노듈로 정의된다. 도 4를 참조할 때, 미세노듈(103)은 그 최대폭(W2)이 0.5㎛ 이상이며 지지노듈(102)의 최대폭(W1)에 비해 상대적으로 크기가 작은 조건을 만족해야 한다.Among the copper nodules included in the surface treatment layer 101, the ratio of the multinodules is preferably less than 10%. As shown in FIG. 3, the multi-nodule includes a support nodule formed on the copper foil 100 (see dashed line marking) and a micronodal attached to the distal end of the support nodule (see dashed line display). It is defined as a nodule having two or more. Referring to FIG. 4, the fine nodule 103 has to satisfy a condition in which the maximum width W2 is 0.5 μm or more and is relatively small in size compared to the maximum width W1 of the support module 102.

멀티노듈의 비율이 10% 이상인 경우에는 회로 패턴의 형성을 위한 에칭 후 잔동이 발생하게 된다.The ratio of multinodules In the case of 10% or more, after-etch residues for the formation of the circuit pattern are generated.

표면처리층(101)에는 구리 노듈 위에 전착된 다수의 배리어 원소가 포함된다. 여기서, 배리어 원소로는 바나듐(V), 크롬(Cr), 몰리브덴(Mo), 규소(Si), 철(Fe), 니켈(Ni), 코발트(Co), 아연(Zn), 탄소(C), 인(P)의 단일체, 합금 또는 화 합물이 채용된다.The surface treatment layer 101 includes a plurality of barrier elements electrodeposited on the copper nodule. Here, the barrier element is vanadium (V), chromium (Cr), molybdenum (Mo), silicon (Si), iron (Fe), nickel (Ni), cobalt (Co), zinc (Zn), carbon (C) , Monoliths, alloys or compounds of phosphorus (P) are employed.

배리어 원소의 전착량은 전해동박 1㎡당 0.02~1.00g인 것이 바람직하다. 배리어 원소의 전착량이 전해동박 1㎡당 0.02g 미만인 경우에는 동박의 내열성이 저하되고, 전해동박 1㎡당 1.00g을 초과하는 경우에는 회로 패턴의 형성을 위한 에칭공정에서 에칭액이 패턴의 에지부로 침투되는 현상이 발생한다.It is preferable that the electrodeposition amount of a barrier element is 0.02-1.00g per 1m <2> of electrolytic copper foil. When the electrodeposition amount of the barrier element is less than 0.02 g per 1 m 2 of electrolytic copper foil, the heat resistance of the copper foil decreases, and when the amount of the barrier element exceeds 1.00 g per 1 m 2 of electrolytic copper foil, the etching solution penetrates into the edge portion of the pattern in an etching process for forming a circuit pattern. This happens.

그밖에, 에칭성, 박리강도, 내굴곡성 등을 보다 향상시키기 위해 전해동박 상의 각 포인트의 중량편차는 2g/㎡ 이하인 것이 바람직하며, 구리 원박(100)의 매트면(M면) 쪽에 위치한 표면처리층(101)의 표면조도(Rz)는 0.5~3.5㎛인 것이 바람직하다.In addition, the weight deviation of each point on the electrolytic copper foil is preferably 2 g / m 2 or less in order to further improve the etching resistance, peel strength, flex resistance, and the like, and the surface treatment layer (located on the mat surface (M surface) side of the copper foil 100) It is preferable that the surface roughness Rz of 101) is 0.5-3.5 micrometers.

본 발명의 다른 측면에 따르면, 전해동박의 표면처리층(101)에 폴리이미드(Polyimide) 수지가 부착된 구조를 가진 동장적층판이 제공된다. 폴리이미드 수지는 IC칩 본딩 등의 안정성을 위해 전해동박과 열팽창률이 유사하고 내열성이 뛰어난 특성이 있다.According to another aspect of the present invention, a copper clad laminate having a structure in which a polyimide resin is attached to a surface treatment layer 101 of an electrolytic copper foil is provided. Polyimide resins have similar thermal expansion coefficients and excellent heat resistance to the stability of IC chip bonding and the like.

본 발명의 또 다른 측면에 따르면 상기 동장적층판을 구비하고, 에칭 공정에 의해 상기 동장적층판에 소정의 회로 패턴이 형성되는 인쇄회로기판이 제공된다.According to still another aspect of the present invention, there is provided a printed circuit board including the copper clad laminate and having a predetermined circuit pattern formed on the copper laminate by an etching process.

아래의 표 1에는 본 발명의 실시예들에 따른 전해동박의 박리강도(P/S) 특성 및 잔동유무 특성을 종래기술(비교예)과 비교한 결과가 나타나 있다.Table 1 below shows the results of comparing the peel strength (P / S) characteristics and the presence or absence of the characteristics of the electrolytic copper foil according to the embodiments of the present invention (comparative example).

본 발명의 실시예와 비교예에서는 12㎛ 두께의 전해동박을 제조하였으며, 박리강도 특성은 표면처리층(101) 위에 0.8㎜ 두께의 FR-4 수지 필름을 접착한 후 JIS C 6481 시험 및 측정 규격에 따라 평가하고, 잔동유무 특성은 SEM을 이용해 패 턴 형성 후 회로가 형성되지 않은 수지면의 임의의 4 포인트를 2000배로 관찰하여 1㎛ 이상의 구리 잔사가 있는지 여부에 따라 평가하였다.In the examples and comparative examples of the present invention, an electrolytic copper foil having a thickness of 12 μm was prepared, and the peel strength property was measured by applying a 0.8 mm thick FR-4 resin film on the surface treatment layer 101 to JIS C 6481 test and measurement standard. According to the evaluation, the presence or absence of the residual property was evaluated according to the presence or absence of copper residue of 1 μm by observing at 2000 times any four points of the surface where the circuit was not formed after pattern formation using SEM.

Figure 112009078930954-PAT00001
Figure 112009078930954-PAT00001

표 1을 참조하면, 본 발명의 실시예 1 내지 4에서는 표면처리층(101)의 두께(Ttm) 비율이 5~30%의 범위를 만족하고, 멀티노듈의 비율이 10% 미만의 범위를 만족함으로써 FR-4 수지 필름과 전해동박 간의 박리강도가 1.08kgf/cm 이상으로 충분히 확보되고 에칭 후 잔동이 발생하지 않음을 확인할 수 있다.Referring to Table 1, in Examples 1 to 4 of the present invention, the thickness (Ttm) ratio of the surface treatment layer 101 satisfies the range of 5 to 30%, and the ratio of the multinodule satisfies the range of less than 10%. As a result, the peeling strength between the FR-4 resin film and the electrolytic copper foil is sufficiently secured to be 1.08 kgf / cm or more, and it can be confirmed that no residual after etching occurs.

한편, 비교예 1은 멀티노듈의 비율이 10% 미만의 범위를 만족하지만 표면처리층(101)의 두께(Ttm) 비율이 5% 미만인 경우로서, 잔동이 발생하지는 않았으나 FR-4 수지 필름과 전해동박 간의 박리강도가 0.92kgf/cm로 좋지 않음을 확인할 수 있다.On the other hand, Comparative Example 1, although the ratio of the multi-nodule satisfies the range of less than 10% When the thickness (Ttm) ratio of the surface treatment layer 101 is less than 5%, no residual material is generated, but it can be confirmed that the peel strength between the FR-4 resin film and the electrolytic copper foil is not good as 0.92 kgf / cm.

비교예 2는 멀티노듈의 비율이 10% 미만의 범위를 만족하지만 표면처리층(101)의 두께(Ttm) 비율이 30%를 초과하는 경우로서, FR-4 수지 필름과 전해동박 간의 박리강도가 1.43kgf/cm로 우수하긴 하나, 에칭 후 잔동이 발생함을 확인할 수 있다.Comparative Example 2 is a case where the ratio of the multinodule satisfies the range of less than 10% but the thickness (Ttm) ratio of the surface treatment layer 101 exceeds 30%, and the peel strength between the FR-4 resin film and the electrolytic copper foil is 1.43. excellent in kgf / cm, It can be seen that after etching, residuals are generated.

또한, 비교예 3은 표면처리층(101)의 두께(Ttm) 비율이 5~30%의 범위를 만족하지만 멀티노듈의 비율이 10%를 초과하는 경우로서, FR-4 수지 필름과 전해동박 간의 박리강도가 1.35kgf/cm로 우수하긴 하나, 에칭 후 잔동이 발생함을 확인할 수 있다.In addition, Comparative Example 3 is a case where the thickness (Ttm) ratio of the surface treatment layer 101 satisfies the range of 5 to 30%, but the ratio of the multinodule exceeds 10%, and peeling between the FR-4 resin film and the electrolytic copper foil. Although the strength is excellent at 1.35 kgf / cm, it can be seen that after etching, residual material is generated.

상술한 바와 같이 본 발명에서는 전해동박에 형성되는 표면처리층의 두께 비율과 멀티노듈의 비율 등을 최적화함으로써 종래기술에 비해 향상된 에칭성과 박리강도 특성 등을 제공할 수 있다.As described above, in the present invention, by improving the ratio of the thickness of the surface treatment layer formed on the electrolytic copper foil, the ratio of the multinodules, and the like, it is possible to provide improved etching properties and peel strength characteristics compared to the prior art.

이상에서 본 발명은 비록 한정된 실시예와 도면에 의해 설명되었으나, 본 발명은 이것에 의해 한정되지 않으며 본 발명이 속하는 기술분야에서 통상의 지식을 가진 자에 의해 본 발명의 기술사상과 아래에 기재될 특허청구범위의 균등범위 내에서 다양한 수정 및 변형이 가능함은 물론이다.Although the present invention has been described above by means of limited embodiments and drawings, the present invention is not limited thereto and will be described below by the person skilled in the art to which the present invention pertains. Of course, various modifications and variations are possible within the scope of the claims.

본 명세서에 첨부되는 다음의 도면들은 본 발명의 바람직한 실시예를 예시하는 것이며, 상술한 발명의 상세한 설명과 함께 본 발명의 기술사상을 더욱 이해시키는 역할을 하는 것이므로, 본 발명은 그러한 도면에 기재된 사항에만 한정되어 해석되어서는 아니된다.The following drawings, which are attached to this specification, illustrate preferred embodiments of the present invention, and together with the detailed description of the present invention serve to further understand the technical spirit of the present invention, the present invention includes matters described in such drawings. It should not be construed as limited to.

도 1은 구리 원박의 제조를 위한 제박장치의 구성도,1 is a block diagram of a milling apparatus for producing a copper foil,

도 2는 본 발명의 바람직한 실시예에 따른 전해동박의 단면 구성을 관찰한 SEM 사진,2 is a SEM photograph observing the cross-sectional configuration of the electrolytic copper foil according to a preferred embodiment of the present invention,

도 3은 본 발명의 바람직한 실시예에 따른 전해동박에 형성된 멀티노듈을 관찰한 SEM 사진,Figure 3 is a SEM photograph of the multi-nodules formed on the electrolytic copper foil according to a preferred embodiment of the present invention,

도 4는 본 발명의 바람직한 실시예에 따른 전해동박에 형성된 멀티노듈의 구성도이다.4 is a configuration diagram of a multinodule formed on an electrolytic copper foil according to a preferred embodiment of the present invention.

<도면의 주요 참조 부호에 대한 설명><Description of Major Reference Marks in Drawings>

100: 구리 원박 101: 표면처리층100: copper foil 101: surface treatment layer

102: 지지노듈 103: 미세노듈102: support module 103: fine module

Claims (14)

구리 원박; 및Copper foil; And 다수의 구리 노듈을 포함하도록 상기 구리 원박의 표면에 형성된 표면처리층;을 구비하고,A surface treatment layer formed on the surface of the copper foil so as to include a plurality of copper nodules; 상기 구리 원박과 표면처리층을 합한 전체 두께에 대한 상기 표면처리층 두께의 비율이 5~30%인 것을 특징으로 하는 전해동박.Electrolytic copper foil, characterized in that the ratio of the thickness of the surface treatment layer to the total thickness of the copper foil and the surface treatment layer combined. 제1항에 있어서,The method of claim 1, 상기 구리 노듈 중에서 멀티노듈의 비율이 10% 미만인 것을 특징으로 하는 전해동박.Electrolytic copper foil, characterized in that the proportion of the multi-nodule in the copper nodule is less than 10%. 제1항에 있어서,The method of claim 1, 상기 표면처리층은 상기 구리 노듈 위에 전착된 다수의 배리어 원소를 더 포함하고,The surface treatment layer further includes a plurality of barrier elements electrodeposited on the copper nodule, 상기 배리어 원소의 전착량이 1㎡당 0.02~1.00g인 것을 특징으로 하는 전해동박.Electrolytic copper foil, the electrodeposition amount of the barrier element is 0.02 ~ 1.00g per m 2. 제1항 내지 제3항 중 어느 한 항에 있어서,The method according to any one of claims 1 to 3, 동박의 중량편차가 2g/㎡ 이하인 것을 특징으로 하는 전해동박.The electrolytic copper foil characterized by the weight deviation of copper foil being 2 g / m <2> or less. 제1항 내지 제3항 중 어느 한 항에 있어서,The method according to any one of claims 1 to 3, 상기 구리 원박의 매트면(M면) 쪽에 위치한 표면처리층의 표면조도(Rz)가 0.5~3.5㎛인 것을 특징으로 하는 전해동박.Electrolytic copper foil, characterized in that the surface roughness (Rz) of the surface treatment layer located on the mat surface (M surface) side of the copper foil foil is 0.5 ~ 3.5㎛. 제1항 내지 제3항 중 어느 한 항에 있어서,The method according to any one of claims 1 to 3, 상기 구리 원박과 표면처리층을 합한 전체 두께가 5~70㎛인 것을 특징으로 하는 전해동박.Electrolytic copper foil characterized in that the total thickness of the combined copper foil and the surface treatment layer is 5 ~ 70㎛. 구리 원박과, 다수의 구리 노듈을 포함하도록 상기 구리 원박의 표면에 형성된 표면처리층을 구비하고, 상기 구리 원박과 표면처리층을 합한 전체 두께에 대한 상기 표면처리층 두께의 비율이 5~30%인 전해동박; 및A copper foil and a surface treatment layer formed on the surface of the copper foil to include a plurality of copper nodules, wherein the ratio of the thickness of the surface treatment layer to the total thickness of the copper foil and the surface treatment layer combined is 5-30%. Phosphorus electrolytic copper foil; And 상기 구리 원박의 매트면(M면) 쪽에 위치한 표면처리층에 부착된 폴리이미드(PI) 필름;을 포함하는 것을 특징으로 하는 동장적층판.And a polyimide (PI) film attached to the surface treatment layer located on the mat surface (M surface) of the copper foil. 구리 원박과, 다수의 구리 노듈을 포함하도록 상기 구리 원박의 표면에 형성된 표면처리층;을 구비하고, 상기 구리 원박과 표면처리층을 합한 전체 두께에 대한 상기 표면처리층 두께의 비율이 5~30%인 전해동박; 및And a surface treatment layer formed on the surface of the copper foil so as to include a copper foil and a plurality of copper nodules, wherein the ratio of the thickness of the surface treatment layer to the total thickness of the copper foil and the surface treatment layer is 5 to 30. Electrolytic copper foil which is%; And 상기 구리 원박의 매트면(M면) 쪽에 위치한 표면처리층에 부착된 폴리이미드(PI) 필름;을 포함하는 동장적층판을 구비한 것을 특징으로 하는 인쇄회로기판.And a copper-clad laminate comprising a polyimide (PI) film attached to a surface treatment layer positioned on a mat surface (M surface) of the copper foil. 전기도금법으로 구리 원박을 제조하는 제박공정과,A manufacturing process for producing a copper foil by the electroplating method, 상기 구리 원박의 매트면(M면)에 구리 노듈을 포함하는 표면처리층을 형성하는 표면처리공정을 포함하고,It includes a surface treatment step of forming a surface treatment layer containing a copper nodule on the mat surface (M surface) of the copper foil, 상기 구리 원박과 표면처리층을 합한 전체 두께에 대한 상기 표면처리층 두께의 비율이 5~30%가 되도록 상기 표면처리층을 형성하는 것을 특징으로 하는 전해동박의 제조방법.And forming the surface treatment layer such that the ratio of the thickness of the surface treatment layer to the total thickness of the copper foil and the surface treatment layer is 5 to 30%. 제9항에 있어서, 상기 표면처리공정에서,The method according to claim 9, wherein in the surface treatment step, 멀티노듈의 비율이 10% 미만이 되도록 상기 구리 노듈을 형성하는 것을 특징으로 하는 전해동박의 제조방법.A method for producing an electrolytic copper foil, wherein the copper nodule is formed such that the proportion of the multinodules is less than 10%. 제9항에 있어서, 상기 표면처리공정에서,The method according to claim 9, wherein in the surface treatment step, 상기 구리노듈 위에 다수의 배리어 원소를 전착하는 단계;를 더 포함하고,Electrodepositing a plurality of barrier elements on the copper nodules; 상기 배리어 원소의 전착량이 1㎡당 0.02~1.00g인 것을 특징으로 하는 전해동박의 제조방법.Electrode copper foil manufacturing method characterized in that the electrodeposition amount of the barrier element is 0.02 ~ 1.00g per 1m2. 제9항에 있어서, 상기 표면처리공정에서,The method according to claim 9, wherein in the surface treatment step, 동박의 중량편차가 2g/㎡ 이하가 되도록 상기 표면처리층을 형성하는 것을 특징으로 하는 전해동박의 제조방법.The said surface treatment layer is formed so that the weight deviation of copper foil may be 2 g / m <2> or less, The manufacturing method of the electrolytic copper foil characterized by the above-mentioned. 제9항에 있어서, 상기 표면처리공정에서,The method according to claim 9, wherein in the surface treatment step, 상기 구리 원박의 매트면(M면) 쪽에 위치한 표면처리층의 표면조도(Rz)가 0.5~3.5㎛가 되도록 상기 표면처리층을 형성하는 것을 특징으로 하는 전해동박의 제조방법.The surface treatment layer is formed so that the surface roughness (Rz) of the surface treatment layer located on the mat surface (M surface) side of the copper foil is 0.5 to 3.5 μm. 제9항에 있어서, 상기 표면처리공정에서,The method according to claim 9, wherein in the surface treatment step, 상기 구리 원박과 표면처리층을 합한 전체 두께가 5~70㎛가 되도록 상기 표면처리층을 형성하는 것을 특징으로 하는 전해동박의 제조방법.A method for producing an electrolytic copper foil, wherein the surface treatment layer is formed such that the total thickness of the copper foil and the surface treatment layer is 5 to 70 μm.
KR1020090128002A 2009-12-21 2009-12-21 Electrolytic copper foil improved in structure of surface treatment layer and method for producing the same, and copper clad laminate and printed circuit board having the same KR101168613B1 (en)

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WO2015102322A1 (en) * 2013-12-30 2015-07-09 일진머티리얼즈 주식회사 Copper foil, and electrical part and battery comprising same
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KR20170088602A (en) * 2016-01-25 2017-08-02 엘에스엠트론 주식회사 Electrolytic copper foil and method for producing the same, and copper clad laminate and printed circuit board having the same
KR20170099588A (en) 2016-02-24 2017-09-01 엘에스엠트론 주식회사 Copper Foil Capable of Improving Peer Strength between Nonconductive Polymer Film and The Same, Method for Manufacturing The Same, and Flexible Copper Clad Laminate Comprising The Same
KR20170126775A (en) 2016-05-10 2017-11-20 엘에스엠트론 주식회사 Electrolytic Copper Foil Having Low Surface Roughness, Method for Manufacturing The Same, Flexible Copper Clad Laminate Comprising The Same, Anode Comprising The Same, and Secondary Battery Comprising The Same
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