KR20190063170A - Active damper for canceling vibration of manufacturing equipments - Google Patents

Abstract

Disclosed is an active damper for controlling vibration of processing equipment. According to the present invention, the active damper for controlling vibration of processing equipment comprises: a sensor applying a vibration signal to a phase inverter by sensing vibration from a vibrating body; a phase inverter generating and outputting a corresponding signal to offset the vibration signal in real time; and an actuator driven in accordance with the corresponding signal applied from the phase inverter. Moreover, a reverse-phase corresponding signal is applied to a surface of the processing equipment by the actuator and thus vibration generated from the processing equipment can be offset in real time.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an active damper for vibration control,

The present invention relates to an active damper for controlling vibration of a processing equipment. More specifically, the present invention relates to an active damper for detecting vibrations of a processing machine, reversing the phase, and then supplying a phase-inverted signal to the actuator to cancel the vibration.

Generally, vibration is generated from the centrifugal force generated by the rotation of the rotating body or from the impact inside and outside the structure, and is transmitted to the entire structure.

Vibration increases in proportion to the square of the operating speed. Since the machining and conveying speed is greatly accelerated according to the industrial development, not only is it the most important factor in the precision molding due to the vibration, the productivity and durability degradation of the cutting equipment, The measurement efficiency and the occurrence of errors are greatly influenced by the measurement.

Accordingly, in recent years, vibration suppression of processing equipment has become an important issue.

For example, in the semiconductor and display industries, the surface specifications of wafers and panels are rapidly becoming stricter, and the allowable vibrations in wafer processing and inspection processes are becoming very strict. Due to the enhancement of surface specifications, many existing equipment needs to be replaced.

In addition, it is very important to control the vibration of the equipment to improve the quality of the solar cell wafer and to secure the homogeneity of the crystal growth even in the grower and ingot processing and cutting equipment for the ingot production which is the basis of the photovoltaic industry . There is a problem that a normal force other than a shear stress applied to the ingot cutting face is applied due to the vibration during the sawing operation to cause breakage.

In addition, even in the case of rolling and extruding machines widely used throughout the metal industry, the vibration increases in proportion to the rolling speed. Due to the vibration, additional ability other than the necessary stress is applied to the machined surface, And is becoming a major cause of yield reduction.

In addition, vibration causes various problems in the manufacturing process, including reduced productivity, increased defects, and accidents caused by industrial accidents.

Damper is most commonly used to control such vibration. The damper is classified into a passive damper and an active damper.

FIG. 1 shows a structure of a conventional passive damper, and FIG. 2 shows a structure of a conventional active damper.

The manual damper is a device that absorbs vibration by dissipating internal stress and friction energy of an oscillating object by adding a spring or a vibration absorbing material to the vibrating portion. However, when the passive damper is installed, the rigidity of the structure is lowered, and in some cases, the overall size of the vibration may be larger, so that the reliability of the product quality and durability may be lowered.

Generally, an active damper analyzes a vibration signal by transmitting a sensed vibration signal to a frequency analyzer, generates a corresponding signal capable of suppressing the vibration signal through a signal generator, and transmits the signal to an actuator, thereby reducing vibrations to be.

However, since the frequency analyzer is expensive and has a complicated calculation process, it takes 2 to 4 seconds (time to convert the time domain signal to the frequency domain signal) only in the process of analyzing the signal, 20 to 40 cycles), it is impossible to perform real-time vibration control.

Document 1: Japanese Patent No. 5632701, "Active vibration isolation device (active vibration isolation device)" US Patent No. 7,047,109, "MACHINERY FOR IMPROVING PERFORMANCE IRREGULARITIES ARISING FROM VIBRATIONS" Document 3: Japanese Unexamined Patent Application Publication No. 2009-114821, "Building Damping Device

SUMMARY OF THE INVENTION The present invention has been made in order to solve the problems of the conventional art described above, and it is an object of the present invention to provide a method and apparatus for measuring vibrations generated from a processing equipment, generating a signal of a phase- In the provision of a damper.

Further, it is an object of the present invention to provide an active damper for vibration control of a machining apparatus which is economical and has a small volume because it does not use an expensive frequency analyzer and is easily installed in existing machining equipment.

In order to solve the problems of the conventional art as described above, the active damper for vibration control of a processing machine according to the present invention comprises a sensor for detecting vibration from a vibrating body and applying a vibration signal to the phase reversing machine;

A phase inverter for generating and outputting a corresponding signal canceling the vibration signal in real time; And

And an actuator driven according to a corresponding signal applied from the phase inverter.

At this time, a counter-phase corresponding signal is applied to the surface of the processing equipment by the actuator to cancel the vibration of the processing equipment.

The phase reverser includes: an input unit for receiving a vibration signal;

A microcontroller for generating a corresponding signal canceling the vibration signal; And

And a current output regulation device for controlling an amount of an actuator driving current according to the control of the microcontroller.

Meanwhile, the corresponding signal may be outputted corresponding to the whole of the vibration signal.

A first isolation provided between the actuator and the housing to block vibration from the actuator, and a second isolation provided between the fixed portion and the actuator to block vibration from the actuator.

On the other hand, the actuator may be installed in the processing equipment and separately from the processing equipment. In the latter case, it is preferable that the actuator is fixedly coupled to a fixing jig fixed in an area other than the processing equipment.

As described above, according to the active damper for vibration control of the machining equipment according to the present invention, since the vibration signal is directly inverted, the frequency analyzer is unnecessary, and the manufacturing cost can be greatly reduced.

Further, it is possible to manufacture the active damping kit in a small size, and it becomes possible to install the active damping kit in various existing processing equipment lines.

In addition, since the frequency analysis is not performed in the active damping kit, it is possible to eliminate delays required for the analysis, thereby realizing a real-time response to vibration.

On the other hand, by designing the actuator to be isolated from the vibrating body and to isolate the vibration between the actuator driving part and the active damping kit, the possibility of resonance occurrence can be prevented in advance and accurate vibration control can be achieved.

1 is a configuration diagram showing a structure of a conventional passive damper,
Fig. 2 is a configuration diagram showing the structure of a conventional active damper,
FIG. 3 is a conceptual view for explaining a mode in which the active damper according to the first embodiment of the present invention is attached to the processing equipment.
4 is a configuration diagram showing the structure of an active damper according to the first embodiment of the present invention.
FIG. 5 is a reference view for explaining the connection relationship among the components of the active damper according to the first embodiment of the present invention. FIG.
Fig. 6 is a configuration diagram for explaining the detailed configuration of the phase inverter, which is one component of the active damper.
7 is a flowchart illustrating an operation of the active damper according to the first embodiment of the present invention.
8 is a structural view of an actuator according to the first embodiment of the present invention.
9 is a photograph of a PCB according to the first embodiment of the present invention.
10 is a waveform diagram showing a vibration signal measured from the processing equipment.
11 is a waveform diagram for explaining how vibration control is performed by applying a reverse phase signal to a vibration signal.

DETAILED DESCRIPTION OF THE INVENTION Hereinafter, the present invention will be described in detail with reference to preferred embodiments of the present invention and accompanying drawings, wherein like reference numerals refer to like elements.

It is to be understood that when an element is referred to as being "comprising" another element in the description of the invention or in the claims, it is not to be construed as being limited to only that element, And the like.

Also, in the description of the invention or the claims, the components named as "means", "parts", "modules", "blocks" refer to units that process at least one function or operation, Each of which may be implemented by software or hardware, or a combination thereof.

In the present invention, the vibration of the vibrating body is measured and the vibration is canceled by supplying the opposite-phase signal of the measured vibration signal. It is not necessary to install an expensive frequency analyzer in the active damping kit, which makes it possible to construct an active vibration damping kit having a small volume and an economical efficiency. This means that there is no need for a signal analysis process in the active damping kit. Therefore, the delay that is a problem of the existing active damper can be fundamentally solved, real-time response becomes possible.

Hereinafter, an embodiment in which an active damper for vibration control of a machining apparatus of the present invention is implemented will be described with reference to specific embodiments.

FIG. 3 is a conceptual view for explaining a mode in which the active damper according to the first embodiment of the present invention is attached to the processing equipment.

The active damper 100 according to the present invention may be coupled to the processing equipment, which is preferably a vibration generating vibration as illustrated in FIG. 3, but may be installed separately from the processing equipment.

In the case where the active damper 100 is coupled to the processing equipment, isolation between the actuator 130 and the housing for isolation of vibration, that is, a passive damper, is provided so that the vibration of the actuator 130 is transmitted to the vibrating body It is possible to suppress the resonance.

When the active damper 100 is installed separately from the processing equipment, at least one active damper 100 is installed corresponding to the vibration direction using a separate fixing jig (not shown). At this time, the fixing jig (not shown) is preferably fixed to an area other than the processing equipment.

FIG. 4 is a configuration diagram of the active damper according to the first embodiment of the present invention, and FIG. 5 is a reference view for explaining the connection relationship between the components of the active damper according to the first embodiment of the present invention.

Referring to FIG. 4, the active damper 100 of the present invention includes a sensor 110 for detecting vibration from a vibrating body and transmitting a vibration signal,

A phase inverter 120 for activating and outputting a corresponding signal canceling the vibration signal,

And an actuator 130 driven in response to the corresponding signal.

A housing 151 on which the actuator 130 and the phase inverter 120 are mounted and a fixing unit 152 for fixing the housing 151 while being spaced from the one surface of the processing equipment by a predetermined distance.

A first isolation 141 is provided between the actuator body 131 and the inner surface of the housing 151 to block vibrations. The first isolation 141 is provided between the fixed portion 152 and the housing 151. And a second isolation 142 for blocking vibration from the actuator 130.

The first isolation 141 and the second isolation 142 may use a conventional damper.

The actuator 130 includes an actuator body 130 for reciprocating the actuator driving unit 132 according to a signal of a reverse phase applied thereto and an adapter 133 provided at an end of the actuator driving unit 132 for directly hitting the processing equipment do.

The adapter 133 has a shape corresponding to the surface shape of the processing equipment. For example, when the surface of the processing equipment is a curved surface, the adapter 133 also has the same curved shape so that the corresponding signal in the liquid phase can be accurately transmitted to the surface of the processing equipment.

The adapter 133 is customized according to the shape of the surface of the processing equipment to be actually installed, and is fixed to the end of the actuator driving unit 132 at the time of construction.

On the other hand, as the fixing portion 142 is fastened to the outer surface of the processing equipment, the sensor 110 is fixed to the processing equipment while being spaced within a predetermined distance. As the vibration is generated from the processing equipment, the sensor 110 detects the vibration and applies the vibration signal to the phase inverter 120.

6 shows a detailed configuration of the phase inverter, which is one component of the active damper.

The phase inverter 120 generates a reversed phase signal by reversing the phase of the vibration signal of the processing equipment sensed by the sensor 110 and outputs the reversed phase signal to the input unit 121, the microcontroller 122, the output unit 123, And an output regulating device 124.

The input unit 121 is electrically connected to the sensor 110 and receives a vibration signal from the sensor 110.

On the other hand, the microcontroller 122 generates a corresponding signal by inverting the inputted vibration signal in a reverse phase.

The output unit 123 outputs the corresponding signal of the opposite phase thus generated to the actuator 130.

At this time, in order to completely cancel the vibration, it is necessary to adjust the amount of the actuator driving current. The current output regulator 124 regulates the amount of the driving current of the actuator 130 under the control of the microcontroller 122.

The phase inverter 120 having such a configuration inputs and outputs a signal in the active damper 100 and serves as an interface between the sensor 110 and the actuator 130.

That is, when a vibration signal is sensed by the sensor 110, the micro controller 122 generates a corresponding signal and supplies it to the actuator 130.

7 is a flowchart illustrating an operation of the active damper according to the first embodiment of the present invention.

Referring to FIG. 7, the operation of the active damper of the present invention can be roughly divided into the following three stages.

- Step 1: Measuring vibration of machine tool

- Phase 2: Phase inversion using the phase reversal of vibration generated in the processing equipment

- Step 3: Output the inverted signal to drive the actuator

That is, the frequency analysis process for the vibration signal of the measured machining equipment is omitted, and thus the problem of the existing active damper in which the delay is generated by the time required for the frequency analysis is fundamentally eliminated.

8 is a structural view of an actuator according to the first embodiment of the present invention.

The actuator 130 includes an actuator driving part 132 and a driving part 132. The actuator driving part 132 is mounted on at least a part of the actuator driving part 132, And an actuator body 131 for driving the driving unit 132. [

8, the actuator 130 includes a push plate, an O-ring fitted to the protrusion of the bottom surface of the push plate, a housing cover surrounding the O-ring and sequentially arranged on the bottom surface of the push plate, A solenoid core, a solenoid coil, and a core cover.

Further, a cap, a permanent magnet, a support, a linear guide, and an elastic spring which are sequentially mounted in the cap are provided.

And a bottom plate which constitutes the housing and the bottom surface of the housing may be further provided.

At this time, the actuator driving unit 132 is composed of a push plate, a cap, a permanent magnet, a supporting member, and a linear guide, and the bottom surface of the linear guide is supported by an elastic spring.

The actuator 130 is preferably wired to the phase inverter 120. In the case of wireless configuration, the size of the device is inevitably increased due to an increase in the number of additional components as compared with a wire such as a large battery for supplying electric power to the actuator 130 and an antenna for receiving a signal, It has been confirmed that a problem that leads to performance degradation due to vibration.

9 is a photograph of a PCB according to the first embodiment of the present invention.

In Fig. 9, the portion indicated by "1" indicates the input unit 121. [

The portion indicated by "2" is the microcontroller 122, and the portion indicated by "3" is the output portion 123. On the other hand, the portion indicated by "4 " indicates the current output regulating device.

10 is a waveform diagram showing a vibration signal measured from the processing equipment.

In general, vibration is caused by shock (vibration caused by interlayer noise, snoring, momentary deceleration acceleration), harmonic force (vibration generated from centrifugal force of rotating body such as motor shaft), random vibration (earthquake) . The approaches for vibration suppression can differ from each other in the aspect of each vibration.

Impulse means "shock", and examples of impulse vibration include snoring, children's footsteps, hammer sounds, and falling objects. That is, the impulse vibration means short and large impact vibration.

11 is a waveform diagram for explaining how vibration control is performed by applying a reverse phase signal to a vibration signal.

In the present invention, an opposite signal is directly transmitted to the actuator 130 using a signal sensed by the sensor 110. [ Since this method must supply the entire opposite signal of the vibration signal, the active damper 100 of the present invention must be coupled to the vibrating body, that is, the processing equipment. Since the frequency of the active damper for supplying the reverse vibration in the coupled state between the active damper 100 and the vibrating body is equal to the frequency of the processing equipment, there is a high possibility of occurrence of resonance.

In order to prevent the occurrence of resonance, which is a problem of the conventional art, a vibration from the actuator 130 is isolated by providing a first isolation and a second isolation.

18 shows the vibration signal of the machining equipment sensed by the sensor and the lower left shows the corresponding signal of the reverse phase generated from the phase inverter 120. [

18 shows the vibration after the vibration signal of the processing equipment and the signal of the opposite phase applied through the actuator 130 cancel each other. Experimental results show that 90% or more of the vibration disappears by applying the corresponding signal of the reverse phase in real time.

In the experiment, a delay time (signal) required to measure the vibration in the sensor 110 and transmit the signal to the phase inverter 120, and to invert the phase of the signal in the phase inverter 120 and to transfer the signal to the actuator 130 The time difference between generation and supply) was kept at 10 ms or less, and the oscillation could be effectively canceled by associating with the optimum phase inversion angle.

According to the present invention, first, a corresponding signal of a reverse phase is generated and applied to a vibration signal sensed by a sensor in real time, thereby eliminating vibration, thereby reducing a delay time, noise, and error occurring in a process corresponding to a complex signal,

Second, it is not necessary to install the actuator 130 in various places in order to cope with a complicated mode,

Third, it is possible to separate the actuator 130 from the vibrating body and to isolate the vibration between the actuator driving part and the active damper kit, thereby blocking the possibility of resonance.

The technical idea of the present invention has been described through several embodiments.

It will be apparent to those skilled in the art that various changes and modifications may be made to the embodiments described above from the description of the present invention. Further, although not explicitly shown or described, those skilled in the art can make various modifications including the technical idea of the present invention from the description of the present invention Which is still within the scope of the present invention. The above-described embodiments described with reference to the accompanying drawings are intended to illustrate the present invention and the scope of the present invention is not limited to these embodiments.

100: active damper
110: sensor
120: Phase Reversal
121: Input unit
122: Microcontroller
123: Output section
124: Current output regulator
130: Actuator
131: Actuator body
132:
133: Adapter
141: first isolation
142: Second isolation
151: Housing
152:

Claims (12)

A sensor for detecting vibration from the vibrating body and applying the vibration signal to the phase reversing unit;
A phase inverter for generating and outputting a corresponding signal canceling the vibration signal; And
And an actuator driven according to a corresponding signal applied from the phase inverter,
An active damper for vibration control of a machining apparatus, which counteracts vibration of the machining equipment by applying a counter-phase corresponding signal to the surface of the machining equipment by an actuator.
The method according to claim 1,
Wherein the phase inverter generates a corresponding signal in real time by inverting the phase of the vibration signal.
3. The method of claim 2,
The phase reverser comprises:
An input unit for receiving a vibration signal;
A microcontroller for generating a corresponding signal canceling the vibration signal; And
And a current output regulating device for regulating an amount of an actuator driving current according to the control of the microcontroller.
3. The method of claim 2,
And the corresponding signal is outputted corresponding to the whole of the vibration signal.
3. The method of claim 2,
And a first isolation provided between the actuator and the housing to block vibration from the actuator.
3. The method of claim 2,
And a second isolation provided between the fixed portion and the actuator for blocking vibration from the actuator.
3. The method of claim 2,
And an adapter is fastened to an end of an actuator fixing portion of the actuator.
8. The method of claim 7,
Wherein the adapter has a shape corresponding to a surface shape of the processing equipment.
9. The method of claim 8,
Wherein the adapter is a curved active damper for vibration control of a machining apparatus.
3. The method of claim 2,
Wherein the delay time required for inverting the phase of the input signal in the phase inverter is less than 10 ms.
3. The method of claim 2,
Wherein the actuator is mounted on the surface of the processing equipment by a fixed portion.
3. The method of claim 2,
Wherein the actuator is coupled to a fixed jig fixed in an area other than the machining equipment.

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