JP5376257B2 - Modular linear motor armature, modular linear motor including the same, and conveying device - Google Patents

Description

  The present invention relates to an AC three-phase linear motor armature that is used in various industrial machines such as, for example, electrical component mounting apparatuses, semiconductor-related apparatuses, and machine tools, and is suitable for driving a linear motion mechanism, and in particular, a lead. The present invention relates to a modular linear motor armature in which a section and a neutral point processing section are separated, a modular linear motor including the same, and a conveying apparatus.

Conventionally, for example, an armature that is used in various industrial machines such as an electrical component mounting apparatus, a semiconductor or liquid crystal manufacturing apparatus, or a machine tool, and is suitable for driving a linear motion mechanism, and in which a plurality of modules are combined. There are known a modular linear motor armature and a linear motor including the above (for example, see Patent Document 1).
The modular linear motor armature described in Patent Document 1 is composed of at least a base end side module, an intermediate module, and a front end side module. By combining these plural modules, mounting and the like can be performed. It is designed to improve workability and productivity by mass production effect.
JP 2001-275336 A (specifications, pages 5-7, FIG. 1)

However, in the conventional modular linear motor armature, the lead wire part and the armature are not separated, so when arranging the modular armature of the same model in parallel in the direction orthogonal to the thrust direction of the linear motor Since there are two lead wires from each end of each armature, there is a problem of troublesome connection processing, cable processing, and the like.
Similarly, when multiple modular armatures are connected in series, the wiring process becomes complicated, so the number of armatures can be made variable as needed and the lead can be separated from the removable modular armature. There has been a demand for a structure in which the wire portion can be freely attached and detached.
Furthermore, in recent years, there has been an increasing need for large-scale thrust of linear motors in all markets including the liquid crystal and semiconductor manufacturing fields. For example, new designs are made for the required thrust of linear motors and the thrust is changed each time. When considering the lineup of the selected models, the number of linear motor armatures will increase as the number of lineups increases. Therefore, under these circumstances, depending on the customer specifications of the linear motor, the length specification of the armature lead wire, in addition to the thrust direction length of the armature, the shape and number of the armature coils, etc. When a combination of multiple modular armatures connected in series or multiple connections in parallel is required, it is necessary to prepare a considerable number of product lineups. There was a problem of affecting the delivery date.
Therefore, there has been a demand for a modular armature with a low product cost while maintaining the realization of a large thrust specification by connecting multiple modular armature parts in series and in parallel.
The present invention has been made in view of such problems, and separates the lead wire portion and the neutral point portion in the modular armature structure of the linear motor. Without changing the length specification of the armature lead wire, it is possible to realize a large thrust specification by connecting multiple modular armature parts in series or in parallel, as well as an inexpensive modular linear motor armature and It is an object of the present invention to provide a modular linear motor and a conveying device including the same.

In order to solve the above problems, the present invention is configured as follows.
The invention of claim 1, m phase comprising a plurality of coil groups of the (m is an integer) multiple of the armature units of substantially identical construction to each other formed by mounting the armature windings of a plurality sequentially thrust Direction Connected to form an armature group, and the armature winding lead of each armature unit is connected to one end and the other end along the thrust direction of each armature unit provided in the armature group the connection terminal to deploy, among the plurality of armature units constituting the front Symbol the armature group, the front end along the said direction of thrust on the armature unit located at the forefront along the thrust direction in part, it connects the terminal output lead of the armature winding, fitted with a lead portion connecting unit for supplying power from an external power source, of the plurality of armature units constituting the armature group, electrostatic located at the end portion along the thrust direction The rear end portion along the direction of thrust on the child unit, is characterized in that mounting the neutral point unit for performing connection processing at the neutral point of the armature winding.
According to a second aspect of the present invention, there is provided a modular linear motor armature according to the first aspect, wherein each of the armature units is arranged at an equal pitch in a longitudinal direction of an armature core made of a magnetic material. The armature winding is wound around the teeth by concentrated winding, and a cored armature structure is formed which is fixed on the armature base.
The invention according to claim 3 is the modular linear motor armature according to claim 1 or 2, wherein the lead connection unit connected to each armature unit and the neutral point unit include A sub-tooth is provided that cancels the cogging thrust of the teeth at both ends along the thrust direction of the armature unit.
According to a fourth aspect of the present invention, in the modular linear motor armature according to any one of the first to third aspects, a pole sensor unit that detects an initial magnetic pole of a linear motor is provided in the lead unit connection unit. Is built-in.
The invention according to claim 5 is the thrust force orthogonal to the thrust direction, wherein a plurality of armature units having substantially the same structure and having m-phase (m is an integer) armature winding composed of a plurality of coil groups are mounted. A plurality of armature groups are sequentially connected in an orthogonal direction, and the armatures of the armature units are arranged at one end and the other end along the thrust direction of each armature unit provided in the armature group. A connection terminal for connecting a lead of the winding is provided, and the armature winding of each armature unit is disposed at a front end along the thrust direction of the plurality of armature units constituting the armature group. The plurality of electric machines constituting the armature group, each of which is connected to the terminal outputs of the leads and mounted with one common lead section connecting unit to the plurality of armature units for supplying power from an external power source The thrust of the child unit One neutral point unit common to the plurality of armature units or the plurality of armatures for connecting the neutral points of the armature winding to the rear side end along the direction A feature is that a plurality of neutral point units individually corresponding to each unit are mounted .
The invention of claim 6 is the modular type linear motor armature according to any one of claims 1 to 5, wherein each of the armature unit is provided with divided into a plurality of armature blocks It is characterized by having.
The invention according to claim 7 is the modular linear motor armature according to any one of claims 1 to 6 , wherein each of the armature units is replaced with a cored armature, and a coreless electric machine is used. It is characterized by comprising children.
According to an eighth aspect of the present invention, in the modular linear motor armature according to the seventh aspect, the length in the thrust direction of the armature unit is an integral multiple of an electrical angle of 360 °.
The invention according to claim 9 is the modular linear motor armature according to claim 7, wherein the electrical phase arrangement between the armature units is arranged so as to have a phase shift of 120 ° or 240 ° in electrical angle. It is characterized by that .
Also, the invention of claim 10 is the modular type linear motor armature according to any one of up to claims 1-9, wherein the armature base ends and the armature lead portion connecting unit and said neutral The end of the point unit is characterized in that it is connected by a connector.
An eleventh aspect of the present invention is the modular armature according to any one of the first to tenth aspects of the present invention, and the armature and the armature that are arranged to face each other via a magnetic gap, and the fixed portion has a polarity alternately. A plurality of different permanent magnets arranged side by side, and either the armature or the field magnet as a stator and the other as a mover, the field and the armature are relatively It is a modular linear motor that is designed to run.
A twelfth aspect of the invention is characterized in that the modular linear motor according to the eleventh aspect of the invention is a transport device that travels a moving table.

According to the first and second aspects of the invention, an armature having a plurality of thrust specifications can be realized with one type of modular armature.
According to the invention described in claim 3, the cogging thrust generated at the front and rear end portions of the linear motor can be reduced.
According to the fourth aspect of the present invention, when the linear motor is turned on, it can be driven immediately.
According to the invention described in claim 5, it is possible to realize an increase in thrust in the width direction with one type of modular armature.
In addition, according to the sixth aspect of the present invention, the core blocks of the armature can be easily connected and arranged, and assembly can be facilitated.
Further, according to the first and seventh aspects of the present invention, an armature having a plurality of thrust specifications can be realized with one type of modular armature.
According to the invention described in claim 8, when a plurality of armatures are connected, fine phase adjustment between the armatures is not required, and phase alignment can be performed only by abutment of the armature base, thereby improving motor performance. Therefore, it is possible to shorten the work time when the motor is incorporated into the machine.
According to the ninth aspect of the present invention, it is possible to reduce a connecting portion of a plurality of armatures, that is, a space that does not contribute to thrust generation.
Further, according to the first and fifth aspects of the invention, it is possible to cope with all specifications such as a series connection when the specification has a current limit and a parallel connection when the specification has a voltage limit.
Further, according to the invention of claim 10 , when the armature is arranged in a multiple connection, the connection structure of the lead portion connection unit and the neutral point unit is shared with the modular armature connection structure, Each unit can be attached and detached freely, and a modular armature with low product cost can be provided.
Further, according to the invention of claim 11, wherein it is possible to obtain a modular type linear motor which has the effect of modular type armature of claim 1 to 10.
Further, according to the invention described in claim 12, it is possible to obtain a transfer device having the effect of the modular linear motor described in claim 11 .

It is a top view which shows the whole structure of the modular type linear motor armature with a core by 1st Example of this invention, and decomposes | disassembles a modular armature unit, a lead part connection unit, and a neutral point unit. It is a top view which shows the example which connected two modular armature units of 1st Example in series. FIG. 6 is a modified example of the lead portion connecting unit in the first embodiment, where (a) shows the case of lead lateral placement, and (b) shows the case of lead upward placement. FIG. 9 is a plan view of a parallel lead unit connecting unit according to a second embodiment of the present invention. FIG. 2 shows an overall configuration of a modular cored linear motor armature to which a parallel type lead portion connecting unit according to a second embodiment is applied, in which (a) is an exploded plan view, and (b) is an exploded view of them. It is the combined top view. It is the example which connected two modular type coreless linear motor armatures by 3rd Example of this invention in series, Comprising: (a) is the front view and side view which showed the outline, (b) is each electric machine The side view which decomposed | disassembled the subunit | mobile_unit, (c) is the side view which connected each armature unit. It is the example which connected two modular type coreless linear motor armatures which show the 4th example of the present invention in series, (a) is the side view, and (b) is the side view. It is an example of the modular type coreless linear motor armature to which the parallel-type lead part connection unit which shows 5th Example of this invention is applied. It is a sectional side view of a general modular linear motor with a core.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Modular armature unit 2 Lead part connection unit 2a Lead 3 Neutral point unit 4 Pole sensor 5 Sub teeth 6 Parallel unit 7, 8, 9 Connector 11 Field 11a Field yoke 11b Magnet 12 Armature unit 12c Kibanumi 12d Armature Base 13 Lead-out unit 14 Neutral point unit 15, 16, 17 Connector 20 Armature block 20a Teeth 21 Armature coil 22 Field magnetic pole 23 Yoke 24 Armature base

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a plan view showing the entire configuration of a modular cored linear motor armature according to a first embodiment of the present invention, in which a modular armature unit, a lead connection unit, and a neutral point unit are disassembled. is there.
In FIG. 1, reference numeral 1 denotes a modular armature unit, in which an armature core (not shown) composed of a plurality of coil groups is mounted on an armature core (not shown), and before and after the unit. The end has a connector structure for enabling power supply to the armature.
Also, 2 is a lead connection unit, 3 is a neutral point unit, and 4 is a pole sensor. Reference numeral 5 denotes a sub-tooth, and the lead portion connection unit 2 and the neutral point unit 3 have a connector structure like the modular armature 1.
The features of the present invention are different from those of the prior art as follows.
That is, in FIG. 1, connection terminals (connectors 7) that connect the leads of the armature winding are provided at both ends of the armature unit 1, and the armature winding is provided at one end of the armature unit 1. In order to connect the terminal output of the lead of the wire and supply power from an external power source, a lead connection unit 2 is provided, and the other end of the armature unit 1 is connected to the neutral point of the armature winding The neutral point unit 3 is provided, and the lead portion connecting unit 2 and the neutral point unit 3 are separated from the modular armature 1. Then, the end portions of the lead portion connecting unit 2 and the neutral point unit 3 are connected with the connectors 8 and 9 in the same manner as the end portions of the armature unit 1.
Here, FIG. 9 shows a side sectional view of a general modular linear motor with a core.
The interior of the armature unit 1 used in this embodiment (FIG. 1) is basically the same as the linear motor of FIG. 9, and in FIG. 9, the armature unit 1 is divided into a plurality of armature blocks 20 and arranged in the direction of thrust. Thus, a cored armature structure formed on the armature base 24 is configured. A block core of each armature block 20 includes a plurality of teeth 20a having an integral multiple of the number of phases arranged at an equal pitch in the longitudinal direction of the armature core made of a magnetic material, and an armature concentratedly wound around the teeth 20a. A coil 21 is provided. Such an armature unit 1 is disposed opposite to a stator 21 including a yoke 23 and a field magnetic pole 22 arranged on the yoke 23 at an equal pitch through a magnetic gap.
Further, as shown in FIG. 1, in consideration of the influence when the armature unit 1 is connected and integrated with the connector (7, 8, 9) to the lead portion connecting unit 2 and the neutral point unit 3, A sub-tooth 5 for canceling the cogging thrust generated at the teeth at both ends of the armature unit 1 is incorporated.
In FIG. 1, the lead connection unit 2 has a built-in pole sensor 4 for detecting the initial magnetic pole of the linear motor. If no pole sensor is built in, a magnetic pole detection operation by software is required.

FIG. 2 is a plan view showing an example in which two modular armature units of the first embodiment are connected in series.
In FIG. 1, an example of one modular armature (armature unit 1) has been described, but in FIG. 2, a plurality (two in this case) of the armature units 1 are sequentially connected in the direction of thrust. A modular linear motor armature constructed as described above will be described.
That is, in FIG. 2, each modular armature unit 1 is provided with a connection terminal (connector 7) for connecting the lead of the armature winding, and the armature group formed by multiple connection in the thrust direction. The armature unit 1 located at the foremost part is provided with a lead connection unit 2 for connecting the terminal output of the lead of the armature winding and supplying power from an external power source, and the last part of the armature group The armature unit 1 located in the center is provided with a neutral point unit 3 for connecting the neutral points of the armature winding, and the lead portion connection unit 2 and the neutral point unit 3 are connected to the modular armature. The structure is separated from 1.
With this configuration, two modular armatures are connected in series, a lead connection unit is connected to the front end, and a neutral point unit is connected to the rear, thereby realizing a linear motor with double thrust. be able to.

  Next, the relationship between the increase in thrust and the number of components when two modular armatures in the first embodiment are connected in series can be basically represented by the relationship shown in Table 1 below.

  As for the operation, a moving magnetic field can be generated by applying m-phase alternating current to the armature winding lead in the armature unit shown in FIG. When combined, the motor operates as a synchronous motor. When a field provided with a conductive material instead of a permanent magnet field is combined with the armature unit, the motor can operate as an induction motor.

Therefore, in the first embodiment of the present invention, the lead connection unit 2 for supplying power from an external power source is provided at one end of the armature unit, and the neutral point of the armature winding is connected to the other end of the armature unit 1. A neutral point unit 3 to be processed is provided, and the lead portion connection unit 2 and the neutral point unit 3 are separated from the modular armature 1, and the armature unit 1, the lead portion connection unit 2, and the neutral point unit Since each end of 3 is connected by a connector, when a plurality of modular armatures need to be connected in multiple connection, the connection structure of the lead connection unit 2 and the neutral point unit 3 is the connection structure of the modular armature 1 Because of the common use of parts, multiple thrust specification electric machines that can increase thrust variation using one type of modular armature Can be realized, moreover freely attached and detached of each unit, it is possible to product cost to provide a cheap modular type armature.
Further, since the sub teeth are incorporated in the lead portion connecting unit and the neutral point unit, the cogging thrust generated at the front and rear end portions of the linear motor can be offset and reduced.
In addition, since the lead connection unit has a built-in pole sensor unit that detects the initial magnetic pole of the linear motor, it can be immediately driven when the linear motor is turned on.

FIGS. 3A and 3B show a modified embodiment of the lead portion connecting unit in the first embodiment, wherein FIG. 3A shows the case of lead lateral placement, and FIG. 3B shows the case of lead lead up.
In FIG. 3, the lead connection unit 2 uses three types of lead-out in which the lead-out direction is the thrust direction of the linear motor, or lateral or vertical out in a direction perpendicular to the thrust direction of the linear motor. Thus, since the lead extraction direction of the armature unit can be changed flexibly, space saving can be achieved without complicating the wire connection process and the cable process.

Next, a second embodiment of the present invention will be described.
FIG. 4 is a plan view of a parallel type lead portion connecting unit according to a second embodiment of the present invention, and FIG. 5 is a modular type linear with a core to which the parallel type lead portion connecting unit according to the second embodiment is applied. 1 shows an overall configuration of a motor armature, in which (a) is a plan view in which they are disassembled, and (b) is a plan view in which they are combined.
The second embodiment is different from the first embodiment in that the armature unit 1, the lead portion connection unit 2, and the neutral point unit 3 are arranged in parallel (n = 2 in this example), and the lead portion connection. The unit 2 supplies to each armature unit 1 a distribution circuit (not shown) that divides current supplied to the lead connection unit 2 from an external power supply (not shown) into n, and a current divided by the distribution circuit (not shown). As shown, a terminal connected to each armature unit 1 is provided, and the neutral point unit 3 includes a connection circuit and a terminal (not shown) that individually connect the end portions of the armature windings of each armature unit 1. It is the point which has the composition which provided.
As in the first embodiment, the second embodiment has a structure in which the lead portion and the modular armature unit are separated. When the linear motor thrust is increased, the parts can be shared. .
With this configuration, two modular armature units are connected in parallel, the lead end parallel unit 6 is connected to the front end, and the neutral point unit is connected to the rear end, so that the linear motor has double thrust. Can be realized.

  Next, the relationship between the modular armature thrust increase and the number of parts when two modular armatures in the second embodiment are connected in parallel is as follows:

  Therefore, the second embodiment of the present invention can achieve an increase in thrust in a direction orthogonal to the thrust direction, that is, a so-called width direction of the modular armature, with one type of modular armature.

  Generally, two types of thrust expansion methods can be taken in parallel and in series with one type of modular armature unit, so that productivity can be significantly improved, such as product inventory management and parts inventory management of linear motors being facilitated.

FIG. 6 is an example in which two modular coreless linear motor armatures according to a third embodiment of the present invention are connected in series, and (a) is a front view and a side view schematically showing the same. ) Is a side view in which each armature unit is disassembled, and (c) is a side view in which each armature unit is connected.
In FIG. 6, reference numeral 11 denotes a field magnet, and a magnet 11 b attached at equal intervals so that different poles face each other through a gap and alternately change polarity inside a U-shaped field yoke 11 a. Consists of
Reference numeral 12 denotes an armature unit, and the armature unit 12 has an armature winding formed by resin molding by arranging a plurality of coil groups in the longitudinal direction of the board as a board kumi 12c, and the board kumi 12c is used as an armature. It is fixed on the base 12d to constitute a coreless modular linear motor armature. Then, the front and rear ends of the armature base 12d have a structure having a connector 15, and a plurality of armature units 12 can be connected to each other. A lead-out unit 13 has a connector 16 and is connected to the front end connector 15 of the armature base 12d. Reference numeral 14 denotes a neutral point unit having a connector 17, which is connected to the rear end connector 15 of the armature base 12d and performs neutral point connection processing of the armature winding.
With such a structure, all the armatures can be energized through the lead-out unit 13 regardless of the number of the armatures 2, and all thrust specifications can be handled.
In addition, as shown in FIG. 6, when the thrust direction length of the armature 2 is represented by an electrical angle, it is set to be an integral multiple of 360 °.
As a result, when connecting a plurality of armature units 12, it is possible to adjust the phase between the armatures only by abutting the armature base 12d, so that the work time for incorporating the motor into the machine can be shortened. In addition, when connecting and using a plurality of conventional armatures, it was necessary to align the armatures at a fixed distance, so there was a disadvantage that it took time to incorporate the motor into the machine. Solves the problems of the prior art.

FIG. 7 is an example in which two modular coreless linear motor armatures according to a fourth embodiment of the present invention are connected in series, where (a) is a side view thereof and (b) is a side view thereof. .
When the armature has a modular configuration, an armature coil cannot be arranged at the connecting portion of each armature. Therefore, as shown in FIG. 7A, when the armature length is an integral multiple of an electrical angle of 360 °, thrust The space that does not contribute to the generation becomes large, and the motor constant density becomes small when viewed as a whole module. On the other hand, as shown in FIG. 7B, when the coil arrangement is shifted by 120 ° or 240 ° for each armature, the connecting portion of each armature, that is, the space that does not contribute to thrust generation can be suppressed as much as possible. Therefore, it is possible to prevent a reduction in motor constant density as seen in the entire module.

FIG. 8 shows an example of a modular coreless linear motor armature to which a parallel lead unit connecting unit according to a fifth embodiment of the present invention is applied.
FIGS. 6 and 7 are examples in which a plurality of armatures are connected in series. FIG. 8A is an exploded side view of the armature unit 12, the lead-out unit 13, and the neutral point unit 14. (b) is a plan view of (a), (c) is a side view in which the units of (a) are connected, and (d) is a plan view of (c).
By adjusting the number of armature modules, it is possible to cope with all thrust specifications, but usually other specifications such as voltage, current, or speed are often added. For example, select a series connection for current specifications (○ A or less), and select a parallel connection for voltage specifications (○ V or less) or speed specifications (maximum speed ○ m / s). Thus, a single type of module can support a wide range of specifications.
Therefore, according to Example 3-5 of the present invention, in a coreless linear motor having features of magnetic attraction force-less and cogging-less and capable of low-speed ripple driving as compared with a cored linear motor, several thousand to several tens of thousands N It is possible to cope with all the thrust specifications by connecting a plurality of one type of armature modules in series or in parallel.
Moreover, since the number of parts can be reduced to a minimum by sharing parts, the motor can be manufactured at low cost and can be provided to customers at low cost.

  According to the present invention, the lead wire portion and the neutral point portion in the modular armature structure of the linear motor are separated and unitized to change the length specification of the armature lead wire according to customer specifications. Therefore, it is possible to provide a modular linear motor combining a plurality of modular armatures that can realize a large thrust specification by connecting multiple modular armature parts in series or in parallel. , Machine tools capable of high-precision machining, electrical component mounting devices that require high-speed micropositioning and constant feed speeds, table feed devices that transport moving tables such as semiconductor or liquid crystal manufacturing devices or machine tools, and transport devices Applicable.

Claims (12)

M phase consisting of a plurality of coil groups (m is an integer) a plurality of armature units of substantially identical construction to each other formed by mounting the armature windings of a plurality sequentially connected to the armature groups thrust Direction Configure
A connection terminal for connecting a lead of the armature winding of each armature unit to one end and the other end along the thrust direction in each armature unit provided in the armature group ,
Among the plurality of armature units constituting the front Symbol the armature group, the front end portion along the direction of thrust on the armature unit located at the forefront along the thrust direction, the armature winding Connect the lead terminal output and attach the lead connection unit to supply power from the external power supply .
Among the plurality of armature units constituting the armature unit, the rear end portion along the direction of thrust on the armature unit located at the end portion along the thrust direction, within the armature winding modular type linear motor armature, characterized in that mounting the neutral point unit for performing connection processing sexual point.   Each armature unit winds the armature winding by concentrated winding around a plurality of teeth arranged at an equal pitch in the longitudinal direction of the armature core made of a magnetic material, and on the armature base. 2. A modular linear motor armature according to claim 1, wherein a fixed armature structure with a core is formed. The lead connection unit and the neutral point unit connected to each of the armature units are provided with sub teeth that cancel out cogging thrust of the teeth at both ends along the thrust direction of the armature unit. The modular linear motor armature according to claim 1, wherein the modular linear motor armature is provided.   4. The modular linear motor armature according to claim 1, wherein a pole sensor unit that detects an initial magnetic pole of a linear motor is built in the lead unit connection unit. 5. A plurality of armature units having substantially the same structure and having m-phase (m is an integer) armature winding composed of a plurality of coil groups are sequentially connected in a thrust orthogonal direction perpendicular to the thrust direction. Make up armature group,
A connection terminal for connecting a lead of the armature winding of each armature unit to one end and the other end along the thrust direction in each armature unit provided in the armature group,
A terminal output of a lead of the armature winding of each armature unit is connected to a front end along the thrust direction of the plurality of armature units constituting the armature group, and power is supplied from an external power source. Mounting one lead connection unit common to the plurality of armature units,
In the plurality of armature units for connecting the neutral points of the armature windings to rear end portions along the thrust direction of the plurality of armature units constituting the armature group. A common neutral point unit or a plurality of neutral point units individually corresponding to the plurality of armature units are mounted.
A modular linear motor armature characterized by the above. 6. The modular linear motor armature according to claim 1, wherein each of the armature units has a configuration divided into a plurality of armature blocks. The modular linear motor armature according to any one of claims 1 to 6, wherein each of the armature units constitutes a coreless armature instead of a cored armature.   The modular linear motor armature according to claim 7, wherein a length in the thrust direction of the armature unit is an integral multiple of an electrical angle of 360 °.   8. The modular linear motor armature according to claim 7, wherein the electric phase arrangement between the armature units is arranged so as to have a phase shift of 120 [deg.] Or 240 [deg.]. The modular according to any one of claims 1 to 9 , wherein both ends of the armature unit, the armature lead part connecting unit, and the end of the neutral point unit are connected by a connector. Linear motor armature. The modular armature according to any one of claims 1 to 10 ,
The armature and a magnetic field that are arranged opposite to each other via a magnetic gap and arranged with a plurality of permanent magnets having different polarities alternately arranged next to each other,
A modular linear motor characterized in that either the armature or the field is used as a stator and the other is used as a mover, so that the field and the armature travel relatively. A transporting apparatus that travels a moving table using the modular linear motor according to claim 11 .

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