KR20100127742A - Modular linear motor armature and modular linear motor having same, and conveying device - Google Patents

Abstract

In the present invention, when the thrust is increased, a large thrust specification can be realized by connecting a large number of modular armatures in series or in parallel without changing the length specification of the armature lead wire according to the customer's specification, and at the same time, it is a cheap modular. Provided is a linear motor armature and a modular linear motor and a conveying device having the same. The armature unit (1) located at the foremost part of the armature group formed by arranging a connector for connecting the leads of the armature winding to each modular armature unit (1) and connecting a plurality of armature units in the thrust direction A lead connecting unit 2 is provided to connect the terminal output of the lead of the winding to supply power from an external power source. The armature unit 1 located at the rearmost part of the armature group is connected to the neutral point of the armature winding. The neutral point unit 3 was provided, and the lead connection unit 2 and the neutral point unit 3 were separated from the modular armature 1.

Description

MODULAR TYPE LINEAR MOTOR ARMATURE, MODULAR TYPE LINEAR MOTOR HAVING THE ARMATURE, AND CONVEYOR APPARATUS

The present invention relates to an AC three-phase linear motor armature, which is used for various industrial machines such as, for example, an electric component mounting device, a semiconductor related device, or a machine tool, and is suitable for driving a linear motion mechanism thereof. The present invention relates to a modular linear motor armature that separates a portion from a neutral point processing unit, and a modular linear motor and a conveying apparatus having the same.

Conventionally, for example, it is used for various industrial machines, such as an electric component mounting apparatus, a semiconductor or liquid crystal related manufacturing apparatus, or a machine tool, and is suitable for the drive of the linear motion mechanism, and is provided with the armature which combined several modules. Modular linear motor armatures and linear motors are known (see Patent Document 1, for example).

The modular linear motor armature described in Patent Literature 1 is composed of at least a proximal end module, an intermediate module, and a proximal end module. By combining these modules, productivity of installation and the like and productivity by mass production effects are improved. It is intended to improve.

Japanese Laid-Open Patent Publication No. 2001-275336 (pages 5 to 7 of the specification, Fig. 1)

By the way, since the conventional linear motor armature does not separate the lead wire portion and the armature, when the modular armature of the same model is arranged in parallel in the direction orthogonal to the thrust direction of the linear motor, the lead wire from each armature end Since these two come out, there existed a problem that connection processing, cable processing, etc. became cumbersome.

Similarly, when a large number of modular armatures are connected and connected in series, the wiring process becomes complicated, so that the number of armatures can be varied as needed in general, so that the lead wire portion can be freely detached from the modular armature that can be detached. Rescue was required.

In recent years, in all markets including the liquid crystal and semiconductor manufacturing sectors, the demand for large thrust of linear motors is increasing. However, for example, new design is required for the required thrust of the linear motor at the same time, and the thrust is changed. Considering the lineup of models, the number of linear motor armatures will increase as the number of lineups increases. Therefore, under such circumstances, since the specifications of the armature's thrust direction, the shape and number of armature coils, and the length of the armature lead wires are different according to the customer specifications of the linear motor, in particular, a plurality of modular armatures are connected in series. When a combination of multiple arrangements in parallel or in parallel is required, it is necessary to prepare a considerable number of product lineups, which has a problem of affecting product cost, and also customer product price and delivery date.

Therefore, a modular armature with low product cost has been required while maintaining a large thrust specification by connecting a large number of modular armatures in series and in parallel.

The present invention has been made in view of the above problems, and the lead wire portion and the neutral point portion in the modular armature structure of the linear motor are separated, and in the case of increasing the thrust, the length specification of the lead wire of the armature changes according to the customer specification. It is an object of the present invention to provide an inexpensive modular linear motor armature, a modular linear motor and a conveying device having the same, by allowing a large number of modular armatures to be connected in series and in parallel to realize large thrust specifications.

In order to solve the said problem, this invention is comprised as follows.

The invention of claim 1 is a modular linear motor armature configured by sequentially connecting a plurality of armature units formed by mounting an armature winding of m phase (m is an integer) composed of a plurality of coil groups in the thrust direction, wherein each armature Connection terminals for connecting the leads of the armature winding are arranged at one end and the other end of the unit, and the armature unit located at the foremost part of the armature group formed by connecting a plurality of the armature windings in the thrust direction has the armature winding of the armature winding. A lead unit connecting unit for connecting the terminal output of the lead to supply power from an external power source is provided, and a neutral point unit for conducting wiring of the neutral point of the armature winding to the armature unit located at the rearmost portion of the armature group. It is characterized by the provision.

In addition, the invention of claim 2 is the modular linear motor armature according to claim 1, wherein the armature unit is the armature in a plurality of teeth arranged at the same pitch toward the longitudinal direction of the armature core made of a magnetic material It is characterized by forming a core-mounted armature structure which is wound by winding the winding intensively and fixed on the armature base.

In addition, the invention of claim 3 is characterized in that each of the armature units has a modular linear motor armature according to claim 1 or 2 so as to cancel cogging thrust generated at teeth at both ends of the armature unit. The lead portion connecting unit and the neutral point unit to be connected are assembled with sub-toothed portions.

According to a fourth aspect of the present invention, in the modular linear motor armature according to claim 3, the lead portion connecting unit includes a pole sensor portion for detecting an initial magnetic pole of the linear motor.

In addition, in the modular linear motor armature according to claim 1, the invention of claim 5 includes the armature unit, the lead portion connecting unit, and the neutral point unit in n parallel arrangement configurations (n is an integer of 2 or more), The lead unit connection unit includes a distribution circuit for dividing the current supplied to the lead unit connection unit from an external power source by n, and a terminal for connecting the armature unit to supply the current divided by the distribution circuit to each armature unit. The said neutral point unit is provided with the connection circuit and terminal which connect the terminal part of the armature winding of each armature unit individually.

According to a sixth aspect of the present invention, in the modular linear motor armature according to claim 1 or 2, each armature unit is divided into a plurality of armature blocks.

In addition, the invention of claim 7 is the modular linear motor armature according to claim 1, wherein each armature unit is formed by arranging a plurality of coil groups at equal intervals in the longitudinal direction of the substrate to form resin armature windings. A coreless armature is formed by being fixed on an armature base.

The invention according to claim 8 is characterized in that, in the modular linear motor armature according to claim 7, the thrust direction length of the armature base is an integer multiple of electric angle 360 °.

The invention according to claim 9 is characterized in that in the modular linear motor armature according to claim 7, the electric phase arrangement between the armature units is arranged so as to have a phase difference of 120 ° or 240 °. .

The invention of claim 10 is characterized in that in the modular linear motor armature according to claim 7 or 9, the connection of each armature unit is connected by either serial connection or parallel connection.

The invention of claim 11 is the modular linear motor armature according to claim 1, wherein both ends of the armature base and the ends of the armature lead portion connecting unit and the neutral point unit are connected by connectors. Doing.

In addition, the invention of claim 12 includes the modular armature according to any one of claims 1 to 11 and a plurality of permanent magnets arranged opposite to each other through magnetic pores with the armature and alternately having fixed polarities alternately to the fixing portion. It is characterized in that it is a modular linear motor having a field arranged in an arrangement, wherein one of the armature and the field is used as a stator and the other is a mover so as to relatively travel the field and the armature.

Moreover, invention of Claim 13 is a conveying apparatus which makes a moving table run using the modular linear motor of Claim 12. It is characterized by the above-mentioned.

According to the invention of Claims 1 and 2, an armature having a plurality of thrust specifications can be realized with one type of modular armature.

Moreover, according to invention of Claim 3, the cogging thrust which generate | occur | produces in the front-back both ends of a linear motor can be canceled.

Moreover, according to invention of Claim 4, it can be made into the state which can be driven immediately at the time of linear motor power supply.

Moreover, according to invention of Claim 5, the thrust increase in the width direction can be implement | achieved with one type of modular armature.

Moreover, according to invention of Claim 6, many core blocks of an armature can be connected and arrange | positioned easily, and assembly can also be made easy.

Moreover, according to invention of Claim 1 and 7, the armature of several thrust specification can be realized with one type of modular armature.

Furthermore, according to the invention of claim 8, when connecting a plurality of armatures, phase alignment can be achieved simply by facing the armature base without requiring fine phase adjustment between the armatures, thereby ensuring motor performance. It is possible to shorten the working time when assembling the motor to the machine.

In addition, according to the invention described in claim 9, it becomes possible to reduce the connection portions of the plurality of armatures, that is, the spaces that do not contribute to the thrust generation.

According to the invention of claim 10, it is possible to cope with all the specifications, such as series connection when the specification has a current limit, and parallel connection when the specification has a voltage limit.

According to the invention described in claim 11, in the case where a large number of armatures are arranged to be connected, the connection structure of the lead portion connecting unit and the neutral point unit can achieve common use of the components with respect to the connection structure of the modular armature, and the detachment and detachment of each unit is performed. It can provide a modular armature that is free and inexpensive.

Moreover, according to invention of Claim 12, the modular linear motor which has the effect of the modular armature of Claims 1-11 can be obtained.

Moreover, according to invention of Claim 13, the conveying apparatus which has the effect of the modular linear motor of Claim 12 can be obtained.

1 is a plan view showing the overall configuration of a modular core-mounted linear motor armature according to a first embodiment of the present invention.
2 is a plan view showing an example in which two modular armature units of the first embodiment are connected in series;
Fig. 3 is a modified example of the lead connecting unit in the first embodiment, in which (a) shows a case where the lead protrudes to the side, (b) shows a case where the lead protrudes upward,
4 is a plan view of a parallel lead portion connecting unit according to a second embodiment of the present invention;
Fig. 5 is a diagram showing the overall configuration of a modular core-mounted linear motor armature to which the parallel lead portion connecting unit in the second embodiment is applied, wherein (a) is a plan view in which these are disassembled, and (b) shows them. It is the top view which combined
6 is an example in which two modular coreless linear motor armatures in series according to a third embodiment of the present invention are connected in series. (C) is the side view which connected each armature unit,
FIG. 7 is an example in which two modular coreless linear motor armatures showing a fourth embodiment of the present invention are connected in series, (a) and (b) are side views thereof;
8 is a diagram showing an example of a modular coreless linear motor armature to which a parallel lead portion connecting unit showing a fifth embodiment of the present invention is applied;
9 is a side cross-sectional view of a typical core mounted modular linear motor.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described with reference to drawings.

Example  One

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view showing the overall configuration of a modular core-mounted linear motor armature according to a first embodiment of the present invention, in which a modular armature unit, a lead portion connecting unit, and a neutral point unit are disassembled.

In Fig. 1, reference numeral 1 denotes a modular armature unit, and an armature winding (not shown) of an m phase (m is an integer) made up of a plurality of coil groups is mounted on an armature core (not shown). The end has a connector structure for enabling electric power supply to the armature.

Reference numeral 2 is a lead connecting unit, reference 3 is a neutral point unit, and 4 is a pole sensor. Reference numeral 5 denotes a sub-toothed portion, and the lead portion connecting unit 2 and the neutral point unit 3 have a connector structure like the modular armature 1.

The features of the present invention differ from the prior art as follows.

That is, in FIG. 1, the terminal (connector 7) for connecting the armature winding lead is arrange | positioned at the both ends of the armature unit 1, and the armature winding is one end of the armature unit 1. A lead connection unit 2 for connecting the terminal output of the lead of the lead to the power supply from the external power source is provided, and at the other end of the armature unit 1, a neutral point unit for wiring the neutral point of the armature winding ( 3), and the lead part connection unit 2 and the neutral point unit 3 have a structure separated from the modular armature 1. And the edge part of the lead part connection unit 2 and the neutral point unit 3 has the connection structure which has the connectors 8 and 9 similarly to the edge part of the armature unit 1, respectively.

Here, FIG. 9 shows a side sectional view of a general core mounted modular linear motor.

The interior of the armature unit 1 used in this embodiment (FIG. 1) is basically the same as the linear motor of FIG. 9, in FIG. 9 divided into a plurality of armature blocks 20 and arranged in the direction of thrust. The core-mounted armature structure which is fixed on the base 24 is comprised. The block core of each armature block 20 is concentrated on the plurality of teeth 20a and the teeth 20a which are integer multiples of constants arranged at the same pitch in the longitudinal direction of the armature core made of a magnetic material. The wound armature coil 21 is provided. The armature unit 1 is disposed opposite to the stator made of the field magnetic poles 22 arranged at the same pitch on the yoke 23 and the yoke 23 via the magnetic gap.

In addition, as shown in FIG. 1, the effect of the armature unit 1 connected by the connectors 7, 8, and 9 to the lead connection unit 2 and the neutral point unit 3 is integrated. Thus, a sub-teeth portion 5 for assembling the cogging thrust generated at the teeth at both ends of the armature unit 1 is assembled.

In addition, in FIG. 1, the lead part connection unit 2 is equipped with the pole sensor 4 which detects the initial stage magnetic pole of a linear motor. In addition, when the pole sensor is not built in, the magnetic pole detection operation by software is required.

FIG. 2 is a plan view showing an example in which two modular armature units of the first embodiment are connected in series.

In FIG. 1, an example of one modular armature (an armature unit 1) is illustrated and described. In FIG. 2, a modular type configured by sequentially connecting a plurality of armature units 1 (here two) in the direction of thrust. The armature of the linear motor will be described.

That is, in FIG. 2, the terminal (connector 7) for connecting the armature winding lead is arrange | positioned in each modular armature unit 1, and the most front part of the armature group formed by connecting in the thrust direction many directions. An armature unit (1) located at is provided with a lead connecting unit (2) for connecting a terminal output of a lead of the armature winding to supply power from an external power source, and an armature unit located at the rearmost portion of the armature group. In (1), the neutral point unit 3 for wiring the neutral point of the armature winding is provided, and the lead connection unit 2 and the neutral point unit 3 are separated from the modular armature 1. .

With such a configuration, the linear motor of twice the thrust can be realized by connecting two modular armatures in series, connecting a lead part connecting unit to the front end and a neutral point unit to the rear part.

Next, the relationship between the increase in thrust and the number of parts in the case where two modular armatures in the first embodiment are connected in series can be basically expressed by the relation shown in Table 1 below.

thrust Modular armature Lead unit Neutral Unit 1x 1 unit One One Twice 2 units One One 3 times 3 units One One

As for the operation, a moving magnetic field can be generated by energizing m-phase alternating current to the lead of the armature winding in the armature unit shown in Fig. 2, but combining the armature unit with a permanent magnet field (not shown) is a synchronous motor. It operates as an induction motor when the combination of the armature unit and the field having a conductive material is substituted for the permanent magnet field.

Accordingly, the first embodiment of the present invention provides a lead connecting unit 2 for supplying power from an external power source to one end of the armature unit, and connects the neutral point of the armature winding to the other end of the armature unit 1. The neutral point unit 3 to be processed is provided, and the lead part connection unit 2 and the neutral point unit 3 are separated from the modular armature 1, and at the same time, the armature unit 1 and the lead part connection unit 2 are provided. And since each end of the neutral point unit 3 was connected by the connector, when it is necessary to arrange and arrange a plurality of modular armatures, the connection structure of the lead part connection unit 2 and the neutral point unit 3 is modular. Since the common use of parts is planned for the connection structure of the armature 1, armatures having a plurality of thrust specifications that can increase the change in thrust by using one type of modular armature can be realized. The removal of the free, and can provide a modular fittings low-cost products.

In addition, since the sub-toothed portions are assembled in the lead connecting unit and the neutral point unit, the cogging thrust generated at both front and rear ends of the linear motor can be canceled.

In addition, since the lead portion connecting unit has a built-in pole sensor portion for detecting the initial magnetic pole of the linear motor, it can be brought into a ready state when the linear motor power is turned on.

Next, FIG. 3 is a modified example of the lead portion connecting unit in the first embodiment, in which (a) shows a case where the lead protrudes to the side, and (b) shows a case where the lead protrudes upward. .

In FIG. 3, the lead part connection unit 2 has three types which protrude the extraction direction of a lead part to the front which is the thrust direction of a linear motor, or protrude in the horizontal direction or upper direction which is a direction orthogonal to the thrust direction of a linear motor. By using it, the extraction direction of the lead of the armature unit can be changed flexibly, so that space can be saved without complicating the wiring process and the cable process.

Example  2

Next, a second embodiment of the present invention will be described.

Fig. 4 is a diagram showing a plan view of a parallel lead portion connecting unit according to a second embodiment of the present invention, and Fig. 5 is a modular core to which the parallel lead portion connecting unit in the second embodiment is applied. The figure which shows the whole structure of a mounted linear motor armature, (a) is the top view which disassembled these, and (b) is the top view which combined these.

The second embodiment differs from the first embodiment in that the armature unit 1, the lead connecting unit 2, and the neutral point unit 3 are configured in n parallel arrangements (n = 2 in this example). The secondary connection unit 2 is provided with a distribution circuit (not shown) for dividing the current supplied to the lead portion connection unit 2 from an external power source (not shown) and the current divided by the distribution circuit (not shown). Terminals for connecting with each armature unit 1 are provided so as to be supplied to each armature unit 1, and the neutral point unit 3 is not shown for individually connecting end portions of the armature windings of each armature unit 1. The connection circuit and the terminal which do not have a structure are provided.

In addition, the second embodiment has a structure in which the lead portion and the modular armature unit are separated as in the first embodiment, and the parts can be shared when the thrust of the linear motor is increased.

With such a configuration, a linear motor of double thrust can be realized by connecting two modular armature units in parallel, connecting the lead unit parallel unit 6 to the front end, and the neutral point unit to the rear part.

Next, the relation between the modular armature thrust increase and the number of parts in the case where two modular armatures in the second embodiment are connected in parallel is as follows.

thrust Modular armature Lead unit Neutral Unit 1x 1 unit One One Twice 2 units 1 (2 parallel units) 2 3 times 3 units 1 (3 parallel units) Three

Accordingly, the second embodiment of the present invention can realize an increase in thrust in a direction perpendicular to the thrust direction with one kind of modular armature, so-called width direction of the modular armature.

In general, since two types of thrust expansion methods are taken in parallel and in series with one type of armature unit, productivity can be significantly improved, such as product inventory management of a linear motor and parts inventory management.

Example  3

6 is an example in which two modular coreless linear motor armatures in series according to a third embodiment of the present invention are connected in series, (a) schematically showing a front view and a side view, and (b) each armature unit. (C) is a side view which connected each armature unit.

In Fig. 6, reference numeral 11 denotes a field, and is composed of magnets 11b mounted at equal intervals so that the other poles face each other and the polarities alternately alternately inside the c-shaped field yoke 11a. .

Reference numeral 12 denotes an armature unit, and the armature unit 12 uses the armature winding formed by arranging a plurality of coil groups in the longitudinal direction of the substrate as a substrate set 12c, and the substrate set 12c. ) Is fixed on the armature base 12d to form a coreless modular linear motor armature. The front and rear ends of the armature base 12d have a connector 15 so that a plurality of armature units 12 can be connected to the connector. Reference numeral 13 is a lead protruding unit, which has a structure having a connector 16 and is connected to the front end connector 15 of the armature base 12d. Reference numeral 14 is a neutral point unit, which has a structure having a connector 17, is connected to the rear end connector 15 of the armature base 12d, and performs a neutral point connection process of the armature winding.

From such a structure, the current can flow through all the armatures through the lead projecting unit 13 regardless of the number of armatures 1, thereby making it possible to cope with all thrust specifications.

In addition, as shown in FIG. 6, when the thrust direction length of the armature 1 is represented by the electric angle, it is made into integer multiple of 360 degrees.

As a result, when the plurality of armature units 12 are connected, phase alignment between the armatures is possible only by bringing the armature base 12d into contact with the armature unit 12, thereby reducing the work time when assembling the motor to the machine. In addition, when a plurality of conventional armatures are used in connection with each other, there is a drawback that it takes time to assemble the motor to the machine because it is necessary to position the armatures at a predetermined distance. It is to solve.

Example  4

Fig. 7 is an example in which two modular coreless linear motor armatures showing a fourth embodiment of the present invention are connected in series, and (a) and (b) are side views thereof.

When the armature has a module configuration, the armature coil cannot be disposed at the connecting portion of each armature. As shown in Fig. 7A, when the armature length is an integral multiple of the electrical angle 360 °, it does not contribute to thrust generation. The space which does not become large becomes large, and the motor constant density becomes small when it sees with the whole module. On the other hand, as shown in Fig. 7 (b), when the coil arrangement is moved 120 ° or 240 ° for each armature, the connecting portion of each armature, i.e., the space not contributing to the thrust generation can be greatly suppressed. It becomes possible to prevent the fall of the motor constant density seen from the whole.

Example  5

Fig. 8 is an example of a modular coreless linear motor armature to which a parallel lead portion connecting unit showing a fifth embodiment of the present invention is applied.

6 and 7 show an example in which a plurality of armatures are connected in series, but FIG. 8A is an exploded side view of the armature unit 12, the lead protruding unit 13, and the neutral point unit 14, and FIG. The top view of (a), (c) is the side view which connected each unit of (a), (d) is the top view of (c).

By adjusting the number of armature modules, although it is possible to cope with all thrust specifications, in general, specifications such as voltage, current, or speed are often added. For example, a series connection can be selected for the current specification (○ A or less), and a parallel connection can be selected for the voltage specification (○ V or less) or speed specification (maximum speed ○ 광범위한). Compatible with the specification becomes possible.

Therefore, according to the third to fifth embodiments of the present invention, in the coreless linear motor having the characteristics of no magnetic attraction force and no cogging, and capable of low-speed ripple driving compared to the core-mounted linear motor, it is thousands to tens of thousands of N. It is possible to cope with all thrust specifications to be made by connecting a plurality of types of armature modules in series, in series or in parallel.

In addition, since parts can be suppressed with a minimum number of parts, the motor can be manufactured at a low cost and can be provided to the customer at a low price.

Industrial availability

According to the present invention, by separating the lead wire portion and the neutral point portion in the modular armature structure of the linear motor to achieve unitization, the modular armature portion without changing the length specification of the lead wire of the armature in accordance with customer specifications. Can be connected in series or in parallel to realize a large thrust specification, and a modular linear motor made by assembling a plurality of modular armatures can be provided. The present invention can be applied to a table transmission device, a conveying device, or the like for driving a moving table such as an electric component mounting device, a semiconductor or liquid crystal-related manufacturing device, a machine tool, or the like, which requires minute positioning at a high speed and a constant transmission speed.

1 modular armature unit 2 lead connection unit
2a: Lead 3: Neutral Unit
4 pole sensor 5 sub-tooth shape
6: parallel unit 7, 8, 9: connector
11: field 11a: field yoke
11b: magnet 12: armature unit
12c: substrate set 12d: armature base
13 lead protrusion unit 14 neutral point unit
15, 16, 17: connector 20: armature block
20a: tooth 21: armature coil
22: field stimulation 23: York
24: armature base

Claims (13)

In the modular linear motor armature configured by connecting a plurality of armature units made by mounting an armature winding of m phase (m is an integer) consisting of a plurality of coil groups in the thrust direction,
Connection terminals for connecting the leads of the armature windings are disposed at one end and the other end of each armature unit.
The armature unit located at the foremost part of the armature group formed by connecting in the thrust direction is provided with a lead connecting unit for connecting the terminal output of the lead of the armature winding to supply power from an external power source, The armature unit located at the rearmost portion of the armature unit is provided with a neutral point unit for conducting the connection process of the neutral point of the armature winding.
Modular linear motor armature. The method of claim 1,
Each armature unit is wound by intensively winding the armature windings on a plurality of teeth arranged at the same pitch in the longitudinal direction of an armature core made of a magnetic material, and fixed to the armature base. I am constituting a structure
Modular linear motor armature. The method according to claim 1 or 2,
A sub-tooth part is assembled in the lead connection unit and the neutral point unit connected to each armature unit so as to cancel cogging thrust occurring in the teeth at both ends of the armature unit. doing
Modular linear motor armature. The method of claim 3, wherein
The lead portion connecting unit has a built-in pole sensor portion for detecting an initial magnetic pole of the linear motor.
Modular linear motor armature. The method of claim 1,
The armature unit, the lead portion connecting unit, and the neutral point unit have n parallel arrangement configurations (n is an integer of 2 or more),
The lead unit connection unit includes a distribution circuit for dividing the current supplied to the lead unit connection unit from an external power source by n, and a terminal for connecting the armature unit to supply the current divided by the distribution circuit to each armature unit. We are preparing
The said neutral point unit is provided with the connection circuit and terminal which individually connect the termination part of the armature winding of each armature unit, It is characterized by the above-mentioned.
Modular linear motor armature. The method according to claim 1 or 2,
Each armature unit is divided into a plurality of armature blocks
Modular linear motor armature. The method of claim 1,
Each armature unit comprises a coreless armature formed by fixing an armature winding formed by resin molding by arranging a plurality of coil groups at equal intervals in the longitudinal direction of the substrate on the armature base. By
Modular linear motor armature. The method of claim 7, wherein
The thrust direction length of the armature base is an integer multiple of electrical angle 360 °, characterized in that
Modular linear motor armature. The method of claim 7, wherein
The electrical phase arrangement between each armature unit is arranged to have a phase difference of 120 ° or 240 ° of electrical angle.
Modular linear motor armature. The method according to claim 7 or 9,
The wiring of each armature unit is connected by either serial connection or parallel connection.
Modular linear motor armature. The method of claim 1,
Both ends of the armature unit and the end portion of the armature lead portion connecting unit and the neutral point unit has a connection configuration by a connector
Modular linear motor armature. In the modular linear motor,
The modular armature according to any one of claims 1 to 11,
And having a field arranged to face each other through the magnetic gap with the armature and alternately arrange a plurality of permanent magnets of different polarities alternately in a fixed part.
Characterized in that one of the armature and the field as a stator and the other as a mover to relatively drive the field and the armature
Modular linear motor. In the conveying apparatus,
A moving table is driven by using the modular linear motor according to claim 12.
Conveying device.

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