KR20110040217A - A damping device and method for reducing external oscillation used for a coating apparatus and a coating apparatus having the same - Google Patents

Abstract

PURPOSE: Damping device and method for reducing external oscillation are provided to maintain the coated height of a substrate and nozzle by minimizing the influence caused by external oscillation and to keep the uniform coating amount of a coating solution. CONSTITUTION: A damping device for reducing external oscillation comprises an external oscillation sensor(220), a controller(224), a damping material(224), and an actuator(228). The external oscillation sensor is provided between a base member(B) and the ground and senses NOW of the ground. The controller is connected to the external oscillation sensor and transfers the signal of IOW for reducing the NOW. The damping material is installed in the base member and produces IOW in response to the signal. The actuator vibrates the base member according to IOW.

Description

A damping device and method for reducing external oscillation used for a coating apparatus and a coating apparatus having the same}

The present invention relates to an external vibration damping device and method for use in a coating device, and a coating device having the same. More specifically, the present invention provides an external vibration damping device to a coating device used for manufacturing a flat panel display (hereinafter referred to as "FPD") such as a PDP panel or an LCD panel, thereby receiving external vibration received by the coating device. External vibration damping apparatus and method for use in a coating apparatus, wherein the coating liquid applied on the substrate can be applied to a uniform thickness (or height) by minimizing the effect thereof, and thus a markedly improved coating quality, and It relates to a coating apparatus having this.

In general, the manufacture of FPD requires the application of a coating liquid on a work piece, such as a glass substrate (hereinafter referred to as a "substrate"), for which a nozzle dispenser or slit die (hereinafter referred to as nozzle dispenser and A coating apparatus with a slit die collectively referred to as a "nozzle apparatus" is used.

Figure 1a is a perspective view schematically showing a coating apparatus according to the prior art.

Referring to FIG. 1A, the coating apparatus 40 according to the related art places the substrate G on the stage 76 and then moves the nozzle apparatus 78 attached to the gantry 130 in linear motion. : LM) The coating operation of various coating liquids is performed while moving in the horizontal direction along the guide 96. Examples of the coating operation of the coating liquid include forming photoresist (PR), black matrix (BM), column space (CS), and the like on the LCD panel substrate when manufacturing the LCD panel. The coating liquid can be applied. In the case of manufacturing a PDP panel, a coating liquid may be applied to form a dielectric, a lower dielectric, and a partition on a PDP panel substrate.

In the above-described coating apparatus 40 of the prior art, the nozzle device 78 is installed on the substrate G while the substrate G is positioned on the stage 76 and the stage 76 is moved to the coating position. ) And the gantry 130 to which the nozzle device 78 is attached is a nozzle moving type structure that moves on the substrate G, and thus, precise driving of the coating device 40 is difficult and complicated. More specifically, enormous energy is required for the movement of the large weight large nozzle apparatus 78, the gantry 130, and the stage 76. In addition, after the coating solution is applied, the gantry 130 to which the nozzle device 78 is attached needs to be returned to its original position to repeat the above-described operation, thereby causing a problem that the efficiency of the coating solution coating operation is lowered. In addition, the nozzle apparatus 78 and the gantry 130 must be enlarged according to the demand of the large area FPD. The weight of the enlarged gantry 130 is approximately 1 to 2 tonnes, so that it is difficult to implement a driving device for precisely accelerating or decelerating the huge gantry 130 while moving.

As a way to solve the problems of the above-described conventional nozzle movement type coating apparatus, the floating substrate transfer apparatus for applying the coating liquid to the surface of the substrate while floating and transporting the substrate through the injection or spraying and suction of air is Proposed.

1B is a view schematically showing a perspective view of a substrate transfer apparatus and a coating apparatus having a floating method according to the prior art, Figure 1C is a substrate transfer apparatus and a floating method according to the prior art shown in Figure 1b 1D schematically shows a front view of a coating apparatus, and FIG. 1D shows a part of an arrangement pattern of air ejection openings and air intake openings in a loading region, a coating region, and an unloading region of a prior art floating substrate transfer apparatus. One drawing. The substrate transfer apparatus of the floating method according to the related art shown in FIGS. 1B to 1D and the coating apparatus having the same are, for example, a "coating method and coating apparatus" by Tokyo Electron Co., Ltd. on March 20, 2006. It is disclosed in detail in Japanese Patent Application Laid-Open No. 2007-252971, filed under Japanese Patent Application No. 2006-76815 under the name of the invention, and published on October 4, 2007.

Referring again to FIGS. 1B to 1D, the floating coating apparatus 40 according to the prior art includes a floating substrate transfer apparatus 84. The substrate G is placed on the suction pad 104 on the support 102 provided on the pair of sliders 98 that are movable on the pair of linear motion guides 96 by a plurality of lift pins 86. Mounted on the vacuum adsorption method. Only a plurality of air jets 88 are provided on the loading region M1 region. The substrate G passes through the first interface region (M2 region) by the floating substrate transfer device 84 in the state of floating on the loading region (M1 region) at the floating height Ha in the range of approximately 250 to 350 μm. It is transported onto the coating area (M3 area shown in FIG. 1B) (ie in the X direction). Thereafter, while the substrate G enters the first interface region M2 region, its floating height gradually decreases, and then enters the coating region M3 region. In the coating region M3 region, the substrate G is transferred in the X-axis direction while maintaining the floating state at a coating height Hb of approximately 50 mu m. In this coating area (M3 area), the nozzle device 78 receives a coating liquid (for example, a resist liquid) through the supply pipe 94 and applies the coating liquid onto the substrate G. Thereafter, the substrate G coated with the coating liquid is transferred to the second interface region M4 region, and its floating height gradually increases. Subsequently, the substrate G enters the unloading region M5 region, and the substrate G is vacuum supplied from the adsorption pad 104 while the substrate G is raised to the floating height Hc in the range of approximately 250 to 350 μm. Adsorption is released. Subsequently, the substrate G is lifted by a plurality of lift pins 86 provided below the stage 76 of the unloading region M5 region and then transferred to the next process position by a robot arm (not shown). .

However, the coating apparatus 40 of the nozzle movement method according to the prior art shown in FIG. 1A described above, or the coating apparatus 40 of the floating method according to the prior art shown in FIGS. 1B to 1D is an external environment of the installation place. Depends on some. More specifically, when the conventional coating apparatus 40 is installed and used in a specific building (eg, a factory), it is influenced by the natural frequency of the specific building itself. That is, since the coating device 40 is fixedly installed in a specific building and vibrates according to the natural frequency of the specific building itself, the coating device 40 is also vibrated by the external vibration of the specific building. Such external vibrations are, for example, regular low frequencies with a natural frequency of several hundreds of hundreds of Hz and wavelengths of several tens of meters.

The external vibration as described above causes a problem that the coating height between the nozzle device 78 and the substrate G positioned on the coating device 40 is not kept constant. In addition, when the coating height between the nozzle device 78 and the substrate G is not kept constant, the height difference of the coating liquid applied on the substrate G and staining accordingly occur.

More specifically, FIG. 1E schematically illustrates the relationship between the coating state of the coating liquid according to the coating height between the substrate G and the nozzle apparatus.

Referring to FIG. 1E, when the coating height between the substrate G and the nozzle apparatus 78 is low (h1), the amount of the coating liquid discharged from the nozzle apparatus 78 onto the substrate G is small. On the other hand, when the coating height between the substrate G and the nozzle apparatus 78 is high (h2), the amount of coating liquid discharged from the nozzle apparatus 78 onto the substrate G is large. Therefore, if the coating height between the substrate G and the nozzle apparatus 78 is not uniform, the amount of coating liquid applied on the substrate G is changed, so that it is impossible to maintain uniformity of the coating thickness of the coating liquid. Such spotting (ie, difference in coating thickness of the coating liquid) occurs.

In particular, when a precise coating liquid application is required according to the high resolution of the large area of the substrate G, the above-described external vibration has a greater influence, so that the problem of staining may be more important and serious.

In addition, as described above, staining caused by external vibration may reduce coating quality of the final product or increase the possibility of defects of the final product. As a result, the manufacturing cost and time of the final product is increased and productivity is lowered.

Therefore, a new method for solving the above-mentioned problems is required.

The present invention is to solve the above-mentioned problems of the prior art, by providing an external vibration damping device to the coating apparatus used for manufacturing a flat panel display (FPD) to minimize the influence of the external vibration received by the coating apparatus on the substrate To provide an external vibration damping apparatus and method for use in a coating apparatus, and a coating apparatus having the same, in which the coating liquid to be applied is applied to a uniform thickness (or height), thereby ensuring a markedly improved coating quality. will be.

According to a first aspect of the invention, in the external vibration damping device used in the coating apparatus, provided between the base member (B) of the coating apparatus and the ground, the outer for sensing the natural vibration waveform (NOW) of the ground Vibration detection sensor; A controller connected to the external vibration detection sensor and transmitting a signal of an inverse vibration waveform (IOW) for attenuating the natural vibration waveform; A damping member mounted to the base member (B) and configured to generate the reverse oscillation waveform (IOW) in response to the signal received from the controller; And an actuator mounted to the damping member and vibrating the base member B according to the reverse oscillation waveform IOW.

According to a second aspect of the invention, there is provided a coating apparatus, comprising: a stage movably mounted on a base member (B); A gantry provided movably on a substrate (G) positioned on the stage; A nozzle device fixedly mounted to the gantry; An external vibration sensor provided between the base member (B) and the ground to sense natural vibration of the ground; A controller connected to the external vibration detection sensor and transmitting a signal of an inverse vibration waveform (IOW) for attenuating the natural vibration waveform; A damping member mounted to the base member (B) and configured to generate the reverse oscillation waveform (IOW) in response to the signal received from the controller; And an actuator mounted to the damping member and vibrating the base member B according to the reverse oscillation waveform IOW.

According to a third aspect of the invention, there is provided a coating apparatus, comprising: a coating area stage supported by a base member (B) and providing a coating area; A substrate transfer device that mounts and transfers the substrate G by mounting in a vacuum suction method; A nozzle device provided on the coating area stage and applying a coating liquid on the substrate (G); A gantry on which the nozzle device is mounted; An external vibration sensor provided between the base member (B) and the ground to sense natural vibration of the ground; A controller connected to the external vibration detection sensor and transmitting a signal of an inverse vibration waveform (IOW) for attenuating the natural vibration waveform; A damping member mounted to the base member (B) and configured to generate the reverse oscillation waveform (IOW) in response to the signal received from the controller; And an actuator mounted to the damping member and vibrating the base member B according to the reverse oscillation waveform IOW.

According to a fourth aspect of the present invention, in an external vibration attenuation method used in a coating apparatus, a) natural vibration of the ground using an external vibration sensing sensor provided between the base member (B) of the coating apparatus and the ground; Detecting and transmitting a waveform NOW to the controller 224; b) generating a signal corresponding to an inverse vibration waveform (IOW) for attenuating the natural vibration waveform by using the controller and transmitting the signal to a damping member mounted to the base member (B); c) generating an inverse vibration waveform (IOW) in response to the signal received from the controller using the damping member; And d) vibrating the base member (B) according to the reverse oscillation waveform (IOW) by using an actuator mounted to the damping member.

The following advantages are achieved in external vibration damping devices and methods used in coating devices, and coating devices having the same.

1. Since the influence of external vibration is minimized, the coating height between the substrate G and the nozzle apparatus is kept constant, and thus the coating amount of the coating liquid is kept constant, thereby significantly improving the coating quality.

2. The difference in coating thickness of the coating solution (ie staining) is minimized, thereby minimizing the possibility of defects in the final product.

3. Productivity is increased because the manufacturing cost and time of the final product is significantly reduced.

Further advantages of the present invention can be clearly understood from the following description with reference to the accompanying drawings, in which like or similar reference numerals denote like elements.

Hereinafter, the present invention will be described in detail with reference to embodiments and drawings.

FIG. 2A is a view schematically illustrating an external vibration damping device and a coating device having the same according to an embodiment of the present invention, and FIG. 2B is a view illustrating the embodiment of the present invention shown in FIG. 2A. In the case of using an external vibration damping device used in the coating device is a view showing a vibration state of the coating device. Coating apparatus 240 according to an embodiment of the present invention shown in the embodiment of Figure 2a except for the external vibration damping device 200, the coating apparatus 40 of the prior art nozzle movement method shown in Figure 1a Or substantially the same as the prior art nozzle floating coating apparatus 40 shown in FIGS. 1B-1D.

2A and 2B, the external vibration damping device 200 used in the coating apparatus 240 according to an embodiment of the present invention is the base member B and the ground of the coating apparatus 240. An external vibration sensor 220 provided between the external vibration detection sensor 220 to detect a natural oscillation waveform (Natural Oscillation Waveshape NOW) of the ground; A controller 224 connected to the external vibration sensor 220 and transmitting a signal of an inverse oscillation waveform (IOW) to attenuate the natural vibration waveform; A damper member 224 mounted to the base member B and configured to generate the reverse oscillation waveform IOW in response to the signal received from the controller 224; And an actuator 228 mounted to the damping member 224 to vibrate the base member B according to the reverse oscillation waveform IOW. Here, the external vibration damping device 200 used in the coating device 240 according to an embodiment of the invention is connected to the controller 224, the natural vibration waveform (NOW) and the reverse vibration waveform (IOW) Or a final oscillation waveform attenuated by the sum of the natural vibration waveform (NOW), the reverse vibration waveform (IOW), and the sum of the natural vibration waveform (NOW) and the reverse vibration waveform (IOW). ROW) or a monitoring device 226 for displaying the final vibration waveform ROW.

In addition, the coating apparatus 240 according to an embodiment of the present invention includes a stage 276 that is movably mounted on the base member (B); A gantry 230 movably provided on a substrate G positioned on the stage 276; A nozzle device 278 fixedly mounted to the gantry 230; An external vibration sensor 220 provided between the base member B and the ground to sense natural vibration of the ground; A controller 224 connected to the external vibration sensor 220 and transferring a signal of an inverse vibration waveform (IOW) for attenuating the natural vibration waveform (NOW); A damping member (224) mounted to the base member (B) and generating the reverse oscillation waveform (IOW) in response to the signal received from the controller (224); And an actuator 228 mounted to the damping member and vibrating the base member B according to the reverse oscillation waveform IOW.

2A and 2B together with FIGS. 1B-1D, a coating apparatus 240 according to an alternative embodiment of an embodiment of the present invention is supported by a base member B, and the coating area M3. A coating area stage (not shown) for providing; A substrate transfer device 84 for mounting and transporting the substrate G by mounting in a vacuum suction method; A nozzle device (78 or 278) provided on said coating area stage, for applying a coating liquid onto said substrate (G); A gantry 230 to which the nozzle device 78 or 278 is mounted; An external vibration sensor 220 provided between the base member B and the ground to sense natural vibration of the ground; A controller 224 connected to the external vibration detection sensor 220 and transmitting a signal of an inverse vibration waveform (IOW) for attenuating the natural vibration waveform (NOW); A damping member (224) mounted to the base member (B) and generating the reverse oscillation waveform (IOW) in response to the signal received from the controller (224); And an actuator 228 mounted to the damping member and vibrating the base member B according to the reverse oscillation waveform IOW.

Hereinafter, specific components and operations of the external vibration damping apparatus 200 according to an embodiment of the present invention will be described in detail.

Referring again to FIGS. 2A and 2B, the external vibration attenuation apparatus 200 according to an embodiment of the present invention is an external vibration sensing sensor provided between the base member B and the ground of the coating apparatus 240. 220. The external vibration detection sensor 220 detects natural vibrations of the ground. The external vibration sensor 220 may be implemented as, for example, an accelerometer or a vibrometer. The external vibration sensor 220 may detect the natural vibration waveform NOW of the ground, for example, as shown in FIG. 2B. Here, the natural vibration waveform NOW of the ground shown in FIG. 2B is exemplarily illustrated for convenience of description, and those skilled in the art can fully understand that the natural vibration waveform NOW of the actual ground may have various types of waveforms. I can understand.

Meanwhile, the external vibration sensor 220 transmits the detected natural vibration waveform NOW to the controller 224. The controller 224 analyzes the received natural vibration waveform NOW of the ground and generates a signal corresponding to the reverse vibration waveform IOW for attenuating the natural vibration waveform NOW. Here, the reverse vibration waveform (IOW) preferably has a 180 ° phase difference with the natural vibration waveform (NOW) of the ground. The controller 224 may be implemented by, for example, a microprocessor or a personal computer (PC). The signal of the reverse vibration waveform generated by the controller 224 is transmitted to the damping member 224. The damping member 224 generates a reverse vibration waveform in response to the signal of the reverse vibration waveform. Here, the damping member 224 is an ER damper using an ER fluid (electro-rheological fluid) in which viscoelasticity is changed by the application of electrical energy or an MR fluid in which the viscoelasticity is changed by the application of magnetic energy. It can be implemented with MR dampers using -rheological fluids.

The reverse vibration waveform generated by the damping member 224 described above is transmitted to the actuator 228 mounted to the base member B. The actuator 228 vibrates the base member B in response to the received reverse vibration waveform. Here, the actuator 228 may be specifically implemented as a piezo actuator. The piezo actuator uses a piezoelectric ceramic, and the piezoelectric ceramic is a device using a property of contracting and expanding according to an applied current or voltage. The actuator 228 implemented as a piezo actuator is a submicron (meaning less than a micron, for example, precision of about 0.01 to 0.1 μm (ie, 10 to 100 nanometers)). Fine vibration adjustment is possible.

As a result, as shown in FIG. 2B, the base member B vibrates according to the final vibration waveform ROW according to the damping effect of the damping member 224 against external vibration (natural vibration of the ground).

In addition, the external vibration damping device 200 according to an embodiment of the present invention may further include a monitoring device 226 connected to the controller 224. The monitoring device 226 may be implemented as a display device such as, for example, a screen or a touch screen. The monitoring device 226 may be configured to include a natural vibration waveform (NOW) and a reverse vibration waveform (IOW), or a natural vibration waveform (NOW), a reverse vibration waveform (IOW), and a natural vibration waveform (NOW) and a reverse vibration waveform (IOW). The final vibration waveform ROW attenuated by the sum, or the final vibration waveform ROW is displayed. By the monitoring device 226, the user adds the natural vibration waveform NOW of the ground applied to the base member B, the reverse vibration waveform generated by the damping member 222, and the natural vibration waveform and the reverse vibration waveform. The final vibration waveform ROW attenuated by can be confirmed in real time.

In the above-described embodiment of the present invention, the external vibration damping device 200 is exemplarily described as being used for the nozzle moving type coating device 240. However, those skilled in the art will appreciate that the external vibration damping device 200 is shown in FIG. It will be fully understood that the same can be used for the floating coating apparatus 40 shown in FIG. 1D.

As described above, the coating device 240 of the present invention is minimized the influence of the external vibration (intrinsic vibration of the ground) applied to the base member (B) by the external vibration damping device 200. As a result, it becomes possible to maintain the uniform coating height between the substrate G and the nozzle apparatus 78 and thus the uniformity of the coating thickness of the coating liquid.

3 is a flowchart illustrating an external vibration attenuation method used in a coating apparatus according to an embodiment of the present invention.

Referring to Figure 3 in conjunction with Figures 2a and 2b, the external vibration damping method 300 used in the coating apparatus according to an embodiment of the present invention is a) the base member (B) and the ground of the coating device 240 Detecting (310) the natural vibration waveform (NOW) of the ground using an external vibration sensor (220) provided between and transmitting it to the controller (224); b) generating a signal corresponding to an inverse vibration waveform (IOW) for attenuating the natural vibration waveform by using the controller 224 and transmitting the signal to the damping member 224 mounted to the base member (B) ( 320); c) generating (330) an inverse vibration waveform (IOW) in response to the signal received from the controller 224 using the damping member 224; And d) oscillating (340) the base member (B) according to the reverse oscillation waveform (IOW) by using an actuator 228 mounted to the damping member 224.

External vibration damping method 300 used in the coating apparatus according to an embodiment of the present invention described above is e) the natural vibration waveform (NOW) and the reverse vibration waveform (IOW), or the natural vibration waveform (NOW), Displaying the reverse vibration waveform (IOW), and the final vibration waveform (ROW) attenuated by the sum of the natural vibration waveform (NOW) and the reverse vibration waveform (IOW), or the final vibration waveform (ROW) ( 350) may be further included.

Various modifications may be made by those skilled in the art without departing from the spirit and scope of the invention as defined by the following claims. It is not. Accordingly, the scope of the present invention should not be limited by the above-described exemplary embodiments, but should be determined only in accordance with the following claims and their equivalents.

Figure 1a is a perspective view schematically showing a coating apparatus according to the prior art.

Figure 1b is a schematic view showing a perspective view of a substrate transfer apparatus of the floating method and a coating apparatus having the same according to the prior art.

FIG. 1C is a view schematically illustrating a front view of a substrate transfer apparatus of a floating method according to the related art shown in FIG. 1B and a coating apparatus having the same.

FIG. 1D is a view showing a part of an arrangement pattern of an air jet port and an air inlet port in a loading area, a coating area, and an unloading area of a conventional substrate transfer apparatus.

FIG. 1E is a diagram schematically showing the relationship between the coating state of the coating liquid according to the coating height between the substrate G and the nozzle device.

2A is a view schematically illustrating an external vibration damping device and a coating device having the same, used in a coating apparatus according to an embodiment of the present invention.

FIG. 2B is a view illustrating a vibration state of the coating apparatus when using the external vibration damping apparatus used in the coating apparatus shown in FIG. 2A.

3 is a flowchart illustrating an external vibration attenuation method used in a coating apparatus according to an embodiment of the present invention.

Claims (13)

In the external vibration damping device used in the coating device, An external vibration sensor provided between the base member (B) of the coating apparatus and the ground and detecting a natural vibration waveform (NOW) of the ground; A controller connected to the external vibration detection sensor and transmitting a signal of an inverse vibration waveform (IOW) for attenuating the natural vibration waveform; A damping member mounted to the base member (B) and configured to generate the reverse oscillation waveform (IOW) in response to the signal received from the controller; And Actuator mounted on the damping member, the actuator for vibrating the base member (B) in accordance with the reverse oscillation waveform (IOW) External vibration damping device comprising a. The method of claim 1, The external vibration damping device is connected to the controller, the natural vibration waveform (NOW) and the reverse vibration waveform (IOW), or the natural vibration waveform (NOW), the reverse vibration waveform (IOW), and the natural vibration waveform And a monitoring device for displaying the final vibration waveform ROW attenuated by the sum of NOW and the reverse vibration waveform IOW, or the final vibration waveform ROW. The method of claim 1, The external vibration detection sensor is implemented as an accelerometer or vibrometer, The controller is implemented as a microprocessor or a personal computer (PC), The damping member is implemented as an ER damper or MR damper, The actuator is implemented as a piezo actuator (piezo actuator) External vibration damping device. 3. The method of claim 2, The monitoring device is an external vibration damping device implemented as a display device such as a screen or a touch screen. 5. The method according to any one of claims 1 to 4, The reverse vibration waveform (IOW) has an external vibration damping device having a 180 ° phase difference with the natural vibration waveform (NOW). In the coating apparatus, A stage movably mounted on the base member B; A gantry provided movably on a substrate (G) positioned on the stage; A nozzle device fixedly mounted to the gantry; An external vibration sensor provided between the base member (B) and the ground to sense natural vibration of the ground; A controller connected to the external vibration detection sensor and transmitting a signal of an inverse vibration waveform (IOW) for attenuating the natural vibration waveform; A damping member mounted to the base member (B) and configured to generate the reverse oscillation waveform (IOW) in response to the signal received from the controller; And Actuator mounted on the damping member, the actuator for vibrating the base member (B) in accordance with the reverse oscillation waveform (IOW) Coating device comprising a. In the coating apparatus, A coating area stage supported by the base member B and providing a coating area; A substrate transfer device that mounts and transfers the substrate G by mounting in a vacuum suction method; A nozzle device provided on the coating area stage and applying a coating liquid on the substrate (G); A gantry on which the nozzle device is mounted; An external vibration sensor provided between the base member (B) and the ground to sense natural vibration of the ground; A controller connected to the external vibration detection sensor and transmitting a signal of an inverse vibration waveform (IOW) for attenuating the natural vibration waveform; A damping member mounted to the base member (B) and configured to generate the reverse oscillation waveform (IOW) in response to the signal received from the controller; And Actuator mounted on the damping member, the actuator for vibrating the base member (B) in accordance with the reverse oscillation waveform (IOW) Coating device comprising a. The method according to claim 6 or 7, The external vibration damping device is connected to the controller, the natural vibration waveform (NOW) and the reverse vibration waveform (IOW), or the natural vibration waveform (NOW), the reverse vibration waveform (IOW), and the natural vibration waveform And a monitoring device for displaying the final vibration waveform (ROW) attenuated by the sum of NOW and the reverse vibration waveform (IOW), or the final vibration waveform (ROW). The method according to claim 6 or 7, The external vibration detection sensor is implemented as an accelerometer or vibrometer, The controller is implemented as a microprocessor or a personal computer (PC), The damping member is implemented as an ER damper or MR damper, The actuator is implemented as a piezo actuator (piezo actuator) Coating device. The method of claim 8, The monitoring device is a coating device implemented as a display device such as a screen or touch screen. The method according to claim 6 or 7, And the reverse oscillation waveform (IOW) has a 180 ° phase difference with the natural vibration waveform (NOW). In the external vibration damping method used in the coating apparatus, a) detecting a natural vibration waveform (NOW) of the ground by using an external vibration sensing sensor provided between the base member (B) and the ground of the coating apparatus and transmitting it to the controller (224); b) generating a signal corresponding to an inverse vibration waveform (IOW) for attenuating the natural vibration waveform by using the controller and transmitting the signal to a damping member mounted to the base member (B); c) generating an inverse vibration waveform (IOW) in response to the signal received from the controller using the damping member; And d) vibrating the base member (B) according to the reverse oscillation waveform (IOW) using an actuator mounted to the damping member. External vibration attenuation method comprising a. The method of claim 12, The external vibration attenuation method may include e) the natural vibration waveform (NOW) and the reverse vibration waveform (IOW), or the natural vibration waveform (NOW), the reverse vibration waveform (IOW), and the natural vibration waveform (NOW). And displaying the final vibration waveform (ROW), or the final vibration waveform (ROW), attenuated by the sum of the inverse vibration waveforms (IOW).

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