KR20110007033A - Drawing device, recording medium and drawing method - Google Patents

Abstract

PURPOSE: A drawing apparatus, a recording media, and a drawing method are provided to implement accurate correction by comparing correction amount based on different reference marks. CONSTITUTION: A raster conversion part(50) converts vector data into raster data. A reference position memory part(52) memorizes the setting position information of a reference mark formed on a substrate(12). A drawing position correction part(54) corrects drawing positions based on the position information displaying the position of reference marks. An exposure controller(58) controls an exposure head(30) based on corrected image data.

Description

Writing device, recording medium and drawing method {DRAWING DEVICE, RECORDING MEDIUM AND DRAWING METHOD}

The present invention relates to a writing apparatus, a recording medium and a drawing method.

Background Art Conventionally, various exposure apparatuses using photolithography techniques have been proposed as devices for drawing a predetermined wiring pattern on a printed wiring board. As the above-described exposure apparatus, for example, a digital pattern for drawing a wiring pattern by scanning a light beam on a photoresist-coated substrate in the main and sub-scanning directions and modulating the light beam on the basis of image data representing a wiring pattern An exposure apparatus is proposed.

The wiring pattern of the printed wiring board drawn by the digital exposure apparatus tends to increase in high definition gradually. The wiring pattern is drawn at a preset position with respect to the substrate. However, in the case of forming a multilayer printed wiring board, drawing the wiring pattern of each layer at a predetermined position may cause a writing position shift of the wiring pattern of each layer. For this reason, it is necessary to perform positioning (alignment) of the wiring pattern of each layer with high precision.

Not only the digital exposure apparatus but also a high density alignment is necessary also in an analog exposure apparatus. In order to perform the alignment with high accuracy, a reference mark is formed on the substrate of each layer on the basis of preset reference mark position information, and the detected position information and the reference mark position information detected by detecting the position of the reference mark during drawing exposure. Various exposure apparatuses which calculate | require a correction amount based on and correct | amend the drawing position of a wiring pattern according to the obtained correction amount are proposed.

For example, Japanese Patent Application Laid-Open No. 2002-341560 discloses a mark detection unit for detecting a film mark of an exposure film and a substrate mark of a substrate material, and an alignment position calculation unit for calculating an alignment position from the film mark position and the substrate mark position detected by the mark detection unit. In the control apparatus of the exposure machine provided with the alignment command part which aligns a film and a board | substrate material, and the exposure command part which performs exposure, Prior to the alignment operation | movement by an alignment command part, the film and board | substrate are used using the calculation result of an alignment position calculating part. A control apparatus of an analog exposure apparatus is described, which includes an alignment impossibility determining unit that calculates a pitch error of a mark position corresponding to each other in an alignment state of ashes and determines whether alignment is possible or not based on the pitch error.

In addition, Japanese Patent Laid-Open No. 2006-303074 discloses the measurement of the printed wiring board by processing the imaging data of the printed wiring board obtained from the imaging unit in the apparatus for manufacturing a printed wiring board having a function of perforating the printed wiring board with a laser. And a control unit which recognizes at least six measurement marks while recognizing the shape of two or more types of measurement marks respectively formed for measurement at at least three predetermined locations on the printed wiring board. And the control unit further performs correction of the puncturing position by comparing the measurement data obtained by performing the measurement using the measurement mark by the recognition function and a design value preset for the measurement mark. The manufacturing apparatus of the printed wiring board made into is described.

However, the techniques described in Japanese Patent Application Laid-Open No. 2002-341560 and Japanese Patent Application Laid-Open No. 2006-303074 use two or more types of reference marks to detect the positional shift (error) of the substrate, but not to manufacture the reference mark. Errors that have the same tendency, such as errors due to the environment and errors due to reading (imaging) of the reference mark, have a problem that detection is difficult. Increasing the number of reference marks does not solve this problem. For example, suppose that the burr tends to occur in the same direction with respect to the center position of the substrate when the reference mark is a plurality of through holes formed by drilling a hole in the substrate. In this case, even if the center position of each through hole is shifted, the center position of the substrate is not shifted, so that no error is detected. In addition, even when the imaging magnification varies, no error is detected for the same reason.

In the exposure apparatus described in Japanese Patent Laid-Open No. 2002-341560, error evaluation was performed between the film and the substrate. However, detection with multiple kinds of reference marks is not performed, so that errors having the same tendency are difficult to detect. In addition, although the manufacturing apparatus of the printed wiring board of Unexamined-Japanese-Patent No. 2006-303074 uses two types of reference marks, an outer layer mark and an inner layer mark, an outer layer mark is formed by peeling an outer layer conductor, and an inner layer mark is this outer layer. You can only see through the mark. For this reason, it is impossible to detect the position shift (error) of a board | substrate using two or more types of reference marks, and the error which has the same tendency is difficult to detect.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and by detecting the positions of two or more kinds of reference marks on the same substrate, and applying the correction amount obtained from the detection result of the same type of reference mark to other types of reference marks, the correction amount is evaluated. Provided are a drawing apparatus, a recording medium, and a drawing method that can easily detect errors having the same tendency and perform appropriate correction.

In order to achieve the above object, the invention by the drawing apparatus of the present invention provides a plurality of first reference marks and a plurality of first reference marks formed on the drawing target to specify a drawing position of the drawing region as a drawing target on which a pattern image is drawn on the drawing region. An imaging unit capable of imaging a drawing target having a second reference mark, first setting position information indicating setting positions of the plurality of first reference marks, and second setting indicating setting positions of the plurality of second reference marks Position information, drawing position information representing the drawing position of the drawing region by matching the first reference mark or the second reference mark, and an allowable range of the deviation amount after correction of the first reference mark and the second reference mark A storage unit for storing threshold information indicating the first reference mark and the first reference mark from the captured image of the drawing target. An acquisition unit that detects a second reference mark to acquire first detection position information indicating a detection position of the first reference mark and second detection position information indicating a detection position of the second reference mark, wherein the first detection position Calculating a first correction amount for correcting the drawing position based on the information and the first set position information, and correcting the drawing position based on the second detection position information and the second set position information. A first calculation unit for calculating a second correction amount, and calculating a first shift amount indicating a shift from a detection position of the first reference mark when the set position of the first reference mark is corrected by the first correction amount; And a deviation from the detection position of the second reference mark when the setting position of the second reference mark is corrected by the second correction amount. Is a second calculation unit for calculating a second shift amount, and a third shift amount indicating a shift from a detection position of the second reference mark when the set position of the second reference mark is corrected by the first correction amount. In addition, a third calculation unit for calculating a fourth shift amount indicating a shift from the detection position of the first reference mark when the set position of the first reference mark is corrected by the second correction amount, the first shift amount And the first shift amount, the second shift amount, the third shift amount, and the fourth shift amount when the second shift amount, the third shift amount, and the fourth shift amount do not exceed a threshold set for each. The third correction amount is obtained from the first correction amount and the second correction amount in accordance with each shift amount, and the drawing position is corrected based on the obtained third correction amount. It is imaged by the imaging device comprising a correction unit for drawing in, and the corrected imaging position on the imaging target of the pattern image.

In the said drawing apparatus, the said 1st reference mark and the said 2nd reference mark may be formed in the said drawing object through another manufacturing process. One of the first reference mark and the second reference mark may be a through hole, and the other may be a hole having a bottom opened in the seedling screen. For example, one of the first reference mark and the second reference mark is a through-hole mechanically drilled, and the other is a hole having a bottom punched to form a recess in the seedling surface by laser processing. Can be.

In addition, the first reference mark and the second reference mark may be distinguishable from each other by pattern recognition. In this case, the storage section further stores first shape information indicating the shape of the first reference mark and second shape information indicating the shape of the second reference mark, and the acquiring section is the shape of the first reference mark. The first reference mark and the second reference mark are detected from the picked-up image by pattern recognition based on first shape information indicating a and second shape information indicating a shape of the second reference mark.

In the drawing apparatus, the correction unit is the first shift amount corresponding to the case where the sum of the first shift amount, the second shift amount, the third shift amount, and the fourth shift amount is the total shift amount, and the The third correction amount can be obtained by subdividing the first correction amount and the second correction amount based on a ratio of the second shift amount, the third shift amount, and the fourth shift amount to the total shift amount. .

The correction unit may further include the first shift amount and the second shift amount corresponding to the sum of the first shift amount, the second shift amount, the third shift amount, and the fourth shift amount as the total shift amount. Calculating virtual detection position information by dividing one of the first detection position information and the second detection position information based on a ratio of the amount, the third shift amount and the fourth shift amount to the total shift amount; The third correction amount may be obtained based on one of the first setting position information and the second setting position information corresponding to the virtual detection position information and the virtual detection position information.

In order to achieve the above object, the invention by the recording medium of the present invention provides a plurality of first reference marks and a plurality of first reference marks formed on the drawing object to specify a drawing position of the drawing area as a drawing object on which a pattern image is drawn in the drawing area. A recording that is applied to a drawing device having an image capturing unit capable of capturing a drawing object having a second reference mark and records a program for drawing a pattern image at a corrected drawing position on the drawing object based on the captured image of the image capturing unit. As a medium, a computer is provided with first setting position information indicating setting positions of the plurality of first reference marks, second setting position information indicating setting positions of the plurality of second reference marks, and the drawing position of the drawing area. Drawing position information and an image that are associated with a first reference mark or the second reference mark; A storage unit for storing threshold information indicating a permissible range of the deviation amount from the setting position of the first reference mark and the second reference mark, and the first reference mark and the second reference mark from the captured image of the drawing target. An acquisition unit that detects and acquires first detection position information indicating a detection position of the first reference mark and second detection position information indicating a detection position of the second reference mark, the first detection position information and the first setting Calculating a first correction amount for correcting the drawing position based on position information, and calculating a second correction amount for correcting the drawing position based on the second detection position information and the second set position information. A first calculating section and a detection position of the first reference mark when the setting position of the first reference mark is corrected by the first correction amount. A second shift amount indicating a shift from the detection position of the second reference mark when the first shift amount indicating the shift of the rotor is calculated and the setting position of the second reference mark is corrected by the second correction amount; And a second calculation unit for calculating a third shift amount indicating a shift from a detection position of the second reference mark when the set position of the second reference mark is corrected by the first correction amount, and calculating the third shift amount. A third calculation unit for calculating a fourth shift amount indicating a shift from the detection position of the first reference mark when the setting position of the first reference mark is corrected by the second correction amount, the first shift amount, and the second shift The first shift amount, the second shift amount, when the amount, the third shift amount and the fourth shift amount do not exceed the threshold set for each; Obtaining the third correction amount from the first correction amount and the second correction amount according to each of the third shift amount and the fourth shift amount, and functioning as a correction unit for correcting the drawing position based on the obtained third correction amount. A recording medium for recording a program.

In order to achieve the above object, the invention by the drawing method of the present invention provides a plurality of first reference marks and a plurality of first reference marks formed on the drawing object to specify a drawing position of the drawing area as a drawing object on which a pattern image is drawn in the drawing area. Imaging a drawing object having a second reference mark, first setting position information indicating setting positions of the plurality of first reference marks, second setting position information indicating setting positions of the plurality of second reference marks, and Drawing position information which represents the drawing position of the drawing area in correspondence with the first reference mark or the second reference mark, and indicates a permissible range of the deviation amount from the setting position of the first reference mark and the second reference mark. The threshold information is stored, and the first reference mark and the second device are stored from the captured image of the drawing target. The quasi-mark is detected to obtain first detection position information indicating the detection position of the first reference mark and second detection position information indicating the detection position of the second reference mark, and to obtain the first detection position information and the first detection mark. A first correction amount for correcting the drawing position is calculated based on setting position information, and a second correction amount for correcting the drawing position is calculated based on the second detection position information and the second setting position information. And calculating a first shift amount indicating a shift from the detection position of the first reference mark when the set position of the first reference mark is corrected by the first correction amount, and calculating the first shift amount using the second correction amount. A second shift amount indicating a shift from the detection position of the second reference mark when the setting position of the second reference mark is corrected; A third shift amount representing a shift from the detection position of the second reference mark when the set position of the second reference mark is corrected by the first correction amount is calculated, and the first reference is used as the second correction amount. The fourth shift amount indicating the shift from the detection position of the first reference mark when the set position of the mark is corrected is calculated, and the first shift amount, the second shift amount, the third shift amount, and the first shift amount are calculated. 4 when the amount of shift does not exceed the threshold set for each, from the first correction amount and the second correction amount according to the first shift amount, the second shift amount, the third shift amount, and the fourth shift amount, respectively. The corrected drawing on the drawing target is obtained by obtaining the third correction amount, correcting the drawing position based on the obtained third correction amount. An imaging method for imaging the location.

1 is a perspective view showing a schematic configuration of an exposure apparatus according to an embodiment of the present invention.
2 is a perspective view showing the configuration of a scanner of the exposure apparatus.
3A is a plan view showing the exposed area formed on the exposure surface of the substrate, and FIG. 3B is a plan view showing the arrangement of the exposure areas by the respective exposure heads.
It is a schematic diagram which shows the exposure area obtained by the mirror device arrange | positioned obliquely.
5 is a block diagram showing the configuration of an electric control system of the exposure apparatus.
6 is a block diagram showing various kinds of information stored in the reference position storage unit.
7 is a functional block diagram of a drawing position correction unit.
FIG. 8A is a plan view for explaining a reference mark formed on a substrate, FIG. 8B is a cross-sectional view along the dotted line of FIG. 8A, FIG. 8C is a diagram showing an example of modification of the reference mark, and FIG. 8D is an example of a modification of the reference mark. It is a figure which shows.
9 is a plan view showing the detected positional information acquired from the captured image and the preset set positional information.
10 is a diagram illustrating a form in which image data is corrected by correcting a drawing position of a drawing region.
11 is a flowchart showing a routine of a drawing position correcting process executed as a drawing position correcting unit.

EMBODIMENT OF THE INVENTION Hereinafter, an example of the exposure apparatus by embodiment of the drawing apparatus and the drawing method of this invention is demonstrated in detail with reference to drawings.

<Schematic Configuration of Exposure Device>

1 is a perspective view showing a schematic configuration of an exposure apparatus according to an embodiment of the present invention. This exposure apparatus is an apparatus which draws and exposes images, such as several wiring patterns, on one board | substrate, and is an apparatus which draws and exposes the wiring pattern of each layer of multilayer boards, such as a multilayer printed wiring board. In this embodiment, a single layer substrate can also be used. The substrate may be various structures such as a filter for a display device and a semiconductor.

As shown in FIG. 1, the exposure apparatus 10 includes a flat plate moving stage 14 that adsorbs and holds the substrate 12 on its surface. Then, two guides 20 extending along the stage moving direction are provided on the upper surface of the thick plate-shaped mounting table 18 supported by the four leg portions 16. The movement stage 14 is arrange | positioned so that the longitudinal direction may face a stage movement direction, and is supported by the guide 20 so that reciprocation is possible.

In the center portion of the mounting table 18, a U-shaped gate 22 is provided so as to cover the moving path of the moving stage 14. Each end of the U-shaped gate 22 is fixed to both side surfaces of the mounting table 18. A scanner 24 is provided at one side with the gate 22 interposed therebetween, and at the other end of the plurality of reference marks (not shown in FIG. 1) formed in advance at the front and rear ends of the substrate 12 and the substrate 12. A plurality of cameras 26 for detecting the position are provided. In this example, three cameras 26 are provided. In addition, a reference mark is mentioned later.

The scanner 24 and the camera 26 are attached to the gate 22, respectively, and are fixedly arranged above the movement path of the movement stage 14. In addition, the scanner 24 and the camera 26 are connected to the controller mentioned later which controls these. 2 is a perspective view showing the configuration of a scanner of the exposure apparatus. 3A is a top view which shows the exposed area | region formed on the exposure surface of a board | substrate, and FIG. 3B is a top view which shows the arrangement | positioning of the exposure area by each exposure head. 2 and 3B, the scanner 24 includes ten exposure heads 30 (30A to 30J) arranged in a substantially matrix shape in two rows and five columns.

Inside the exposure head 30 is a mirror device (not shown) which is a reflective spatial light modulation element represented by a digital micromirror device (DMD), which is a spatial light modulation element (SLM) that spatially modulates an incident light beam. ) Is installed. The mirror device is mounted in such a manner that the pixel column direction forms a predetermined set inclination angle θ with the scanning direction. Therefore, the exposure area 32 by each exposure head 30 becomes a rectangular area inclined at the inclination angle (theta) with respect to a scanning direction, as shown to FIG. 3A and FIG. 3B. As the movement stage 14 moves, a strip-shaped exposed area 34 is formed in each of the exposure heads 30 on the substrate 12. It is also possible to employ other SLMs other than DMD (registered trademark).

As shown in Figs. 3A and 3B, each of the exposure heads 30 in each row arranged in a line shape such that each of the stripe-exposed areas 34 partially overlaps with the adjacent exposed area 34 is It arrange | positions so that a predetermined space | interval (natural arrangement of the long side of an exposure area, 1 time in this embodiment) may be shifted in an arrangement direction. For this reason, for example, the part which cannot be exposed between the exposure area 32A located in the leftmost position of the 1st line, and the exposure area 32C located adjacent to the right side of the exposure area 32A is the leftmost of the 2nd line. The exposure area is exposed by the exposure area 32B positioned at. Similarly, the part which cannot be exposed between the exposure area 32B and the exposure area 32D located adjacent to the right side of the exposure area 32B is exposed by the exposure area 32C.

The mirror devices provided in each of the exposure heads 30 are controlled on / off in units of micromirrors, and a dot pattern (black / white) corresponding to the micromirrors of the mirror device is exposed on the substrate 12. As shown in Fig. 4, the exposure area 32 is formed by dots two-dimensionally arranged. The dot pattern of the two-dimensional array is inclined with respect to the scanning direction, so that the dots arranged in the scanning direction pass between the dots arranged in the direction intersecting the scanning direction, thereby achieving high resolution.

In addition, as shown in FIG. 4, by arranging the mirror device at an inclination angle θ with respect to the scanning direction, laser light reflected by a plurality of micromirrors is scanned on the same scan line indicated by the arrow of the exposure area 32. . For example, when paying attention to the scanning line L1, a total of three reflected light images (exposure beams A, B, C), which are displayed on the scanning line L1 in a black circle shape, are scanned. That is, as the movement stage 14 moves, the same position on the substrate 12 is subjected to multiple exposures by the exposure beams A, B, and C. FIG.

<Electric Configuration of Exposure Equipment>

Next, the electrical structure of the exposure apparatus which concerns on this embodiment is demonstrated.

5 is a block diagram showing the configuration of an electric control system of the exposure apparatus.

As shown in FIG. 5, the exposure apparatus 10 receives vector data indicating a wiring pattern of an exposure target output from a data generating apparatus 40 having a CAM (Computer Aided Manufacturing) station, and rasterizes this vector data. Raster conversion processing unit 50 for converting into data (bitmap data), reference position storage unit 52 for storing setting position information of a reference mark formed on substrate 12, and the like, and reference detected by camera 26 The raster data of the wiring pattern (drawing area) is based on the drawing position correcting section 54 which corrects the drawing position based on the detected position information indicating the position of the mark, and the drawing position corrected by the drawing position correcting section 54. The exposure head 30 is driven based on the corrected image data converted by the image data corrector 56 and the image data corrector 56 that correct and generate corrected image data. The drawing control part 58 which controls, the stage control part 60 which drive-controls the moving stage 14, and the controller 70 which controls the whole this exposure apparatus are provided.

6 is a block diagram showing various kinds of information stored in the reference position storage unit.

The reference mark used in this embodiment has two types of a 1st reference mark and a 2nd reference mark. Other types of reference marks need only be able to be detected individually, and there is no particular limitation on the form of the reference marks. In this embodiment, an example is described in which each of the first reference mark and the second reference mark has a shape that can be distinguished from each other by pattern recognition.

In the reference position storage unit 52, reference mark position information 52A indicating the position of the reference mark on the standard substrate 12 is stored in advance. This reference mark position information 52A is a design value, and is a predetermined value when the reference mark is formed on the substrate 12. As the reference mark position information 52A indicating the position of the reference mark, the coordinate value of the center position of the reference mark, the coordinate value of the feature point representing the boundary between the reference mark and the periphery (for example, when the reference mark is a triangle, Coordinate values) and various values such as the coordinate values of the representative point representing the reference mark (for example, the coordinate value of the intersection point when the reference mark is cross).

In this embodiment, the case where the reference mark position information 52A shows the coordinate value of the center position of a reference mark is demonstrated as an example. That is, the reference position storage unit 52 has information (first set position information) indicating the coordinate value of the center position of each of the plurality of first reference marks and information indicating the coordinate value of the center position of each of the plurality of second reference marks. (Second setting position information) is stored. In addition, the center positions (coordinate values) of the plurality of first reference marks may be calculated from the coordinate values of the center positions of the plurality of first reference marks. In addition, the center positions (coordinate values) of the plurality of second reference marks may be calculated from the coordinate values of the center positions of each of the plurality of second reference marks. Hereinafter, these center positions are called "setting center position." In contrast, the center positions of the detected plurality of reference marks are referred to as "detection center positions".

In the present embodiment, as described above, the first reference mark and the second reference mark are identified by pattern recognition. For this reason, the reference mark shape information 52B which shows the shape of a reference mark is previously memorize | stored in the reference position storage part 52. FIG. This reference mark shape information 52B can be said to be image information of the shape of a reference mark, for example. In this embodiment, the information (first shape information) indicating the shape of the first reference mark and the information (second shape information) indicating the shape of the second reference mark are stored as the reference mark shape information 52B. The reference mark shape information 52B is used for pattern recognition of the reference mark.

In addition, the drawing position information 52C of the drawing area is previously stored in the reference position storage unit 52. Here, the drawing area is an area where the wiring pattern is formed. The drawing position information 52C is information for determining the boundary (outer) of the drawing region. For example, in the case of a rectangular drawing region, the vertex (corner portion) is used as a coordinate value of the drawing position. can do. That is, in this embodiment, drawing position information 52C is information (image position information) which shows the coordinate value of the drawing position shown in correspondence with the setting position of a 1st reference mark or a 2nd reference mark.

In addition, the tolerance position threshold information 52D which shows the permissible range of the shift | offset | difference quantity is previously memorize | stored in the reference position memory | storage part 52. As shown in FIG. Here, the "shift amount" is a shift amount from the detection position of the post-correction position obtained by correcting the setting position of the reference mark. The error by correction is evaluated by this "shift amount". Therefore, below, the "shift amount" is changed into "error" suitably. That is, a correction amount is obtained to bring the setting position of each reference mark closer to the detection position. Errors are caused by factors. Therefore, the probability that the position after correction | amendment of each reference mark fully overlaps a detection position is low, and the position after correction | amendment of each reference mark is shift | deviated from a detection position, respectively. It is said "deviation amount" that these deviation amounts calculated | required according to the fixed criterion.

The "correction amount" is, for example, the X-direction shift correction amount "ΔX", the Y-direction shift correction amount "ΔY", the rotation correction amount "θ", the scale ratio correction amount "Δk _X " in the _X direction, and the scale ratio correction amount " Various correction parameters, such as Δk _Y ″. These correction parameters can be calculated | required by a conventionally well-known method. In addition, when it is not necessary to consider the enlargement or reduction of the X direction and the Y direction, the correction parameter is appropriately selected, for example, omitting the scale ratio correction amount.

For example, the distance between the post-correction position and the detection position is obtained for each reference mark, respectively. The representative value, such as the sum total, the average value, or the maximum value, can be referred to as a "shift amount". More specifically, if each of the set positions of the plurality of first reference marks is corrected by the first correction amount described later, the distance between the post-correction position and the detection position of each reference mark when corrected by the first correction amount is obtained, respectively. The maximum value can be referred to as "shift amount".

For example, when the necessity of correcting enlargement, reduction, deformation, etc. is low, the distance between the center position after correction and the detection center position may be referred to as a "shift amount" for a plurality of reference marks. More specifically, if each of the set positions of the plurality of first reference marks is corrected with the first correction amount described later, the center positions after the correction of the plurality of first reference marks and the plurality of first points when the correction is performed with the first correction amount The distance of the detection center position of a reference mark can be made into the "deviation amount."

In the present embodiment, the allowable error threshold information 52D is information for determining an upper limit of the "deviation amount". In the present embodiment, as described later, two kinds of correction amounts are calculated by using the first reference mark and the second reference mark, and four kinds of misalignment of the first to fourth deviation amounts are calculated. Amount is calculated. In the present embodiment, the allowable error threshold information 52D is information (threshold information) indicating the threshold value of the deviation amount with respect to each of these plurality of deviation amounts.

In addition, each of the reference mark position information 52A, the reference mark shape information 52B, the drawing position information 52C, and the allowable error threshold information 52D can be set by the user. For example, even if the reference mark position information 52A, the reference mark shape information 52B, and the drawing position information 52C are acquired and set from the picked-up image picked up by the camera 26, the standard board | substrate 12 may be set. good. Tolerance threshold value information 52D may be acquired and set from data actually accumulated, such as a yield when correcting using a predetermined correction amount.

7 is a functional block diagram of a drawing position correction unit. The drawing position correction unit 54 corrects the drawing position based on detection position information or the like indicating the position of the reference mark detected by the camera 26. An information acquisition unit 54A for acquiring detection position information of the reference mark from the captured image of the camera 26, and a first calculation unit for calculating the first correction amount and the second correction amount based on the detection position information and the setting position information of the reference mark. (54B), the second calculation unit 54C for calculating the first shift amount and the second shift amount, the third calculation unit 54D for calculating the third shift amount and the fourth shift amount, the first shift amount to the fourth shift amount A drawing correction determination unit 54E that determines whether drawing is possible by comparing the amount with each threshold, and the third correction amount is determined according to each of the first to fourth deviation amounts when it is determined that drawing is possible; The drawing position correction part 54F which corrects a drawing position based on 3 correction amounts is provided.

The first calculation unit 54B calculates the "first correction amount" for correcting the drawing position based on the setting position information and the detection position information of the first reference mark, and also sets the setting position information and the detection position of the second reference mark. It is a correction amount calculation unit that calculates a "second correction amount" for correcting the drawing position based on the information.

The second calculation unit 54C calculates the "first shift amount" indicating a shift from the detection position of the first reference mark at the post-correction position when the set position of the first reference mark is corrected by the "first correction amount". In addition, the same kind of criterion for calculating the "second shift amount" indicating a shift from the detection position of the second reference mark of the post-correction position when the setting position of the second reference mark is corrected by the "second correction amount". The error calculating unit between the marks. The "first correction amount" is obtained based on the first reference mark, and the "second correction amount" is obtained based on the second reference mark.

In contrast, the third calculation unit 54D indicates the "third shift amount" indicating a shift from the detection position of the second reference mark at the post-correction position when the set position of the second reference mark is corrected by the "first correction amount". And the "fourth shift amount" indicating a shift from the detection position of the first reference mark at the post-correction position when the set position of the first reference mark is corrected by the "second correction amount". It is an error calculating unit between different kinds of reference marks.

In this embodiment, the 1st reference mark and the 2nd reference mark from which the kind differs are respectively detected from the same board | substrate. As the third calculation unit 54D performs, the deviation amount is obtained by applying the correction amount obtained from the detection result of one of the first reference mark and the second reference mark to the other reference mark, and the correction amount is evaluated from the deviation amount. It becomes possible.

That is, the "third shift amount" which is an error when the "first correction amount" obtained based on the first reference mark is applied as the correction amount of the second reference mark is calculated. The "first correction amount" is evaluated from this "third shift amount". In addition, the "fourth shift amount" which is an error when the "second correction amount" obtained based on the second reference mark is applied as the correction amount of the first reference mark is calculated. The "second correction amount" is evaluated from this "fourth shift amount". By performing such evaluation, the error which has the same tendency can be detected easily.

<Reference mark>

In order to specify the drawing position of the drawing area, the substrate 12 has a plurality of first reference marks DM ₁ to DM ₄ and a plurality of second reference marks LM on the basis of preset reference mark position information and reference mark shape information. ₁ to LM ₄ ) are formed. Here, reference marks formed on the substrate will be described. 8A is a plan view for explaining a reference mark formed on a substrate. 8B is a cross-sectional view along the dashed line in FIG. 8A. 8C and 8D are diagrams showing an example of a modification of the reference mark.

As shown in FIG. 8A, in this embodiment, a substrate 12 having a rectangular shape in plan view is used. Four vertices of the rectangular substrate 12 are referred to as B ₁ to B ₄ . The wiring pattern is formed in the drawing area | region 24A which is a rectangular shape by planar view enclosed by the dashed-dotted line of the surface of the board | substrate 12. As shown in FIG. The four vertices of the rectangular drawing area 24A are called WA ₁ to WA ₄ .

A first reference mark DM, which is a circular hole in plan view, is formed in each of the four corners of the rectangular substrate 12. In total, four first reference marks DM ₁ to DM ₄ are formed on the substrate 12. When it is not necessary to distinguish each of the first reference marks DM ₁ to DM ₄ , the first reference marks DM are collectively referred to. The point shown in the center of the first reference mark DM is the center point of the first reference mark DM. The coordinate value of this center point becomes positional information which shows the position of 1st reference mark DM.

In addition, a second reference mark (LM) in which four holes having a circular shape (diameter smaller than the first reference mark DM) in four corners of the rectangular drawing region 24A are disposed at each vertex of the square. ) Is formed. A total of four second reference marks LM ₁ to LM ₄ are formed on the substrate 12. In addition, when it is not necessary to distinguish each of 2nd reference marks LM ₁ to LM ₄ , it is generically called 2nd reference mark LM. The point shown in the center of 2nd reference mark LM is the center point of 2nd reference mark LM (four holes which comprise LM). The coordinate value of this center point becomes positional information which shows the position of the 2nd reference mark LM.

As shown in Fig. 8B, the substrate 12 is assumed to be a multilayer substrate in which the second layer 12B is laminated on the first layer 12A. The first reference mark DM is a through hole penetrating through the substrate 12, and the substrate 12 is mechanically drilled by punching by a drill or the like. The first reference mark DM is a so-called through hole. The second reference mark LM is a hole (concave) having a bottom opened in the seedling surface of the substrate 12, and is formed so that the first layer 12A of the substrate 12 is exposed by drilling or the like by laser processing. Two layers 12B are perforated and formed. The second reference mark LM is a so-called laser via. As the first reference mark DM and the second reference mark LM, lands, vias, etching marks and the like can be appropriately used. In the case of a multilayer substrate, a part of the circuit pattern already formed in the layer on which the pattern image is formed may be used as the reference mark.

For example, the drilling by the drill and the drilling by laser processing are usually performed in different manufacturing processes (processes). An error having the same tendency is detected between the first reference marks DM formed through the same fabrication process and between the second reference marks LM when the center positions of the reference marks are shifted in the same direction with respect to the center position of the substrate. It is difficult to do On the other hand, the correction amount calculated | required from the detection result of one of a 1st reference mark and a 2nd reference mark using the 1st reference mark DM and the 2nd reference mark LM formed through the other manufacturing process, and the other reference mark It is easy to detect an error having the same tendency by obtaining a deviation amount in the case of applying to and evaluating the correction amount from the deviation amount.

In the above description, an example is described in which a first reference mark DM that is circular in plan view is formed, and a second reference mark LM in which four circular holes are disposed in each vertex of a square in plan view is formed. However, the shape of the reference mark is not limited to this. As mentioned above, the reference mark of a kind different from the 1st reference mark DM and the 2nd reference mark LM should just be detectable separately, and there is no restriction | limiting in particular in the form of a reference mark. For example, in the case where the first reference mark DM and the second reference mark LM are identified by pattern recognition, the first reference mark DM and the second reference mark LM may have shapes that can be distinguished from each other. It can be made into arbitrary shapes, such as these.

For example, as shown in FIG. 8C, the first reference mark DM can be a mark having a rectangular shape in plan view. In addition, as shown to FIG. 8D, the 2nd reference mark LM is a plane which arrange | positioned six marks which are circular (diameter smaller than 1st reference mark DM) in each vertex of a hexagon in plan view. When it is hexagonal mark. In addition, the point shown in the center is the center point of each reference mark.

<Setting position information and detection position information>

9 is a plan view showing the detected positional information acquired from the captured image and the preset set positional information. The detection position information acquired from the picked-up image is shown by the solid line, and the preset setting position information is shown by the dotted line. Hereinafter, the coordinate value which shows detection position information suitably is called "reading value", and the coordinate value which shows setting position information is called "setting value". The correction amount is a correction parameter that is calculated so that the correction value approaches the reading value when the setting value is corrected by the correction amount.

Here, in order to specify the drawing position of the drawing area 24A of the board | substrate 12, the setting position of the reference mark when the board | substrate 12 is arrange | positioned in position with respect to the imaging area 26A of the camera 26 here. Information and the like (various design values) are set as coordinate values. Sensing region (26A) is a rectangular shape as viewed in plan in area is referred to as the four vertices of the rectangular shape in area A ₁ ~ A _4. One of the four vertices (here point A ₁ ) is the origin. Since the origin is determined based on the imaging area 26A of the camera 26, the origin of the set position information (coordinate value) and the origin of the detected position information (coordinate value) acquired from the captured image necessarily coincide.

Position coordinates of the vertices A ₁ to A ₄ of the imaging area 26A, position coordinates of the center of each of the first reference marks DM ₁ to DM ₄ (through holes), and four first reference marks DM ₁ to The position coordinates of the center of DM ₄ ), the coordinates of the set center position G, the position coordinates of the center of each of the second reference marks LM ₁ to LM ₄ (laser via), and four vertices of the drawing region 24A. Each of the position coordinates of WA ₁ to WA ₄ is preset as shown in Tables 1 to 4 below.

<Setting value of shooting area> A ₁ (Origin) A ₂ A ₃ A ₄ Set value (X _A1 , Y _A1 )
= (0, 0) (X _A2 , Y _A2 ) (X _A3 , Y _A3 ) (X _A4 , Y _A4 )

<Setting value of through hole> DM ₁ DM ₂ DM ₃ DM ₄ Set value (X _D1 , Y _D1 ) (X _D2 , Y _D2 ) (X _D3 , Y _D3 ) (X _D4 , Y _D4 )

<Setting value of laser via> LM ₁ LM ₂ LM ₃ LM ₄ Set value (X _L1 , Y _L1 ) (X _L2 , Y _L2 ) (X _L3 , Y _L3 ) (X _L4 , Y _L4 )

<Setting value of drawing area> WA ₁ WA ₂ WA ₃ WA ₄ Set value (X _W1 , Y _W1 ) (X _W2 , Y _W2 ) (X _W3 , Y _W3 ) (X _W4 , Y _W4 )

The position coordinates of the vertices WA ₁ to WA ₄ determine the drawing position of the drawing region 24A. Therefore, in order to correct the imaging position, it is necessary to obtain correction values of the position coordinates of these vertices (WA ₁ ~ WA _4). In other words, the position coordinates of the vertices WA ₁ to WA ₄ of the drawing region after correction are final calculation target values.

The position coordinates of the four vertices B ₁ to B ₄ of the substrate 12 are also set as shown in Table 5 below. In addition, the position coordinates (reading values) of the vertices B ₁ to B ₄ read out from the captured image were also written. In the imaging impossible when the substrate 12 is exceeded, the vertex (B ₁ ~ B ₄₎ detects the position coordinates (readouts) and the error is acceptable in the set position coordinate (setting value), such as causing a departure from the imaging region (26A) Becomes Error of the readout and setting of the present embodiment, the substrate 12 is not possible to draw outside from the imaging region (26A), the vertex (B ₁ ~ B ₄₎ is described as entering the allowable range.

<Setting value and reading value of the board> B ₁ B ₂ B ₃ B ₄ Set value (X _B1 , Y _B1 ) (X _B2 , Y _B2 ) (X _B3 , Y _B3 ) (X _B4 , Y _B4 ) Reading (X _RB1 , Y _RB1 ) (X _RB2 , Y _RB2 ) (X _RB3 , Y _RB3 ) (X _RB4 , Y _RB4 )

<Operation of Exposure Device>

Next, with reference to FIG. 5, operation | movement of the exposure apparatus by this embodiment is demonstrated.

First, in the data creation apparatus 40, vector data representing the entire image pattern including a plurality of wiring patterns to be exposed on the substrate 12 is created. The generated vector data is input to the raster conversion processing unit 50, the vector data is converted into raster data in the raster conversion processing unit 50, and input to the image data correction unit 56, and the image data correction unit 56 is Temporarily stores the input raster data.

When the vector data is input to the raster conversion processing unit 50 as described above, the controller 70 that controls the operation of the entire exposure apparatus 10 outputs an instruction signal to the stage controller 60, and the instruction signal. In response, the stage controller 60 outputs a control signal to the stage driving device (not shown). According to the control signal, the stage driving device (not shown) moves the moving stage 14 from the position shown in FIG. 1 to the predetermined initial position on the upstream side once along the guide 20, and then in the desired stage moving direction. Move at speed.

When the substrate 12 on the moving stage 14 moving as described above passes under the plurality of cameras 26, the image data indicating the substrate 12 is captured by these cameras 26 and represents the captured image. Is input to the drawing position correction unit 54.

The drawing position correction unit 54 detects the first reference marks DM ₁ to DM ₄ , the second reference marks LM ₁ to LM ₄ , and the like of the substrate 12 mounted on the moving stage 14. The detection position information indicating the center position is obtained. As a detection method of a reference mark, a conventionally well-known detection method, such as the pattern recognition method by feature extraction, can be used. For example, pattern matching based on the shape of each reference mark set in the reference mark shape information can be used.

The reference mark position information 52A, the reference mark shape information 52B, the drawing position information 52C, and the allowable error threshold information 52D set as described above are drawn from the reference position storage unit 52. It is output to 54. The drawing position correction unit 54 detects position information of the reference mark acquired from the captured image of the substrate 12 with respect to the first reference marks DM ₁ to DM ₄ and the second reference marks LM ₁ to LM ₄ . The first correction amount and the second correction amount are obtained based on the reference mark position information 52A (setting position information) output from the reference position setting unit 52.

Subsequently, four kinds of shift amounts of the first shift amount to the fourth shift amount are calculated from the first correction amount and the second correction amount, and each of the first correction amount and the second correction amount is evaluated. Based on this evaluation result (1st shift amount-4th shift amount), the correction amount (third correction amount) of drawing position information 52C is calculated from a 1st correction amount and a 2nd correction amount. That is, the third correction amount is calculated to correct the position coordinates of the four vertices WA ₁ to WA ₄ of the drawing region 24A.

Here, correction of the drawing position of a drawing area is demonstrated. As shown in FIG. 9, in this example, the board | substrate 12 and the drawing area | region 24A are rotating to the left while moving to the upper right on the figure. In addition, although the shape of the board | substrate 12 is substantially square in design, on the picked-up image, the shape of the board | substrate 12 is deformed to the rectangle by the variation of a scale ratio.

Fig first correction amount from the four first reference mark (DM ₁ ~ DM ₄₎ readings and setting values shown in Table 2 of the center position from the captured image of the substrate 12 shown in Fig. 9 (ΔX _1, ΔY _1, θ ₁ , Δk _X1 , Δk _Y1 ) are calculated. Further, the second correction amounts ΔX ₂ , ΔY ₂ , θ ₂ , Δk _X2 , Δk _Y2 are obtained from the readings of the center positions of the _four second reference marks LM ₁ to LM ₄ and the set values shown in Table 3 above. It is calculated. From these first correction amounts and second correction amounts, third correction amounts ΔX ₃ , ΔY ₃ , θ ₃ , Δk _X3 , Δk _Y3 are calculated for correcting the drawing position of the drawing region 24A in the order described later.

FIG. 10 is a diagram showing a mode in which the drawing position of the drawing area 24A is corrected to correct the image data. As described above, the drawing position correction unit 54 calculates the correction parameters ΔX ₃ , ΔY ₃ , θ ₃ , Δk _X3 , Δk _Y3 of the third correction amount, and based on these correction parameters, 4 of the drawing region 24A. vertex (WA ₁ WA ~ ₄₎ correcting the set value of the calculated coordinate values after correction of the vertex (WA ₁ ~ WA _4). Thereby, the drawing position information 52C of the drawing area 24A is corrected, and it moves to the drawing position 24A 'after correction from the drawing position 24B (setting value) before correction. Namely, it is close to the detected drawing region 24A (reading value). At the same time, raster data of the drawing area is corrected so that raster data 34B corresponding to the drawing position 24B before correction is converted into raster data 34A corresponding to the drawing position 24A 'after correction.

In addition, in FIG. 9 and FIG. 10, the case where it expanded or contracted in the X direction and the Y direction in addition to the shift and rotation of the X direction and the Y direction was demonstrated. Therefore, in addition to the X direction shift correction amount "ΔX", the Y direction shift correction amount "ΔY" and the rotation correction amount "θ", as the correction parameters, the scale ratio correction amount "Δk _X " in the X direction and the scale ratio correction amount "Δk _Y " in the Y direction Is computed. These correction parameters can be calculated | required by a conventionally well-known method. Thereby, the drawing position information 52C of the drawing area 24A is corrected, and the raster data of the drawing area is shifted in the X direction and the Y direction.

Corrected drawing position information 52C is output to the image data correction unit 56. The image data correction unit 56 corrects the raster data of the drawing area by performing rotation, shift, shift, and the like on the temporarily stored raster data based on the input correction drawing position information 52C. When the corrected raster data is calculated, the moving stage 14 is moved from the downstream position shown in FIG. 1 to the upstream side at a desired speed.

When the tip of the board | substrate 12 is detected by the camera 26, exposure starts. Specifically, the corrected raster data calculated as described above is output to the drawing control unit 58, and the drawing control unit 58 is based on the input corrected raster data and the respective exposure heads 30 of the scanner 24. ), The exposure head 30 turns on / off the micromirror of the mirror device based on the control signal and exposes the wiring pattern according to the corrected raster data on the substrate 12. Then, the control signal is sequentially output to each of the exposure heads 30 in accordance with the movement of the moving stage 14 to perform exposure, and the exposure ends when the rear end of the substrate 12 is detected by the camera 12.

<Correction processing of drawing position>

Next, the correction process of the drawing position performed by this embodiment is demonstrated in detail. 11 is a flowchart showing a routine of a drawing position correction process executed as a drawing position correction unit. This processing routine is stored as a program in a storage unit (not shown) such as a hard disk device of the drawing apparatus, which is read from the storage unit and executed by the controller 70.

First, a captured image is acquired from the camera 26 in step 100. FIG. Subsequently, in step 102, the reference mark shape information 52B is read out from the reference position storage unit 52, and the first reference marks DM ₁ to DM ₄ and the second reference marks from the captured image of the substrate 12 by pattern recognition or the like. (LM ₁ to LM ₄ ), etc. are detected.

Next, the first detection position information (read value) indicating the center position of the first reference marks DM ₁ to DM ₄ detected in step 104 and the first position indicating the center position of the second reference marks LM ₁ to LM ₄ . 2 Acquire detection position information (reading value).

Subsequently, in step 106, the reference mark position information 52A, that is, the first setting position information (setting value) indicating the center position of the first reference marks DM ₁ to DM ₄ and the second reference marks LM ₁ to LM _4. The second set position information (set value) indicating the center position of &quot;

Subsequently, in step 108, a first correction amount is calculated from the read value and the set value for the first reference marks DM ₁ to DM ₄ , and the read value for the second reference marks LM ₁ to LM ₄ . And a second correction amount are calculated from the set value (first calculation unit). The first correction amount is represented by (ΔX ₁ , ΔY ₁ , θ ₁ , Δk _X1 , Δk _Y1 ), and the second correction amount is a correction parameter represented by (ΔX ₂ , ΔY ₂ , θ ₂ , Δk _X2 , Δk _Y2 ). .

Next, in step 110, an error calculation process for calculating the first shift amount (error δ ₁ ) and the second shift amount (error δ ₂ ) is performed. That is, the set value of the first reference marks DM ₁ to DM ₄ is corrected by the first correction amount. The correction value is close to the reading but not completely consistent. Thus, the error δ ₁ from the read values of the first reference marks DM ₁ to DM ₄ of the correction value is calculated. Similarly, calculating the error (δ ₁₎ from the reading value of the second reference mark (LM ₁ ~ LM ₄₎ set value corrected and a second reference mark of the correction value (LM ₁ ~ LM ₄₎ of the said second correction amount do.

The calculation method of an error (deviation amount) is various. For example, the calculation processing of the first shift amount (error δ ₁ ) will be described. As already illustrated, each of the set values of the first reference marks DM ₁ to DM ₄ is corrected by the first correction amount. Then, the distance between the correction value and the read value can be obtained for each of the first reference marks DM ₁ to DM ₄ , and the maximum value thereof can be set as the “deviation amount”.

Next, in step 112, an error arithmetic processing for calculating the third shift amount (error δ ₃ ) and the fourth shift amount (error δ ₄ ) is performed. That is, the set values of the second reference marks LM ₁ to LM ₄ are corrected by the first correction amount obtained from the read values and the set values of the first reference marks DM ₁ to DM ₄ . The error δ ₃ from the read values of the second reference marks LM ₁ to LM ₄ of the obtained correction value is calculated. Similarly, the set values of the first reference marks DM ₁ to DM ₄ are corrected with the second correction amount obtained from the read values and the set values of the second reference marks LM ₁ to LM ₄ , and the first reference marks of the correction values. It computes the error (δ ₄₎ from the reading value of (DM ₁ ~ DM _4).

Subsequently, the allowable error threshold information 52D is read out from the reference position storage unit 52 in step 114, and the calculated error δ ₁ , the error δ ₂ , the error δ ₃ , and the error δ ₄ , respectively. It is determined whether or not it is equal to or less than this predetermined threshold. That is, it is determined whether or not the deviation amount after correction falls within the allowable range, and whether drawing is possible or not. In the case of a negative determination in step 114, the flow advances to step 120, where the substrate removal (reject) is instructed in step 120, and the routine of the correction process is completed. On the other hand, if affirmative determination is made in step 114, the flow proceeds to step 116.

Further, in the present embodiment, it is determined at a time whether or not each of the error δ ₁ , the error δ ₂ , the error δ ₃ , and the error δ ₄ calculated in step 114 is below the threshold, but the error δ ₁ ), each time the error δ ₂ , error δ ₃ and error δ ₄ are computed, the error δ ₁ is below the threshold, the error δ ₂ is below the threshold, or the error δ ₃ ) May be determined to be equal to or less than the threshold and whether the error δ ₄ is equal to or less than the threshold.

Next, in step 116, the third correction amount ΔX ₃ obtained by dividing the first correction amount and the second correction amount based on the values of the error δ ₁ , the error δ ₂ , the error δ ₃ , and the error δ ₄ . , ΔY ₃ , θ ₃ , Δk _X3 , Δk _Y3 ) are obtained. For example, the error (δ _1), the error (δ _2), the error (δ ₃₎ and the error (δ ₄₎ the sum _{(δ 1 + δ 2 + δ} 3 + δ 4) to obtain the corresponding errors (δ in ₁ ), the third correction amount obtained by dividing the first correction amount and the second correction amount is obtained according to the ratio of the sum of the error δ ₂ , the error δ ₃ , and the error δ ₄ . Specifically, when focusing on the correction parameter "ΔX", ΔX ₁ of the first correction amount is (δ ₂ + δ ₄ ) / (δ ₁ + δ ₃ ) / (δ ₁ + δ ₂ + δ ₃ + δ ₄ ). At δ ₁ + δ ₂ + δ ₃ + δ ₄ , ΔX ₂ of the second correction amount is respectively weighted to calculate ΔX ₃ of the third correction amount.

Alternatively, as another dividing method, the first reference marks DM ₁ to DM ₄ depend on the ratio of the corresponding error δ ₁ , the error δ ₂ , the error δ ₃ , and the error δ ₄ . The virtual detection position information is calculated by dividing the detection position information (read value), and a third correction amount can be obtained from the calculated virtual detection position information and the first setting position information (setting value). Similarly, the second detection position of the second reference marks LM ₁ to LM ₄ according to the ratio to the sum of the corresponding error δ ₁ , the error δ ₂ , the error δ ₃ and the error δ ₄ . The virtual detection position information may be calculated by dividing the information (read value), and the third correction amount may be obtained from the calculated virtual detection position information and the second setting position information (set value).

Next, based on the 3rd correction amount obtained in step 118, the drawing position of a drawing area | region is correct | amended, and the routine of the correction process of a drawing position is complete | finished. In other words, four vertices of a rendering area (24A) on the set (WA ₁ ~ WA ₄₎ routine of the correction process of the imaging position is executed the correction of position coordinates as each operation, and the imaging position correction unit 54 of FIG. 5 in This ends.

In addition, in the said embodiment, although the example which formed the 1st reference mark (through hole) in the peripheral part of the board | substrate was demonstrated, the position which forms a 1st reference mark is not limited to a peripheral part. For example, even in multilayer boards, such as a multilayer printed wiring board, a 1st reference mark can be formed also in a center part as long as it is a position which does not affect the wiring pattern of each layer. In addition, about the 2nd reference mark (laser via), as mentioned above, a part of the circuit pattern already formed can be used as a 2nd reference mark.

In addition, although this embodiment demonstrated the case where this invention was applied to the exposure apparatus and the exposure method, it is not limited to this, For example, the coating apparatus which apply | coats a solder resist etc. to a predetermined area | region of a board | substrate, an application method, an inkjet printer, It can also be used for an inkjet printing method. That is, this invention can be applied also to the apparatus which draws by the spot of the discharged liquid droplet.

Claims (10)

Imaging that can capture a drawing target having a plurality of first reference marks and a plurality of second reference marks formed on the drawing target to specify a drawing position of the drawing region as a drawing target on which a pattern image is drawn in the drawing region. part;
First reference position information indicating first setting position information indicating setting positions of the plurality of first reference marks, second setting position information indicating setting positions of the plurality of second reference marks, and the drawing position of the drawing area; A storage unit that stores drawing position information corresponding to the second reference mark, and threshold information indicating an allowable range of the deviation amount after correction of the first reference mark and the second reference mark;
The first reference mark and the second reference mark are detected from the captured image of the drawing target, and the first detection position information indicating the detection position of the first reference mark and the second detection indicating the detection position of the second reference mark. An acquisition unit for acquiring position information;
A first correction amount for correcting the drawing position is calculated based on the first detection position information and the first setting position information, and the drawing is performed based on the second detection position information and the second setting position information. A first calculating unit calculating a second correction amount for correcting a position;
A first shift amount indicating a shift from a detection position of the first reference mark when the set position of the first reference mark is corrected by the first correction amount is calculated, and the second reference amount is used as the second correction amount. A second calculation unit for calculating a second shift amount indicating a shift from the detection position of the second reference mark when the setting position of the mark is corrected;
The third reference amount indicating a deviation from the detection position of the second reference mark when the setting position of the second reference mark is corrected by the first correction amount is calculated, and the first reference value is used as the second correction amount. A third calculation unit for calculating a fourth shift amount indicating a shift from the detection position of the first reference mark when the setting position of the mark is corrected;
The first shift amount, the second shift amount, and the third shift amount, when the first shift amount, the second shift amount, the third shift amount, and the fourth shift amount do not exceed a threshold set for each. A correction unit that obtains the third correction amount from the first correction amount and the second correction amount according to the amount and the fourth shift amount, and corrects the drawing position based on the obtained third correction amount; And
And a drawing unit for drawing the pattern image at a corrected drawing position on the drawing target. The method of claim 1,
The drawing apparatus according to claim 1, wherein the first reference mark and the second reference mark are formed on the drawing object through different manufacturing steps. The method according to claim 1 or 2,
The writing apparatus according to claim 1, wherein one of the first reference mark and the second reference mark is a through hole, and the other is a hole having a bottom opened in the seedling surface. The method according to claim 1 or 2,
One of the first reference mark and the second reference mark is a mechanically perforated through hole, and the other is a hole having a bottom perforated to form a recess in the seed surface by laser processing. The method according to claim 1 or 2,
And the first reference mark and the second reference mark are distinguishable from each other by pattern recognition. The method according to claim 1 or 2,
The storage section further stores first shape information indicating the shape of the first reference mark and second shape information indicating the shape of the second reference mark;
The acquiring section obtains the first reference mark and the second reference image from the captured image by pattern recognition based on first shape information indicating the shape of the first reference mark and second shape information indicating the shape of the second reference mark. The drawing apparatus which detects a reference mark. The method according to claim 1 or 2,
The first correction amount corresponding to the case where the sum of the first shift amount, the second shift amount, the third shift amount, and the fourth shift amount is the total shift amount, the first shift amount, the second shift amount, And the third correction amount is obtained by subdividing the first correction amount and the second correction amount based on a ratio of the third shift amount and the fourth shift amount to the total shift amount. The method according to claim 1 or 2,
The first correction amount corresponding to the case where the sum of the first shift amount, the second shift amount, the third shift amount, and the fourth shift amount is the total shift amount, the first shift amount, the second shift amount, Based on the ratio of the third shift amount and the fourth shift amount to the total shift amount, one of the first detection position information and the second detection position information is undivided to calculate virtual detection position information, and the virtual And the third correction amount is obtained based on one of the first set positional information and the second set positional information corresponding to the detected positional information and the virtual detected positional information. Imaging that can capture a drawing target having a plurality of first reference marks and a plurality of second reference marks formed on the drawing target to specify a drawing position of the drawing region as a drawing target on which a pattern image is drawn in the drawing region. A recording medium applied to a drawing apparatus having a section, for recording a program for drawing a pattern image at a corrected drawing position on a drawing target based on a captured image of the imaging section:
Computer,
First reference position information indicating first setting position information indicating setting positions of the plurality of first reference marks, second setting position information indicating setting positions of the plurality of second reference marks, and the drawing position of the drawing area; A storage unit that stores drawing position information corresponding to the second reference mark, and threshold information indicating a permissible range of deviation amounts after correction of the first reference mark and the second reference mark;
The first reference mark and the second reference mark are detected from the captured image of the drawing target, and the first detection position information indicating the detection position of the first reference mark and the second detection indicating the detection position of the second reference mark. An acquisition unit for acquiring position information,
A first correction amount for correcting the drawing position is calculated based on the first detection position information and the first setting position information, and the drawing is performed based on the second detection position information and the second setting position information. A first calculating unit for calculating a second correction amount for correcting a position,
A first shift amount indicating a shift from a detection position of the first reference mark when the set position of the first reference mark is corrected by the first correction amount is calculated, and the second reference amount is used as the second correction amount. A second calculation unit that calculates a second shift amount indicating a shift from the detection position of the second reference mark when the setting position of the mark is corrected,
The third reference amount indicating a deviation from the detection position of the second reference mark when the setting position of the second reference mark is corrected by the first correction amount is calculated, and the first reference value is used as the second correction amount. A third calculating unit that calculates a fourth shift amount indicating a shift from the detection position of the first reference mark when the setting position of the mark is corrected, and
The first shift amount, the second shift amount, and the third shift amount, when the first shift amount, the second shift amount, the third shift amount, and the fourth shift amount do not exceed a threshold set for each. Program for causing the third correction amount to be obtained from the first correction amount and the second correction amount in accordance with the amount and the fourth shift amount, respectively, and functioning as a correction unit for correcting the drawing position based on the obtained third correction amount; And a recording medium. Imaging a drawing object having a plurality of first reference marks and a plurality of second reference marks formed on the drawing object to specify a drawing position of the drawing area as a drawing object on which a pattern image is drawn in the drawing area;
First reference position information indicating first setting position information indicating setting positions of the plurality of first reference marks, second setting position information indicating setting positions of the plurality of second reference marks, and the drawing position of the drawing area; Drawing position information corresponding to the second reference mark and threshold information indicating a permissible range of the deviation amount after correction of the first reference mark and the second reference mark;
The first reference mark and the second reference mark are detected from the captured image of the drawing target, and the first detection position information indicating the detection position of the first reference mark and the second detection indicating the detection position of the second reference mark. Acquire location information;
A first correction amount for correcting the drawing position is calculated based on the first detection position information and the first setting position information, and the drawing is performed based on the second detection position information and the second setting position information. Calculate a second correction amount for correcting the position;
A first shift amount indicating a shift from a detection position of the first reference mark when the set position of the first reference mark is corrected by the first correction amount is calculated, and the second reference amount is used as the second correction amount. Calculating a second shift amount indicating a shift from the detection position of the second reference mark when the setting position of the mark is corrected;
The third reference amount indicating a deviation from the detection position of the second reference mark when the setting position of the second reference mark is corrected by the first correction amount is calculated, and the first reference value is used as the second correction amount. Calculating a fourth shift amount indicating a shift from the detection position of the first reference mark when the setting position of the mark is corrected;
The first shift amount, the second shift amount, and the third shift amount, when the first shift amount, the second shift amount, the third shift amount, and the fourth shift amount do not exceed a threshold set for each. Obtaining the third correction amount from the first correction amount and the second correction amount according to the amount and the fourth shift amount, respectively, and correcting the drawing position based on the obtained third correction amount;
And the pattern image is drawn at a corrected drawing position on the drawing target.

Images